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WO2009034967A1 - 情報処理装置、情報処理方法、及びプログラム - Google Patents

情報処理装置、情報処理方法、及びプログラム Download PDF

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Publication number
WO2009034967A1
WO2009034967A1 PCT/JP2008/066233 JP2008066233W WO2009034967A1 WO 2009034967 A1 WO2009034967 A1 WO 2009034967A1 JP 2008066233 W JP2008066233 W JP 2008066233W WO 2009034967 A1 WO2009034967 A1 WO 2009034967A1
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WO
WIPO (PCT)
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information
section
semiconductor process
data relating
series data
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Application number
PCT/JP2008/066233
Other languages
English (en)
French (fr)
Inventor
Kazuhiro Kawamura
Tsuyoshi Moriya
Yasutoshi Umehara
Original Assignee
Tokyo Electron Limited
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Limited filed Critical Tokyo Electron Limited
Priority to KR1020107005444A priority Critical patent/KR101150791B1/ko
Priority to JP2009532185A priority patent/JPWO2009034967A1/ja
Publication of WO2009034967A1 publication Critical patent/WO2009034967A1/ja
Priority to US12/711,255 priority patent/US20100153065A1/en

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Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B23/00—Testing or monitoring of control systems or parts thereof
    • G05B23/02—Electric testing or monitoring
    • G05B23/0205—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults
    • G05B23/0218—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults characterised by the fault detection method dealing with either existing or incipient faults
    • G05B23/0224—Process history based detection method, e.g. whereby history implies the availability of large amounts of data
    • G05B23/024—Quantitative history assessment, e.g. mathematical relationships between available data; Functions therefor; Principal component analysis [PCA]; Partial least square [PLS]; Statistical classifiers, e.g. Bayesian networks, linear regression or correlation analysis; Neural networks
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/20—Sequence of activities consisting of a plurality of measurements, corrections, marking or sorting steps
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Artificial Intelligence (AREA)
  • Evolutionary Computation (AREA)
  • Mathematical Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • General Factory Administration (AREA)
  • Complex Calculations (AREA)
  • Testing And Monitoring For Control Systems (AREA)

Abstract

【課題】従来の情報処理装置においては、半導体プロセスに関する時系列データから、半導体プロセスの状態を精度良く検知することができないという課題があった。 【解決手段】半導体プロセスに関する時系列データである第一情報を受け付ける第一入力受付部１０１と、半導体プロセスに関する時系列データである第二情報を受け付ける第二入力受付部１０２と、第一情報の所定の期間内の情報を、窓関数を用いて取り出し、窓取得情報を得る窓関数処理部１０３と、窓関数処理部１０７が取り出した窓取得情報と、第二情報との相互相関関数を算出する相関算出部１０９と、相関算出部１０９の算出結果に応じた情報を出力する出力部１１１とを備えた。
PCT/JP2008/066233 2007-09-11 2008-09-09 情報処理装置、情報処理方法、及びプログラム WO2009034967A1 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
KR1020107005444A KR101150791B1 (ko) 2007-09-11 2008-09-09 정보 처리 장치, 정보 처리 방법 및, 프로그램이 기록된 컴퓨터 판독가능 기록매체
JP2009532185A JPWO2009034967A1 (ja) 2007-09-11 2008-09-09 情報処理装置、情報処理方法、及びプログラム
US12/711,255 US20100153065A1 (en) 2007-09-11 2010-02-24 Information processing device, information processing method and program

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007-234843 2007-09-11
JP2007234843 2007-09-11

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US12/711,255 Continuation US20100153065A1 (en) 2007-09-11 2010-02-24 Information processing device, information processing method and program

Publications (1)

Publication Number Publication Date
WO2009034967A1 true WO2009034967A1 (ja) 2009-03-19

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PCT/JP2008/066233 WO2009034967A1 (ja) 2007-09-11 2008-09-09 情報処理装置、情報処理方法、及びプログラム

Country Status (6)

Country Link
US (1) US20100153065A1 (ja)
JP (1) JPWO2009034967A1 (ja)
KR (1) KR101150791B1 (ja)
CN (1) CN101622688A (ja)
TW (1) TW200929325A (ja)
WO (1) WO2009034967A1 (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018136716A (ja) * 2017-02-21 2018-08-30 メタウォーター株式会社 情報処理装置、プログラム、及び制御方法
JP2023044214A (ja) * 2021-09-17 2023-03-30 株式会社Kokusai Electric 基板処理方法、基板処理装置、半導体装置の製造方法、及びプログラム
JP7467292B2 (ja) 2020-03-13 2024-04-15 東京エレクトロン株式会社 解析装置、解析方法及び解析プログラム

