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WO2008156189A1 - Procédé de fabrication d'un support d'enregistrement magnétique, et dispositif d'enregistrement et de lecture magnétique - Google Patents

Procédé de fabrication d'un support d'enregistrement magnétique, et dispositif d'enregistrement et de lecture magnétique Download PDF

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Publication number
WO2008156189A1
WO2008156189A1 PCT/JP2008/061384 JP2008061384W WO2008156189A1 WO 2008156189 A1 WO2008156189 A1 WO 2008156189A1 JP 2008061384 W JP2008061384 W JP 2008061384W WO 2008156189 A1 WO2008156189 A1 WO 2008156189A1
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WO
WIPO (PCT)
Prior art keywords
magnetic
magnetic recording
recording medium
producing
magnetic layer
Prior art date
Application number
PCT/JP2008/061384
Other languages
English (en)
Inventor
Masato Fukushima
Akira Sakawaki
Yasumasa Sasaki
Original Assignee
Showa Denko K.K.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2008095018A external-priority patent/JP4881908B2/ja
Application filed by Showa Denko K.K. filed Critical Showa Denko K.K.
Priority to US12/600,416 priority Critical patent/US8263190B2/en
Priority to CN2008800195572A priority patent/CN101681629B/zh
Publication of WO2008156189A1 publication Critical patent/WO2008156189A1/fr

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    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
    • G11B5/855—Coating only part of a support with a magnetic layer

Definitions

  • the present invention relates to a method of producing a magnetic recording medium, and a magnetic recording and reading device where the magnetic recording medium or the magnetic recording and reading device are used in a hard disk device or the like.
  • the track density of the latest magnetic recording device reaches about 110 kTPI.
  • magnetically-recorded data will interfere with each other between adjacent tracks. Consequently, the magnetic transition region of the boundary portion will be a noise source, and it is likely to impair the SNR. This leads to a decrease of the bit error rate, and such a problem is an obstacle to improving the recording density.
  • a magnetic recording medium As an example of such a discrete track medium, a magnetic recording medium is known, where the magnetic recording medium is formed on a non-magnetic substrate having a projected and recessed pattern on its surface, and physically-separated magnetic recording tracks and a servo signal pattern are formed therein (For example, see Patent Document 1).
  • a ferromagnetic layer is formed through a soft magnetic layer over the surface of the substrate having a plurality of projected and recessed parts thereon, and a protective layer is further formed on its surface.
  • a magnetic recording region is formed in the projected part, and the magnetic recording region is physically divided from the surroundings thereof. According to the magnetic recording medium, generation of a magnetic domain wall can be prevented in the soft magnetic layer.
  • the discrete track method includes the following two techniques. That is, a technique wherein tracks are formed after a magnetic recording medium including several thin layers is formed; or a technique wherein thin layers of the magnetic recording medium are formed directly on the surface of a substrate in advance or after a recessed and projected pattern is formed on the thin layers for the track-formation can be mentioned (for example, see Patent Document 2 or 3).
  • the former technique is often called "magnetic layer-processing type".
  • the technique has a disadvantage in which the medium is likely to be contaminated during the production process because physical processing is conducted on its surface after forming the medium, and the production process is very complicated. On the other hand, the latter method is often called an "embossing type", and contamination during its production process hardly occurs.
  • Patent Document 7 discloses a patterning method for a magnetic material wherein an exposed area of the surface of a ferromagnetic layer of a magnetic recording medium is exposed to an active reaction gas containing a halogen to fluorinate the ferromagnetic material whereby the ferromagnetic material is formed into a non-ferromagnetic body.
  • Patent Document 1 Japanese Unexamined Patent Application, Publication No.
  • Patent Document 2 Japanese Unexamined Patent Application, Publication No. 2004-178793
  • Patent Document 3 Japanese Unexamined Patent Application, Publication No. 2004-178794
  • Patent Document 4 Japanese Unexamined Patent Application, Publication No. H5-205257
  • Patent Document 5 Japanese Examined Patent Application, Publication No.
  • Patent Document 6 Japanese Unexamined Patent Application, Publication No. 2006-309841
  • Patent Document 7 Japanese Unexamined Patent Application, Publication No. 2002-359138
  • the method disclosed in Patent Document 7 does not include physical-processing of the magnetic layer, the method can prevent the magnetic layer from being contaminated during processing. Furthermore, the method can also accomplish modification of magnetic properties of the magnetic layer in a short time, compared to use of an ion beam or the like for modification of magnetic properties of the magnetic layer.
