WO2007037397A1

WO2007037397A1 - Method and apparatus for transferring and receiving article by overhead hoist transport carrier

Info

Publication number: WO2007037397A1
Application number: PCT/JP2006/319512
Authority: WO
Inventors: Mitsuhiro Ando; Susumu Maetaki
Original assignee: Asyst Technologies Japan, Inc.
Priority date: 2005-09-30
Filing date: 2006-09-29
Publication date: 2007-04-05
Also published as: JP2007096140A; KR20080072817A; TW200737392A; CN101278384A

Abstract

A FOUP (9a) is placed on a FOUP carry in/out port (5a) on a process station (5) and stores a processed substrate on the process station (5). A FOUP (9b) is positioned above the FOUP (9a), and stores a substrate which is transferred by an overhead hoist transport carrier and is to be processed on the process station (5). The FOUP (9a) and the FOUP (9b) are so configured as to be replaced by operation of a lift mechanism of the overhead hoist transport carrier and a pair of slide boards (10by, 10cy) which advance and retract in a horizontal direction in a lift area of the lift mechanism.

Description

Specification

Method and apparatus for receiving and receiving articles in a suspended lift carriage

Technical field

[0001] The present invention is installed at a predetermined location along a circular track between processes or between processes of a suspended lift carriage (hereinafter referred to as OHT (Overhead Hoist Transport) carriage), and the article (FOUP (Front-Opening Unified Pod ) Etc.) The material loading / unloading port of a station (hereinafter referred to as a processing station) that performs various processing (cleaning, CVD (Chemical Vapor Deposition)) of the substrate (wafer, liquid crystal, etc.) that can be stored in a removable manner. And a method for exchanging the article for delivery placed on the delivery station and the article for delivery to the processing station located above the delivery article and held by the OHT carriage, and an apparatus for carrying out the method. It is related. In particular, the present invention is suitable for transporting a storage box FOUP (Front-Opening Unified Pod).

Background art

[0002] In recent years, it has been arranged along a circular orbit between processes in a clean room and performs various surface treatments (thin film formation, photolithography, cleaning, etching, inspection, etc.) of wafers. In many cases, an OHT cart is used to transport the FOUP containing the wafers on the OHT cart.

The substrate processing process is managed by a tag attached to the FOUP in which the substrate is stored, and the contents of the tag are also updated sequentially as the substrate processing process progresses. Substrate processing steps are specified by the tag information attached to the FOUP, and subsequent necessary processing is managed by the computer based on this tag information.

[0003] At this time, since the time required for processing differs depending on the type of processing at each processing station, it is necessary to adjust the process time, and a stocker for temporarily waiting the FOUP is provided.

This stocker is equipped with a large number of FOUP loading shelves and a stagger crane that can carry FOUPs into or out of the specified shelves.

[0004] Now, the stocker and the processing station for performing various processes are an annular gauge of an OHT cart. Arranged along the way.

A plurality of annular tracks are provided according to the scale of the semiconductor manufacturing apparatus. Each circular track is formed by linking an intra-process circular track and an inter-process circular track. On these tracks, the OHT carriage is always controlled in a certain direction to receive stable traveling control, and transports a FOUP containing a substrate such as a wafer to a predetermined stocker or processing station.

The reason why the OHT cart is used as the FOUP transport means in the clean room is that there are various processing stations that are arranged along the OHT cart's travel path, and various stockers such as FOUP temporary standby stockers. This is due to the large degree of freedom in design when the equipment is placed on the ground and safety issues.

[0005] Now, the OHT carriage travels while holding the FOUP on the in-process annular track or the inter-process annular track, and a substrate such as a large number (for example, 25 sheets) of wafers detachably stored in the FOUP. On the other hand, it stops at the position facing the FOUP loading / unloading port at a given station for necessary processing (thin film formation, photolithography, cleaning, etching, inspection, etc.) according to the stage of the process.

Next, the gripping FOUP is lowered and placed on the loading / unloading port of the predetermined station.

