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WO2011051620A3 - Micro-volet a actionnement electromagnetique - Google Patents

Micro-volet a actionnement electromagnetique Download PDF

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Publication number
WO2011051620A3
WO2011051620A3 PCT/FR2010/052301 FR2010052301W WO2011051620A3 WO 2011051620 A3 WO2011051620 A3 WO 2011051620A3 FR 2010052301 W FR2010052301 W FR 2010052301W WO 2011051620 A3 WO2011051620 A3 WO 2011051620A3
Authority
WO
WIPO (PCT)
Prior art keywords
shutter
electromagnetically actuated
actuated micro
plate
shaft
Prior art date
Application number
PCT/FR2010/052301
Other languages
English (en)
Other versions
WO2011051620A2 (fr
Inventor
Orphée CUGAT
Nicolas Abele
Original Assignee
Centre National De La Recherche Scientifique
Lemoptix Sa
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Centre National De La Recherche Scientifique, Lemoptix Sa filed Critical Centre National De La Recherche Scientifique
Priority to CN201080049053.2A priority Critical patent/CN102844263B/zh
Priority to US13/504,760 priority patent/US9025229B2/en
Priority to JP2012535903A priority patent/JP5663590B2/ja
Publication of WO2011051620A2 publication Critical patent/WO2011051620A2/fr
Publication of WO2011051620A3 publication Critical patent/WO2011051620A3/fr
Priority to US14/536,234 priority patent/US9212047B2/en
Priority to US14/968,542 priority patent/US20170168288A1/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/085—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by electromagnetic means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0018—Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators
    • B81B3/0021—Transducers for transforming electrical into mechanical energy or vice versa
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/02—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the intensity of light
    • G02B26/023—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the intensity of light comprising movable attenuating elements, e.g. neutral density filters
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K26/00—Machines adapted to function as torque motors, i.e. to exert a torque when stalled
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K33/00—Motors with reciprocating, oscillating or vibrating magnet, armature or coil system
    • H02K33/18—Motors with reciprocating, oscillating or vibrating magnet, armature or coil system with coil systems moving upon intermittent or reversed energisation thereof by interaction with a fixed field system, e.g. permanent magnets
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS
    • B81B2201/045—Optical switches
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/01—Suspended structures, i.e. structures allowing a movement
    • B81B2203/0181—See-saws

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Micromachines (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Shutters For Cameras (AREA)

Abstract

L'invention concerne un micro-volet à actionnement électromagnétique comportant une plaquette mobile (1) en rotation autour d'un axe (11), reliée à un cadre fixe (3) par deux bras (7, 9) alignés de part et d'autre de la plaquette selon ledit axe (11), et comportant à sa périphérie une boucle conductrice (13); et sous l'ensemble formé par le cadre fixe et la plaquette mobile, un ensemble d'aimants (51, 53, 55) d'orientations magnétiques distinctes, disposés de façon à créer, au niveau de la plaquette mobile, un champ magnétique latéral (57), dans le plan du cadre, oblique par rapport à l'axe de rotation.
PCT/FR2010/052301 2009-10-27 2010-10-27 Micro-volet a actionnement electromagnetique WO2011051620A2 (fr)

Priority Applications (5)

Application Number Priority Date Filing Date Title
CN201080049053.2A CN102844263B (zh) 2009-10-27 2010-10-27 电磁致动微快门
US13/504,760 US9025229B2 (en) 2009-10-27 2010-10-27 Electromagnetically actuated microshutter
JP2012535903A JP5663590B2 (ja) 2009-10-27 2010-10-27 電磁駆動型マイクロミラー
US14/536,234 US9212047B2 (en) 2009-10-27 2014-11-07 Electromagnetically actuated microshutter
US14/968,542 US20170168288A1 (en) 2009-10-27 2015-12-14 Electromagnetically actuated microshutter

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR0957543 2009-10-27
FR0957543A FR2951713B1 (fr) 2009-10-27 2009-10-27 Micro-volet a actionnement electromagnetique

Related Child Applications (2)

Application Number Title Priority Date Filing Date
US13/504,760 A-371-Of-International US9025229B2 (en) 2009-10-27 2010-10-27 Electromagnetically actuated microshutter
US14/536,234 Continuation US9212047B2 (en) 2009-10-27 2014-11-07 Electromagnetically actuated microshutter

Publications (2)

Publication Number Publication Date
WO2011051620A2 WO2011051620A2 (fr) 2011-05-05
WO2011051620A3 true WO2011051620A3 (fr) 2012-11-15

Family

ID=42671893

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/FR2010/052301 WO2011051620A2 (fr) 2009-10-27 2010-10-27 Micro-volet a actionnement electromagnetique

Country Status (5)