  • a fluoride such as cobalt fluoride is formed around the magnetic recording region. Recently, it was found that such a fluoride gradually eroded the magnetic layer in the magnetic recording region. In particular, it was discovered that magnetic recording/reading properties were lowered over time when a hard disk drive using such a magnetic recording medium was utilized under conditions of high temperature and humidity.
  • the present invention is to produce a so-called "discrete track-type magnetic recording medium” or “patterned medium” having the following features at a high production rate using a simplified method. That is, even in magnetic recording devices that have recently faced technical difficulties as recording density increases, the produced discrete track-type magnetic recording medium or patterned medium can attain recording/reading properties equivalent or superior to conventional media, can remarkably increase the recording density, and can prevent write-errors during magnetic-recording by way of decreasing the coercive force and residual magnetization in regions between magnetic recording pattern areas. Furthermore, the discrete track-type magnetic recording medium or patterned medium has a higher areal recording density, higher surface-flatness, and excellent environmental resistance.
  • a method of producing a magnetic recording medium having a magnetically-separated magnetic recording pattern including: forming a magnetic layer over a non-magnetic substrate; and then exposing a surface of the magnetic layer partially to reactive plasma, or a reactive ion generated in the plasma to amorphize the portion of the magnetic layer and to modify the magnetic properties of the portion whereby a magnetically-separated magnetic recording pattern is formed.
  • halogen ion is a halogen ion which is formed by introducing into the reactive plasma at least one halogenated gas selected from the group consisting of CF 4 , SF 6 , CHF 3 , CCl 4 , and KBr.
  • a magnetic recording and reading device including: the magnetic recording medium produced by the method of producing a magnetic recording medium according to any one of (1) to (16); an actuating device which actuates the magnetic recording medium in the recording direction; a magnetic head which includes a recording part and a reading part; a system which moves the magnetic head relatively to the magnetic recording medium; and a recording and reading signal-processing unit which inputs a signal to the magnetic head and which reads an output signal from the magnetic head.
  • a magnetic recording medium which has excellent magnetic recording pattern-separating properties and excellent high recording-density properties, and which is unlikely influenced by the signal interference between adjacent patterns can be produced at a high production rate with regard to the magnetic recording medium wherein the magnetic recording pattern is formed after the magnetic layer is formed over the non-magnetic substrate.
  • the magnetic recording medium produced by the present invention has excellent surface-flatness, the magnetic recording medium can be applied to a magnetic recording and reading device that enables low-flying height of a magnetic head.
  • the magnetic recording medium of the present invention has excellent environmental resistance, the magnetic recording medium can be stably used under conditions of high temperature and humidity (for example, applicable to a car navigation system).
  • FIG 1 shows a cross-sectional structure of the magnetic recording medium according to the present invention.
  • FIG 2 shows a configuration of the magnetic recording and reading device according to the present invention.
  • FIG. 3 explains the method of producing a magnetic recording medium according to the present invention.
  • FIG. 4 shows the change in the magnetization magnitude before and after the treatment of the magnetic recording medium shown in Example 1 with reactive plasma.
  • (a) refers to before treating the recording medium with reactive plasma while (b) refers to after treating the magnetic recording medium with reactive plasma.
  • FIG 5 is a diagram showing results of X-ray diffraction analysis before and after treating the magnetic layer with reactive plasma.
  • (a) refers to a signal before treating the magnetic layer with reactive plasma while (b) and (c) refer to a signal after treating the magnetic layer with reactive plasma.
  • (b) a bias voltage is applied to the substrate during the treatment, and oxygen is added to the plasma.
  • the present invention relates to a magnetic recording medium having a magnetically-separated magnetic recording pattern over one side of a non-magnetic substrate.
  • the formed magnetic layer is exposed to an ionized content in reactive plasma or plasma to amorphize the portion of the magnetic layer, thereby producing a region which separates the magnetic recording pattern part.
  • the method of producing a magnetic recording medium according to the present invention does not cause dust generation, which frequently occurs in the step of physically excising the magnetic layer (for example, by way of ion-milling) as included in conventional production methods.
