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WO2007012589A1 - Actionneur piezo-ceramique - Google Patents

Actionneur piezo-ceramique Download PDF

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Publication number
WO2007012589A1
WO2007012589A1 PCT/EP2006/064407 EP2006064407W WO2007012589A1 WO 2007012589 A1 WO2007012589 A1 WO 2007012589A1 EP 2006064407 W EP2006064407 W EP 2006064407W WO 2007012589 A1 WO2007012589 A1 WO 2007012589A1
Authority
WO
WIPO (PCT)
Prior art keywords
metal
absorbent
layers
actuator
ceramic layers
Prior art date
Application number
PCT/EP2006/064407
Other languages
German (de)
English (en)
Inventor
Stefan Henneck
Georg Hejtmann
Marc Kuehlein
Alfons Kelnberger
Original Assignee
Robert Bosch Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch Gmbh filed Critical Robert Bosch Gmbh
Priority to EP06764208A priority Critical patent/EP1911107A1/fr
Publication of WO2007012589A1 publication Critical patent/WO2007012589A1/fr

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F02—COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
    • F02M—SUPPLYING COMBUSTION ENGINES IN GENERAL WITH COMBUSTIBLE MIXTURES OR CONSTITUENTS THEREOF
    • F02M51/00—Fuel-injection apparatus characterised by being operated electrically
    • F02M51/06—Injectors peculiar thereto with means directly operating the valve needle
    • F02M51/0603—Injectors peculiar thereto with means directly operating the valve needle using piezoelectric or magnetostrictive operating means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F02—COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
    • F02M—SUPPLYING COMBUSTION ENGINES IN GENERAL WITH COMBUSTIBLE MIXTURES OR CONSTITUENTS THEREOF
    • F02M61/00—Fuel-injectors not provided for in groups F02M39/00 - F02M57/00 or F02M67/00
    • F02M61/04—Fuel-injectors not provided for in groups F02M39/00 - F02M57/00 or F02M67/00 having valves, e.g. having a plurality of valves in series
    • F02M61/08—Fuel-injectors not provided for in groups F02M39/00 - F02M57/00 or F02M67/00 having valves, e.g. having a plurality of valves in series the valves opening in direction of fuel flow
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/05—Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes
    • H10N30/053—Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes by integrally sintering piezoelectric or electrostrictive bodies and electrodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/06—Forming electrodes or interconnections, e.g. leads or terminals
    • H10N30/067—Forming single-layered electrodes of multilayered piezoelectric or electrostrictive parts
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H10N30/877—Conductive materials
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/85—Piezoelectric or electrostrictive active materials
    • H10N30/853—Ceramic compositions
    • H10N30/8548—Lead-based oxides
    • H10N30/8554—Lead-zirconium titanate [PZT] based

