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WO2007044260A3 - Pump apparatus for semiconductor processing - Google Patents

Pump apparatus for semiconductor processing Download PDF

Info

Publication number
WO2007044260A3
WO2007044260A3 PCT/US2006/038197 US2006038197W WO2007044260A3 WO 2007044260 A3 WO2007044260 A3 WO 2007044260A3 US 2006038197 W US2006038197 W US 2006038197W WO 2007044260 A3 WO2007044260 A3 WO 2007044260A3
Authority
WO
WIPO (PCT)
Prior art keywords
semiconductor processing
pump apparatus
pump
pressure
transition
Prior art date
Application number
PCT/US2006/038197
Other languages
French (fr)
Other versions
WO2007044260A2 (en
Inventor
Graeme Huntley
Original Assignee
Boc Group Inc
Graeme Huntley
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Boc Group Inc, Graeme Huntley filed Critical Boc Group Inc
Priority to JP2008534575A priority Critical patent/JP2009513861A/en
Priority to EP06815874A priority patent/EP1934482A2/en
Publication of WO2007044260A2 publication Critical patent/WO2007044260A2/en
Publication of WO2007044260A3 publication Critical patent/WO2007044260A3/en

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01C—ROTARY-PISTON OR OSCILLATING-PISTON MACHINES OR ENGINES
    • F01C19/00—Sealing arrangements in rotary-piston machines or engines
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D23/00—Other rotary non-positive-displacement pumps
    • F04D23/008—Regenerative pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/04—Shafts or bearings, or assemblies thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Reciprocating Pumps (AREA)
  • Drying Of Semiconductors (AREA)

Abstract

The invention relates to a pump apparatus for use in semiconductor processing. The apparatus may include a single pump configured to transition a substance flow from about molecular pressure to about atmospheric pressure.
PCT/US2006/038197 2005-10-06 2006-09-28 Pump apparatus for semiconductor processing WO2007044260A2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2008534575A JP2009513861A (en) 2005-10-06 2006-09-28 Pump equipment for semiconductor processing
EP06815874A EP1934482A2 (en) 2005-10-06 2006-09-28 Pump apparatus for semiconductor processing

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/244,744 2005-10-06
US11/244,744 US20070081893A1 (en) 2005-10-06 2005-10-06 Pump apparatus for semiconductor processing

Publications (2)

Publication Number Publication Date
WO2007044260A2 WO2007044260A2 (en) 2007-04-19
WO2007044260A3 true WO2007044260A3 (en) 2009-04-30

Family

ID=37911212

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2006/038197 WO2007044260A2 (en) 2005-10-06 2006-09-28 Pump apparatus for semiconductor processing

Country Status (7)

Country Link
US (1) US20070081893A1 (en)
EP (1) EP1934482A2 (en)
JP (1) JP2009513861A (en)
KR (1) KR20080056192A (en)
CN (1) CN101501342A (en)
TW (1) TW200721245A (en)
WO (1) WO2007044260A2 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2498816A (en) * 2012-01-27 2013-07-31 Edwards Ltd Vacuum pump
DE102012003680A1 (en) * 2012-02-23 2013-08-29 Pfeiffer Vacuum Gmbh vacuum pump
EP3114353B1 (en) * 2014-03-03 2018-01-03 Nuovo Pignone S.r.l. Method and system for operating a back-to-back compressor with a side stream
US11199267B2 (en) * 2019-08-16 2021-12-14 Applied Materials, Inc. Symmetric flow valve for higher flow conductance

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0470637A1 (en) * 1990-08-10 1992-02-12 Ebara Corporation Turbo molecular pump
US5848873A (en) * 1996-05-03 1998-12-15 The Boc Group Plc Vacuum pumps
US6135709A (en) * 1998-05-20 2000-10-24 The Boc Group Plc Vacuum pump

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69621053T2 (en) * 1995-10-09 2002-10-31 Matsushita Electric Industrial Co., Ltd. Optical disc for use in an encryption or program license system
GB9525337D0 (en) * 1995-12-12 1996-02-14 Boc Group Plc Improvements in vacuum pumps
GB9708397D0 (en) * 1997-04-25 1997-06-18 Boc Group Plc Improvements in vacuum pumps
GB9719634D0 (en) * 1997-09-15 1997-11-19 Boc Group Plc Improvements in vacuum pumps
EP0965756B1 (en) * 1998-06-17 2006-02-08 The BOC Group plc Screw pump
JP3961155B2 (en) * 1999-05-28 2007-08-22 Ｂｏｃエドワーズ株式会社 Vacuum pump
US6129534A (en) * 1999-06-16 2000-10-10 The Boc Group Plc Vacuum pumps
GB9930556D0 (en) * 1999-12-23 2000-02-16 Boc Group Plc Improvements in vacuum pumps
GB0004404D0 (en) * 2000-02-24 2000-04-12 Boc Group Plc Improvements in vacuum pumps
JP2002327698A (en) * 2001-04-27 2002-11-15 Boc Edwards Technologies Ltd Vacuum pump
JP2003021093A (en) * 2001-07-05 2003-01-24 Boc Edwards Technologies Ltd Vacuum pump

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0470637A1 (en) * 1990-08-10 1992-02-12 Ebara Corporation Turbo molecular pump
US5848873A (en) * 1996-05-03 1998-12-15 The Boc Group Plc Vacuum pumps
US6135709A (en) * 1998-05-20 2000-10-24 The Boc Group Plc Vacuum pump

Also Published As

Publication number Publication date
TW200721245A (en) 2007-06-01
US20070081893A1 (en) 2007-04-12
JP2009513861A (en) 2009-04-02
EP1934482A2 (en) 2008-06-25
KR20080056192A (en) 2008-06-20
CN101501342A (en) 2009-08-05
WO2007044260A2 (en) 2007-04-19

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