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WO2012006019A3 - Customizable dispense system with smart controller - Google Patents

Customizable dispense system with smart controller Download PDF

Info

Publication number
WO2012006019A3
WO2012006019A3 PCT/US2011/042018 US2011042018W WO2012006019A3 WO 2012006019 A3 WO2012006019 A3 WO 2012006019A3 US 2011042018 W US2011042018 W US 2011042018W WO 2012006019 A3 WO2012006019 A3 WO 2012006019A3
Authority
WO
WIPO (PCT)
Prior art keywords
pump
smart controller
dispense system
smart
customizable dispense
Prior art date
Application number
PCT/US2011/042018
Other languages
French (fr)
Other versions
WO2012006019A2 (en
Inventor
James Cedrone
Iraj Gashgaee
Paul J. Magoon
Jennifer M. Braggin
George L. Gonnella
Johnathan Owen Vail
Original Assignee
Entegris, Inc.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Entegris, Inc. filed Critical Entegris, Inc.
Priority to JP2013518534A priority Critical patent/JP5883856B2/en
Priority to US13/805,601 priority patent/US20130101438A1/en
Priority to CN201180032168.5A priority patent/CN102959683B/en
Priority to KR1020137002286A priority patent/KR101810719B1/en
Priority to SG2012092144A priority patent/SG186725A1/en
Priority to EP11804086.4A priority patent/EP2586053A4/en
Publication of WO2012006019A2 publication Critical patent/WO2012006019A2/en
Publication of WO2012006019A3 publication Critical patent/WO2012006019A3/en

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/06—Pumps having fluid drive
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D83/00—Containers or packages with special means for dispensing contents
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/007—Installations or systems with two or more pumps or pump cylinders, wherein the flow-path through the stages can be changed, e.g. from series to parallel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/02—Stopping, starting, unloading or idling control
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Control Of Positive-Displacement Pumps (AREA)
  • Reciprocating Pumps (AREA)
  • Fluid-Pressure Circuits (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Coating Apparatus (AREA)

Abstract

Embodiments disclosed provide a customizable dispense system implementing modular architecture, the customizable dispense system comprising a smart controller configured to operate various pneumatic pumps and motor pumps in various semiconductor manufacturing processes that are sensitive to defects in printed patterns. The smart controller is configured to, upon switching from communicating with a first pump to a second pump, automatically recognize the second pump and apply a control scheme to control the second pump, which may be a motor pump or a pneumatic pump. The s witching may be due to physical disconnection of the first pump and physical connection of the second pump or it can be entirely done via software. The smart controller may be connected to track and a variety of devices, including smart filters.
PCT/US2011/042018 2010-06-28 2011-06-27 Customizable dispense system with smart controller WO2012006019A2 (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2013518534A JP5883856B2 (en) 2010-06-28 2011-06-27 Customizable derivation system with smart controller
US13/805,601 US20130101438A1 (en) 2010-06-28 2011-06-27 Customizable dispense system with smart controller
CN201180032168.5A CN102959683B (en) 2010-06-28 2011-06-27 There is the Customizable dispense system of intelligent controller
KR1020137002286A KR101810719B1 (en) 2010-06-28 2011-06-27 Customizable dispense system with smart controller
SG2012092144A SG186725A1 (en) 2010-06-28 2011-06-27 Customizable dispense system with smart controller
EP11804086.4A EP2586053A4 (en) 2010-06-28 2011-06-27 Customizable dispense system with smart controller

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US35923910P 2010-06-28 2010-06-28
US61/359,239 2010-06-28

Publications (2)

Publication Number Publication Date
WO2012006019A2 WO2012006019A2 (en) 2012-01-12
WO2012006019A3 true WO2012006019A3 (en) 2012-04-05

Family

ID=45441718

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2011/042018 WO2012006019A2 (en) 2010-06-28 2011-06-27 Customizable dispense system with smart controller

Country Status (8)

