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WO2006019032A1 - Écran plasma et son procédé de fabrication - Google Patents

Écran plasma et son procédé de fabrication Download PDF

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Publication number
WO2006019032A1
WO2006019032A1 PCT/JP2005/014741 JP2005014741W WO2006019032A1 WO 2006019032 A1 WO2006019032 A1 WO 2006019032A1 JP 2005014741 W JP2005014741 W JP 2005014741W WO 2006019032 A1 WO2006019032 A1 WO 2006019032A1
Authority
WO
WIPO (PCT)
Prior art keywords
sealing
layer
plasma display
sealing layer
display panel
Prior art date
Application number
PCT/JP2005/014741
Other languages
English (en)
Japanese (ja)
Inventor
Hiroyuki Yamakita
Masatoshi Kitagawa
Mikihiko Nishitani
Noriyasu Echigo
Tomohiro Okumura
Hiroaki Ishio
Hikaru Nishitani
Original Assignee
Matsushita Electric Industrial Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co., Ltd. filed Critical Matsushita Electric Industrial Co., Ltd.
Priority to JP2006531727A priority Critical patent/JPWO2006019032A1/ja
Priority to US11/572,902 priority patent/US20080211408A1/en
Priority to CN2005800345241A priority patent/CN101040361B/zh
Publication of WO2006019032A1 publication Critical patent/WO2006019032A1/fr

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/24—Manufacture or joining of vessels, leading-in conductors or bases
    • H01J9/26—Sealing together parts of vessels
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J11/00—Gas-filled discharge tubes with alternating current induction of the discharge, e.g. alternating current plasma display panels [AC-PDP]; Gas-filled discharge tubes without any main electrode inside the vessel; Gas-filled discharge tubes with at least one main electrode outside the vessel
    • H01J11/10—AC-PDPs with at least one main electrode being out of contact with the plasma
    • H01J11/12—AC-PDPs with at least one main electrode being out of contact with the plasma with main electrodes provided on both sides of the discharge space
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J11/00—Gas-filled discharge tubes with alternating current induction of the discharge, e.g. alternating current plasma display panels [AC-PDP]; Gas-filled discharge tubes without any main electrode inside the vessel; Gas-filled discharge tubes with at least one main electrode outside the vessel
    • H01J11/20—Constructional details
    • H01J11/48—Sealing, e.g. seals specially adapted for leading-in conductors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/24—Manufacture or joining of vessels, leading-in conductors or bases
    • H01J9/241—Manufacture or joining of vessels, leading-in conductors or bases the vessel being for a flat panel display
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/24—Manufacture or joining of vessels, leading-in conductors or bases
    • H01J9/26—Sealing together parts of vessels
    • H01J9/261—Sealing together parts of vessels the vessel being for a flat panel display
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2209/00—Apparatus and processes for manufacture of discharge tubes
    • H01J2209/26—Sealing parts of the vessel to provide a vacuum enclosure
    • H01J2209/261—Apparatus used for sealing vessels, e.g. furnaces, machines or the like
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2209/00—Apparatus and processes for manufacture of discharge tubes
    • H01J2209/26—Sealing parts of the vessel to provide a vacuum enclosure
    • H01J2209/264—Materials for sealing vessels, e.g. frit glass compounds, resins or structures