  • the production method of the present invention does not include a step such as injecting ions into the magnetic layer (i.e. a step which damages the magnetic layer).
  • the magnetic layer that forms the magnetic recording pattern is exposed to an ionized content in reactive plasma or plasma to amorphize a portion of the magnetic layer.
  • an ionized product of a magnetic alloy is produced on the exposed portion.
  • a Co-based magnetic alloy is exposed to fluorine ion plasma
  • the Co-based magnetic alloy is converted to cobalt fluoride which is non-magnetic. This is because ions included in reactive plasma have high reactivity, and the ions are easily reacted with the magnetic alloy, etc.
  • the method of producing a magnetic recording medium of the present invention with respect to the magnetic layer exposed to such a reactive ion, etc.
  • the magnetic alloy is not non-magnetized with a reaction product of the magnetic alloy and an ion, but is non-magnetized by way of amorphizing. This is because such ions used for non-magnetizing the magnetic layer gradually diffuse into the surrounding magnetic alloy that forms the magnetic recording pattern, thereby impairing magnetic properties of the portion over time, and therefore such impairment thereof needs to be prevented.
  • amorphizing the magnetic alloy of the portion by reacting the magnetic alloy with reactive plasma a method wherein ions in reactive plasma are collided against the magnetic alloy to physically destroy the structure of the portion can be mentioned.
  • a method wherein the magnetic alloy is reacted with ions in reactive plasma to produce an ionized product of the magnetic alloy, and then, only the ionized compound of the magnetic alloy is removed can be also considered.
  • a technique wherein a Co-based magnetic alloy is exposed to a reactive fluorine ion to form non-magnetic cobalt fluoride, and the cobalt fluoride is heated to only remove the fluorine thereof, and an amorphous Co-based alloy whose crystal structure is destroyed is produced can be mentioned.
  • the condition for producing such an amorphous magnetic alloy can be determined by appropriately selecting a composition of the magnetic alloy, a type of ion included in reactive plasma, reaction pressure, reaction time, temperature, etc.
  • FIG 5 shows the results of X-ray diffraction analysis with respect to a reaction product of a magnetic alloy of 70Co-5Cr-l 5Pt-IOSiO 2 with reactive plasma generated by using CF 4 .
  • FIG 5 (a) shows the results of X-ray diffraction with respect to the magnetic layer before reacting it with the reactive plasma.
  • the large signal present around a diffraction angle of 42° refers to a diffraction peak of an Ru intermediate layer present under the magnetic layer
  • the signal present around 43° refers to a diffraction peak of Co included in the magnetic alloy.
  • FIG. 5 (b) shows the results of X-ray diffraction where the magnetic layer is exposed to reactive plasma including a fluorine ion for 60 seconds.
  • CF 4 and O 2 were used at 10 cc/minute and 90 cc/minute, respectively; the voltage applied for plasma generation was 200 W; the pressure inside the apparatus was 0.5 Pa; and the substrate bias was 200 W.
  • the temperature of the substrate was about 15O 0 C during the treatment. Due to this reaction, the peak around 43° disappeared, but a peak derived from cobalt fluoride was not present. Moreover, the peak around 42° of the Ru intermediate layer remained. The result revealed that the Co-based magnetic alloy lost its own crystal properties and was amorphized.
  • FIG 5 (c) refers to a case where the magnetic layer of FIG. 5 (a) was exposed to reactive plasma including a fluorine ion.
  • the substrate bias was not applied, and oxygen was not added to the treatment gas, only using CF 4 .
  • a method of controlling halogenization or amorphization of the magnetic alloy in modifying the magnetic layer using reactive plasma including a halogen ion includes the following.
  • a bias voltage can be applied to the substrate to promote the amorphization. It is considered that this is because the destruction of the crystal structure can be easily promoted in the magnetic layer due to the ion bombardment, compared to a halogenization reaction with a halogen ion.
  • the magnetic recording pattern part of the present invention includes a so-called
  • patterned media wherein a magnetic recording pattern is arranged having predetermined regularity at every 1 bit; a media wherein a magnetic recording pattern is arranged trackwise; or another media such as a servo-signal pattern.
  • the present invention be applied to a so-called "discrete-type magnetic recording medium" whose magnetically-separated magnetic recording pattern is a magnetic recording track and a servo-signal pattern because of ease of its production.
