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WO2012169665A1 - Apparatus for controlling digital alignment coils of tem for ped analysis and apparatus for displaying rotation speed and rotation angle of electronic beam - Google Patents

Apparatus for controlling digital alignment coils of tem for ped analysis and apparatus for displaying rotation speed and rotation angle of electronic beam Download PDF

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Publication number
WO2012169665A1
WO2012169665A1 PCT/KR2011/004130 KR2011004130W WO2012169665A1 WO 2012169665 A1 WO2012169665 A1 WO 2012169665A1 KR 2011004130 W KR2011004130 W KR 2011004130W WO 2012169665 A1 WO2012169665 A1 WO 2012169665A1
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unit
signal
current
tem
coil
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PCT/KR2011/004130
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French (fr)
Korean (ko)
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정종만
김윤중
권희석
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한국기초과학지원연구원
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Priority to PCT/KR2011/004130 priority Critical patent/WO2012169665A1/en
Publication of WO2012169665A1 publication Critical patent/WO2012169665A1/en

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/15—Means for deflecting or directing discharge
    • H01J2237/1506—Tilting or rocking beam around an axis substantially at an angle to optical axis
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/15—Means for deflecting or directing discharge
    • H01J2237/152—Magnetic means

Definitions

  • the present invention is a three-dimensional structure analysis using a diffraction pattern (DP) used to analyze the internal structure of the material in three dimensions by using a transmission electron microscope (TEM), that is, the diffraction phenomenon of the electron beam Digital adjustment coil control device for PED (precession electron diffraction) analysis of TEM which enables to control the electron beam rotation speed and rotation angle digitally and display the control state, and the electron beam rotation speed and rotation angle display unit using the same It is about.
  • TEM transmission electron microscope
  • TEM is a type of electron microscope that uses an electron beam and an electron lens that perform similar functions instead of a light source and a light source lens.
  • the TEM consists of a plurality of electron lenses and cameras, such as an electron gun, a focusing lens, a sample stage, an objective lens, and an intermediate lens, and the operation process is as follows:
  • the electron beam is emitted from the electron gun, the electron beam is converged by the condenser lens and irradiated onto the sample.
  • the electron beam passing through the sample is magnified several hundred times by the objective lens to form a first image directly on the intermediate lens. Part of the first image is enlarged by the intermediate lens and the projection lens to form an image on the fluorescent plate of the camera room.
  • the focus is adjusted by adjusting the excitation current of the objective lens, and the magnification may be adjusted by adjusting the current flowing through the intermediate lens or the projection lens. Since the electron beam is formed of small electron particles and is disturbed by the gas particles, the inside of the TEM maintains a high vacuum of 10 -7 torr or less.
  • FIG. 1 exemplarily shows positions of two electron lenses and eight adjusting coils in a general TEM. Each of these sets of electronic lenses and adjustment coils is simultaneously controlled in conjunction with one signal output from the lens control unit for each pair of adjustment coils facing each other.
  • the electron beam In order to observe the specimen in the TEM, the electron beam must first be aligned so that the electron beam is focused on the specimen stage along the central axis.
  • the adjusting process is performed by interlocking and controlling the currents flowing through the pair of adjusting coils facing each other. That is, by adjusting the pair of adjustment coils facing each other by the lens control unit to adjust the electron beam to match the central axis.
  • the lens control unit receives the predetermined predetermined frequency and current to the adjustment coil, thereby ultimately rotating the rotation angle and rotation of the electron beam.
  • the speed will fluctuate.
  • the present invention is a TEM digital adjustment coil control device that facilitates repeated experiments and can be used as an objective analysis data by quantifying the control value for controlling the power supplied to the adjustment coil in the process of analyzing the PED pattern using the TEM
  • the purpose is to provide.
  • the present invention for achieving the above object is a device for PED analysis in the TEM, (A) in response to the electron beam rotation speed and rotation angle control command input through the external input unit of the current applied for driving the individual adjustment coil An operation unit for calculating the digital frequency generation signal and the current control signal for the individual adjustment coils for controlling the frequency value and the current value and outputting the calculated signal synchronization unit and the current amplifier unit, respectively; (B) a signal synchronizing unit for synchronizing the frequency generation signal for the individual adjustment coil inputted from the calculating unit to the reference frequency of the TEM and outputting the same to the current amplifier; And (C) converting the digital current control signal for the individual adjustment coil inputted from the calculating unit into an analog current control signal, and adjusting the analog current control signal according to the synchronized frequency generation signal inputted from the signal synchronization unit. It relates to a digital control coil control device of the TEM for PED analysis , including; a current amplifier for converting the drive current to apply to the corresponding individual control coil.
  • the digital adjustment coil control apparatus is connected to the conventional TEM by a circuit so that the output of the current amplification unit is applied to the individual adjustment coil to utilize for PED analysis.
  • the frequency generation signal is a signal for generating a frequency for controlling the rotational speed of the electron beam.
  • the rotation speed of the electron beam is determined according to the frequency width.
  • the current control signal is a signal for determining a current value for adjusting the incident angle to the sample by tilting the electron beam.
  • the electron beam is inclined at an angle on the optical axis and is incident by the difference in the intensity of the current applied to each of the adjustment coils.
  • the reference frequency is the basic driving frequency set for driving the TEM. Therefore, the device according to the invention must also be synchronized to the reference frequency of the TEM to be mounted.
  • the adjustment coil control apparatus may be to replace the function of the lens control unit of the existing TEM completely (controlling the replacement coil), the lens control unit is normally operated and transferred from the lens control unit to each adjustment coil.
  • the control coil may be controlled (complementary) in such a manner as to deform the control signal.
  • the alternative type and the complementary type have the same basic principle, and there is only a small difference that can be easily understood by those skilled in the art in the circuit configuration and operation method. However, the present invention does not exclude complementary forms.
  • controlling the power supplied to the control coil or controlling the control coil means controlling the current and / or frequency of the control coil power.
  • Equipped with a digital adjustment coil control device according to the present invention in the conventional TEM more precisely control the electron beam rotation speed and rotation angle of the TEM ultimately easier and faster to analyze the three-dimensional structure (PED analysis) of the material consisting of a composite structure To let them do it.