Definitions

  • the present invention relates to a plasma display panel and a method for manufacturing the same, and particularly relates to improvement of reliability in a sealing technique in a manufacturing process.
  • a plasma display panel (hereinafter referred to as PDP) is known as one of typical flat panel displays (FPDs), and commercialization of image display devices using the same has been attempted.
  • PDPs are broadly divided into direct current (DC) and alternating current (AC) types.
  • DC direct current
  • AC alternating current
  • AC PDPs have a high technical potential as a configuration for large displays.
  • surface discharge PDPs with excellent life characteristics are becoming mainstream products, especially among AC types.
  • FIG. 21 is a cross-sectional view of a panel showing a structure around a discharge cell of a general surface discharge AC type PDP.
  • FIG. 21 (b) is a cross-sectional view along the xy line shown in FIG. 21 (a).
  • the front panel FP and the back panel BP are arranged facing each other at a fixed interval, and this is sealed with a sealing layer (not shown) arranged in the vicinity of the outer periphery of both panels FP and BP. It has the structure filled with.
  • each display electrode 4c is provided with an ITO (indium tin oxide) film, which is a wide-band transparent electrode 85c, 86c, and a bus electrode 89c formed by firing Ag paste or the like so as to be electrically connected thereto.
  • ITO indium tin oxide
  • the display electrode 4c is a scan electrode
  • the display electrode 5c is a sustain electrode.
  • the display electrode 4c is opposed to the surface of the front panel glass 10c with a certain discharge gap.
  • an FP-side dielectric layer 87c having another glass material force and a protective layer 88c made of magnesium oxide (MgO) are sequentially provided so as to cover the display electrode 4c. Laminated.
  • the back panel BP has a plurality of data electrodes 12 on the surface of the back panel glass 11c. c is provided in a strip shape, and a BP-side dielectric layer 813c is formed so as to cover it. On the dielectric layer 813c, partition walls 14c are formed along the gaps between the data electrodes 12c, and a phosphor layer 15c of any color of R, G, or B is formed between the adjacent partition walls 14c. Being done.
  • Reference numeral 817c shown in FIG. 21 is a tip tube that is arranged so as to communicate with the discharge space and depressurizes the inside of the discharge space for gas filling.
  • Discharge cells are formed in correspondence with regions where the display electrodes 4c and the data electrodes 12c intersect three-dimensionally across a discharge space, and a plurality of discharge cells are arranged in a matrix throughout the panel.
  • R, G, and B3 discharge cells that are adjacent along the longitudinal direction of the display electrode 4c constitute one pixel (pixel).
  • the front panel FP and the back panel BP having the above-described configuration are arranged so that the partition wall 14c contacts the protective layer 88c, and are sealed around the panels 82c and 83c.
  • the inside of both panels is sealed as a discharge space by applying and laminating layer materials and forming a sealing layer in the sealing process.
  • the discharge space is depressurized via the tip tube 817c, and there is Xe-Ne gas as a discharge gas! /, Or a mixed gas consisting of rare gas such as Xe-He gas is sealed at a predetermined pressure. And sealed.
  • the tip tube 817 is then removed.
  • the front panel FP or the back panel BP is exposed to the atmosphere in the manufacturing process, so that the dielectric layer and the protective layer (especially, acid magnesium) are exposed to atmospheric air, water vapor, carbon dioxide gas, etc. Chemical changes to hydroxides and carbon compounds may occur when exposed to impurity gases. In addition, there is a problem that it is difficult to obtain good image display performance due to the change in discharge characteristics.
  • the organic component (carbon component) contained in the sealing glass frit remains in the sealing process, and the impurity gas due to this component is generated by the dielectric. It may adversely affect the body layer and protective layer. This is a problem particularly seen when the binder component in the sealing layer is gasified even when the sealing step is performed at a relatively high temperature process reaching 450 ° C. or higher.
  • Patent Documents 2 and 4 a technique is disclosed in which the PDP sealing process is performed under a reduced-pressure atmosphere in a sealed chamber that is shut off from the outside air, thereby preventing contamination of impurities. ing.
  • Patent Document 2 glass frit is pre-fired in a reduced-pressure atmosphere in advance, and a certain amount of organic components are removed and the power panels FP and BP are bonded together to perform the main firing.
  • Patent Document 1 JP 2001351532 A
  • Patent Document 2 JP 1040818
  • Patent Document 3 Japanese Patent Laid-Open No. 200128240
  • Patent Document 4 Japanese Patent Laid-Open No. 9251839
  • Patent Document 1 discloses a device for removing impurity gas remaining in the internal space of both panels through a tip tube (piping member) during the sealing process. Exhaust resistance is high because there is only a gap of about 100 m to 200 m. In addition, it is possible to arrange getter materials to remove both impurity gases inside the panels S, which also prevents the gas from being sufficiently absorbed and removed!
  • the tip tube Since the tip tube is originally a thin tube, it takes a relatively long time to remove the gas. This For this reason, the gas cannot be exhausted quickly, and as a result, it is difficult to effectively prevent the adsorption of impurities to the protective layer or the like.
  • the present invention has been made in view of the above problems, and by performing a good sealing step, the dielectric layer and the protective layer are prevented from being deteriorated and good image display performance is exhibited.
  • the purpose is to provide a PDP that can be used and its manufacturing method.
  • the present invention is a PDP in which a front panel and a back panel are arranged to face each other at a predetermined interval, and the periphery of both panels is surrounded by a sealing layer.
  • a material containing at least one of an organic resin material, an inorganic material, and a metal material is used.
  • the sealing layer can be composed of a composite material cover made of a silica material as a main component and an epoxy resin material added thereto. More specifically, the sealing layer can be constituted by adding approximately 70 wt% of the silica component and adding an epoxy resin material thereto. The xylene component should not be added.
  • the sealing step can be performed by a low-temperature process as compared with the conventional case. This suppresses the generation of gas due to the sealing layer material during the sealing process, prevents unnecessary chemical changes in the dielectric layer and protective layer due to the gas, and stable image display performance over a long period of time. Can be realized.
  • the sealing layer may be formed under a reduced pressure atmosphere in a discharge gas atmosphere.
  • a discharge gas may be enclosed in the internal space surrounded by the sealing layer through the gap of the predetermined interval.
  • the sealing layer is a double sealing layer arranged along the planes of the main surfaces of both panels.
  • the double sealing layer includes a high airtight sealing layer and a high strength sealing layer. Say it with a word.
  • the high hermetic sealing layer is located on the peripheral edge side of the panels on both panel main surfaces.
  • the double sealing layers may have different widths along the planar direction of the panel main surface.
  • the high-strength sealing layer when the sealing layer on the peripheral side of the panel is disposed as a high-strength sealing layer and the inner sealing layer is disposed as a high-airtight sealing layer, the high-strength sealing layer is provided.
  • the stop layer can be formed wider than the high hermetic sealing layer.
  • a dielectric layer and a protective layer can be sequentially formed on the main surface of at least one of the panels in a reduced pressure atmosphere.
  • the present invention provides a method for producing a PDP having a sealing step in which a front panel and a back panel are arranged to face each other at a predetermined interval, and the periphery of the two panels is surrounded by a sealing layer and sealed.
  • a sealing step a composite material made of a silica material as a main component and an epoxy resin material added thereto as a material for the sealing layer is used.
  • the sealing layer can be sealed in a discharge gas. Further, in the sealing step, the sealing layer can be formed by at least one of a heat welding method, an ultraviolet curing method, a laser irradiation method, and an ultrasonic welding method.
  • a panel forming step for forming at least one of the front panel and the back panel by sequentially forming a plurality of electrodes and dielectric layers on the panel surface, The process from the panel formation process to the end of the sealing process can be performed continuously in a reduced-pressure atmosphere.
  • the process from the production of the front panel and the back panel to the end of the sealing process is performed separately from the outside air, so that a tip tube is not used for the PDP as in the prior art.
  • Quick degassing and discharge gas sealing are possible. This also prevents impurity gases from entering the outside air. Therefore, a protective layer with moisture or impurity gas inside the PDP In addition, the chemical change of the dielectric layer can be prevented over a long period of time.
  • the tip tube is not used in the present invention, no exhaust or discharge gas sealing hole is formed around the surface of the panel. Therefore, the external shape is good and a flat PDP can be realized.
  • the sealing step there is a panel forming step for forming at least one of the front panel and the back panel by sequentially forming a plurality of electrodes and dielectric layers on the panel surface, In the panel formation process, the dielectric layer is formed using the CVD method.
  • a plasma CVD method can be employed as the CVD method.
  • a plurality of electrodes and a dielectric layer are sequentially formed on the panel surface, and a protective layer is formed on the dielectric layer, thereby forming the front panel.
  • the protective layer can be formed using a vacuum process.
  • an electrode forming step of forming a plurality of electrodes on at least one of the front panel and the back panel there is an electrode forming step of forming a plurality of electrodes on at least one of the front panel and the back panel, and a vacuum process method is used in the electrode forming step.