Definitions

  • the invention relates to a piezoceramic actuator, in particular an actuator for a fuel injection valve, and a fuel injection valve with such a piezoceramic actuator.
  • the invention relates to a piezoceramic actuator for an injector for fuel injection systems of air-compressing, self-igniting internal combustion engines.
  • a device for a fuel injection valve with a piezoelectric actuator is known.
  • the known actuator in this case has contact paths, which are introduced into internal, continuous recesses of the actuator, on the one hand to establish a connection with the positive electrodes and on the other hand with the negative electrodes of the actuator.
  • DE 102 31 470 A1 discloses a material mixing technique for forming and correcting the composition of single-phase multicomponent materials.
  • the known mixing technique is suitable for the production of a material composition for the production of piezoelectric ceramic components based on lead zirconate titanate.
  • Semi-finished products made thereby can be used in the manufacture of a known piezoelectric actuator for a fuel injector.
  • a plurality of ceramic layers can be stacked on top of one another, with electrically conductive intermediate layers being provided between the ceramic layers, which form internal electrodes.
  • the electrically conductive intermediate layers may consist of a mixture of silver and platinum or a mixture of silver and palladium, whereby the melting point of silver is increased in order to prevent melting of the intermediate layers during a sintering process.
  • the piezoceramic actuator according to the invention with the features of claim 1 has the advantage that the electrically conductive intermediate layers may consist essentially of a metal, in particular of silver, whereby the unit cost is reduced.
  • the fuel injection valve according to the invention with the features of claim 12 has the corresponding advantage.
  • the inventive method for producing a piezoceramic actuator having the features of claim 13 has the advantage that the interlayer comprising the metal, in particular the silver, together with the ceramic layers can be sintered at a relatively high temperature, wherein the predetermined shape of the intermediate layers also without the addition of platinum metals remains.
  • silver with the lead oxide contained in the starting material for the lead zirconate titanate layers forms a mixture resulting in lowering of melting point.
  • a liquid phase can form which causes a substantial change in shape of the intermediate layers.
  • the liquid phase may locally contract due to the surface tension, so that holes and cracks are formed in the fabricated electrically conductive intermediate layers.
  • the liquid phase of lead oxide and silver may diffuse or migrate into the surrounding ceramic layers during sintering, thereby adversely affecting the properties of the lead zirconate titanate ceramic, particularly in terms of elongation capacity.
  • an excess of lead oxide of, for example, 1 mol% to 3 mol% is advantageous for producing a dense ceramic during sintering at a low temperature level ( ⁇ 1000 ° C).
  • the excess of lead oxide promotes diffusion of lead oxide into the interlayers, thereby increasing the problems described.
  • the intermediate layer Due to the absorption medium contained in the intermediate layer, the lead oxide reaching into the intermediate layer is captured, so that the formation of a liquid phase with the silver is at least partially prevented.
  • the intermediate layers can be formed without the use of platinum metals, wherein process-related damage is at least largely prevented.
  • the formation of the ceramic layers and the electrically conductive intermediate layers is thereby improved, in particular in the region of the interface between the ceramic layers and the silver layers, whereby the electrical properties of the actuator are improved.
  • the absorbent comprises a titanium oxide, in particular titanium dioxide, and / or a zirconium oxide, in particular zirconium dioxide.
  • the titanium oxide or zirconium oxide attracts the lead oxide and forms a crystalline compound with it.
  • titanium dioxide with lead oxide forms lead titanate, i. a thermodynamically stable crystalline compound which is in particular more stable than a melt of lead oxide and silver.
  • zirconium dioxide with a lead oxide forms a stable crystalline compound.
  • the absorbent consists of a titanium oxide or has a large proportion of titanium oxide, since this has particularly good absorption properties with respect to lead oxide.
  • the intermediate layers consist at least substantially of silver and the absorbent, which is at least partially connected to the material component, in particular the lead oxide, wherein the proportion of the absorbent is about 1% by volume to about 10% by volume.
  • the intermediate layer is preferably free of platinum and palladium, since these are no longer necessary to increase the melting temperature and thus a cost-effective production is made possible. Further, the intermediate layer is preferably free of copper and other melting point-increasing alloying components, thus enabling a simplified manufacturing process that can be done in an air atmosphere.
  • a substance contained in the absorbent may also be contained in the ceramic layers. This has the advantage that the resulting crystalline compounds represent no disturbing secondary phase between the absorbent and the material component, in particular the lead oxide.
  • zirconia and titania are two of the three major constituents in the synthesis of lead zirconate titanate mixed crystals, each crystallizing with lead oxide as the third major constituent in the perovskite structure, so that the constituent lead zirconate and lead titanate compounds are not interfering secondary phases.