[0006] The substrates housed in the FOUP placed in the loading / unloading port of this processing station are guided one by one into the station by a robot provided in the station and subjected to a predetermined process.

Although the time required for processing on this board varies depending on the type of processing, the OHT cart that has transported the FOUP is required to execute another transport command after placing the FOUP because it requires a corresponding time. This prevents a decline in the overall operating efficiency of the system.

[0007] By the way, the handling of FOUPs after the processing at the processing station is completed is sequentially as (1) to (5).

(1) The processing station issues a processed FOUP bow I removal request to the transport system controller. (2) The system controller issues a take-off command to an empty OHT cart waiting near the processing station.

(3) Upon receiving the take-up command, the OHT cart, after reaching the processing station, grips the FOUP placed at the loading / unloading port and transports it to the transport destination specified by the system controller.

(4) The system controller confirms that the processing station power has also been collected, and stores it in a stocker etc. to wait for another new FOUP waiting in orbit to carry the new FOUP to the processing station. Command OHT cart.

(5) The OHT cart that has received the transport command transports the new FOUP stored in the stocker to the processing station.

Therefore, the OHT cart that collects the processed FOUP from the processing station is different from the OHT cart that supplies a new FOU P.

On the other hand, if the FOUP bow I and supply to this processing station can be carried out with a single OHT cart, it can be expected that simplification of the take-up and supply operations and reduction of the transfer time will be achieved. When the OHT cart that has transported the new FOUP stored in the stocker etc. tries to place the FOUP in the loading / unloading port of the processing station, it is not yet picked up on that port. Collision with treated FOUP resulting in an accident.

[0008] Therefore, the FOUP placed on the FOUP loading / unloading port of a predetermined processing station and storing the substrate that has been processed at this processing station and the OHT cart are held and processed at this station. It is not possible to exchange with the FOUP that houses the board you are trying to use with a single OHT cart! /.

[0009] Patent Document 1 below is a technology that has attempted to execute such FOUP replacement with a single OHT cart.

This patent document 1 is mounted on a FOUP loading / unloading port of a predetermined processing station, and a FOUP in which processing in the processing station of each substrate held inside is completed, and the predetermined processing station. Contains the board to be processed The technology for exchanging FOUP is disclosed.

Specifically, there are five embodiments based on an OHT carriage having a pair of finger mechanisms for gripping FOUP. The outline of these embodiments will be described below.

[0010] Embodiment 1:

As shown in FIG. 3 of Patent Document 1, the OHT cart 1 includes a pair of finger mechanisms 18a and 18b for holding the FOUP along the traveling direction thereof. In addition, the two carriers (FOUP) 20a and 20b can be individually held and opened and controlled.

The processing device 2 is provided with a carrier loading / unloading port 8. On the carrier loading / unloading port 8, the OHT cart 1 can be moved in the traveling direction so that it can move forward and backward, and the substrates in the carrier can be positioned on the load port 21 that performs predetermined processing one by one. Is provided.

[0011] With the above configuration, first, a carrier storing a substrate scheduled to be processed by the processing apparatus 2 in FIG. 3 from a stocker or other processing apparatus installed along the traveling path of the OHT carriage 1 With the 20b gripped by the finger mechanism 18b, the OHT carriage 1 reaches the upper position of the carrier loading / unloading port 8.

Next, as the elevating belt 16 is fed, the gripper mechanism 17 is lowered, the substrate processed by the processing apparatus 2 is stored, and the carrier 20a placed on the load receiving table 45 is moved by the finger mechanism 18a. Hold it.

[0012] In this state, the gripper mechanism 17 is slightly lifted to form a gap between the load receiving table 46 and the carrier 20a, and the load receiving table 45 is moved to the lower part of the carrier 20b to lower the gripper mechanism. The carrier 20b is placed on the receiving table 45, and the gripping state of the carrier 20b by the finger mechanism 18b is released.