  • an electrode can be formed of an Al—Nd material.
  • a panel forming step for forming the front panel is formed by sequentially forming a plurality of electrodes, a dielectric layer, and a protective layer on the panel surface. It can also be performed in a low-temperature process at room temperature to 300 ° C.
  • FIG. 1 is a configuration diagram of the PDP according to the first embodiment.
  • Fig. 1 (a) is a schematic cross-sectional view along the thickness direction of the panel
  • Fig. 1 (b) is a front view of the panel.
  • the PDP1 is designed to match the 42-inch class NTSC specification.
  • the present invention may be applied to other specifications such as XGA and SXGA.
  • the configuration of the PDP 1 shown in FIG. 1 is roughly divided into a front panel FP and a back panel BP that are arranged with their main surfaces facing each other.
  • a front panel glass 10 serving as a substrate of the front panel FP has a plurality of pairs of display electrodes 4 (scan electrodes 5 and sustain electrodes 6) formed on one main surface thereof.
  • Each display electrode 4 is a strip-shaped transparent electrode made of a transparent conductive material such as ITO or SnO 1
  • the bus electrode 9 is made of an A-to-Nd material, so that the sheet resistance of the transparent electrodes 155 and 156 is lowered and good power feeding is performed.
  • an A1-based metal alloy thin film containing at least a rare earth metal can be used as the bus electrode of the present invention.
  • a dielectric layer (FP-side dielectric layer) 7 made of a glass material mainly composed of SiO is formed on the entire main surface of the glass 10.
  • a protective layer 8 having a thickness of about 1.0 m is laminated on the surface of the FP-side dielectric layer 7.
  • the front panel FP and the back panel BP having the above configuration are internally sealed by the sealing layer 17 (the first sealing layer 171 and the second sealing layer 172) disposed around the two panels.
  • the first sealing layer 171 has a characteristic that has high airtightness
  • the second sealing layer 172 has a characteristic that specializes in high strength (that is, high adhesion), and the sealing layer 17 as a whole is extremely excellent. It exhibits excellent sealing properties.
  • the sealing layers 171 and 172 are made of a general sealing layer material.
  • the binder component used in the coating material is included, and thus, there is no characteristic that impurity gas due to the binder component is not generated in the sealing step. For this reason, the problem of impurity gas adhering to the protective layer or the like inside the PDP is less likely to occur in the sealing process.
  • the sealing layer 17 a material containing at least one of an organic resin material, an inorganic material, and a metal material is used.
  • the sealing layer can be composed of a composite material cover comprising a silica material as a main component and an organic material such as an epoxy resin material added thereto. It has been found from the experimental results of the present inventors that it is desirable not to add the xylene component.
  • the sealing layer for obtaining high airtightness can be constituted by adding approximately 70 wt% of a silica component and adding an epoxy resin material thereto.
  • an acrylic ultraviolet curable resin material can be used as an organic material.
  • the first airtight sealing layer 171 is disposed inside the panel facing the discharge space 30, and the high-strength second sealing layer 172 is disposed outside.
  • the present invention is not limited to this configuration.
  • the configuration of the sealing layer 17 is not limited to the double sealing layers 171 and 172. More multiple configurations (for example, high airtight sealing layers and high strength sealing layers are alternately arranged) Or a configuration in which only a single sealing layer 17 is provided. In the case of this single-layer configuration, it is desirable to form so as to have both the high airtightness and high strength characteristics.
  • the discharge space 30 is filled with a Xe-Ne rare gas as a discharge gas at a pressure of about 60 kPa to 70 kPa. It is known that the discharge efficiency can be improved by increasing the Xe partial pressure of the discharge gas.
  • each space partitioned by the BP-side dielectric layer 13 and the phosphor layer 15 on the back panel BP side and the two adjacent barrier ribs 14 becomes a discharge space 30.
  • a pair of adjacent display electrodes 4 (scan electrode 5 and sustain electrode 6) and one data electrode 12 intersect with each other across the discharge space 30 and correspond to a discharge cell that is used for image display.
  • the PDP 1 having the above configuration is connected to a known drive circuit and configured as a PDP device.
  • address discharge is started between the data electrode 12 and the display electrode 4 in the designated discharge cell, and short wavelength ultraviolet light (Xe resonance having a wavelength of about 147 nm is generated by the sustain discharge between the pair of display electrodes 4.
  • ultraviolet rays such as Xe molecular beam having a wavelength of about 173 nm are generated, and the phosphor layer 15 that has received the ultraviolet rays emits visible light, thereby displaying an image.
  • a field gradation display method is adopted, and a single image is displayed in gradation by selecting a plurality of periods (subfields) having different discharge times according to the gradation. .
  • the FP-side dielectric layer 7 and the protective layer 8 are formed continuously in a reduced-pressure atmosphere in the front panel FP without being exposed to the air, and both panels FP are used in the sealing process.
  • a material in which the sealing layer 17 disposed around the BP includes at least one of an organic resin (epoxy resin or acrylic UV-cured resin) material, an inorganic material (silica material), and a metal material. And is characterized in that it is formed as the double first and second sealing layers 171 and 172.
  • the PDP of Embodiment 1 can perform the sealing process in a low-temperature process as compared with the conventional one, and continuously in a reduced-pressure atmosphere. The process can be performed.
  • the PDP1 internal force can be quickly degassed and filled with discharge gas without using a tip tube, and the effect of preventing the introduction of impurity gas can be achieved. This prevents chemical changes in the protective layer and dielectric layer due to moisture, impurity gas, etc. inside the PDP over a long period of time, and makes it possible to demonstrate excellent image display performance.
  • the sustain discharge voltage was reduced and the luminous efficiency was improved by about 1.5 times compared to the conventional PDP produced by exposing the front panel FP and back panel BP to the atmosphere.
  • the lifetime was extended to about 3 times while maintaining the luminous efficiency, which was higher than that of the conventional PDP, and it was confirmed that the luminous efficiency was improved and improved.
  • the reason is considered as follows. That is, in the PDP 1, the dielectric layers 7 and 13 and the protective layer 8 are formed in a state of being isolated from the atmosphere, and the sealing process is also performed while blocking the outside air. Is suppressed. Furthermore, since the sealing layer material does not use a binder component and is sealed by a low-temperature process, unnecessary impurity gas is hardly generated. For this reason, the dielectric layer and protective layer of the PDP 1 as a whole are prevented from being deteriorated by impurity gas or moisture, and the performance immediately after production is exhibited for a long period of time.
  • FIG. 4 is a flowchart showing an example of the manufacturing process of PDP1. This manufacturing process is basically the same for the PDPs of Embodiments 2 to 15 described later.
  • the display electrode 4, the FP-side dielectric layer 7, and the protective layer 8 are sequentially formed (S1 to S4).
  • these steps are continuously performed in a reduced-pressure atmosphere to keep the front panel FP being manufactured from being exposed to the outside air. Furthermore, the decompression state of the front panel FP can be broken even in the state of the next movement, storage and sealing of the panel and the transition to the sealing process only when they are substantially formed. Formed, moved and stored without
  • the “depressurized state” refers to a vacuum, a vacuum depressurized state, or a depressurized state substituted with an inert gas.
  • each step can be performed as follows.
  • a transparent electrode material such as ITO, SnO, or ZnO is deposited on at least a part of the surface of the front panel glass 10 to a thickness of about lOOnm.
  • a desired pattern for example, width
  • a photolithography method can be used to obtain transparent electrodes 155 and 156 as shown in Fig. 5 (a) (Sl) .
  • an A1 metal alloy thin film having excellent electrical properties (low resistance), for example, containing at least a rare earth metal such as Al-Nd, is vacuum deposited.
  • a thin film having a thickness of about 1 m is uniformly deposited by a vacuum film formation process such as an electron beam evaporation method, a plasma beam evaporation method, or a sputtering method.
  • the thin film is patterned by a dry etching method or a photo etching method to form a bus electrode 9 having a desired pattern as shown in FIG. 5 (b) (S2).
  • the film formation is performed in a vacuum or a reduced-pressure atmosphere filled with a sputtering gas with the panel temperature set to room temperature to 300 ° C.
  • the “vacuum film forming process method” refers to a method by a process of forming a thin film in a vacuum state or a gas decompression state. If an electrode is made of a thin film formed by the vacuum film formation process method, the dielectric layer stacked on the electrode is prevented from being deformed in a convex shape, and the dielectric layer has little variation due to the film pressure distribution. This is advantageous because a layer can be formed to prevent the occurrence of partial breakdown due to the electrode shape (for example, generation in a region corresponding to the edge portion of the electrode).
  • the metal component due to the electrode moves and diffuses into the FP-side dielectric layer 7 during driving of the PDP. Since the so-called migration phenomenon does not occur, the electrode configuration can be obtained with high reliability.
  • bus electrode 9 can also be formed as a configuration of an Ag electrode, a CrZCuZCr laminated electrode, or the like by using a thick film forming method as usual.
  • the display electrode 4 having excellent electrical characteristics is formed with a uniform film thickness and shape as compared with the thick film method or the like.
