WO2008065091A2 - Membrane de séparation pour des transmetteurs de pression et transmetteur de pression et appareils de mesure de la pression comportant de telles membranes - Google Patents
Membrane de séparation pour des transmetteurs de pression et transmetteur de pression et appareils de mesure de la pression comportant de telles membranes Download PDFInfo
- Publication number
- WO2008065091A2 WO2008065091A2 PCT/EP2007/062839 EP2007062839W WO2008065091A2 WO 2008065091 A2 WO2008065091 A2 WO 2008065091A2 EP 2007062839 W EP2007062839 W EP 2007062839W WO 2008065091 A2 WO2008065091 A2 WO 2008065091A2
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- membrane
- pressure
- diaphragm seal
- layer
- separation membrane
- Prior art date
Links
- 239000012528 membrane Substances 0.000 title claims abstract description 75
- 238000009792 diffusion process Methods 0.000 claims abstract description 22
- 239000001257 hydrogen Substances 0.000 claims abstract description 14
- 229910052739 hydrogen Inorganic materials 0.000 claims abstract description 14
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims abstract description 11
- 239000010410 layer Substances 0.000 claims description 59
- 238000000926 separation method Methods 0.000 claims description 41
- 239000010935 stainless steel Substances 0.000 claims description 11
- 229910001220 stainless steel Inorganic materials 0.000 claims description 11
- 239000000919 ceramic Substances 0.000 claims description 8
- 239000002318 adhesion promoter Substances 0.000 claims description 6
- 229910018072 Al 2 O 3 Inorganic materials 0.000 claims description 5
- 239000012790 adhesive layer Substances 0.000 claims description 2
- 230000002093 peripheral effect Effects 0.000 claims 1
- 230000004888 barrier function Effects 0.000 abstract description 14
- 238000000034 method Methods 0.000 abstract description 10
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 10
- 229910052737 gold Inorganic materials 0.000 description 10
- 239000010931 gold Substances 0.000 description 10
- 229910000831 Steel Inorganic materials 0.000 description 5
- 239000010959 steel Substances 0.000 description 5
- 230000007547 defect Effects 0.000 description 4
- 238000004544 sputter deposition Methods 0.000 description 4
- 150000002431 hydrogen Chemical class 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229920002545 silicone oil Polymers 0.000 description 2
- 229910017083 AlN Inorganic materials 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- YZCKVEUIGOORGS-UHFFFAOYSA-N Hydrogen atom Chemical compound [H] YZCKVEUIGOORGS-UHFFFAOYSA-N 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- XKRFYHLGVUSROY-UHFFFAOYSA-N argon Substances [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- -1 argon ions Chemical class 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 239000011324 bead Substances 0.000 description 1
- 238000009530 blood pressure measurement Methods 0.000 description 1
- 238000001311 chemical methods and process Methods 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 238000005352 clarification Methods 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000003487 electrochemical reaction Methods 0.000 description 1
- 229910000856 hastalloy Inorganic materials 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229910003465 moissanite Inorganic materials 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910052756 noble gas Inorganic materials 0.000 description 1
- 229910000510 noble metal Inorganic materials 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 238000000992 sputter etching Methods 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/0007—Fluidic connecting means
- G01L19/0046—Fluidic connecting means using isolation membranes
Definitions
- the present invention relates to a separation membrane for hydraulic diaphragm seal and devices that include such separation membranes, in particular hydraulic diaphragm seal and pressure gauges with such a diaphragm seal.
- a pressure transmitter comprises a diaphragm seal body which has a surface on which a separation membrane is fastened in a pressure-tight manner to form a pressure chamber between the separation diaphragm and the diaphragm seal body. From the pressure chamber, a hydraulic path extends through a channel through the diaphragm seal body to a pressure receiver, for example a pressure measuring cell.
- the hydraulic path is filled with a transfer fluid, such as a silicone oil or a perfluorinated oil.
- a transfer fluid such as a silicone oil or a perfluorinated oil.
- the separation membranes of the diaphragm seals are usually made of stainless steel, with membranes made of other metals or alloys are used for special applications, such as tantalum or Hastelloy.
- Japanese Laid-Open Patent Publication JP 05-209800 A therefore, describes a solution to overcome this problem.
- a diffusion barrier of gold is applied, which is then coated with a less noble metal, such as titanium, tungsten, chromium or nickel.
- a less noble metal such as titanium, tungsten, chromium or nickel.
- an electrically insulating covering layer which is intended to protect the metal layers from the measuring medium in order to avoid electrochemical reactions ensues.
- the electrically insulating covering layer may comprise, for example, Al 2 O 3 , SiC, AlN, SiO 2 , BN, ZrO 2 , or Si 3 N 4 .
- Layer structure the production of which comprises a plurality of process steps with possible sources of error.
- an electrochemical cell can again be formed which destroys the separating membrane.
- the many layers affect the mechanical properties of the membrane.
