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WO2013019009A2 - Appareil de raccordement de tuyau - Google Patents

Appareil de raccordement de tuyau Download PDF

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Publication number
WO2013019009A2
WO2013019009A2 PCT/KR2012/005878 KR2012005878W WO2013019009A2 WO 2013019009 A2 WO2013019009 A2 WO 2013019009A2 KR 2012005878 W KR2012005878 W KR 2012005878W WO 2013019009 A2 WO2013019009 A2 WO 2013019009A2
Authority
WO
WIPO (PCT)
Prior art keywords
ring
centering
centering guide
flange
guide ring
Prior art date
Application number
PCT/KR2012/005878
Other languages
English (en)
Korean (ko)
Other versions
WO2013019009A3 (fr
Inventor
한찬희
Original Assignee
주식회사 나린테크
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 주식회사 나린테크 filed Critical 주식회사 나린테크
Publication of WO2013019009A2 publication Critical patent/WO2013019009A2/fr
Publication of WO2013019009A3 publication Critical patent/WO2013019009A3/fr

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L23/00—Flanged joints
    • F16L23/16—Flanged joints characterised by the sealing means
    • F16L23/18—Flanged joints characterised by the sealing means the sealing means being rings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L23/00—Flanged joints
    • F16L23/04—Flanged joints the flanges being connected by members tensioned in the radial plane
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L23/00—Flanged joints
    • F16L23/04—Flanged joints the flanges being connected by members tensioned in the radial plane
    • F16L23/06—Flanged joints the flanges being connected by members tensioned in the radial plane connected by toggle-action levers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L23/00—Flanged joints
    • F16L23/04—Flanged joints the flanges being connected by members tensioned in the radial plane
    • F16L23/08—Flanged joints the flanges being connected by members tensioned in the radial plane connection by tangentially arranged pin and nut
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L23/00—Flanged joints
    • F16L23/16—Flanged joints characterised by the sealing means

