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WO2008065091A2 - Membrane de séparation pour des transmetteurs de pression et transmetteur de pression et appareils de mesure de la pression comportant de telles membranes - Google Patents

Membrane de séparation pour des transmetteurs de pression et transmetteur de pression et appareils de mesure de la pression comportant de telles membranes Download PDF

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Publication number
WO2008065091A2
WO2008065091A2 PCT/EP2007/062839 EP2007062839W WO2008065091A2 WO 2008065091 A2 WO2008065091 A2 WO 2008065091A2 EP 2007062839 W EP2007062839 W EP 2007062839W WO 2008065091 A2 WO2008065091 A2 WO 2008065091A2
Authority
WO
WIPO (PCT)
Prior art keywords
membrane
pressure
diaphragm seal
layer
separation membrane
Prior art date
Application number
PCT/EP2007/062839
Other languages
German (de)
English (en)
Other versions
WO2008065091A3 (fr
Inventor
Frank Hegner
Andreas Rossberg
Original Assignee
Endress+Hauser Gmbh+Co.Kg
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Endress+Hauser Gmbh+Co.Kg filed Critical Endress+Hauser Gmbh+Co.Kg
Publication of WO2008065091A2 publication Critical patent/WO2008065091A2/fr
Publication of WO2008065091A3 publication Critical patent/WO2008065091A3/fr

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0007—Fluidic connecting means
    • G01L19/0046—Fluidic connecting means using isolation membranes