With the above operation, the carrier 20a on the receiving table 46 and containing the substrate processed by the processing device 2 is exchanged with the carrier 20b that stores the substrate scheduled to be processed by the processing device 2. be able to.

[0013] Embodiment 2:

The load receiving table 46 disclosed in FIG. 3 of Embodiment 1 is omitted, and disclosed in FIG. 6 of Patent Document 1. In this way, the configuration is simplified.

In general, it is common practice to ban OHT carts from running in the opposite direction because they significantly increase the risk of cart collisions and reduce transport efficiency. In the second embodiment, it is necessary to grip the carrier 20b storing the substrate to be processed by the finger mechanism at the position “B” in FIG. In Device 2, the work of exchanging the carrier with the gripper cannot be carried out continuously due to a process such as returning to the stocker every time.

[0014] Embodiment 3:

As shown in FIG. 7 of Patent Document 1, in the configuration of the first embodiment, the finger mechanisms 18a and 18b at the positions of “A” and “B” are independently provided by independent lifting belts 15a and 16b, respectively. It is configured to allow up / down control.

By configuring in this way, the degree of freedom as a device is increased, and a plurality of loading means can be operated freely without being affected by the lifting and lowering of other loading means, and as a result, alignment is achieved. This makes it easier and improves the transport efficiency of the OHT cart.

[0015] Embodiment 4:

As shown in FIG. 8 of Patent Document 1, the finger mechanism 18a and 18b in the positions of “A” and “B” are independent from each other in the same basic configuration as in the second embodiment, as in the third embodiment. Ascending / descending belts 16a and 16b can be controlled independently.

[0016] Embodiment 5:

With the configuration shown in FIG. 10 of Patent Document 1, the carrier can be moved from the “A” position to the “B” position when the carrier 18 is stored in the OHT cart 1! /, Ru With the attachment of this configuration, the configuration disclosed in the above-described Embodiments 2 and 4 (the OHT carrier cart disclosed in Embodiments 1 and 3 can be moved along the traveling direction of the carriage 1 and in the opposite direction. In a configuration that does not have a table) and in a continuously different processing apparatus 2 without returning to the stocker, a carrier 20a containing processed substrates and a substrate scheduled for processing are stored. It is possible to replace the used carrier 20b.

Patent Document 1: JP 2005-22539 Disclosure of the invention

Problems to be solved by the invention

[0017] As described above, the substrate is disposed along the in-process annular track, and the substrate in the FOUP is cleaned.

Each processing station that performs processing specified from CVD and many other types has a FOUP loading / unloading port.

In this FOUP loading / unloading port, the FOUP containing the substrate scheduled for processing at the corresponding processing station is loaded by the OHT cart.

Next, a predetermined process is performed one by one on the board stored in the FOUP, and when all the boards have completed the predetermined process and returned to the FOUP, the FOUP is stored in the stocker by the OHT cart. It is transported to another predetermined processing station for the next processing.

[0018] By the way, the OHT cart at the FOUP loading / unloading port of the processing station.

In the FOUP loading / unloading operation, the OHT cart that holds the FOUP that contains the substrate to be processed at the processing station has already processed the gripped FOUP placed on the processing station. It is difficult to directly replace the FOUP that houses the board.

Therefore, at the FOUP loading / unloading port of one processing station, it is necessary to carry out FOUP for storing processed substrates and loading FOUP for storing unprocessed substrates on separate OHT carts. There is.

[0019] Therefore, all the substrates have been subjected to predetermined processing in one processing station, these substrates are stored, and the FOUP placed on the FOUP loading / unloading port of the processing station is in-process annular. It is carried out by an empty OHT cart that is running on the track and does not hold the FOUP.

After that, it is carried into the FOUP loading / unloading port of the processing station by another OHT cart running on the annular track in the FOUP force range that stores the substrate to be processed at the processing station.