Definitions

  • One embodiment of the present invention relates to a pipe connecting device.
  • a semiconductor device is manufactured by sequentially performing a series of unit processes for film formation, pattern formation, metal wiring formation, and the like. These processes require precise control of the process atmosphere such as pressure and temperature in order to improve the quality and yield of semiconductor devices. Among these, the internal pressure of the process chamber is the one that most influences the process efficiency.
  • the inside of the semiconductor device must be formed in a vacuum state so that the process gases do not deteriorate or react with air.
  • the vacuum pump discharges the reaction by-products or unreacted gases generated by the process gases to the outside during processing, and after the process is completed. It is also used to discharge the process gas remaining in the process gas supply line.
  • the inside of the process chamber is formed in a vacuum state before the semiconductor substrate is introduced into the process chamber, and the semiconductor substrate is inserted into the process chamber formed in the vacuum state.
  • a vacuum pump is used to build a vacuum inside the process chamber.
  • the vacuum pump is also used to discharge the reaction by-products and unreacted gases generated when the film is deposited on the semiconductor substrate or the deposited film is etched to the outside.
  • a highly used vacuum pump is connected to the process chamber via a vacuum line.
  • the vacuum pump and the process chamber are disposed at a considerable distance from each other, so the vacuum line is not configured as a pipe. Therefore, the vacuum line arranges several to several tens of pipes in series, and connects between them through piping connection devices, such as centering.
  • a pipe connecting device includes a flange 1a, 2a, and a flange having an O-ring 4, a center ring 3, an O-ring 4, and a center ring 3 interposed therebetween.
  • a clamp 5 surrounding the periphery of 1a, 2a.
  • the center ring 3 is interposed between the first pipe 1 and the second pipe 2 of the vacuum line with the O-ring 4 arranged therein.
  • Flanges 1a and 2a are disposed at the shortest ends of the first pipe 1 and the second pipe 2 with the center ring 3 interposed therebetween, and clamps around the O-ring 4 and the flanges 1a and 2a.
  • (5) is arrange
  • the air inside the process chamber but also the reaction by-product or unreacted gas generated during the process are discharged through the vacuum line.
  • a viton o-ring made of an elastic material such as fluorine rubber may be used as the o-ring 4, and the viton o-ring may be oil, fuel oil, lubricant. It has excellent resistance to aliphatic hydrocarbon solvents and has excellent properties such as oxygen resistance, sun resistance, gas permeability, weather resistance, ozone resistance, and aging resistance.
  • these Viton O-rings are relatively poor in heat resistance and chemical resistance, and are corroded or hardened when exposed to fluorine (F) -based strong corrosive gases (Gas) or when exposed to high temperatures of 200 ° C or higher, resulting in gas leakage. It breaks down and causes particles, which causes a lot of problems in process defects and equipment operation.
  • an O-ring material is used for perfluoro-based fluorine rubber having excellent heat resistance and chemical resistance.
  • the use of a general viton O-ring is corroded and the use thereof is limited, and thus a purple-based O-ring is used.
  • O-rings (4) installed in vacuum and exhaust pipes are corroded due to leakage of process gas while using strong corrosive gases such as fluorine-containing NF3, C3F8, CF4 as chamber clean gas in semiconductor and LCD processes. Many process problems arise.
  • the material of the centering 3 and the flanges 1a and 2a constituting the conventional pipe connecting device is made of a material having a metallic property, a complete space is not provided and a constant space B exists.
  • the corrosive gas penetrates into the space B and the O-ring 4 is corroded for a long time, causing problems such as poor vacuum and gas leakage.
  • the degree of vacuum in the pipes without the installation of the O-ring, which previously caused the gas leakage is sealed. It is an object of the present invention to provide a pipe connecting device that can increase the pressure and prevent gas leakage.
  • an embodiment of the present invention is to arrange the annular O ring and the center ring in sequence, and to install the centering guide ring of elastic surrounding the center ring to seal the two pipes first, and to place the O-ring on the outer side of the center ring It is an object of the present invention to provide a pipe connecting device that can increase the degree of vacuum in a pipe and prevent gas leakage by sealing with a sealant.
  • an embodiment of the present invention is to provide a pipe connecting device that can increase the durability of the O-ring in the pipe by configuring the centering guide ring surrounding the center ring made of Teflon material having heat resistance and chemical resistance.
  • an embodiment of the present invention is to provide a pipe connecting device that can reduce the manufacturing cost by using a Viton O-ring instead of an expensive purple-based material as the O-ring material.
  • an embodiment of the present invention is to provide a pipe connecting device that can improve the product yield and equipment operation rate by preventing a process failure due to impurity particles generated during the curing and corrosion of the O-ring.
