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WO2012171747A1 - Cellule manométrique interférométrique - Google Patents

Cellule manométrique interférométrique Download PDF

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Publication number
WO2012171747A1
WO2012171747A1 PCT/EP2012/059335 EP2012059335W WO2012171747A1 WO 2012171747 A1 WO2012171747 A1 WO 2012171747A1 EP 2012059335 W EP2012059335 W EP 2012059335W WO 2012171747 A1 WO2012171747 A1 WO 2012171747A1
Authority
WO
WIPO (PCT)
Prior art keywords
pressure
membrane
reflection surface
measuring cell
cell according
Prior art date
Application number
PCT/EP2012/059335
Other languages
German (de)
English (en)
Inventor
Rene ZIERMANN
Marc Schlachter
Axel Humpert
Geert Brokmann
Matthias Will
Ralf RÖDER
Original Assignee
Endress+Hauser Gmbh+Co. Kg
CiS Forschungsinstitut für Mikrosensorik und Photovoltaik GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Endress+Hauser Gmbh+Co. Kg, CiS Forschungsinstitut für Mikrosensorik und Photovoltaik GmbH filed Critical Endress+Hauser Gmbh+Co. Kg
Publication of WO2012171747A1 publication Critical patent/WO2012171747A1/fr

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0076—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means
    • G01L9/0077—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means for measuring reflected light
    • G01L9/0079—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means for measuring reflected light with Fabry-Perot arrangements

