WO2007071985A1 - Procédé et dispositif pour transférer un matériau depuis un porteur vers un substrat par irradiation laser - Google Patents
Procédé et dispositif pour transférer un matériau depuis un porteur vers un substrat par irradiation laser Download PDFInfo
- Publication number
- WO2007071985A1 WO2007071985A1 PCT/GB2006/004790 GB2006004790W WO2007071985A1 WO 2007071985 A1 WO2007071985 A1 WO 2007071985A1 GB 2006004790 W GB2006004790 W GB 2006004790W WO 2007071985 A1 WO2007071985 A1 WO 2007071985A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- substrate
- carrier
- modulator
- spatial
- energy
- Prior art date
Links
- 239000000758 substrate Substances 0.000 title claims abstract description 42
- 239000000463 material Substances 0.000 title claims abstract description 37
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- 210000004027 cell Anatomy 0.000 description 15
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Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/02—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
- H05K3/04—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed mechanically, e.g. by punching
- H05K3/046—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed mechanically, e.g. by punching by selective transfer or selective detachment of a conductive layer
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
- B01L3/02—Burettes; Pipettes
- B01L3/0241—Drop counters; Drop formers
- B01L3/0268—Drop counters; Drop formers using pulse dispensing or spraying, eg. inkjet type, piezo actuated ejection of droplets from capillaries
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N35/00—Automatic analysis not limited to methods or materials provided for in any single one of groups G01N1/00 - G01N33/00; Handling materials therefor
- G01N35/10—Devices for transferring samples or any liquids to, in, or from, the analysis apparatus, e.g. suction devices, injection devices
- G01N35/1079—Devices for transferring samples or any liquids to, in, or from, the analysis apparatus, e.g. suction devices, injection devices with means for piercing stoppers or septums
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/00274—Sequential or parallel reactions; Apparatus and devices for combinatorial chemistry or for making arrays; Chemical library technology
- B01J2219/00277—Apparatus
- B01J2219/00351—Means for dispensing and evacuation of reagents
- B01J2219/00436—Maskless processes
- B01J2219/00441—Maskless processes using lasers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/00274—Sequential or parallel reactions; Apparatus and devices for combinatorial chemistry or for making arrays; Chemical library technology
- B01J2219/00277—Apparatus
- B01J2219/00497—Features relating to the solid phase supports
- B01J2219/00527—Sheets
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/00274—Sequential or parallel reactions; Apparatus and devices for combinatorial chemistry or for making arrays; Chemical library technology
- B01J2219/00583—Features relative to the processes being carried out
- B01J2219/00603—Making arrays on substantially continuous surfaces
- B01J2219/00659—Two-dimensional arrays
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/00274—Sequential or parallel reactions; Apparatus and devices for combinatorial chemistry or for making arrays; Chemical library technology
- B01J2219/00718—Type of compounds synthesised
- B01J2219/0072—Organic compounds
- B01J2219/0074—Biological products
- B01J2219/00743—Cells
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2300/00—Additional constructional details
- B01L2300/08—Geometry, shape and general structure
- B01L2300/0809—Geometry, shape and general structure rectangular shaped
- B01L2300/0819—Microarrays; Biochips
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2400/00—Moving or stopping fluids
- B01L2400/04—Moving fluids with specific forces or mechanical means
- B01L2400/0403—Moving fluids with specific forces or mechanical means specific forces
- B01L2400/0454—Moving fluids with specific forces or mechanical means specific forces radiation pressure, optical tweezers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/28—Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
- G01N1/2813—Producing thin layers of samples on a substrate, e.g. smearing, spinning-on
- G01N2001/282—Producing thin layers of samples on a substrate, e.g. smearing, spinning-on with mapping; Identification of areas; Spatial correlated pattern
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/28—Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
- G01N1/2813—Producing thin layers of samples on a substrate, e.g. smearing, spinning-on
- G01N2001/2833—Collecting samples on a sticky, tacky, adhesive surface
- G01N2001/284—Collecting samples on a sticky, tacky, adhesive surface using local activation of adhesive, i.e. Laser Capture Microdissection
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N35/00—Automatic analysis not limited to methods or materials provided for in any single one of groups G01N1/00 - G01N33/00; Handling materials therefor
- G01N35/10—Devices for transferring samples or any liquids to, in, or from, the analysis apparatus, e.g. suction devices, injection devices
- G01N2035/1027—General features of the devices
- G01N2035/1034—Transferring microquantities of liquid
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/05—Patterning and lithography; Masks; Details of resist
- H05K2203/0502—Patterning and lithography
- H05K2203/0528—Patterning during transfer, i.e. without preformed pattern, e.g. by using a die, a programmed tool or a laser
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/10—Using electric, magnetic and electromagnetic fields; Using laser light
- H05K2203/107—Using laser light
Definitions
- an apparatus for removing organic or polymer materials from a substrate comprising a source of infra-red, visible or ultra-violet light, a spatial light modulator and an array of focussing elements for directing the light that has been spatially modulated by the spatial light modulator onto the substrate so as to cause light induced transfer of material from the substrate.
