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WO2013018351A1 - Écran plasma et son procédé de fabrication - Google Patents

Écran plasma et son procédé de fabrication Download PDF

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Publication number
WO2013018351A1
WO2013018351A1 PCT/JP2012/004824 JP2012004824W WO2013018351A1 WO 2013018351 A1 WO2013018351 A1 WO 2013018351A1 JP 2012004824 W JP2012004824 W JP 2012004824W WO 2013018351 A1 WO2013018351 A1 WO 2013018351A1
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WIPO (PCT)
Prior art keywords
gas
discharge space
protective layer
oxide
ion
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Application number
PCT/JP2012/004824
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English (en)
Japanese (ja)
Inventor
貴仁 中山
幸弘 森田
上野　巌
章伸 岩本
秀司 河原崎
裕介 福井
やよい 奥井
卓司 辻田
Original Assignee
パナソニック株式会社
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Priority claimed from JP2011169849A external-priority patent/JP2013033679A/ja
Priority claimed from JP2011174737A external-priority patent/JP2013037983A/ja
Application filed by パナソニック株式会社 filed Critical パナソニック株式会社
Publication of WO2013018351A1 publication Critical patent/WO2013018351A1/fr

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J11/00—Gas-filled discharge tubes with alternating current induction of the discharge, e.g. alternating current plasma display panels [AC-PDP]; Gas-filled discharge tubes without any main electrode inside the vessel; Gas-filled discharge tubes with at least one main electrode outside the vessel
    • H01J11/20—Constructional details
    • H01J11/34—Vessels, containers or parts thereof, e.g. substrates
    • H01J11/40—Layers for protecting or enhancing the electron emission, e.g. MgO layers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J11/00—Gas-filled discharge tubes with alternating current induction of the discharge, e.g. alternating current plasma display panels [AC-PDP]; Gas-filled discharge tubes without any main electrode inside the vessel; Gas-filled discharge tubes with at least one main electrode outside the vessel
    • H01J11/10—AC-PDPs with at least one main electrode being out of contact with the plasma
    • H01J11/12—AC-PDPs with at least one main electrode being out of contact with the plasma with main electrodes provided on both sides of the discharge space

Definitions

  • the technology of the present disclosure relates to a plasma display panel used for a display device or the like and a manufacturing method thereof.
  • a plasma display panel (hereinafter referred to as PDP) which is one of display devices has a protective layer.
  • PDP plasma display panel
  • Si silicon
  • Al aluminum
  • the PDP according to the present disclosure includes a front plate and a back plate disposed to face the front plate.
  • a discharge space is provided between the front plate and the back plate, and a gas adsorbent containing zeolite is provided in a region facing the discharge space.
  • the front plate has a dielectric layer and a protective layer covering the dielectric layer.
  • the protective layer includes one or more metal oxide layers selected from the group consisting of magnesium oxide, calcium oxide, strontium oxide, and barium oxide.
  • the ratio of the secondary electron emission coefficient in the Ne gas of the protective layer to the secondary electron emission coefficient in the Kr gas of the protective layer is 0.02 or more and 0.12 or less.
  • the manufacturing method of the present disclosure is a manufacturing method of a PDP having a discharge space provided between a front plate and a back plate.
  • the front plate has a dielectric layer and a protective layer covering the dielectric layer.
  • the protective layer includes one or more metal oxide layers selected from the group consisting of magnesium oxide, calcium oxide, strontium oxide, and barium oxide.
  • the ratio of the secondary electron emission coefficient in the Ne gas of the protective layer to the secondary electron emission coefficient in the Kr gas of the protective layer is 0.02 or more and 0.12 or less.
  • the manufacturing method includes disposing a gas adsorbent containing zeolite in a region facing the discharge space, exposing the protective layer to the reducing organic gas by introducing a gas containing the reducing organic gas into the discharging space, And discharging the reducing organic gas from the discharge space and then enclosing the discharge gas in the discharge space.
  • FIG. 1 is a perspective view showing the structure of a PDP.
  • FIG. 2 is a cross-sectional view showing the configuration of the front plate.
  • FIG. 3 is a diagram illustrating a manufacturing flow of the PDP according to the embodiment.
  • FIG. 4 is a diagram illustrating a first temperature profile example.
  • FIG. 5 is a diagram illustrating a second temperature profile example.
  • FIG. 6 is a diagram illustrating a third temperature profile example.
  • FIG. 7 is a diagram illustrating a result of X-ray diffraction analysis of the surface of the underlayer according to the embodiment.
  • FIG. 8 is a diagram illustrating a result of X-ray diffraction analysis of another underlayer surface according to the embodiment.
  • FIG. 9 is an enlarged view of the aggregated particles according to the embodiment.
  • FIG. 1 is a perspective view showing the structure of a PDP.
  • FIG. 2 is a cross-sectional view showing the configuration of the front plate.
  • FIG. 3 is a
  • FIG. 10 is a diagram illustrating the relationship between the gas pressure in the PDP and the Vf according to the embodiment.
  • FIG. 11 is a diagram illustrating a change in the address voltage in the all region white lighting life test.
  • FIG. 12 is a diagram illustrating changes in the address voltage in the red lighting life test.
  • FIG. 13 is a diagram illustrating changes in the address voltage in the complementary color lighting life test.
  • the basic structure of the PDP 1 is a general AC surface discharge type PDP. As shown in FIG. 1 and FIG. 2, the PDP 1 includes a front plate 2 made of a front glass substrate 3 and a back plate 10 made of a back glass substrate 11 and the like. The front plate 2 and the back plate 10 are hermetically sealed with a sealing material whose outer peripheral portion is made of glass frit or the like. The discharge space 16 inside the sealed PDP 1 is filled with discharge gas such as neon (Ne) and xenon (Xe) at a pressure of 53 kPa (400 Torr) to 80 kPa (600 Torr).
  • discharge gas such as neon (Ne) and xenon (Xe) at a pressure of 53 kPa (400 Torr) to 80 kPa (600 Torr).
  • a pair of strip-shaped display electrodes 6 each consisting of a scanning electrode 4 and a sustain electrode 5 and a plurality of black stripes 7 are arranged in parallel to each other.
