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WO2011095795A1 - Pompe à membrane et structure de valve - Google Patents

Pompe à membrane et structure de valve Download PDF

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Publication number
WO2011095795A1
WO2011095795A1 PCT/GB2011/050141 GB2011050141W WO2011095795A1 WO 2011095795 A1 WO2011095795 A1 WO 2011095795A1 GB 2011050141 W GB2011050141 W GB 2011050141W WO 2011095795 A1 WO2011095795 A1 WO 2011095795A1
Authority
WO
WIPO (PCT)
Prior art keywords
valve
pump
plate
flap
cavity
Prior art date
Application number
PCT/GB2011/050141
Other languages
English (en)
Inventor
James Edward Mccrone
Stuart Andrew Hatfield
Original Assignee
The Technology Partnership Plc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by The Technology Partnership Plc filed Critical The Technology Partnership Plc
Publication of WO2011095795A1 publication Critical patent/WO2011095795A1/fr

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F04B43/046—Micropumps with piezoelectric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/04—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
    • F04B45/047—Pumps having electric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
    • F16K99/0005—Lift valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0034—Operating means specially adapted for microvalves
    • F16K99/0042—Electric operating means therefor
    • F16K99/0048—Electric operating means therefor using piezoelectric means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0082—Microvalves adapted for a particular use
    • F16K2099/0094—Micropumps

Definitions

  • the illustrative embodiments of the invention relate generally to a pump for fluid and, more specifically, to a pump in which the pumping cavity is substantially a disc-shaped, cylindrical cavity having substantially circular end walls and a side wall. More specifically again, the illustrative embodiments of the invention relate to a pump in which a valve is located within an actuated end wall of the pump, a so-called "actuator-mounted valve"
  • Such a pump has a substantially cylindrical cavity comprising a side wall closed at each end by end walls.
  • the pump also comprises an actuator that drives either one of the end walls to oscillate in a direction substantially perpendicular to the surface of the driven end wall.
  • the spatial profile of the motion of the driven end wall is described as being matched to the spatial profile of the fluid pressure oscillations within the cavity, a state described herein as mode-matching.
  • work done by the actuator on the fluid in the cavity adds constructively across the driven end wall surface, thereby enhancing the amplitude of the pressure oscillation in the cavity and delivering high pump efficiency.
  • the efficiency of a mode-matched pump is dependent upon the interface between the driven end wall and the side wall. It is desirable to maintain the efficiency of such pump by structuring the interface so that it does not decrease or dampen the motion of the driven end wall thereby mitigating any reduction in the amplitude of the fluid pressure oscillations within the cavity.
  • the actuator of the pump described above causes an oscillatory motion of the driven end wall ("displacement oscillations") in a direction substantially perpendicular to the end wall or substantially parallel to the longitudinal axis of the cylindrical cavity, referred to hereinafter as “axial oscillations" of the driven end wall within the cavity.
  • the axial oscillations of the driven end wall generate substantially proportional "pressure oscillations" of fluid within the cavity creating a radial pressure distribution approximating that of a Bessel function of the first kind as described in the '487 Application which is incorporated by reference herein, such oscillations referred to hereinafter as “radial oscillations" of the fluid pressure within the cavity.
  • a portion of the driven end wall between the actuator and the side wall provides an interface with the side wall of the pump that decreases dampening of the displacement oscillations to mitigate any reduction of the pressure oscillations within the cavity, that portion being referred to hereinafter as an "isolator.”
  • the illustrative embodiments of the isolator are operatively associated with the peripheral portion of the driven end wall to reduce dampening of the displacement oscillations.
  • the pump comprises a pump body having a substantially cylindrical shape defining a cavity formed by a side wall closed at both ends by substantially circular end walls, at least one of the end walls being a driven end wall having a central portion and a peripheral portion adjacent the side wall, wherein the cavity contains a fluid when in use.
  • the pump further comprises an actuator operatively associated with the central portion of the driven end wall to cause an oscillatory motion of the driven end wall in a direction substantially perpendicular thereto with a maximum amplitude at about the centre of the driven end wall, thereby generating displacement oscillations of the driven end wall when in use.
  • the pump further comprises an isolator operatively associated with the peripheral portion of the driven end wall to reduce dampening of the displacement oscillations caused by the end wall's connection to the side wall of the cavity as described more specifically in U.S. Patent Application No.
  • the pump further comprises a first aperture disposed at about the centre of one of the end walls, and a second aperture disposed at any other location in the pump body, whereby the displacement oscillations generate radial oscillations of fluid pressure within the cavity of said pump body causing fluid flow through said apertures.
  • Such pumps also require one or more valves for controlling the flow of fluid through the pump and, more specifically, valves being capable of operating at high frequencies.
  • Conventional valves typically operate at lower frequencies below 500 Hz for a variety of applications.
  • many conventional compressors typically operate at 50 or 60 Hz.
  • Linear resonance compressors known in the art operate between 150 and 350 Hz.
  • many portable electronic devices including medical devices require pumps for delivering a positive pressure or providing a vacuum that are relatively small in size and it is advantageous for such pumps to be inaudible in operation so as to provide discrete operation.
  • such pumps must operate at very high frequencies requiring valves capable of operating at about 20 kHz and higher.
  • the valve must be responsive to a high frequency oscillating pressure that can be rectified to create a net flow of fluid through the pump.
  • Valves may be disposed in either the first or second aperture, or both apertures, for controlling the flow of fluid through the pump.
  • Each valve comprises a first plate having apertures extending generally perpendicular therethrough and a second plate also having apertures extending generally perpendicular therethrough, wherein the apertures of the second plate are substantially offset from the apertures of the first plate.
  • the valve further comprises a sidewall disposed between the first and second plate, wherein the sidewall is closed around the perimeter of the first and second plates to form a cavity between the first and second plates in fluid communication with the apertures of the first and second plates.
  • the valve further comprises a flap disposed and moveable between the first and second plates, wherein the flap has apertures substantially offset from the apertures of the first plate and substantially aligned with the apertures of the second plate.
  • the flap is motivated between the first and second plates in response to a change in direction of the differential pressure of the fluid across the valve.
  • the pump may include one or more such valves, which may be located in a number of different configurations in order to achieve different pumping effects. Some of these configurations are disclosed in the ⁇ 47 application.