  • FIG. 1 A cross-sectional structure of a discrete-type magnetic recording medium according to the present invention is shown in FIG. 1.
  • the magnetic recording medium 30 of the present invention has a structure wherein a soft magnetic layer and an intermediate layer 2 are formed on the surface of a non-magnetic substrate 1; a magnetic layer 3 and a non-magnetized layer 4 where a magnetic pattern is formed are formed thereon; a protective layer 5 is further formed thereon; and a lubricating film is formed on the outermost surface (not shown in the figure).
  • the non-magnetic substrate 1 used in the present invention can be suitably selected from various non-magnetic substrates.
  • an Al-alloy substrate including Al as a main component for example, Al-Mg alloy
  • a substrate which is made of general soda glass, aluminosilicate-based glass, crystallized glass, silicon, titanium, ceramics, or resins can be mentioned.
  • use of an Al-alloy substrate, a glass substrate such as crystallized glass, or a silicon substrate is preferable.
  • the average surface roughness of the substrate (Ra) is preferably 1 nm or less, more preferably 0.5 nm or less, and most preferably 0.1 nm or less.
  • the magnetic layer 3 formed over the surface of the non-magnetic substrate 1 as described above may be formed into a longitudinal magnetic recording pattern (as longitudinal magnetic recording media) or a perpendicular magnetic recording pattern (as perpendicular magnetic recording media).
  • a perpendicular magnetic recording pattern is preferable in order to achieve higher recording density. That is, it is preferable that the magnetic recording pattern of the present invention be a perpendicular magnetic recording pattern although the magnetic recording pattern can be longitudinal magnetic recording pattern.
  • the magnetic layer be formed from an alloy which includes Co as a main component in either longitudinal or perpendicular magnetic recording media.
  • a laminate structure which includes a non-magnetic CrMo underlying layer and a ferromagnetic CoCrPtTa magnetic layer can be utilized.
  • a laminate structure where a soft magnetic layer which is formed of, for example, a soft magnetic FeCo alloy (such as FeCoB, FeCoSiB, FeCoZr, FeCoZrB, or
  • FeCoZrBCu a FeTa alloy (such as FeTaN or FeTaC), or a Co alloy (such as CoTaZr, CoZrNB, or CoB); an orientation-controlling film such as Pt, Pd, NiCr, or NiFeCr; an intermediate layer such as Ru (if necessary); and a magnetic layer which is formed of a 60Co- 15 Cr- 15Pt alloy or a 70Co-5Cr-l 5Pt- 10SiO 2 alloy are laminated can be utilized.
  • the thickness of the magnetic layer may be within a range of 3 nm to 20 nm, and preferably within a range of 5 nm to 15 nm.
  • the magnetic layer may be appropriately formed depending on a type of magnetic alloy and laminate structure used therein, such that a sufficient head output can be obtained.
  • the magnetic layer needs to have a certain thickness or higher in order to obtain a certain level of the output during reading. To the contrary, as the output increases, several parameters that represent recording/reading properties are generally deteriorated. Therefore, it is necessary to select the optimum thickness thereof.
  • the magnetic layer is formed into a thin film by the sputtering method.
  • the method of producing a magnetic recording medium of the present invention will be described in detail.
  • the formed magnetic layer is exposed to reactive plasma to amorphize a portion of the magnetic layer 3. Consequently, magnetic properties of the portion are modified whereby a region which magnetically separates the magnetic recording track and servo-signal pattern part is formed.
  • Modifying magnetic properties of the magnetic layer specifically means modifying coercive force, residual magnetization, among others, of the magnetic layer. More specifically, such modification refers to lowering the coercive force and the residual magnetization. Particularly, in the present invention, the following method is preferably adopted to modify the magnetic properties.
  • the magnetization magnitude is adjusted to 75% or less, or more preferably 50% or less of the original magnetization magnitude
  • the coercive force is adjusted to 50% or less, or more preferably 20% or less of the original coercive force with respect to the portion of the magnetic layer 3 exposed to reactive plasma. If a discrete track-type magnetic recording medium is produced by such a method, write-errors can be prevented during magnetically-recording data into the medium, and a magnetic recording medium having a higher areal recording density can be provided.
  • the formed magnetic layer 3 is exposed to reactive plasma to amorphize the magnetic layer whereby the region which magnetically separates the magnetic recording track and servo-signal pattern part is formed.