  • the process of forming the display electrode or the formation of the display electrode is considered. Even if the panel is exposed to the atmosphere between this process and the following FP-side dielectric layer 7 formation process, the effect of the present application can be obtained. Presumed to be. However, in order to obtain even higher effects of the present application, it is desirable that all the steps of S 1S4 are performed continuously from the atmosphere and continuously performed.
  • the FP-side dielectric layer 7 is formed with a final thickness of 110 ⁇ m on the surface of the front panel glass 10 so as to cover the arranged display electrodes 4 (S3).
  • a material capable of forming a dense dielectric layer having a dielectric constant ⁇ force 3 ⁇ 4 or more and 5 or less and having a dielectric strength of 1.0 ⁇ 10 6 V / cm or more is desired.
  • a material such as Si 2 O 3 can be used.
  • the FP-side dielectric layer 7 uses a dielectric layer material containing TEOS (tetraethoxysilane), and is formed by CVD (chemical vapor deposition) or ICP-CVD (inductively coupled plasma).
  • CVD method It can form into a film using the various CVD methods formed into a film in the gas pressure reduction by Inductively Coupled Plasma CVD. Using the ICP-CVD method, it is possible to form a film at a relatively high speed.
  • FIG. 5 (c) is a schematic diagram showing the formation process of the FP-side dielectric layer 7.
  • the details of the CVD apparatus 31 are simplified.
  • the oxygen gas heated to high temperature in the plasma and activated is allowed to reach the vicinity of the panel by diffusion, and the activated oxygen gas reacts with the TEOS vaporized gas to cause the SiO gas on the front panel glass 10 to be SiO.
  • a film is produced. Chamber pressure and
  • FP-side dielectric layer consisting of a dense and thin SiO film with a high deposition rate of about 2.5 mZ by appropriately selecting the conditions for the oxygen gas flow rate and TEOS vaporized gas supply amount 7
  • the panel heating temperature during the formation of the FP-side dielectric layer 7 is a relatively low temperature process of room temperature or higher and 300 ° C or lower as in the conventional case. It is possible to quickly produce a dielectric layer having characteristics. In addition, since the firing process is not performed, the front panel FP can be prevented from warping and cracking.
  • the FP-side dielectric layer 7 finally contains 80 to: L00% SiO.
  • the dielectric layer characteristics are as follows: the thickness of the FP-side dielectric layer 7 can be increased by ensuring a high withstand voltage of 1.0 X 10 6 VZcm or higher and setting the dielectric constant ⁇ in the range of 2 to 5. It is desirable because the withstand voltage can be kept high even if the thickness is reduced to the range of 1 m to 10 m. Thus, if the FP-side dielectric layer 7 is thinned, the discharge start voltage can be reduced, and excellent light emission efficiency can be realized while reducing power consumption.
  • the FP-side dielectric layer 7 is thus formed.
  • the front panel glass 10 on which the FP-side dielectric layer 7 is formed is transferred from the CVD apparatus 31 to the next vacuum film forming apparatus 32.
  • the atmosphere at this time is, for example, N or Ar inert gas.
  • a protective layer is formed on the main surface of the dielectric layer (S4).
  • a vacuum film formation process method such as an electron beam evaporation method or a sputtering method is used in a vacuum film formation device 32 whose interior is kept in a reduced pressure atmosphere. Then, a material containing MgO which is a metal oxide is formed on the surface of the dielectric layer. Ar gas or the like is used as the sparking gas.
  • the "vacuum film forming process” referred to here refers to a process for forming a thin film in a vacuum state.
  • a vacuum evaporation method In addition to the electron beam evaporation method and the sputtering method, a vacuum evaporation method, a plasma beam evaporation method, There are methods such as CVD, which can be used to form a protective layer by a low-temperature process.
  • CVD chemical evaporation method
  • the protective layer is formed while blocking the outside air force after the dielectric layer, so that a high quality protective layer can be stably maintained and formed.
  • the vacuum film forming process method at a relatively low temperature, it is possible to suppress the occurrence of warping and cracking of the panel caused by the conventional high temperature process.
  • film formation is performed with a final thickness of 0.4 to 1 ⁇ m.
  • the protective layer 8 By forming the protective layer 8 with MgO, the protective layer 8 having an excellent secondary electron emission coefficient, good transparency, and high spatter resistance can be formed.
  • the protective layer 8 may be made of other metal oxides other than MgO, for example, The same can be applied to the protective layer 8 composed of CaO, BaO, SrO, MgNO, ZnO, etc.
  • the front panel FP is stored in a reduced pressure atmosphere without being exposed to the outside air until the next sealing step is completed.
  • the front panel FP does not come into contact with the outside air until the end of the sealing process (S1S4), and therefore moisture and impurity gas caused by the outside air are prevented from adhering to the protective layer 8 and the dielectric layer.
  • the protective layer 8 it is possible to maintain the state immediately after film formation (secondary electron emission efficiency, sputtering resistance, etc.) high, and the reliability such as light emission efficiency may be impaired. Absent.
  • the display electrode 4 the FP-side dielectric layer 7 and the protective layer 8 in a reduced-pressure atmosphere, these can all be configured as a dense thin film structure, and have obtained excellent voltage resistance. It is possible to exhibit excellent luminous efficiency.
  • the back panel BP is managed under a reduced pressure atmosphere until the sealing process is completed without touching the outside air.
  • FIG. 6 is a schematic cross-sectional view showing a back panel BP formation step in the PDP manufacturing method.
  • a metal electrode material containing an A1-Nd metal material is used on the surface of the back panel glass 11.
  • a plurality of data electrodes 12 made of A 1 -Nd alloy thin films are formed by a low temperature process by performing a desired patterning by a dry etching method using a vacuum film forming process method similarly to the bus electrode ( S5).
  • the data electrode 12 is not limited to the method of forming the Al-Nd-based metal material force in a vacuum.
  • the data electrode 12 is constituted by a method of baking after applying an Ag paste, or a stacked structure of Cr / Cu / Cr. You may take the method to do.
  • a BP-side dielectric layer 13 is formed with a final thickness of about 2 m so as to cover the data electrode 12 (S6).
  • the back panel glass 11 on which the data electrodes 12 are formed is carried into the CVD apparatus 41.
  • the BP-side dielectric layer 13 is produced in the same manner as the FP-side dielectric layer 7.
  • the back panel BP is continuously vacuumed or depressurized in the dielectric layer forming step (S6) and the partition wall forming step (S7), and further during the movement / storage period of the panel. We will manage with. This prevents moisture and impurity gases originating from the atmosphere from adhering to the protective layer 8 and the like.
  • the BP-side dielectric layer 13 may be configured by printing and applying a low-melting glass material, as in the conventional case, followed by firing.
  • a plurality of partition walls are formed along the extending direction for each data electrode 12 (S7).
  • a lead-free glass material can be used, and the material is applied as a paste to the panel surface and baked.
  • a stripe-shaped or cross-girder-shaped partition wall can be formed by performing known predetermined patterning.
  • a phosphor layer is formed between the barrier ribs as shown in FIG. 6 (step d).
  • R, G, B color phosphor materials respectively (Y, Gd) BO: Eu, Zn
  • Phosphor powders such as SiO 2: Mn and BaMg Al 2 O 3: Eu are used. This is a-turpi
  • a phosphor layer is formed by performing a baking process at about 500 ° C. (S8).
  • the sealing layer material is applied to the outer periphery of the back panel BP formed including the barrier ribs 14 and the phosphor layers 15 (S9).
  • the material is applied at least in a single layer (preferably double) using a dispenser.
  • the sealing layer 17 has a double shape around the back panel BP, and as the sealing material, the inner sealing coating layer 1711 mainly applies a highly airtight material, Outside A high-strength material is mainly applied to the sealing coating layer 1721.
  • the application order of the two materials is not limited and may be reversed.
  • a material including at least one of an organic resin material, an inorganic material, and a metal material can be used as the material of the sealing layer 17.
  • a composite material containing a mixture of at least two of organic resin materials, inorganic materials, and metal materials is used as the material of the sealing layer 17.
  • a composite material force comprising a silica component as a main component of about 70 wt% and an epoxy resin material added thereto can be configured. It is desirable to add no xylene component.
  • the material of the sealing layer to be highly airtight material of the sealing coating layer 1711
  • SiO material of the sealing coating layer 1711
  • the high-strength material (the material of the sealing coating layer 1721), a material obtained by slightly reducing the inorganic material of the sealing layer material strength to achieve the above high airtightness can be used.
  • the back panel BP is manufactured as described above.
  • FIG. 7 is a schematic cross-sectional view showing the sealing step and the like (S 10 to S 12) of the method for producing a PDP in the present invention.
  • the front panel FP and the back panel BP managed under the reduced-pressure atmosphere are, as shown in FIG. 7 (step a), a passage in a vacuum or under a reduced pressure (lOOkPa force of 0.13 Pa) 71
  • a gas mixture containing Xe-Ne rare gas. S10
  • the vacuum package chamber 72 is opened, and the front panel FP is moved to the assembly and bonding step shown in FIG. 7 (b) without being exposed to the atmosphere.
  • FIG. 7 (step b) in the chamber 70 replaced with the discharge gas, the front panel FP and the back panel BP are opposed to each other with the partition wall interposed therebetween, and are assembled.
  • Paste together SI 1).
  • Step c As shown in the figure, from the outside or inside of the chamber 70, ultraviolet rays (at room temperature) are applied to the sealing coating layers 1711 and 1721 arranged in the outer peripheral area of the front panel FP and the back panel BP. UV light).