As a result, FOUP loading and unloading ports at the FOUP loading / unloading port of the processing station caused a considerable loss of time and decreased the processing efficiency of the substrates stored in the FOUP. [0020] There is Patent Document 1 as a technique whose main purpose is to solve such problems. The technique disclosed in Patent Document 1 is a method for loading and unloading all FOUPs that are placed in a FOUP loading / unloading port in a predetermined processing station and that have been stored in the processing station. The FOUP containing the substrate to be processed at the station can be loaded into the FOUP loading / unloading port at the same time! /

[0021] To achieve this, the OHT cart is used for gripping two FOUPs along the traveling direction of the OHT cart, as shown in Figs. 3, 6, 7, and 8 of Patent Document 1. Use a special OHT trolley equipped with other clipper devices.

Furthermore, in order to shift to a processing station that continuously receives different processes without returning to the stocker, a load receiving table disclosed in FIGS. 3 and 7 of Patent Document 1 and movable in the traveling direction of the OHT cart 1 is disclosed. It is necessary to provide 45 or move the FOUP in the gripped state while it is gripped by the OHT transport cart as shown in Fig. 10.

[0022] As described above, the technique disclosed in Patent Document 1 is based on a FOUP that is placed on a FOUP loading / unloading port of a predetermined processing station and stores a substrate that has undergone predetermined processing, and a predetermined processing station. The replacement work with the FOUP containing the substrate to be processed can be done with the only OHT cart.

However, for this purpose, as described above, a highly versatile OHT transport cart cannot be used, which increases the cost of the OHT transport cart, and at the same time, it is necessary to add a very complicated mechanism to move the FOUP.

[0023] Therefore, an object of the present invention is to use a general-purpose OHT cart that is responsible for raising and lowering and transporting one FOUP by one unit, and is arranged along the in-process annular track and stored in the FOUP. The FOUP that is placed on the FOUP loading / unloading port of the processing station that performs the necessary processing on the substrate and that holds the processed substrate at the processing station, and is gripped by the OHT cart, and is processed at the processing station. To provide a method for making the FOUP containing a substrate to be processed exchangeable, and an apparatus for carrying out the method.

Means for solving the problem

[0024] In order to solve the above-mentioned problem, according to the invention described in claim 1, the following steps are included. A method for receiving and delivering articles on a suspended lifting transport (OHT) cart is provided. A step of gripping and lowering an article to be carried into a predetermined station by the gripping portion and placing the article on the first part of a suspended temporary storage shelf in which the first and second parts are arranged vertically;

A step of holding and lifting the article for unloading placed on the article loading / unloading port of the predetermined station by the gripping part and placing it on the second part of the suspension-type temporary storage shelf; the suspension-type A step of grasping and lowering the carry-in article placed on the first part of the temporary storage shelf by the gripping part and placing it on the article carry-in / out port;

A step of grasping and lifting the unloading article placed on the second part of the suspension-type temporary storage shelf by the grasping portion;

[0025] According to the invention of claim 1, an article that is gripped by an OHT carriage that is subjected to travel control in a predetermined direction along the in-process annular track and is about to undergo processing at a predetermined processing station. In addition, the OHT cart can be replaced by using a suspended temporary storage shelf function for exchanging with an article that has been placed on an article carry-in / carry-in port at the prescribed treatment station and has already completed the treatment at the prescribed treatment station. This can be done only by lifting control of the stand alone.

Therefore, the article carrying-in OHT cart to the article carrying-in / out port at the predetermined processing station and the article carrying-out OHT cart from the article carrying-in / out port can be made common. In addition, the OHT cart may be a general-purpose one that holds one article by one unit and moves it up and down. In addition, there is no need to make a special OHT cart. Therefore, it is possible to efficiently carry in the unloaded article on the article loading / unloading port at the processing station and carry out the processed article.

[0026] The method for delivering an article in the OHT transport cart according to claim 2 is a storage box in which the article is detachably accommodated in the semiconductor substrate,

The station may be a surface treatment facility for a semiconductor substrate that is disposed in a proper position along an annular track of the suspended lift carriage and accommodated in the storage box.