  • a dielectric layer 8 that functions as a capacitor is formed on the front glass substrate 3 so as to cover the display electrodes 6 and the black stripes 7.
  • a protective layer 9 made of magnesium oxide (MgO) or the like is formed on the surface of the dielectric layer 8. The protective layer 9 will be described later in detail.
  • Scan electrode 4 and sustain electrode 5 are made of Ag on transparent electrodes 4a and 5a made of conductive metal oxide such as indium tin oxide (ITO), tin oxide (SnO 2 ), and zinc oxide (ZnO), respectively. Electrodes 4b and 5b are stacked.
  • ITO indium tin oxide
  • SnO 2 tin oxide
  • ZnO zinc oxide
  • a plurality of data electrodes 12 made of a conductive material mainly composed of silver (Ag) are arranged in parallel to each other in a direction orthogonal to the display electrodes 6.
  • the data electrode 12 is covered with a base dielectric layer 13. Further, a partition wall 14 having a predetermined height is formed on the underlying dielectric layer 13 between the data electrodes 12 to divide the discharge space 16.
  • a phosphor layer 15 that emits red light by ultraviolet rays, a phosphor layer 15 that emits green light, and a phosphor layer 15 that emits blue light are sequentially applied and formed for each data electrode 12. Yes.
  • a discharge cell is formed at a position where the display electrode 6 and the data electrode 12 intersect. Discharge cells having red, green, and blue phosphor layers 15 arranged in the direction of the display electrode 6 serve as pixels for color display.
  • the manufacturing method of the PDP 1 includes a front plate manufacturing step A1, a back plate manufacturing step B1, a frit coating step B2, a sealing step C1, a reducing gas introduction step C2, and an exhaust. It has process C3 and discharge gas supply process C4.
  • Front plate manufacturing process A1 In front plate manufacturing step A1, scan electrodes 4, sustain electrodes 5, and black stripes 7 are formed on front glass substrate 3 by photolithography. Scan electrode 4 and sustain electrode 5 have metal bus electrodes 4b and 5b containing silver (Ag) for ensuring conductivity. Scan electrode 4 and sustain electrode 5 have transparent electrodes 4a and 5a. The metal bus electrode 4b is laminated on the transparent electrode 4a. The metal bus electrode 5b is laminated on the transparent electrode 5a.
  • ITO indium tin oxide
  • lithography For the material of the transparent electrodes 4a and 5a, indium tin oxide (ITO) or the like is used to ensure transparency and electric conductivity.
  • ITO indium tin oxide
  • an ITO thin film is formed on the front glass substrate 3 by sputtering or the like.
  • transparent electrodes 4a and 5a having a predetermined pattern are formed by lithography.
  • an electrode paste containing silver (Ag), a glass frit for binding silver, a photosensitive resin, a solvent, and the like is used as the material of the metal bus electrodes 4b and 5b.
  • an electrode paste is applied on the front glass substrate 3 by a screen printing method or the like.
  • the solvent in the electrode paste is removed by a drying furnace.
  • the electrode paste is exposed through a photomask having a predetermined pattern.
  • the electrode paste is developed to form a metal bus electrode pattern.
  • the metal bus electrode pattern is fired at a predetermined temperature in a firing furnace. That is, the photosensitive resin in the metal bus electrode pattern is removed. Further, the glass frit in the metal bus electrode pattern is melted. The molten glass frit is vitrified again after firing.
  • Metal bus electrodes 4b and 5b are formed by the above steps.
  • the black stripe 7 is formed of a material containing a black pigment.
  • the dielectric layer 8 is formed.
  • a dielectric paste containing a dielectric glass frit, a resin, a solvent, and the like is used.
  • a dielectric paste is applied on the front glass substrate 3 so as to cover the display electrode 6 with a predetermined thickness by a die coating method or the like.
  • the solvent in the dielectric paste is removed by a drying furnace.
  • the dielectric paste is fired at a predetermined temperature in a firing furnace. That is, the resin in the dielectric paste is removed.
  • the dielectric glass frit melts and resolidifies.
  • the dielectric layer 8 is formed.
  • a screen printing method, a spin coating method, or the like can be used.
  • the protective layer 9 is formed. Details of the protective layer 9 will be described later.
  • the front plate 2 having predetermined constituent members on the front glass substrate 3 is completed.
  • Data electrodes 12 are formed on the rear glass substrate 11 by photolithography.
  • a data electrode paste containing silver (Ag) for ensuring conductivity, a glass frit for binding silver, a photosensitive resin, a solvent, and the like is used as a material of the data electrode 12.
  • the data electrode paste is applied on the rear glass substrate 11 with a predetermined thickness by a screen printing method or the like.
  • the solvent in the data electrode paste is removed by a drying furnace.
  • the data electrode paste is exposed through a photomask having a predetermined pattern.
  • the data electrode paste is developed to form a data electrode pattern.
  • the data electrode pattern is fired at a predetermined temperature in a firing furnace.
  • the data electrode 12 is formed by the above process.
  • a sputtering method, a vapor deposition method, or the like can be used.
  • the base dielectric layer 13 is formed.
  • a base dielectric paste containing a dielectric glass frit, a resin, a solvent, and the like is used as a material for the base dielectric layer 13.
  • a base dielectric paste is applied by a screen printing method or the like so as to cover the data electrode 12 on the rear glass substrate 11 on which the data electrode 12 is formed with a predetermined thickness.
  • the solvent in the base dielectric paste is removed by a drying furnace.
  • the base dielectric paste is fired at a predetermined temperature in a firing furnace. That is, the resin in the base dielectric paste is removed. Further, the dielectric glass frit is melted. The molten dielectric glass frit is vitrified again after firing.
  • the base dielectric layer 13 is formed.
  • a die coating method, a spin coating method, or the like can be used.
  • a film to be the base dielectric layer 13 can be formed by CVD (Chemical Vapor Deposition) method or the like without using the base dielectric paste.
  • the barrier ribs 14 are formed by photolithography.
  • a partition paste containing a filler, a glass frit for binding the filler, a photosensitive resin, a solvent, and the like is used as a material for the partition wall 14.
  • the barrier rib paste is applied on the underlying dielectric layer 13 with a predetermined thickness by a die coating method or the like.
