WO2006067846A1

WO2006067846A1 - Lighting apparatus for microscope and lighting system for microscope

Info

Publication number: WO2006067846A1
Application number: PCT/JP2004/019257
Authority: WO
Inventors: Takashi Yoshimine; Masaru Nomura
Original assignee: Takashi Yoshimine; Masaru Nomura
Priority date: 2004-12-22
Filing date: 2004-12-22
Publication date: 2006-06-29
Also published as: JPWO2006067846A1

Abstract

A lighting apparatus for a microscope and a lighting system for the microscope. The body (1) of the lighting apparatus (100) for the microscope is formed in a stepped cylindrical shape. A LED light source device (4) is fitted to the upper end part of the body (1), a mounting part (1c) mountable on the eyepiece holding tube (21) of the microscope (200) is fitted to the lower end part thereof, and a built-in polarizing plate is installed therein. The mounting part (1c) of the body (1) of the lighting apparatus (100) for the microscope where a diameter is formed minimum is fittedly inserted into one eyepiece holding tube (21) of the microscope (200). Also, a polarizing plate cover (8) is installed to cover the other eyepiece holding tube (21) of the microscope (200). Thus, the lighting apparatus can be compactly manufactured at low cost and perform coaxial epi-illumination observation.

Description

Specification

Microscope illumination device and microscope illumination system

Technical field

The present invention relates to a microscope illumination device and a microscope illumination system that are used in a microscope and illuminate an observation sample.

Background art

Conventionally, when observing a metal structure, a semiconductor substrate, etc. with a microscope at a relatively high magnification, or when there is a concave / convex surface and light does not reach the deep part! / A coaxial epi-illuminator was used that introduced illumination along the axis. In this case, for example, by providing a 45 degree mirror to the top of the objective lens and illuminating the half mirror in a horizontal direction, the optical axis on the imaging side and the optical axis on the illumination side And irradiate the sample with vertical force illumination light.

[0003] However, in the coaxial epi-illumination device, in order to irradiate the illumination from the side, in addition to a unit housing a half mirror, devices such as a lamp house, fiber illumination, an external transformer, and an attachment are required. There is a problem that it is difficult to handle due to the space in the direction. In addition, these devices are expensive, and a dedicated microscope is required to install them.

[0004] Among these problems, regarding the price problem, as an illuminating device that is less expensive than the coaxial epi-illumination device, for example, one of the two eyepieces of a microscope is removed and the eyepiece lens is removed. A condensing lens attached instead of the light source device, a light source device incorporating a halogen lamp, and a light source device attached between the light source device and the condensing lens. An illuminating device comprising a fiber cable for vertical application is disclosed. (See Patent Document 1.) o

Patent Document 1: Japanese Unexamined Patent Publication No. 2000-292706 (paragraph [0005], FIG. 1, etc.)

Disclosure of the invention

Problems to be solved by the invention

However, in the illumination device disclosed in Patent Document 1, a halogen lamp is also used. The built-in light source device and the condensing lens are connected by a fiber cable, and the problem that the space is difficult to handle is still unsolved. In addition, the lighting device is designed to be attached to V or any microscope! Wow! /

[0006] In view of the circumstances as described above, an object of the present invention is to provide a microscope illumination device and a microscope illumination system that are inexpensive and compact, can perform coaxial epi-illumination observation, and have excellent versatility. There is to do.

Means for solving the problem

In order to solve the above-described problems, a microscope illumination apparatus according to the present invention includes an optical system that has an eyepiece and obtains an enlarged image of a sample, and a binocular that holds the eyepiece and has a first diameter. An illumination device for use in a microscope having at least a first eyepiece holding cylinder, a cylinder having an attachment portion that can be attached to each of the first eyepiece holding cylinders at one end, and other than the cylinder And a light source for irradiating the sample with light through the optical system.

Here, the optical system of the microscope includes, for example, an objective lens and a prism. For example, an LED (light emitting diode), a halogen lamp, or a tungsten lamp can be used as the light source. The sample is, for example, a semiconductor substrate or the like, a metal structure, a resin sample, or a biological sample. Moreover, the shape of the cylinder is not limited to, for example, a cylindrical force.

[0009] In the present invention, the light source is integrally provided at the other end of the cylindrical body, and the mounting portion at one end on the opposite side can be mounted on the eyepiece lens holding cylinder. It has a very compact and easy-to-handle configuration without using flexible materials. Further, the coaxial epi-illumination observation can be easily performed through the optical system simply by mounting the mounting portion on the first eyepiece holding cylinder. That is, even in a biological microscope designed to illuminate from below the sample, it is possible to irradiate coaxial epi-illumination light by using the microscope illumination device of the present invention, and observe irregularities and scratches on the semiconductor substrate and metal structure. can do. When observing the magnified image of the sample, for example, the microscope illumination device can be attached to one first eyepiece holding cylinder, and observation can be performed from the other first eyepiece holding cylinder. .