According to the invention according to claim 2, the effect of the invention according to claim 1 cited above is originally placed on a storage box (FOUP) loading / unloading port in a predetermined processing station, and the processing castle When a storage box containing substrates that have been processed in a tray is unloaded, there is a delay. After that, the FOUP containing the substrate to be processed at the processing station is placed on the FOUP loading / unloading port.

Therefore, various processes (thin film formation, photolithography, cleaning, etching, inspection, etc.) can be efficiently performed on the substrate stored in the FOUP.

[0027] According to the invention of claim 3,

A suspension type lifting / lowering carriage having a gripping part for gripping an article for loading / unloading, and a loading / unloading that is installed at a predetermined location along a traveling path of the suspension type lifting / lowering carriage and on which the item to be carried is placed At least one station having a port;

A first storage part and a second storage part arranged in the vertical direction, each having a temporary storage shelf located above the loading / unloading port of each station;

The first part and the second part of the temporary storage shelf have first and second slide plates, respectively, and the first and second slide plates are

Only when storing / removing the goods to be carried in, the first slide plate moves forward / backward in order to send / receive the goods to / from the suspended lift carriage.

Only in the case of storing and taking out the article to be carried out, the second slide plate advances and retreats in order to transfer the article to and from the suspended lift carriage.

In other cases, there is provided an article transfer device in a suspended lifting transport cart that is driven and controlled to allow the lifting motion of the suspended lifting transport cart.

The invention according to claim 3 relates to an apparatus for carrying out the invention according to claim 1, and the effect of the invention is equivalent to the effect of the invention according to claim 1, and the description thereof is duplicated. avoid.

[0028] The article delivery device in the OHT conveyance cart according to claim 4 is a storage box (FOUP) in which the article detachably accommodates the semiconductor substrate,

4. The transfer of articles in the suspended lifting transport cart according to claim 3, wherein the station is a processing facility for semiconductor substrates that are disposed at appropriate positions along the annular track of the suspended lifting transport cart and are stored in the storage box. apparatus.

According to the invention according to claim 4, the effect of the invention according to claim 3 that is cited is the same as that of claim 2. Brief Description of Drawings

FIG. 1 is a plan view showing an application system of the present invention.

[Fig. 2] Fig. 2 is a main part configuration diagram for carrying out the present invention.

FIG. 3 is a configuration diagram showing a concept of a shelf board of a suspended shelf according to the present invention.

FIG. 4 is a schematic diagram showing the FOUP placement status on a suspended shelf for explaining the method of the present invention.

Explanation of symbols

[0030] In-process circular orbit

5 Processing station

5a FOUP loading / unloading port

7 OHT cart

7d lifting belt

7f Finger mechanism

9a ゝ 9b FOUP

10 Suspended shelf equipment

10b, 10c shelf material

10bx, lOcx fixed plate

10by, 10cy slide board

20 OHB controller

BEST MODE FOR CARRYING OUT THE INVENTION

[0031] Hereinafter, preferred embodiments of the present invention will be described with reference to the drawings.

First, the outline of the drawing will be described. FIG. 1 is a plan view showing an application system of the present invention, FIG. 2 is a main part configuration diagram for carrying out the present invention, and FIG. 3 is a shelf board of a suspended shelf according to the present invention. FIG. 4 is a schematic diagram showing the FOUP placement status on a suspended shelf for explaining the method of the present invention.

Next, the configuration of the entire system to which the present invention is applied will be described with reference to FIG. 1. In FIG. 1, reference numeral 1 denotes a bay, which is provided in a plurality of continuous areas. Each bay 1 is provided with an in-process annular track 2 for traveling and guiding an OHT cart, which will be described later. The circular orbit 2 in each process is minutes Linkage is maintained by the inter-process annular track 4 via the bifurcated track 3. The OHT transport cart is configured to be able to travel on the above-mentioned tracks 2, 3, and 4 in a predetermined direction.