  • the sealing coating layers 1711 and 1721 are cured with ultraviolet rays, and the sealing layer 17 consisting of the first sealing layer 171 and the second sealing layer 172 is sealed and formed simultaneously with sealing. (S12).
  • the sealing method may include sealing the sealing layer by a method including at least one of a heat bonding method, an ultraviolet curing bonding method, a laser welding method, and an ultrasonic welding method. I do not care. Depending on the sealing layer material used, UV curing and heating can be performed simultaneously to improve its performance.
  • the inner sealing layer material is first applied and then cured and sealed, and then the outer sealing layer material is applied and cured. It may be. At this time, if it is applied so that the outer periphery of both panels is wrapped with the outer sealing layer material, higher confidentiality and higher strength can be expected.
  • the discharge gas is sealed simultaneously with sealing the sealing layer 17 in a state where the discharge gas is sealed in the panel gap in the chamber 70. Therefore, if this method is used, there is an advantage that an extremely flat and smart PDP can be produced without the need to dispose a tip tube or the like in the PDP.
  • both panels are sealed with a discharge gas in a reduced pressure atmosphere without being exposed to the atmosphere, and therefore, there is no adsorption of impurity gas due to the atmosphere. Further, by performing the sealing step in a low temperature process, the generation of carbon gas due to the sealing layer 17 in the step is reduced. For this reason, the BP-side dielectric layer 13 and the protective layer 8 inside the panel are reduced as much as possible by the impurity gas, and it is possible to maintain good luminous efficiency and reliability over a long period of time. .
  • the sealing step (S12) is performed in a reduced-pressure atmosphere under normal temperature conditions, but it may be desirable to perform some heating depending on the type of sealing material used. In this case, supplementary heating may be performed in the chamber. Or in the subsequent process In the aging process, the adhesive strength may be increased by heating to a low temperature (about 100 ° C).
  • the sealing step based on the above settings, the sealing layer material disposed between the panels is fired by a low temperature process, and the firing gas is removed from the entire panel. Therefore, the gas can be removed at a remarkably high speed compared to the conventional case using the tip tube. In addition, since it is not necessary to provide a tip tube on the panel, it is possible to produce a flat and smart PDP with a trace of the tip tube in appearance.
  • the glass frit used in the conventional sealing process needs to be performed at a firing temperature of about 450 ° C. This causes an unnecessary chemical reaction of organic components such as a binder derived from the glass frit, and PDP There was a problem that it was likely to remain inside.
  • the firing temperature is about 300 ° C. The sealing process can be performed in the low temperature range up to. As a result, the generation of the unnecessary chemical reaction can be suppressed, so that the amount of carbon gas to be removed can be greatly reduced.
  • the power described above is an example of a configuration using panel glass in the PDP, and the present invention is not limited to this, and it is also possible to use materials other than glass materials (for example, plastic panels).
  • plastic panels When a plastic panel is used for a front panel and a back panel, in the sealing process, the periphery of the panels can be sealed by ultrasonic welding.
  • the sealing step is performed by a heat welding method, depending on the material selection of the sealing layer, it may be preferable to perform a supplementary heat treatment in addition to the sealing step. In such a case, it is desirable to continue the heat welding in the aging process.
  • FIG. 2 a configuration example (FIG. 2) when a metal material is used for the sealing layer 17 will be described.
  • the PDP shown in FIG. 2 is characterized in that a metal layer 173 is interposed between glass frit layers 174 provided in the sealing layer 17 along the panel thickness direction.
  • the glass frit layer 174 is made of a material having the same low-melting glass composition as that of the prior art, and is previously fixed to the outer peripheral surfaces of both panels FP and BP before the sealing step. Since the metal layer 173 may be used in a fixed amount, the amount of carbon gas derived from the glass frit can be reduced as compared with the conventional sealing layer.
  • the metal layer 173 is formed as a layer having a U-shaped cross-sectional shape along the panel cross-sectional direction.
  • a material with a coefficient of thermal expansion similar to that of the panel glass FP or BP is desired, and a material with similar characteristics is desired.
  • the composition of the metal layer 173 is not limited to this.
  • the method for forming the sealing layer 17 is generally the same as the manufacturing method of the first embodiment. Both panels have L-shaped cross-sectional shapes on the glass frit layers before the sealing step. Laminate each metal material. Then, the metal material is melted and bonded by laser irradiation from the outside, with the metal material facing and the panels facing each other.
  • the effect similar to that of PDP 1 shown in FIG. 1 is achieved.
  • sealing is performed simply by melting the metal, so that impurity gas is generated during sealing. Can be suppressed as much as possible. Therefore, the protective layer 8, the FP-side dielectric layer 7, and the BP-side dielectric layer 13 can be prevented from being deteriorated and can be sealed well, and high reliability of the PDP can be obtained.
  • FIG. 3 is a schematic cross-sectional view showing the configuration of the PDP in the second embodiment.
  • the feature of the second embodiment is that the sealing layer 17 is composed of a double layer of a first sealing layer 176 and a second sealing layer 177, and an outer sealing layer (second The sealing layer is formed by alternately laminating two different thin film layers 1771 and 1772 in the panel thickness direction.
  • the first sealing layer 176 is made of the highly airtight material described in the first embodiment.
  • the characteristic second sealing layer 177 two materials selected from an organic material, an inorganic material, and a metal material are formed into thin films 1771 and 1772, which are alternately stacked in the panel thickness direction.
  • the second sealing layer 177 having the multilayer structure has a very high air density compared to a normal sealing layer made only of an organic adhesive layer, etc., and has the property of easily preventing moisture and oxygen gas from passing therethrough. It is advantageous as a PDP configuration.
  • the second sealing layer 177 formed of the multilayer multilayer film 178 wraps at least one of both panels from the outside of the periphery (in this case, the L-shaped cross-sectional shape protrudes from the periphery of the panel) It is desirable to improve the confidentiality of the panel.
  • the second sealing layer 177 is formed by the following method after the first sealing layer 176 is formed in a reduced-pressure atmosphere in the same manner as in the first embodiment.
  • an A1 thin film is formed by a sputtering method in a reduced-pressure atmosphere, and an organic film is formed thereon by a plasma polymerization method.
  • a method can be used in which a resin layer is formed and this is repeated alternately.
  • the number of laminated layers depends on the thickness of the thin film, but if it is about several / zm, about 100 layers are considered desirable.
  • the front panel FP and the back panel BP are manufactured separately from the atmosphere, and are continuously sealed with a low-temperature process.
  • the protective layer 8 and the dielectric layers 7 and 13 are prevented from being altered, and excellent reliability and sealing performance are exhibited.
  • a flat and smart PDP that does not require the use of a tip tube for the PDP at the time of sealing is realized.
  • the second sealing layer 177 has a property of hardly causing damage even when the panel is squeezed to some extent in the thickness direction of the panel due to its laminated structure, and exhibits excellent airtightness. For this reason, improvement in the sealing and reliability of the PDP can be expected. Therefore, such a second sealing layer 177 is made of a flexible plastic plate instead of a panel glass such as 10, 11. It seems to be suitable for PDP equipped with a panel.
  • FIG. 8 is a configuration diagram of the PDPlOla according to the third embodiment. Of these, FIG. 8 (a) is a sectional view in the thickness direction of PDPlOla, and FIG. 8 (b) is a schematic front view of PDPlOla.
  • the outermost peripheral region of the sealing layer 18a disposed so as to surround the outer periphery of both panels FP and BP is Along with the panel thickness direction, it has a structure in which three layers of an adhesive layer 181a, a seal layer 182a, and an adhesive layer 183a are laminated in the same order.
  • the inner region surrounded by the three-layer structure is configured as an integral adhesive layer 184a.
  • the sealing layer 18a is sealed together with the sealing step in a reduced-pressure atmosphere filled with a discharge gas inside the chamber.
  • the adhesive layers 181a, 183a, and 184a are made of a sealing layer material having excellent confidentiality similar to that of the sealing layer described in the first embodiment, and are made of a material that does not include a binder component.
  • the sealing layer material is sandwiched and formed by a printing method or the like.
  • the sealing process can be performed relatively easily in a low-temperature process in a temperature range from room temperature to 300 ° C., and a sealing layer having good sealing performance can be realized.
  • the seal layer 182a substantially does not contain a binder component! /, A material (silica material as a main component (about 70 wt%), and a small amount of organic resin (epoxy, acrylic, etc.) material. Material).
  • the discharge gas is confined, and external oxygen gas, carbon dioxide gas, or the adhesive layers 181a, 183a, 184a can prevent the inflow of organic solvent volatile gases into the panel. It is formed as an airtight layer.
  • the sealing layer 182a may be configured by a packing material containing a vacuum packing material, for example, an elastic material such as a rubber material, or a metal material such as Al or Cu. wear.
  • a packing material containing a vacuum packing material for example, an elastic material such as a rubber material, or a metal material such as Al or Cu. wear.