  • the solvent in the partition wall paste is removed by a drying furnace.
  • the barrier rib paste is exposed through a photomask having a predetermined pattern.
  • the barrier rib paste is developed to form a barrier rib pattern.
  • the partition pattern is fired at a predetermined temperature in a firing furnace. That is, the photosensitive resin in the partition pattern is removed.
  • the partition wall 14 is formed by the above process.
  • a sandblast method or the like can be used.
  • the phosphor layer 15 is formed.
  • a phosphor paste containing phosphor particles, a binder, a solvent, and the like is used as the material of the phosphor layer 15.
  • a phosphor paste is applied on the base dielectric layer 13 between adjacent barrier ribs 14 and on the side surfaces of the barrier ribs 14 by a dispensing method or the like.
  • the solvent in the phosphor paste is removed by a drying furnace.
  • the phosphor paste is fired at a predetermined temperature in a firing furnace. That is, the resin in the phosphor paste is removed.
  • the phosphor layer 15 is formed by the above steps.
  • a screen printing method or the like can be used.
  • the back plate 10 having predetermined constituent members on the back glass substrate 11 is completed.
  • Frit application process B2 A glass frit which is a sealing member is applied outside the image display area of the back plate 10 manufactured by the back plate manufacturing step B1. Thereafter, the glass frit is temporarily fired at a temperature of about 350 ° C. A solvent component etc. are removed by temporary baking.
  • a frit containing bismuth oxide or vanadium oxide as a main component is desirable.
  • the frit mainly composed of bismuth oxide include a Bi 2 O 3 —B 2 O 3 —RO—MO system (where R is any one of Ba, Sr, Ca, and Mg, and M is Any of Cu, Sb, and Fe)) and a filler made of an oxide such as Al 2 O 3 , SiO 2 , and cordierite can be used.
  • a frit containing vanadium oxide as a main component for example, a filler made of an oxide such as Al 2 O 3 , SiO 2 or cordierite is added to a V 2 O 5 —BaO—TeO—WO glass material. Things can be used.
  • the sealing process C1, the reducing gas introduction process C2, the exhaust process C3, and the discharge gas supply process C4 perform the processing of the temperature profile illustrated in FIGS. 4 to 6 in the same apparatus. .
  • the sealing temperature in FIGS. 4 to 6 is a temperature at which the front plate 2 and the back plate 10 are sealed by a frit that is a sealing member.
  • the sealing temperature in the present embodiment is about 490 ° C., for example.
  • the softening point in FIGS. 4 to 6 is the temperature at which the frit as the sealing member softens.
  • the softening point in the present embodiment is about 430 ° C., for example.
  • the exhaust temperature in FIGS. 4 to 6 is a temperature at which a gas containing a reducing organic gas is exhausted from the discharge space.
  • the exhaust temperature in the present embodiment is about 400 ° C., for example.
  • the temperature is maintained at the exhaust temperature for the period cd.
  • a gas containing a reducing organic gas is introduced into the discharge space during the period cd.
  • the protective layer 9 is exposed to a gas containing a reducing organic gas.
  • the temperature is maintained at the exhaust temperature for a predetermined period. Thereafter, the temperature drops to about room temperature. During the period d-e, the discharge space is exhausted, so that a gas containing a reducing organic gas is exhausted.
  • a discharge gas is introduced into the discharge space. That is, the discharge gas is introduced in a period after e when the temperature drops to about room temperature.
  • the temperature is maintained at the exhaust temperature for the period d1-d2.
  • a gas containing a reducing organic gas is introduced into the discharge space during the period d1-d2.
  • the protective layer 9 is exposed to a gas containing a reducing organic gas during the period d1-d2.
  • the temperature is maintained at the exhaust temperature for a predetermined period. Thereafter, the temperature drops to about room temperature. During the period d2-e, the discharge space is exhausted, so that a gas containing a reducing organic gas is exhausted.
  • a discharge gas is introduced into the discharge space. That is, the discharge gas is introduced in a period after e when the temperature drops to about room temperature.
  • the reducing gas introduction step C2 is performed within the period of the sealing step C1.
  • the temperature is maintained at the sealing temperature for the period b1-b2. Thereafter, during the period b2-c, the temperature falls to the exhaust temperature.
  • a gas containing a reducing organic gas is introduced into the discharge space during the period of b1-b2.
  • the protective layer 9 is exposed to a gas containing a reducing organic gas.
  • the temperature is maintained at the exhaust temperature for a predetermined period. Thereafter, the temperature drops to about room temperature. During the period ce, the gas including the reducing organic gas is discharged by exhausting the discharge space.
  • a discharge gas is introduced into the discharge space. That is, the discharge gas is introduced in a period after e when the temperature drops to about room temperature.
  • the reducing organic gas is preferably a CH-based organic gas having a molecular weight of 58 or less and a large reducing power.
  • a gas containing the reducing organic gas is produced.
  • column C means the number of carbon atoms contained in one molecule of organic gas.
  • the column of H means the number of hydrogen atoms contained in one molecule of the organic gas.
  • “A” is attached to a gas having a vapor pressure of 100 kPa or higher at 0 ° C. Furthermore, “C” is given to the gas whose vapor pressure at 0 ° C. is smaller than 100 kPa.
  • a gas having a boiling point of 0 ° C. or less at 1 atm is marked with “A”. Furthermore, “C” is attached to a gas having a boiling point of greater than 0 ° C. at 1 atmosphere.
  • “A” is given to the gas that is easily decomposed.
  • “B” is attached to a gas that is easily decomposed.
  • “A” is given to the gas having sufficient reducing power.
  • a reducing organic gas that can be supplied in a gas cylinder is desirable. Also, considering the ease of handling in the manufacturing process of PDP, a reducing organic gas having a vapor pressure at 0 ° C. of 100 kPa or higher, a reducing organic gas having a boiling point of 0 ° C. or lower, or a reducing organic gas having a low molecular weight is desirable.
  • part of the gas containing the reducing organic gas may remain in the discharge space even after the exhaust process C3. Therefore, it is desirable that the reducing organic gas has a characteristic that it is easily decomposed.