[0010] The microscope illumination device is provided in the cylindrical body and collects light from the light source. A condensing lens may be further provided. As a result, the light guided from the light source to the optical system becomes a parallel light flux, and observation without uneven irradiation can be performed.

[0011] According to one aspect of the present invention, in the microscope illumination device, the microscope includes a binocular second eyepiece holding cylinder having a second diameter larger than the first diameter. The microscope illumination device further includes a first adapter that can be attached to each of the second eyepiece holding cylinders and that can be attached to and detached from the attachment portion. As a result, by mounting the first adapter on the mounting portion of the cylindrical body, it is possible to easily perform the coaxial epi-illumination observation corresponding to each of the eyepiece holding cylinders having two different diameters, Improved versatility

[0012] According to one aspect of the present invention, in the microscope illumination device, the microscope has a C mount portion, and the microscope illumination device can be attached to the C mount portion. And a second adapter that can be attached to and detached from the cylindrical body via the first adapter in a state where the first adapter is attached to the part. As a result, the microscope illumination device can also be mounted on the C mount portion for mounting the imaging device normally through the first adapter and the second adapter. Therefore, it is possible to observe a magnified image of the sample from the binocular eyepiece holding tube while applying a coaxial illumination light to the sample by attaching a microscope illumination device to the C mount part. It can be used for general purposes.

[0013] A microscope illumination apparatus according to another aspect of the present invention includes an optical system that has an eyepiece and obtains an enlarged image of a sample, a binocular eyepiece holding cylinder that holds the eyepiece, and a C-matrix. An illumination device for use in a microscope having a front part, the cylindrical body having a mounting part that can be mounted on each eyepiece lens holding cylinder at one end, and the other end of the cylindrical body integrally provided with the optical unit A light source for irradiating the sample with light through a system, and a C mount adapter that can be attached to the C mount and detachable from the cylinder. As a result, for example, the microscope illumination device is attached to one eyepiece holding tube to illuminate the sample, and the sample is observed from the other eyepiece holding tube, and at the same time, an imaging device is attached to the C mount portion to take a picture. In various patterns, such as using a C-mount adapter to attach a microscope illumination device to the C-mount and observing from a binocular eyepiece holding tube. It is possible to observe and photograph the sample by illuminating the sample.

[0014] The microscope illumination device may further include a condensing lens that is provided in the cylindrical body and collects light from the light source.

An illumination system for a microscope according to the present invention includes an optical system that has an eyepiece and obtains a magnified image of a sample, and a binocular first eyepiece holding cylinder that holds the eyepiece and has a first diameter. And an illumination system used in a microscope having at least a cylindrical body having a mounting portion at one end that can be mounted on each of the first eyepiece lens holding cylinders, and integrally provided at the other end of the cylindrical body. A microscope illumination device comprising: a light source for irradiating the sample with light via the optical system; and a first polarizing plate provided in the cylindrical body for polarizing light emitted from the light source. Each of the first eyepiece lens holding cylinders is attachable to and detachable from the first eyepiece lens holding cylinder when the cylinder body is attached to the first eyepiece lens holding cylinder. A second light that polarizes the reflected light of the sample force emitted from the eyepiece; ; And a light plate.

[0016] Here, the first polarizing plate serves as a polarizer, and the second polarizing plate serves as an analyzer. In this system, the light source is integrally provided at the other end of the cylinder, and the mounting portion at the opposite end can be mounted on the eyepiece lens holding cylinder, so that the configuration is very compact and easy to handle. It has become. Further, by attaching the mounting portion to one first eyepiece lens holding cylinder and mounting the second polarizing plate to the other first eyepiece lens holding cylinder, so-called ghost and flare are eliminated. However, the coaxial epi-illumination observation can be easily performed through the optical system, and the polarization observation can also be performed.

[0017] The microscope illumination system may further include a condensing lens that is provided in the cylindrical body and collects light from the light source. As a result, the light guided from the light source to the optical system becomes a parallel light flux, so that irradiation unevenness is further eliminated, and observation can be performed while further eliminating flare and ghost.