Definitions

  • the present invention relates to an interferometric pressure measuring cell.
  • Such pressure sensors are known, for example, from European Patent No. EP 1 078 227 B1, which discloses an optically addressable measuring system, which in particular comprises a pressure sensor with white light interferometric evaluation.
  • WO 2007/136779 A2 discloses an interferometric sensor with a so-called boss diaphragm, wherein the flexurally rigid center has a reflection surface whose orientation relative to the light normally incident perpendicular to the reflection surface does not change as a result of a pressure-dependent deflection of the diaphragm becomes. In this way, it is to be ensured that the light reflected by the measuring membrane returns to the irradiating light guide independently of the pressure during vertical irradiation. In the case of tolerances caused by a lateral offset of the light guide namely by a deflected,
  • the representation appears at least for common pressure sensors with a measuring membrane, which has, for example, Si, because a deflection of a measuring diaphragm, which causes a deflection of a reflected light beam by several degrees, so that he misses a vertically incident in the rest position optical fiber, appears in the common
  • the axial position of the light pipe may vary, for example, with different coefficients of thermal expansion between the material of the counter body and the material of the light pipe, so that the zero point is unstable.
  • a tilt of the end face of the light guide by a difference in length of only +/- 1 ⁇ or +/- 2 ⁇ with respect to the axis of the light guide at the opposite edges of the light guide a variation of the distance between the two reflection surfaces by a few wavelengths effect what leads to an expansion of the zero point signal, as shown in Figs. 5 a to c based on signatures of a reflection surface with tilting of 0 ⁇ +/- 1 ⁇ and +/- 2 ⁇ is shown. This affects the measurement accuracy of the sensor.
  • the pressure measuring cell according to the invention comprises a membrane body with a measuring membrane, which has a pressure-dependent deflectable region;
  • the deflectable region of the measuring diaphragm has a rigid center whose counter-body-side surface has the first reflection surface, wherein the deflectable region of the measuring diaphragm is surrounded by a rigid edge region, wherein the deflectable region of the measuring diaphragm has a deformable, thin surface Area which surrounds the rigid center and connects to the edge region, wherein a second, partially reflecting reflection surface is formed by the measuring membrane facing surface of the counter body, wherein the first reflection surface can be illuminated through the second reflection surface, and wherein the distance between the first reflection surface and the second reflection surface is dependent on the difference between a first pressure which acts on an outer side of the measurement membrane facing away from the measurement chamber and a second pressure which prevails in the measurement chamber.
  • the first reflection surface is according to the invention due to the rigid center, regardless of a pressure-dependent deflection substantially planar. This may in particular mean that, for each pressure p which causes a deflection of the first reflection surface by up to half the equilibrium distance between the first reflection surface and the second reflection surface, the distance of the points of the first reflection surface to one of the least squares in the Reflex surface level is less than 15 nm, in particular less than 10 nm and preferably less than 5 nm.
  • the first reflecting surface is the surface which coincides with the orthogonal projection of the effective area of a collimator or a source of collimated light on the surface
  • Reflection surface with the center of the counter-side surface of the rigid center is substantially aligned.
  • the distance between the two centers mentioned is less than A L 1/2 / 10, in particular less A L 1/2 / 20, preferably less than A
  • the measuring diaphragm has a rigid center, whose counter-body-side surface comprises the first reflection surface.
  • the influence of the rigid center, or the lack of such a rigid center on the measurement signal is based on the Fign. 6 a to c for a measuring membrane without bending center shown.
  • the curves show the signatures of a measuring membrane for one
  • the pressure measuring cell according to the invention has a consistently good resolution over substantially the entire measuring range.
  • the thin region of the measuring membrane is formed by depressions on two opposite sides of the membrane body, the depth of the depression or depressions on a first side more than 10 times, in particular more than 20 times, the depth of the depression or depressions on a second side opposite the first side.
  • the deformable, thin region on a plurality of stiffeners which are arranged symmetrically, and each extending from the rigid center to the edge region of the membrane body.
  • stiffeners are known from the published patent application DE 10 2009 031 705 A1, which relates to a pressure measuring cell with a rigid center and a piezoresistive transducer, wherein the resistance elements of the piezoresistive transducer in bridge circuit in the sense of increased sensitivity in each case in the region of the stiffeners are prepared.
  • the stiffeners should also limit the influence of torsional forces, against which the bridge circuit has a cross-sensitivity.
  • the stiffeners may be formed in particular by the fact that when preparing the depressions from the second side, areas which are to form the stiffeners are not or less removed.
  • the stiffeners which extend in its longitudinal direction between the rigid center and the edge region, for example, have a width of about 50 ⁇ to 500 ⁇ , in particular about 250 ⁇ to 350 ⁇ . In a presently preferred embodiment of the invention, the width of the stiffeners is about 300 ⁇ .
  • the rigid center has a rectangular, in particular square cross section, extending from each side of the rectangle or square at least two stiffeners to the edge region of the membrane body, in particular the center lines in the longitudinal direction of the two stiffeners and the two outer Stiffeners on one side of more than half a side length, preferably more than two-thirds of a side length of the cross section are spaced from each other.
  • the centerlines of the stiffeners are not less than 60%, preferably not less than 70%. the width of the stiffeners from the nearest corner of the cross section.
