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WO2009066996A1 - Dispositif pour application microfluidique - Google Patents

Dispositif pour application microfluidique Download PDF

Info

Publication number
WO2009066996A1
WO2009066996A1 PCT/MY2008/000162 MY2008000162W WO2009066996A1 WO 2009066996 A1 WO2009066996 A1 WO 2009066996A1 MY 2008000162 W MY2008000162 W MY 2008000162W WO 2009066996 A1 WO2009066996 A1 WO 2009066996A1
Authority
WO
WIPO (PCT)
Prior art keywords
microfludic
plates
applications according
channels
diaphragm
Prior art date
Application number
PCT/MY2008/000162
Other languages
English (en)
Inventor
Muhamad Ramdzan Buyong
Original Assignee
Mimos Berhad
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mimos Berhad filed Critical Mimos Berhad
Publication of WO2009066996A1 publication Critical patent/WO2009066996A1/fr

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F31/00—Mixers with shaking, oscillating, or vibrating mechanisms
    • B01F31/29—Mixing by periodically deforming flexible tubular members through which the material is flowing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F33/00—Other mixers; Mixing plants; Combinations of mixers
    • B01F33/30—Micromixers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2400/00—Moving or stopping fluids
    • B01L2400/04—Moving fluids with specific forces or mechanical means
    • B01L2400/0403—Moving fluids with specific forces or mechanical means specific forces
    • B01L2400/0415—Moving fluids with specific forces or mechanical means specific forces electrical forces, e.g. electrokinetic

Definitions

  • the present invention relates to an integration of mechanical elements, actuators and electronics on a silicon substrate through microfabri cation technology, particularly it relates to micro-electro-mechanical device for microfludic applications.
  • Micro-Electro-Mechanical Systems is the integration of mechanical elements, sensors, actuators and electronics on a common silicon substrate through microfabrication technology.
  • the micromechanical components are fabricated using compatible micromachining processes that selectively etch away parts of the silicon wafer or add new structural layers to form micro-electro-mechanical devices such as micropump, microvalve, micromixer and microsplitter.
  • MEMS devices are extremely small.
  • the building block in creating the devices is the ability to deposit thin films of material which may have the thickness anywhere between few nanometer to about 100 micrometer.
  • a micro-electro-mechanical device is designed with dedicated channels to perform a dedicated function when electronically or electrostatically actuated.
  • a unit of micropump has one inlet channel and one outlet channel to perform a pumping action.
  • a separate unit of micromixer is needed because the action requires a device with at least two inlet channels to allow two different sources of microfludic to enter. Different channel configuration and different actuation steps create different microfludic flow and control.
  • a separate unit of device is needed to perform a particular function and multiple applications such as mixing, splitting and pumping could not be carried out in a unit of device.
  • a single electromechanical device which integrates the function of micropump, microvalve, microsplitter and micromixer by integrating the microstructure of the devices into a single microstructure.
  • a single electromechanical device which performs the function of micropump, microvalve, microsplitter and micromixer in response to actuation process by means of electrostatic force.
  • Figure 1 illustrates the microstructure model of a micro-electro-mechanical device.
  • Figure 2 illustrates the configuration for microfludic flow and control in a micro- electro-mechanical device for multiple microfludic applications.
  • the microstructure model of a micro-electromechanical device is illustrated.
  • the working principle of the micro-electro-mechanical device is based on the principles of electro-mechanical coupling effects between two electrostatic charged plates.
  • the microstructure comprises of plates or silicon substrate which is parallel and adjacent to each other. These plates are formed from polysilicon substrate whereby the top plate (102) comprising a deformable member which acts as diaphragm.
  • the bottom plate (103) is a stationary member in which both of its ends are fixed to anchors (101) that prevent the bottom plate from any electrostatic movement induced by electrostatic forces.
  • the micro-electro-mechanical device comprises of inlet and output channels (105, 106) for microfludic to enter and leave the device respectively.
  • inlet and output channels (105, 106) By opening and/or closing the inlet and outlet channels (105, 106) selectively and with discrete or fluctuate electrostatic f forces, the micro-electro-mechanical device can be applied as micropump, microvalve, micromixer, or microsplitter.
  • the microfludic flow and control for this multiple applications are illustrated in Figure 2.
  • the plates (102, 103) work as electrode to receive negative or positive charges when voltage is supplied.
  • the top plate (102) is anode and the bottom plate (103) is cathode.
  • electrostatic potential difference exists between the plates (102, 103). Consequently, a uniform electrostatic field will appear in the vacuum region between the plates (102, 103).
  • the electrostatic field will generate electrostatic forces which are attracted to charges (i.e. positive or negative charges) developed in the plates (12, 103).
  • the attraction of electrostatic forces towards the charged plates will cause the diaphragm (209) to deform generating pumping action as such microfludic is squeezed out of the device.
  • the microstructure of the micro-electro-mechanical device comprising of a plurality of input channels (202, 204), a plurality of output channel (202), voltage supply (205), and diaphragm (209).
  • at least one inlet channel and one output channel need to be closed.
  • the second inlet channel (202) and the second outlet channel (208) are closed.
  • the device needs to be actuated with alternating current (AC) with fluctuating electrostatic force.
  • AC alternating current
  • an outlet channel need to be closed.
  • the second outlet channel is closed (208) while both inlet channels (202,204) are left opened.
  • Microfludic will enter both inlet channels (202,204) and leave the device at the first outlet channel (206).
  • the first or second inlet channel is closed (202).
  • Microsplitter acts as separator of microfludic wherein microfludic that enter the first inlet channel (202) will leave the microfludic at two separate outlet channels (206,208).