[0033] Reference numeral 5 denotes a processing station arranged along the in-process annular track 2. The processing station 5 performs any processing such as thin film formation, photolithography, cleaning, etching, and inspection on a semiconductor substrate such as a wafer stored in the FOUP. In addition, the processing stations 5 are arranged along the in-process annular track 2 laid in each bay 1 so as to adapt to the processing order as much as possible. Each processing station 5 has a FOUP loading / unloading port 5a. This FOUP loading / unloading port 5a is used to carry in the FOUP containing the substrate that is scheduled to be processed by the OHT cart, and to carry out the FOUP containing the substrate that has been subjected to the predetermined processing.

[0034] Reference numeral 6 denotes a stocker, which is arranged at an appropriate position on the in-process annular track 2. The stocker 6 stores the FOUP that contains the board that has completed all the processing, or stores the FOUP in the standby state of the FOUP that contains the board that is scheduled for the predetermined processing. The stocker 6 has a F OUP carry-in port 6a and a carry-out port 6b.

Reference numeral 7 denotes an OHT cart, which has a function of driving the in-process annular track 2, the branch track 3 and the inter-process annular track 4 in a predetermined direction, and a lifting / holding function of the FOUP in the gripped state. 8 is a system controller that controls OHT transport carts such as OHT transport cart 7 travel route instructions and anti-collision control.

Now, a specific example of the embodiment will be described with reference to FIG. 2 and FIG. 3 showing the main configuration of the present invention. In FIG. 2, 9a and 9b are FOUPs, and FOUP 9a is placed on the FOUP loading / unloading port 5a of the processing station 5.

Then, predetermined processing is performed in the processing station 5 accommodated inside the FOUP 9a! /, And the substrates are not shown in the drawing! All the substrates are processed one by one by the robot. After the process is completed, it is in a standby state for the transfer to another process station 5 or the stocker 6 (see FIG. 1) that performs the predetermined process of! /

[0036] The OHT carriage 7 is a drive'running mechanism 7a that engages with any of the in-process annular track 2, the branching track 3, or the inter-process annular track 4 (the state in FIG. 2 indicates the in-process annular track 2). , Cart position adjusting mechanism 7b, lifting mechanism 7c, lifting belt 7d, grip mechanism 7e and finger mechanism 7f Made.

As specifically shown in Patent Document 1, the driving / running mechanism 7a receives electric power from non-contact power supply and obtains a propulsive force based on the principle of a linear motor, and the system controller 8 (see FIG. 1). The traveling direction is regulated by the traveling control by.

[0037] In the FOUP 9b, substrates to be processed in a predetermined processing station 5 are stored. This FOUP 9b is in a position corresponding to the FOUP loading / unloading port 5a of the processing station 5. At this time, the FOUP 9b is gripped by the OHT cart by gripping the flange portion of the FOUP 9b by the finger mechanism 7f of the OHT transport cart 7.

[0038] Reference numeral 10 denotes a suspended shelf device (hereinafter referred to as OHB (Overhead Hoist Buffer)), which has two upper and lower shelf members 10b, 10c installed on a columnar body 10a extending downward from the ceiling. The shelf member 10b includes a fixed plate 10bx and a slide plate 10by, and the shelf member 10c includes a fixed plate lOcx and a slide plate 10cy.

The shelf members 10b and 10c have the same configuration, and a detailed configuration will be described with reference to FIG. 4 taking the shelf member 10b as an example. In FIG. 4, 10d is a kinematic pin. The kinematic pin 10d is fitted into the hole formed on the bottom surface of the FOUP 9a, 9b only when the FOUP 9a, 9b is properly placed on the plane of the slide plate 10by. The proper fitting state of the kinematic pin 10d and the hole formed on the bottom surface of the FOUP is detected by the sensor 10e disposed on the surface of the slide plate 10by.

[0039] Reference numeral 10f denotes a gear which is installed at an appropriate position on the fixed plate 10bx side, and its rotational speed and direction are controlled by the OHB controller 20 (see FIG. 1) by a motor with a reduction gear (not shown).

10g is a linear gear which is provided on the bottom surface of the slide plate 10by in the forward / backward direction of the slide plate 10by and at a position where it meets the gear 10f.