  • each of the next corner of the cross-section facing outer sides of the stiffeners are spaced from the corners, in particular at least 50 ⁇ ?, And preferably at least 100 ⁇ ?. Due to the distance between the stiffeners and the corners of the cross section, these structures can be prepared with better reproducibility. Along with this, the symmetry between the stiffeners is maintained with greater accuracy, which in turn reduces the risk of tilting of the rigid center.
  • each of the stiffeners extends to at least 75%, preferably at least 90% and particularly preferably completely in a region which is delimited by two planes parallel to the longitudinal direction of the respective stiffening, which run perpendicular to the plane of the second side of the rigid center , and in which each one side of the rectangular or square cross-section extends on the first side of the rigid center.
  • Tensions are largely constant, so that the arrangement of the stiffeners in this area also helps to limit tilting of the rigid center or avoid.
  • the stiffeners contribute in particular to the fact that at a given, pressure-induced deflection z 0 of the center of the measuring membrane by up to 1% of the distance between the rigid center and the edge region of the measuring membrane of the distance from different points of an orthogonal projection of the first reflection surface on a means according to the method of least squares in the first reflection plane, first plane to a second plane fit into the second reflection surface by the method of least squares by not more than 40 nm, in particular not more than 20 nm and preferably not more than 10 nm.
  • the deflectable region of the measuring membrane has an area A M which is surrounded by the rigid edge region, the distance of the first reflecting surface from the second reflecting surface in the equilibrium position of the measuring membrane not exceeding (A M 1/2 ) * f is 1 , where f> 10, in particular f> 30, preferably f> 60 and particularly preferably f> 80.
  • equilibrium of the measuring diaphragm is meant a position in which the first pressure is equal to the second pressure.
  • the pressure measuring cell comprises a membrane body having Si.
  • the counter-body may for example comprise a glass which is compatible with respect to the thermal expansion coefficient to Si.
  • borosilicate glasses such as Pyrex or Borofloat ® 33 are suitable.
  • the counter-body can be connected to the membrane body, for example by means of anodic bonding or via an Au-Si eutectic or bonding by means of a glass frit.
  • the preparation of the pressure measuring cells takes place in particular in the wafer or disc dressing, with currently a Si wafer is preferred with a thickness of 380 ⁇ .
  • the Si wafer may be a Si wafer with a ⁇ 100> orientation.
  • the thickness of the glass sheet is on the one hand, for example, not less than 1 mm, in particular not less than 1, 5 mm and preferably not less than about 1, 8 mm.
  • the thickness of the glass sheet is, for example, not more than 5 mm, more preferably not more than 3 mm, and preferably not more than about 2.5 mm. In a currently preferred
  • the thickness of the glass sheet is about 2, 1 mm.
  • the pressure measuring cell has a rectangular, in particular square, basic shape, the side length being, for example, not more than 10 mm, in particular not more than 8 mm and preferably not more than 6 mm. In a presently preferred embodiment of the invention, the side length is about 5.3 mm.
  • the thin, deformable region of the measuring membrane is prepared by means of a method which comprises anisotropic etching, in particular KOH etching.
  • the material thickness of the thin, deformable areas is selected.
  • the material thickness is for example for a sensor with a measuring range of for example a 2 bar absolute pressure not more than 80 ⁇ , in particular not more than 60 ⁇ and preferably not more than 45 ⁇ .
  • the material thickness of the deformable, thin region is, for example, 30 to 40 ⁇ m.
  • the thin deformable region has such a material thickness that, given a pressure-induced deflection z 0 of the center of the
  • Edge region of the measuring diaphragm is not less than 95%, preferably not less than 97.5% of the deflection in the z-direction in the thin, deformable region.
  • the trenches formed by the etching thus have a depth of, for example, up to about 300 ⁇ . If the thickness of the thin area is also adjusted by depressions from the other side of the membrane body, the depth of the trenches correspondingly lower.
  • the bending-resistant center of the measuring membrane has according to a development of the invention at its base a rectangular, in particular square cross section, wherein the minimum side length at the base of the rigid center not less than 600 ⁇ , in particular not less than 1000 ⁇ and preferably not less than 1200 ⁇ amounts. In a presently preferred embodiment of the invention, the side length at the base of the rigid center is about 1300 ⁇ .
  • the basis of the rigid center is on that side of the membrane body, from which the substantial part of the material removal in the preparation of the deformable, thin region by means of anisotropic etching has taken place. Accordingly, the rigid center has at its base its smallest lateral dimensions.
  • the base of the rigid center is reset according to an embodiment of the invention relative to the base of the deformable, thin region surrounding edge region of the membrane body, for example, about the equilibrium distance between the first reflection surface and the second reflection surface.
  • This can be done in particular by anisotropic etching, whereby the crystal orientation of the base in the first
  • Reflection surface is maintained.
  • a polishing can be done, taking care that the parallel alignment of the reflective surfaces is not affected.
  • the re-etching of the base can also be carried out via a BESOI method, wherein the
  • Membrane body in this case has an SOI layer system, wherein in the range of
  • the deformable, thin region of the measuring membrane can be formed by depressions on two opposite sides of the membrane body, wherein the depth of the depression or depressions on a first side more than 10 times, in particular more than that 20 times the depth of the recess or depressions on a first side opposite the second side.
  • Material thickness of the deformable, thin regions can therefore also be reduced in such a way that complementary depressions or depressions are prepared by the surface of the membrane body facing away from the base of the rigid center.