  • an organic material such as epoxy resin is used as the material for the seal layer!
  • this is actually added in a small amount to an inorganic material such as a silica material. Since it is used (less than 30 wt%! /, In amount), it is difficult for the organic resin material to generate impurity gas as in the past. Accordingly, the organic material such as epoxy resin does not cause the problem of impurity gas in the present application.
  • FIG. 9 is a schematic cross-sectional view showing a configuration of PDP 102a in the fourth embodiment.
  • a uniform adhesive layer 282 force S is also formed on the outermost periphery of the sealing layer 28a, and as a result, the paper layer 281, the adhesive layer 282a, and the paper
  • the three-layer structure of the layer 283a is configured such that it is sandwiched by the adhesive layer 284 from both side surfaces of the panel main surface in the planar direction.
  • the sealing layer 28a is formed by stacking materials by a printing method or the like before the sealing step.
  • sealing layer 283a is provided on the inner and outer peripheries of the panel, oxygen gas and carbon dioxide from the outside of the panel are mixed, or carbonic acid caused by the adhesive layers 282a and 284 during the sealing process. Gas inflow can be more effectively prevented.
  • FIG. 10 is a schematic cross-sectional view showing the configuration of PDP 103a in the fifth embodiment.
  • the feature of Embodiment 6 is that, in the sealing layer 28a, a three-layer structure of a sealing layer 281a, an adhesive layer 282a, and a sealing layer 283a is provided along the plane of the panel main surface along the panel thickness direction. And the sealing layer 283a on the outer periphery of the panel is exposed to the outside.
  • the sealing layer portion is sandwiched between the sealing layers 283a on both sides, and is formed at a plurality of locations.
  • the sealing layer 28a can be easily disposed on the panel surface.
  • an increase in the bonding area of the sealing layer 28a to the panel surface can be expected to further improve the bonding strength.
  • FIG. 11 is a schematic cross-sectional view showing the configuration of PDP 104a in the sixth embodiment.
  • the sixth embodiment has a configuration in which the adhesive layer on the outermost periphery of the force sealing layer 48a, which is substantially the same as the fifth embodiment, is omitted. If sealing properties can be expected without forming a large amount of sealing layer due to the relatively small size of the PDP, even if the outermost adhesive layer is omitted as described above, The same effects as in Embodiments 3 to 5 can be expected.
  • FIG. 12 is a schematic cross-sectional view showing a configuration of PDP 105a in the seventh embodiment.
  • the feature of the seventh embodiment is that it is composed of the outermost peripheral force of the sealing layer 58a and the adhesive layer a formed continuously in the thickness direction between the two panels.
  • the sealing layer 58a of the PDP 105a is composed of the sealing layer 58a having three layers of the adhesive layer 581a, the sealing layer 582a, and the adhesive layer 583a.
  • An adhesive layer 585a is formed and arranged continuously and continuously around the panel on the outermost peripheral side.
  • the shape of the sealing layer 58a can be set in advance by laminating and arranging the respective materials in the same manner as in the third embodiment before the sealing step.
  • the innermost peripheral layer in the width direction of the sealing layer 58a is a seal layer 584a formed continuously from the seal layer 582a.
  • the sealing layer 58a may be formed in a single layer in the width direction along the plane of the panel main surface. It may be good or it may be doubled.
  • the same effects as those of the third to sixth embodiments are obtained, and the adhesion area along the plane of the main surface of the sealing layer 58a is dramatically increased. Therefore, the effect of sealing while maintaining good adhesive strength is also exhibited.
  • FIG. 13 is a schematic cross-sectional view showing a configuration of PDP 106a in the eighth embodiment.
  • the eighth embodiment is characterized in that the force sealing layer 68a, which is generally the same as the seventh embodiment, has a gap 686 secured in the center in the width direction along the plane of the panel main surface.
  • the same effect as in the seventh embodiment can be obtained. Moreover, even if the size of the sealing layer 68a is increased by the introduction of the gap portion 68 6, the density of the sealing layer 68a as a whole does not increase so much, so that the PDP as a whole contributes to light weight. There are also advantages to this.
  • FIG. 14 is a front view showing the configuration of the PDP 107a according to the ninth embodiment.
  • the feature of the ninth embodiment is that the single sealing layer 17a uniformly arranged by the sealing layer 784a having a high airtight laminating force around the panel of the PDP 107a corresponds to the four corners.
  • the sealing layer 78a having a three-layer structure of the adhesive layer 781a, the seal layer 782a, and the adhesive layer 783a is disposed in the region.
  • the adhesive layer 781a, 783a has only to be used in a limited area at the four corners of the panel, so that the same effect as in Embodiment 38 can be obtained.
  • the use of adhesive layer material is dramatically reduced. Therefore, in the sealing step, generation of unnecessary impurity gas such as carbon dioxide caused by the binder or the like is suppressed, and the dielectric layer and the protective layer can be kept good.
  • the sealing layer 78a can be formed by laminating the materials of the adhesive layer 781a, the seal layer 782a, and the adhesive layer 783a.
  • the sealing layer 78a is a force shown in the example provided at the four corners of the panel.
  • it may be provided in at least a part of the periphery of the panel.
  • the sealing adhesive portion having three layers of the adhesive layer 282 (382) a, the sealing layer 283 (383) a, and the adhesive layer 281 (381) a in Embodiments 4 and 5 is used as the sealing layer 17a in FIG.
  • the sealing adhesive portion having three layers of the adhesive layer 282 (382) a, the sealing layer 283 (383) a, and the adhesive layer 281 (381) a in Embodiments 4 and 5 is used as the sealing layer 17a in FIG.
  • FIG. 15 is a diagram showing the configuration of the PDP 201b according to the tenth embodiment.
  • FIG. 15 (a) is a front view of the back panel BP
  • FIG. 1 (b) is a cross-sectional view of the PDP.
  • the PDP 201b shown in the figure basically includes a front panel glass 10b and a bag panel glass 21b each having a display electrode 12b and a data electrode 22b on opposite surfaces, and the display electrode 12b and data at a desired interval.
  • the electrodes 22b are stacked so as to be orthogonal to each other, and the discharge space 26b is formed through the gasket layer lb provided on the outer periphery of the panel glass 1lb and 21b and the sealing layer 2b provided on the outer periphery of the gasket layer lb. It has a sealed structure under reduced pressure.
  • the barrier ribs 24b and the phosphor layers 25b are illustrated in a simplified manner.
  • a metal material including one or more selected from the medium strength of Cu, Al, Zn, Ag, and In can be used.
  • the material for the sealing layer 2 examples include thermosetting resins such as epoxy resins.
  • the compressive force is transmitted to the vicinity of the gasket layer lb by the stress due to the shrinkage effect during curing of 2b and the pressure difference between the reduced discharge space 26b and the atmospheric pressure, so that a good sealed state is maintained.
  • the PDP 201b according to the tenth embodiment is characterized in that a gasket layer lb made of a metal gasket is used instead of a sealing layer material made of glass frit unlike a sealing layer having a conventional configuration.
  • a gasket layer lb made of a metal gasket is used instead of a sealing layer material made of glass frit unlike a sealing layer having a conventional configuration.
  • the impurity gas is prevented from flowing into the discharge space 26b in the sealing step of heating in the sealing device during the manufacturing process.
  • a metal such as Cu, Al, Zn or Ag is exposed facing the discharge space 26b. Since it is a gasket, even if the sealing process is performed at a high temperature of several hundred degrees C., the impurity gas is not released from the metal material, and the dielectric layer and the protective layer can be maintained well.
  • gasket material a gasket material such as graphite or PTFE may be used in addition to the metal.
  • thermosetting resin is used as the sealing layer 2b.
  • the metal gasket and wettability are good, and a glass frit may be used. Also in this case, since it is a metal gasket that is exposed to the discharge space 26b, the emission of impurity gas from the glass frit to the discharge space 26b can be prevented.
  • This sealing structure is excellent in terms of matching the thermal expansion coefficients of the panel glass l lb, 21b and the sealing glass frit.
  • a layer having a double structure of the gasket layer lb and the sealing layer 2b is used as the sealing means of the PDP 201b.
  • the total thickness limit of the gasket layer and the sealing layer provided on the PDP is almost constant due to the size specification of the PDP, the combination of these thickness adjustments becomes a problem.
  • the relationship between the materials of the gasket layer and the sealing layer and the gasket layer thickness a and the sealing layer thickness b along the plane of the panel main surface can be adjusted as follows.
  • the sealing layer has high airtightness. If the thickness b of the sealing layer is extended, the confidentiality can be improved.
  • the gasket layer since the gasket layer uses a metal material or the like, it has high strength. If the thickness a of the gasket layer is extended, the mechanical strength of the PDP can be improved. However, when a good sealing property is required for the gasket layer, it is necessary to use a soft metal material that promotes plastic deformation during the sealing process. Slightly lower.
  • FIG. 16 is a cross-sectional view of sealing device 40b for sealing the PDP of the tenth embodiment.
  • the apparatus 40b includes an atmospheric furnace 41b equipped with a heater (not shown) capable of heating up to several hundred ° C at room temperature, an exhaust pipe 44b connected to the panel fixing base 42b, the vacuum pump 43b, and a discharge gas supply cylinder 45b.
  • the gas supply pipe 46b is connected to the.
  • FIG. 5A is a diagram showing the state of the sealing device 40b in the mounting process performed prior to the exhaust and discharge gas introducing process.