[0018] According to one aspect of the present invention, in the microscope illumination system, the microscope includes a second eyepiece holding cylinder having a second diameter larger than the first diameter, and the microscope The mirror illumination system can be attached to each of the second eyepiece holding cylinders, and is attachable to and detachable from the first adapter that can be attached to and detached from the mounting portion and each of the second eyepiece holding cylinders. And when the first adapter is attached to the cylinder and the cylinder is attached to the second eyepiece holding cylinder, the other second eyepiece holding cylinder And a third polarizing plate that polarizes the reflected light of the sample force emitted from the eyepiece. As a result, it is possible to easily cope with coaxial epi-illumination observation and polarization observation with a microscope having an eyepiece holding cylinder having two different diameters, and the versatility is improved.

According to an aspect of the present invention, the microscope illumination system can be attached to and detached from an imaging device that can be attached to each of the first eyepiece lens holding cylinders, and the cylinder is the first of the first eyepiece lens holding cylinders. Reflected light from the sample emitted from the other first eyepiece holding cylinder when the imaging device is attached to the other first eyepiece holding cylinder and attached to the first eyepiece holding cylinder. And a fourth polarizing plate that polarizes the light. Thus, by using the fourth polarizing plate, it is possible to easily perform imaging by coaxial epi-illumination observation and polarization observation even when a sample is imaged by the imaging device.

[0020] According to one aspect of the present invention, the microscope illumination system can be attached to and detached from an imaging device that can be attached to each of the second eyepiece holding cylinders, and the cylindrical body is the one of the second eyepieces. Polarized light reflected from the sample emitted from the other second eyepiece holding cylinder when the imaging device is attached to the other second eyepiece holding cylinder attached to the eyepiece holding cylinder. And a fourth polarizing plate. As a result, in correspondence with the eyepiece holding cylinders having two different diameters, it is possible to easily photograph the sample by the coaxial epi-illumination observation and the polarization observation, and the versatility is improved.

[0021] According to an aspect of the present invention, in the microscope illumination system, the microscope has a C mount portion, and the microscope illumination system can be attached to the C mount portion, and the at least one of When the second polarizing plate is attached to the first eyepiece holding cylinder, or when the third polarizing plate is attached to the at least one second eyepiece portion, The apparatus further includes a second adapter that is attachable to and detachable from the cylindrical body via the first adapter in a state where the first adapter is attached to the attachment portion. As a result, through the first adapter and the second adapter, not only the imaging device but also the microscope illumination device is attached to the C mount part, and the eyepiece lens having two different diameters is mounted. Coaxial epi-illumination observation and polarization observation corresponding to the holder can be easily performed, and versatility is further improved. In addition, an imaging device is attached to the C-mount part, and a microscope illumination device and a second or third polarizing plate are attached to each first eyepiece holding cylinder, or one of the first or second eyepieces. It is possible to perform observations in various patterns, such as mounting the imaging device on the holding cylinder, mounting the second or third polarizing plate on the other, and mounting the microscope illumination device on the C mount.

[0022] According to one aspect of the present invention, the microscope illumination system is provided in the cylindrical body, and changes the polarization angle of the first polarizing plate by rotating the first polarizing plate. A first rotating mechanism is further provided. Thus, by changing the polarization angle, it is possible to adjust the color of the observation image and the contrast of light and dark and perform more detailed observation.

According to an aspect of the present invention, the microscope illumination system includes a second rotation mechanism for changing the polarization angle of the second polarizing plate by rotating the second polarizing plate. In addition.

[0024] According to one aspect of the present invention, the microscope illumination system includes a second rotation mechanism for changing the polarization angle of the third polarizing plate by rotating the third polarizing plate. In addition.

[0025] According to one aspect of the present invention, the microscope illumination system includes a second rotation mechanism for changing the polarization angle of the fourth polarizing plate by rotating the fourth polarizing plate. In addition.

[0026] By using these second rotation mechanism and the first rotation mechanism together, the polarization angle can be adjusted more easily.

According to an aspect of the present invention, the microscope illumination system includes a sensitive color plate that is detachably provided between the first polarizing plate and the mounting portion in the cylindrical body. In addition, prepare. As a result, the change in the color of the observation image is noticeable, and the fine observation of the sample can be performed more easily. In addition, by making the sensitive color plate detachable, it is possible to easily observe the most effective observation method by observing with only two polarizing plates or observing with the sensitive color plate in between, depending on the sample. It becomes possible to select.