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20130197823A1 (en) * 2012-01-31 2013-08-01 Keith Williams Method of aggregating data collected by non-destructive ultrasonic analysis of crimp quality
US10156837B2 (en) 2014-03-14 2018-12-18 Omron Corporation Control systems for setting sampling timing
JP6332147B2 (ja) * 2015-05-28 2018-05-30 株式会社ダイフク 物品取扱設備
TWI770123B (zh) * 2017-03-13 2022-07-11 日商佐藤控股股份有限公司 信息處理裝置、程式、信息處理方法以及信息處理系統
WO2019131773A1 (ja) * 2017-12-27 2019-07-04 三菱電機株式会社 製造工程統計処理システム、製造工程統計処理方法およびプログラム
JP7093101B2 (ja) * 2018-02-26 2022-06-29 株式会社グルーヴノーツ データ生成装置、データ生成方法及びデータ生成プログラム
JP6919596B2 (ja) * 2018-03-01 2021-08-18 オムロン株式会社 計測システムおよび方法
TWI829807B (zh) * 2018-11-30 2024-01-21 日商東京威力科創股份有限公司 製造製程之假想測定裝置、假想測定方法及假想測定程式
JP2020181959A (ja) * 2019-04-26 2020-11-05 東京エレクトロン株式会社 学習方法、管理装置および管理プログラム
CN114302674B (zh) * 2019-09-06 2024-07-09 夏普株式会社 测量装置及测量方法
JP7224492B2 (ja) * 2019-11-29 2023-02-17 東京エレクトロン株式会社 推論装置、推論方法及び推論プログラム
JP2022108358A (ja) * 2021-01-13 2022-07-26 キオクシア株式会社 半導体製造装置及びその制御方法
JP2025512177A (ja) * 2023-03-17 2025-04-17 株式会社日立ハイテク 状態予測デバイス、状態予測方法、および状態予測システム

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07152789A (ja) * 1993-11-26 1995-06-16 Mitsubishi Electric Corp プラント解析設備診断システム
JP2002260978A (ja) * 2001-03-05 2002-09-13 Hitachi Ltd 試料処理装置用プロセスモニタ及び試料処理装置の制御方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6185472B1 (en) * 1995-12-28 2001-02-06 Kabushiki Kaisha Toshiba Semiconductor device manufacturing method, manufacturing apparatus, simulation method and simulator
US6909930B2 (en) * 2001-07-19 2005-06-21 Hitachi, Ltd. Method and system for monitoring a semiconductor device manufacturing process
US7856330B2 (en) * 2006-02-27 2010-12-21 Advantest Corporation Measuring apparatus, testing apparatus, and electronic device
US7398169B2 (en) * 2006-02-27 2008-07-08 Advantest Corporation Measuring apparatus, measuring method, testing apparatus, testing method, and electronics device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07152789A (ja) * 1993-11-26 1995-06-16 Mitsubishi Electric Corp プラント解析設備診断システム
JP2002260978A (ja) * 2001-03-05 2002-09-13 Hitachi Ltd 試料処理装置用プロセスモニタ及び試料処理装置の制御方法

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018136716A (ja) * 2017-02-21 2018-08-30 メタウォーター株式会社 情報処理装置、プログラム、及び制御方法
JP7467292B2 (ja) 2020-03-13 2024-04-15 東京エレクトロン株式会社 解析装置、解析方法及び解析プログラム
JP2023044214A (ja) * 2021-09-17 2023-03-30 株式会社Kokusai Electric 基板処理方法、基板処理装置、半導体装置の製造方法、及びプログラム
JP7288486B2 (ja) 2021-09-17 2023-06-07 株式会社Kokusai Electric 基板処理方法、基板処理装置、半導体装置の製造方法、及びプログラム

Also Published As

Publication number Publication date
TW200929325A (en) 2009-07-01
US20100153065A1 (en) 2010-06-17
KR101150791B1 (ko) 2012-06-13
KR20100053655A (ko) 2010-05-20
CN101622688A (zh) 2010-01-06
JPWO2009034967A1 (ja) 2010-12-24

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