  • PED analysis three-dimensional structure
  • the control information obtained in the process of controlling the adjusting coil by the adjusting coil control device may be used as information for controlling the adjusting coil when observing the same sample or observing another sample.
  • the calculation unit in the device according to the present invention further includes a function for calculating the electron beam rotation speed and rotation angle corresponding to the output control signal (frequency generation signal and current control signal), the device includes the electron beam rotation calculated by the calculation unit It is preferable to further include a display unit for displaying the speed and the rotation angle.
  • the adjusting coil control device is preferably a computer on which a control program is installed.
  • the present invention has the effect of finely adjusting the rotational speed and the rotation angle of the electron beam by finely adjusting the power supplied to the adjustment coil by the adjustment coil control device.
  • the present invention in the DP analysis process using the TEM, it is possible to check in real time the control value of the power control signal supplied to the adjustment coil corresponding to the rotational speed and the rotation angle of the TEM electron beam currently in operation, and in the subsequent analysis process By making it available again, you can increase the efficiency and accuracy of your research.
  • FIG. 1 is a conceptual diagram showing the spatial position of the electron lens (2) and the adjustment coil (8) and the sample in the conventional TEM
  • FIG. 2 is a conceptual diagram showing that the control coil pair facing each other in the conventional TEM is controlled in conjunction with,
  • FIG. 3 is a conceptual diagram showing PED analysis in TEM
  • FIG. 4 is a conceptual configuration diagram of an example of an apparatus according to the present invention.
  • FIG. 5 is a wiring diagram of an example of an apparatus according to the present invention.
  • the rotational speed and the rotation angle of the electron beam In order to analyze the three-dimensional structure of the material using TEM, the rotational speed and the rotation angle of the electron beam must be controlled.
  • the rotation angle of the electron beam changes according to the current of the power supplied to the adjustment coil, and the rotation speed changes according to the frequency of the power supplied to the adjustment coil. Therefore, for efficient three-dimensional structural analysis, the frequency of the power supplied to the individual adjustment coil All currents must be controlled.
  • the present invention more precisely controls the frequency and current of the power supplied to the adjustment coil installed in the lens of the TEM to adjust the frequency and current of the power supplied to the individual adjustment coil so that the rotation speed and the rotation angle of the electron beam can be precisely adjusted.
  • the adjusting coil control apparatus 100 for controlling essentially includes an operation unit 1, a signal synchronization unit 2, and a current amplifier 3. 4 illustrates a configuration in which a conceptual coil control apparatus according to the present invention is connected to a TEM in a circuit.
  • the calculation unit 1 controls the frequency value and current value of the current applied for driving the individual adjustment coil in response to the electron beam rotation speed and rotation angle control command input through the external input unit, and the digital frequency for the individual adjustment coil. It calculates the generated signal and the current control signal and serves to output to the signal synchronization unit and the current amplifier, respectively.
  • the external input unit that receives a control command from an external (user) may be included in the apparatus according to the present invention or may be an external input unit of a TEM to be mounted. In the former case, the external input unit may be a conventional computer having an input / output device or a control device having a control knob of a variable resistance type.
  • the signal synchronization unit 2 functions to synchronize the frequency generation signal for the individual adjustment coil inputted from the calculation unit to the reference frequency of the TEM and output the same to the current amplifier.
  • the reference frequency may be automatically recognized the reference frequency of the TEM to be mounted, or may be input separately to the reference frequency information of the TEM to be mounted.
  • the current amplifier 3 converts the digital current control signal for the individual adjustment coil input from the calculator into an analog current control signal, and controls the analog current according to the synchronized frequency generation signal input from the signal synchronization unit.
  • the signal is converted into a current capable of driving the adjusting coil and applied to the corresponding individual adjusting coil.
  • the current control signal output from the calculator 1 is a digital signal, it can be converted into an analog signal by using the D / A converter 11 so that the current amplifier 3 can be subsequently connected.
  • the A converter 11 may be physically independent of the current amplifier 3 and may be encompassed as an internal function of the current amplifier 3.
  • the rotation angle and rotation speed of the electron beam change correspondingly.
  • the user cannot confirm the correspondence between the input control command and the rotation angle of the electron beam and the rotational speed change amount. Therefore, the user controls the electron beam by repeatedly inputting a control command several times after inputting an arbitrary control command. There is a problem that takes a lot of time and effort to control the electron beam.
  • the calculation unit 1 further includes a function of calculating an electron beam rotation speed and a rotation angle corresponding to the output control signal (frequency generation signal and current control signal), and the electron beam rotation speed calculated by the calculation unit. And a display portion 4 for displaying the rotation angle.
  • the display unit 4 may use a monitor provided in a computer which is one of the external input units described above.
  • a method of detecting a control signal for adjusting the rotation speed and the rotation angle of the electron beam may vary depending on the configuration of the adjustment coil control device 100.
  • a detection terminal 31 is installed at a control signal output terminal output from the adjustment coil control device to detect a control signal.
  • the control signal detected by the sensing terminal 31 is an analog signal, the control signal is converted into a digital signal using the A / D converter 12 and transmitted to the operation unit.
  • the control signal is generated by the calculation unit 1, and thus the control signal is directly calculated at the electron beam rotation speed and rotation angle. Just do it.
  • the electron beam rotation speed and the rotation angle calculated by the calculation unit are preferably stored in a predetermined memory device to be used as reference information when controlling the electron beam for a new sample analysis.
  • control coil control device 100 is not only complicated system when manufactured by the analog circuit as shown in Figure 5 but also to change the circuit to apply to other TEM. Therefore, the adjustment coil control apparatus according to the present invention may be a computer, and the functions of the operation unit, the signal synchronization unit, and the current amplifier unit may be mounted in a program form.