- the object is achieved by the separation membrane according to the independent claim 1, the pressure transmitter according to the independent claim 8, and the pressure gauge according to the independent claim 12th
- the separation membrane according to the invention for transferring a pressure comprises
- a flexible membrane body having stainless steel having stainless steel
- a ceramic cover layer Characterized in that
- the ceramic cover layer apart from a possibly to be provided adhesion promoter layer is applied directly to the stainless steel of the membrane body.
- an adhesive layer is to be provided at all, this has, for example, a layer thickness of not more than 4 nm, preferably not more than 2 nm and particularly preferably not more than 1 nm.
- the adhesion promoter layer acts at best to a negligible extent as a diffusion barrier for hydrogen. That is, the diffusion rate of hydrogen through the stainless steel membrane body having the primer layer is not less than 50% of the diffusion rate of hydrogen through the stainless steel membrane body without the primer layer.
- no primer layer is provided.
- the ceramic covering layer has in particular Al 2 O 3 .
- the cover layer has, in a presently preferred embodiment, a layer thickness of not more than 1 .mu.m, preferably not more than 0.5 .mu.m, more preferably not more than 0.25 .mu.m and more preferably not more than about 0.2 .mu.m ,
- the limitation of the layer thickness is given, inter alia, that the mechanical properties of the separation membrane should be largely defined by the membrane body.
- the diffusion barrier has a layer thickness of not less than 25 nm, more preferably not less than 50 nm, and particularly preferably not less than 100 nm.
- the preparation of the cover layer can be carried out, for example, in a magnetron sputtering method in which a source of AI 2 O 3 target or an Al target is sputtered as a source of the layer material.
- the process pressure can for example place between about 5x10 -3 mbar ⁇ ⁇ and 1x10 -2 mbar, wherein the oxygen content in the process atmosphere in the use of an Al 2 O 3 -targets example, about 10%, and for example, when using an AI target may be about 50%.
- the temperature of the membrane body can during the
- Coating process may be increased, for example, it may be about 250 ° C to 600 ° C or more. In this case, however, the limited temperature resistance of some steels has to be considered. While pure austenitic steels withstand a high-temperature process without damage, duplex steels can cause structural displacements at too high temperatures, which must be avoided.
- Stainless steel membrane bodies are cleaned by sputter etching (e.g., bias sputtering with noble gas ions, especially argon ions).
- sputter etching e.g., bias sputtering with noble gas ions, especially argon ions.
- the growth rate of the ceramic layer need not be less than 0.2 nm / sec. It is preferably not less than 0.5 nm / sec, and more preferably not less than 1 nm / sec.
- the growth rate is, for example, not more than about 16 nm / sec, preferably not more than 8 nm / sec, and more preferably not more than 4 nm / sec.
- the growth rate is about 1 to 2 nm / sec.
- the advantage of the separation membrane according to the invention is that the ceramic cover layer is a diffusion barrier of several orders of magnitude better than the previously used as a diffusion barrier gold.
- the costly to be prepared gold layer can be eliminated without sacrificing the quality of the diffusion barrier.
- the negative effects of a relatively thick layer of gold on the Flexibility of the separation membrane avoided.
- the separating membrane may, for example, have the form of a circular disk or annular disc, apart from a possibly imprinted wave or bead structure.
- the pressure transmitter according to the invention comprises a diaphragm seal body having a surface having an opening in which a hydraulic path opens, which extends through the diaphragm seal body, and a separation membrane according to the invention, on the surface of the diaphragm seal body to form a pressure chamber between the separation membrane and the pressure center body is pressure-tightly secured with a circumferential joint, wherein the separation membrane covers the opening, and the cover layer is remote from the diaphragm seal body.
- the pressure chamber and the hydraulic path are filled with a transfer fluid, for example, a silicone oil or a perfluorinated oil.
- the surface of the diaphragm seal body can in the of the
- Cover membrane covered area have a membrane bed on which the separation membrane is supported when it is subjected to an overload pressure.
- the separation membrane may have a wave structure, which may be produced, for example, by stamping off the separation membrane on a corresponding structure of the membrane bed.
- the cover layer may at least partially cover the surface of the diaphragm seal body.
- the pressure gauge according to the invention comprises at least one pressure transmitter according to the invention and a pressure sensor for converting a pressure applied to the pressure sensor or a difference between two pending on the pressure sensor pressures in an electrical signal, wherein the pressure sensor via the hydraulic path of the at least one pressure transmitter with a pressure applied to the separation membrane pressure can be acted upon.
- FIG. 1 shows a schematic longitudinal section through a pressure measuring device according to the invention
- FIG. 2 shows a detailed view of a longitudinal section through the separating membrane according to the invention of the pressure measuring device of FIG. 1;
- Fig. 3 An Arrhenius plot of the diffusion coefficients of hydrogen in different materials.
- the illustrated in Fig. 1 relative pressure measuring device 1 for detecting the difference between a process pressure and the atmospheric pressure in the vicinity of the relative pressure measuring device comprises a cylindrical diaphragm seal body 2 with a measuring cell chamber 4, which is formed as a recess in a first end face of the diaphragm seal body.
