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WO2009035095A1 - エピタキシャルSiC単結晶基板及びエピタキシャルSiC単結晶基板の製造方法 - Google Patents

エピタキシャルSiC単結晶基板及びエピタキシャルSiC単結晶基板の製造方法 Download PDF

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Publication number
WO2009035095A1
WO2009035095A1 PCT/JP2008/066571 JP2008066571W WO2009035095A1 WO 2009035095 A1 WO2009035095 A1 WO 2009035095A1 JP 2008066571 W JP2008066571 W JP 2008066571W WO 2009035095 A1 WO2009035095 A1 WO 2009035095A1
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WIPO (PCT)
Prior art keywords
single crystal
sic single
crystal substrate
epitaxial sic
plane
Prior art date
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PCT/JP2008/066571
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English (en)
French (fr)
Inventor
Kenji Momose
Michiya Odawara
Keiichi Matsuzawa
Hajime Okumura
Kazutoshi Kojima
Yuuki Ishida
Hidekazu Tsuchida
Isaho Kamata
Original Assignee
Showa Denko K.K.
National Institute Of Advanced Industrial Science And Technology
Central Research Institute Of Electric Power Industry
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Publication date
Application filed by Showa Denko K.K., National Institute Of Advanced Industrial Science And Technology, Central Research Institute Of Electric Power Industry filed Critical Showa Denko K.K.
Priority to EP08829974A priority Critical patent/EP2196566A4/en
Priority to CN200880106397.5A priority patent/CN101802273B/zh
Priority to JP2009532248A priority patent/JP5273741B2/ja
Priority to US12/677,255 priority patent/US8293623B2/en
Priority to KR1020107006931A priority patent/KR101287787B1/ko
Publication of WO2009035095A1 publication Critical patent/WO2009035095A1/ja
Priority to US13/617,596 priority patent/US8716718B2/en

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    • C30B25/00Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
    • C30B25/02Epitaxial-layer growth
    • C30B25/18Epitaxial-layer growth characterised by the substrate
    • C30B25/20Epitaxial-layer growth characterised by the substrate the substrate being of the same materials as the epitaxial layer
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
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    • C23C16/30Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
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    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
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    • C23C16/30Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
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    • C30B25/00Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
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    • C30B29/00Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/10Inorganic compounds or compositions
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Abstract

 c面またはc面を0度超10度未満の傾斜角度で傾斜させた面を主面とするSiC単結晶ウェハと、前記SiC単結晶ウェハの前記主面上に形成されたSiCエピタキシャル膜とを含むエピタキシャルSiC単結晶基板であって、  前記SiCエピタキシャル膜に形成される貫通刃状転位列の転位列密度が10本/cm2以下であることを特徴とするエピタキシャルSiC単結晶基板。
PCT/JP2008/066571 2007-09-12 2008-09-12 エピタキシャルSiC単結晶基板及びエピタキシャルSiC単結晶基板の製造方法 WO2009035095A1 (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
EP08829974A EP2196566A4 (en) 2007-09-12 2008-09-12 EPITACTIC SIC-INCREDIBLE SUBSTRATE AND METHOD FOR PRODUCING EPICTIC SIC-INCREDIBLE SUBSTRATE
CN200880106397.5A CN101802273B (zh) 2007-09-12 2008-09-12 外延SiC单晶衬底及外延SiC单晶衬底的制造方法
JP2009532248A JP5273741B2 (ja) 2007-09-12 2008-09-12 エピタキシャルSiC単結晶基板及びエピタキシャルSiC単結晶基板の製造方法
US12/677,255 US8293623B2 (en) 2007-09-12 2008-09-12 Epitaxial SiC single crystal substrate and method of manufacture of epitaxial SiC single crystal substrate
KR1020107006931A KR101287787B1 (ko) 2007-09-12 2008-09-12 에피택셜 SiC 단결정 기판 및 에피택셜 SiC 단결정 기판의 제조 방법
US13/617,596 US8716718B2 (en) 2007-09-12 2012-09-14 Epitaxial SiC single crystal substrate and method of manufacture of epitaxial SiC single crystal substrate

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2007-236661 2007-09-12
JP2007236661 2007-09-12
JP2008211757 2008-08-20
JP2008-211757 2008-08-20

Related Child Applications (2)