- Figure 3 schematically illustrates an apparatus which combines an embodiment of the present invention with the micro-stereolithography apparatus to form an integrated system.
- the laser 2 has been assumed to have a constant intensity profile over its beam width.
- many standard laser beams have a gaussian spatial intensity profile whereas the ideal intensity profile for use with a spatial light modulator would be a "top hat" beam profile. Therefore, beam shaping optics may be introduced between the laser and the spatial light modulator.
- the profile of the laser beam may be obtained (either by assumptions that it has a gaussian profile, or by using one or more photo detectors to measure the beam profile) and the control signals to the pixels within the spatial light modulator may be varied such that those pixels in the less intense regions of the laser beam transmit the beam for longer compared to those pixels in the more intense regions such that the product of transmit time by beam intensity during any writing step is substantially uniform.
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Life Sciences & Earth Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Clinical Laboratory Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
Abstract
La présente invention concerne un dispositif pour transférer un matériau (50) depuis un porteur (12) vers un substrat (20), le dispositif comprenant : une source d’énergie électromagnétique (2), un modulateur spatial (6), l’énergie provenant de la source d’énergie électromagnétique (2) étant modulée dans l’espace par le modulateur spatial (6) de façon à permettre le contrôle du transfert d’énergie au porteur (12), l'irradiation du porteur (12) entraînant le transfert du matériau (50) vers le substrat (20).
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB0525847.0 | 2005-12-20 | ||
| GB0525847A GB0525847D0 (en) | 2005-12-20 | 2005-12-20 | Parallel Laser Direct Write |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| WO2007071985A1 true WO2007071985A1 (fr) | 2007-06-28 |
Family
ID=35840736
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PCT/GB2006/004790 WO2007071985A1 (fr) | 2005-12-20 | 2006-12-19 | Procédé et dispositif pour transférer un matériau depuis un porteur vers un substrat par irradiation laser |
Country Status (2)
| Country | Link |
|---|---|
| GB (1) | GB0525847D0 (fr) |
| WO (1) | WO2007071985A1 (fr) |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102009016512A1 (de) * | 2009-04-08 | 2010-10-21 | Forschungszentrum Jülich GmbH | Verfahren und Vorrichtung zur Durchführung einer quantitativen ortsaufgelösten Lokal- und Verteilungsanalyse chemischer Elemente und in-situ Charakterisierung der ablatierten Oberflächenregionen |
| DE102009059042A1 (de) * | 2009-12-10 | 2011-06-16 | Schmid Technology Gmbh | Verfahren und Vorrichtung zur Übertragung von Drucksubstanz von einem Drucksubstanzträger auf ein Substrat |
| WO2013023874A1 (fr) * | 2011-08-16 | 2013-02-21 | Asml Netherlands B.V. | Appareil lithographique, dispositif de réalisation de motif programmable et procédé lithographique |
| WO2014191451A1 (fr) * | 2013-05-28 | 2014-12-04 | Leica Microsystems Cms Gmbh | Système de microdissection à laser comprenant un dispositif de visualisation et procédé de microdissection à laser |
| CN106492715A (zh) * | 2016-12-19 | 2017-03-15 | 广东工业大学 | 一种制备微粒的方法及装置 |
| US9645502B2 (en) | 2011-04-08 | 2017-05-09 | Asml Netherlands B.V. | Lithographic apparatus, programmable patterning device and lithographic method |
| US9859247B2 (en) | 2012-11-09 | 2018-01-02 | Nederlandse Organisatie Voor Toegepast-Natuurwetenschappelijk Onderzoek Tno | Method for bonding bare chip dies |
| CN110753454A (zh) * | 2019-12-04 | 2020-02-04 | 广东工业大学 | 一种用于精细线路的成型及修复方法 |
| CN116288156A (zh) * | 2023-02-16 | 2023-06-23 | 吉林大学 | 一种有机发光分子薄膜相变过程的激光调控方法 |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5508065A (en) * | 1994-10-14 | 1996-04-16 | Regents Of The University Of California | Method for materials deposition by ablation transfer processing |
| WO1997029355A1 (fr) * | 1996-02-05 | 1997-08-14 | P.A.L.M. Gmbh | Procede et dispositif de micro-injection sans contact, de tri et de production d'objets biologiques obtenus de maniere planaire, a l'aide de faisceaux laser |
| US6159832A (en) * | 1998-03-18 | 2000-12-12 | Mayer; Frederick J. | Precision laser metallization |
| WO2003040427A1 (fr) * | 2001-10-16 | 2003-05-15 | Data Storage Institute | Depot de couche mince par rayonnement laser |