  • a pipe connecting device includes: a pipe connecting device connecting two pipes, the ring including: an annular centering disposed at a coupling area between the two pipes; A centering guide ring provided to surround both sides of the radial side of the centering; A flange coupled around the shortest ends of the two pipes and disposed on both sides of the centering and centering guide ring, respectively; And a clamping device disposed around the flange to compress and fix the flange to connect and seal the two pipes.
  • the center ring is disposed in a radially side region between the inner wall of the flange and formed to be inclined so that both sides adjacent to the inner wall of the flange are symmetric with each other, and is formed to extend outward in the radial direction from the center of the ring body. It may include a protrusion. Both side surfaces of the ring body portion and the inner wall of the flange adjacent thereto are spaced at a predetermined interval, and the centering guide ring is disposed at the predetermined interval. Upper regions of both side surfaces of the ring body portion and upper regions of the inner wall of the centering guide ring adjacent thereto are spaced at predetermined intervals.
  • Both side surfaces of the ring body portion and the inner wall of the centering guide ring adjacent thereto are arranged to be closer to each other from the radially outer side to the inner side.
  • Recesses are formed on the inner wall of the flange adjacent to the ring body, and both side surfaces of the ring body and the centering guide ring are disposed in the recess.
  • the ring body portion is formed such that the width of one surface on the radial side is larger than the width of the other surface on the radially outer side, which is the surface opposite to the one surface.
  • a curved surface corresponding to the shape of the outer circumferential surface of the O-ring is formed on the outer surface of the protruding portion in contact with the O-ring.
  • the centering is made of any one of metal materials such as aluminum, stainless steel and brass, or nonmetal materials such as engineering plastics and reinforced plastics.
  • the centering guide ring is made of rubber or synthetic resin of elastic material.
  • the centering guide ring is formed of at least one of rubber or synthetic resin containing teflon, silicon, and fluorine.
  • the centering guide ring may have a U shape.
  • the centering guide ring may include two unit centering guide rings disposed on both sides of the ring body portion in a radial direction so as to be symmetrical with respect to the ring body portion.
  • the unit centering guide ring is formed to surround both side surfaces in the radial direction of the ring body and at least one side surface adjacent to the both side surfaces.
  • the centering ring and the centering guide ring may be integrally formed. O-rings disposed radially outward with respect to the centering.
  • the pipe connecting device may further include a spacer ring disposed radially outward with respect to the O-ring and provided to contact the O-ring.
  • a curved surface corresponding to the shape of the outer circumferential surface of the O-ring is formed at an end portion of the center ring in contact with the O-ring.
  • the pipe connecting apparatus since the two pipes are sealed by arranging an annular centering and providing an elastic centering guide ring surrounding the centering, it has conventionally acted as a cause of gas leakage.
  • the degree of vacuum in the pipe can be increased without installing the O-ring, and gas leakage can be prevented.
  • the annular O-ring and centering are arranged in sequence, and by installing an elastic centering guide ring surrounding the centering to seal the two pipes first, and outside the centering Since the O-ring is placed on the side and double-sealed, the degree of vacuum in the pipe can be increased, and gas leakage can be prevented.
  • the pipe connecting device by configuring the centering guide ring surrounding the center ring made of Teflon material having heat resistance and chemical resistance, it is possible to increase the durability of the O-ring in the pipe.
  • the pipe connection device according to an embodiment of the present invention, it is possible to reduce the manufacturing cost by using the Viton O-ring instead of expensive purple-based material as the O-ring material.
  • the pipe connecting device according to an embodiment of the present invention, it is possible to prevent the process failure by the impurity particles generated during the curing and corrosion of the O-ring to improve the product yield and equipment operation rate.
  • FIG. 1 is a perspective view showing a pipe connection device according to an embodiment of the present invention.
  • FIG. 2 and 3 are cross-sectional views showing the operation of the pipe connecting apparatus viewed in the state taken along the line II ′ of FIG. 1.
  • Figure 4 is a side view showing the centering, centering guide ring, O-ring, spacer ring of the pipe connection device according to an embodiment of the present invention.
  • FIG. 5 is a top view illustrating a centering, a centering guide ring, an O-ring, and a spacer ring of a pipe connection device according to an exemplary embodiment of the present invention.
  • FIG. 6 is a cross-sectional view illustrating centering, centering guide ring, O-ring, and spacer ring of a pipe connecting device in a state of cutting II-II ′ of FIG. 5.