[0028] A microscope illumination system according to another aspect of the present invention includes an eyepiece and enlarges a sample. An illumination system for use in a microscope having an optical system for obtaining an image, a binocular eyepiece holding cylinder for holding the eyepiece, and a c-mount unit, the mounting system being mountable on each eyepiece holding cylinder A cylindrical body having one end at one end, a light source that is integrally provided at the other end of the cylindrical body, and that irradiates the sample with light through the optical system, and a light source that is provided in the cylindrical body, the light source A microscope illumination device comprising: a first polarizing plate that polarizes emitted light; and a c-mount adapter that can be attached to and detached from the cylindrical body, and each of the eyepieces. Reflected light of the sample force emitted from each eyepiece of each eyepiece holding cylinder when the cylinder is attached to the C mount portion via the C mount adapter. Polarized, or A second polarizing plate that polarizes the reflected light from the sample emitted from the eyepiece of the other eyepiece holding cylinder when the cylinder is attached to the one eyepiece holding cylinder. .

[0029] According to this configuration, by using the C mount adapter, the microscope illuminating device, the C mount adapter, and the second polarizing plate are respectively provided on the binocular eyepiece holding cylinder and the C mount portion. With appropriate mounting, it is possible to perform coaxial epi-illumination observation and polarization observation with various patterns.

[0030] Further, the microscope illumination system may further include a condensing lens that is provided in the cylindrical body and collects light from the light source.

[0031] An illumination system for a microscope according to still another aspect of the present invention includes an optical system that has an eyepiece and obtains an enlarged image of a fluorescent sample, and a binocular eyepiece holding cylinder that holds the eyepiece. An illumination system used in a microscope having a mounting portion that can be mounted on the one eyepiece lens holding tube at one end and the other end of the cylindrical body, and the optical system A microscope illumination device comprising: a light source for irradiating the sample with light through a system; and an excitation filter provided in the cylindrical body for selectively transmitting light emitted from the light source; And an absorption filter that selectively transmits fluorescence from the reflected light of the sample force emitted from the eyepiece lens of the other eyepiece lens holding tube.

With this configuration, the microscope illumination device is attached to the one eyepiece holding cylinder. By attaching an absorption filter to the other eyepiece holding tube while performing coaxial epi-illumination observation, simple fluorescence observation can be performed in a cheaper and more compact system. In this case, for example, a mercury lamp is used as the light source.

The invention's effect

[0033] According to the present invention, it is possible to provide a microscope illumination device and a microscope illumination system that are inexpensive and compact, can perform coaxial epi-illumination observation, and have excellent versatility.

BEST MODE FOR CARRYING OUT THE INVENTION

Hereinafter, embodiments of the present invention will be described with reference to the drawings.

[0035] (First embodiment)

First, a microscope illumination system according to a first embodiment of the present invention will be described. The microscope illumination system includes a microscope illumination device and accessories such as various adapters. FIG. 1 is a view showing the appearance of the microscope illumination device 100 according to the present embodiment, and FIG. 2 is a cross-sectional view of the microscope illumination device 100.

As shown in both figures, the main body 1 of the microscope illumination device 100 has a stepped cylindrical shape, and has a large-diameter cylindrical portion la and a small-diameter cylindrical portion lb. In addition, an LED light source device 4 is provided at the upper end of the main body 1, and an attachment portion lc that can be attached to an eyepiece holding cylinder of a microscope described later is provided at the lower end. The outer diameter of the mounting part lc is, for example, a little less than φ 23.2 (23.2 mm, the same applies hereinafter).

[0037] A built-in polarizing plate 2 for polarizing illumination light emitted from the LED light source device 4 is provided inside the main body 1, and a cylindrical polarizing plate rotating handle for rotating the built-in polarizing plate 2 3 is provided integrally with the built-in polarizing plate 2. Further, an optical path 7 for allowing the illumination light to pass therethrough is formed inside the main body 1. Inside the mounting portion lc at the lower end of the main body 1 is a condenser lens 6 for condensing the illumination light emitted from the LED light source device 4 and polarized by the built-in polarizing plate 2 while passing through the optical path 7. Is provided.

[0038] A slit Id is provided on the surface of the main body 1 and below the built-in polarizing plate 2, and a sensitive color plate switching plate 5 is provided so as to be inserted into the slit Id. FIG. 3 is a cross-sectional view (Fig. (A)) and a top view (Fig. (B)) of the sensitive color plate switching plate 5. The sensitive plate cutting The replacement plate 5 is provided with a sensitive color plate 5a and a cavity 5b for observing the sensitive color. By sliding the sensitive color plate switching plate 5 in the horizontal direction (direction of arrow A in FIG. 1), The sensitive color plate 5a is arranged along the optical axis of the optical system composed of the LED light source device 4, the built-in polarizing plate 2 and the condenser lens 6, or the sensitive color plate 5a is removed from the optical axis force to the optical axis. It is possible to switch between using and not using the sensitive color plate 5a by arranging the cavity 5b. In addition, at both ends in the longitudinal direction of the sensitive color plate switching plate 5, a locking screw 5c having a diameter larger than the longitudinal length e of the slit Id is screwed, and the sensitive color plate at the stroke end of the sliding operation. The switching plate 5 comes to be locked to the main body 1.

