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WO2009037753A1 - Substrate transfer system - Google Patents

Substrate transfer system Download PDF

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Publication number
WO2009037753A1
WO2009037753A1 PCT/JP2007/068186 JP2007068186W WO2009037753A1 WO 2009037753 A1 WO2009037753 A1 WO 2009037753A1 JP 2007068186 W JP2007068186 W JP 2007068186W WO 2009037753 A1 WO2009037753 A1 WO 2009037753A1
Authority
WO
WIPO (PCT)
Prior art keywords
conveyer
substrate
transfer system
substrates
substrate transfer
Prior art date
Application number
PCT/JP2007/068186
Other languages
French (fr)
Japanese (ja)
Inventor
Toru Gamo
Takehiko Hori
Original Assignee
Hirata Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hirata Corporation filed Critical Hirata Corporation
Priority to JP2009532986A priority Critical patent/JP4950297B2/en
Priority to KR1020107008262A priority patent/KR101132424B1/en
Priority to PCT/JP2007/068186 priority patent/WO2009037753A1/en
Priority to CN2007801007133A priority patent/CN101801815B/en
Priority to TW097135654A priority patent/TWI403446B/en
Publication of WO2009037753A1 publication Critical patent/WO2009037753A1/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/52—Devices for transferring articles or materials between conveyors i.e. discharging or feeding devices
    • B65G47/53—Devices for transferring articles or materials between conveyors i.e. discharging or feeding devices between conveyors which cross one another
    • B65G47/54—Devices for transferring articles or materials between conveyors i.e. discharging or feeding devices between conveyors which cross one another at least one of which is a roller-way
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/068—Stacking or destacking devices; Means for preventing damage to stacked sheets, e.g. spaces
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67718—Changing orientation of the substrate, e.g. from a horizontal position to a vertical position
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67736—Loading to or unloading from a conveyor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67742—Mechanical parts of transfer devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67745—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber characterized by movements or sequence of movements of transfer devices

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Stacking Of Articles And Auxiliary Devices (AREA)

Abstract

Provided is a substrate transfer system for transferring substrates between a substrate storing cassette and a processing apparatus. The substrate transfer system is provided with a first conveyer which transfers a plurality of substrates at the same time; a second conveyer which is continuously arranged from the first conveyer and separately transfers the substrates in the transfer direction; a moving unit, which has a placing section for placing the substrate which is on the second conveyer, and moves the substrate in a direction orthogonally intersecting with the transfer direction on the second conveyer; and a lifting unit which relatively brings up and down the placing section and the second conveyer.
PCT/JP2007/068186 2007-09-19 2007-09-19 Substrate transfer system WO2009037753A1 (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2009532986A JP4950297B2 (en) 2007-09-19 2007-09-19 Substrate transfer system
KR1020107008262A KR101132424B1 (en) 2007-09-19 2007-09-19 Board Transfer System
PCT/JP2007/068186 WO2009037753A1 (en) 2007-09-19 2007-09-19 Substrate transfer system
CN2007801007133A CN101801815B (en) 2007-09-19 2007-09-19 Substrate transfer system
TW097135654A TWI403446B (en) 2007-09-19 2008-09-17 Substrate handling system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2007/068186 WO2009037753A1 (en) 2007-09-19 2007-09-19 Substrate transfer system

Publications (1)

Publication Number Publication Date
WO2009037753A1 true WO2009037753A1 (en) 2009-03-26

Family

ID=40467584

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2007/068186 WO2009037753A1 (en) 2007-09-19 2007-09-19 Substrate transfer system

Country Status (5)

Country Link
JP (1) JP4950297B2 (en)
KR (1) KR101132424B1 (en)
CN (1) CN101801815B (en)
TW (1) TWI403446B (en)
WO (1) WO2009037753A1 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102280397A (en) * 2010-06-10 2011-12-14 致茂电子(苏州)有限公司 Wafer conveying and distributing device and method thereof
JP2014056944A (en) * 2012-09-12 2014-03-27 Ulvac Japan Ltd Vacuum processor
WO2021234203A1 (en) * 2020-05-20 2021-11-25 Tecglass Sl Glass printing machine with continuous transport system for the glass
EP4118018A1 (en) * 2020-03-20 2023-01-18 Hubert Haselsteiner Loading system