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  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

The present invention relates to an apparatus for PED analysis from a TEM, for controlling the rotation speed and rotation angle of an electronic beam for three-dimensional structural analysis using diffraction of the electronic beam, and for displaying the quantity of control so as to be confirmed by a user. The present invention relates to the apparatus for controlling digital alignment coils of the TEM for the PED analysis: (A) a calculation unit for calculating a digital frequency generation signal and a current control signal for each individual alignment coil, which controls a frequency value of a current and a current value that is applied for actuating the individual alignment coils, in correspondence with the rotation speed and the rotation of the electronic beam, which is inputted through an external input unit, and for transmitting the digital frequency generation signal and the current control signal to a signal synchronization unit and a current amplification unit, respectively ; (B) the signal synchronization unit for synchronizing the frequency generation signal, with regard to each of the alignment coils that is inputted from the calculation unit, with a reference frequency of the TEM, and outputting same to the current amplification unit; and (C) the current amplification unit for converting the digital current control signals with regard to each of the alignment coil, which are inputted from the calculation portion, into analog current control signals, and for converting the analog current control signals into the current for actuating the alignment coil, according to the synchronized frequency generation signal which is inputted from the signal synchronization unit, and applying the current to each of the corresponding alignment coils.

Description

ＰＥＤ 분석을 위한 ＴＥＭ의 디지털 조정코일제어장치 및 이를 이용한 전자빔 회전속도 및 회전각도 표시장치TEM's Digital Adjustment Coil Control Device for PED Analysis and Electron Beam Rotation Speed and Angle Display Device
본 발명은 투과전자현미경(TEM; Transmission Electron Microscope)을 이용하여 물질의 내부구조를 3차원으로 분석하기 위해 사용되는 회절패턴(DP; diffraction pattern) 즉, 전자빔의 회절현상을 이용한 3차원 구조 분석을 위한 전자빔 회전속도 및 회전각도를 디지털 방식으로 제어하고, 제어상태를 표시할 수 있게 한 TEM의 PED(precession electron diffraction) 분석을 위한 디지털 조정코일제어장치와, 이를 이용한 전자빔 회전속도 및 회전각도 표시부에 관한 것이다.The present invention is a three-dimensional structure analysis using a diffraction pattern (DP) used to analyze the internal structure of the material in three dimensions by using a transmission electron microscope (TEM), that is, the diffraction phenomenon of the electron beam Digital adjustment coil control device for PED (precession electron diffraction) analysis of TEM which enables to control the electron beam rotation speed and rotation angle digitally and display the control state, and the electron beam rotation speed and rotation angle display unit using the same It is about.
TEM은 전자현미경의 일종으로, 광원과 광원렌즈 대신 유사한 기능을 하는 전자빔과 전자렌즈를 사용한 현미경이다. TEM is a type of electron microscope that uses an electron beam and an electron lens that perform similar functions instead of a light source and a light source lens.
간략하게 설명하면, TEM은 전자총, 집속렌즈, 시료대, 대물렌즈, 중간렌즈 등 복수개의 전자렌즈 및 카메라로 구성되어 있으며, 그 작동과정은 다음과 같다 : 50~수백 ㎸의 음전압이 걸려있는 전자총에서 전자빔이 발사되면 전자빔은 집광렌즈에 의해 수렴되어 시료에 조사된다. 시료를 투과한 전자빔은 대물렌즈에 의해 수백배로 확대되어 중간렌즈 바로 위에 제1상을 맺는다. 제1상의 일부는 중간렌즈 및 투사렌즈로 확대되어 카메라실의 형광판 위에 상을 맺게 된다. 이때 초점은 대물렌즈의 여자전류를 조절하여 맞추게 되고, 배율은 중간렌즈 또는 투사렌즈에 흐르는 전류를 조절하여 가감할 수 있다. 전자빔은 작은 전자입자로 형성된 것으로 공기(gas) 입자에 의해 진행에 방해를 받기 때문에 TEM 내부는 10-7 torr 이하의 고진공 상태를 유지한다. Briefly, the TEM consists of a plurality of electron lenses and cameras, such as an electron gun, a focusing lens, a sample stage, an objective lens, and an intermediate lens, and the operation process is as follows: When the electron beam is emitted from the electron gun, the electron beam is converged by the condenser lens and irradiated onto the sample. The electron beam passing through the sample is magnified several hundred times by the objective lens to form a first image directly on the intermediate lens. Part of the first image is enlarged by the intermediate lens and the projection lens to form an image on the fluorescent plate of the camera room. At this time, the focus is adjusted by adjusting the excitation current of the objective lens, and the magnification may be adjusted by adjusting the current flowing through the intermediate lens or the projection lens. Since the electron beam is formed of small electron particles and is disturbed by the gas particles, the inside of the TEM maintains a high vacuum of 10 -7 torr or less.
TEM에는, 각 전자렌즈를 통과한 전자빔의 집속과 확대를 안정적으로 제어하기 위하여 모든 또는 일부 전자렌즈의 상부 또는 하부에 각각 4개의 조정코일(+X, -X, +Y 및 -Y)을 두고 있다. 도 1에 일반 TEM에서 전자렌즈(2개)와 조정코일(8개)의 위치를 예시적으로 도시하였다. 이들 전자렌즈와 조정코일 각각의 세트는 도 2에 개념적으로 도시한 바와 같이, 마주보는 한 쌍의 조정코일들 마다 렌즈제어부로부터 출력되는 하나의 신호에 의해 동시에 연동되어 제어된다. In the TEM, four staging coils (+ X, -X, + Y and -Y) are placed on the top or bottom of all or some of the electron lenses to reliably control the focusing and magnification of the electron beam passing through each electron lens. have. FIG. 1 exemplarily shows positions of two electron lenses and eight adjusting coils in a general TEM. Each of these sets of electronic lenses and adjustment coils is simultaneously controlled in conjunction with one signal output from the lens control unit for each pair of adjustment coils facing each other.
TEM에서 시료를 관찰하기 위해서는 먼저 전자빔이 중심축을 따라 시료대에 초점이 맞추어지도록 조정(alignment)해야 한다. 조정과정은 각각의 렌즈제어부가 서로 마주보는 한 쌍의 조정코일들에 흐르는 전류를 연동하여 제어함으로써 이루어지게 된다. 즉, 렌즈제어부에 의해 서로 마주보는 조정코일 쌍들을 조절하여 전자빔이 중심축에 일치되도록 조정하는 것이다. In order to observe the specimen in the TEM, the electron beam must first be aligned so that the electron beam is focused on the specimen stage along the central axis. The adjusting process is performed by interlocking and controlling the currents flowing through the pair of adjusting coils facing each other. That is, by adjusting the pair of adjustment coils facing each other by the lens control unit to adjust the electron beam to match the central axis.
