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WO2009057265A1 - 転写装置及び転写方法 - Google Patents

転写装置及び転写方法 Download PDF

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Publication number
WO2009057265A1
WO2009057265A1 PCT/JP2008/003023 JP2008003023W WO2009057265A1 WO 2009057265 A1 WO2009057265 A1 WO 2009057265A1 JP 2008003023 W JP2008003023 W JP 2008003023W WO 2009057265 A1 WO2009057265 A1 WO 2009057265A1
Authority
WO
WIPO (PCT)
Prior art keywords
resin
application
transfer device
transfer
stamper
Prior art date
Application number
PCT/JP2008/003023
Other languages
English (en)
French (fr)
Inventor
Haruka Narita
Original Assignee
Shibaura Mechatronics Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shibaura Mechatronics Corporation filed Critical Shibaura Mechatronics Corporation
Publication of WO2009057265A1 publication Critical patent/WO2009057265A1/ja

Links

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/26—Apparatus or processes specially adapted for the manufacture of record carriers
    • G11B7/263—Preparing and using a stamper, e.g. pressing or injection molding substrates
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/26—Apparatus or processes specially adapted for the manufacture of record carriers
    • G11B7/266—Sputtering or spin-coating layers

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Manufacturing Optical Record Carriers (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)

Abstract

簡易な構造により、均一な樹脂の塗布や記録面の多層化を低コストで効率良く行うことができる転写装置及び転写方法を提供する。基板Ｐ上の樹脂ＲにスタンパＳの凹凸を転写する転写装置であって、基板Ｐに樹脂Ｒを塗布する第１の塗布装置２２Ａ及び第２の塗布装置２２Ｂと、樹脂ＲにスタンパＳを押圧して、紫外線のパルス照射により硬化させた後にスタンパを剥離させる第１の押圧装置３３Ａ及び第２の押圧装置３３Ｂと、凹凸が転写された樹脂Ｒに反射膜を形成する第１のスパッタ装置１２Ａ及び第２のスパッタ装置１２Ｂを有する。第１の塗布装置２２Ａは紫外線をスポット照射する照射装置２５を有し、第２の塗布装置２２Ｂは紫外線を全面照射する照射装置２６を有する。
PCT/JP2008/003023 2007-10-30 2008-10-24 転写装置及び転写方法 WO2009057265A1 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007-281973 2007-10-30
JP2007281973 2007-10-30

Publications (1)

Publication Number Publication Date
WO2009057265A1 true WO2009057265A1 (ja) 2009-05-07

Family

ID=40590672

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/003023 WO2009057265A1 (ja) 2007-10-30 2008-10-24 転写装置及び転写方法

Country Status (2)

Country Link
TW (1) TW200937411A (ja)
WO (1) WO2009057265A1 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011216808A (ja) * 2010-04-02 2011-10-27 Toshiba Mach Co Ltd 転写装置、転写システム及び転写方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115362539A (zh) * 2020-03-30 2022-11-18 Tdk株式会社 压模工具、搬运装置以及元件阵列的制造方法

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6236756A (ja) * 1985-08-09 1987-02-17 Nippon Telegr & Teleph Corp <Ntt> 溝つき光デイスク基板およびその製造方法
JP2004220725A (ja) * 2003-01-17 2004-08-05 Hitachi Maxell Ltd 貼り合わせ装置及び貼り合わせ方法
WO2005118159A1 (ja) * 2004-06-03 2005-12-15 Shibaura Mechatronics Corporation 樹脂層形成方法及び樹脂層形成装置、ディスク及びディスク製造方法
WO2006106735A1 (ja) * 2005-04-01 2006-10-12 Matsushita Electric Industrial Co., Ltd. 多層情報記録媒体及びその製造装置、並びにその製造方法
JP2006351104A (ja) * 2005-06-15 2006-12-28 Origin Electric Co Ltd 光ディスクの製造装置
JP2007141291A (ja) * 2005-11-15 2007-06-07 Canon Inc 光記録媒体
JP2007226894A (ja) * 2006-02-23 2007-09-06 Victor Co Of Japan Ltd 光ディスクの製造方法、光ディスク製造装置及び光ディスク

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6236756A (ja) * 1985-08-09 1987-02-17 Nippon Telegr & Teleph Corp <Ntt> 溝つき光デイスク基板およびその製造方法
JP2004220725A (ja) * 2003-01-17 2004-08-05 Hitachi Maxell Ltd 貼り合わせ装置及び貼り合わせ方法
WO2005118159A1 (ja) * 2004-06-03 2005-12-15 Shibaura Mechatronics Corporation 樹脂層形成方法及び樹脂層形成装置、ディスク及びディスク製造方法
WO2006106735A1 (ja) * 2005-04-01 2006-10-12 Matsushita Electric Industrial Co., Ltd. 多層情報記録媒体及びその製造装置、並びにその製造方法
JP2006351104A (ja) * 2005-06-15 2006-12-28 Origin Electric Co Ltd 光ディスクの製造装置
JP2007141291A (ja) * 2005-11-15 2007-06-07 Canon Inc 光記録媒体
JP2007226894A (ja) * 2006-02-23 2007-09-06 Victor Co Of Japan Ltd 光ディスクの製造方法、光ディスク製造装置及び光ディスク

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011216808A (ja) * 2010-04-02 2011-10-27 Toshiba Mach Co Ltd 転写装置、転写システム及び転写方法

Also Published As

Publication number Publication date
TW200937411A (en) 2009-09-01

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