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WO2006133360A3 - Procede et appareil pour imageurs cmos et spectroscopie - Google Patents

Procede et appareil pour imageurs cmos et spectroscopie Download PDF

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Publication number
WO2006133360A3
WO2006133360A3 PCT/US2006/022302 US2006022302W WO2006133360A3 WO 2006133360 A3 WO2006133360 A3 WO 2006133360A3 US 2006022302 W US2006022302 W US 2006022302W WO 2006133360 A3 WO2006133360 A3 WO 2006133360A3
Authority
WO
WIPO (PCT)
Prior art keywords
fluidic circuit
light source
detector array
fluidic
fabry
Prior art date
Application number
PCT/US2006/022302
Other languages
English (en)
Other versions
WO2006133360A2 (fr
Inventor
Axel Scherer
Mark Adams
Original Assignee
California Inst Of Techn
Axel Scherer
Mark Adams
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by California Inst Of Techn, Axel Scherer, Mark Adams filed Critical California Inst Of Techn
Publication of WO2006133360A2 publication Critical patent/WO2006133360A2/fr
Publication of WO2006133360A3 publication Critical patent/WO2006133360A3/fr

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0256—Compact construction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G01N21/03—Cuvette constructions
    • G01N21/0303—Optical path conditioning in cuvettes, e.g. windows; adapted optical elements or systems; path modifying or adjustment
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G01N21/03—Cuvette constructions
    • G01N21/05—Flow-through cuvettes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64—Fluorescence; Phosphorescence
    • G01N21/645—Specially adapted constructive features of fluorimeters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G01N21/03—Cuvette constructions
    • G01N2021/0346—Capillary cells; Microcells
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G01N21/03—Cuvette constructions
    • G01N21/05—Flow-through cuvettes
    • G01N2021/058—Flat flow cell
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64—Fluorescence; Phosphorescence
    • G01N2021/6417—Spectrofluorimetric devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64—Fluorescence; Phosphorescence
    • G01N21/645—Specially adapted constructive features of fluorimeters
    • G01N2021/6482—Sample cells, cuvettes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G01N21/03—Cuvette constructions
    • G01N21/031—Multipass arrangements

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

L'invention concerne un spectromètre miniaturisé pour fluides comprenant une source lumineuse, un circuit fluidique doté d'une pluralité de canaux d'écoulement traversés par un analyte, et un ensemble capteur de proximité pour détecter la lumière de la source lumineuse transmise par le circuit fluidique. Lorsque la source lumineuse est à large bande, un filtre variable est placé entre l'ensemble capteur et le circuit fluidique, si bien que chaque position de l'ensemble capteur a une réponse de longueur d'onde différente. Le circuit fluidique est disposé dans un étalon Fabry-Perot optimisé, il est défini dans une matière élastomère et comporte un élément pour régler l'étalon Fabry-Perot par pressurisation de canaux d'écoulement dans la matière élastomère.
PCT/US2006/022302 2005-06-08 2006-06-07 Procede et appareil pour imageurs cmos et spectroscopie WO2006133360A2 (fr)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US68864305P 2005-06-08 2005-06-08
US60/688,643 2005-06-08
US11/448,343 2006-06-06
US11/448,343 US7466409B2 (en) 2005-06-08 2006-06-06 Method and apparatus for CMOS imagers and spectroscopy

Publications (2)

Publication Number Publication Date
WO2006133360A2 WO2006133360A2 (fr) 2006-12-14
WO2006133360A3 true WO2006133360A3 (fr) 2009-05-28

Family

ID=37499126

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2006/022302 WO2006133360A2 (fr) 2005-06-08 2006-06-07 Procede et appareil pour imageurs cmos et spectroscopie

Country Status (2)

Country Link
US (1) US7466409B2 (fr)
WO (1) WO2006133360A2 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9164037B2 (en) 2007-01-26 2015-10-20 Palo Alto Research Center Incorporated Method and system for evaluation of signals received from spatially modulated excitation and emission to accurately determine particle positions and distances