TEM에서 전자빔을 시료장착면에 대해 수직으로 진행시키면 한 번의 시료장착과 관찰로 전자빔이 입사된 축방향에 대한 1차원 구조정보만 얻을 수 있다. When the electron beam is moved perpendicular to the specimen mounting surface in the TEM, only one-dimensional structural information on the axial direction in which the electron beam is incident can be obtained by one specimen placement and observation.
그러나 경우에 따라서는 복잡한 구조를 가진 시료의 3차원 구조를 정밀하게 분석할 필요가 있다. 이를 위해 전자빔의 회전각도와 회전속도에 변화를 주어 다양한 각도에서 시료의 내부구조를 분석할 수 있는 PED(precession electron diffraction : 세차전자회절) 분석방법이 개발된 바 있다(도 3 참조).In some cases, however, it is necessary to precisely analyze the three-dimensional structure of a sample with a complex structure. To this end, a PED (precession electron diffraction) analysis method has been developed that can analyze the internal structure of the sample at various angles by varying the rotation angle and rotation speed of the electron beam (see FIG. 3).
TEM에서 PED 분석을 하기 위해서 외부입력부를 통해 원하는 전자빔의 회전각도와 회전속도를 입력하면, 이를 입력받은 렌즈제어부가 사전에 정해진 소정 주파수와 전류를 조정코일에 인가함으로써 궁극적으로 전자빔의 회전각도와 회전속도가 변동하게 되는 것이다.In order to perform PED analysis in the TEM, if the desired rotation angle and rotation speed of the electron beam are input through the external input unit, the lens control unit receives the predetermined predetermined frequency and current to the adjustment coil, thereby ultimately rotating the rotation angle and rotation of the electron beam. The speed will fluctuate.
그러나 종래에는 마주보는 조정코일 쌍이 연동되어 동시에 제어되기 때문에 전자빔의 회전각도와 회전속도를 원하는 값에 일치시키기 어려워서 숙련된 사용자의 감각에 의존해야 했다. 따라서 PED 분석에 많은 시간이 소요되었을 뿐만 아니라, 시료의 동일지점을 반복 관찰하는 것이 거의 불가능하여 시료의 복합구조에 대한 정확한 정보를 얻기가 어려웠다.However, in the related art, it is difficult to match the rotation angle and the rotation speed of the electron beam to a desired value because the pair of opposing adjustment coils are simultaneously controlled at the same time. Therefore, the PED analysis was not only time-consuming but also difficult to repeatedly observe the same point of the sample, making it difficult to obtain accurate information about the complex structure of the sample.
본 발명은 PED 패턴분석법을 이용하여 물질의 3차원 구조해석을 보다 원활하게 할 수 있게 한 TEM의 디지털 조정코일제어장치를 제공하는 것을 목적으로 한다. It is an object of the present invention to provide a TEM digital control coil control device that enables a three-dimensional structural analysis of a material using PED pattern analysis.
또한 본 발명은 TEM을 이용하여 PED패턴을 분석하는 과정에서 조정코일에 공급되는 전원을 제어하는 제어값을 정량화함으로써 반복실험을 편리하게 하고 객관적인 분석 자료로 활용할 수 있게 한 TEM의 디지털 조정코일제어장치를 제공하는 것을 목적으로 한다. In addition, the present invention is a TEM digital adjustment coil control device that facilitates repeated experiments and can be used as an objective analysis data by quantifying the control value for controlling the power supplied to the adjustment coil in the process of analyzing the PED pattern using the TEM The purpose is to provide.
또한 본 발명은 상기 장치에 전자빔 회전속도 및 회전각도가 표시되는 표시부가 부가된 디지털 조정코일제어장치를 제공하는 것을 목적으로 한다. It is also an object of the present invention to provide a digital adjustment coil control apparatus having a display unit displaying an electron beam rotation speed and rotation angle.
전술한 목적을 달성하기 위한 본 발명은 TEM에서의 PED분석을 위한 장치로서, (A) 외부입력부를 통해 입력된 전자빔 회전속도 및 회전각도 제어명령에 대응하여 개별 조정코일 구동을 위해 인가되는 전류의 주파수값 및 전류값을 제어하는, 개별 조정코일에 대한 디지털 주파수생성신호 및 전류제어신호를 계산하여 각각 하기 신호동기화부 및 전류증폭부로 출력하는 연산부; (B) 상기 연산부로부터 입력되는 개별 조정코일에 대한 주파수생성신호를 TEM의 기준주파수에 동기화시켜 하기 전류증폭부로 출력하는 신호동기화부; 및 (C) 상기 연산부로부터 입력되는 개별 조정코일에 대한 디지털 전류제어신호를 아날로그 전류제어신호로 변환하고, 상기 신호동기화부로부터 입력되는 동기화된 주파수생성신호에 따라 상기 아날로그 전류제어신호를 조정코일을 구동할 수 있는 전류로 변환하여 대응되는 개별 조정코일로 인가하는 전류증폭부;를 포함하는, PED 분석을 위한 TEM의 디지털 조정코일제어장치에 관한 것이다. The present invention for achieving the above object is a device for PED analysis in the TEM, (A) in response to the electron beam rotation speed and rotation angle control command input through the external input unit of the current applied for driving the individual adjustment coil An operation unit for calculating the digital frequency generation signal and the current control signal for the individual adjustment coils for controlling the frequency value and the current value and outputting the calculated signal synchronization unit and the current amplifier unit, respectively; (B) a signal synchronizing unit for synchronizing the frequency generation signal for the individual adjustment coil inputted from the calculating unit to the reference frequency of the TEM and outputting the same to the current amplifier; And (C) converting the digital current control signal for the individual adjustment coil inputted from the calculating unit into an analog current control signal, and adjusting the analog current control signal according to the synchronized frequency generation signal inputted from the signal synchronization unit. It relates to a digital control coil control device of the TEM for PED analysis , including; a current amplifier for converting the drive current to apply to the corresponding individual control coil.