It should be noted that the details of the guide mechanism of the slide plate 10by with respect to the fixed plate 10bx are provided by means of well-known appropriate force.

With this configuration, the slide plates 10by and 10cy move forward and backward toward the position force OHT cart 7 accommodated in the OHB 10 as seen in the dotted line portion of FIG.

[0040] In the above configuration, the process inner ring laid on one bay 1 in the overall configuration of FIG. OHT cart 7 that travels along the track 3 arrives at the processing station 5 where the substrate processing is planned while holding the FOUP 9b, and the processing station 5 has already been loaded for FOUP as shown in Fig. 2. When the FOUP 9a containing the substrate that has been processed in the processing station 5 is placed in the carry-out port 5a, the arrangement exchange operation between the FOUP 9a and the FO UP 9b is also described with reference to FIG. explain.

[0041] Operation 1: The slide plate 10by of the shelf member 10b of the OHB 10 extends to the position of the dotted line in FIG.

Action 2: The lifting belt 7d of the OHT cart 7 is fed out, and the FOUP 9b is placed on the slide plate 10by on the shelf member 10b.

Action 3: The sensor 10e confirms that the kinematic pin 10d shown in Fig. 3 is properly engaged with the bottom surface of the FOUP 9b, and the finger mechanism 7f of the OHT cart 7 disengages from the flange of the FOUP 9b. The lifting belt 7d is scraped so that the mechanism 7f is slightly raised. Action 4: The slide plate 10by slides the slide plate 10by in the direction overlapping the fixed plate 10bx by driving the gear 10f shown in FIG. At this time, OHB10 is in the state shown in Fig. 4 (A).

[0042] Action 5: The lifting belt 7d of the OHT cart 7 is fed out, the finger mechanism 7f is lowered, and reaches the flange portion of the FOUP 9a placed on the FOUP loading / unloading port 5a of the processing station 5, FOUP9a is held by finger machine lecture 7f.

Action 6: By lifting the lifting belt, the FOUP 9a is raised until at least the bottom surface position of the FOUP 9a is higher than the planar position of the slide plate 10cy of the shelf member 10c.

Action 7: In this state, the slide plate 10cy of the shelf member 10c of the OHB10 extends to the dotted line position.

[0043] Operation 8: When the sensor 10e confirms that the kinematic pin 10d shown in Fig. 3 is properly engaged with the bottom surface of the FOUP 9a, the finger mechanism 7f of the OHT cart 7 is engaged with the flange of the FOUP 9a. And lift the elevating belt 7d so that the finger mechanism 7f rises slightly.

Action 9: The slide plate 10by slides the slide plate 10by in the direction overlapping the fixed plate 10ax by driving the gear 10f shown in FIG. At this time, the suspended shelf apparatus 10 is in the state shown in FIG. [0044] Operation 10: The lifting belt 7d is scraped and the finger mechanism 7f is raised to the uppermost position.

Action 11: OHB10 shelf member 10b slide plate lOby extends to the dotted line with FOUP9b mounted.

Action 12: The lifting belt 7d of the OHT carriage 7 is fed out, the finger mechanism 7f is lowered, reaches the flange portion of the FOUP 9a placed on the slide plate lOby, and the FOUP 9a is gripped by the finger mechanism 7f.

[0045] Action 13: Remove the lifting belt 7d slightly, move the FOUP 9a upward, and disengage the FOUP 9a from the kinematic pin 10d.

Operation 14: The slide plate lOby slides the slide plate lOby in a direction overlapping the fixed plate 10bx by driving the gear 10f shown in FIG.

Action 15: Feed the lifting belt 7d, lower the FOUP 9a, and place the FOUP 9a on the FOUP loading / unloading port 5a of the processing station 5. At this time, OHB10 is in the state shown in Fig. 4 (C).