  • to amorphize the magnetic layer refers to forming an atomic arrangement of the magnetic layer 3 into a state of an irregular atomic arrangement which does not have a long-distance order. More specifically, this refers to a state where fine crystal particles of 2 nm or less are randomly arranged.
  • an analysis method such as the X-ray diffraction or electron diffraction, a peak that represents the crystal plane is not present while only a halo (a broad signal) is present.
  • the inductively coupled plasma is high-temperature plasma that is obtained in the following way. That is, a high voltage is applied to a gas to form plasma, and Joule heat is generated inside the plasma due to eddy current by forming a high-frequency fluctuating magnetic field to form the high-temperature plasma.
  • the inductively coupled plasma has a higher electron density. Therefore, the plasma can achieve modification of magnetic properties in a magnetic layer 3 having a broad area at higher efficiency, compared to the conventional production of discrete track media using an ion beam.
  • the reactive ion plasma is highly-reactive plasma where a reactive gas such as O 2 , SF 6 , CHF 3 , CF 4 , or CCl 4 is added to the plasma.
  • a reactive gas such as O 2 , SF 6 , CHF 3 , CF 4 , or CCl 4 is added to the plasma.
  • the formed magnetic layer 3 is exposed to reactive plasma in order to modify the magnetic layer 3. It is preferable that the modification be achieved by a reaction of a magnetic metal included in the magnetic layer 3 with atoms or ions in reactive plasma.
  • the reaction includes modification of the crystal structure of the magnetic metal, modification of the composition of the magnetic metal, oxidation of the magnetic metal, nitridation of the magnetic metal, silication of the magnetic metal, among others, due to penetration of atoms, etc. in the plasma into the magnetic metal.
  • oxygen atoms be included in the reactive plasma, and that the magnetic metal included in the magnetic layer 3 be reacted with the oxygen atoms in the reactive plasma to oxidize the magnetic layer 3.
  • the magnetic layer 3 is partially oxidized, and the residual magnetization, the coercive force, among others, of the oxidized portion can be efficiently decreased. Therefore, a magnetic recording medium including a magnetically-separated magnetic recording pattern can be produced by the short-term reactive plasma treatment. In addition, the inclusion of oxygen atoms in the reactive plasma can promote amorphization of the magnetic layer 3.
  • a halogen atom be included in the reactive plasma.
  • use of an F atom is preferable as the halogen atom.
  • the halogen atom may be added to the reactive plasma with or without oxygen atoms.
  • oxygen atoms or the like are added to the reactive plasma, the magnetic metal included in the magnetic layer 3 is reacted with oxygen atoms or the like, thereby achieving the modification of magnetic properties of the magnetic layer 3.
  • the reactivity can be further enhanced.
  • the halogen atoms are reactive with the magnetic alloy, thereby achieving the modification of magnetic properties of the magnetic layer 3.
  • the reason for this is not clear in detail, but it is considered that the halogen atoms in the reactive plasma etch impurities formed on the surface of the magnetic layer 3, and the surface of the magnetic layer 3 is cleaned, thereby enhancing the reactivity of the magnetic layer 3.
  • use of F atoms is particularly preferable.
  • the process of exposing the surface of the magnetic layer 3 partially to reactive plasma to modify the magnetic properties of the portion of the magnetic layer 3 preferably includes: exposing the magnetic layer 3 to plasma including oxygen (first step); and then exposing the magnetic layer 3 to plasma including a halogen (second step).
  • first step exposing the magnetic layer 3 to plasma including oxygen
  • second step exposing the magnetic layer 3 to plasma including a halogen
  • a region of the grain boundary of magnetic particles is preferentially oxidized and the oxidized portion extends in the thickness direction along the grain boundary when the magnetic layer 3 is exposed to the oxygen-containing plasma; and, when the magnetic layer 3 is then exposed to the halogen-containing plasma, the oxidized portion in the grain boundary of magnetic particles is preferentially reacted with the halogen, the crystal structure of the portion is destroyed, and the reaction portion proceeds from the grain boundary to magnetic particles. Therefore, modification of the magnetic properties of the magnetic layer 3 can be accelerated, and the reaction of magnetic particles with the halogen can also be efficiently promoted, compared to simply exposing the magnetic layer 3 to oxygen plasma or halogen plasma. Consequently, the residual magnetization, the coercive force, among others, of the magnetic layer 3 can be efficiently lowered.
