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WO2008153066A1 - 高分子化合物、ポジ型レジスト組成物およびレジストパターン形成方法 - Google Patents

高分子化合物、ポジ型レジスト組成物およびレジストパターン形成方法 Download PDF

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Publication number
WO2008153066A1
WO2008153066A1 PCT/JP2008/060694 JP2008060694W WO2008153066A1 WO 2008153066 A1 WO2008153066 A1 WO 2008153066A1 JP 2008060694 W JP2008060694 W JP 2008060694W WO 2008153066 A1 WO2008153066 A1 WO 2008153066A1
Authority
WO
WIPO (PCT)
Prior art keywords
polymer compound
resist pattern
forming
resist composition
alkyl group
Prior art date
Application number
PCT/JP2008/060694
Other languages
English (en)
French (fr)
Inventor
Sanae Furuya
Takahiro Dazai
Shinichi Kohno
Original Assignee
Tokyo Ohka Kogyo Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Ohka Kogyo Co., Ltd. filed Critical Tokyo Ohka Kogyo Co., Ltd.
Priority to US12/451,971 priority Critical patent/US8298745B2/en
Publication of WO2008153066A1 publication Critical patent/WO2008153066A1/ja

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/039—Macromolecular compounds which are photodegradable, e.g. positive electron resists
    • G03F7/0392—Macromolecular compounds which are photodegradable, e.g. positive electron resists the macromolecular compound being present in a chemically amplified positive photoresist composition
    • G03F7/0397—Macromolecular compounds which are photodegradable, e.g. positive electron resists the macromolecular compound being present in a chemically amplified positive photoresist composition the macromolecular compound having an alicyclic moiety in a side chain
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F220/00—Copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical or a salt, anhydride ester, amide, imide or nitrile thereof
    • C08F220/02—Monocarboxylic acids having less than ten carbon atoms; Derivatives thereof
    • C08F220/10—Esters
    • C08F220/12—Esters of monohydric alcohols or phenols
    • C08F220/16—Esters of monohydric alcohols or phenols of phenols or of alcohols containing two or more carbon atoms
    • C08F220/18—Esters of monohydric alcohols or phenols of phenols or of alcohols containing two or more carbon atoms with acrylic or methacrylic acids
    • C08F220/1811—C10or C11-(Meth)acrylate, e.g. isodecyl (meth)acrylate, isobornyl (meth)acrylate or 2-naphthyl (meth)acrylate

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Organic Chemistry (AREA)
  • Materials For Photolithography (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)

Abstract

　　下記一般式（ａ０－１）で表される構成単位（ａ０）を有する高分子化合物。 　 ［式（ａ０－１）中、Ｒ１は水素原子、低級アルキル基またはハロゲン化低級アルキル基であり；Ｒ５はアルキル基であり；Ｒ６はアルキル基、アルコキシ基、ハロゲン原子、ハロゲン化アルキル基からなる群から選択される置換基であり；ｅは０～５の整数である。］
PCT/JP2008/060694 2007-06-13 2008-06-11 高分子化合物、ポジ型レジスト組成物およびレジストパターン形成方法 WO2008153066A1 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US12/451,971 US8298745B2 (en) 2007-06-13 2008-06-11 Polymeric compound, positive resist composition, and method of forming resist pattern

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007156362A JP5349765B2 (ja) 2007-06-13 2007-06-13 高分子化合物、ポジ型レジスト組成物およびレジストパターン形成方法
JP2007-156362 2007-06-13

Publications (1)

Publication Number Publication Date
WO2008153066A1 true WO2008153066A1 (ja) 2008-12-18

Family

ID=40129671

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/060694 WO2008153066A1 (ja) 2007-06-13 2008-06-11 高分子化合物、ポジ型レジスト組成物およびレジストパターン形成方法

Country Status (4)

Country Link
US (1) US8298745B2 (ja)
JP (1) JP5349765B2 (ja)
TW (1) TWI380999B (ja)
WO (1) WO2008153066A1 (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009276607A (ja) * 2008-05-15 2009-11-26 Tokyo Ohka Kogyo Co Ltd ポジ型レジスト組成物、レジストパターン形成方法および高分子化合物
CN104391429A (zh) * 2009-11-18 2015-03-04 Jsr株式会社 放射线敏感性树脂组合物、聚合物及抗蚀剂图案形成方法

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5037402B2 (ja) * 2008-03-28 2012-09-26 富士フイルム株式会社 ポジ型感光性樹脂組成物およびそれを用いたパターン形成方法
KR20130114095A (ko) 2010-09-17 2013-10-16 제이에스알 가부시끼가이샤 감방사선성 수지 조성물, 중합체 및 레지스트 패턴 형성 방법

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1184663A (ja) * 1996-12-24 1999-03-26 Toshiba Corp 感光性組成物、およびこれを用いたパターン形成方法ならびに電子部品の製造方法
JP2005227332A (ja) * 2004-02-10 2005-08-25 Fuji Photo Film Co Ltd 液浸露光用ポジ型レジスト組成物及びそれを用いたパターン形成方法
JP2005227646A (ja) * 2004-02-16 2005-08-25 Fuji Photo Film Co Ltd 液浸プロセス用化学増幅型レジスト組成物及びそれを用いたパターン形成方法
US20060216643A1 (en) * 2004-01-08 2006-09-28 International Business Machines Corporation Positive photoresist composition with a polymer including a fluorosulfonamide group and process for its use
JP2007112899A (ja) * 2005-10-20 2007-05-10 Jsr Corp 共重合体及び感放射線性樹脂組成物