  • FIG. 7 and 8 is a view showing a state before and after coupling the pipe connecting device according to an embodiment of the present invention with other flanges and clamping device.
  • FIGS. 9 and 10 are views showing a state before and after coupling the pipe connecting device according to an embodiment of the present invention with another flange and clamping device.
  • 11 and 12 are views showing a state before and after coupling the pipe connecting device according to an embodiment of the present invention with another flange and clamping device.
  • FIG. 13 is a cross-sectional view showing a state in which a pipe connecting device according to an embodiment of the present invention is coupled to the other ring and the clamping device O-ring, centering and centering guide ring.
  • FIG 14 is a cross-sectional view showing another example of the centering and the centering guide ring in the pipe connecting apparatus according to an embodiment of the present invention.
  • 15 and 16 are cross-sectional views showing another example of the centering and the centering guide of the pipe connection device according to an embodiment of the present invention.
  • FIG. 17 is a cross-sectional view illustrating a pipe connecting device according to another embodiment of the present invention in which a centering and a centering guide ring are combined with a flange and a clamping device without an O-ring.
  • FIG. 18 is a cross-sectional view illustrating a pipe connection device according to another embodiment of the present invention in which a centering ring and a centering guide ring are combined with another flange and a clamping device without an O-ring.
  • 19 is a cross-sectional view showing another example of the centering guide ring in the pipe connecting apparatus according to another embodiment of the present invention.
  • 20 is a cross-sectional view showing another example of centering in a pipe connecting apparatus according to another embodiment of the present invention.
  • 21 is a cross-sectional view showing a pipe connecting apparatus according to the prior art.
  • FIG. 1 is a perspective view showing a pipe connecting device according to an embodiment of the present invention
  • Figures 2 and 3 is a cross-sectional view showing the operation of the pipe connecting device viewed in the state taken along the line II 'of FIG.
  • Figure 5 is a centering, centering guide ring, O-ring, of the pipe connection device according to an embodiment of the present invention
  • 6 is a cross-sectional view showing a center ring, a centering guide ring, an o-ring, and a spacer ring of a pipe connecting device in a state of cutting II-II 'of FIG. 5
  • FIGS. 7 and 8 are views of the present invention.
  • FIG. 9 is a view illustrating a pipe connecting device according to an embodiment before and after coupling with another flange and a clamping device
  • FIGS. 9 and 10 illustrate a pipe connecting device having another flange and a clamp according to an embodiment of the present invention.
  • 11 and 12 are views showing a state before and after coupling with a ping device
  • a pipe connecting device according to an embodiment of the present invention shows a state before and after coupling with another flange and clamping device
  • the pipe connecting device according to the embodiment is a cross-sectional view showing a state in which the O-ring, the centering and the centering guide ring are combined with another flange and the clamping device.
  • the pipe connection device is an O-ring 130, center ring 110, centering guide ring 120, flange 20 and clamping device 30 Including, it is disposed in the coupling region between the two pipes (1, 2) to connect the two pipes (1, 2).
  • the O-ring 130 is formed of perfluor, viton, or the like to seal the coupling area of the two pipes 1 and 2.
  • the O-ring 130 generally has a low compression set ratio and is substantially irrelevant to any material made of excellent wear resistance.
  • the O-ring 130 in the prior art due to the corrosive gas is penetrated between the gap between the centering and the flange, the O-ring was inevitably corroded or damaged. As a result, the replacement cycle of the O-ring is faster, and since the process cannot be performed during the O-ring replacement operation, the yield decreases and the productivity is inevitably reduced, thereby causing a process loss.
  • the O-ring 130 is The primary role is to perform, but to prevent the O-ring 130 is exposed to corrosive gas to prevent the O-ring 130 from being corroded or damaged.
  • the O-ring 130 has a cross-sectional spherical shape as shown in Figure 6a, after being coupled to the gap of the inner wall of the flange 20, the clamping device 30, such as bolts, nuts or clamps When the two pipes 1 and 2 are coupled to each other, as shown in FIG. 6B, the area is sealed while being almost in an egg shape.
  • the present invention may further include a spacer ring 140 which is provided radially outward to contact the O-ring 130.
  • a spacer ring 140 which is provided radially outward to contact the O-ring 130.
  • a curved surface (141 of FIG. 6A) corresponding to the shape of the outer circumferential surface of the O-ring 130 is formed to contact the O-ring 130. That is, the curved surface 141 is formed almost similar to the curvature of the O-ring 130.
  • the pipe connecting device does not have a spacer ring on the radially outer side of the o-ring 131, and only the o-ring 131, the center ring 116, and the centering guide ring 122 are removed from the pipe. May also prevent gas leaks.