  • the pump it is advantageous for the pump to include two valves, located substantially at the centers of the two end walls of the cavity. As one of the end walls of the cavity is driven by the actuator, it is necessary in this case that the valve is designed, constructed, and mounted so as to effectively rectify the pressure oscillation generated within the cavity while being subjected to the vibration of the actuator in operation.
  • this actuator-mounted valve may be significant, presenting significant challenges to valve design and construction, and to valve mounting and sealing to the actuated end wall.
  • the embodiments and methods described in the present invention enable a functional, reliable AMV to be assembled.
  • a design for an actuator-mounted valve is disclosed, suitable for controlling the flow of fluid at high frequencies under the vibration it is subjected to during operation when located within the driven end-wall of the pump cavity described above.
  • Figure 1 A shows a schematic, cross-section view of a first pump according to an illustrative embodiment of the invention.
  • Figure IB shows a schematic, top view of the first pump of Figure 1A.
  • Figure 2A shows a graph of the axial displacement oscillations for the
  • Figure 2B shows a graph of the pressure oscillations of fluid within the cavity of the first pump of Figure 1A in response to the bending mode shown in Figure 2 A.
  • Figure 3A shows a schematic, cross-section view of a second pump according to an illustrative embodiment of the invention wherein the valve is reversed such that the pressure differential provided by the pump is opposite to that of the embodiment of Figure 1A.
  • Figure 3B shows a schematic, cross-sectional view of an illustrative embodiment of a valve utilized in the pump of Figure 3 A.
  • Figure 4 shows a graph of pressure oscillations of fluid within the cavity of the second pump of Figure 3 A as shown in Figure 2B.
  • Figure 5A shows a schematic, cross-section view of an illustrative embodiment of a valve in a closed position.
  • Figure 5B shows an exploded, sectional view of the valve of Figure 5 A taken along line 5B-5B in Figure 5D.
  • Figure 5C shows a schematic, perspective view of the valve of Figure 5B.
  • Figure 5D shows a schematic, top view of the valve of Figure 5B.
  • Figure 6 A shows a schematic, cross-section view of the valve in Figure 5 B in an open position when fluid flows through the valve.
  • Figure 6B shows a schematic, cross-section view of the valve in Figure 5B in transition between the open and closed positions before closing.
  • Figure 6C shows a schematic, cross-section view of the valve of Figure 5B in a closed position when fluid flow is blocked by the valve.
  • Figure 7A shows a graph of an oscillating differential pressure applied across the valve of Figure 1 B according to an illustrative embodiment.
  • Figure 7B shows a graph of an operating cycle of the valve of Figure 1 B between an open and closed position.
  • Figure 8A shows a schematic, cross-section view of a bi-directional valve having two valve portions that allow fluid flow in opposite directions with one valve portion having a normally closed position and the other having a normally open position according to an illustrative embodiment.
  • Figure 8B shows a schematic, top view of the bi-directional valves of Figure 8A.
  • Figure 8C shows a graph of the operating cycles of the valves of Figure 8A between an open and closed position.
  • Figure 8D shows a schematic, cross-section view of a pump including a bidirectional valve according to an illustrative embodiment of the invention.
  • Figure 9A shows a schematic, cross-section view of a pump having two separate valves according to an illustrative embodiment.
  • Figure 9B shows an exploded, sectional view of the two valves of the pump of Figure 9A.
  • Figure 10A shows an exploded, perspective view of the components of a notched valve according to an illustrative embodiment.
  • Figure 10B shows a perspective view of the notched valve of Figure 10A assembled according to an illustrative embodiment.
  • Figure IOC shows a partial, cross-section view of the assembled valve of Figure 10B taken along the line IOC- IOC in Figure 10B.
  • Figure 10D shows an exploded, perspective view of a notch and weld in the edge of the valve of Figure 10B.
  • Figure 1 1 A shows a perspective, cross-section view of the notched valve of Figure 10B installed in the pump of Figure 9B on the actuator end wall, i.e., an actuator mounted valve (AMV).
  • AMV actuator mounted valve
  • Figure 1 IB shows an exploded, side view of the edge of the AMV of Figure 1 1A.
  • Figure 1 1C shows the exploded, side view of the edge of the AMV of Figure 1 1 A sealed within the pump of Figure 1 1 A.
  • Figure 12A shows a partial schematic, cross-section view of a notched valve of Figure 10B being installed in the pump of Figure 9B on the end wall facing the actuator of the pump.
  • Figure 12B shows an exploded view of the edge of a second embodiment of the notched valve of Figure 12A sealed within the pump without a tapered edge.
  • Figure 12C shows an exploded view of the tapered edge of the notched valve of Figure 12A sealed with the pump.
  • FIG 1A is a schematic cross-section view of a pump 10 according to an illustrative embodiment of the invention.
  • pump 10 comprises a pump body having a substantially cylindrical shape including a cylindrical wall 19 closed at one end by a base 18 and closed at the other end by a end plate 17 and a ring-shaped isolator 30 disposed between the end plate 17 and the other end of the cylindrical wall 19 of the pump body.
  • the cylindrical wall 19 and base 18 may be a single component comprising the pump body and may be mounted to other components or systems.
  • the internal surfaces of the cylindrical wall 19, the base 18, the end plate 17, and the ring-shaped isolator 30 form a cavity 1 1 within the pump 10 wherein the cavity 1 1 comprises a side wall 14 closed at both ends by end walls 12 and 13. It the embodiment shown the end walls 12 and 13 defining the cavity 1 1 are shown as planar and parallel. However the end walls 12 and 13 may also include frusto-conical surfaces as described in the '487 Application.
  • the end wall 13 is the internal surface of the base 18 and the side wall 14 is the inside surface of the cylindrical wall 19.
  • the end wall 12 comprises a central portion corresponding to the inside surface of the end plate 17 and a peripheral portion corresponding to the inside surface of the ring-shaped isolator 30.
  • the cavity 1 1 is substantially circular in shape, the cavity 1 1 may also be elliptical or other shape.
  • the base 18 and cylindrical wall 19 of the pump body may be formed from any suitable rigid material including, without limitation, metal, ceramic, glass, or plastic including, without limitation, inject-molded plastic.
  • the pump 10 also comprises a piezoelectric disc 20 operatively connected to the end plate 17 to form an actuator 40 that is operatively associated with the central portion of the end wall 12 via the end plate 17.
  • the piezoelectric disc 20 is not required to be formed of a piezoelectric material, but may be formed of any electrically active material that vibrates, such as, for example, an electrostrictive or magnetostrictive material.
