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WO2009118361A1 - Appareil pour le traitement au plasma de corps creux - Google Patents

Appareil pour le traitement au plasma de corps creux Download PDF

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Publication number
WO2009118361A1
WO2009118361A1 PCT/EP2009/053547 EP2009053547W WO2009118361A1 WO 2009118361 A1 WO2009118361 A1 WO 2009118361A1 EP 2009053547 W EP2009053547 W EP 2009053547W WO 2009118361 A1 WO2009118361 A1 WO 2009118361A1
Authority
WO
WIPO (PCT)
Prior art keywords
hollow body
electrodes
gas
plasma
coating
Prior art date
Application number
PCT/EP2009/053547
Other languages
English (en)
Inventor
Thomas Virot
David Benjamin Montgomery
Yves Enfoux
Laurence Boulange
Original Assignee
Becton Dickinson France
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Becton Dickinson France filed Critical Becton Dickinson France
Publication of WO2009118361A1 publication Critical patent/WO2009118361A1/fr

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/04—Coating on selected surface areas, e.g. using masks
    • C23C16/045—Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/62—Plasma-deposition of organic layers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D7/00—Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials
    • B05D7/22—Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials to internal surfaces, e.g. of tubes
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/001—General methods for coating; Devices therefor
    • C03C17/003—General methods for coating; Devices therefor for hollow ware, e.g. containers
    • C03C17/004—Coating the inside
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C23C16/45563—Gas nozzles
    • C23C16/45565—Shower nozzles
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
    • C23C16/4582—Rigid and flat substrates, e.g. plates or discs
    • C23C16/4587—Rigid and flat substrates, e.g. plates or discs the substrate being supported substantially vertically
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
    • A61M5/00—Devices for bringing media into the body in a subcutaneous, intra-vascular or intramuscular way; Accessories therefor, e.g. filling or cleaning devices, arm-rests
    • A61M5/178—Syringes
    • A61M5/31—Details
    • A61M5/3129—Syringe barrels
    • A61M2005/3131—Syringe barrels specially adapted for improving sealing or sliding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D2203/00—Other substrates
    • B05D2203/30—Other inorganic substrates, e.g. ceramics, silicon
    • B05D2203/35—Glass
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00—Methods for coating glass
    • C03C2218/10—Deposition methods
    • C03C2218/15—Deposition methods from the vapour phase
    • C03C2218/152—Deposition methods from the vapour phase by cvd
    • C03C2218/153—Deposition methods from the vapour phase by cvd by plasma-enhanced cvd