  • the center ring 110 is provided radially inward from the O-ring 130. That is, the center ring 110 is disposed radially innermost with respect to the O ring 130. In other words, the center ring 110 is provided between the inner walls of the body 210 of the flange 20 of the two pipes 1, 2.
  • the center ring 110 may be made of any one of metal materials such as aluminum, stainless steel, brass, and the like, and durable nonmetal materials such as engineering plastics and reinforced plastics.
  • the manufacturing method of the centering 110 may be applied to any of casting, machining or injection molding.
  • the center ring 110 includes a ring body 111 and a protrusion 112.
  • the ring body portion 111 is formed like a flat plate having a predetermined thickness, and is disposed in a radially side region between inner walls of the body 210 of the flange 20 so that the body 210 of the flange 20 is formed.
  • the inner wall and adjacent side surfaces 111a are formed to be inclined to be symmetric with each other.
  • both side surfaces 111a of the ring body 111 may be designed not to be inclined as shown in FIG. 14, in this case, a centering guide ring adjacent to both side surfaces 111a of the ring body 111. It is preferable that the inner wall 121a of the 121 is inclined.
  • both side surfaces 111a of the ring body 111 and inner walls of the body 210 of the flange 20 adjacent thereto are spaced at predetermined intervals.
  • a recess 220 is formed on an inner wall of the body 210 of the flange 20 adjacent to the ring body 111.
  • a predetermined spacing is formed between both side surfaces 111a of the ring body 111 and both side walls of the recess 220. This is to allow the centering guide ring 120 to be disposed between both side surfaces 111a of the ring body 111 and both side walls of the recess 220.
  • Both recesses 111a and the centering guide ring 120 of the ring body 111 are disposed in the recess 220.
  • the depth (h2 of FIG. 8) of the depression 220 is substantially the same thickness (h1 of FIG. 8) of the lower surface of the ring body 111 and the centering guide ring 120. Therefore, when the flange 20 is compressed by the clamping device 30, the inner wall of the body 210 of the flange 20 and the ring body 111 are in close contact, thereby preventing gas leakage from the pipe. It becomes possible.
  • the ring body portion 111 may be prevented from being distorted or distorted from the recess 220 by the inner wall of the body 210 of the flange 20 and the heat deformation of the ring body portion 111. do.
  • the present invention is not limited to the thickness of the recess 220, and may be appropriately changed and selected at design time.
  • the ring body 111 has a width (W2 in Fig. 7) on one side of the radial side is formed larger than the width (W1 in Fig. 7) on the other side of the radially outer side that is opposite to the one surface. . That is, the width (W1 of FIG. 7) of the upper surface of the ring body portion 111 is formed to be narrower than the width (W2 of FIG. 7) of the lower surface.
  • the ring body 111 serves as a support so that the O-ring 130 disposed radially outward is not sucked into the pipe when the two pipes 1 and 2 are maintained in a vacuum state. In this case, the central axis of the two pipes on both sides is prevented from shifting. Furthermore, by providing the centering guide ring 120 in the gap space between the both sides (111a) of the ring body portion 111 and the inner wall of the depression 220, the flow inside the two pipes (1, 2) The gas can be completely blocked to go to the O-ring 130 to enable the sealing.
  • the protrusion 112 extends radially outward from the center of the ring body 111 to be inserted into a gap between the flanges 20 so as to contact the O-ring 130.
  • a curved surface 112a corresponding to the shape of the outer circumferential surface of the O-ring 130 is formed to contact the O-ring 130. That is, the curved surface 112a is formed almost similar to the curvature of the O-ring 130.
  • the center ring 110 and the O-ring 130 are used at the same time as an example.
  • the present invention is not limited thereto and only one center ring 110 may be used depending on a user's selection or a device situation. May be used. A case in which only one of the centering 110 is used will be described in more detail with reference to FIGS. 17 and 18.
  • the centering guide ring 120 has a U-shape, and is provided to surround one side and both sides of the ring body portion 111 in the radial direction. In addition, both side regions of the centering guide ring 120 are disposed within predetermined intervals of both side surfaces 111a of the ring body 111 and an inner wall of the body 210 of the flange 20 adjacent thereto.
  • the centering guide ring 120 is made of an elastic material rubber or synthetic resin, and is pressed together with the flange 20 by the clamping device 30 so that both sides 111a of the ring body 111 and adjacent flanges ( The predetermined interval between the inner walls of the body 210 of the 20 is to be sealed.
  • the centering guide ring 120 may be formed of at least one of rubber or synthetic resin including Teflon, silicon, and fluorine (F).
  • Teflon is a stable compound formed by a strong chemical bond of fluorine and carbon, and has excellent properties such as chemical inertness, heat resistance, non-adhesiveness, insulation, and the like.
  • the centering guide ring 120 is produced through a processing method such as casting or machining with a Teflon material as a raw material.