  • a step of injecting ions partially into the surface of the magnetic layer 3 is preferably provided before the step of exposing the surface of the magnetic layer 3 partially to reactive plasma.
  • modification of magnetic properties of the magnetic layer 3 can be further accelerated. This is because, based on studies by the present inventors, when ions are injected partially to the surface of the magnetic layer 3, the surface of the magnetic layer 3 becomes active, and the reactivity of the magnetic layer 3 with plasma is further enhanced in the step of exposing the magnetic layer 3 to reactive plasma after the ion-injection.
  • an inert ion such as argon or nitrogen be used as the ions injected into the magnetic layer 3.
  • an inert ion such as argon or nitrogen be used as the ions injected into the magnetic layer 3.
  • the following steps are preferably adopted. That is, a resist pattern which is adjusted to the magnetic recording pattern is formed on the magnetic layer 3. After that, the surface thereof is treated with reactive plasma, and then, the resist is removed, and a protective layer 5 is formed thereon. Next, a lubricant is coated thereon, thereby producing a magnetic recording medium. This is because such a method can further enhance the reactivity of the magnetic layer 3 with reactive plasma.
  • a protective layer 5 is formed on the magnetic layer 3, and a resist pattern 6 which is adjusted to the magnetic recording pattern is formed thereon. Then, the treatment of modifying the magnetic layer 3 with reactive plasma is conducted. Because it is unnecessary to form a protective layer 5 after the reactive plasma treatment, the production process is very simple, the productivity can be improved, and contamination can be prevented in the process of producing a magnetic recording medium.
  • the present inventors demonstrated by conducting experiments that the magnetic layer 3 could be reacted with reactive plasma even after the protective layer 5 was formed on the surface of the magnetic layer 3.
  • the magnetic layer 3 covered by the protective layer 5 can react with reactive plasma
  • voids or the like may be present in the protective layer 5, reactive ions in plasma intrude into the layer from the voids, and the reactive ions may react with the magnetic metal, as illustrated in Figure 3.
  • the reactive ions spread in the protective layer 5, and the reactive ions reach the magnetic layer 3.
  • the formation of the resist pattern a method wherein a resist is coated onto the magnetic layer 3 or a protective layer 5, which is formed subsequently to the magnetic layer 3, a stamper is placed directly thereon, and this is pressed at high pressure to form a resist pattern can be adopted. Furthermore, a general photolithographic technique may also be applied to form a pattern. Examples of the resist include a thermoset resin, a UV-curable resin, SOG, or the like.
  • a metal plate on which a fine track pattern is formed by the electron beam lithography or the like can be used.
  • the material for the stamper requires sufficient hardness and durability to withstand the process.
  • Ni or the like can be used, but the material is not particularly limited as long as it meets the above-described purpose.
  • servo-signal patterns such as a burst pattern, gray code pattern, or preamble pattern can also be formed.
  • a technique such as the dry etching, the reactive ion etching, the ion trimming, or the wet etching can be adopted.
  • a thin film of diamond like carbon is formed using the P-CVD, among others, in general.
  • the method is not particularly limited.
  • the protective layer 5 examples include a carbonaceous layer such as carbon (C), a carbon hydride (H x C), carbon nitride (CN), amorphous carbon, or silicon carbide; or a material generally used for a protective layer (for example, SiO 2 , Zr 2 O 3 , TiN, etc.). Additionally, the protective layer 5 may include two or more layers.
  • a carbonaceous layer such as carbon (C), a carbon hydride (H x C), carbon nitride (CN), amorphous carbon, or silicon carbide
  • a material generally used for a protective layer for example, SiO 2 , Zr 2 O 3 , TiN, etc.
  • the protective layer 5 may include two or more layers.
  • the thickness of the protective layer 5 be less than 10 nm. If the thickness of the protective layer 5 exceeds 10 nm, then, the distance between the head and the magnetic layer 5 is excessively longer. Consequently, sufficient strength of the output and input signal can not be obtained. It is preferable that a lubricant layer be formed on the protective layer 5.
  • the lubricant used for the lubricant layer include a fluorine-based lubricant, a carbon hydride-based lubricant, or a mixture thereof. In general, the lubricant layer is formed into a thickness of 1 to 4 nm.