| WO2003101165A1 (fr) * | 2000-07-20 | 2003-12-04 | The United States Of America As Represented By The Secretary Of The Navy | Transfert de laser a ecriture directe et traitement relatif |
| US20040022947A1 (en) * | 2002-08-01 | 2004-02-05 | Duignan Michael T. | Method for creating microstructure patterns by contact transfer technique |
| WO2005107949A1 (fr) * | 2004-05-04 | 2005-11-17 | P.A.L.M. Microlaser Technologies Ag | Procede et dispositif pour produire un systeme d'analyse a zones de mesure separees discretes pour l'analyse biologique, biochimique ou chimique |
-
2005
- 2005-12-20 GB GB0525847A patent/GB0525847D0/en not_active Ceased
-
2006
- 2006-12-19 WO PCT/GB2006/004790 patent/WO2007071985A1/fr active Application Filing
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5508065A (en) * | 1994-10-14 | 1996-04-16 | Regents Of The University Of California | Method for materials deposition by ablation transfer processing |
| WO1997029355A1 (fr) * | 1996-02-05 | 1997-08-14 | P.A.L.M. Gmbh | Procede et dispositif de micro-injection sans contact, de tri et de production d'objets biologiques obtenus de maniere planaire, a l'aide de faisceaux laser |
| US6159832A (en) * | 1998-03-18 | 2000-12-12 | Mayer; Frederick J. | Precision laser metallization |
| WO2003101165A1 (fr) * | 2000-07-20 | 2003-12-04 | The United States Of America As Represented By The Secretary Of The Navy | Transfert de laser a ecriture directe et traitement relatif |
| WO2003040427A1 (fr) * | 2001-10-16 | 2003-05-15 | Data Storage Institute | Depot de couche mince par rayonnement laser |
| US20040022947A1 (en) * | 2002-08-01 | 2004-02-05 | Duignan Michael T. | Method for creating microstructure patterns by contact transfer technique |
| WO2005107949A1 (fr) * | 2004-05-04 | 2005-11-17 | P.A.L.M. Microlaser Technologies Ag | Procede et dispositif pour produire un systeme d'analyse a zones de mesure separees discretes pour l'analyse biologique, biochimique ou chimique |
Cited By (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102009016512B4 (de) * | 2009-04-08 | 2011-05-12 | Forschungszentrum Jülich GmbH | Verfahren und Vorrichtung zur Durchführung einer quantitativen ortsaufgelösten Lokal- und Verteilungsanalyse chemischer Elemente und in-situ Charakterisierung der ablatierten Oberflächenregionen |
| DE102009016512A1 (de) * | 2009-04-08 | 2010-10-21 | Forschungszentrum Jülich GmbH | Verfahren und Vorrichtung zur Durchführung einer quantitativen ortsaufgelösten Lokal- und Verteilungsanalyse chemischer Elemente und in-situ Charakterisierung der ablatierten Oberflächenregionen |
| US8497470B2 (en) | 2009-04-08 | 2013-07-30 | Forschungszentrum Juelich Gmbh | Method and device for carrying out a quantitative spatially-resolved local and distribution analysis of chemical elements and in situ characetrization of the ablated surface regions |
| US8735813B2 (en) | 2009-04-08 | 2014-05-27 | Forschungszentrum Juelich Gmbh | Method and device for carrying out a quantitative spatially resolved local analysis and distribution analysis of chemical elements and in situ characterization of ablated surface regions |
| DE102009059042A1 (de) * | 2009-12-10 | 2011-06-16 | Schmid Technology Gmbh | Verfahren und Vorrichtung zur Übertragung von Drucksubstanz von einem Drucksubstanzträger auf ein Substrat |
| US9645502B2 (en) | 2011-04-08 | 2017-05-09 | Asml Netherlands B.V. | Lithographic apparatus, programmable patterning device and lithographic method |
| WO2013023874A1 (fr) * | 2011-08-16 | 2013-02-21 | Asml Netherlands B.V. | Appareil lithographique, dispositif de réalisation de motif programmable et procédé lithographique |
| TWI486724B (zh) * | 2011-08-16 | 2015-06-01 | Ａｓｍｌ荷蘭公司 | 微影裝置、可程式化之圖案化器件及微影方法 |
| US9859247B2 (en) | 2012-11-09 | 2018-01-02 | Nederlandse Organisatie Voor Toegepast-Natuurwetenschappelijk Onderzoek Tno | Method for bonding bare chip dies |
| WO2014191451A1 (fr) * | 2013-05-28 | 2014-12-04 | Leica Microsystems Cms Gmbh | Système de microdissection à laser comprenant un dispositif de visualisation et procédé de microdissection à laser |
| CN106492715A (zh) * | 2016-12-19 | 2017-03-15 | 广东工业大学 | 一种制备微粒的方法及装置 |
| CN106492715B (zh) * | 2016-12-19 | 2023-02-10 | 广东工业大学 | 一种制备微粒的方法及装置 |
| CN110753454A (zh) * | 2019-12-04 | 2020-02-04 | 广东工业大学 | 一种用于精细线路的成型及修复方法 |
| CN110753454B (zh) * | 2019-12-04 | 2020-08-18 | 广东工业大学 | 一种用于精细线路的成型及修复方法 |
| CN116288156A (zh) * | 2023-02-16 | 2023-06-23 | 吉林大学 | 一种有机发光分子薄膜相变过程的激光调控方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| GB0525847D0 (en) | 2006-02-01 |
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