  • the centering guide ring 120 is formed such that an upper region of its inner wall and upper regions of both side surfaces 111a of the ring body portion 111 adjacent thereto are spaced at predetermined intervals. That is, the inner wall 120a of the centering guide ring 120 is formed substantially vertically and spaced apart from both inclined side surfaces 111a of the ring body 111. However, the outer wall 120b of the centering guide ring 120 is formed to be inclined from the inner side to the outer side with respect to the centering in order to secure a space in which the body 210 of the flange 20 is pressed.
  • both side surfaces 111a of the ring body 111 and inner walls of the centering guide ring 120 adjacent thereto are arranged to be closer to each other from the radially outer side to the inner side.
  • the centering guide ring 120 is formed in the radially innermost surface, that is, the width of the lower surface (D1 of Figure 7) is formed smaller than the upper region of the inner wall, that is, the width of the outer diameter of the upper surface (D2 of Figure 7) have.
  • the centering guide ring 120 configured as described above is squeezed in the direction of the centering 110 when pressure is applied to the flange 20 by the clamp device 30, and the upper region of the inner wall of the centering guide ring 120 and adjacent thereto The upper regions of both side surfaces 111a of the ring body portion 111 are compressed to seal the spaces at predetermined intervals.
  • center ring 110 and the centering guide ring 120 are separated and described as an example.
  • the center ring 110 and the centering guide ring 120 are not limited thereto. It may be integrally formed as shown in FIGS. 15 and 16.
  • the flange 20 is made of a metal material having excellent abrasion resistance, is coupled around the shortest end of the two pipes (1, 2) and disposed on both sides of the O-ring 130 and the center ring 110, respectively.
  • the flange 20 includes a recess 220 formed in an inner wall of the body 210 adjacent to the ring body 111.
  • a predetermined spacing is formed between both side walls of the recess 220 and both side surfaces 111a of the ring body 111 so that the centering guide ring 120 is disposed within the predetermined spacing.
  • the flange 20 may have a different structure depending on the type of the clamping device 30.
  • the clamping device 30 of FIGS. 1 to 3 is a clamp generally used.
  • each of the flanges 20 has a tong groove 230 on the outer surface of the body 210. It is formed by coupling the tong portion 320 of the double claw clamp to the tong groove 230 and at the same time by pressing the flange 20, to connect the two pipes.
  • the bolt 332 penetrates through the respective bodies 213 of the flange 23.
  • the coupling hole 233 is formed to fit the two pipes by inserting the bolt 332 in the coupling hole 233 and by coupling the nut 333 and pressing the flange 23 at the same time.
  • the clamping device 30 is arranged around the flange 20 to press-fit the flange 20 to connect two pipes 1 and 2. That is, the clamping device 30 presses the flanges 20 of the two pipes 1 and 2 adjacent to each other to approach the O-ring 130, the centering 110, and the centering guide ring 120.
  • the centering guide ring 120 surrounding the ring body 111 of the center ring 110 is in close contact with both inner surfaces 111a of the ring body 111 and the inner wall of the recess 220 of the flange 20.
  • the gas leak between the ring body 111 and the inner wall of the body 210 of the flange 20 is primarily suppressed.
  • the pipe connection device can increase the degree of vacuum inside the pipe by double sealing of the O-ring 130 and the centering guide ring 120, and the O-ring 130 and the centering guide. If any one of the rings 120 is a problem, the other one can act as a sealing, it is possible to effectively suppress the gas leakage.
  • FIG. 14 is a cross-sectional view showing another example of the centering and centering guide ring in the pipe connection device according to an embodiment of the present invention
  • Figures 15 and 16 are the centering and centering guide of the pipe connection device according to an embodiment of the present invention It is sectional drawing which shows another example of the.
  • the pipe connecting device is a modification of the shape of the ring body 111 and the centering guide ring 120 in the pipe connecting device shown in FIGS. 1 to 13.
  • both side surfaces 114a of the ring body portion 114 are formed vertically with respect to the radially side surface (that is, the lower surface) without being inclined.
  • the centering guide ring 121 adjacent to both side surfaces 114a of the ring body 114 is formed such that the inner wall 121a is inclined. That is, the inner wall 121a of the centering guide ring 121 is formed to be inclined to be symmetrical with respect to the center of the ring body 114. More specifically, the distance between the upper inner wall of the centering guide ring 121 and both side surfaces 114a of the ring body portion 114 is the lower inner wall of the centering guide ring 121 and both side surfaces of the ring body portion 114.
  • the inner wall 121a of the centering guide ring 121 is formed to be inclined so as to be wider than the distance from the 114a.
  • the outer wall of the centering guide ring 121 adjacent to the inner wall 121a of the flange 210 is formed to be inclined in the same direction as the inner wall. Accordingly, the pipe connecting device configured as described above presses the flanges 210 of the two pipes adjacent to each other through the clamping device so as to be close to the O-ring 130, the centering 113, and the centering guide ring 121.