Families Citing this family (70)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7310153B2 (en) 2004-08-23 2007-12-18 Palo Alto Research Center, Incorporated Using position-sensitive detectors for wavelength determination
US7522786B2 (en) * 2005-12-22 2009-04-21 Palo Alto Research Center Incorporated Transmitting light with photon energy information
US7521666B2 (en) * 2005-02-17 2009-04-21 Capella Microsystems Inc. Multi-cavity Fabry-Perot ambient light filter apparatus
US7386199B2 (en) 2005-12-22 2008-06-10 Palo Alto Research Center Incorporated Providing light to channels or portions
US7420677B2 (en) * 2005-12-22 2008-09-02 Palo Alto Research Center Incorporated Sensing photon energies of optical signals
US7358476B2 (en) * 2005-12-22 2008-04-15 Palo Alto Research Center Incorporated Sensing photons from objects in channels
US7433552B2 (en) 2005-12-22 2008-10-07 Palo Alto Research Center Incorporated Obtaining analyte information
US8437582B2 (en) 2005-12-22 2013-05-07 Palo Alto Research Center Incorporated Transmitting light with lateral variation
US7547904B2 (en) 2005-12-22 2009-06-16 Palo Alto Research Center Incorporated Sensing photon energies emanating from channels or moving objects
US20080176755A1 (en) * 2006-08-25 2008-07-24 The Trustees Of Columbia University In The City Of New York, Office Of The General Counsel Systems and methods for biodosimetry with biochip using gene expression signatures
US7718948B2 (en) * 2006-12-04 2010-05-18 Palo Alto Research Center Incorporated Monitoring light pulses
US7701024B2 (en) * 2006-12-13 2010-04-20 Panasonic Corporation Solid-state imaging device, manufactoring method thereof and camera
US8821799B2 (en) 2007-01-26 2014-09-02 Palo Alto Research Center Incorporated Method and system implementing spatially modulated excitation or emission for particle characterization with enhanced sensitivity
US7502123B2 (en) 2007-02-05 2009-03-10 Palo Alto Research Center Incorporated Obtaining information from optical cavity output light
US7817276B2 (en) * 2007-02-05 2010-10-19 Palo Alto Research Center Incorporated Distinguishing objects
US7633629B2 (en) * 2007-02-05 2009-12-15 Palo Alto Research Center Incorporated Tuning optical cavities
US7936463B2 (en) 2007-02-05 2011-05-03 Palo Alto Research Center Incorporated Containing analyte in optical cavity structures
US7471399B2 (en) * 2007-02-05 2008-12-30 Palo Alto Research Center Incorporated Photosensing optical cavity output light
US7545513B2 (en) 2007-02-05 2009-06-09 Palo Alto Research Center Incorporated Encoding optical cavity output light
US7817281B2 (en) * 2007-02-05 2010-10-19 Palo Alto Research Center Incorporated Tuning optical cavities
US7554673B2 (en) * 2007-02-05 2009-06-30 Palo Alto Research Center Incorporated Obtaining information about analytes using optical cavity output light
US7852490B2 (en) * 2007-02-05 2010-12-14 Palo Alto Research Center Incorporated Implanting optical cavity structures
US7529438B2 (en) * 2007-07-13 2009-05-05 Palo Alto Research Center Incorporated Producing fluidic waveguides
US7522811B2 (en) * 2007-07-13 2009-04-21 Palo Alto Research Center Incorporated Producing sandwich waveguides
US20090086064A1 (en) * 2007-09-27 2009-04-02 Micron Technology, Inc. Dynamic adaptive color filter array
US8320983B2 (en) * 2007-12-17 2012-11-27 Palo Alto Research Center Incorporated Controlling transfer of objects affecting optical characteristics
US7817254B2 (en) * 2008-01-30 2010-10-19 Palo Alto Research Center Incorporated Obtaining information from time variation of sensing results
US7763856B2 (en) * 2008-01-31 2010-07-27 Palo Alto Research Center Incorporated Producing time variation in emanating light
US8263955B2 (en) * 2008-12-18 2012-09-11 Palo Alto Research Center Incorporated Causing relative motion
US7894068B2 (en) * 2008-02-04 2011-02-22 Palo Alto Research Center Incorporated Producing filters with combined transmission and/or reflection functions
US8153949B2 (en) * 2008-12-18 2012-04-10 Palo Alto Research Center Incorporated Obtaining sensing results indicating time variation
US8153950B2 (en) * 2008-12-18 2012-04-10 Palo Alto Research Center Incorporated Obtaining sensing results and/or data in response to object detection
US7701580B2 (en) * 2008-02-01 2010-04-20 Palo Alto Research Center Incorporated Transmitting/reflecting emanating light with time variation
US8373860B2 (en) 2008-02-01 2013-02-12 Palo Alto Research Center Incorporated Transmitting/reflecting emanating light with time variation