본 발명에 의한 디지털 조정코일제어장치는, 상기 전류증폭부의 출력이 개별 조정코일로 인가되도록 종래 TEM에 회로적으로 연결하여 PED 분석에 활용하게 된다.The digital adjustment coil control apparatus according to the present invention is connected to the conventional TEM by a circuit so that the output of the current amplification unit is applied to the individual adjustment coil to utilize for PED analysis.
본 발명의 설명에 사용되는 용어에 대해 정리한다.The terms used in the description of the present invention are summarized.
주파수생성신호는 전자빔의 회전속도를 제어하는 주파수를 생성하기 위한 신호이다. 각각의 조정코일에 순차적으로 전류를 공급할 때 주파수폭에 따라 전자빔의 회전속도가 정해진다.The frequency generation signal is a signal for generating a frequency for controlling the rotational speed of the electron beam. When sequentially supplying current to each adjustment coil, the rotation speed of the electron beam is determined according to the frequency width.
전류제어신호는 전자빔을 기울여서(tilting) 시료에 대한 입사각을 조절하는 전류값을 결정하기 위한 신호이다. 각 조정코일에 인가되는 전류의 세기의 차이에 의해 전자빔이 광축에서 일정 각도로 경사져서 입사된다.The current control signal is a signal for determining a current value for adjusting the incident angle to the sample by tilting the electron beam. The electron beam is inclined at an angle on the optical axis and is incident by the difference in the intensity of the current applied to each of the adjustment coils.
기준주파수는 TEM의 구동을 위해 설정된 기본적인 구동주파수이다. 따라서 본 발명에 의한 장치도 장착될 TEM의 기준주파수에 동기화되어야 한다.The reference frequency is the basic driving frequency set for driving the TEM. Therefore, the device according to the invention must also be synchronized to the reference frequency of the TEM to be mounted.
본 발명에 의한 상기 조정코일제어장치는 기존 TEM의 렌즈제어부의 기능을 완전 대체하여 조정코일을 제어하는 것(대체형)일 수도 있고, 렌즈제어부가 정상적으로 작동하며 렌즈제어부에서 각각의 조정코일로 전달되는 제어신호를 변형시키는 방식으로 조정코일을 제어하는 것(보완형)일 수도 있다. 대체형과 보완형은 기본 원리가 동일하고 회로구성 및 작동방식에서 당업자가 쉽게 파악할 수 있는 작은 차이가 있을 뿐이므로 이하에서는 대체형을 기준으로 설명한다. 그러나 본 발명이 보완형을 배제하는 것은 아니다.The adjustment coil control apparatus according to the present invention may be to replace the function of the lens control unit of the existing TEM completely (controlling the replacement coil), the lens control unit is normally operated and transferred from the lens control unit to each adjustment coil. The control coil may be controlled (complementary) in such a manner as to deform the control signal. The alternative type and the complementary type have the same basic principle, and there is only a small difference that can be easily understood by those skilled in the art in the circuit configuration and operation method. However, the present invention does not exclude complementary forms.
TEM에서 전자빔의 회전각도는 조정코일에 공급되는 전원의 전류값에 따라 변하고, 회전속도는 조정코일에 공급되는 전원의 주파수에 따라 변한다. 따라서 조정코일에 공급되는 전원을 제어한다거나 조정코일을 제어한다는 것은 조정코일 전원의 전류 및/또는 주파수를 제어한다는 의미이다.In the TEM, the rotation angle of the electron beam changes according to the current value of the power supplied to the adjustment coil, and the rotation speed changes according to the frequency of the power supply supplied to the adjustment coil. Therefore, controlling the power supplied to the control coil or controlling the control coil means controlling the current and / or frequency of the control coil power.
종래 TEM에 본 발명에 의한 디지털 조정코일제어장치를 장착하여 TEM의 전자빔 회전속도 및 회전각도를 더욱 정밀하게 제어함으로써 궁극적으로 복합구조로 이루어진 물질의 3차원구조 분석(PED 분석)을 보다 용이하고 신속하게 할 수 있도록 하는 것이다. Equipped with a digital adjustment coil control device according to the present invention in the conventional TEM more precisely control the electron beam rotation speed and rotation angle of the TEM ultimately easier and faster to analyze the three-dimensional structure (PED analysis) of the material consisting of a composite structure To let them do it.
상기 조정코일제어장치에 의해 조정코일을 제어하는 과정에서 얻어진 제어정보는 동일한 시료를 다시 관찰하거나 다른 시료를 관찰할 때 조정코일을 제어하기 위한 정보로 활용할 수 있다. 이를 위해 본 발명에 의한 장치에서 연산부는 출력되는 제어신호(주파수생성신호와 전류제어신호)에 대응하는 전자빔 회전속도 및 회전각도를 계산하는 기능을 더 포함하고, 상기 장치에는 연산부에서 계산된 전자빔 회전속도 및 회전각도을 표시하는 표시부를 더 구비하는 것이 바람직하다. The control information obtained in the process of controlling the adjusting coil by the adjusting coil control device may be used as information for controlling the adjusting coil when observing the same sample or observing another sample. To this end, the calculation unit in the device according to the present invention further includes a function for calculating the electron beam rotation speed and rotation angle corresponding to the output control signal (frequency generation signal and current control signal), the device includes the electron beam rotation calculated by the calculation unit It is preferable to further include a display unit for displaying the speed and the rotation angle.
한편, 상기 조정코일제어장치를 아날로그 회로로 구성할 경우 구조가 복잡해진다. 이에 따라 상기 조정코일제어장치는 제어프로그램이 설치된 컴퓨터인 것이 바람직하다. On the other hand, when the regulating coil control device is constituted by an analog circuit, the structure becomes complicated. Accordingly, the adjusting coil control device is preferably a computer on which a control program is installed.