Definitions

  • the invention concerns an apparatus and a method for plasma treatment of hollow bodies, for example syringes, having small internal diameters. It more particularly relates to the coating of the internal walls using the chemical vapor deposition technique for said hollow bodies.
  • an apparatus comprising a chamber made of an electrically insulating material, a main electrode adjacent of an exterior surface of said chamber and a counter electrode inside the container is disclosed; this system improves the uniformity of the deposited film.
  • Patent US 5972436 teaches a method to improve the uniformity of the coating, using a process including a step for prior heating of the interior of said hollow body by initiating a plasma by filling this with oxygen, then releasing the plasma when the desired temperature is reached, gas supply which will be used for the coating with initiation of a new plasma.
  • Patent EP 1493839 describes a CVD film forming apparatus for plastic containers, which comprise internal and external electrodes and a cover, constituting the film forming chamber; this device allows to form CVD films on the inner and/or the outer surface of the containers.
  • patent EP 1508360 teaches to replace it by a mouth side electrode which faces the external electrode.
  • Patent WO200722976 teaches an apparatus with two parallel electrodes for the plasma treatment of internal and external surfaces of hollow bodies, like syringes; but this structure is not adapted for mass production.
  • Patent US-61177148 teaches a method leading to a simultaneous uniform coating of several pieces using a pulsed method with chronologically- controlled adjacent antennae which make it possible to supply the electrodes of two adjacent objects needing to be coated, at different times to avoid interferences between the plasmas thus created.
  • Patent EP1516941 describes a rotary CVD film forming apparatus for plastic containers, which comprise internal electrodes inside the containers and external electrodes capable of housing a plurality of containers. By using this structure, it is possible to achieve compactness or a multi-fold increase of the productivity.
  • Patent WO200708184 disclose a lubricious coating and a protein deterrent coating by plasma treatment on the inside wall of pharmaceutical pakages like syringes; this method allows to reduce the adsorption of proteins on the surface of the container but is not associated with a specific apparatus.
  • Patent EP 0709105 disclosed syringes with internal lubricating layers deposited by a CVD process. But there is no specific apparatus combined with this process.
  • the present invention makes it possible to resolve the above mentioned drawbacks and to perform coatings whereof variations in thickness are small inside the hollow body having a significant length and a small diameter, while also making it possible to perform the coating on all or part of said hollow bodies.
  • the present invention also makes it possible to carry out said coatings simultaneously on series of hollow bodies, thereby allowing industrialization of the process.
  • the present invention consists of an apparatus for plasma treatment of the interior walls of at least one hollow body comprising: - at least one support adapted to the external dimensions of the hollow body, - - at least two metallic electrodes having, on their surfaces, lumens able to receive the said hollow bodies, characterized in that said apparatus comprises a hood comprising means for delivering a gas into the interior volumes of said hollow bodies.
  • said hood forms, with the support, an intermediate chamber to distribute gas into the interior volumes of several hollow bodies.
  • Chemical vapor deposition is a method for depositing thin films from gaseous precursors. The principle consists of injecting, under a controlled atmosphere, gaseous precursors, then the substrate is heated and the chemical deposition reaction takes place on the surface after absorption of the gaseous reagents.
  • plasma assisted (or enhanced) chemical vapor deposition is used in the present invention.
  • the apparatus is made up of assembled adjacent modules, each module comprising a support adapted to receive at least one hollow body.
  • the apparatus thus has a flexible capacity and can be adapted to perform a coating on a set of hollow bodies comprising a variable number of hollow bodies and thus enables adaptation of the size of batches according to production needs.
  • the apparatus also comprises screens which can be placed on one of its external surfaces, on both sides and/or at the lower part of the modules, to obtain uniform and intense plasma distribution inside the hollow bodies.
  • the apparatus according to the invention is adapted to a cylindrical hollow body, having an L/D ratio greater than or equal to 3, preferably greater than or equal to 5, L being the length and D being the diameter of said hollow body.
  • the support of the apparatus according to the invention is particularly adapted to syringe bodies.
  • the invention also concerns an apparatus according to the invention characterized in that it also comprises means for adjusting the distance between said electrodes.
  • said means are insulating spacers.
  • the electrodes are thus perpendicular to the central axis of the hollow body and own lumens able to receive the hollow bodies as the insulative spacers in order to complete the holder for the hollow bodies.
  • the height of the coating is between the flange and the shoulder formed in front of the tip of the syringe, preferably on the length corresponding to the travel of the piston.
  • the gas can escape via the end opposite the end enabling introduction of the gas into said hollow body, the end of the hollow body forming an escape means for the gas.
