WO2008146489A1 - Elastic boundary wave substrate and elastic boundary wave functional element using the substrate - Google Patents
Elastic boundary wave substrate and elastic boundary wave functional element using the substrate Download PDFInfo
- Publication number
- WO2008146489A1 WO2008146489A1 PCT/JP2008/001329 JP2008001329W WO2008146489A1 WO 2008146489 A1 WO2008146489 A1 WO 2008146489A1 JP 2008001329 W JP2008001329 W JP 2008001329W WO 2008146489 A1 WO2008146489 A1 WO 2008146489A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- substrate
- thin film
- boundary wave
- elastic boundary
- functional element
- Prior art date
Links
- 239000000758 substrate Substances 0.000 title abstract 6
- 239000010409 thin film Substances 0.000 abstract 8
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 2
- 229910052681 coesite Inorganic materials 0.000 abstract 1
- 230000008878 coupling Effects 0.000 abstract 1
- 238000010168 coupling process Methods 0.000 abstract 1
- 238000005859 coupling reaction Methods 0.000 abstract 1
- 229910052906 cristobalite Inorganic materials 0.000 abstract 1
- 239000010408 film Substances 0.000 abstract 1
- 239000002184 metal Substances 0.000 abstract 1
- 239000000377 silicon dioxide Substances 0.000 abstract 1
- 235000012239 silicon dioxide Nutrition 0.000 abstract 1
- 229910052682 stishovite Inorganic materials 0.000 abstract 1
- 229910052905 tridymite Inorganic materials 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/02—Details
- H03H9/0222—Details of interface-acoustic, boundary, pseudo-acoustic or Stonely wave devices
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Abstract
Provided is a substrate wherein a metal electrode, a dielectric thin film and another dielectric thin film are adhered on a piezoelectric substrate. The substrate confines elastic wave energy therein. Especially by using a SiO2 thin film as a thin film (4) and an AlN thin film as a thin film (5), the substrate having a high electromechanical coupling coefficient (k2) and excellent frequency-temperature characteristics is obtained by making the film thicknesses of electrodes (2, 3) and those of the thin film (4) and the thin film (5) optimum.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US12/601,687 US8508101B2 (en) | 2007-05-28 | 2008-05-28 | Elastic boundary wave substrate and elastic boundary wave functional element using the substrate |
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007-166939 | 2007-05-28 | ||
| JP2007166939 | 2007-05-28 | ||
| JP2008098723A JP5154285B2 (en) | 2007-05-28 | 2008-03-09 | Boundary acoustic wave functional element |
| JP2008-098723 | 2008-03-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| WO2008146489A1 true WO2008146489A1 (en) | 2008-12-04 |
Family
ID=40074763
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PCT/JP2008/001329 WO2008146489A1 (en) | 2007-05-28 | 2008-05-28 | Elastic boundary wave substrate and elastic boundary wave functional element using the substrate |
Country Status (1)
| Country | Link |
|---|---|
| WO (1) | WO2008146489A1 (en) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1998052279A1 (en) * | 1997-05-12 | 1998-11-19 | Hitachi, Ltd. | Elastic wave device |
| WO2005093949A1 (en) * | 2004-03-29 | 2005-10-06 | Murata Manufacturing Co., Ltd. | Boundary acoustic wave device manufacturing method and boundary acoustic wave device |
| JP2006279609A (en) * | 2005-03-29 | 2006-10-12 | Fujitsu Media Device Kk | Boundary acoustic wave element, resonator and ladder type filter |
| WO2006114930A1 (en) * | 2005-04-25 | 2006-11-02 | Murata Manufacturing Co., Ltd. | Boundary acoustic wave device |
-
2008
- 2008-05-28 WO PCT/JP2008/001329 patent/WO2008146489A1/en active Application Filing
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1998052279A1 (en) * | 1997-05-12 | 1998-11-19 | Hitachi, Ltd. | Elastic wave device |
| WO2005093949A1 (en) * | 2004-03-29 | 2005-10-06 | Murata Manufacturing Co., Ltd. | Boundary acoustic wave device manufacturing method and boundary acoustic wave device |
| JP2006279609A (en) * | 2005-03-29 | 2006-10-12 | Fujitsu Media Device Kk | Boundary acoustic wave element, resonator and ladder type filter |
| WO2006114930A1 (en) * | 2005-04-25 | 2006-11-02 | Murata Manufacturing Co., Ltd. | Boundary acoustic wave device |
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