  • the bag panel glass 21b is placed on the fixed base 42b in the atmosphere furnace 41b with the electrode surface facing upward, and the outer peripheral part of the bag panel glass 21b is a metal as a gasket layer lb that also has Cu force. A gasket is arranged.
  • the front panel glass 10b with the metal block 47b is supported by a support frame (not shown) while facing the bag panel glass 21b, and a predetermined interval is opened. And placed on the bag panel glass 21.
  • the two panel glasses l lb and 2 lb are arranged so that the surfaces on which the display electrodes 12b and the data electrodes 22b are formed face each other.
  • the discharge gas supply cylinder 45b also introduces the discharge gas into the sealing device 40b.
  • both the panel glasses l ib and 21b are in an open state, the fluid resistance is low and high-speed exhaust and discharge gas can be introduced at high speed.
  • the support frame (not shown) is moved downward to align the front panel glass 10b and place the metal gasket on both panel glasses 1 lb and 21b. After overlapping so as to be inserted, remove the support frame from the front panel glass 10b. As a result, both panels are uniformly loaded by the metal block 47b attached to the upper surface of the front panel glass 10b. Then, after injecting epoxy resin as the sealing layer 2b into the groove formed by the metal gasket on the outer periphery of the panel and the inner walls of both panel glasses 1 lb and 21b, the sealing device 40b is filled with epoxy resin. Heat to the curing temperature of. As a result, the sealing process was performed, and the discharge gas was introduced into the discharge space 26b between the panel glasses l lb and 21b. PDPb is completed.
  • FIG. 17 shows another example of the PDP sealing process according to the tenth embodiment, and shows a process in the case of using an ultraviolet curable resin (sealing layer 3b) as the sealing layer.
  • the figure shows the inside of the atmosphere furnace with 20 lbs of PDP before completion.
  • the gasket layer 1 disposed on the outer peripheral part of the 2 lb of the nod panel glass while aligning the two panel glasses l lb and 21b through the exhaust process in the atmosphere furnace and the discharge gas introduction process.
  • Metal gaskets are overlaid so that they are inserted into both panel glasses.
  • both panel glasses l lb and 21b are uniformly loaded by the metal block 47b attached to the upper surface of the front panel glass b. Then, after injecting ultraviolet curing resin as the sealing layer 3b into the groove formed by the metal gasket b on the outer periphery of the panel and the inner walls of both panel glasses b, ultraviolet rays are applied for a predetermined time from the side cover of the panel. The sealing process is performed by irradiating and curing the resin.
  • the light transmitted through the panel glass can also contribute to the curing, so that there is no unevenness in curing, which is preferable. It is.
  • a pair of ultraviolet lamps 48b for irradiating the outer periphery of the panel is provided. It is not necessary to heat the sealing layer 3b for curing, the sealing layer 3b is cured at a high speed by ultraviolet rays, and the temperature change is small, so that both panel glasses can be accurately aligned. It is a feature of the method.
  • FIG. 18 is a diagram showing the configuration of the PDP 202b according to Embodiment 11, where FIG. 18 (a) is a front view of the back panel BP, and FIG. 18 (b) is a cross-sectional view of the PDP 202b.
  • the PDP202b shown in this figure is different from the embodiment 10 in that the gasket layer lb is fitted into the groove 101b provided in the outer peripheral portion of the panel glass rib, 21b, and the gasket layer 1b and the outer peripheral portion thereof are provided.
  • the sealing layer 2b is sealed through the sealing layer 2b.
  • Both panel glasses l lb and 21b are hermetically sealed because the compressive force is transmitted to the metal gasket due to the stress caused by the shrinkage effect of the sealing layer 2b and the pressure difference between the reduced discharge space 26b and the atmospheric pressure. Is maintained.
  • the gasket layer lb is fixed to the groove 101b provided in both the panel glasses l lb and 21b, the manufacturing becomes easy and the sealing performance is improved.
  • FIG. 19 is a diagram showing the configuration of the PDP 203b according to the twelfth embodiment.
  • FIG. 19 (a) is a front view of the back panel BP
  • FIG. 19 (b) is a cross-sectional view of the PDP 203b.
  • the PDP 203b shown in the figure is different from the embodiment 10 in that the display electrode 12b, the data electrode, and the front panel glass 10b each having an electrode on one side and the bag panel glass 2lb at a desired interval. 22b are stacked so as to be orthogonal to each other with a space between them, and the gasket layer lb is fitted in the groove 101b provided in the outer peripheral portion of the panel glass l lb and 21b, and the gasket layer lb and the outer peripheral portion are intermittently inserted. The structure is sealed with a sealing layer 2b provided on the surface.
  • the function of the sealing layer 2b is only to provide a compressive force for holding the pressure bonding of both panel glasses, and does not require a sealing function. For this reason, it is sufficient to partially dispose the sealing layer 2b only in a portion where the necessary strength for maintaining the pressure bonding that does not need to be continuously disposed on the outer peripheral portion is obtained.
  • the partial arrangement reduces the number of members and simplifies the process, thus reducing costs.
  • FIG. 20 is a plan view (a) and a sectional view (b) of PDP 204b according to the thirteenth embodiment.
  • the PDP204b shown in this figure is characterized by the front panel glass 10b having the display electrode 12b and the data electrode 22b on one side and the bag panel glass 21b via a gasket layer lb provided on the periphery of the panel glass.
  • the display electrode 12b and the data electrode 22b are superposed so as to be orthogonal to each other, and are firmly sealed to each other by a restraining jig such as a clip 6b provided in the peripheral portion.
  • the metal material is a metal gasket having a material strength including one or more selected from Cu, Al, Zn, Ag, and In, and has a U-shaped cross-sectional shape. Both panels are fixed in a crimped state with the clip 6b. According to the above configuration, both the panel glasses l lb and 21b are securely bonded to the metal gasket by the compressive force generated by the pressure difference between the decompressed discharge space 26b and the atmospheric pressure in addition to the compressive force by the clip 6b. A tight seal is maintained.
  • the PDP 204b according to the fourteenth embodiment does not require a heat treatment for melting or curing the sealing layer or the glass frit due to the use of the clip 6b as the restraining jig. It has the merit that can be processed.
  • a metal gasket such as Cu or zinc, and the heat treatment for sealing is not required, so that impurity gas due to glass frit is mixed into the discharge space 26b. The risk of doing is very low.
  • a frame or the like having a U-shaped cross-section can be used in addition to the clip. In this case, it is necessary to apply tension so that the two panel glasses 1 lb and 21b can be pressed against each other when they are fitted to the two panel glasses l lb and 21b.
  • the completed front panel FP and back panel BP are first inserted into the atmosphere furnace facing each other, evacuated, and then discharged into the atmosphere furnace. Is introduced. At this time, both the front panel FP and the back panel BP are manufactured in the same manner as the manufacturing method of the first embodiment so as not to be exposed to the outside air.
  • the gasket layer lb disposed on the outer periphery of the notch panel glass 21b is overlapped so as to be inserted between the two panel glasses l lb and 21b. While aligning, apply a uniform load to the upper surface of the front panel glass 10b with a metal block. Then, the clip 6b, which is a binding jig, is attached to the four sides of both panel glasses l lb and 21b in the same container, thereby completing the PDP 204b of the thirteenth embodiment.
  • the present invention can be used for a wide range of thin televisions ranging from small to large, high-definition televisions, or PDPs of thin information equipment terminals. In other words, it can be used in the video equipment industry, information equipment industry, advertising equipment industry, industrial equipment and other industrial fields, and its industrial applicability is very wide and large.
  • FIG. 1 is a diagram showing a schematic configuration of a PDP according to a first embodiment.
  • FIG. 2 is a diagram showing a schematic configuration in the nomination of the PDP in the first embodiment.
  • FIG. 3 is a diagram showing a schematic configuration of a PDP according to a second embodiment.
  • FIG. 4 is a flowchart showing a manufacturing process of a PDP in the present invention.
  • FIG. 5 is a schematic diagram showing a process of forming a front panel FP according to the PDP in the present invention.
  • FIG. 6 is a schematic diagram showing a process of forming a back panel BP according to the PDP in the present invention.
  • FIG. 7 is a schematic diagram showing a PDP sealing / sealing process in the present invention.
  • FIG. 8 is a diagram showing a schematic configuration of a PDP in a third embodiment.
  • FIG. 9 is a diagram showing a schematic configuration of a PDP according to the fourth embodiment.
  • FIG. 10 is a diagram showing a schematic configuration of a PDP according to a fifth embodiment.
  • FIG. 11 is a diagram showing a schematic configuration of a PDP according to the sixth embodiment.
  • FIG. 12 is a diagram showing a schematic configuration of the PDP in the seventh embodiment.
  • FIG. 13 is a diagram showing a schematic configuration of a PDP in an eighth embodiment.
  • FIG. 14 is a diagram showing a schematic configuration of a PDP according to the ninth embodiment.
  • FIG. 15 is a diagram showing a schematic configuration of a PDP according to the tenth embodiment.
  • FIG. 16 is a schematic diagram showing a process of the PDP manufacturing method according to the tenth embodiment.
  • FIG. 17 is a schematic diagram showing a process (ultraviolet ray curing) of a PDP manufacturing method according to the tenth embodiment.
  • FIG. 18 shows a schematic configuration of the PDP according to the eleventh embodiment.
  • FIG. 19 is a diagram showing a schematic configuration of the PDP of the twelfth embodiment.
  • FIG. 20 is a diagram showing a schematic configuration of a PDP according to the thirteenth embodiment.
  • FIG. 21 is a schematic cross-sectional view showing a discharge cell structure which is a discharge unit of a conventional surface discharge AC type PDP.