  • the guide ring 121 is brought into close contact with both side surfaces 114a of the ring body portion 114 and the inner wall of the recessed portion 220 of the flange 210, thereby allowing the gas between the ring body portion 114 and the flange 210 to lie. Leakage can be suppressed.
  • the centering and centering guide ring 11 of the pipe connection device may have a structure integrally formed.
  • the ring body portion of the centering ring and the radially side portion of the centering guide ring in the previous embodiment are formed of one body portion 1200, and both side regions 1300 of the centering guide ring adjacent to the inner wall of the flange are formed.
  • ) Are formed on both sides of the body portion (1200).
  • both side surfaces of the body portion 1200 are formed to be inclined from the inner side to the outer side so as to be symmetrical with respect to the body portion 1200.
  • the centering and centering guide ring 11 formed integrally with FIG. 15 may be manufactured through a processing method such as casting or machining using the above materials as raw materials.
  • the centering and centering guide ring 11 of the pipe connection device has a structure formed integrally, the centering and centering guide ring 11 of such a structure
  • the ring body portion and the centering guide ring of the centering ring are formed as one body portion 2200, and both sides of the body portion 2200 are inclined from the outside to the inward direction so as to be symmetrical with each other about the body portion. It is formed to
  • FIG. 17 is a cross-sectional view illustrating a pipe connecting device according to another embodiment of the present invention in which a centering and a centering guide ring are combined with a flange and a clamping device without an O-ring
  • FIG. 18 is a pipe connecting device according to another embodiment of the present invention. It is a cross-sectional view showing the centering and the centering guide ring combined with other flanges and clamping devices without the bearing ring.
  • a pipe connecting apparatus includes a centering 117, a centering guide ring 122, a flange 210, and a clamping device 30.
  • the pipe connecting device according to another embodiment of the present invention shown in Figures 1 to 6 without the O-ring and spacer ring of the pipe connecting device according to an embodiment of the present invention shown in Figures 1 to 6 It is a device for preventing gas leakage from the pipe only with the centering guide ring.
  • the clamping device 30 of FIGS. 17 and 18 may use a general clamp and a double claw clamp, respectively.
  • the pipe connecting device of the present embodiment which is a sealable structure without an O-ring as described above, centers the flanges 210 of the two pipes 1 and 2 adjacent to each other through the clamping device 30 to the centering 117 and the centering guide ring. Pressing so that the centering guide ring 122 is brought into close contact with the inner wall of both side surfaces 117c of the ring body portion 117a and the recessed portion 220 of the flange 210, and the ring body portion ( It is possible to suppress gas leakage between 117a and the flange 210.
  • 19 is a cross-sectional view showing another example of the centering guide ring in the pipe connecting apparatus according to another embodiment of the present invention.
  • the pipe connecting apparatus has a structure using two unit centering guide rings 123 and 124 that separate the centering guide ring into both sides of the centering 118.
  • the centering guide ring in the present embodiment is the center ring 118 (or the center ring 118) on both sides 118c in the radial direction of the center ring 118 (or the ring body 118a of the center ring 118).
  • Two unit centering guide rings 123 and 124 disposed to be symmetrical with each other about the ring body 118a).
  • the unit centering guide rings 123 and 124 are at least adjacent to both side surfaces 118c and their both sides 118c in the radial direction of the center ring 118 (or the ring body 118a of the center ring 118). It is formed to surround one side 118d.
  • the pipe connecting device having a structure using unit centering guide rings 123 and 124 separated into two around the center ring 118 as described above, the unit centering guide ring (123, 124) respectively adjacent flange ( By being in close contact with the inner wall of the 210, it is possible to more effectively suppress the gas leakage on both sides 118c and the flange 210 of the center ring 118.
  • 20 is a cross-sectional view showing another example of centering in the pipe connecting apparatus according to another embodiment of the present invention.
  • the pipe connecting device has an O-ring 133 so as to contact the O-ring 133 on its outer surface without the protrusion formed on the radially outer surface of the center ring 119.
  • the curved surface 119c corresponding to the outer surface of the () is formed.
  • the center ring 119 is disposed in a radially side region between the inner walls of the flange 210 and is formed to be inclined such that both inner surfaces of the flange 20 and the adjacent side surfaces 119b are symmetric with each other.
  • the pipe connecting device which is a structure in which the O-ring is directly in contact with the radially outer surface of the center ring 199 without protrusions, is disposed between the radially outer surface of the center ring 199 and the inner wall of the flange 210.