  • sintering In the manufacture of the actuator sintering can take place between 870 ° C and 930 ° C. In particular, sintering may be at least substantially at temperatures somewhat below the melting point of silver. In the production of actuators, consideration must be given to the quality of a production furnace or the like in order not to exceed the melting point of silver. If, for example, temperature fluctuations in the range of 20 ° C occur within the production furnace, plus a safety margin of 10 ° C results in a default of 930 ° C for the maximum sintering temperature to be set.
  • FIG. 1 shows an embodiment of a fuel injection valve with an actuator according to the invention in a schematic sectional view.
  • Fig. 2 is a lead oxide silver phase diagram for explaining the present invention.
  • Fig. 3 shows an abstract section through an actuator according to the invention in a simplified representation to illustrate the present invention. Description of the embodiment
  • Fig. 1 shows an embodiment of a fuel injection valve 1 of the invention.
  • the fuel injection valve 1 can be used, in particular, as an injector for fuel injection systems of mixture-compressing, self-igniting
  • the fuel injection valve 1 is suitable for commercial vehicles or passenger cars.
  • a preferred use of the fuel injection valve 1 is for a fuel injection system with a common rail, the diesel fuel under high pressure leads to a plurality of fuel injection valves 1.
  • the fuel injection valve 1 has an actuator 2.
  • the actuator 2 is particularly suitable for such a fuel injection valve 1.
  • the fuel injection valve 1 according to the invention and the actuator 2 according to the invention are also suitable for other applications.
  • the fuel injection valve 1 has a multi-part valve housing 3, which is connected to a valve seat body 4. On the valve seat body 4, a valve seat surface 5 is formed, which cooperates with a valve closing body 6 to a sealing seat. In this case, the valve closing body 6 is connected to a valve needle 7 which is guided in an axial direction 9 by a valve needle guide formed by the housing part 8 of the valve housing 3. Further, a valve spring 10 is provided, which acts on the actuator 2 via a pressure plate 11 with a bias voltage. Furthermore, the valve housing 3 has a fuel inlet port 12, to which a fuel line (not shown) for supplying fuel to the fuel injection valve 1 can be connected. Through the fuel inlet 12, the fuel is in one
  • the actuator is connected via a first electrical line 20 and a second electrical line 21 with an (not shown) electrical supply line to act on the actuator 2 for actuating the fuel injection valve 1 with an electrical voltage, wherein the actuator 2 is loaded for expansion and the Shortening can be unloaded.
  • the actuator 2 has internal recesses 22, 23 open on one side, each of which is filled with a conductive mass 24, 25, the first electrical lead 20 being connected to the conductive mass 24 and the second electrical lead 21 being connected to the conductive mass 25 ,
  • the actuator 2 has a multiplicity of ceramic layers 26, 27, the ceramic layers 26, 27 being marked in FIG. 1. Between the ceramic layers electrically conductive intermediate layers 28, 29 are provided, wherein in Fig. 1, the intermediate layers 28, 29 are marked. To simplify the illustration, only a few ceramic layers are shown.
  • the actuator 2 can also have more than 100 layers, in particular approximately 400 ceramic layers 26, 27 and approximately 400 intermediate layers 28, 29.
  • the conductive mass 25 connects the part of the intermediate layers represented by the intermediate layer 28 to each other and to the second electrical line 21.
  • the conductive mass 24 connects the part of the intermediate layers represented by the intermediate layer 29 to each other and to the first electrical line 20.
  • the electrically conductive intermediate layers 28, 29 form electrodes (electrode layers).
  • the electrically conductive intermediate layers 28, 29 consist essentially of pure silver and are in particular free of platinum metals, such as platinum or palladium, and free of copper or other metals suitable for the alloying of silver, by which a melting point increase of the alloy could be achieved but due to their oxidation susceptibility require a higher process cost.
  • the ceramic layers 26, 27 are based on lead zirconate titanate (Pb (Zr, Ti) O 3 ). The construction and manufacture of the actuator 2 of the embodiment of the invention is described in more detail with reference to Figures 2 and 3.
  • Fig. 2 shows a lead oxide-silver phase diagram for explaining the present invention.
  • the abscissa represents the proportion of silver in mol% of the common composition of lead oxide and silver.
  • the temperature is plotted on the ordinate, wherein the representation is limited to the range of 700 ° C to 1000 ° C.
  • Lead (II) oxide PbO melts at 884 ° C and boils at 1470 ° C. Upon cooling, it solidifies into a crystalline-leafless mass (litharge).
  • Silver is a metal that crystallizes in regular octahedra (cubic-dense sphere packing) that melts at 960.8 ° C and boils at 2212 ° C.
  • octahedra cubic-dense sphere packing
  • a eutectic reaction wherein the eutectic point 30 by 8.3 mol% of silver and a temperature of 825 ° C is characterized.
  • a lead oxide-silver liquid phase can form, provided that a corresponding excess of lead oxide is present.
  • Point 31 which limits the range in which, besides the melt of lead oxide and silver, silver is also present in solid or crystalline form, is characterized by 11.65 mol% silver and a temperature somewhat below the melting temperature of silver.
  • the melting point of pure lead oxide is denoted by 32 in FIG. 2.
  • the melting point of pure silver is designated 34 in FIG.