본 발명은, 조정코일제어장치에 의해 조정코일에 공급되는 전원을 미세하게 조정함으로써 전자빔의 회전속도 및 회전각도를 정밀하게 조절할 수 있는 효과가 있다. The present invention has the effect of finely adjusting the rotational speed and the rotation angle of the electron beam by finely adjusting the power supplied to the adjustment coil by the adjustment coil control device.
또한 본 발명은, TEM을 이용한 DP분석 과정에서 현재 작동 중인 TEM 전자빔의 회전속도 및 회전각도에 대응하는 조정코일에 공급되는 전원 제어신호의 제어값을 실시간으로 확인할 수 있게 하고, 이를 이후 분석과정에서 다시 활용할 수 있게 함으로써 연구의 효율과 정확성을 증대시킬 수 있게 된다.In addition, the present invention, in the DP analysis process using the TEM, it is possible to check in real time the control value of the power control signal supplied to the adjustment coil corresponding to the rotational speed and the rotation angle of the TEM electron beam currently in operation, and in the subsequent analysis process By making it available again, you can increase the efficiency and accuracy of your research.
도 1은 종래 TEM에서 전자렌즈(2개)와 조정코일(8개) 및 시료의 공간적 위치를 보여주는 개념도, 1 is a conceptual diagram showing the spatial position of the electron lens (2) and the adjustment coil (8) and the sample in the conventional TEM,
도 2는 종래 TEM에서 마주보는 조정코일 쌍이 연동하여 제어되는 것을 나타낸 개념도,2 is a conceptual diagram showing that the control coil pair facing each other in the conventional TEM is controlled in conjunction with,
도 3은 TEM에서의 PED 분석을 보여주는 개념도,3 is a conceptual diagram showing PED analysis in TEM,
도 4는 본 발명에 의한 장치의 일예의 개념적 구성도, 4 is a conceptual configuration diagram of an example of an apparatus according to the present invention;
도 5는 본 발명에 의한 장치의 일예의 배선도. 5 is a wiring diagram of an example of an apparatus according to the present invention.
------------------------- 도면 부호의 설명 ----------------------------------------------------- Explanation of Reference Symbols --------------------- -------
100 : 조정코일제어장치100: adjusting coil control device
1 : 연산부  1: calculation unit
2 : 신호동기화부  2: Signal synchronization unit
3 : 전류증폭부  3: Current amplifier
4 : 표시부  4: display unit
12 : A/D변환기 31 : 감지단자 12: A / D converter 31: detection terminal
이하 첨부된 도면을 참조하여 본 발명을 상세하게 설명한다. 그러나 이들 도면은 예시적인 목적일 뿐, 이에 의해 본 발명의 기술적 범위가 한정되거나 변경되는 것은 아니다. 또한 이러한 예시에 기초하여 본 발명의 기술적 사상의 범위 안에서 다양한 변형과 변경이 가능함은 당업자에게는 당연할 것이다. Hereinafter, the present invention will be described in detail with reference to the accompanying drawings. However, these drawings are only for illustrative purposes, and the technical scope of the present invention is not limited or changed. In addition, it will be apparent to those skilled in the art that various modifications and changes can be made within the scope of the present invention based on these examples.
TEM을 이용하여 물질의 3차원 구조해석을 하기 위해서는 전자빔의 회전속도 및 회전각도를 제어하여야 한다. 전자빔의 회전각도는 조정코일에 공급되는 전원의 전류에 따라 변하고, 회전속도는 조정코일에 공급되는 전원의 주파수에 따라 변하므로 효율적인 3차원 구조분석을 위해서는, 개별 조정코일에 공급되는 전원의 주파수와 전류를 모두 제어할 수 있어야 한다. In order to analyze the three-dimensional structure of the material using TEM, the rotational speed and the rotation angle of the electron beam must be controlled. The rotation angle of the electron beam changes according to the current of the power supplied to the adjustment coil, and the rotation speed changes according to the frequency of the power supplied to the adjustment coil. Therefore, for efficient three-dimensional structural analysis, the frequency of the power supplied to the individual adjustment coil All currents must be controlled.
본 발명은 TEM의 렌즈부에 설치된 조정코일에 공급되는 전원의 주파수와 전류를 보다 미세하게 제어하여 전자빔의 회전속도 및 회전각도를 정밀하게 조정할 수 있도록 개별 조정코일에 공급되는 전원의 주파수와 전류를 제어하기 위한 조정코일제어장치(100)로서 연산부(1), 신호동기화부(2) 및 전류증폭부(3)를 필수적으로 포함한다. 본 발명에 의한 조정코일제어장치의 개념적인 일예가 TEM에 회로적으로 연결된 구성을 도 4에 도시하였다. The present invention more precisely controls the frequency and current of the power supplied to the adjustment coil installed in the lens of the TEM to adjust the frequency and current of the power supplied to the individual adjustment coil so that the rotation speed and the rotation angle of the electron beam can be precisely adjusted. The adjusting coil control apparatus 100 for controlling essentially includes an operation unit 1, a signal synchronization unit 2, and a current amplifier 3. 4 illustrates a configuration in which a conceptual coil control apparatus according to the present invention is connected to a TEM in a circuit.
상기 연산부(1)는, 외부입력부를 통해 입력된 전자빔 회전속도 및 회전각도 제어명령에 대응하여 개별 조정코일 구동을 위해 인가되는 전류의 주파수값 및 전류값을 제어하는, 개별 조정코일에 대한 디지털 주파수생성신호 및 전류제어신호를 계산하여 각각 하기 신호동기화부 및 전류증폭부로 출력하는 역할을 한다. 여기서 외부(사용자)로부터 제어명령을 입력받는 상기 외부입력부는, 본 발명에 의한 장치에 포함되어 있을 수도 있고 장착될 TEM의 외부입력부일 수도 있다. 전자인 경우, 외부입력부는 입출력장치를 구비한 통상의 컴퓨터나 가변저항형의 조절노브를 구비한 제어장치일 수도 있다.The calculation unit 1 controls the frequency value and current value of the current applied for driving the individual adjustment coil in response to the electron beam rotation speed and rotation angle control command input through the external input unit, and the digital frequency for the individual adjustment coil. It calculates the generated signal and the current control signal and serves to output to the signal synchronization unit and the current amplifier, respectively. Here, the external input unit that receives a control command from an external (user) may be included in the apparatus according to the present invention or may be an external input unit of a TEM to be mounted. In the former case, the external input unit may be a conventional computer having an input / output device or a control device having a control knob of a variable resistance type.