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Flanged Joints, Insulating Joints, And Other Joints (AREA)
  • Gasket Seals (AREA)
  • Joints With Sleeves (AREA)

Abstract

La présente invention concerne un appareil de raccordement de tuyau. L'appareil de raccordement de tuyau qui permet de raccorder deux tuyaux l'un à l'autre comprend : un anneau central circulaire disposé sur une zone de couplage entre les deux tuyaux ; un anneau guide circulaire central disposé de façon à entourer les deux surfaces latérales de l'anneau central dans une direction radiale de l'anneau central ; une bride couplée à une partie de circonférence de la partie la plus extrême des deux tuyaux, et disposée sur chacun des deux côtés de l'anneau central et de l'anneau guide circulaire central ; et un dispositif de serrage disposé autour de la bride pour presser et fixer la bride, et raccordant les deux tuyaux l'un à l'autre pour sceller ces derniers.
PCT/KR2012/005878 2011-08-01 2012-07-23 Appareil de raccordement de tuyau WO2013019009A2 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1020110076552A KR101360764B1 (ko) 2011-08-01 2011-08-01 배관 연결 장치와 이에 사용되는 센터링 조립체
KR10-2011-0076552 2011-08-01

Publications (2)

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WO2013019009A2 true WO2013019009A2 (fr) 2013-02-07
WO2013019009A3 WO2013019009A3 (fr) 2013-05-23

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PCT/KR2012/005878 WO2013019009A2 (fr) 2011-08-01 2012-07-23 Appareil de raccordement de tuyau

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KR (1) KR101360764B1 (fr)
WO (1) WO2013019009A2 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11629804B1 (en) 2022-04-20 2023-04-18 Carolina Components Group, Inc. Asymmetric clamp for joining sanitary fittings

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101471772B1 (ko) * 2013-06-21 2014-12-10 주식회사 엠앤이 진공 배관 접속용 본디드 플랜지 오링
WO2015186934A1 (fr) * 2014-06-03 2015-12-10 (주)테키스트 Ensemble gabarit, et dispositif de prévention d'adhérence de sous-produit à l'intérieur d'un tube le comportant
WO2016081428A1 (fr) * 2014-11-18 2016-05-26 Britt Engineering, Inc. Système de joint torique pour brides en matière plastique renforcée par fibres, thermoplastiques et métalliques
KR200486534Y1 (ko) * 2015-11-09 2018-06-29 주식회사 동원하이텍 관이음구용 플랜지
CN107489836A (zh) * 2017-09-22 2017-12-19 福州大学 一种卡箍式管道连接结构及其连接方法
KR101952204B1 (ko) * 2017-09-26 2019-02-26 이택희 배관용 유속 증대장치
KR102015611B1 (ko) * 2018-02-07 2019-08-28 황석환 배관 연결용 센터링 유닛
KR102466397B1 (ko) * 2021-11-11 2022-11-11 (주)티컨스 배관 접속 장치

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08145183A (ja) * 1994-11-17 1996-06-04 Ulvac Japan Ltd 真空シール用ガスケット及び真空シール構造
JPH09257131A (ja) * 1996-03-25 1997-09-30 Hitachi Electron Eng Co Ltd 配管接続用ｏリング装置
JP2003148666A (ja) 2001-11-02 2003-05-21 Itt Mfg Enterp Inc Ｏリング・センタリング・リング
JP2003083486A (ja) 2001-09-12 2003-03-19 Anelva Corp クランプ形継手およびそのセンターリング
JP3886824B2 (ja) 2002-02-25 2007-02-28 三菱電線工業株式会社 継手用シール構造体

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11629804B1 (en) 2022-04-20 2023-04-18 Carolina Components Group, Inc. Asymmetric clamp for joining sanitary fittings
USD986049S1 (en) 2022-04-20 2023-05-16 Carolina Components Group, Inc. Asymmetric clamp for joining sanitary fittings

Also Published As

Publication number Publication date
WO2013019009A3 (fr) 2013-05-23
KR101360764B1 (ko) 2014-02-12
KR20130014846A (ko) 2013-02-12

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