  • this end has an opening with a diameter smaller than that of the opening enabling the introduction of the gas, for example when said hollow bodies are syringes, on which the needles are mounted, the difference in diameter between the hollow body and the needle being able to create an overpressure in the hollow body, an escape means constituted by an orifice is arranged at the upper part of the apparatus.
  • Said escape means is, for example, an orifice placed at the end also allowing introduction of the gas.
  • a gas escapement channel is arranged on the upper part of the hood.
  • Said invention thus enables the coating of the interior walls of hollow bodies whereof one end is closed or whereof one end is partially obstructed, for example syringes on which the needles were previously fixed without risk of deposition of the coating in the needles, the electrodes being able to be positioned at a level higher than that of the needles.
  • the plasma treatment is a chemical vapor deposition treatment.
  • the plasma treatment is an oxidizing plasma cleaning treatment.
  • Oxidizing plasma designates the creation of a plasma after filling of the hollow body with a gaseous mixture essentially containing oxygen.
  • one performs two successive treatments, an oxidizing plasma in the presence of oxygen then, after evacuation of the oxygen and refilling of the hollow body by suitable gaseous precursors, one performs a chemical vapor deposition coating treatment.
  • the present invention also concerns a system for plasma treatment of the interior walls of at least one hollow body, said system comprising:
  • said chamber also comprises:
  • the predetermined pressure level is a vacuum, for example an average vacuum from 1 to 10 ⁇ 3 mbar (10 2 to 10 ⁇ 1 Pa) or a high- vacuum from 10 "3 to 10 "7 mbar (10 "1 to 10 "5 Pa).
  • the predetermined pressure level is the atmospheric pressure, or approximately 101 ,325 Pa.
  • the means for creating the plasma discharge between the two electrodes are radio-frequency means in another embodiment, or microwaves in still another embodiment.
  • at least one of the electrodes is connected to the ground.
  • the invention also concerns a method for chemical vapor deposition coating of the interior walls of at least one hollow body comprising the steps of: a) positioning said hollow body in the support of an apparatus according to the invention as defined above, b) creating and maintaining a predetermined pressure level in said apparatus, c) introducing a gas into the internal volume of said hollow body, d) creating a plasma discharge between the two said electrodes.
  • the predetermined pressure level is a vacuum.
  • the predetermined pressure level is the atmospheric pressure.
  • the gas is chosen according to the treatment and/or coating targeted.
  • the gas is chosen in the group made up of hexamethyldisiloxane (HMDSO), polyvinyhoodene chloride, fluorocarbon, silane derivatives, methane, thmethylstannyl (Sn(CH 3 ) 3 , alone or mixed with air or oxygen.
  • the gas is chosen in the group made up of aluminum trioxyde, hexamethyldisiloxane (HMDSO), silane derivatives, methane, alone or mixed with air or oxygen.
  • HMDSO hexamethyldisiloxane
  • silane derivatives methane, alone or mixed with air or oxygen.
  • the invention also concerns a glass syringe body coated according to a method according to the invention.
  • the glass is borosilicate.
  • the invention also concerns a plastic syringe body coated according to a method according to the invention.
  • the plastic material is propylene or cyclopolyolefine, generic term designating, for example, a mixture of resins such as the "ZEONEX" resins provided by the company ZEON
  • the invention also concerns a hollow body having an L/D ratio greater than or equal to 3, preferably greater than or equal to 5, L being the length and D being the diameter of said hollow body, said hollow body having an interior coating of a thickness between 300 and 500 nm having thickness variations less than or equal to 20%.
  • the invention concerns a method for cleaning by oxydative plasma of the interior walls of at least one hollow body comprising the steps of: a) positioning said hollow body in the support of an apparatus according to the invention as defined above, b) creating and maintaining a predetermined pressure level in said apparatus, c) introducing oxygen into the internal volume of said hollow body, d) creating a plasma discharge between the two said electrodes.
  • the apparatus comprises four spacers which are placed in the support to adapt the apparatus to glass syringe bodies with a capacity of 1 milliliter.
  • Figure 1 shows an exploded view of an apparatus according to the invention.
  • Figures 2 and 3 show a general view of a module of the apparatus according to the invention in two assembly modes.
  • Figure 4 shows a general view of an apparatus according to the invention.
  • Figure 5 shows a cross-section along axis XX of an apparatus according to the invention.
  • Figure 6 shows a syringe body having a coating on one part of the length of the syringe body.
  • Figures 7, 8 and 9 show a diagrammatic view of the measuring capacities and contact angles.
  • the plasma treatment apparatus shown in an exploded view in figure 1 comprises a hood 1 having, on its lower surface, recesses 10 forming means to deliver gas into the interior volumes of the hollow bodies and forming, with the lower support, a chamber for distributing gas into the hollow body.
  • the module shown comprises two electrodes 8, the surface of which has lumens able to receive the hollow bodies 12 shown in the exploded view and which are syringe bodies without needles.
  • the apparatus also comprises a support 4 comprising lumens adapted to the abovementioned hollow bodies. Also shown are insulating spacers 5 to adapt the distance between the electrodes 8. Screens 6 which will be placed on each side of the modules, to obtain uniform plasma distribution inside the hollow bodies, are also shown.