Definitions

  • the present invention relates to a separation membrane for hydraulic diaphragm seal and devices that include such separation membranes, in particular hydraulic diaphragm seal and pressure gauges with such a diaphragm seal.
  • a pressure transmitter comprises a diaphragm seal body which has a surface on which a separation membrane is fastened in a pressure-tight manner to form a pressure chamber between the separation diaphragm and the diaphragm seal body. From the pressure chamber, a hydraulic path extends through a channel through the diaphragm seal body to a pressure receiver, for example a pressure measuring cell.
  • the hydraulic path is filled with a transfer fluid, such as a silicone oil or a perfluorinated oil.
  • a transfer fluid such as a silicone oil or a perfluorinated oil.
  • the separation membranes of the diaphragm seals are usually made of stainless steel, with membranes made of other metals or alloys are used for special applications, such as tantalum or Hastelloy.
  • Japanese Laid-Open Patent Publication JP 05-209800 A therefore, describes a solution to overcome this problem.
  • a diffusion barrier of gold is applied, which is then coated with a less noble metal, such as titanium, tungsten, chromium or nickel.
  • a less noble metal such as titanium, tungsten, chromium or nickel.
  • an electrically insulating covering layer which is intended to protect the metal layers from the measuring medium in order to avoid electrochemical reactions ensues.
  • the electrically insulating covering layer may comprise, for example, Al 2 O 3 , SiC, AlN, SiO 2 , BN, ZrO 2 , or Si 3 N 4 .
  • Layer structure the production of which comprises a plurality of process steps with possible sources of error.
  • an electrochemical cell can again be formed which destroys the separating membrane.
  • the many layers affect the mechanical properties of the membrane.
  • the object is achieved by the separation membrane according to the independent claim 1, the pressure transmitter according to the independent claim 8, and the pressure gauge according to the independent claim 12th
  • the separation membrane according to the invention for transferring a pressure comprises
  • a flexible membrane body having stainless steel having stainless steel
  • a ceramic cover layer Characterized in that
  • the ceramic cover layer apart from a possibly to be provided adhesion promoter layer is applied directly to the stainless steel of the membrane body.
  • an adhesive layer is to be provided at all, this has, for example, a layer thickness of not more than 4 nm, preferably not more than 2 nm and particularly preferably not more than 1 nm.
  • the adhesion promoter layer acts at best to a negligible extent as a diffusion barrier for hydrogen. That is, the diffusion rate of hydrogen through the stainless steel membrane body having the primer layer is not less than 50% of the diffusion rate of hydrogen through the stainless steel membrane body without the primer layer.
  • no primer layer is provided.
  • the ceramic covering layer has in particular Al 2 O 3 .
  • the cover layer has, in a presently preferred embodiment, a layer thickness of not more than 1 .mu.m, preferably not more than 0.5 .mu.m, more preferably not more than 0.25 .mu.m and more preferably not more than about 0.2 .mu.m ,
  • the limitation of the layer thickness is given, inter alia, that the mechanical properties of the separation membrane should be largely defined by the membrane body.
  • the diffusion barrier has a layer thickness of not less than 25 nm, more preferably not less than 50 nm, and particularly preferably not less than 100 nm.
  • the preparation of the cover layer can be carried out, for example, in a magnetron sputtering method in which a source of AI 2 O 3 target or an Al target is sputtered as a source of the layer material.
  • the process pressure can for example place between about 5x10 -3 mbar ⁇ ⁇ and 1x10 -2 mbar, wherein the oxygen content in the process atmosphere in the use of an Al 2 O 3 -targets example, about 10%, and for example, when using an AI target may be about 50%.
  • the temperature of the membrane body can during the
  • Coating process may be increased, for example, it may be about 250 ° C to 600 ° C or more. In this case, however, the limited temperature resistance of some steels has to be considered. While pure austenitic steels withstand a high-temperature process without damage, duplex steels can cause structural displacements at too high temperatures, which must be avoided.
  • Stainless steel membrane bodies are cleaned by sputter etching (e.g., bias sputtering with noble gas ions, especially argon ions).
  • sputter etching e.g., bias sputtering with noble gas ions, especially argon ions.
  • the growth rate of the ceramic layer need not be less than 0.2 nm / sec. It is preferably not less than 0.5 nm / sec, and more preferably not less than 1 nm / sec.
  • the growth rate is, for example, not more than about 16 nm / sec, preferably not more than 8 nm / sec, and more preferably not more than 4 nm / sec.
  • the growth rate is about 1 to 2 nm / sec.
  • the advantage of the separation membrane according to the invention is that the ceramic cover layer is a diffusion barrier of several orders of magnitude better than the previously used as a diffusion barrier gold.
  • the costly to be prepared gold layer can be eliminated without sacrificing the quality of the diffusion barrier.
  • the negative effects of a relatively thick layer of gold on the Flexibility of the separation membrane avoided.
  • the separating membrane may, for example, have the form of a circular disk or annular disc, apart from a possibly imprinted wave or bead structure.
  • the pressure transmitter according to the invention comprises a diaphragm seal body having a surface having an opening in which a hydraulic path opens, which extends through the diaphragm seal body, and a separation membrane according to the invention, on the surface of the diaphragm seal body to form a pressure chamber between the separation membrane and the pressure center body is pressure-tightly secured with a circumferential joint, wherein the separation membrane covers the opening, and the cover layer is remote from the diaphragm seal body.
  • the pressure chamber and the hydraulic path are filled with a transfer fluid, for example, a silicone oil or a perfluorinated oil.
  • the surface of the diaphragm seal body can in the of the
  • Cover membrane covered area have a membrane bed on which the separation membrane is supported when it is subjected to an overload pressure.
  • the separation membrane may have a wave structure, which may be produced, for example, by stamping off the separation membrane on a corresponding structure of the membrane bed.
  • the cover layer may at least partially cover the surface of the diaphragm seal body.
  • the pressure gauge according to the invention comprises at least one pressure transmitter according to the invention and a pressure sensor for converting a pressure applied to the pressure sensor or a difference between two pending on the pressure sensor pressures in an electrical signal, wherein the pressure sensor via the hydraulic path of the at least one pressure transmitter with a pressure applied to the separation membrane pressure can be acted upon.
  • FIG. 1 shows a schematic longitudinal section through a pressure measuring device according to the invention
  • FIG. 2 shows a detailed view of a longitudinal section through the separating membrane according to the invention of the pressure measuring device of FIG. 1;
  • Fig. 3 An Arrhenius plot of the diffusion coefficients of hydrogen in different materials.
  • the illustrated in Fig. 1 relative pressure measuring device 1 for detecting the difference between a process pressure and the atmospheric pressure in the vicinity of the relative pressure measuring device comprises a cylindrical diaphragm seal body 2 with a measuring cell chamber 4, which is formed as a recess in a first end face of the diaphragm seal body.
  • a piezoresistive pressure measuring cell 3 is arranged, the back side facing away from process is acted upon by a reference air path to the atmospheric pressure, and communicates via a hydraulic path, which includes an axial bore 5 through the diaphragm seal body 2, with a pressure chamber 6, which at a second end face of the diaphragm seal body 2 between the diaphragm seal body and a separation membrane 7 is formed.
  • the separation membrane 7 is connected via a circumferential weld with the diaphragm seal body 2.
  • the separation membrane 7 has a structure of concentric wave rings to allow an increased volume stroke of the separation membrane.
  • the wave pattern is produced by stamping off the separating membrane 7 on a membrane bed 8 at the second end face of the diaphragm seal body.
  • the separation membrane 7 comprises a membrane body 9 made of an austenitic steel having a thickness in a range of about 25 ⁇ m to 50 ⁇ m, for example 30 ⁇ m ,
  • a cover layer 10 of Al 2 O 3 is applied with a thickness of about 0.15 microns in a sputtering process.
  • the cover layer 10 is shown in FIG. 2 considerably thicker than corresponds to the actual layer thickness ratio. Accordingly, the thickness of the cover layer 10 is only about 0.5%
  • the cover layer exerts only a small influence on the mechanical properties of the separation membrane. In any case, the influence is considerably less than that of gold layers with a thickness of a few ⁇ m, which are used according to the prior art as diffusion barriers.
  • the thin cover layer 10 is sufficient as a diffusion barrier is clear from FIG. 3, in which the diffusion coefficients for hydrogen are shown in some materials. Accordingly, the barrier effect of an aluminum oxide layer at room temperature is about 20 orders of magnitude better than that of a gold layer of the same thickness. At about 300 ° C, the ratio is still more than 10 orders of magnitude.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)