US8629981B2 (en) 2008-02-01 2014-01-14 Palo Alto Research Center Incorporated Analyzers with time variation based on color-coded spatial modulation
CA2731413A1 (fr) 2008-07-21 2010-01-28 Valorbec S.E.C. Dispositif microfluidique et procede de fabrication du dispositif microfluidique
FR2939887B1 (fr) 2008-12-11 2017-12-08 Silios Tech Dispositif de spectroscopie optique comportant une pluralite de sources d'emission
US20100163759A1 (en) * 2008-12-31 2010-07-01 Stmicroelectronics S.R.L. Radiation sensor with photodiodes being integrated on a semiconductor substrate and corresponding integration process
WO2010106493A1 (fr) * 2009-03-16 2010-09-23 Ramot At Tel Aviv University Ltd. Dispositif et procédé pour la détection optique de substances ou de conditions environnementales
US8941831B2 (en) * 2009-05-04 2015-01-27 Theodore Peter Rakitzis Intra-cavity ellipsometer system and method
CN102713720B (zh) 2009-10-28 2016-05-11 阿兰蒂克微科学股份有限公司 显微成像装置和显微成像方法
US20140152801A1 (en) 2009-10-28 2014-06-05 Alentic Microscience Inc. Detecting and Using Light Representative of a Sample
US9075225B2 (en) 2009-10-28 2015-07-07 Alentic Microscience Inc. Microscopy imaging
US9469871B2 (en) 2011-04-14 2016-10-18 Corporos Inc. Methods and apparatus for point-of-care nucleic acid amplification and detection
US20120278028A1 (en) * 2011-04-28 2012-11-01 Jeffrey Drue David Generating model based spectra library for polishing
US8717556B2 (en) * 2011-07-27 2014-05-06 Aptina Imaging Corporation Microfluidic systems with chemical pumps
US8723140B2 (en) 2011-08-09 2014-05-13 Palo Alto Research Center Incorporated Particle analyzer with spatial modulation and long lifetime bioprobes
US9029800B2 (en) 2011-08-09 2015-05-12 Palo Alto Research Center Incorporated Compact analyzer with spatial modulation and multiple intensity modulated excitation sources
US20130142381A1 (en) * 2011-12-02 2013-06-06 Field Tested Software Llc Real time spectroscopy processing and analysis system
US9297749B2 (en) 2012-03-27 2016-03-29 Innovative Science Tools, Inc. Optical analyzer for identification of materials using transmission spectroscopy
US8906320B1 (en) 2012-04-16 2014-12-09 Illumina, Inc. Biosensors for biological or chemical analysis and systems and methods for same
US9354159B2 (en) 2012-05-02 2016-05-31 Nanoscopia (Cayman), Inc. Opto-fluidic system with coated fluid channels
WO2014089120A1 (fr) * 2012-12-07 2014-06-12 Integrated Plasmonics Corporation Capteur plasmonique spectroscopique et cuvette afférente
US9976963B2 (en) 2012-12-21 2018-05-22 Integrated Plasmonics Corporation Microcuvette cartridge
US10502666B2 (en) 2013-02-06 2019-12-10 Alentic Microscience Inc. Sample processing improvements for quantitative microscopy
US10481089B2 (en) 2013-03-12 2019-11-19 Integrated Plasmonics Corporation Optical detection system with tilted sensor
US9995623B2 (en) 2013-03-14 2018-06-12 Integrated Plasmonics Corporation Ambient light assisted spectroscopy
WO2014143234A1 (fr) 2013-03-14 2014-09-18 Integrated Plasmonics Corporation Filtre spatial auto-aligné
CA2953620C (fr) 2013-06-26 2020-08-25 Alentic Microscience Inc. Ameliorations de traitement d'echantillon destinees a la microscopie
US9347962B2 (en) 2013-08-05 2016-05-24 Nanoscopia (Cayman), Inc. Handheld diagnostic system with chip-scale microscope and automated image capture mechanism
US9410893B2 (en) * 2013-11-22 2016-08-09 Taiwan Semiconductor Manufacturing Company, Ltd. Bio-chip package with waveguide integrated spectrometer
MX360883B (es) 2013-12-10 2018-11-21 Illumina Inc Biosensores para análisis biológico o químico y métodos para fabricarlos.
TWI695557B (zh) * 2014-09-23 2020-06-01 新加坡商海特根微光學公司 緊密、功率效率高之堆疊寬頻光學發射器
PE20201178A1 (es) 2017-12-26 2020-11-03 Illumina Inc Sistema sensor
LU100778B1 (de) * 2018-04-23 2019-10-23 Cytena Gmbh Dispensievorrichtung mit einem Dispenser zum Ausgeben einer wenigstens eine Zelle und/oder wenigstens ein Partikel enthaltenen Flüssigkeit
CN113677963A (zh) * 2019-04-05 2021-11-19 3M创新有限公司 传感器阵列光谱仪
CN111458027A (zh) * 2020-05-27 2020-07-28 南京伯克利新材料科技有限公司 一种紫外光谱的测量方法及装置
WO2022053971A1 (fr) * 2020-09-09 2022-03-17 Ecole Polytechnique Federale De Lausanne (Epfl) Dispositif de mesure ou biopuce comprenant une microcavité optique
AU2022334592A1 (en) * 2021-08-27 2024-01-18 Illumina, Inc. Flow cell image sensor arrangement with reduced crosstalk
US12123776B2 (en) * 2022-05-25 2024-10-22 Visera Technologies Company Ltd. Spectrometer

