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WO2008036845A3 - Nano electromechanical integrated-circuit bank and switch - Google Patents

Nano electromechanical integrated-circuit bank and switch Download PDF

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Publication number
WO2008036845A3
WO2008036845A3 PCT/US2007/079078 US2007079078W WO2008036845A3 WO 2008036845 A3 WO2008036845 A3 WO 2008036845A3 US 2007079078 W US2007079078 W US 2007079078W WO 2008036845 A3 WO2008036845 A3 WO 2008036845A3
Authority
WO
WIPO (PCT)
Prior art keywords
resonators
switch
electromechanical integrated
nano electromechanical
bank
Prior art date
Application number
PCT/US2007/079078
Other languages
French (fr)
Other versions
WO2008036845A2 (en
Inventor
Pritiraj Mohanty
Robert L Badzey
Original Assignee
Univ Boston
Pritiraj Mohanty
Robert L Badzey
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Univ Boston, Pritiraj Mohanty, Robert L Badzey filed Critical Univ Boston
Priority to US12/311,143 priority Critical patent/US8487715B2/en
Publication of WO2008036845A2 publication Critical patent/WO2008036845A2/en
Publication of WO2008036845A3 publication Critical patent/WO2008036845A3/en

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/0072—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks of microelectro-mechanical resonators or networks
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
    • H03H9/2405—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators
    • H03H9/2447—Beam resonators
    • H03H9/2463—Clamped-clamped beam resonators
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
    • H03H9/2405—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators
    • H03H9/2468—Tuning fork resonators
    • H03H9/2473—Double-Ended Tuning Fork [DETF] resonators
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/48—Coupling means therefor
    • H03H9/50—Mechanical coupling means
    • H03H9/505—Mechanical coupling means for microelectro-mechanical filters

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Micromachines (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
  • Semiconductor Integrated Circuits (AREA)

Abstract

A bank of nano electromechanical integrated circuit filters (100) is described. The bank of integrated circuit filters comprises a silicon substrate; a sacrificial layer; a device layer including at least two resonators (104, 1 12), wherein the at least two resonators include sub-micron excitable elements (106, 1 10) and wherein the at least two resonators possess a fundamental mode frequency as well as a collective mode frequency and wherein the collective mode frequency of the at least two resonators is determined by the fundamental frequency of the sub-micron elements.
PCT/US2007/079078 2006-09-20 2007-09-20 Nano electromechanical integrated-circuit bank and switch WO2008036845A2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US12/311,143 US8487715B2 (en) 2006-09-20 2007-09-20 Nano electromechanical integrated-circuit bank and switch

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US84604806P 2006-09-20 2006-09-20
US60/846,048 2006-09-20

Publications (2)

Publication Number Publication Date
WO2008036845A2 WO2008036845A2 (en) 2008-03-27
WO2008036845A3 true WO2008036845A3 (en) 2008-08-28

Family

ID=39201286

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2007/079078 WO2008036845A2 (en) 2006-09-20 2007-09-20 Nano electromechanical integrated-circuit bank and switch

Country Status (2)

Country Link
US (1) US8487715B2 (en)
WO (1) WO2008036845A2 (en)