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Manufacturing & Machinery (AREA)
  • Gas-Filled Discharge Tubes (AREA)
  • Manufacture Of Electron Tubes, Discharge Lamp Vessels, Lead-In Wires, And The Like (AREA)

Abstract

Est présenté un écran plasma présentant de bonnes performances d'affichage d'image, préservé de toute détérioration dans une couche diélectrique et où une couche protectrice est soumise à un bon procédé de scellement. Est également décrit un procédé de production de cet écran plasma. Est précisément présenté un écran plasma dans lequel un panneau avant (10) et un panneau arrière (11) sont agencés en face à face à une certaine distance et la périphérie des panneaux est scellée par une couche de scellement (17). La couche de scellement (17) est composée d'un matériau contenant au moins un élément choisi parmi un matériau de résine organique, des matériaux inorganiques et des matériaux métalliques (notamment un matériau composite contenant principalement un matériau de silice auquel est ajouté un matériau de résine d'époxy).
PCT/JP2005/014741 2004-08-17 2005-08-11 Écran plasma et son procédé de fabrication WO2006019032A1 (fr)

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JP2006531727A JPWO2006019032A1 (ja) 2004-08-17 2005-08-11 プラズマディスプレイパネルとその製造方法
US11/572,902 US20080211408A1 (en) 2004-08-17 2005-08-11 Plasma Display Panel and Method for Manufacturing Same
CN2005800345241A CN101040361B (zh) 2004-08-17 2005-08-11 等离子体显示面板及其制造方法

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JP2004-237717 2004-08-17
JP2004237717 2004-08-17
JP2004-254891 2004-09-01
JP2004254891 2004-09-01
JP2005-080490 2005-03-18
JP2005080490 2005-03-18

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WO2007119676A1 (fr) * 2006-04-10 2007-10-25 Ulvac, Inc. Procede de fabrication de panneau de scellement et ecran plasma
JP2007311127A (ja) * 2006-05-17 2007-11-29 Advanced Pdp Development Corp プラズマディスプレイパネル
JP2008047508A (ja) * 2006-08-10 2008-02-28 Lg Electronics Inc プラズマディスプレイ装置
JP2008130407A (ja) * 2006-11-22 2008-06-05 Ulvac Japan Ltd プラズマディスプレイパネル、プラズマディスプレイパネルの製造方法、及び成膜装置
JP2008135206A (ja) * 2006-11-27 2008-06-12 Ulvac Japan Ltd プラズマディスプレイパネル及びその製造方法
WO2008114645A1 (fr) * 2007-03-19 2008-09-25 Ulvac, Inc. Panneau d'affichage à plasma
JP2011175761A (ja) * 2010-02-23 2011-09-08 Ulvac Japan Ltd プラズマディスプレイパネル及びその製造方法
JP2012169287A (ja) * 2012-04-23 2012-09-06 Ulvac Japan Ltd 表示パネル及びその製造法

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WO2006019031A1 (fr) * 2004-08-17 2006-02-23 Matsushita Electric Industrial Co., Ltd. Écran plasma et son procédé de fabrication
KR100730144B1 (ko) * 2005-08-30 2007-06-19 삼성에스디아이 주식회사 플라즈마 디스플레이 패널
CN104599951A (zh) * 2015-01-12 2015-05-06 江西科技学院 一种显示器的制备方法

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JP2012169287A (ja) * 2012-04-23 2012-09-06 Ulvac Japan Ltd 表示パネル及びその製造法

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US20080211408A1 (en) 2008-09-04
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CN101040361A (zh) 2007-09-19
KR20070055499A (ko) 2007-05-30

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