상기 신호동기화부(2)는, 상기 연산부로부터 입력되는 개별 조정코일에 대한 주파수생성신호를 TEM의 기준주파수에 동기화시켜 하기 전류증폭부로 출력하는 기능을 한다. 기준주파수는 장착될 TEM의 기준주파수를 자동으로 인식되도록 할 수도 있고 장착될 TEM의 기준주파수 정보를 따로 입력되도록 할 수도 있다.The signal synchronization unit 2 functions to synchronize the frequency generation signal for the individual adjustment coil inputted from the calculation unit to the reference frequency of the TEM and output the same to the current amplifier. The reference frequency may be automatically recognized the reference frequency of the TEM to be mounted, or may be input separately to the reference frequency information of the TEM to be mounted.
상기 전류증폭부(3)는, 상기 연산부로부터 입력되는 개별 조정코일에 대한 디지털 전류제어신호를 아날로그 전류제어신호로 변환하고, 상기 신호동기화부로부터 입력되는 동기화된 주파수생성신호에 따라 상기 아날로그 전류제어신호를 조정코일을 구동할 수 있는 전류로 변환하여 대응되는 개별 조정코일로 인가한다.The current amplifier 3 converts the digital current control signal for the individual adjustment coil input from the calculator into an analog current control signal, and controls the analog current according to the synchronized frequency generation signal input from the signal synchronization unit. The signal is converted into a current capable of driving the adjusting coil and applied to the corresponding individual adjusting coil.
상기 연산부(1)로부터 출력되는 전류제어신호는 디지털신호이므로 후속 연결된 전류증폭부(3)에서 인식할 수 있도록 D/A변환기(11)를 이용하여 아날로그 신호로 변환할 수 있는데, 이때 상기 D/A변환기(11)는 전류증폭부(3)와 물리적으로 독립될 수도 있고, 전류증폭부(3)의 내부기능으로 포괄될 수도 있다.Since the current control signal output from the calculator 1 is a digital signal, it can be converted into an analog signal by using the D / A converter 11 so that the current amplifier 3 can be subsequently connected. The A converter 11 may be physically independent of the current amplifier 3 and may be encompassed as an internal function of the current amplifier 3.
전술한 바와 같은 조정코일제어장치를 이용하여 전자빔의 회전각도와 속도를 조절하는 과정에서, 사용자가 외부입력부를 통해 제어명령을 입력하면 이에 대응하여 전자빔의 회전각도와 회전속도가 변한다. 그러나 사용자는 입력한 제어명령과 전자빔의 회전각도와 회전속도 변화량의 대응 관계를 확인할 수 없으므로 사용자는 임의의 제어명령을 입력한 후 수차례의 수정된 제어명령을 입력하는 과정을 반복하여 전자빔을 제어하여야 하므로 전자빔의 제어에 많은 시간과 노력이 소요되는 문제가 있다. In the process of adjusting the rotation angle and speed of the electron beam by using the adjustment coil control device as described above, when the user inputs a control command through the external input unit, the rotation angle and rotation speed of the electron beam change correspondingly. However, the user cannot confirm the correspondence between the input control command and the rotation angle of the electron beam and the rotational speed change amount. Therefore, the user controls the electron beam by repeatedly inputting a control command several times after inputting an arbitrary control command. There is a problem that takes a lot of time and effort to control the electron beam.
이러한 문제를 해결할 수 있도록 상기 연산부(1)은 출력되는 제어신호(주파수생성신호와 전류제어신호)에 대응하는 전자빔 회전속도 및 회전각도을 계산하는 기능을 더 포함하고, 상기 연산부에서 계산된 전자빔 회전속도 및 회전각도을 표시하는 표시부(4)를 더 구비하는 것이 바람직하다. 상기 표시부(4)는 전술한 외부입력부의 하나인 컴퓨터에 구비된 모니터를 사용할 수 있다. In order to solve this problem, the calculation unit 1 further includes a function of calculating an electron beam rotation speed and a rotation angle corresponding to the output control signal (frequency generation signal and current control signal), and the electron beam rotation speed calculated by the calculation unit. And a display portion 4 for displaying the rotation angle. The display unit 4 may use a monitor provided in a computer which is one of the external input units described above.
나아가 계산된 제어명령과 회전속도 및 회전각도의 대응관계를 소정의 기억장치에 저장하였다가 이후에 편리하게 활용하는 것도 가능하다. Furthermore, it is also possible to store the correspondence between the calculated control command and the rotational speed and the rotational angle in a predetermined memory device and use it later.
상기 연산부(1)에서, 전자빔의 회전속도 및 회전각도를 조절하는 제어신호를 감지하는 방법은 조정코일제어장치(100)를 구성하는 방식에 따라 달라질 수 있다. In the operation unit 1, a method of detecting a control signal for adjusting the rotation speed and the rotation angle of the electron beam may vary depending on the configuration of the adjustment coil control device 100.
도 4에 도시한 바와 같이 조정코일제어장치(100)를 아날로그 회로로 구성할 경우에는 조정코일제어장치로부터 출력되는 제어신호 출력단에 감지단자(31)를 설치하여 제어신호를 감지한다. 이때 감지단자(31)에서 감지된 제어신호는 아날로그 신호이므로 A/D변환기(12)를 이용하여 디지털 신호로 변환하여 연산부로 전송한다. As shown in FIG. 4, when the adjustment coil control device 100 is configured as an analog circuit, a detection terminal 31 is installed at a control signal output terminal output from the adjustment coil control device to detect a control signal. At this time, since the control signal detected by the sensing terminal 31 is an analog signal, the control signal is converted into a digital signal using the A / D converter 12 and transmitted to the operation unit.
