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WO2008100266A3 - Mems fiber optic microphone - Google Patents

Mems fiber optic microphone Download PDF

Info

Publication number
WO2008100266A3
WO2008100266A3 PCT/US2007/011954 US2007011954W WO2008100266A3 WO 2008100266 A3 WO2008100266 A3 WO 2008100266A3 US 2007011954 W US2007011954 W US 2007011954W WO 2008100266 A3 WO2008100266 A3 WO 2008100266A3
Authority
WO
WIPO (PCT)
Prior art keywords
diaphragm
fabry
perot
fiber optic
mems
Prior art date
Application number
PCT/US2007/011954
Other languages
French (fr)
Other versions
WO2008100266A2 (en
Inventor
Ken K Chin
Guanhua Feng
Harry Roman
Original Assignee
New Jersey Tech Inst
Ken K Chin
Guanhua Feng
Harry Roman
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by New Jersey Tech Inst, Ken K Chin, Guanhua Feng, Harry Roman filed Critical New Jersey Tech Inst
Publication of WO2008100266A2 publication Critical patent/WO2008100266A2/en
Publication of WO2008100266A3 publication Critical patent/WO2008100266A3/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0076—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means
    • G01L9/0077—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means for measuring reflected light
    • G01L9/0079—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means for measuring reflected light with Fabry-Perot arrangements
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R23/00—Transducers other than those covered by groups H04R9/00 - H04R21/00
    • H04R23/008—Transducers other than those covered by groups H04R9/00 - H04R21/00 using optical signals for detecting or generating sound
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R31/00—Apparatus or processes specially adapted for the manufacture of transducers or diaphragms therefor
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R2410/00—Microphones
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R31/00—Apparatus or processes specially adapted for the manufacture of transducers or diaphragms therefor
    • H04R31/003—Apparatus or processes specially adapted for the manufacture of transducers or diaphragms therefor for diaphragms or their outer suspension
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R31/00—Apparatus or processes specially adapted for the manufacture of transducers or diaphragms therefor
    • H04R31/006—Interconnection of transducer parts

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)

Abstract

The theory, design, fabrication, and characterization of MEMS (micro electrical mechanical system) Fabry-Perot diaphragm-fiber optic microphone are described in the present invention. By using MEMS technology in processing and packaging, a square 1.9mm x 1.9mm, 2 μ thick SiO2 diaphragm with a 350 μ square embossed center of silicon is mechanically clamped to the ferrule of a single mode fiber to keep its closeness (5 μ) and perpendicular orientation with respect to the diaphragm. Static measurement of optical output power versus the pressure on membrane reveals more than one period of Fabry-Perot interference, thereby generating a Fabry-Perot diaphragm-fiber interferometer device accurately reproducing audible acoustic wave.
PCT/US2007/011954 2006-05-19 2007-05-18 Mems fiber optic microphone WO2008100266A2 (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US80194306P 2006-05-19 2006-05-19
US80191006P 2006-05-19 2006-05-19
US60/801,910 2006-05-19
US60/801,943 2006-05-19

Publications (2)

Publication Number Publication Date
WO2008100266A2 WO2008100266A2 (en) 2008-08-21
WO2008100266A3 true WO2008100266A3 (en) 2009-02-26

Family

ID=39690640

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2007/011954 WO2008100266A2 (en) 2006-05-19 2007-05-18 Mems fiber optic microphone

Country Status (1)

Country Link
WO (1) WO2008100266A2 (en)

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4343657A (en) * 1979-07-31 1982-08-10 Fujitsu Limited Process for producing a semiconductor device
US4933545A (en) * 1985-12-30 1990-06-12 Metricor, Inc. Optical pressure-sensing system using optical resonator cavity
US6055080A (en) * 1996-06-13 2000-04-25 Deutsche Forschungsanstalt Fur Luft-Und Raumfahrt E.V. Optical microphone
US6351593B1 (en) * 1998-11-30 2002-02-26 Three E Laboratories, Inc. Hermetically sealed connectors and feed-throughs for fiber optic cables and method for effecting hermetic seals for such cables
US6628799B2 (en) * 1997-11-19 2003-09-30 Sakuji Fukuda Loudspeaker system
US20050157305A1 (en) * 2002-10-15 2005-07-21 Miao Yu Micro-optical sensor system for pressure, acceleration, and pressure gradient measurements
US6967362B2 (en) * 2002-09-26 2005-11-22 Samsung Electronics Co., Ltd. Flexible MEMS transducer and manufacturing method thereof, and flexible MEMS wireless microphone

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4343657A (en) * 1979-07-31 1982-08-10 Fujitsu Limited Process for producing a semiconductor device
US4933545A (en) * 1985-12-30 1990-06-12 Metricor, Inc. Optical pressure-sensing system using optical resonator cavity
US6055080A (en) * 1996-06-13 2000-04-25 Deutsche Forschungsanstalt Fur Luft-Und Raumfahrt E.V. Optical microphone
US6628799B2 (en) * 1997-11-19 2003-09-30 Sakuji Fukuda Loudspeaker system
US6351593B1 (en) * 1998-11-30 2002-02-26 Three E Laboratories, Inc. Hermetically sealed connectors and feed-throughs for fiber optic cables and method for effecting hermetic seals for such cables
US6967362B2 (en) * 2002-09-26 2005-11-22 Samsung Electronics Co., Ltd. Flexible MEMS transducer and manufacturing method thereof, and flexible MEMS wireless microphone
US20050157305A1 (en) * 2002-10-15 2005-07-21 Miao Yu Micro-optical sensor system for pressure, acceleration, and pressure gradient measurements

Also Published As

Publication number Publication date
WO2008100266A2 (en) 2008-08-21

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