  • the magnetic recording and reading device of the present invention includes: the above-described magnetic recording medium 30; an actuating device 11 which actuates the magnetic recording medium 30 in the recording direction; a magnetic head 27 which includes a recording part and a reading part; a head-actuating unit 28 which moves the magnetic head 27 relatively to the magnetic recording medium 30; and a recording and reading signal-processing unit 29 combined with a recording and reading signal-processing system which inputs a signal to the magnetic head 27 and which reads an output signal from the magnetic head 27.
  • a magnetic recording device achieving higher recording density can be produced.
  • the width of the reading head can be made to be the same as the width of the recording head, and they can be actuated while the width of the reading head has been conventionally made narrower than the recording head to eliminate the influence of the magnetic transition region of the track edge portion. Accordingly, a sufficient reading output and a higher SNR can be obtained.
  • the above-described reading part of the magnetic head 27 is formed with a GMR head or TMR head, sufficient signal strength can be obtained even in higher recording density, and a magnetic recording device having high recording density can be achieved. Furthermore, when the flying height of the magnetic head 27 is adjusted to 0.005 to 0.020 ⁇ m (i.e. when the magnetic head is flown at a height lower than prior arts), the output is improved, thereby achieving a higher SNR in the device.
  • a magnetic recording device having large capacity and high reliability can be provided.
  • the recording density can be further improved. For example, even if recording and reading are conducted at a track density of 100 KTPI or more; a track recording density of 1000 kbit/inch or more; and a recording density of 100 Gbit/inch 2 , a sufficient SNR can be obtained.
  • a vacuum chamber herein a HD glass substrate was set, was vacuumed at 1.0 *
  • the glass substrate was made of a crystallized glass that included Li 2 Si 2 O 5 , Al 2 O 3 -K 2 O, Al 2 O 3 -K 2 O, MgO-P 2 O 5 , and Sb 2 O 3 -ZnO as components.
  • the outer diameter was 65 mm; the inner diameter was 20 mm; the average surface roughness (Ra) was 2 angstrom (unit: A; and equal to 0.2 nm).
  • FeCoB As a soft magnetic layer
  • the FeCOB soft magnetic layer was 600 A; the Ru intermediate layer was 100 A; the magnetic layer was 150 A; and the C (carbon) protective layer was 4 nm on average.
  • a UV-curable resin was coated thereon in a thickness of 200 nm, and its surface was imprinted using a Ni stamper prepared in advance.
  • the stamper had a track pitch of 100 nm, and grooves whose depth was 20 nm. Using this stamper, an imprint was made on the UV-curable resin coated on the protective layer.
  • the reactive plasma treatment against the magnetic layer was conducted by using an inductively coupled plasma apparatus "NE550" produced by ULVAC, Inc.
  • CF 4 was used at 10 cc/minute
  • O 2 was used at 90 cc/minute.
  • the applied power for generating plasma was 200 W- the pressure inside the apparatus was adjusted to 0.5 Pa; and the substrate bias was 200 W; and the surface of the magnetic recording medium was treated for 60 seconds.
  • the portion of the magnetic layer treated with reactive plasma was analyzed based on X-ray diffraction. In the results, a signal derived from Co disappeared. On the other hand, a signal derived from cobalt fluoride was not observed, and it was confirmed that the portion was formed into an amorphous structure.
  • the type of gas used for generating the reactive plasma, the applied power, the reaction pressure, and the reaction time was modified as shown in Table 1.
  • the X-ray diffraction analysis was conducted with respect to the portion of the magnetic layer treated with reactive plasma.
  • a signal derived from Co disappeared.
  • a signal derived from cobalt fluoride was not observed, and it was confirmed that the portion was formed into an amorphous structure in all Examples 2 to 22.
  • Example 4 shows a change in the magnetization magnitude before and after the reactive plasma treatment with respect to the magnetic recording medium shown in Example 1.
  • the results of the evaluation are shown in Table 1 with respect to Examples 1 to 22.
  • the produced magnetic recording media had excellent RW properties such as SNR or 3T-squash, and their head-flying properties were also stable. That is, the produced magnetic recording media had higher surface flatness, and excellent separating properties according to the non-magnetic portion between tracks in the magnetic layer.
  • the magnetic recording media both in Example 1 and Comparative Example had sufficient SNR and coercive force before the time-course evaluation.