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US12/677,255 A-371-Of-International US8293623B2 (en) 2007-09-12 2008-09-12 Epitaxial SiC single crystal substrate and method of manufacture of epitaxial SiC single crystal substrate
US13/617,596 Division US8716718B2 (en) 2007-09-12 2012-09-14 Epitaxial SiC single crystal substrate and method of manufacture of epitaxial SiC single crystal substrate

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US (2) US8293623B2 (ja)
EP (1) EP2196566A4 (ja)
JP (1) JP5273741B2 (ja)
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CN (1) CN101802273B (ja)
TW (1) TWI408262B (ja)
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JP2010126380A (ja) * 2008-11-26 2010-06-10 Bridgestone Corp 炭化珪素単結晶の製造方法
JP2011111372A (ja) * 2009-11-27 2011-06-09 Showa Denko Kk 炭化珪素単結晶及びその製造方法、並びに炭化珪素単結晶ウェーハ及び炭化珪素単結晶インゴット
JP2011121847A (ja) * 2009-12-14 2011-06-23 Showa Denko Kk SiCエピタキシャルウェハ及びその製造方法
JP2011219296A (ja) * 2010-04-07 2011-11-04 Nippon Steel Corp 炭化珪素単結晶ウェハ
JP2012051795A (ja) * 2011-10-25 2012-03-15 Showa Denko Kk SiCエピタキシャルウェハ
US20130095294A1 (en) * 2011-10-17 2013-04-18 Sumitomo Electric Industries, Ltd. Silicon carbide ingot and silicon carbide substrate, and method of manufacturing the same
US8716718B2 (en) 2007-09-12 2014-05-06 Showa Denko K.K. Epitaxial SiC single crystal substrate and method of manufacture of epitaxial SiC single crystal substrate
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JP2015054815A (ja) * 2013-09-13 2015-03-23 トヨタ自動車株式会社 SiC単結晶及びその製造方法
JP2015529015A (ja) * 2013-03-15 2015-10-01 ダウ コーニング コーポレーションDow Corning Corporation SiCエピタキシャル膜を有するSiC基板
US9165779B2 (en) 2012-10-26 2015-10-20 Dow Corning Corporation Flat SiC semiconductor substrate
US9279192B2 (en) 2014-07-29 2016-03-08 Dow Corning Corporation Method for manufacturing SiC wafer fit for integration with power device manufacturing technology
US9337277B2 (en) 2012-09-11 2016-05-10 Dow Corning Corporation High voltage power semiconductor device on SiC
WO2016133089A1 (ja) * 2015-02-18 2016-08-25 新日鐵住金株式会社 エピタキシャル炭化珪素単結晶ウエハの製造方法及びエピタキシャル炭化珪素単結晶ウエハ
JP2016166112A (ja) * 2015-03-10 2016-09-15 株式会社東芝 半導体基板及び半導体装置
JP6061060B1 (ja) * 2015-10-07 2017-01-18 住友電気工業株式会社 炭化珪素エピタキシャル基板および炭化珪素半導体装置の製造方法
WO2017047244A1 (ja) * 2015-09-14 2017-03-23 住友電気工業株式会社 炭化珪素エピタキシャル基板の製造方法および炭化珪素エピタキシャル成長装置
WO2017061154A1 (ja) * 2015-10-07 2017-04-13 住友電気工業株式会社 炭化珪素エピタキシャル基板および炭化珪素半導体装置の製造方法
US9738991B2 (en) 2013-02-05 2017-08-22 Dow Corning Corporation Method for growing a SiC crystal by vapor deposition onto a seed crystal provided on a supporting shelf which permits thermal expansion
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JP2018016542A (ja) * 2013-09-25 2018-02-01 住友電気工業株式会社 炭化珪素半導体基板
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JP2019112274A (ja) * 2017-12-25 2019-07-11 昭和電工株式会社 台座、SiC単結晶の製造装置および製造方法
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US9644288B2 (en) 2011-11-23 2017-05-09 University Of South Carolina Pretreatment method for reduction and/or elimination of basal plane dislocations close to epilayer/substrate interface in growth of SiC epitaxial films
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US20130009170A1 (en) 2013-01-10
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JP5273741B2 (ja) 2013-08-28
US20110006309A1 (en) 2011-01-13
KR101287787B1 (ko) 2013-07-18
KR20100050562A (ko) 2010-05-13
US8716718B2 (en) 2014-05-06
US8293623B2 (en) 2012-10-23
CN101802273B (zh) 2013-04-17

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