  • the depth of the depression or depressions from the second side is significantly less than the depth of the prepared by anisotropic etching of the first side trench, for example not more than 25 ⁇ , in particular not more than 15 ⁇ and preferably not more than 10 ⁇ . In a presently preferred embodiment of the invention, the depth is about 6 ⁇ .
  • the edge region of the membrane body has an annular circumferential base surface, with which the membrane body is pressure-tight and pressure-bearing connected to the counter body.
  • the width of the base surface from the outer edge of the membrane body to the through formed anisotropic etching trench between the edge region and the rigid center is according to a development of the invention not less than 300 ⁇ , in particular not less than 400 ⁇ and preferably not less than 500 ⁇ .
  • the width of the base area is not more than, for example, 1000 ⁇ , in particular not more than 800 ⁇ and preferably not more than 750 ⁇ .
  • the pressure measuring cell further comprises a receptacle for a light guide and possibly a collimator in order to illuminate the first reflection surface through the second reflection surface with collimated light perpendicular to the second reflection surface.
  • Light of low coherence comprises a spectral range with a width of, for example, at least 50 nm, in particular at least 100 nm, in particular from the spectrum of visible light, so that the light used has a coherence length of less than 1 ⁇ to a few ⁇ , in particular less than 5 ⁇ has.
  • collimated light is to be understood in the context of the present invention, for example, that at least 70%, in particular at least 85%, and preferably at least 95% of the incident light intensity, a deviation from the optical axis of less than 4 °, in particular less than 3 ° and preferably less than 2.5 °.
  • the divergence of the collimated light does not exceed 160 mrad, preferably not more than 80 mrad, more preferably not more than 40 mrad and particularly preferably not more than 20 mrad. In a presently preferred embodiment, the divergence is about 18 mrad.
  • the pressure measuring cell comprises a carrier body which carries the counter body, wherein the counter body in particular with one of
  • the support body comprises a metallic material, in particular Kovar ®, which is due to its thermal expansion coefficient for connection with the material of the body.
  • the carrier body comprises according to an embodiment of the invention, a first mounting surface on which the counter-body is pressure-tight and pressure-bearing attached.
  • the carrier body further comprises a second
  • the carrier body has an opening which is surrounded annularly by the first mounting surface. Through the opening, a light path for irradiating light into the counter body and for returning reflected light.
  • the carrier body comprises the receptacle for a light guide and / or for a collimator.
  • the light guide and / or the collimator can be introduced directly or by means of a ferrule into the receptacle.
  • the recording serve in particular to align the light guide and or the collimator with respect to the counter body.
  • the collimator can have a gradient index lens (GRIN lens) and / or at least one converging lens with at least one convex surface.
  • GRIN lens gradient index lens
  • FIG. 1 shows a schematic longitudinal section through a measuring membrane and a
  • Counter-body according to a first embodiment of the present invention.
  • 2 shows a schematic longitudinal section through a measuring membrane and a
  • FIG. 3 is a detailed view of the pressure measuring cell according to the first embodiment of the present invention.
  • FIGS. 5 a-c signatures to a second reflection surface according to the prior art for different tilt angles
  • FIGS. 6 a-c Signatures to a first reflection surface on a measuring membrane without
  • the pressure measuring cell 1 shows a longitudinal section and Fig. 3 is a perspective Represent a view of a quadrant of the pressure cell.
  • the pressure measuring cell 1 comprises a counter body 2 made of a borosilicate glass, for example, Borofloat ® 33, and a
  • Membrane body 3 which has crystalline silicon in ⁇ 100> orientation.
  • Membrane body 3 and the counter body 2 are pressure-tightly connected to each other by means of a prepared by anodic bonding peripheral joint 5.
  • Membrane body 3 and the counter body 2 is formed by the connection a pressure-tightly sealed measuring chamber 4.
  • the joint in particular has a width of about 0.5 to 0.75 mm.
  • the counterbody 2 has a thickness of about 2.1 mm and a square cross section with an edge length of about 5 to 6 mm.
  • the membrane body preferably has one of the common material thicknesses, in which Si disks are available; in the present case, these are 380 ⁇ .
  • the membrane body 3 has a trench-like, circumferential first recess 6, which is prepared by means of anisotropic etching, and which has a depth of about 340 ⁇ m against an original first surface, from which the recess is prepared.
  • first recesses 7 From one of the first surface facing away from the second surface second recesses 7 are prepared in alignment with the first recess, which, however, have a significantly smaller depth of, for example, about 6 ⁇ .
  • the strength of an elastically deformable, thin region 8 is set to about 34 ⁇ .
  • the thin region 8 is surrounded by an edge region 9 of the particular, nor the full
  • the thin region 8 surrounds and carries a rigid center 10, which has a pressure-dependent distance to the counter body 2 due to the flexibility of the thin region.
  • the length l v of the stiffeners naturally corresponds to the distance between the rigid center 10 and the edge region 9; it is for example about 750 ⁇ to 1000 ⁇ .
  • the stiffeners 1 1 contribute in particular to a tilting of the rigid center 10 with respect to the edge region 9 - and thus with respect to the counter body 2 to avoid. This purpose is achieved more effectively the farther the stiffeners are spaced from the mid-planes of the rigid center 10, which coincide in the illustration of Fig. 3 with the cut surfaces.
  • the center lines of the two stiffeners 1 1 on one side of the rigid center 10 are each spaced more than half the width b z of the rigid center 10 in the plane of the surface of the stiffeners from each other.
  • the pressure measuring cell is operated interferometrically with white light or with light of low coherence.
  • two parallel reflection surfaces are provided whose variable distance from one another depends on the difference between the pressure in the measuring chamber and the pressure on the side of the measuring diaphragm facing away from the measuring chamber.