Families Citing this family (38)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20110068834A1 (en) * 2005-01-07 2011-03-24 Trustees Of Boston University Electro-mechanical oscillating devices and associated methods
KR20070100942A (en) 2005-01-07 2007-10-15 트르스티스 오브 보스톤 유니버시티 Nanomachine Oscillator
WO2008036830A2 (en) * 2006-09-20 2008-03-27 Trustees Of Boston University Nano electromechanical integrated-circuit filter
WO2009048468A1 (en) 2007-10-11 2009-04-16 Sand 9, Inc. Signal amplification by hierarchal resonating structures
US7990229B2 (en) 2008-04-01 2011-08-02 Sand9, Inc. Methods and devices for compensating a signal using resonators
US8044736B2 (en) * 2008-04-29 2011-10-25 Sand9, Inc. Timing oscillators and related methods
US8476809B2 (en) 2008-04-29 2013-07-02 Sand 9, Inc. Microelectromechanical systems (MEMS) resonators and related apparatus and methods
US8766512B2 (en) * 2009-03-31 2014-07-01 Sand 9, Inc. Integration of piezoelectric materials with substrates
US8044737B2 (en) * 2008-04-29 2011-10-25 Sand9, Inc. Timing oscillators and related methods
US8410868B2 (en) 2009-06-04 2013-04-02 Sand 9, Inc. Methods and apparatus for temperature control of devices and mechanical resonating structures
US8111108B2 (en) * 2008-07-29 2012-02-07 Sand9, Inc. Micromechanical resonating devices and related methods
US20100155883A1 (en) * 2008-10-31 2010-06-24 Trustees Of Boston University Integrated mems and ic systems and related methods
US8689426B2 (en) * 2008-12-17 2014-04-08 Sand 9, Inc. Method of manufacturing a resonating structure
EP2377176B1 (en) 2008-12-17 2016-12-14 Analog Devices, Inc. Mechanical resonating structures including a temperature compensation structure
WO2010077311A1 (en) * 2008-12-17 2010-07-08 Sand9, Inc. Multi-port mechanical resonating devices and related methods
US8456250B2 (en) * 2009-02-04 2013-06-04 Sand 9, Inc. Methods and apparatus for tuning devices having resonators
US8395456B2 (en) 2009-02-04 2013-03-12 Sand 9, Inc. Variable phase amplifier circuit and method of use
US8319566B2 (en) * 2009-02-04 2012-11-27 Sand 9, Inc. Methods and apparatus for tuning devices having mechanical resonators
WO2010110918A1 (en) * 2009-03-26 2010-09-30 Sand9, Inc. Mechanical resonating structures and methods
US9048811B2 (en) 2009-03-31 2015-06-02 Sand 9, Inc. Integration of piezoelectric materials with substrates
US8174170B1 (en) 2009-05-13 2012-05-08 Sand 9, Inc. Methods and apparatus for mechanical resonating structures
US8604888B2 (en) * 2009-12-23 2013-12-10 Sand 9, Inc. Oscillators having arbitrary frequencies and related systems and methods
US8228127B2 (en) * 2009-12-23 2012-07-24 Sand 9, Inc. Oscillators having arbitrary frequencies and related systems and methods
US8704604B2 (en) 2009-12-23 2014-04-22 Sand 9, Inc. Oscillators having arbitrary frequencies and related systems and methods
US8661899B2 (en) 2010-03-01 2014-03-04 Sand9, Inc. Microelectromechanical gyroscopes and related apparatus and methods
WO2011133682A1 (en) 2010-04-20 2011-10-27 Guiti Zolfagharkhani Microelectromechanical gyroscopes and related apparatus and methods
KR101634305B1 (en) * 2010-05-11 2016-06-29 삼성전자주식회사 Resonator using carbon based nano material and fabrication method thereof
WO2012040043A1 (en) 2010-09-20 2012-03-29 Sand9, Inc. Resonant sensing using extensional modes of a plate
US9383208B2 (en) 2011-10-13 2016-07-05 Analog Devices, Inc. Electromechanical magnetometer and applications thereof
US9299910B1 (en) 2012-05-17 2016-03-29 Analog Devices, Inc. Resonator anchors and related apparatus and methods
US9954513B1 (en) 2012-12-21 2018-04-24 Analog Devices, Inc. Methods and apparatus for anchoring resonators
US9634227B1 (en) 2013-03-06 2017-04-25 Analog Devices, Inc. Suppression of spurious modes of vibration for resonators and related apparatus and methods
US9325294B2 (en) * 2013-03-15 2016-04-26 Resonant Inc. Microwave acoustic wave filters
WO2015122840A1 (en) * 2014-02-11 2015-08-20 Agency For Science, Technology And Research Micro-electromechanical resonators and methods of providing a reference frequency
EP3472873B1 (en) * 2016-06-19 2020-08-19 IQE plc Epitaxial aln/rare earth oxide structure for rf filter applications
US10800649B2 (en) 2016-11-28 2020-10-13 Analog Devices International Unlimited Company Planar processing of suspended microelectromechanical systems (MEMS) devices
US10843920B2 (en) 2019-03-08 2020-11-24 Analog Devices International Unlimited Company Suspended microelectromechanical system (MEMS) devices
DE102021212216A1 (en) * 2021-10-29 2023-05-04 Robert Bosch Gesellschaft mit beschränkter Haftung High-frequency filter device, high-frequency module and high-frequency filter method

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20030186672A1 (en) * 2000-06-30 2003-10-02 Lionel Buchaillot Nano-electromechanical filter
US6737939B2 (en) * 2001-03-30 2004-05-18 California Institute Of Technology Carbon nanotube array RF filter