  • the end plate 17 preferably possesses a bending stiffness similar to the piezoelectric disc 20 and may be formed of an electrically inactive material, such as a metal or ceramic.
  • the actuator 40 When the piezoelectric disc 20 is excited by an electrical current, the actuator 40 expands and contracts in a radial direction relative to the longitudinal axis of the cavity 1 1 causing the end plate 17 to bend, thereby inducing an axial deflection of the end wall 12 in a direction substantially perpendicular to the end wall 12.
  • the end plate 17 alternatively may also be formed from an electrically active material, such as, for example, a piezoelectric, magnetostrictive, or electrostrictive material.
  • the piezoelectric disc 20 may be replaced by a device in a force- transmitting relation with the end wall 12, such as, for example, a mechanical, magnetic or electrostatic device, wherein the end wall 12 may be formed as an electrically inactive or passive layer of material driven into oscillation by such device (not shown) in the same manner as described above.
  • a device in a force- transmitting relation with the end wall 12, such as, for example, a mechanical, magnetic or electrostatic device, wherein the end wall 12 may be formed as an electrically inactive or passive layer of material driven into oscillation by such device (not shown) in the same manner as described above.
  • the pump 10 further comprises at least two apertures extending from the cavity
  • one preferred embodiment of the pump 10 comprises an aperture with a valve located at approximately the centre of either of the end walls 12, 13.
  • the pump 10 shown in Figures 1A and IB comprises a primary aperture 16 extending from the cavity
  • a second aperture 15 may be located at any position within the cavity 1 1 other than the location of the primary aperture 16 with a valve 46. In one preferred embodiment of the pump 10, the second aperture 15 is disposed between the centre of either one of the end walls 12, 13 and the side wall 14.
  • the embodiment of the pump 10 shown in Figures 1A and IB comprises two secondary apertures 15 extending from the cavity 1 1 through the actuator 40 that are disposed between the centre of the end wall 12 and the side wall 14.
  • the secondary apertures 15 are not valved in this embodiment of the pump 10, they may also be valved to improve performance if necessary.
  • the primary aperture 16 is valved so that the fluid is drawn into the cavity 1 1 of the pump 10 through the secondary apertures 15 and pumped out of the cavity 1 1 through the primary aperture 16 as indicated by the arrows to provide a positive pressure at the primary aperture 16.
  • Figure 2A shows one possible displacement profile illustrating the axial oscillation of the driven end wall 12 of the cavity 1 1.
  • the solid curved line and arrows represent the displacement of the driven end wall 12 at one point in time, and the dashed curved line represents the displacement of the driven end wall 12 one half-cycle later.
  • the displacement as shown in this figure and the other figures is exaggerated.
  • the actuator 40 is not rigidly mounted at its perimeter, but rather suspended by the ring-shaped isolator 30, the actuator 40 is free to oscillate about its centre of mass in its fundamental mode. In this fundamental mode, the amplitude of the displacement oscillations of the actuator 40 is substantially zero at an annular displacement node 22 located between the centre of the end wall 12 and the side wall 14.
  • the amplitudes of the displacement oscillations at other points on the end wall 12 have an amplitudes greater than zero as represented by the vertical arrows.
  • a central displacement anti-node 21 exists near the centre of the actuator 40 and a peripheral displacement anti-node 21 ' exists near the perimeter of the actuator 40.
  • Figure 2B shows one possible pressure oscillation profile illustrating the pressure oscillation within the cavity 1 1 resulting from the axial displacement oscillations shown in
  • FIG. 2A The solid curved line and arrows represent the pressure at one point in time, and the dashed curved line represents the pressure one half-cycle later.
  • the amplitude of the pressure oscillations has a central pressure anti-node 23 near the centre of the cavity 1 1 and a peripheral pressure anti-node 24 near the side wall 14 of the cavity 1 1.
  • the amplitude of the pressure oscillations is substantially zero at the annular pressure node 25 between the central pressure anti-node 23 and the peripheral pressure anti-node 24.
  • the radial dependence of the amplitude of the pressure oscillations in the cavity 1 1 may be approximated by a Bessel function of the first kind.
  • the radial dependence of the amplitude of the axial displacement oscillations of the actuator 40 should approximate a Bessel function of the first kind so as to match more closely the radial dependence of the amplitude of the desired pressure oscillations in the cavity 1 1 (the “mode-shape” of the pressure oscillation).
  • the mode-shape of the displacement oscillations substantially matches the mode-shape of the pressure oscillations in the cavity 1 1, thus achieving mode-shape matching or, more simply, mode-matching.
  • the axial displacement oscillations of the actuator 40 and the corresponding pressure oscillations in the cavity 1 1 have substantially the same relative phase across the full surface of the actuator 40 wherein the radial position of the annular pressure node 25 of the pressure oscillations in the cavity 1 1 and the radial position of the annular displacement node 22 of the axial displacement oscillations of actuator 40 are substantially coincident.
  • the radius of the actuator should preferably be greater than the radius of the annular pressure node 25 to optimize mode-matching.
  • the radius of the annular pressure node 25 would be approximately 0.63 of the radius from the centre of the end wall 13 to the side wall 14, i.e., the radius of the cavity 1 1 (r) as shown in Figure 1A. Therefore, the radius of the actuator 40 (r act ) should preferably satisfy the following inequality: r act ⁇ 0.63r .
  • the ring-shaped isolator 30 may be a flexible membrane which enables the edge of the actuator 40 to move more freely as described above by bending and stretching in response to the vibration of the actuator 40 as shown by the displacement at the peripheral displacement anti-node 2 in Figure 2 A.
  • the flexible membrane overcomes the potential dampening effects of the side wall 14 on the actuator 40 by providing a low mechanical impedance support between the actuator 40 and the cylindrical wall 19 of the pump 10 thereby reducing the dampening of the axial oscillations at the peripheral displacement anti-node 21 ' of the actuator 40.
  • the flexible membrane minimizes the energy being transferred from the actuator 40 to the side wall 14, which remains substantially stationary.
  • the annular displacement node 22 will remain substantially aligned with the annular pressure node 25 so as to maintain the mode- matching condition of the pump 10.
  • the axial displacement oscillations of the driven end wall 12 continue to efficiently generate oscillations of the pressure within the cavity 1 1 from the central pressure anti-node 23 to the peripheral pressure anti-node 24 at the side wall 14 as shown in Figure 2B.