도시하지는 않았으나, 후술하는 바와 같이 조정코일제어장치(100)를 컴퓨터에 설치된 프로그램의 형태로 구성할 경우에는 제어신호는 연산부(1)에서 생성되므로 이 제어신호를 직접 전자빔 회전속도 및 회전각도로 연산하면 된다. Although not shown, when the adjustment coil control device 100 is configured in the form of a program installed in a computer as described below, the control signal is generated by the calculation unit 1, and thus the control signal is directly calculated at the electron beam rotation speed and rotation angle. Just do it.
상기와 같이 연산부에서 계산된 전자빔 회전속도 및 회전각도는 새로운 시료 분석을 위해 전자빔을 제어할 때의 기준 정보로 사용할 수 있도록 소정의 기억장치에 저장해 두는 것이 바람직하다. As described above, the electron beam rotation speed and the rotation angle calculated by the calculation unit are preferably stored in a predetermined memory device to be used as reference information when controlling the electron beam for a new sample analysis.
한편, 상기 조정코일제어장치(100)는 도 5에 도시한 바와 같은 아날로그 회로로 제작할 경우 시스템이 복잡해질 뿐만 아니라 다른 TEM에 적용하기 위해서는 회로를 변경하여야 한다. 따라서 본 발명에 의한 조정코일제어장치는 컴퓨터로서, 상기 연산부, 신호동기화부 및 전류증폭부의 기능이 프로그램 형태로 탑재되도록 할 수도 있다.On the other hand, the control coil control device 100 is not only complicated system when manufactured by the analog circuit as shown in Figure 5 but also to change the circuit to apply to other TEM. Therefore, the adjustment coil control apparatus according to the present invention may be a computer, and the functions of the operation unit, the signal synchronization unit, and the current amplifier unit may be mounted in a program form.

Claims (5)

  1. TEM에서의 PED분석을 위한 장치로서, As a device for PED analysis in TEM,
    외부입력부를 통해 입력된 전자빔 회전속도 및 회전각도 제어명령에 대응하여 개별 조정코일 구동을 위해 인가되는 전류의 주파수값 및 전류값을 제어하는, 개별 조정코일에 대한 디지털 주파수생성신호 및 전류제어신호를 계산하여 각각 하기 신호동기화부 및 전류증폭부로 출력하는 연산부; The digital frequency generation signal and the current control signal for the individual adjustment coil are controlled in response to the electron beam rotation speed and rotation angle control command input through the external input unit. A calculation unit for calculating and outputting the signal synchronization unit and the current amplifier unit, respectively;
    상기 연산부로부터 입력되는 개별 조정코일에 대한 주파수생성신호를 TEM의 기준주파수에 동기화시켜 하기 전류증폭부로 출력하는 신호동기화부; 및 A signal synchronizing unit for synchronizing the frequency generating signal for the individual adjusting coil inputted from the calculating unit to the reference frequency of the TEM and outputting the same to the current amplifier; And
    상기 연산부로부터 입력되는 개별 조정코일에 대한 디지털 전류제어신호를 아날로그 전류제어신호로 변환하고, 상기 신호동기화부로부터 입력되는 동기화된 주파수생성신호에 따라 상기 아날로그 전류제어신호를 조정코일을 구동할 수 있는 전류로 변환하여 대응되는 개별 조정코일로 인가하는 전류증폭부;를 It is possible to convert the digital current control signal for the individual adjustment coil input from the calculating unit into an analog current control signal, and drive the adjustment coil by adjusting the analog current control signal according to the synchronized frequency generation signal input from the signal synchronization unit. A current amplifier for converting the current into a corresponding adjustment coil;
    포함하는 것을 특징으로 하는 PED 분석을 위한 TEM의 디지털 조정코일제어장치.Digital adjustment coil control device of the TEM for PED analysis comprising a.
  2. 제 1 항에 있어서, The method of claim 1,
    상기 연산부는, The calculation unit,
    출력되는 주파수생성신호 및 전류제어신호에 대응하는 전자빔 회전속도 및 회전각도를 계산하는 기능을 더 포함하고, And a function of calculating an electron beam rotation speed and rotation angle corresponding to the output frequency generation signal and the current control signal.
    상기 연산부에서 계산된 전자빔 회전속도 및 회전각도를 표시하는 표시부가 추가되는 것을 특징으로 하는 PED 분석을 위한 TEM의 디지털 조정코일제어장치.And a display unit for displaying the electron beam rotation speed and rotation angle calculated by the calculation unit.
  3. 제 1 항 또는 제 2 항에 있어서,The method according to claim 1 or 2,
    상기 조정코일제어장치는 연산부에서 계산된 전자빔 회전속도 및 회전각도를 저장하는 저장장치를 더 구비하는 것을 특징으로 하는 PED 분석을 위한 TEM의 디지털 조정코일제어장치.The regulating coil control apparatus further comprises a storage device for storing the electron beam rotation speed and rotation angle calculated by the calculating unit.
  4. 제 1 항 또는 제 2 항에 있어서,The method according to claim 1 or 2,
    상기 조정코일제어장치는,The adjusting coil control device,
    상기 연산부, 신호동기화부 및 전류증폭부가 프로그램 형태로 탑재되어 있는 컴퓨터인 것을 특징으로 하는 PED 분석을 위한 TEM의 디지털 조정코일제어장치.Digital control coil control device of the TEM for PED analysis, characterized in that the computing unit, the signal synchronization unit and the current amplifier is a computer that is mounted in the form of a program.
  5. 제 3 항에 있어서,The method of claim 3, wherein
    상기 조정코일제어장치는,The adjusting coil control device,
    상기 연산부, 신호동기화부 및 전류증폭부가 프로그램 형태로 탑재되어 있는 컴퓨터인 것을 특징으로 하는 PED 분석을 위한 TEM의 디지털 조정코일제어장치.Digital control coil control device of the TEM for PED analysis, characterized in that the computing unit, the signal synchronization unit and the current amplifier is a computer that is mounted in the form of a program.
PCT/KR2011/004130 2011-06-07 2011-06-07 Apparatus for controlling digital alignment coils of tem for ped analysis and apparatus for displaying rotation speed and rotation angle of electronic beam WO2012169665A1 (en)

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