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)

Abstract

La présente invention concerne un dispositif microélectromécanique à actionnement électrostatique qui comprend une pluralité de canaux pour assurer l'écoulement et la régulation microfluidiques de manière sélective. Le dispositif est conçu pour réaliser de multiples applications microfluidiques telles que le mélange, le pompage et la division.
PCT/MY2008/000162 2007-11-22 2008-11-24 Dispositif pour application microfluidique WO2009066996A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
MYPI20072070 2007-11-22
MYPI20072070 2007-11-22

Publications (1)

Publication Number Publication Date
WO2009066996A1 true WO2009066996A1 (fr) 2009-05-28

Family

ID=40667705

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/MY2008/000162 WO2009066996A1 (fr) 2007-11-22 2008-11-24 Dispositif pour application microfluidique

Country Status (1)

Country Link
WO (1) WO2009066996A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10898871B2 (en) 2018-07-02 2021-01-26 International Business Machines Corporation Micro electrical mechanical system (MEMS) multiplexing mixing

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5529465A (en) * 1991-09-11 1996-06-25 Fraunhofer-Gesellschaft Zur Forderung Der Angewandten Forschung E.V. Micro-miniaturized, electrostatically driven diaphragm micropump

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5529465A (en) * 1991-09-11 1996-06-25 Fraunhofer-Gesellschaft Zur Forderung Der Angewandten Forschung E.V. Micro-miniaturized, electrostatically driven diaphragm micropump

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
"Micro Electro Mechanical Systems, 2001. MEMS 2001. The 14th IEEE International Conference. January 2001", article CABUZ, C. ET AL.: "The dual diaphragm pump", pages: 519 - 522 *
TEYMOORI, MIR M. ET AL.: "Design and simulation of a novel electrostatic peristaltic micromachined pump for drug delivery applications.", SENSORS AND ACTUATORS A, vol. 117, August 2004 (2004-08-01), pages 222 - 229 *
XIE, JUN ET AL.: "Surface micromachined electrostatically actuated micro peristaltic pump.", LAB CHIP., April 2004 (2004-04-01), pages 495 - 501 *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10898871B2 (en) 2018-07-02 2021-01-26 International Business Machines Corporation Micro electrical mechanical system (MEMS) multiplexing mixing

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