  • lead oxide and silver do not form a crystalline compound so that they separate below 825 ° C. Lead oxide and silver are then next to each other. This area is labeled in FIG. 2 with PbO + Ag.
  • molten lead oxide constituents of the ceramic layers can diffuse into the adjacent intermediate layers, so that contact with the silver in the intermediate layer is possible, resulting in a melt of lead oxide and silver.
  • the absorbers provided in the intermediate layers act as lead oxide scavengers and form a crystalline compound with the lead oxide. This prevents the formation of a melt of lead oxide and silver.
  • Fig. 3 shows a partial sectional view of an actuator 2 in a simplified detail representation for explaining the invention.
  • the actuator 2 may serve a ceramic foil based on lead zirconate titanate, with a lead oxide excess of 1 mol% to 3 mol% for the subsequent compression of the mixed oxide ceramic during the manufacturing process is advantageous.
  • To prepare the intermediate layer is powdered silver, which may be agglomerated due to storage. Therefore, first of all, a preparatory process step takes place in which structures formed by deagglomeration of the powder are broken up. This can be done for example by a ball mill, which is set up for the preparation of a homogeneous powder without further particle size distribution.
  • the powdery silver To the powdery silver are added other media such as an organic solvent, a binder and a dispersant for wetting the powder particles. Further, an absorbent of titania and / or zirconia is added to the powdery silver. The material comprising silver is then mixed with the absorbent together to form a mixture.
  • other media such as an organic solvent, a binder and a dispersant for wetting the powder particles.
  • an absorbent of titania and / or zirconia is added to the powdery silver.
  • the material comprising silver is then mixed with the absorbent together to form a mixture.
  • this mixture to the raw ceramic layers, which are formed as a ceramic film, can be done by means of a print template by screen printing. Subsequently, the raw ceramic layers provided with the mixture are stacked on each other. In this case, a stacking of a few hundred, especially three hundred layers take place.
  • the coated green compact is subjected to a pressure of the order of 1 MPa and a temperature of 120 ° C in an ordinary, that is oxygen-containing, atmosphere to compress the green compact and allow the solvent to escape. This is followed by debinding.
  • the sintering takes place.
  • the sintering is also carried out in ordinary atmosphere, with relatively high temperatures are possible.
  • the sintering between 870 ° C and 930 ° C, especially between 900 ° C and 930 ° C take place.
  • the intermediate layer 28 is connected to the ceramic layer 27 at the bonding surface 38.
  • the ceramic layer 27 consists of a base material 39 based on lead zirconate titanate, wherein a lead oxide excess by lead oxide grains 40a to 40i is shown for illustration.
  • the intermediate layer 28 essentially consists of a base material 41 consisting of silver and an absorbent 42 of titanium dioxide.
  • the absorbent 42 is shown in Fig. 3 illustratively by grains 42a to 42h from the absorbent 42. Titanium oxide is very reactive with respect to lead oxide and therefore traps out of the ceramic layer 27 into the intermediate layer 28 diffusing lead oxide. It forms a crystalline compound 43 between the absorbent and the lead oxide.
  • the lead oxide grain 4Oi may melt and continue to penetrate into the intermediate layer 28.
  • the lead oxide grain 40i may then be captured from the absorbent 42, for example by the grain 42h.
  • Crystalline compounds 43 which have already formed due to such trapping, are shown in FIG. 3 by the grains 43a to 43e.
  • the grains 43 a to 43 e consist in this case of lead titanate (PbTiO 3 ), which is thermodynamically stable and in particular more stable than a melt of lead oxide and silver.
  • the proportion of the absorbent 42 in the intermediate layer 28 is preferably about 1 vol.% To about 10 vol.%. Further, the electrically conductive intermediate layer 28 is free of platinum metals and copper or other melting point-increasing alloying constituents.
  • a further advantage of the addition of zirconium oxide or titanium oxide is that the shrinkage differences between the intermediate layers 28, 29 forming the internal electrodes and the ceramic layers 26, 27 occurring during the pressing of the layers are substantially reduced, so that defects such as Delamination cracks should be avoided.
  • powders having specific surface areas between about 4.5 m 2 / g and 9 m 2 / g are used. For these specific surfaces, there is sufficient activity of the powders and at the same time a simple one
  • Paste preparation possible.
  • the mixing of the absorbent 42 with the silver powder ensures that the excess lead oxide constituents, which are represented in FIG. 3 by the lead oxide grains 40a to 40i, are intercepted, in particular in the region of the bonding or boundary surface 38.
  • the desired effect of the excess lead oxide content and optionally of other sintering aids is not impaired.
  • Particularly advantageous is the use of titanium oxide in an amount added between 2 vol .-% and 5 VoI.-%.
  • the intermediate layers can also consist of another metallic material that forms low-melting material systems with lead oxide or the like, wherein the absorbent prevents the formation of such low-melting material systems.
  • the method according to the invention is also suitable for the formation of intermediate layers of other metallic materials, for example of copper.
  • the invention can be used inter alia also with actuators 2 with external electrode connection. The actuator 2 may then have at least one external electrode connection.