  • a first reflection surface 12 is on the underside of the counter body 2 facing the
  • a second reflection surface is aligned by a with the bottom of the rigid center 10 and facing it
  • the underside of the bending-resistant center is compared to the bottom of the edge region 9 by a few 10 ⁇ , for example, 30 ⁇ reset by anisotropic etching. This causes the distance between the first reflection surface 12 and the second reflection surface 14 over the entire measuring range is greater than the coherence length of the light used.
  • an absolute pressure measuring cell with a measuring range of 0 to 2 bar thus at a pressure of 0 bar have a distance of 30 ⁇ between the two reflection surfaces, while the distance at the ordinary atmospheric pressure about 20 ⁇ and at the measuring range limit of 2 bar or 10 ⁇ is.
  • the width of the rigid center 10 in the plane of the first reflection surface 12 is about 1000 ⁇ to 1500 ⁇ , wherein the first reflection surface 10 does not occupy the entire bottom of the rigid center, but for example, only a circular area with a diameter of 0.8 mm.
  • a side facing away from the membrane body 3 underside of the counter body 2 serves as
  • Reflection surface to be illuminated.
  • Fig. 2 shows another embodiment of a pressure measuring cell 21 with a counter body 22 made of borosilicate glass and a membrane body 23 made of Si, which is substantially comparable Having structures to the membrane body of Figure 1; However, the membrane body 23 in this embodiment, so to speak, in a reverse orientation with respect to
  • the membrane body 23 is pressure-tightly connected to the counter body 22 to form a measuring chamber 24 along a circumferential joint 25, which is prepared by anodic bonding.
  • a circumferential joint 25 which is prepared by anodic bonding.
  • an annular circumferential, first recess 26 prepared by anisotropic etching, the depth of which may be at a thickness of the Si wafer of 380 ⁇ , for example, about 310 ⁇ .
  • a layer of approximately 30 ⁇ m is removed by means of anisotropic etching, first aligned with the region enclosed by the outer edge of the first recess 26, from a second surface facing the counter body 22.
  • second recesses 27 having a depth of approximately 6 ⁇ m are prepared in order to set the final thickness of an elastically deformable, thin region 28 to, for example, approximately 34 ⁇ m.
  • the second recesses 27 are possibly again by stiffeners (not shown here)
  • the membrane body 23 has an elastically deformable, thin region 28, which is surrounded by a stiff edge region 29, wherein the thin region surrounds and carries a rigid center 30.
  • the pressure measuring cell 21 On a lower side of the rigid center 30 facing the counter body, the pressure measuring cell 21 has a first reflection surface 32, which runs parallel and in alignment with a second reflection surface 34, which is formed by a surface portion of the counter body 22 facing the rigid center 30.
  • a side facing away from the membrane body 23 bottom of the counter body 22 serves as
  • Fig. 4 shows the pressure measuring cell 1 according to FIG. 1, which is now completed by a carrier body 40, wherein the mounting surface 16 of the counter body 2 on a first mounting surface 41 is pressure-tight and pressure-bearing, for example, secured by gluing.
  • the carrier body 40 has a metallic material which is compatible with respect to its thermomechanical behavior with the material of the counter body. KOVAR ® is particularly suitable for this purpose.
  • the carrier body further has a second mounting surface 50, which surrounds the first mounting surface annular, and with which the pressure measuring cell, for example in a hydraulic measuring unit can be integrated or connected to another pressure source.
  • the first mounting surface surrounds an opening 42 to a substantially cylindrical chamber 43 which is formed in the interior of the carrier body.
  • the chamber 43 has in its lateral surface an internal thread into which a ferrule 44 is screwed, which is secured on a rear end face of the carrier body 40 with a lock nut to fix the axial position of the ferrule.
  • the ferrule 44 carries in its chamber introduced into the end portion of a collimator 46, which here includes a GRIN lens. In a rear axial opening of the ferrule 44, a connection coupling 47 of a light guide is inserted and with a
  • the light guide comprises a glass fiber 49 which axially in the
  • Connection coupling is guided. The distances between the end face of the light guide and an end face of the collimator 46 facing the light guide, on the one hand, and between an end face of the collimator 46 facing the counter body 2 and the underside of the end face
  • the opposing bodies are chosen so that they do not interfere with those in the measuring range of the
  • Pressure measuring cell occurring intervals between the first and the second reflection surface overlap but rather are spaced therefrom.
  • the first reflection surface 12 on the underside of the rigid center 10 is irradiated with collimated light through the glass fiber 49, the collimator 46, the opening 42 and the counter body 2 in the vertical incidence.
  • the light reflected by the first reflection surface 12 interferes with the light reflected by the second reflection surface 14, so that the distance between the first and the second reflection surface can be determined on the basis of the resulting interferogram by means of an evaluation interferometer and on the basis of which the pressure to be measured can be determined.
  • the curves each have a function
  • the curve in Fig. 5a thus corresponds to a signature of a perfectly oriented, flat surface, such as the second
  • Reflection surface or a protected against tilting first reflection surface on a rigid center.
  • a tilting by +/- 1 ⁇ or +/- 2 ⁇ causes the maximum of the signature is split into two separate maxima, which diverge with increasing tilt.
  • the remaining amplitudes are significantly less than the original amplitude for an optimally aligned surface.
  • Such disturbing tilting can occur on the one hand, if a fiber end is used directly as a reflection surface and on the other hand, for example, if a rigid center is not sufficiently secured against tilting.
  • FIGS. 5 b and c In the case of a light guide with a diameter of 800 ⁇ m, the effect of FIGS. 5 b and c at a Verkippungswinkeln of 0, 14 ° and 0.28 ° on.
  • FIGS. 6 a to c do not show the amplitudes on the same scale, since the priority here is to represent the widening of the maximum due to the deviations from the orthogonal orientation or planarity.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)