  • the pump 10 of Figure 1 is shown with an alternative configuration of the primary aperture 16. More specifically, the valve 46 ' in the primary aperture 16 is reversed so that the fluid is drawn into the cavity 1 1 through the primary aperture 16 and expelled out of the cavity 1 1 through the secondary apertures 15 as indicated by the arrows, thereby providing suction or a source of reduced pressure at the primary aperture 16.
  • reduced pressure generally refers to a pressure less than the ambient pressure where the pump 10 is located.
  • vacuum and negative pressure may be used to describe the reduced pressure, the actual pressure reduction may be significantly less than the pressure reduction normally associated with a complete vacuum.
  • the pressure is "negative" in the sense that it is a gauge pressure, i.e., the pressure is reduced below ambient atmospheric pressure. Unless otherwise indicated, values of pressure stated herein are gauge pressures. References to increases in reduced pressure typically refer to a decrease in absolute pressure, while decreases in reduced pressure typically refer to an increase in absolute pressure.
  • FIG 4 shows a graph of the pressure oscillations of fluid within the pump shown in Figure 3 A.
  • the valve 46' allows fluid to flow in only one direction as described above.
  • the valve 46' may be a check valve or any other valve that allows fluid to flow in only one direction.
  • Some valve types may regulate fluid flow by switching between an open and closed position.
  • the valves 46 and 46' must have an extremely fast response time such that they are able to open and close on a timescale significantly shorter than the timescale of the pressure variation.
  • One embodiment of the valves 46 and 46' achieve this by employing an extremely light flap valve which has low inertia and consequently is able to move rapidly in response to changes in relative pressure across the valve structure.
  • valve 110 is shown according to an illustrative embodiment.
  • the valve 1 10 comprises a substantially cylindrical wall 1 12 that is ring-shaped and closed at one end by a retention plate 1 14 and at the other end by a sealing plate 1 16.
  • the inside surface of the wall 1 12, the retention plate 1 14, and the sealing plate 1 16 form a cavity 1 15 within the valve 1 10.
  • the valve 1 10 further comprises a substantially circular flap 1 17 disposed between the retention plate 1 14 and the sealing plate 1 16, but adjacent the sealing plate 1 16.
  • the circular flap 1 17 may be disposed adjacent the retention plate 1 14 in an alternative embodiment as will be described in more detail below, and in this sense the flap 1 17 is considered to be "biased" against either one of the sealing plate 1 16 or the retention plate 1 14.
  • the peripheral portion of the flap 1 17 is sandwiched between the sealing plate 1 16 and the ring- shaped wall 1 12 so that the motion of the flap 1 17 is restrained in the plane substantially perpendicular the surface of the flap 1 17.
  • the motion of the flap 1 17 in such plane may also be restrained by the peripheral portion of the flap 1 17 being attached directly to either the sealing plate 1 16 or the wall 1 12, or by the flap 1 17 being a close fit within the ring-shaped wall 1 12, in an alternative embodiment.
  • the remainder of the flap 1 17 is sufficiently flexible and movable in a direction substantially perpendicular to the surface of the flap 1 17, so that a force applied to either surface of the flap 1 17 will motivate the flap 1 17 between the sealing plate 1 16 and the retention plate 1 14.
  • the retention plate 1 14 and the sealing plate 1 16 both have holes 1 18 and 120, respectively, which extend through each plate.
  • the flap 1 17 also has holes 122 that are generally aligned with the holes 1 18 of the retention plate 1 14 to provide a passage through which fluid may flow as indicated by the dashed arrows 124 in Figures 3B and 6 A.
  • the holes 122 in the flap 1 17 may also be partially aligned, i.e., having only a partial overlap, with the holes 1 18 in the retention plate 1 14.
  • the holes 1 18, 120, 122 are shown to be of substantially uniform size and shape, they may be of different diameters or even different shapes without limiting the scope of the invention.
  • the holes 1 18 and 120 form an alternating pattern across the surface of the plates as shown by the solid and dashed circles, respectively, in Figure 5D.
  • the holes 1 18, 120, 122 may be arranged in different patterns without effecting the operation of the valve 1 10 with respect to the functioning of the individual pairings of holes 1 18, 120, 122 as illustrated by individual sets of the dashed arrows 124.
  • the pattern of holes 1 18, 120, 122 may be designed to increase or decrease the number of holes to control the total flow of fluid through the valve 1 10 as required. For example, the number of holes 1 18, 120, 122 may be increased to reduce the flow resistance of the valve 1 10 to increase the total flow rate of the valve 1 10.
  • valve 1 10 When no force is applied to either surface of the flap 1 17 to overcome the bias of the flap 1 17, the valve 1 10 is in a "normally closed” position because the flap 1 17 is disposed adjacent the sealing plate 1 16 where the holes 122 of the flap are offset or not aligned with the holes 118 of the sealing plate 1 16. In this "normally closed” position, the flow of fluid through the sealing plate 1 16 is substantially blocked or covered by the non-perforated portions of the flap 1 17 as shown in Figures 5A and 5B. When pressure is applied against either side of the flap
  • valve 110 moves from the normally closed position to an "open" position over a time period, an opening time delay (T 0 ), allowing fluid to flow in the direction indicated by the dashed arrows 124.
  • T 0 opening time delay
  • a closing time delay T c
  • the flap 1 17 may be biased against the retention plate 1 14 with the holes 1 18, 122 aligned in a "normally open” position. In this embodiment, applying positive pressure against the flap 117 will be necessary to motivate the flap 1 17 into a "closed" position.
  • the operation of the valve 1 10 is a function of the change in direction of the differential pressure ( ⁇ ) of the fluid across the valve 1 10.
  • the differential pressure has been assigned a negative value (- ⁇ ) as indicated by the downward pointing arrow.
  • the differential pressure has a negative value (- ⁇ )
  • the fluid pressure at the outside surface of the retention plate 1 14 is greater than the fluid pressure at the outside surface of the sealing plate 116.
  • This negative differential pressure (- ⁇ ) drives the flap 1 17 into the fully closed position as described above wherein the flap 1 17 is pressed against the sealing plate 1 16 to block the holes 120 in the sealing plate 1 16, thereby substantially preventing the flow of fluid through the valve 1 10.
  • the fluid pressure between the flap 1 17 and the sealing plate 1 16 is lower than the fluid pressure between the flap 1 17 and the retention plate 1 14.