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Fuel-Injection Apparatus (AREA)

Abstract

L'invention concerne une soupape d'injection de carburant (1) présentant un actionneur piézo-céramique (2), qui comporte des couches céramiques (26, 27) et des couches intermédiaires (28, 29) électroconductrices. Pour charger l'actionneur (2), une tension électrique peut être appliquée aux couches intermédiaires (28, 29) électroconductrices. Les couches intermédiaires (28, 29) sont à base d'argent et d'un agent absorbant comprenant de l'oxyde de titane ou de l'oxyde de zirconium. Lors de la production de l'actionneur (2), l'agent absorbant forme, conjointement avec un surplus d'oxyde de plomb prévu dans les couches céramiques (26, 27), une liaison cristalline, de sorte à améliorer la formation des couches intermédiaires (28, 29) en argent.
PCT/EP2006/064407 2005-07-26 2006-07-19 Actionneur piezo-ceramique WO2007012589A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP06764208A EP1911107A1 (fr) 2005-07-26 2006-07-19 Actionneur piezo-ceramique

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102005034701.0 2005-07-26
DE102005034701A DE102005034701A1 (de) 2005-07-26 2005-07-26 Piezokeramischer Aktor

Publications (1)

Publication Number Publication Date
WO2007012589A1 true WO2007012589A1 (fr) 2007-02-01

Family

ID=37100907

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2006/064407 WO2007012589A1 (fr) 2005-07-26 2006-07-19 Actionneur piezo-ceramique

Country Status (3)

Country Link
EP (1) EP1911107A1 (fr)
DE (1) DE102005034701A1 (fr)
WO (1) WO2007012589A1 (fr)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004110953A1 (fr) * 2003-06-10 2004-12-23 Robert Bosch Gmbh Procede pour produire des ceramiques a base de pzt a basse temperature de frittage
WO2005034255A2 (fr) * 2003-09-30 2005-04-14 Epcos Ag Composant ceramique multicouche et procede de fabrication
WO2005041316A1 (fr) * 2003-10-27 2005-05-06 Kyocera Corporation Dispositif piezo-electrique multicouche
WO2006000479A1 (fr) * 2004-06-29 2006-01-05 Siemens Aktiengesellschaft Composant piezo-electrique a point de rupture, procede pour produire ledit composant et utilisation dudit composant

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004110953A1 (fr) * 2003-06-10 2004-12-23 Robert Bosch Gmbh Procede pour produire des ceramiques a base de pzt a basse temperature de frittage
WO2005034255A2 (fr) * 2003-09-30 2005-04-14 Epcos Ag Composant ceramique multicouche et procede de fabrication
WO2005041316A1 (fr) * 2003-10-27 2005-05-06 Kyocera Corporation Dispositif piezo-electrique multicouche
EP1686633A1 (fr) * 2003-10-27 2006-08-02 Kyocera Corporation Dispositif piezo-electrique multicouche
WO2006000479A1 (fr) * 2004-06-29 2006-01-05 Siemens Aktiengesellschaft Composant piezo-electrique a point de rupture, procede pour produire ledit composant et utilisation dudit composant

Also Published As

Publication number Publication date
DE102005034701A1 (de) 2007-02-01
EP1911107A1 (fr) 2008-04-16

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