- a piezoresistive pressure measuring cell 3 is arranged, the back side facing away from process is acted upon by a reference air path to the atmospheric pressure, and communicates via a hydraulic path, which includes an axial bore 5 through the diaphragm seal body 2, with a pressure chamber 6, which at a second end face of the diaphragm seal body 2 between the diaphragm seal body and a separation membrane 7 is formed.
- the separation membrane 7 is connected via a circumferential weld with the diaphragm seal body 2.
- the separation membrane 7 has a structure of concentric wave rings to allow an increased volume stroke of the separation membrane.
- the wave pattern is produced by stamping off the separating membrane 7 on a membrane bed 8 at the second end face of the diaphragm seal body.
- the separation membrane 7 comprises a membrane body 9 made of an austenitic steel having a thickness in a range of about 25 ⁇ m to 50 ⁇ m, for example 30 ⁇ m ,
- a cover layer 10 of Al 2 O 3 is applied with a thickness of about 0.15 microns in a sputtering process.
- the cover layer 10 is shown in FIG. 2 considerably thicker than corresponds to the actual layer thickness ratio. Accordingly, the thickness of the cover layer 10 is only about 0.5%
- the cover layer exerts only a small influence on the mechanical properties of the separation membrane. In any case, the influence is considerably less than that of gold layers with a thickness of a few ⁇ m, which are used according to the prior art as diffusion barriers.
- the thin cover layer 10 is sufficient as a diffusion barrier is clear from FIG. 3, in which the diffusion coefficients for hydrogen are shown in some materials. Accordingly, the barrier effect of an aluminum oxide layer at room temperature is about 20 orders of magnitude better than that of a gold layer of the same thickness. At about 300 ° C, the ratio is still more than 10 orders of magnitude.
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
Abstract
L'invention concerne une membrane de séparation (7) destinée à transmettre une pression, comportant un corps de membrane flexible (9) contenant de l'acier inoxydable, et une couche de couverture céramique (10), caractérisée en ce qu'hormis une éventuelle couche d'agent adhésif intermédiaire, la couche de couverture céramique est appliquée directement sur l'acier inoxydable du corps de membrane (9). La couche de couverture contient notamment Al2O3.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102006056173.2 | 2006-11-27 | ||
DE200610056173 DE102006056173A1 (de) | 2006-11-27 | 2006-11-27 | Trennmembran für hydraulische Druckmittler sowie Druckmittler und Druckmessgeräte mit solchen Trennmembranen |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2008065091A2 true WO2008065091A2 (fr) | 2008-06-05 |
WO2008065091A3 WO2008065091A3 (fr) | 2008-07-17 |
Family
ID=39314889
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/EP2007/062839 WO2008065091A2 (fr) | 2006-11-27 | 2007-11-27 | Membrane de séparation pour des transmetteurs de pression et transmetteur de pression et appareils de mesure de la pression comportant de telles membranes |
Country Status (2)
Country | Link |
---|---|
DE (1) | DE102006056173A1 (fr) |
WO (1) | WO2008065091A2 (fr) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102009050911B4 (de) * | 2009-10-26 | 2014-06-12 | Borgwarner Beru Systems Gmbh | Zylinderdrucksensor |
DE102020132687A1 (de) | 2020-12-08 | 2022-06-09 | Endress+Hauser SE+Co. KG | Druckmessaufnehmer |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3121799A1 (de) * | 1981-06-02 | 1982-12-23 | Alexander Wiegand Gmbh U. Co Armaturen- U. Manometerfabrik, 8763 Klingenberg | Messmembrane gegen druckmedien-diffusion |
JPH01155227A (ja) * | 1987-12-11 | 1989-06-19 | Aisin Seiki Co Ltd | 多層薄膜絶縁層 |
KR0163443B1 (ko) * | 1991-07-04 | 1999-03-30 | 나까오 다께시 | 압력측정장치 |
JP2765333B2 (ja) * | 1992-01-30 | 1998-06-11 | 三井造船株式会社 | 圧力測定装置 |
JP2852602B2 (ja) * | 1994-03-17 | 1999-02-03 | 株式会社山武 | 圧力測定装置 |
JPH08159903A (ja) * | 1994-12-02 | 1996-06-21 | Tokyo Gas Co Ltd | 導電性流体の差圧検出器 |
JPH10132691A (ja) * | 1996-10-31 | 1998-05-22 | Hitachi Ltd | ダイアフラム |
-
2006
- 2006-11-27 DE DE200610056173 patent/DE102006056173A1/de not_active Withdrawn
-
2007
- 2007-11-27 WO PCT/EP2007/062839 patent/WO2008065091A2/fr active Application Filing
Also Published As
Publication number | Publication date |
---|---|
DE102006056173A1 (de) | 2008-06-05 |
WO2008065091A3 (fr) | 2008-07-17 |
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