  • Reducing organic gas is a carbon that does not contain oxygen selected from acetylene, ethylene, methylacetylene, propadiene, propylene and cyclopropane, taking into consideration the ease of handling in the manufacturing process and the property of being easily decomposed. Hydrogen gas is desirable. At least one selected from these reducing organic gases may be mixed with a rare gas or nitrogen gas.
  • the lower limit of the mixing ratio of the rare gas or nitrogen gas and the reducing organic gas is determined according to the combustion ratio of the reducing organic gas used.
  • the upper limit is about several volume%. If the mixing ratio of the reducing organic gas is too high, the organic component is likely to be polymerized to become a polymer. In this case, the polymer remains in the discharge space and affects the characteristics of the PDP. Therefore, it is preferable to appropriately adjust the mixing ratio according to the component of the reducing organic gas to be used.
  • the inventors conducted the same examination using hydrogen gas as another example of the reducing gas, but did not obtain the same effect as the reducing organic gas.
  • MgO, CaO, SrO, BaO, etc. have high reactivity with impurity gas, such as water and a carbon dioxide.
  • impurity gas such as water and a carbon dioxide.
  • the discharge characteristics are likely to deteriorate, and the discharge characteristics of each discharge cell are likely to vary.
  • the sealing step C1 it is preferable to flow an inert gas so that the inside of the discharge space 16 is in a positive pressure state through a through hole opened in the discharge space 16, and then perform sealing. This is because the reaction between the protective layer 9 and the impurity gas can be suppressed. Nitrogen, helium, neon, argon, xenon, etc. can be used as the inert gas.
  • dry air may be flowed instead of the inert gas. This is because at least the reaction with water can be suppressed and the production cost can be reduced compared with the inert gas.
  • nitrogen gas may be flowed at a flow rate of about 2 L / min during the period up to x when the temperature reaches the softening point.
  • the discharge space 16 is maintained at a positive pressure by nitrogen gas.
  • the temperature is maintained at the sealing temperature for the period ab (ab2).
  • the discharge space 16 is filled with nitrogen gas. Thereafter, the temperature falls from the sealing temperature to the exhaust temperature during the period bc (b2-c).
  • the nitrogen gas that has filled the discharge space 16 is exhausted. That is, the discharge space is in a reduced pressure state.
  • the description for the subsequent period is the same as the above description.
  • the protective layer 9 is required to have a function of holding electric charge for generating discharge and a function of emitting secondary electrons during sustain discharge.
  • the applied voltage is reduced by improving the charge retention performance. As the number of secondary electron emission increases, the sustain discharge voltage is reduced.
  • the protective layer 9 includes a base layer 91 and aggregated particles 92.
  • the underlayer 91 includes at least a first metal oxide and a second metal oxide.
  • the first metal oxide is MgO
  • the second metal oxide is one selected from the group consisting of CaO, SrO and BaO.
  • the underlayer 91 has at least one peak in the X-ray diffraction analysis. This peak is between the first peak in the X-ray diffraction analysis of the first metal oxide and the second peak in the X-ray diffraction analysis of the second metal oxide.
  • the first peak and the second peak have the same plane orientation as the plane orientation indicated by the peak of the underlayer 91.
  • the (111) plane orientation of CaO alone is indicated by a peak at a diffraction angle of 32.2 degrees.
  • the (111) plane orientation of MgO alone is indicated by a peak with a diffraction angle of 36.9 degrees.
  • the (111) plane orientation of SrO alone is indicated by a peak with a diffraction angle of 30.0 degrees.
  • the (111) plane orientation of BaO alone is indicated by a peak with a diffraction angle of 27.9 degrees.
  • the foundation layer 91 includes MgO and at least two or more metal oxides selected from the group consisting of CaO, SrO, and BaO.
  • the point A is a peak in the (111) plane orientation of the base layer 91 formed of two of MgO and CaO.
  • Point B is a peak in the (111) plane orientation of the underlying layer 91 formed of two of MgO and SrO.
  • Point C is a peak in the (111) plane orientation of the underlying layer 91 formed of two of MgO and BaO.
  • the diffraction angle at point A is 36.1 degrees.
  • Point A exists between the peak of the (111) plane orientation in the MgO simple substance that is the first metal oxide and the peak of the (111) plane orientation in the CaO simple substance that is the second metal oxide.
  • Point B exists between the peak of the (111) plane orientation in the MgO simple substance that is the first metal oxide and the peak of the (111) plane orientation in the SrO simple substance that is the second metal oxide.
  • the diffraction angle at point C is 35.4 degrees.
  • the point C exists between the peak of the (111) plane orientation in the MgO simple substance that is the first metal oxide and the peak of the (111) plane orientation in the BaO simple substance that is the second metal oxide.
  • the point D is a peak in the (111) plane orientation of the base layer 91 formed of three of MgO, CaO, and SrO.
  • Point E is a peak in the (111) plane orientation of the base layer 91 formed of three of MgO, CaO, and BaO.
  • the point F is a peak in the (111) plane orientation of the base layer 91 formed of three of BaO, CaO, and SrO.
  • point D has a diffraction angle of 36.9 degrees in the (111) plane orientation of MgO alone, which is the maximum diffraction angle of a single oxide, and SrO, which is the minimum diffraction angle, in the (111) plane orientation as a specific orientation plane.
  • a peak exists at a diffraction angle of 33.4 degrees, which is between the diffraction angle of 30.0 degrees of a single (111) plane orientation.
  • peaks at points E and F exist at 32.8 degrees and 30.2 degrees between the maximum diffraction angle and the minimum diffraction angle, respectively.
  • the plane orientation (111) is exemplified. However, the same applies to other plane orientations.
  • the depth from the vacuum level of CaO, SrO and BaO exists in a shallow region as compared with MgO. Therefore, when driving the PDP, when electrons existing in the energy levels of CaO, SrO, and BaO transition to the ground state of Xe ions, the number of electrons emitted by the Auger effect is less than the energy level of MgO. It is thought that it will increase compared to the case of transition.
  • the peak of the base layer 91 in the X-ray diffraction analysis is between the peak of the first metal oxide and the peak of the second metal oxide. That is, it is considered that the energy level of the base layer 91 exists between single metal oxides, and the number of electrons emitted by the Auger effect is larger than that in the case of transition from the energy level of MgO.