  • the flap 117 experiences a net force, represented by arrows 138, which accelerates the flap 1 17 toward the sealing plate 1 16 to close the valve 1 10.
  • the changing differential pressure cycles the valve 1 10 between closed and open positions based on the direction (i.e., positive or negative) of the differential pressure across the valve 1 10. It should be understood that the flap 1 17 could be biased against the retention plate 1 14 in an open position when no differential pressure is applied across the valve 1 10, i.e., the valve 1 10 would then be in a "normally open" position.
  • valve 1 10 is disposed within the primary aperture 46 ' of the pump 10 so that fluid is drawn into the cavity 1 1 through the primary aperture
  • the differential pressure ( ⁇ ) is assumed to be substantially uniform across the entire surface of the retention plate 1 14 because the diameter of the retention plate 1 14 is small relative to the wavelength of the pressure oscillations in the cavity 115 and furthermore because the valve 1 10 is located in the primary aperture 46' near the centre of the cavity 1 15 where the amplitude of the central pressure anti-node is relatively constant.
  • the biased flap 1 17 is motivated away from the sealing plate 1 16 against the retention plate 1 14 into the open position. In this position, the movement of the flap 1 17 unblocks the holes 120 of the sealing plate 1 16 so that fluid is permitted to flow through them and the aligned holes 1 18 of the retention plate 1 14 and the holes 122 of the flap 1 17 as indicated by the dashed arrows 124.
  • the differential pressure changes back to the negative differential pressure (- ⁇ )
  • fluid begins to flow in the opposite direction through the valve 1 10 (see Figure 10B), which forces the flap 1 17 back toward the closed position (see Figure 5B).
  • the pump 10 provides a reduced pressure every half cycle when the valve 1 10 is in the open position.
  • the differential pressure ( ⁇ ) is assumed to be substantially uniform across the entire surface of the retention plate 1 14 because it corresponds to the central pressure anti-node 71 as described above, it therefore being a good approximation that there is no spatial variation in the pressure across the valve 1 10. While in practice the time-dependence of the pressure across the valve may be approximately sinusoidal, in the analysis that follows it shall be assumed that the differential pressure ( ⁇ ) between the positive differential pressure (+ ⁇ ) and negative differential pressure (- ⁇ ) values can be represented by a square wave over the positive pressure time period (tp + ) and the negative pressure time period (tp.) of the square wave, respectively, as shown in Figure 7 A.
  • the pump 10 As differential pressure ( ⁇ ) cycles the valve 1 10 between the normally closed and open positions, the pump 10 provides a reduced pressure every half cycle when the valve 1 10 is in the open position subject to the opening time delay (T 0 ) and the closing time delay (T c ) as also described above and as shown in Figure 7B.
  • T 0 opening time delay
  • T c closing time delay
  • the retention plate 1 14 and the sealing plate 1 16 should be strong enough to withstand the fluid pressure oscillations to which they are subjected without significant mechanical deformation.
  • the retention plate 1 14 and the sealing plate 1 16 may be formed from any suitable rigid material, such as glass, silicon, ceramic, or metal.
  • the holes 1 18, 120 in the retention plate 1 14 and the sealing plate 1 16 may be formed by any suitable process including chemical etching, laser machining, mechanical drilling, powder blasting, and stamping.
  • the retention plate 1 14 and the sealing plate 1 16 are formed from sheet steel between 100 and 200 microns thick, and the holes 1 18, 120 therein are formed by chemical etching.
  • the flap 1 17 may be formed from any lightweight material, such as a metal or polymer film.
  • the flap 1 17 may be formed from a thin polymer sheet between 1 micron and 20 microns in thickness.
  • the flap 1 17 may be formed from polyethylene terephthalate (PET) or a liquid crystal polymer film approximately 3 microns in thickness.
  • the pump 10 is a single valve device that results in a "half- wave" rectification of the pressure oscillation within the cavity 1 1 as described above with reference to Figure 7B.
  • the pump 10 of Figure 1 A is able to develop a maximum pressure difference approximately equal to the difference between ambient pressure and the positive peak pressure value of the pressure oscillation in the cavity 1 1 at the valve 46.
  • the mean pressure in the cavity 1 1 is fixed at substantially ambient pressure by the presence of the secondary apertures 15 acting as inlets. Therefore, the pressure at any given point in time within the cavity 1 1 oscillates about ambient pressure having positive and negative peak pressures relative to ambient.
  • the valve 46 will open and fluid will flow if the pressure at the primary aperture 16 functioning as a pump outlet is exceeded. In this manner the pump 10 delivers fluid flow until the pressure at the pump outlet is equal to the ambient pressure plus the maximum positive peak pressure achieved in the cavity 1 1 during the pressure oscillation cycle.
  • the valve 46 remains closed and no useful pumping action can occur.
  • the pump 10 is capable of developing a maximum pressure difference approximately equal to the difference between the positive and negative peak pressure value of the pressure oscillation in the cavity 1 1. Examples of two-valve pump configurations are disclosed and described in International Patent Application Nos. PCT/GB2006/001487 and PCT/GB2009/050614 which are incorporated by reference herein.
  • Figures 8A and 8B show a valve structure comprising two valves 250 in a single structure in which one valve 210 generates fluid flow in one direction as indicated by the dashed arrow 270 and the other valve 220 creates fluid flow in the opposite direction as indicated by the dashed arrow 272.
  • the two valves 210, 220 share a common wall or dividing barrier 240 which in this embodiment is formed as part of the cylindrical walls 1 12. Otherwise, the valves 210, 220 operate as described above with respect to valve 1 10 as shown in Figures 5-7 with fluid flowing in opposite direction as indicated by the dashed arrows 270, 272 wherein one valve acts as an inlet valve and the other acts as an outlet valve.
  • Figure 8C shows a graph of the operating cycle of the valves 210, 220 between an open and closed position that are modulated by the illustrative square-wave cycling of the pressure differential ( ⁇ ) as illustrated by the dashed lines 264, 274.
  • the graph shows corresponding half cycles 284, 294 for the valves 210, 220, respectively, as each one opens from the closed position.
  • the differential pressure across the valve 210 is initially negative and reverses to become a positive differential pressure (+ ⁇ )
  • the valve 210 opens as described above and shown by the positive half cycle 284 with fluid flowing in the direction indicated by the arrow 270.