Family Cites Families (35)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3352462B2 (en) 1996-07-03 2002-12-03 インターナシヨナル・ビジネス・マシーンズ・コーポレーシヨン Mechanical signal processor with loss compensation means
US5914553A (en) 1997-06-16 1999-06-22 Cornell Research Foundation, Inc. Multistable tunable micromechanical resonators
US6124765A (en) 1997-10-24 2000-09-26 Stmicroelectronics, Inc. Integrated released beam oscillator and associated methods
US6577040B2 (en) 1999-01-14 2003-06-10 The Regents Of The University Of Michigan Method and apparatus for generating a signal having at least one desired output frequency utilizing a bank of vibrating micromechanical devices
US6686807B1 (en) 1999-11-02 2004-02-03 Eta Sa Fabriques D'ebauches Time base comprising an integrated micromechanical ring resonator
US6739190B2 (en) 2000-08-24 2004-05-25 The Regents Of The University Of Michigan Micromechanical resonator device
EP1217735B1 (en) 2000-12-21 2007-11-14 ETA SA Manufacture Horlogère Suisse Time base comprising an integrated micromechanical tuning fork resonator
US6747389B2 (en) 2001-06-11 2004-06-08 Intel Corporation Apparatus for adjusting the resonance frequency of a microelectromechanical (MEMS) resonator using tensile/compressive strain and applications therefor
US6943484B2 (en) 2001-12-06 2005-09-13 University Of Pittsburgh Tunable piezoelectric micro-mechanical resonator
US7943412B2 (en) 2001-12-10 2011-05-17 International Business Machines Corporation Low temperature Bi-CMOS compatible process for MEMS RF resonators and filters
US6710680B2 (en) 2001-12-20 2004-03-23 Motorola, Inc. Reduced size, low loss MEMS torsional hinges and MEMS resonators employing such hinges
AU2003272195A1 (en) 2002-04-30 2004-01-06 Hrl Laboratories, Llc Quartz-based nanoresonators and method of fabricating same
WO2004013893A2 (en) 2002-08-01 2004-02-12 Georgia Tech Research Corporation Piezo electric on seminconductor on- insulator resonator
JP4429918B2 (en) 2002-08-06 2010-03-10 チャールズ スターク ドレイパー ラボラトリー インコーポレイテッド MEMS piezoelectric resonator
US6861914B2 (en) * 2002-09-30 2005-03-01 The United States Of America As Represented By The Secretary Of The Navy Monolithic vibration isolation and an ultra-high Q mechanical resonator
EP1650868A1 (en) 2003-07-02 2006-04-26 Sony Corporation Mems type oscillator, process for fabricating the same, filter, and communication unit
US20050073078A1 (en) 2003-10-03 2005-04-07 Markus Lutz Frequency compensated oscillator design for process tolerances
JP4086023B2 (en) 2003-12-04 2008-05-14 セイコーエプソン株式会社 Micromechanical electrostatic vibrator
US6995622B2 (en) 2004-01-09 2006-02-07 Robert Bosh Gmbh Frequency and/or phase compensated microelectromechanical oscillator
FI20040162A7 (en) 2004-02-03 2005-08-04 Nokia Oyj Stabilizing the frequency of the reference oscillator
EP1751765A4 (en) 2004-05-24 2009-05-20 Univ Boston COMMANDABLE NANO CHEMICAL MEMORY ELEMENT
CN1993890A (en) 2004-06-24 2007-07-04 诺基亚公司 Frequency synthesizer
KR20070100942A (en) 2005-01-07 2007-10-15 트르스티스 오브 보스톤 유니버시티 Nanomachine Oscillator
US7211926B2 (en) 2005-03-09 2007-05-01 The Regents Of The University Of California Temperature compensated oscillator including MEMS resonator for frequency control
EP1867043B1 (en) 2005-04-08 2016-03-09 Nxp B.V. Low-voltage mems oscillator
US7492241B2 (en) 2005-06-02 2009-02-17 The Regents Of The University Of California Contour-mode piezoelectric micromechanical resonators
US7726189B2 (en) * 2005-08-01 2010-06-01 Purdue Research Foundation Nonlinear micromechanical resonator
WO2008036830A2 (en) 2006-09-20 2008-03-27 Trustees Of Boston University Nano electromechanical integrated-circuit filter
US7564162B2 (en) 2006-12-13 2009-07-21 Georgia Tech Research Corp. Process compensated micromechanical resonators
US7724103B2 (en) 2007-02-13 2010-05-25 California Institute Of Technology Ultra-high frequency self-sustaining oscillators, coupled oscillators, voltage-controlled oscillators, and oscillator arrays based on vibrating nanoelectromechanical resonators
JP2008211420A (en) 2007-02-26 2008-09-11 Seiko Instruments Inc Oscillator
WO2009048468A1 (en) 2007-10-11 2009-04-16 Sand 9, Inc. Signal amplification by hierarchal resonating structures
EP2289169A2 (en) 2008-04-29 2011-03-02 Sand 9, Inc. Mechanical resonating timing oscillators and related methods
WO2010011288A1 (en) 2008-07-22 2010-01-28 Trustees Of Boston University Switching devices and related methods
US20100155883A1 (en) 2008-10-31 2010-06-24 Trustees Of Boston University Integrated mems and ic systems and related methods

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20030186672A1 (en) * 2000-06-30 2003-10-02 Lionel Buchaillot Nano-electromechanical filter
US6737939B2 (en) * 2001-03-30 2004-05-18 California Institute Of Technology Carbon nanotube array RF filter

Also Published As

Publication number Publication date
WO2008036845A2 (en) 2008-03-27
US8487715B2 (en) 2013-07-16
US20100134207A1 (en) 2010-06-03

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