  • the base layer 91 according to the present embodiment can exhibit better secondary electron emission characteristics as compared with MgO alone.
  • the sustain voltage can be reduced.
  • the discharge voltage can be reduced when the Xe partial pressure as the discharge gas is increased in order to increase the luminance. That is, a low-voltage and high-luminance PDP 1 can be realized.
  • the underlayer 91 is formed by a thin film forming method such as a sputtering method or an EB vapor deposition method.
  • the foundation layer 91 is formed by EB vapor deposition.
  • a target vapor deposition source is disposed in the vacuum vapor deposition chamber.
  • An electron beam is irradiated to the deposition source.
  • the components of the evaporation source are evaporated by the energy of the electron beam.
  • the evaporated component adheres on the carried substrate.
  • the degree of vacuum in the vacuum deposition chamber, the atmospheric gas, the irradiation intensity of the electron beam, and the like are appropriately adjusted.
  • the foundation layer 91 in the present embodiment includes at least a first metal oxide and a second metal oxide.
  • the first metal oxide is MgO
  • the second metal oxide is one selected from the group consisting of CaO, SrO and BaO.
  • the vapor deposition source is prepared with components having a desired concentration.
  • the base layer 91 made of MgO and CaO is formed, the following procedure is shown. MgO powder and CaO powder are mixed so that it may become a predetermined density
  • a base layer 91 is formed by a target having a desired concentration.
  • Aggregated particles 92 are formed by aggregating a plurality of MgO crystal particles 92a, which are metal oxides.
  • the agglomerated particles 92 are preferably distributed uniformly over the entire surface of the base layer 91. This is because the variation of the discharge voltage in the PDP 1 is reduced.
  • the MgO crystal particles 92a can be manufactured by either a gas phase synthesis method or a precursor firing method.
  • a gas phase synthesis method first, a metal magnesium material having a purity of 99.9% or more is heated in an atmosphere filled with an inert gas. Furthermore, metallic magnesium is directly oxidized by introducing a small amount of oxygen into the atmosphere. In this manner, MgO crystal particles 92a are produced.
  • the MgO precursor is uniformly fired at a high temperature of 700 ° C. or higher.
  • MgO crystal particles 92a are produced.
  • the precursor include magnesium alkoxide (Mg (OR) 2 ), magnesium acetylacetone (Mg (acac) 2 ), magnesium hydroxide (Mg (OH) 2 ), magnesium carbonate (MgCO 2 ), magnesium chloride (MgCl 2 ). ), Magnesium sulfate (MgSO 4 ), magnesium nitrate (Mg (NO 3 ) 2 ), or magnesium oxalate (MgC 2 O 4 ). Depending on the selected compound, it may usually take the form of a hydrate.
  • Hydrate can also be used as a precursor.
  • the compound as the precursor is adjusted so that the purity of magnesium oxide (MgO) obtained after firing is 99.95% or higher, desirably 99.98% or higher. If a certain amount of impurity elements such as various alkali metals, B, Si, Fe, and Al are mixed in the precursor compound, unnecessary interparticle adhesion and sintering occur during heat treatment. As a result, it becomes difficult to obtain highly crystalline MgO crystal particles. Therefore, it is preferable to prepare the precursor in advance, such as removing the impurity element from the compound.
  • the aggregated particles 92 are those in which crystal particles 92a having a predetermined primary particle size are aggregated or necked. In other words, it is not bonded as a solid with a large bonding force, but a plurality of primary particles form an aggregate body due to static electricity, van der Waals force, etc., and due to external stimuli such as ultrasound , Part or all of them are bonded to such a degree that they become primary particles. As shown in FIG. 9, the aggregated particles 92 have a particle size of about 1 ⁇ m, and the crystal particles 92a have a polyhedral shape having seven or more faces such as a tetrahedron and a dodecahedron. desirable.
  • a dispersion is prepared by dispersing the MgO crystal particles 92a obtained by any of the above methods in a solvent.
  • the dispersion is applied to the surface of the base layer 91 by a spray method, a screen printing method, an electrostatic coating method, or the like. Thereafter, the solvent is removed through a drying / firing process.
  • MgO crystal particles 92 a are fixed on the surface of the underlayer 91.
  • the particle size of the primary particles of the crystal particles 92a can be controlled by the generation conditions of the crystal particles 92a.
  • the particle size can be controlled by controlling the firing temperature or firing atmosphere.
  • the firing temperature can be selected in the range of 700 ° C to 1500 ° C.
  • the particle size can be controlled to about 0.3 to 2 ⁇ m.
  • the aggregated particles 92 in which a plurality of MgO crystal particles are agglomerated mainly confirms the effect of suppressing the “discharge delay” in the write discharge and the effect of improving the temperature dependency of the “discharge delay”.
  • Aggregated particles 92 are excellent in initial electron emission characteristics as compared with underlayer 91. Therefore, in the present embodiment, the agglomerated particles 92 are arranged as an initial electron supply unit required at the time of discharge pulse rising.
  • the “discharge delay” is considered to be mainly caused by a shortage of the amount of initial electrons that are triggered from the surface of the underlayer 91 into the discharge space 16 at the start of discharge. Therefore, in order to contribute to the stable supply of initial electrons to the discharge space 16, the agglomerated particles 92 are dispersedly arranged on the surface of the base layer 91. As a result, abundant electrons are present in the discharge space 16 at the rise of the discharge pulse, and the discharge delay can be eliminated. Therefore, such initial electron emission characteristics enable high-speed driving with good discharge response even when the PDP 1 has a high definition.
  • the metal oxide aggregated particles 92 are disposed on the surface of the underlayer 91, in addition to the effect of mainly suppressing the “discharge delay” in the write discharge, the effect of improving the temperature dependency of the “discharge delay” is also achieved. can get.
  • the ratio of the secondary electron emission coefficient ⁇ is smaller than 0.02, the effect of exposure to the reducing organic gas described above cannot be obtained.
  • the ratio of the secondary electron emission coefficient ⁇ is larger than 0.12, the underlayer 91 develops color. That is, a problem as a display device occurs.