  • valve 220 when the differential pressure across the valve 220 is initially positive and reverses to become a negative differential pressure (- ⁇ ), the valve 220 opens as described above and shown by the negative half cycle 294 with fluid flowing in the opposite direction as indicated by the arrow 272. Consequently, the combination of the valves 210, 220 function as a bi-directional valve permitting fluid flow in both directions in response to the cycling of the differential pressure ( ⁇ ).
  • the valves 210, 220 may be mounted conveniently side by side within the primary aperture 16 of the pump 10 to provide fluid flow in the direction indicated by the solid arrow 270 in the primary aperture 16 as shown for one half cycle, and then in the opposite direction indicated by the solid arrow 272 for the opposite half cycle.
  • FIG. 9A and 9B another embodiment of a two-valve pump 300 is shown and has the same construction as the pump 10 except that the secondary apertures 15 are replaced with a single secondary aperture 316 located at the center of the end- wall 12 extending through the end-plate 17 and the piezoelectric disc 20.
  • the pump 300 further comprises a second valve 346 disposed within the secondary aperture 316.
  • this second valve 346 may be located at any position within the cavity 1 1 other than the location of the primary aperture 16 as indicated above, a preferred embodiment is to locate the second valve 346 at the center of the driven end- wall 12 where there exists a maximum in the amplitude of the pressure oscillation within the cavity 1 1. However, the second valve 346 is then subject to significant vibration caused by the central displacement anti-node 21 of the actuator 40. The second valve 346 undergoes this axial vibration along with the end-plate 17 to which it is attached. In one preferred embodiment the actuator vibrates at around 20kHz and with a velocity amplitude at the central displacement anti-node 21 of vibration of up to around 1ms "1 in operation. Such levels of vibration place significant forces on the operation of the valve 346, sometimes referred to herein as an actuator-mounted valve (AMV), which may significantly reduce the efficiency of the disc pump 300.
  • AMV actuator-mounted valve
  • AMV 346 further comprises a center shim 41 1 that divides the cavity 1 15 into two chambers to provide structural support between the retention plate 1 14 and the sealing plate 116.
  • the four components of the AMV 346 may be fixed or connected together by any suitable method including gluing, soldering, electrical spot-welding or seam-welding, or laser spot- welding or seam- welding.
  • a complicating factor is the presence of the valve flap 1 17 which is a thin polymer layer as described above that can hinder many of these methods.
  • the polymer layer acts as an electrical and thermal insulating layer which can hinder any one of these bonding methods.
  • a preferred method for connecting the components of the AMV 346 is laser spot-welding, as it forms an extremely strong and durable bond, and further enables accurate control of the gap between the retention plate 1 14 and the sealing plate 116.
  • An automatic system may be readily developed for high-volume manufacture, employing a galvanometer to steer the laser beam in order to rapidly form a number of spot-welds (not shown) which extend axially through all the components of the AMV 346, thereby fixing all the components together to form the assembled AMV 346 as illustrated in Figure 10B.
  • One suitable laser welding system is the StarPulse system manufactured by Rofin. A factor in the quality of such a laser welding process is the degree of contact between the components being welded. In order to achieve a good weld, the parts should be suitably clamped to ensure good contact and therefore good heat transfer between layers.
  • the presence of the polymer flap 1 17 acts as a thermal barrier, preventing effective transfer of heat from the metal retention plate 1 14 and cylindrical walls 112 on one the side of the flap 1 17 to the metal sealing plate 1 16 on the opposite side of the flap 117.
  • This results in an increased level of laser power or pulse energy that is required in order to achieve a strong weld risking the possibility of accidentally drilling through all the components of the AMV 346, the significant ejection of material from the weld site, the possibility of significant heat damage to the plastic flap 1 17, and thermal distortion of the components resulting from the welding process.
  • the laser power is too low, then a melt is generated only in the retention plate 1 14 and the cylindrical walls 1 12 failing to form a complete bond with the sealing plate 1 16. Any of these effects can dramatically reduce the performance of the AMV 346, e.g., the ejected material from the weld site may enter the cavity 1 15 of the AMV 346 causing it to fail.
  • notches 452, 454 may be formed in the periphery of the retention plate 1 14 and the cylindrical walls 1 12, respectively, so that the laser can heat the components from the bottom up starting with the formation of a melt pool first in the sealing plate 1 16 (burning through the plastic flap 1 17) without the need for melting through the retention plate 1 14 and the cylindrical walls 1 12.
  • the laser beam may be dragged sideways toward the center of the AMV 346 structure thereby extending the melt pool into the cylindrical walls 1 12 and the retention plate 1 14 forming a weld 462 with a number of laser pulses as illustrated by the beads forming the weld 462, thus fixing all the components together when the weld 462 cools.
  • This process of "drag welding" dramatically reduces the laser power required for the initial melting of the sealing plate 1 16 as heat is transmitted directly to the sealing plate 1 16 by radiation (i.e., the laser beam) rather than by conduction through the retention plate 1 14 and the cylindrical walls 112.
  • Drag welding minimizes the production of any ejected material from the weld site, and significantly mitigates any damage to the components resulting from the heat created by the welding process.
  • the drag welding process may be further improved by using a blanket of inert gas such as, for example, argon or nitrogen, to further reduce or eliminate ejected material from the weld site.
  • One example of drag welding the components to form the AMV 346 includes a sealing plate 1 16 and retention plate 1 14 that are both formed from steel that is about 100 microns thick and cylindrical walls 1 12 that are also formed from steel that is about 20 microns thick.
  • the valve flap 1 17 is formed from a polymer that is about 3 microns thick. The laser system was adjusted to provide a series of laser pulses each having an individual pulse energy of about 150mW delivered at a pulse rate of about 90Hz.
  • the laser system delivers about ten welding pulses moving about 100 microns between each pulse to form the weld 462 that was sufficiently strong to bond the components of the AMV 346 together so that the AMV 346 would survive the vibrations generated by the end-plate 17 of the disc pump 300 (see Figure 9B).
  • variations in the dimensions and type of material being used for the components of the AMV 346 require corresponding variations in the parameters of the laser pulses being applied to the material.
  • six peripheral sets of notches 452, 454 and corresponding welds 462 around the periphery of the components provided sufficient bonding to hold the AMV 346 together during operation of the pump 300.
  • An additional feature of the AMV 346 is the center shim 41 1 which includes an opening or hole 413 positioned generally at the center of the AMV 346.