  • Assembly means namely rods 13, nuts 14, butterfly nuts 15 and screws 16 are also shown to assemble the components described above.
  • the modules namely the electrodes 8
  • the support 4 and the spacers 5 are assembled before insertion of the hollow bodies then the hood 1 and the screens 6.
  • the apparatus is then placed in a chamber, the electrodes are connected to an energy source, and the orifices 11 are connected to a network which makes it possible to create a vacuum inside the hollow bodies, then to inject the gas inside said hollow bodies.
  • FIGS 2 and 3 are shown a general view of a module of the apparatus according to the invention in two assembly modes.
  • an assembly comprising a hood 1 of the electrodes 8, a support 4 of the spacers 5 and a screen 6 placed below the apparatus.
  • the hood comprises a gas supply orifice 11.
  • the hood used comprises a degassing orifice 2.
  • the modules thus shown can then be assembled to obtain an apparatus, which comprises several modules comprising a hood 1 comprising a gas supply orifice 11 , a support 4, spacers 5, electrodes 8 and screens 6, wherein hollow bodies according to the invention have been placed, as shown in figure 4.
  • Figure 5 shows a cross-section along axis XX of an apparatus as shown in figure 4.
  • the assembly done comprises five parts, A, B, C, D and E, parts A and B being designed to receive hollow bodies bearing a needle.
  • a degassing orifice 2 is arranged to enable the return of the injected gas.
  • the hollow bodies designed to be coated do not comprise needles, degassing can be done through the distal end of said hollow body, i.e. the area 22 of said hollow body. These modules therefore do not have degassing holes.
  • Figure 6 illustrates a syringe body having a coating 24 on part of the length of the syringe body.
  • the coating is deposited over a length I of the syringe body, the total length of the body being shown by a length L and the diameter by the letter D. All of these variables are used in the continuation of the text, in particular in the examples and the tables, to characterize the bodies of the syringes subjected to a treatment according to the invention.
  • the syringe body shown in figure 7 illustrates the measurement areas for contact angles, in particular in 20 the flange area, in 21 the middle of the syringe body, and in 22 the so-called needle area.
  • Figures 8 and 9 show contact angles with water at the surface of a substrate.
  • Figure 8 shows a hydrophilic surface 25 not bearing a coating and a drop 23 which has a small contact angle with the surface.
  • Figure 9 shows a hydrophobic surface 24 comprising a coating whereon is positioned a drop 23 with a large contact angle with said surface 24.
  • All of the examples are conducted in glass syringes, of the BD HypakTM brand, or CCP (Cristal Clear Polymer or cyclopolyolefine) polymer syringes.
  • the gas mixture is made up of 20 SCCM air and 3.5 SCCM (Standard Cubic Centimeter Minute) of HMDSO (HexaMethylDiSiloxane).
  • the plasma is generated by an 18 MHz radio scan frequency and a power of 400 V (peak to peak).
  • the coating is done in a medium containing at least one row of ten syringes.
  • the composition of the coatings is determined using the X-ray photoelectronic spectroscopy (XPS) method.
  • XPS X-ray photoelectronic spectroscopy
  • the XPS analysis is done using a spectrometer (SSX200, Surface Science) used at an Al Kn achromatic X-ray source (486.6 eV) operating at 10 kV with a power of 225 watts.
  • SSX200 Surface Science
  • Al Kn achromatic X-ray source 486.6 eV
  • the spectors are obtained with a passing energy of 150 eV for all of the samples to determine which elements are present in the few nanometers of the top part of the coating surface.
  • the value of the angle between the surface and the direction of electron detection is 35°.
  • Working pressures are 4x10 "9 torrs and the analysis area is a circle with a diameter of 0.84 mm.
  • the base area of the surface of the peak is removed before analysis of the specters.
  • the shape of the lines used for the "curve fitting" analysis are 80% Gaussien and 20% Lorentzian for elements C 1 s and O 1s. The ratios between each element expressed in percentages were calculated using the surface of the peaks based on acquisitions and after subtracting the base line.
  • the contact angles with water of the different coatings were measured using the following method: after coating, the cylinders are cut using a diamond wire saw and the contact angles are measured on the length of the cylinder using an automatic goniometer equipped with software correcting the curve of the cylinder during measurement of the contact angle.
  • a homogenous coating inside the cylinder of the syringe corresponds to contact angles with water measured at three different locations inside the coated cylinder (see figures 7, 8 and 9). The contact angles with water are expressed in degrees.
  • the L/D ratio for all of the samples is equal to 6.3 cm, L being equal to 5 cm and D being equal to 0.8 cm.
  • the length of the syringe body whereon a coating is done may vary (see figure 6).
  • Example 1 Influence of the £/D ratio for coating of glass syringes without needles.
  • a plasma coating is created on the syringes which are placed in the support. With an £/D ratio of 5.7, it is possible to create a plasma more deeply inside the syringes in comparison with a ratio of 4.4 (see results in table 1 below).
  • the coating inside the syringe body is more homogenous when one uses screens on the sides of the device because the standard deviation measured is smaller.
  • Polymer cylinders (having the same dimensions as BD HypakTM brand 1 milliliter syringes) using the same device as that described in example 4 with a decrease in power to 300 volts.