  • the color development of the underlayer 91 is due to the occurrence of oxygen defects. That is, the ratio of metal is increased by removing oxygen from the metal oxide included in the base layer 91. Therefore, the metal contained in the foundation layer 91 is colored.
  • the underlayer 91 is formed of two or more kinds of metal oxides selected from the group consisting of MgO, CaO, SrO, and BaO has been described.
  • the phenomenon in which the ratio of the secondary electron emission coefficient ⁇ is changed also occurs when the underlayer 91 is formed of only MgO.
  • the presence or absence of the aggregated particles 92 does not affect the change in the ratio of the secondary electron emission coefficient ⁇ .
  • the range of the ratio of the secondary electron emission coefficient ⁇ to Kr and Ne is more preferably 0.02 or more and 0.50 or less.
  • the underlayer 91 is made of two or more metal oxides selected from the group consisting of MgO, CaO, SrO, and BaO, the range of the ratio of the secondary electron emission coefficient ⁇ to Kr and Ne is 0. It is more desirable that it is 0.02 or more and 0.12 or less.
  • Table 2 shows secondary electron emission coefficients for the rare gases Xe, Kr, Ar, Ne, and He of the underlayer 91. Note that the secondary electron emission coefficient is shown for both the conditions under which the reducing organic gas treatment for exposing the underlayer 91 to the reducing organic gas was performed and the conditions under which the reducing organic gas treatment was not performed.
  • the underlayer 91 is composed only of MgO.
  • the ionization energy of Xe is 12.1 eV.
  • the ionization energy of Kr is 14 eV.
  • the ionization energy of Ar is 15.8 eV.
  • the ionization energy of Ne is 21.6 eV.
  • the ionization energy of He is 24.6 eV. The greater the ionization energy, the more secondary electrons are emitted from the vacuum level to the deep level.
  • the secondary electron emission coefficient for Xe, Kr, and Ar is greatly increased by performing the reducing organic gas treatment. This is considered to be because oxygen deficiency was formed in the underlayer 91 by exposing the underlayer 91 to the reducing organic gas during sealing exhaust. When oxygen vacancies are formed, a defect level is generated near the upper end of the valence band. The presence of electrons at the defect level increases the secondary electron emission coefficient for Xe, Kr, Ar, Ne, and He. However, in the case of the secondary electron emission coefficient for Ne and He, the increase rate of the secondary electron emission coefficient is small because it is also affected by electrons at a deeper level. Therefore, it is considered that the secondary electron emission coefficient mainly for Xe, Kr, and Ar increased.
  • the PDP 1 manufactured by the manufacturing method according to the present embodiment was used. Specifically, the discharge start voltage Vf between the scan electrode and the sustain electrode when the gas pressure is changed for each rare gas of Xe, Kr, Ar, Ne, and He by a device capable of replacing the gas in the PDP 1. (V) was measured. The measurement results are shown in FIG.
  • the fitting was performed for Kr and Ne within a total pressure in the PDP of 200 Torr to 500 Torr.
  • a gas adsorbent 20 containing zeolite in a discharge space 16 provided between the front plate 2 and the back plate 10 (hereinafter simply referred to as a gas adsorbent). It has. Thereby, the effect of suppressing the life fluctuation of the image display discharge voltage is obtained.
  • life fluctuation refers to a phenomenon in which the voltage required for discharge increases depending on the image display time of the PDP. That is, when the life variation is large, the voltage required for image display increases depending on the usage time of the user. When the voltage rises, an image display area that will eventually become unlit will occur.
  • a plurality of PDPs were manufactured by the manufacturing method shown in the present embodiment.
  • a PDP in which the gas adsorbent 20 was disposed in the discharge space 16 and a PDP in which the gas adsorbent 20 was not disposed in the discharge space 16 were produced.
  • the gas adsorbent 20 similar to the gas adsorbent containing the ZSM-5 type zeolite exchanged with copper (Cu) ion described in Japanese Patent Application Laid-Open No. 2008-218359 is used.
  • the introduction of reducing organic gas in the sealing exhaust process was performed for all PDPs.
  • the gas adsorbent 20 is disposed in the discharge space 16 as follows.
  • the gas adsorbent 20 was disposed on the phosphor layer 15 in the back plate 10.
  • a powder-like (average particle diameter of about 1 to 1.5 ⁇ m) gas adsorbent 20 was dispersed on the phosphor layer 15.
  • the amount of application was determined by the coverage on the glass substrate.
  • the gas adsorbent 20 is dispersed on the glass substrate whose transmittance has been measured.
  • the transmittance of the glass substrate after the gas adsorbent 20 was dispersed was measured.
  • the amount of change in transmittance before and after spraying was taken as the coverage. In the experimental results shown below, the coverage was 33%.
  • Fig. 11 shows the results of the white life test.
  • the white life test was performed by lighting the entire image display area in the PDP white.
  • the address voltage value necessary for lighting the entire region in white was measured.
  • the protective layer 9 is formed by the same formation method as that of the sample 3.
  • the address voltage is a voltage value applied when a discharge cell for image display is selected in a general PDP driving method. The measurement results are described on the basis of the voltage value necessary for white lighting of the entire area at the life time of 0 hours of the PDP in which no gas adsorbent is arranged.
  • the address voltage in the initial stage is lowered by 8 V by first disposing the gas adsorbent 20. Further, in the subsequent life test, the address voltage value did not increase.
  • the PDP in which the gas adsorbent 20 is disposed can keep the address voltage lower than the PDP in which the gas adsorbent 20 is not disposed.
  • the monochromatic life test is a test in which, for example, an address voltage necessary to turn on red is measured after a life test in which only red is turned on.
  • the complementary color life test is a test for measuring an address voltage value necessary for lighting red other than red, that is, after a life test in which green and blue (cyan) are turned on.
  • Fig. 12 shows the results of the monochromatic life test.
  • FIG. 13 shows the result of the complementary color life test.
  • the PDP used is a PDP manufactured by the same manufacturing method as the PDP used in the life test with white lighting. 12 and 13 show the amount of change with respect to the initial value (address voltage value at 0 hours of life time) of the PDP in which the gas adsorbent 20 is arranged and the PDP in which no gas adsorbent is arranged.