  • the retention plate 1 14 comprises a similar opening or hole 415 that is substantially concentric with the hole 413 when the retention plate 1 14 is positioned on top of the cylindrical walls 1 12.
  • the apertures 1 18, 120 and 122 of the retention plate 1 14, the sealing plate 120, and the valve flap 1 17, respectively, are arranged on either side of the center shim 41 1 opening to the two halves of the cavity 1 15.
  • the center shim 411 provides additional support between the retention plate 1 14 and the sealing plate 1 16, and the holes 413 and 415 provide an opening for a center drag weld 464 to be formed at the center of the AMV 346 to further reinforce the retention plate 1 14 and the sealing plate 1 16.
  • the center weld 464 is formed in the same fashion as the peripheral welds 462, but may include portions extending from the center of the AMV 346 up the side walls of the holes 415 and 413 in both directions as shown in Figure 10B.
  • similar welds may be positioned off-center at any point along the length of the center shim 41 1 to further strengthen the AMV 346.
  • the center shim 411 and the center welds 464 significantly reduce the unsupported spans of the retention plate 1 14 and the sealing plate 1 16 of the AMV 346 and limit the relative motion of these two plates when the AMV 346 is in operation and being subjected to the significant vibration being applied to the end-plate 17. Regarding the latter, differential vibration of the two plates may cause a significant reduction in the performance of the AMV 346 reducing the overall efficiency and performance of the pump 300.
  • the structure of the AMV 346 may be able to withstand the vibration of the driven end-plate 17 as described above, the AMV 346 must also be mounted on the end-plate
  • the AMV 346 is mounted into a recess 512 in the center of the end-plate 17 which includes the hole 316 extending therethrough to enable fluid to flow out of the AMV 346 through the hole 316.
  • the end-plate 17 includes a second recess concentric with the first recess 512 that opens to the apertures in the sealing plate 1 16 of the AMV 346.
  • the piezoelectric element that actuates the end-plate 17 is formed in the shape of a piezoelectric ring 520 rather than the piezoelectric disc 20 of the pump 10 shown in Figure 1 that forms part of the outlet 316.
  • the lower face of the AMV 346 in this case the retention plate 1 14
  • the lower face of the AMV 346 which is in communication with the cavity 1 1 of the pump 300, is substantially flush with the end wall 12 of the end-plate 17.
  • FIG. 1 1 A a perspective, cross-section view of the AMV 346 is shown installed in the recess 512 of the end-plate 17, but flipped over from its normal position in the pump 300 as shown in Figure 9B to better illustrate how the AMV 346 is bonded within the recess 512 of the end-plate 17.
  • Mounting the AMV 346 into the recess 512 of the end-plate 17 may be achieved by a number of methods including gluing, soldering, electrical welding, or laser welding. Although the method of gluing has certain advantages and simplicity of automation, such glue bonds are prone to failure under the vibrational loads experienced when the pump 300 is in operation.
  • the drag welding process as described above is again a preferred method for bonding the entire AMV 346 into the recess 512 of the end-plate 17 because it provides the strongest bonds for surviving the vibration of the end-plate 17 while in use.
  • the laser- welding process is also preferred because of its accuracy and speed that are necessary for very small devices such as the AMV 346 which may be only 7 mm in diameter.
  • the laser- welding process requires intimate contact between the surface of the AMV 346 (in this case the retention plate 1 14) and the metal end-plate 17 into which the AMV 346 is to be welded.
  • the recess 512 is formed in the end-plate 17 to ensure intimate contact with the AMV 346 when mounted therein. Because it is necessary to transmit heat through all the components including the retention plate 1 14, the cylindrical walls 1 12, the flap 1 17, and the sealing plate 1 16 as described above, it is advantageous to taper the stacks of components as shown in Figures 1 1A and 1 IB and utilize the laser drag- welding process to create a weld 466 as shown in Figure 1 1C to bond the entire AMV
  • the AMV 346 within the recess 512 of the end-plate 17.
  • the tapered construction of the AMV 346 is arranged so that the larger diameter component (in this case the sealing plate 1 16) is positioned deeper within the recess 512 and tapers inwardly to the smaller diameter component (in this case the retention plate 1 14).
  • lower-powered laser pulses may be used to first create a melt pool in the sealing plate 1 16 and the end-plate 17 with the laser 530 being dragged inwardly in the direction of arrow 531 to melt the rest of the components forming the weld 466.
  • the reduced laser power enabled by this combination has the additional advantages of avoiding the possibility of accidentally drilling through the entire valve structure of the AMV 346, avoiding the production of ejected materials from the weld site, and mitigating damage to the peripheral portions of the components of the AMV 346 caused by the welding process.
  • the lower level of heating results in significantly less distortion of the valve structure of the AMV 346.
  • a preferred embodiment requires a separate sealing method such as, for example, a glue or other type of sealant.
  • a bead of glue may be applied around the perimeter of the AMV 346 that cures to form a seal 468 between the AMV 346 and the recess 512 of the end-plate 17.
  • the bead of glue should be applied after the welding process is completed so that the seal 468 does not vaporize during the welding process resulting in cracking or other damage, that generates leakage pathways through which the fluid may escape from the cavity 11 of the pump 300. Moreover, applying a bead of glue prior to the welding process may also interfere with and compromise the welding process itself. It will also apparent from Figure 1 1C that the bead of glue will flow around the individual welds 466 to mitigate the possibility of small leak passages that may form around the weld 466 as a result of uneven surfaces.
  • the tapered construction of the AMV 346 facilitates the sealing process because a relatively wider trench 469 is formed between the vertical wall of the recess 512 and the edge of the retention plate 1 14 into which the bead of glue may be applied thereby reducing the tolerances required during the gluing process. Moreover, the surface tension of the bead of glue applied to the trench 469 facilitates an even fill of glue around the AMV 346 to form a tighter seal 468.
  • the valve 46 may be the same structure as the AMV 346 structure with or without the center shim 41 1. Otherwise, the structure and fabrication of the valve 46 is substantially similar to the structure and fabrication of the AMV 346.
  • the base 18 of the pump 300 functions as the body of the pump 300 and may be formed from a molded polymer rather than metal because it does not vibrate significantly when in use as compared with the driven end wall 12. Consequently, the valve 46 may be effectively bonded and sealed into a recess 513 of the base 18 by applying a bead of glue 472 between the horizontal surface of the recess 513 and the surface of the valve 46 (in this case the retention plate 1 14).