Abstract

L'invention concerne une cellule manométrique 1 comprenant : un corps 9 à membrane doté d'une membrane de mesure présentant une zone déformable en fonction de la pression ; et un contre-corps 2 au moins partiellement transparent qui sont reliés l'un à l'autre en formant une chambre de mesure 4 ; ainsi que deux surfaces de réflexion 12, 14 sensiblement parallèles, la zone déformable de la membrane de mesure présentant un centre 10 rigide, dont la surface côté contre-corps présente la première surface de réflexion 12, la zone déformable étant entourée par une zone périphérique rigide 9. La zone déformable de la membrane de mesure présente une zone 8 mince déformable qui entoure le centre rigide et le relie à la zone périphérique. Une deuxième surface de réflexion 14 partiellement réfléchissante est formée par une surface orientée vers la membrane de mesure du contre-corps 2, la première surface de réflexion pouvant être éclairée à travers la deuxième surface de réflexion. La distance entre les surfaces de réflexion dépend d'une différence entre une première et une deuxième pression sur la membrane de mesure, qui règnent en dehors et dans la chambre de mesure.
PCT/EP2012/059335 2011-06-14 2012-05-21 Cellule manométrique interférométrique WO2012171747A1 (fr)

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DE102011077499.8 2011-06-14
DE102011077499A DE102011077499A1 (de) 2011-06-14 2011-06-14 Interferometrische Druckmesszelle

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DE102011081651A1 (de) 2011-08-26 2013-02-28 Endress + Hauser Gmbh + Co. Kg Interferometrischer Drucksensor
US20230393005A1 (en) * 2020-10-20 2023-12-07 Davidson Instruments, Inc. Extrinsic fabry-perot absolute pressure sensor
DE102024107505A1 (de) * 2023-03-17 2024-09-19 Ifm Electronic Gmbh Drucksensor mit einer Sensorelektronik sowie ein Verfahren

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EP1089062A1 (fr) * 1998-06-16 2001-04-04 Nauchny Tsentr Volokonnoj Optiki Pri Institute Obschei Fiziki Rossiiskoi Akademii Nauk Capteur de pression a fibre optique, variantes, et procede de production d'une membrane elastique
US20020162399A1 (en) * 2000-03-07 2002-11-07 Masayoshi Esashi Pressure sensor and method of manufacturing the same
WO2007019676A1 (fr) * 2005-08-12 2007-02-22 Fiso Technologies Inc. Capteur optique de fabry-perot constitue d'une seule piece et procede de fabrication de celui-ci
WO2007136779A2 (fr) 2006-05-19 2007-11-29 New Jersey Institute Of Technology Capteur à fibres optiques à base de diaphragme embouti aligné
WO2009087055A1 (fr) * 2008-01-09 2009-07-16 CiS Forschungsinstitut für Mikrosensorik und Photovoltaik GmbH Capteur de pression micromécanique
DE102009031705A1 (de) 2009-07-04 2011-01-05 CiS Institut für Mikrosensorik GmbH Mikromechanischer Drucksensor

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