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20030133117A1 (en) * 2002-01-11 2003-07-17 Koninklijke Philips Electronics N.V. Method of extended color sense and estimation for rgb led illuminants
US20030235924A1 (en) * 2002-01-24 2003-12-25 California Institute Of Technology Optoelectronic and microfluidic integration for miniaturized spectroscopic devices
US20040208212A1 (en) * 2003-03-18 2004-10-21 Denney Paul E. Method and apparatus for material processing
US20040233424A1 (en) * 2003-05-21 2004-11-25 National Cheng Kung University Chip-based microfluidic particle detector with three dimensional focusing mechanisms

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7245373B2 (en) * 2004-04-26 2007-07-17 University Of Massachusetts Spectrometer system for optical reflectance measurements

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20030133117A1 (en) * 2002-01-11 2003-07-17 Koninklijke Philips Electronics N.V. Method of extended color sense and estimation for rgb led illuminants
US20030235924A1 (en) * 2002-01-24 2003-12-25 California Institute Of Technology Optoelectronic and microfluidic integration for miniaturized spectroscopic devices
US20040208212A1 (en) * 2003-03-18 2004-10-21 Denney Paul E. Method and apparatus for material processing
US20040233424A1 (en) * 2003-05-21 2004-11-25 National Cheng Kung University Chip-based microfluidic particle detector with three dimensional focusing mechanisms

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9164037B2 (en) 2007-01-26 2015-10-20 Palo Alto Research Center Incorporated Method and system for evaluation of signals received from spatially modulated excitation and emission to accurately determine particle positions and distances

Also Published As

Publication number Publication date
WO2006133360A2 (fr) 2006-12-14
US7466409B2 (en) 2008-12-16
US20070070347A1 (en) 2007-03-29

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