Country Link
US (1) US20130101438A1 (en)
EP (1) EP2586053A4 (en)
JP (1) JP5883856B2 (en)
KR (1) KR101810719B1 (en)
CN (1) CN102959683B (en)
SG (1) SG186725A1 (en)
TW (2) TW201613018A (en)
WO (1) WO2012006019A2 (en)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9395049B2 (en) 2013-07-23 2016-07-19 Baker Hughes Incorporated Apparatus and methods for delivering a high volume of fluid into an underground well bore from a mobile pumping unit
WO2015080081A1 (en) * 2013-11-29 2015-06-04 リソテックジャパン株式会社 Chemical liquid supply mechanism and small-sized manufacturing device
US9937990B2 (en) * 2014-08-01 2018-04-10 Circor Pumps North America, Llc Intelligent sea water cooling system
WO2016130866A1 (en) * 2015-02-12 2016-08-18 Entegris, Inc. Smart package
US10221856B2 (en) 2015-08-18 2019-03-05 Bj Services, Llc Pump system and method of starting pump
JP6736989B2 (en) * 2016-06-07 2020-08-05 東京エレクトロン株式会社 Treatment liquid supply device, equipment unit, treatment liquid supply method and storage medium
JP6942497B2 (en) * 2016-09-08 2021-09-29 東京エレクトロン株式会社 Processing liquid supply device
CN106241246B (en) * 2016-10-09 2018-07-10 长沙高汇环保科技有限公司 Article automatic distributing retracting device control method
GB201704763D0 (en) * 2017-01-05 2017-05-10 Illumina Inc
US11054803B2 (en) 2018-07-13 2021-07-06 Delta Electronics, Inc. Motor drive, production system and method thereof with quality measuring and mechanism diagnosing functions using real and virtual system modules
TWI692702B (en) * 2018-07-13 2020-05-01 台達電子工業股份有限公司 Production system with product quality measurement function and mechanism diagnosis function and driver and method thereof
CN110360089B (en) * 2019-05-17 2021-07-27 保定雷弗流体科技有限公司 A network-based speed regulating peristaltic pump system and flow regulating method thereof
DE102019115009A1 (en) * 2019-06-04 2020-12-10 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Print head and method of making a print head
JP7274356B2 (en) * 2019-06-11 2023-05-16 東京エレクトロン株式会社 LIQUID PROCESSING APPARATUS, LIQUID PROCESSING METHOD AND STORAGE MEDIA

Citations (4)

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US7029238B1 (en) * 1998-11-23 2006-04-18 Mykrolis Corporation Pump controller for precision pumping apparatus
US20060272576A1 (en) * 2005-06-02 2006-12-07 Chain-Chi Huang Piping system structure of semiconductor equipment
US7259675B2 (en) * 2004-03-16 2007-08-21 Newage Industries, Inc. Process equipment tracking system
JP2009099737A (en) * 2007-10-16 2009-05-07 Tokyo Electron Ltd Processing liquid supply unit, liquid processing apparatus, processing liquid supply method, and storage medium

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JP3360951B2 (en) * 1994-08-11 2003-01-07 エービービー株式会社 Painting equipment
JPH10281069A (en) * 1997-04-03 1998-10-20 Iwaki:Kk Pump unit
JP3415061B2 (en) * 1999-04-05 2003-06-09 東芝機械株式会社 Drive control method and device for electric motor for driving hydraulic pump in injection molding machine
JP2001038663A (en) * 1999-07-28 2001-02-13 Yamaha Motor Co Ltd Machine control system
US6912443B2 (en) * 2000-03-10 2005-06-28 David W. Duemler Modular automated assembly system
US7717682B2 (en) * 2005-07-13 2010-05-18 Purity Solutions Llc Double diaphragm pump and related methods
US7850431B2 (en) * 2005-12-02 2010-12-14 Entegris, Inc. System and method for control of fluid pressure
CN102705209B (en) * 2005-12-02 2015-09-30 恩特格里公司 For system and method pressure compensated in pump
CN101495756B (en) * 2005-12-02 2012-07-04 恩特格里公司 System and method for correcting for pressure variations using a motor
TWI402423B (en) * 2006-02-28 2013-07-21 Entegris Inc System and method for operation of a pump
US20080257912A1 (en) * 2007-04-17 2008-10-23 Bach David T Plug and play fluid dispensing technology
JP5085236B2 (en) * 2007-08-29 2012-11-28 株式会社川本製作所 Water supply device and water supply system using water supply device

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7029238B1 (en) * 1998-11-23 2006-04-18 Mykrolis Corporation Pump controller for precision pumping apparatus
US7259675B2 (en) * 2004-03-16 2007-08-21 Newage Industries, Inc. Process equipment tracking system
US20060272576A1 (en) * 2005-06-02 2006-12-07 Chain-Chi Huang Piping system structure of semiconductor equipment
JP2009099737A (en) * 2007-10-16 2009-05-07 Tokyo Electron Ltd Processing liquid supply unit, liquid processing apparatus, processing liquid supply method, and storage medium

Non-Patent Citations (1)

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Title
See also references of EP2586053A4 *

Also Published As

Publication number Publication date
EP2586053A2 (en) 2013-05-01
WO2012006019A2 (en) 2012-01-12
KR101810719B1 (en) 2017-12-19
SG186725A1 (en) 2013-02-28
TW201212143A (en) 2012-03-16
KR20130133752A (en) 2013-12-09
US20130101438A1 (en) 2013-04-25
CN102959683B (en) 2016-04-06
TW201613018A (en) 2016-04-01
EP2586053A4 (en) 2018-05-02
JP2013539202A (en) 2013-10-17
JP5883856B2 (en) 2016-03-15
TWI545669B (en) 2016-08-11
CN102959683A (en) 2013-03-06

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