Abstract

L'invention concerne une membrane de séparation (7) destinée à transmettre une pression, comportant un corps de membrane flexible (9) contenant de l'acier inoxydable, et une couche de couverture céramique (10), caractérisée en ce qu'hormis une éventuelle couche d'agent adhésif intermédiaire, la couche de couverture céramique est appliquée directement sur l'acier inoxydable du corps de membrane (9). La couche de couverture contient notamment Al2O3.
PCT/EP2007/062839 2006-11-27 2007-11-27 Membrane de séparation pour des transmetteurs de pression et transmetteur de pression et appareils de mesure de la pression comportant de telles membranes WO2008065091A2 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102006056173.2 2006-11-27
DE200610056173 DE102006056173A1 (de) 2006-11-27 2006-11-27 Trennmembran für hydraulische Druckmittler sowie Druckmittler und Druckmessgeräte mit solchen Trennmembranen

Publications (2)

Publication Number Publication Date
WO2008065091A2 true WO2008065091A2 (fr) 2008-06-05
WO2008065091A3 WO2008065091A3 (fr) 2008-07-17

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2007/062839 WO2008065091A2 (fr) 2006-11-27 2007-11-27 Membrane de séparation pour des transmetteurs de pression et transmetteur de pression et appareils de mesure de la pression comportant de telles membranes

Country Status (2)

Country Link
DE (1) DE102006056173A1 (fr)
WO (1) WO2008065091A2 (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102009050911B4 (de) * 2009-10-26 2014-06-12 Borgwarner Beru Systems Gmbh Zylinderdrucksensor
DE102020132687A1 (de) 2020-12-08 2022-06-09 Endress+Hauser SE+Co. KG Druckmessaufnehmer

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3121799A1 (de) * 1981-06-02 1982-12-23 Alexander Wiegand Gmbh U. Co Armaturen- U. Manometerfabrik, 8763 Klingenberg Messmembrane gegen druckmedien-diffusion
JPH01155227A (ja) * 1987-12-11 1989-06-19 Aisin Seiki Co Ltd 多層薄膜絶縁層
KR0163443B1 (ko) * 1991-07-04 1999-03-30 나까오 다께시 압력측정장치
JP2765333B2 (ja) * 1992-01-30 1998-06-11 三井造船株式会社 圧力測定装置
JP2852602B2 (ja) * 1994-03-17 1999-02-03 株式会社山武 圧力測定装置
JPH08159903A (ja) * 1994-12-02 1996-06-21 Tokyo Gas Co Ltd 導電性流体の差圧検出器
JPH10132691A (ja) * 1996-10-31 1998-05-22 Hitachi Ltd ダイアフラム

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Publication number Publication date
DE102006056173A1 (de) 2008-06-05
WO2008065091A3 (fr) 2008-07-17

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