  • the SNR decreased by 0.1%
  • the coercive force decreased by 1% in the magnetic recording medium of Example 1.
  • the SNR decreased by 0.4%
  • the coercive force decreased by 8% in the magnetic recording medium of Comparative Example.
  • the method of producing a magnetic recording medium, the magnetic recording medium thereof, and the magnetic recording and reading device using the same can be applied in various industrial fields such as electronics or information technology. Therefore, the present invention has higher industrial applicability.

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Abstract

La présente invention vise à proposer un procédé de fabrication d'un support d'enregistrement magnétique qui est un procédé de fabrication d'un support d'enregistrement magnétique selon un motif d'enregistrement magnétique séparé de manière magnétique, le procédé comprenant : la formation d'une couche magnétique sur un substrat non magnétique ; puis l'exposition d'une surface de la couche magnétique partiellement à un plasma réactif, ou à un ion réactif généré dans le plasma pour rendre amorphe la partie de la couche magnétique.
PCT/JP2008/061384 2007-06-19 2008-06-17 Procédé de fabrication d'un support d'enregistrement magnétique, et dispositif d'enregistrement et de lecture magnétique WO2008156189A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
US12/600,416 US8263190B2 (en) 2007-06-19 2008-06-17 Method of producing magnetic recording medium, and magnetic recording and reading device
CN2008800195572A CN101681629B (zh) 2007-06-19 2008-06-17 制造磁记录介质的方法以及磁记录和读取装置

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2007-161581 2007-06-19
JP2007161581 2007-06-19
JP2008-095018 2008-04-01
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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20110111159A1 (en) * 2009-08-13 2011-05-12 Varian Semiconductor Equipment Associates, Inc. Patterned magnetic bit data storage media and a method for manufacturing the same
CN102334161A (zh) * 2009-02-27 2012-01-25 应用材料公司 Hdd图案布植系统
US8404130B2 (en) 2009-08-27 2013-03-26 Fuji Electric Co., Ltd. Method of manufacturing a discrete track medium type perpendicular magnetic recording medium

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0653137A (ja) * 1992-07-31 1994-02-25 Canon Inc 水素化アモルファスシリコン膜の形成方法
JPH06131658A (ja) * 1992-10-21 1994-05-13 Sony Corp 磁気記録媒体の製造方法
JPH11120529A (ja) * 1997-10-13 1999-04-30 Nec Corp 磁気ヘッドスライダおよびその製造方法
JP2002359138A (ja) * 2001-03-30 2002-12-13 Toshiba Corp 磁性体のパターニング方法、磁気記録媒体、磁気ランダムアクセスメモリ

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0653137A (ja) * 1992-07-31 1994-02-25 Canon Inc 水素化アモルファスシリコン膜の形成方法
JPH06131658A (ja) * 1992-10-21 1994-05-13 Sony Corp 磁気記録媒体の製造方法
JPH11120529A (ja) * 1997-10-13 1999-04-30 Nec Corp 磁気ヘッドスライダおよびその製造方法
JP2002359138A (ja) * 2001-03-30 2002-12-13 Toshiba Corp 磁性体のパターニング方法、磁気記録媒体、磁気ランダムアクセスメモリ

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102334161A (zh) * 2009-02-27 2012-01-25 应用材料公司 Hdd图案布植系统
TWI567848B (zh) * 2009-02-27 2017-01-21 應用材料股份有限公司 Ｈｄｄ圖案佈植系統
US20110111159A1 (en) * 2009-08-13 2011-05-12 Varian Semiconductor Equipment Associates, Inc. Patterned magnetic bit data storage media and a method for manufacturing the same
CN102483929A (zh) * 2009-08-13 2012-05-30 瓦里安半导体设备公司 图案化磁性位元数据储存媒体及其制造方法
US8460748B2 (en) * 2009-08-13 2013-06-11 Varian Seminconductor Equipment Associates, Inc. Patterned magnetic bit data storage media and a method for manufacturing the same
CN102483929B (zh) * 2009-08-13 2015-03-11 瓦里安半导体设备公司 图案化磁性位元数据储存媒体及其制造方法
US8404130B2 (en) 2009-08-27 2013-03-26 Fuji Electric Co., Ltd. Method of manufacturing a discrete track medium type perpendicular magnetic recording medium

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