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Metallurgy (AREA)
  • Mechanical Engineering (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Wood Science & Technology (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Chemical Vapour Deposition (AREA)

Abstract

L'invention concerne un appareil pour le traitement au plasma des parois internes d'au moins un corps creux, qui comprend: - au moins un support (4) adapté aux dimensions externes du corps creux (12), - au moins deux électrodes métalliques (8) présentant, sur leurs surfaces, des lumières pouvant recevoir lesdits corps creux, se caractérisant en ce que ledit appareil comprend un capot (1) comprenant des moyens (10) permettant de distribuer un gaz dans les volumes internes desdits corps creux et un système pour le traitement au plasma des parois internes d'au moins un corps creux, ledit système comprenant ledit appareil. L'invention concerne en outre un procédé de dépôt chimique en phase vapeur d'un revêtement sur les parois internes d'au moins un corps creux mettant en oeuvre ledit système. L'invention concerne également un corps creux présentant un rapport L/D au moins égal à 3, de préférence au moins égal à 5, L étant la longueur et D le diamètre dudit corps creux. Ledit corps creux présente un revêtement interne d'une épaisseur comprise entre 300 et 500 nm, les variations étant inférieures à 20%.
PCT/EP2009/053547 2008-03-25 2009-03-25 Appareil pour le traitement au plasma de corps creux WO2009118361A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR0851901 2008-03-25
FR0851901A FR2929295A1 (fr) 2008-03-25 2008-03-25 Appareil pour le traitement par plasma de corps creux

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WO2009118361A1 true WO2009118361A1 (fr) 2009-10-01

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Cited By (23)

* Cited by examiner, † Cited by third party
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US7985188B2 (en) 2009-05-13 2011-07-26 Cv Holdings Llc Vessel, coating, inspection and processing apparatus
WO2011092536A1 (fr) * 2010-01-26 2011-08-04 Becton Dickinson France Conditions différentes de surface intérieure de cartouche de médicament
DE102011009056A1 (de) 2011-01-20 2012-07-26 Schott Ag Vorrichtung zur Plasmabehandlung von Hohlkörpern
US8512796B2 (en) 2009-05-13 2013-08-20 Si02 Medical Products, Inc. Vessel inspection apparatus and methods
WO2014085346A1 (fr) * 2012-11-30 2014-06-05 Sio2 Medical Products, Inc. Corps creux comportant un revêtement intérieur
CZ305156B6 (cs) * 2013-12-19 2015-05-20 Masarykova Univerzita Způsob plazmové úpravy vnitřního a/nebo vnějšího povrchu dutého elektricky nevodivého tělesa a zařízení pro provádění tohoto způsobu
US9272095B2 (en) 2011-04-01 2016-03-01 Sio2 Medical Products, Inc. Vessels, contact surfaces, and coating and inspection apparatus and methods
US9458536B2 (en) 2009-07-02 2016-10-04 Sio2 Medical Products, Inc. PECVD coating methods for capped syringes, cartridges and other articles
US9545360B2 (en) 2009-05-13 2017-01-17 Sio2 Medical Products, Inc. Saccharide protective coating for pharmaceutical package
US9554968B2 (en) 2013-03-11 2017-01-31 Sio2 Medical Products, Inc. Trilayer coated pharmaceutical packaging
US9662450B2 (en) 2013-03-01 2017-05-30 Sio2 Medical Products, Inc. Plasma or CVD pre-treatment for lubricated pharmaceutical package, coating process and apparatus
US9664626B2 (en) 2012-11-01 2017-05-30 Sio2 Medical Products, Inc. Coating inspection method
US9764093B2 (en) 2012-11-30 2017-09-19 Sio2 Medical Products, Inc. Controlling the uniformity of PECVD deposition
US9863042B2 (en) 2013-03-15 2018-01-09 Sio2 Medical Products, Inc. PECVD lubricity vessel coating, coating process and apparatus providing different power levels in two phases
US9878101B2 (en) 2010-11-12 2018-01-30 Sio2 Medical Products, Inc. Cyclic olefin polymer vessels and vessel coating methods
US9903782B2 (en) 2012-11-16 2018-02-27 Sio2 Medical Products, Inc. Method and apparatus for detecting rapid barrier coating integrity characteristics
US9937099B2 (en) 2013-03-11 2018-04-10 Sio2 Medical Products, Inc. Trilayer coated pharmaceutical packaging with low oxygen transmission rate
US10189603B2 (en) 2011-11-11 2019-01-29 Sio2 Medical Products, Inc. Passivation, pH protective or lubricity coating for pharmaceutical package, coating process and apparatus
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