  • the result of the monochromatic life test shows that the address voltage value decreases with the life time regardless of the presence or absence of the gas adsorbent 20. That is, the address voltage value did not increase at least. Moreover, the address voltage value was suppressed to be lower by the gas adsorbent 20.
  • the address voltage value necessary for red lighting increases with the life time.
  • the address voltage value necessary for red lighting decreases with the life time. That is, the life variation of the address voltage value can be greatly suppressed.
  • the case where the coverage of the gas adsorbent 20 is 33% is shown.
  • the inventors conducted the same kind of experiment on a PDP having a coverage of the gas adsorbent 20 of 5% to 45%. The inventors have confirmed that the same effect can be obtained even when the coverage of the gas adsorbent is 5% to 45%.
  • the gas adsorbent 20 is dispersed on the phosphor layer 15.
  • a phosphor paste in which the gas adsorbent 20 is dispersed may be used.
  • the gas adsorbent 20 can be disposed simultaneously with the formation of the phosphor layer. It has been confirmed that similar effects can be obtained.
  • Activation refers to a phenomenon in which the gas adsorbent 20 starts to adsorb atmospheric gas. Furthermore, the gas adsorbent 20 that adsorbs carbon dioxide or carbon monoxide at an exhaust temperature is desirable.
  • zeolite is made of copper (Cu) ion, cobalt (Co) ion, nickel (Co) ion, sodium (Na) ion, lithium (Li) ion, potassium (K) ion, magnesium (Mg) ion, calcium (Ca And metal ion exchange type zeolite ion-exchanged with at least one selected from the group consisting of ions, barium (Ba) ions and strontium (Sr) ions.
  • the gas adsorbent 20 that preferentially adsorbs water and carbon dioxide over xenon gas is desirable.
  • the gas adsorption material 20 containing a copper ion exchange type zeolite is mentioned.
  • Zeolite is a structure mainly composed of Al 2 O 3 and SiO 2 .
  • a gas adsorbent containing zeolite having a Si ratio higher than the Al concentration in a molar ratio is desirable.
  • Zeolite containing more Al is hydrophilic.
  • increasing the Si concentration makes it more hydrophobic. Therefore, it becomes easy to adsorb carbon dioxide and carbon monoxide.
  • ZSM-5 type and mordenite (MOR) type zeolites have a high Si concentration. Therefore, the gas adsorbent 20 containing ZSM-5 type and mordenite (MOR) type zeolite is a more preferable example.
  • a plurality of PDPs having different underlayer configurations were produced.
  • the PDP was filled with 60 kPa Xe and Ne mixed gas (Xe 15%).
  • Sample A is composed of MgO and CaO.
  • Sample B is composed of MgO and SrO.
  • Sample C is composed of MgO and BaO.
  • Sample D is composed of MgO, CaO and SrO.
  • Sample E is composed of MgO, CaO, and BaO.
  • the comparative example is composed of MgO alone.
  • samples A to E The maintenance voltage was measured for samples A to E.
  • sample A was 90
  • sample B was 87
  • sample C was 85
  • sample D was 81
  • sample E was 82.
  • Samples A to E are PDPs manufactured by a normal manufacturing method. That is, samples A to E are PDPs manufactured by a manufacturing method that does not have a reducing organic gas introduction step.
  • the luminance increases by about 30%, but in the comparative example, the sustain voltage increases by about 10%.
  • PDP 1 having base layer 91 having the same configuration as samples A to E was manufactured by the manufacturing method according to the present embodiment.
  • the first temperature profile was used from the sealing step C1 to the discharge gas supply step C4.
  • the sustain voltage of the PDP 1 according to the present embodiment was about 5% lower than those of the samples A to E.
  • nitrogen gas is allowed to flow as an inert gas so that the inside of the discharge space 16 is in a positive pressure state through the through-hole opened in the discharge space 16, and then When sealing was performed, it was about 5 to 7% lower than the sustain voltage of samples A to E.
  • the PDP 1 of the present disclosure A front plate 2 and a back plate 10 arranged to face the front plate 2 are provided. A discharge space 16 is provided between the front plate 2 and the back plate 10. A gas adsorbent 20 containing zeolite is provided in a region facing the discharge space 16.
  • the front plate 2 has a dielectric layer 8 and a protective layer 9 that covers the dielectric layer 8.
  • the protective layer 9 includes one or more metal oxide layers selected from the group consisting of magnesium oxide, calcium oxide, strontium oxide, and barium oxide.
  • the ratio of the secondary electron emission coefficient in the Ne gas of the protective layer 9 and the secondary electron emission coefficient in the Kr gas of the protective layer 9 is 0.02 or more and 0.12 or less.
  • the PDP 1 that can be driven at a low voltage can be provided. Moreover, the life fluctuation of the discharge voltage is suppressed by the gas adsorbent.
  • the manufacturing method of the present disclosure is a manufacturing method of the PDP 1 having the discharge space 16 provided between the front plate 2 and the back plate 10.
  • the front plate 2 has a dielectric layer 8 and a protective layer 9 that covers the dielectric layer 8.
  • the front plate 2 has a dielectric layer 8 and a protective layer 9 that covers the dielectric layer 8.
  • the protective layer 9 includes one or more metal oxide layers selected from the group consisting of magnesium oxide, calcium oxide, strontium oxide, and barium oxide.
  • the ratio of the secondary electron emission coefficient in the Ne gas of the protective layer 9 and the secondary electron emission coefficient in the Kr gas of the protective layer 9 is 0.02 or more and 0.12 or less.
  • the gas adsorbent 20 containing zeolite is disposed in a region facing the discharge space 16, and a gas containing a reducing organic gas is introduced into the discharge space 16, so that the protective layer 9 is converted into the reducing organic gas. Exposure, and then discharging the reducing organic gas from the discharge space 16 and then enclosing the discharge gas in the discharge space 16.
  • Oxygen deficiency occurs in the protective layer 9 exposed to the reducing organic gas. Oxygen deficiency is considered to improve the secondary electron emission ability of the protective layer. Therefore, the PDP 1 manufactured by the manufacturing method of the present disclosure can reduce the sustain voltage. Moreover, the life fluctuation of the discharge voltage is suppressed by the gas adsorbent.