  • the surface of the valve 46 facing and in communication with the cavity 1 1 is substantially flush with the end wall 13 formed by the base 18.
  • Utilizing the bead of glue 472 facilitates this leveling process to ensure that the face of the valve 46 is flush with the end wall 13 by tamping the valve 46 into its proper position.
  • the viscosity of the glue is selected to provide a balance between flowing during the tamping process and holding its shape during curing.
  • the bead of glue 472 may be cured instantly by using, for example, an epoxy that cures with ultraviolet light, such that the tamped position of the valve 46 is instantly fixed in place.
  • a valve 46' is shown that is the same structure as the valve 46 with parallel side-walls around the periphery rather than a tapered side-wall.
  • Such a structure does not facilitate the sealing process because the glue 474 must flow up a relatively narrow gap between the recess 513 in the base 18 and the side-walls of the valve 46'.
  • the tapered stack of components of the valve 46 is beneficial to form a fluid-tight seal 476 because a larger surface area 477 of the component facing the cavity 1 1 (in this case the sealing plate 1 16) exposed to the corresponding surface 478 of the recess 513 so that the glue forms a better and tighter seal 476 therebetween.
  • the direction of the taper may be reversed so that the retention plate 1 14 has a larger diameter than the sealing plate 1 16 depending on the function of the particular valve.
  • the direction of the taper structure is selected depending on the direction of fluid flow through either of the valves 46, 346 and the method by which the valve is to be mounted within the pump 300.

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Reciprocating Pumps (AREA)

Abstract

La présente invention concerne une valve qui comporte une première plaque (116) présentant des ouvertures (120) s'étendant à travers la première plaque, une seconde plaque (114) présentant des ouvertures (118) s'étendant à travers la seconde plaque, les ouvertures (118) étant sensiblement décalées des ouvertures (120) de la première plaque, un espace (112) situé entre la première plaque et la seconde plaque pour former une cavité (115) entre les deux plaques, et un volet (117) situé entre la première plaque et la seconde plaque de manière à se déplacer entre ces plaques, ce volet présentant des ouvertures (122) sensiblement décalées par rapport aux ouvertures (120) de la première plaque et sensiblement alignées avec les ouvertures (118) de la seconde plaque. La présente invention concerne également une pompe (10) contenant ladite valve. Cette pompe présente une forme sensiblement cylindrique et définit une cavité (10) formée par une paroi latérale (19) fermée à ses deux extrémités par des parois d'extrémité (12, 13), un actionneur provoquant un mouvement oscillatoire sur une paroi d'extrémité de manière à engendrer des oscillations de déplacement. La présente invention concerne également des procédés de fabrication de la valve et de montage de la valve dans la pompe.
PCT/GB2011/050141 2010-02-03 2011-01-28 Pompe à membrane et structure de valve WO2011095795A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB1001740.8 2010-02-03
GBGB1001740.8A GB201001740D0 (en) 2010-02-03 2010-02-03 Disc pump and valve structure

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WO2011095795A1 true WO2011095795A1 (fr) 2011-08-11

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Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103967758A (zh) * 2014-05-18 2014-08-06 辽宁工程技术大学 一种压电片外附式的超声水泵
EP2767715B1 (fr) 2011-10-11 2018-04-04 Murata Manufacturing Co., Ltd. Dispositif de commande de fluide, et procédé de réglage de celui-ci
US10087923B2 (en) 2012-02-10 2018-10-02 The Technology Partnership Plc. Disc pump with advanced actuator
GB2583880A (en) * 2020-07-31 2020-11-11 Ttp Ventus Ltd Actuator for a resonant acoustic pump
CN112303298A (zh) * 2020-10-30 2021-02-02 汉得利（常州）电子股份有限公司 一种单向阀及具有单向阀的微型空气泵
US10975855B2 (en) 2011-02-03 2021-04-13 The Technology Partnership Plc. Fluid pump including a pressure oscillation with at least one nodal diameter
US11041580B2 (en) 2014-10-23 2021-06-22 Murata Manufacturing Co., Ltd. Valve and fluid control device
US11566615B2 (en) 2017-10-10 2023-01-31 Murata Manufacturing Co., Ltd. Pump and fluid control apparatus
WO2024052578A1 (fr) 2022-09-11 2024-03-14 Bioliberty Ltd Dispositif d'assistance robotique souple

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB690897A (en) * 1951-02-26 1953-04-29 Hymatic Eng Co Ltd Improvements relating to non-return valves
US20020129857A1 (en) * 2001-02-06 2002-09-19 Institute Of High Performance Computing Microvalve devices
WO2006111775A1 (fr) 2005-04-22 2006-10-26 The Technology Partnership Plc Pompe

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB690897A (en) * 1951-02-26 1953-04-29 Hymatic Eng Co Ltd Improvements relating to non-return valves
US20020129857A1 (en) * 2001-02-06 2002-09-19 Institute Of High Performance Computing Microvalve devices
WO2006111775A1 (fr) 2005-04-22 2006-10-26 The Technology Partnership Plc Pompe

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10975855B2 (en) 2011-02-03 2021-04-13 The Technology Partnership Plc. Fluid pump including a pressure oscillation with at least one nodal diameter
EP2767715B1 (fr) 2011-10-11 2018-04-04 Murata Manufacturing Co., Ltd. Dispositif de commande de fluide, et procédé de réglage de celui-ci
US10087923B2 (en) 2012-02-10 2018-10-02 The Technology Partnership Plc. Disc pump with advanced actuator
CN103967758A (zh) * 2014-05-18 2014-08-06 辽宁工程技术大学 一种压电片外附式的超声水泵
US11041580B2 (en) 2014-10-23 2021-06-22 Murata Manufacturing Co., Ltd. Valve and fluid control device
US11566615B2 (en) 2017-10-10 2023-01-31 Murata Manufacturing Co., Ltd. Pump and fluid control apparatus
GB2583880A (en) * 2020-07-31 2020-11-11 Ttp Ventus Ltd Actuator for a resonant acoustic pump
CN112303298A (zh) * 2020-10-30 2021-02-02 汉得利（常州）电子股份有限公司 一种单向阀及具有单向阀的微型空气泵
WO2024052578A1 (fr) 2022-09-11 2024-03-14 Bioliberty Ltd Dispositif d'assistance robotique souple

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