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WO2006122780A3 - Field measuring device, measurement module for a field measuring device and method of producing a plurality of measurement modules - Google Patents

Field measuring device, measurement module for a field measuring device and method of producing a plurality of measurement modules Download PDF

Info

Publication number
WO2006122780A3
WO2006122780A3 PCT/EP2006/004671 EP2006004671W WO2006122780A3 WO 2006122780 A3 WO2006122780 A3 WO 2006122780A3 EP 2006004671 W EP2006004671 W EP 2006004671W WO 2006122780 A3 WO2006122780 A3 WO 2006122780A3
Authority
WO
WIPO (PCT)
Prior art keywords
measuring device
field measuring
measurement
producing
measurement module
Prior art date
Application number
PCT/EP2006/004671
Other languages
German (de)
French (fr)
Other versions
WO2006122780A2 (en
Inventor
Ralf Noetzel
Georg Stute
Ralf Gottfried-Gottfried
Axel Bartos
Martin Hoffmann
Original Assignee
Hl Planar Technik Gmbh
Ralf Noetzel
Georg Stute
Ralf Gottfried-Gottfried
Axel Bartos
Martin Hoffmann
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hl Planar Technik Gmbh, Ralf Noetzel, Georg Stute, Ralf Gottfried-Gottfried, Axel Bartos, Martin Hoffmann filed Critical Hl Planar Technik Gmbh
Publication of WO2006122780A2 publication Critical patent/WO2006122780A2/en
Publication of WO2006122780A3 publication Critical patent/WO2006122780A3/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/0206—Three-component magnetometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/19—Details of hybrid assemblies other than the semiconductor or other solid state devices to be connected
    • H01L2924/191—Disposition
    • H01L2924/19101—Disposition of discrete passive components
    • H01L2924/19107—Disposition of discrete passive components off-chip wires

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Solid State Image Pick-Up Elements (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Measuring Magnetic Variables (AREA)

Abstract

The invention relates to a field measuring device with a measurement module that is connected to a base plate, said measurement module having a first field sensor chip located in a first plane, and a second field sensor chip located in a second plane and disposed to the first plane at an angle 0° < α< 180°. The first field sensor chip is located above the base plate and the second field sensor chip is located between the first field sensor chip and the base plate.
PCT/EP2006/004671 2005-05-18 2006-05-17 Field measuring device, measurement module for a field measuring device and method of producing a plurality of measurement modules WO2006122780A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102005023591.3 2005-05-18
DE102005023591A DE102005023591A1 (en) 2005-05-18 2005-05-18 Field measuring device, measuring module for a field measuring device and method of production for a plurality of measuring modules

Publications (2)

Publication Number Publication Date
WO2006122780A2 WO2006122780A2 (en) 2006-11-23
WO2006122780A3 true WO2006122780A3 (en) 2007-03-01

Family

ID=36716941

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2006/004671 WO2006122780A2 (en) 2005-05-18 2006-05-17 Field measuring device, measurement module for a field measuring device and method of producing a plurality of measurement modules

Country Status (2)

Country Link
DE (1) DE102005023591A1 (en)
WO (1) WO2006122780A2 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7237437B1 (en) * 2005-10-27 2007-07-03 Honeywell International Inc. MEMS sensor systems and methods
FR2903812B1 (en) * 2006-07-13 2008-10-31 Commissariat Energie Atomique INTEGRATED CIRCUIT DISTRIBUTED TO AT LEAST TWO NON-PARALLEL PLANS AND METHOD FOR PRODUCING THE SAME
DE102008045360B4 (en) 2008-07-16 2010-11-18 Dernedde, Niels, Dipl.-Wirtsch. Ing. Surface probe for alternating electrical fields in the vicinity of a magnetic field sensor
US9995600B2 (en) * 2015-09-01 2018-06-12 General Electric Company Multi-axis magneto-resistance sensor package

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE9113744U1 (en) * 1991-11-05 1992-01-16 SMT & Hybrid GmbH, O-8012 Dresden Three-dimensional micromechanical acceleration sensor with integrated electronics
DE19610554A1 (en) * 1995-04-19 1996-10-24 Smiths Industries Plc Inertial sensor assembly, such as planar array silicon chips
US5672967A (en) * 1995-09-19 1997-09-30 Southwest Research Institute Compact tri-axial fluxgate magnetometer and housing with unitary orthogonal sensor substrate

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE9113744U1 (en) * 1991-11-05 1992-01-16 SMT & Hybrid GmbH, O-8012 Dresden Three-dimensional micromechanical acceleration sensor with integrated electronics
DE19610554A1 (en) * 1995-04-19 1996-10-24 Smiths Industries Plc Inertial sensor assembly, such as planar array silicon chips
US5672967A (en) * 1995-09-19 1997-09-30 Southwest Research Institute Compact tri-axial fluxgate magnetometer and housing with unitary orthogonal sensor substrate

Also Published As

Publication number Publication date
DE102005023591A1 (en) 2006-11-30
WO2006122780A2 (en) 2006-11-23

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