  • the reducing organic gas is preferably a hydrocarbon-based gas that does not contain oxygen. This is because the reduction ability is enhanced by not containing oxygen.
  • the reducing organic gas is preferably at least one selected from acetylene, ethylene, methylacetylene, propadiene, propylene, cyclopropane, propane and butane. This is because the reducing organic gas is easy to handle in the manufacturing process. Furthermore, it is because said reducing organic gas is easy to decompose
  • a manufacturing method in which a gas containing a reducing organic gas is introduced into the discharge space 16 after the discharge space 16 is exhausted is exemplified.
  • the gas containing the reducing organic gas can be introduced into the discharge space 16 by continuously supplying the gas containing the reducing organic gas to the discharge space 16 without exhausting the discharge space 16.
  • the protective layer 9 includes the metal oxide crystal particles 92a or the aggregated particles 92 in which a plurality of metal oxide crystal particles 92a are aggregated on the base layer 91, the protective layer 9 has a high charge holding ability and a high electron emission ability. Therefore, as a whole PDP 1, high-speed driving can be realized with a low voltage even with a high-definition PDP. In addition, high-quality image display performance with reduced lighting failure can be realized.
  • MgO is exemplified as the metal oxide crystal particle 92a.
  • the metal oxide crystal particles 92a are not limited to MgO.
  • constituent elements described in the accompanying drawings and the detailed description may include constituent elements that are not essential for solving the problem. This is to illustrate the above technique.
  • the non-essential components are described in the accompanying drawings and the detailed description, so that the non-essential components should not be recognized as essential.
  • the technology of the present disclosure is useful for a large screen display device.

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Gas-Filled Discharge Tubes (AREA)

Abstract

La présente invention concerne un écran plasma pourvu d'une plaque de surface avant et d'une plaque de surface arrière disposée à l'opposé de la plaque de surface avant. Un espace de décharge électrique est présent entre la plaque de surface avant et la plaque de surface arrière. Un élément d'absorption de gaz contenant une zéolite est présent dans une zone tournée vers l'espace de décharge électrique. La plaque de surface avant présente une couche diélectrique et une couche protectrice recouvrant ladite couche diélectrique. La couche protectrice contient une couche d'oxyde de métal comprenant un ou plusieurs types choisis dans un groupe constitué par l'oxyde de magnésium, l'oxyde de calcium, l'oxyde de strontium et l'oxyde de baryum. Le rapport du coefficient d'émission d'électron secondaire dans le gaz Ne de la couche protectrice au coefficient d'émission d'électron secondaire dans le gaz Kr de la couche protectrice est 0,02-0,12.
PCT/JP2012/004824 2011-08-03 2012-07-30 Écran plasma et son procédé de fabrication WO2013018351A1 (fr)

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JP2011169849A JP2013033679A (ja) 2011-08-03 2011-08-03 プラズマディスプレイパネルおよびその製造方法
JP2011-169849 2011-08-03
JP2011-174737 2011-08-10
JP2011174737A JP2013037983A (ja) 2011-08-10 2011-08-10 プラズマディスプレイパネル

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CN103323477A (zh) * 2013-06-27 2013-09-25 西安空间无线电技术研究所 一种确定气体吸附状态下的二次电子发射特性的方法

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JPH03230447A (ja) * 1990-02-01 1991-10-14 Fujitsu Ltd プラズマディスプレイパネルの製造方法
JPH1154027A (ja) * 1997-08-05 1999-02-26 Canon Inc 電子源及び画像形成装置の製造方法
JP2006260992A (ja) * 2005-03-17 2006-09-28 Ube Material Industries Ltd 酸化マグネシウム薄膜の改質方法
WO2007066733A1 (fr) * 2005-12-08 2007-06-14 National Institute For Materials Science Phosphore, procede et production correspondant, et dispositif luminescent
JP2008218359A (ja) * 2007-03-08 2008-09-18 Matsushita Electric Ind Co Ltd ガス放電表示パネル
JP2010092791A (ja) * 2008-10-10 2010-04-22 Panasonic Corp プラズマディスプレイパネル
JP2010267436A (ja) * 2009-05-13 2010-11-25 Panasonic Corp プラズマディスプレイパネルの製造方法
WO2010140307A1 (fr) * 2009-06-02 2010-12-09 パナソニック株式会社 Procédé de fabrication d'un écran d'affichage à plasma
WO2011099266A1 (fr) * 2010-02-12 2011-08-18 パナソニック株式会社 Processus de production d'un écran d'affichage à plasma

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Publication number Priority date Publication date Assignee Title
JPH03230447A (ja) * 1990-02-01 1991-10-14 Fujitsu Ltd プラズマディスプレイパネルの製造方法
JPH1154027A (ja) * 1997-08-05 1999-02-26 Canon Inc 電子源及び画像形成装置の製造方法
JP2006260992A (ja) * 2005-03-17 2006-09-28 Ube Material Industries Ltd 酸化マグネシウム薄膜の改質方法
WO2007066733A1 (fr) * 2005-12-08 2007-06-14 National Institute For Materials Science Phosphore, procede et production correspondant, et dispositif luminescent
JP2008218359A (ja) * 2007-03-08 2008-09-18 Matsushita Electric Ind Co Ltd ガス放電表示パネル
JP2010092791A (ja) * 2008-10-10 2010-04-22 Panasonic Corp プラズマディスプレイパネル
JP2010267436A (ja) * 2009-05-13 2010-11-25 Panasonic Corp プラズマディスプレイパネルの製造方法
WO2010140307A1 (fr) * 2009-06-02 2010-12-09 パナソニック株式会社 Procédé de fabrication d'un écran d'affichage à plasma
WO2011099266A1 (fr) * 2010-02-12 2011-08-18 パナソニック株式会社 Processus de production d'un écran d'affichage à plasma

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103323477A (zh) * 2013-06-27 2013-09-25 西安空间无线电技术研究所 一种确定气体吸附状态下的二次电子发射特性的方法
CN103323477B (zh) * 2013-06-27 2014-11-19 西安空间无线电技术研究所 一种确定气体吸附状态下的二次电子发射特性的方法

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