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101545260B1 (en) * 2012-06-12 2015-08-20 한화테크윈 주식회사 Apparatus for transferring substrate
JP6045376B2 (en) * 2013-02-06 2016-12-14 Juki株式会社 Substrate transfer device and substrate transfer method
KR101797994B1 (en) * 2013-07-01 2017-11-15 한화테크윈 주식회사 Conveyor
CN105692029B (en) * 2016-03-21 2018-08-10 李毅 A kind of intelligent logistics system suitable for corrugated board production
CN106369955B (en) * 2016-08-31 2019-08-16 武汉华星光电技术有限公司 Film dries machine support and film dryer
CN113371469A (en) * 2021-07-13 2021-09-10 上海金东唐科技有限公司 Stacking device and automatic production system
KR20250009754A (en) * 2023-07-11 2025-01-20 한화모멘텀 주식회사 Transferring apparatus and electrode material heat treatment apparatus including the same

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01290299A (en) * 1988-05-18 1989-11-22 Sanyo Electric Co Ltd Apparatus for supplying and containing boards
JP2004284722A (en) * 2003-03-20 2004-10-14 Nec Mobiling Ltd Vehicle loading management system and method
JP2005060110A (en) * 2003-08-11 2005-03-10 Chi Mei Optoelectronics Corp Substrate feeder for sequential type substrate cassette
JP2005170675A (en) * 2003-11-21 2005-06-30 Ishikawajima Harima Heavy Ind Co Ltd Substrate transfer device, substrate storage and transfer device, substrate carry-in system, substrate carry-out system, and substrate carry-in / carry-out system
JP2007036227A (en) * 2005-07-22 2007-02-08 Au Optronics Corp Substrate storage cassette, transfer conveyor and transfer system using them
WO2007029401A1 (en) * 2005-09-02 2007-03-15 Hirata Corporation Work loading/unloading system and conveyance device

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004155569A (en) 2002-11-08 2004-06-03 Daifuku Co Ltd Handling facility for platelike body
JP2004284772A (en) * 2003-03-24 2004-10-14 Toshiba Mitsubishi-Electric Industrial System Corp Board transporting system
JP4436689B2 (en) * 2004-01-28 2010-03-24 マルヤス機械株式会社 Glass substrate transfer system

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01290299A (en) * 1988-05-18 1989-11-22 Sanyo Electric Co Ltd Apparatus for supplying and containing boards
JP2004284722A (en) * 2003-03-20 2004-10-14 Nec Mobiling Ltd Vehicle loading management system and method
JP2005060110A (en) * 2003-08-11 2005-03-10 Chi Mei Optoelectronics Corp Substrate feeder for sequential type substrate cassette
JP2005170675A (en) * 2003-11-21 2005-06-30 Ishikawajima Harima Heavy Ind Co Ltd Substrate transfer device, substrate storage and transfer device, substrate carry-in system, substrate carry-out system, and substrate carry-in / carry-out system
JP2007036227A (en) * 2005-07-22 2007-02-08 Au Optronics Corp Substrate storage cassette, transfer conveyor and transfer system using them
WO2007029401A1 (en) * 2005-09-02 2007-03-15 Hirata Corporation Work loading/unloading system and conveyance device

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102280397A (en) * 2010-06-10 2011-12-14 致茂电子(苏州)有限公司 Wafer conveying and distributing device and method thereof
JP2014056944A (en) * 2012-09-12 2014-03-27 Ulvac Japan Ltd Vacuum processor
EP4118018A1 (en) * 2020-03-20 2023-01-18 Hubert Haselsteiner Loading system
WO2021234203A1 (en) * 2020-05-20 2021-11-25 Tecglass Sl Glass printing machine with continuous transport system for the glass
US12214966B2 (en) 2020-05-20 2025-02-04 Tecglass Sl Glass printing machine with continuous transport system for the glass

Also Published As

Publication number Publication date
CN101801815A (en) 2010-08-11
KR101132424B1 (en) 2012-04-03
JPWO2009037753A1 (en) 2011-01-06
KR20100068442A (en) 2010-06-23
JP4950297B2 (en) 2012-06-13
TW200922851A (en) 2009-06-01
TWI403446B (en) 2013-08-01
CN101801815B (en) 2012-05-30

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