Country Link
US (3) US9025229B2 (fr)
JP (1) JP5663590B2 (fr)
CN (1) CN102844263B (fr)
FR (1) FR2951713B1 (fr)
WO (1) WO2011051620A2 (fr)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9819253B2 (en) 2012-10-25 2017-11-14 Intel Corporation MEMS device
US20160124214A1 (en) * 2014-10-31 2016-05-05 Intel Corporation Electromagnetic mems device
EP3591454B1 (fr) 2017-02-28 2023-03-22 Hamamatsu Photonics K.K. Module optique et dispositif de mesure de distance
CN107120474B (zh) * 2017-03-31 2018-11-27 昆明理工大学 一种基于光驱动液控换向微阀装置及其使用方法
JP7015653B2 (ja) * 2017-08-10 2022-02-03 浜松ホトニクス株式会社 光モジュール、及び、光モジュールの製造方法
JP7313831B2 (ja) * 2019-01-30 2023-07-25 浜松ホトニクス株式会社 光モジュール
US11543491B2 (en) * 2020-05-04 2023-01-03 GM Global Technology Operations LLC Optimized current path to enable flat MEMS mirror
CN111682729B (zh) * 2020-06-30 2022-03-25 歌尔股份有限公司 振动装置以及电子设备
CN113991914B (zh) * 2021-09-30 2023-01-24 歌尔股份有限公司 振动马达

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5883382A (en) * 1996-06-07 1999-03-16 Nihon Shingo Kabushiki Kaisha Photo-detecting device having optical axis orienting variable direction
US20050002085A1 (en) * 2003-05-07 2005-01-06 Funai Electric Co., Ltd. MEMS mirror device and optical disk apparatus
EP1538474A1 (fr) * 2003-12-04 2005-06-08 Olympus Corporation Déflecteur optique
US6989921B2 (en) * 2000-08-27 2006-01-24 Corning Incorporated Magnetically actuated micro-electro-mechanical apparatus and method of manufacture

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4564757A (en) * 1982-09-30 1986-01-14 Burroughs Corporation Mirror position sensor for improved track selection in optical data disk system
JP3684003B2 (ja) 1996-10-22 2005-08-17 オリンパス株式会社 光スキャナ
US6188504B1 (en) 1996-06-28 2001-02-13 Olympus Optical Co., Ltd. Optical scanner
JP4414498B2 (ja) * 1997-12-09 2010-02-10 オリンパス株式会社 光偏向器
JP2002156598A (ja) 2000-11-16 2002-05-31 Omron Corp ガルバノミラー
JP2002221686A (ja) 2001-01-25 2002-08-09 Miyota Kk プレーナー型ガルバノミラー及びその製造方法
JP3808756B2 (ja) * 2001-11-09 2006-08-16 日本信号株式会社 プレーナ型電磁アクチュエータ
JP2004177649A (ja) * 2002-11-27 2004-06-24 Nec Tokin Corp 可変光減衰器
JP2004243512A (ja) 2002-12-27 2004-09-02 Nippon Signal Co Ltd:The プレーナ型電磁アクチュエータ
JP4544972B2 (ja) * 2003-12-04 2010-09-15 オリンパス株式会社 光偏向器
JP4694196B2 (ja) 2004-12-28 2011-06-08 オリンパス株式会社 光偏向器
US7557972B2 (en) * 2006-06-07 2009-07-07 Canon Kabushiki Kaisha Oscillator device, optical deflector and optical instrument using the same
JP5272989B2 (ja) 2009-09-17 2013-08-28 ブラザー工業株式会社 ２次元光スキャナ

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5883382A (en) * 1996-06-07 1999-03-16 Nihon Shingo Kabushiki Kaisha Photo-detecting device having optical axis orienting variable direction
US6989921B2 (en) * 2000-08-27 2006-01-24 Corning Incorporated Magnetically actuated micro-electro-mechanical apparatus and method of manufacture
US20050002085A1 (en) * 2003-05-07 2005-01-06 Funai Electric Co., Ltd. MEMS mirror device and optical disk apparatus
EP1538474A1 (fr) * 2003-12-04 2005-06-08 Olympus Corporation Déflecteur optique

Also Published As

Publication number Publication date
US9025229B2 (en) 2015-05-05
JP5663590B2 (ja) 2015-02-04
FR2951713A1 (fr) 2011-04-29
CN102844263A (zh) 2012-12-26
WO2011051620A2 (fr) 2011-05-05
JP2013508785A (ja) 2013-03-07
US20170168288A1 (en) 2017-06-15
FR2951713B1 (fr) 2012-04-13
CN102844263B (zh) 2016-01-20
US9212047B2 (en) 2015-12-15
US20150062685A1 (en) 2015-03-05
US20130003155A1 (en) 2013-01-03

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