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3798458B2 (ja) 1996-02-02 2006-07-19 東京応化工業株式会社 オキシムスルホネート化合物及びレジスト用酸発生剤
US5945517A (en) * 1996-07-24 1999-08-31 Tokyo Ohka Kogyo Co., Ltd. Chemical-sensitization photoresist composition
JP3854689B2 (ja) 1997-07-24 2006-12-06 東京応化工業株式会社 新規な光酸発生剤
JP3980124B2 (ja) 1997-07-24 2007-09-26 東京応化工業株式会社 新規ビススルホニルジアゾメタン
JP3865473B2 (ja) 1997-07-24 2007-01-10 東京応化工業株式会社 新規なジアゾメタン化合物
US6280897B1 (en) * 1996-12-24 2001-08-28 Kabushiki Kaisha Toshiba Photosensitive composition, method for forming pattern using the same, and method for manufacturing electronic parts
JP3935267B2 (ja) 1998-05-18 2007-06-20 東京応化工業株式会社 新規なレジスト用酸発生剤
US6153733A (en) * 1998-05-18 2000-11-28 Tokyo Ohka Kogyo Co., Ltd. (Disulfonyl diazomethane compounds)
JP4499896B2 (ja) * 2000-08-30 2010-07-07 株式会社日本触媒 （メタ）アクリル酸エステル系樹脂組成物
JP3895224B2 (ja) * 2001-12-03 2007-03-22 東京応化工業株式会社 ポジ型レジスト組成物及びそれを用いたレジストパターン形成方法
CA2511979A1 (en) 2003-02-19 2004-09-02 Akira Matsumoto Halogenated oxime derivatives and the use thereof as latent acids
JP2006096965A (ja) 2004-02-20 2006-04-13 Tokyo Ohka Kogyo Co Ltd 高分子化合物、該高分子化合物を含有するフォトレジスト組成物、およびレジストパターン形成方法
JP4409366B2 (ja) * 2004-06-08 2010-02-03 東京応化工業株式会社 ポジ型レジスト組成物およびレジストパターン形成方法
WO2005121193A1 (ja) * 2004-06-08 2005-12-22 Tokyo Ohka Kogyo Co., Ltd. 重合体、ポジ型レジスト組成物およびレジストパターン形成方法
JP4562628B2 (ja) * 2005-09-20 2010-10-13 富士フイルム株式会社 ポジ型レジスト組成物及びそれを用いたパターン形成方法
JP5114022B2 (ja) * 2006-01-23 2013-01-09 富士フイルム株式会社 パターン形成方法
US7998654B2 (en) * 2007-03-28 2011-08-16 Fujifilm Corporation Positive resist composition and pattern-forming method
WO2008153109A1 (ja) * 2007-06-12 2008-12-18 Fujifilm Corporation ネガ型現像用レジスト組成物及びこれを用いたパターン形成方法
JP5548406B2 (ja) * 2008-08-22 2014-07-16 東京応化工業株式会社 ポジ型レジスト組成物、レジストパターン形成方法、高分子化合物

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1184663A (ja) * 1996-12-24 1999-03-26 Toshiba Corp 感光性組成物、およびこれを用いたパターン形成方法ならびに電子部品の製造方法
US20060216643A1 (en) * 2004-01-08 2006-09-28 International Business Machines Corporation Positive photoresist composition with a polymer including a fluorosulfonamide group and process for its use
JP2005227332A (ja) * 2004-02-10 2005-08-25 Fuji Photo Film Co Ltd 液浸露光用ポジ型レジスト組成物及びそれを用いたパターン形成方法
JP2005227646A (ja) * 2004-02-16 2005-08-25 Fuji Photo Film Co Ltd 液浸プロセス用化学増幅型レジスト組成物及びそれを用いたパターン形成方法
JP2007112899A (ja) * 2005-10-20 2007-05-10 Jsr Corp 共重合体及び感放射線性樹脂組成物

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009276607A (ja) * 2008-05-15 2009-11-26 Tokyo Ohka Kogyo Co Ltd ポジ型レジスト組成物、レジストパターン形成方法および高分子化合物
CN104391429A (zh) * 2009-11-18 2015-03-04 Jsr株式会社 放射线敏感性树脂组合物、聚合物及抗蚀剂图案形成方法
CN104391429B (zh) * 2009-11-18 2018-12-18 Jsr株式会社 放射线敏感性树脂组合物、聚合物及抗蚀剂图案形成方法

Also Published As

Publication number Publication date
TWI380999B (zh) 2013-01-01
US8298745B2 (en) 2012-10-30
TW200914473A (en) 2009-04-01
JP5349765B2 (ja) 2013-11-20
JP2008308545A (ja) 2008-12-25
US20100124718A1 (en) 2010-05-20

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