[0046] Operation 16: Disengagement of the flange of the FOUP 9a from the finger mechanism 7f, and at least the lowest position of the finger mechanism 7f of the OHT transport carriage 7 is placed on the slide plate lOcy. Raise until it is higher than the top position of the flange.

Action 17: OHB10 shelf member 10c slide plate lOcy extends to the dotted line with FOUP9a placed.

Action 18: Finger mechanism 7f descends, grips the flange of FOUP9a placed on slide plate lOcy, and rises again.

Action 19: The slide plate lOcy is slid in the direction overlapping the fixed plate lOcx by driving the gear 10f shown in FIG. At this time, OHB10 is in the state shown in Fig. 4 (D).

[0047] Since each of the operations 1 to 19 is sequentially performed in response to a signal from the OHB controller 20, it is placed on the FOUP loading / unloading port 5a of the processing station 5 and is placed in the processing station 5 inside. Thus, the FOUP 9a storing the substrate that has completed the predetermined processing and the FOUP 9b storing the substrate to be processed at the processing station 5 are exchanged efficiently and quickly. As described above, the preferred embodiments of the present invention have been described. However, the present invention is not limited to these, and there can be various embodiments. For example, in FIG. 2, the OHB 10 has a ceiling force in a direction perpendicular to the in-process annular track 2. The ceiling force is suspended by the suspended columnar body 10a OHB10 is parallel to the in-process annular track 2 and the upper support part of the columnar body 10a is the in-process annular track, and OHB10 is the in-process annular track 2 There is no problem even if the configuration is provided directly below. In some cases, it is advantageous to install a suspension rack device directly under the annular track in the process from the viewpoint of space utilization in the clean room.

In addition, in FIG. 1, the OHB controller 20 controls a plurality of OHBs with a single OHB controller. However, the OHB controller 20 may be arranged separately for each OHB and controlled independently for each OHB.

[0049] Although the invention has been described in detail and with reference to specific embodiments, it will be apparent to those skilled in the art that various changes and modifications can be made without departing from the spirit and scope of the invention. is there.

This application is based on a Japanese patent application filed on September 30, 2005 (Japanese Patent Application No. 2005-285718), the contents of which are incorporated herein by reference.

Industrial applicability

[0050] The article loading / unloading OHT cart to the article loading / unloading port at a predetermined processing station and the article loading / unloading port from the article loading / unloading port can be made common. In addition, the OHT cart can be a general-purpose one that holds a single article and moves it up and down, so there is no need to make a special OHT cart. Furthermore, it is possible to efficiently carry in unprocessed articles and carry out processed articles on the article loading / unloading port at the processing station.

Claims

The scope of the claims

[1] A method for delivering goods in a suspended lift carriage,

Gripping and lowering articles to be carried into a predetermined station by the gripping unit, and placing the first and second parts on the first part of the suspended temporary storage shelf arranged in the vertical direction; and

A step of grasping and lifting the article for unloading placed at the article loading / unloading port of the predetermined station by the gripping part and placing the article on the second part of the suspension-type temporary storage shelf;

A step of gripping and lowering a carry-in article placed on the first part of the suspended temporary storage shelf by the gripping part and placing it on the article carry-in / out port;

A method for delivering an article, comprising the step of grasping and lifting the article for delivery placed on the second part of the suspension-type temporary storage shelf by the grasping portion.

[2] A storage box in which the article stores the semiconductor substrate in a detachable manner,

2. The article in the suspended lifting / lowering carriage according to claim 1, wherein the station is a surface treatment facility for a semiconductor substrate that is disposed at a proper position along an annular track of the suspended lifting / lowering carriage and is stored in the storage box. How to give and receive.

[3] Suspension type lifting and lowering carriage having a gripping part for gripping articles for loading and unloading;

At least one station having a loading / unloading port installed at a predetermined location along a traveling path of the suspended lifting / lowering carriage and on which the item to be unloaded is placed;

In other cases, an article transfer device in a suspended lift transport cart that is driven and controlled to allow the lift motion of the suspended lift transport cart. The article is a storage box for detachably storing a semiconductor substrate,