FIG. 4 is a view showing the polarizing plate lid 8 used together with the microscope illumination device 100. Same figure

(a) is a sectional view, and (b) is a top view. The polarizing plate lid 8 can be attached to the eyepiece holding cylinder of the microscope so as to cover the eyepiece holding cylinder. A polarizing plate 8 a is provided inside the polarizing plate lid 8. The polarizing plate 8a is paired with the built-in polarizing plate 2 of the microscope illumination device 100, and the built-in polarizing plate 2 is in the vicinity of the LED light source device 4 and plays the role of a polarizer. Fulfill. The inner diameter f of the polarizing plate lid 8 is about φ25, for example. Also, for example, three inner diameter adjusting screws 8b are screwed to the polarizing plate lid 8, so that the inner diameter can be finely adjusted so as to match the outer diameter of the eyepiece lens holding cylinder. Furthermore, the polarizing plate lid 8 has a structure in which an upper portion 8c having a polarizing plate 8a and a lower portion 8d are screwed, and the polarization angle of the polarizing plate 8a can be changed by rotating the upper portion 8c. It is possible.

FIG. 5 is a view showing a state in which the microscope illumination device 100 and the polarizing plate lid 8 are respectively attached to the eyepiece holding cylinder of the microscope 200. As shown in the figure, the mounting part lc having the smallest diameter in the main body 1 is inserted into the opposite eyepiece holding cylinder 21 and locked by the lower end lb-b of the small diameter cylindrical part lb. The inner diameter of the eyepiece holding cylinder 21 of the microscope 200 is, for example, Φ23.2. The polarizing plate lid 8 is mounted so as to cover the other eyepiece lens holding cylinder 21. By mounting in this way, the illumination light from the LED light source device 4 can also irradiate the sample 23 with vertical force through the optical system such as the objective lens 22 from the eyepiece holding tube 21, and the reflected light functions as an analyzer. It is possible to observe through the polarizing plate 8a of the polarizing plate lid 8 to be observed. That is, with the microscope illumination system, coaxial epi-illumination observation and polarization Light observation can be performed.

By the way, there are two types of standards for the inner diameter of the eyepiece holding cylinder 21 of the microscope: φ23.2 and φ30. As described above, the outer diameter of the mounting portion lc of the microscope illumination device 100 is slightly less than φ23.2, and the outer shape of the polarizing plate lid 8 is the same as that of the eyepiece holding cylinder 21 having the inner diameter of φ23.2. Since they are formed to match the outer shape (for example, about φ25), both can be attached to an eyepiece holding tube having an inner diameter of φ23.2, but an eyepiece holding tube having an inner diameter of φ30 It cannot be installed as it is. Therefore, in the present embodiment, an eyepiece having an inner diameter of φ30 is provided by mounting the auxiliary adapter 10 having an outer diameter of less than φ30 on the outer periphery of the small-diameter cylindrical portion lb and the mounting portion lc of the illumination device 100 for a microscope. The microscope illumination device 100 can also be attached to the lens holding tube. As for the polarizing plate cover, a polarizing plate cover 9 (not shown) having a larger inner diameter than the polarizing plate cover 8 is prepared so that it can be attached to the outer diameter of the eyepiece holding cylinder having an inner diameter of φ30. . This makes it possible to meet both standards for eyepiece holding cylinders.

FIG. 6 is a view showing the auxiliary adapter 10. Figure (a) is a front view and Figure (b) is a sectional view. FIG. 7 is a cross-sectional view when the auxiliary adapter 10 is attached to the microscope illumination device 100.

[0043] As shown in both drawings, the auxiliary adapter 10 has a large-diameter portion 10c. The length g of the large diameter portion 10c in the optical axis direction is, for example, 9 mm-10 mm, and is the same as the length d (see FIG. 1) of the small diameter cylindrical portion lb in the optical axis direction. Thereby, the same optical path length from the LED light source device 4 can be formed depending on whether the auxiliary adapter 10 is used or not. In other words, the microscope illumination device 100 can be locked at the same position with respect to the eyepiece holding cylinder by the small diameter cylindrical portion lb and the large diameter portion 10c of the auxiliary adapter 10. Thereby, the optical conditions can be made the same.

In addition, an O-ring 11 is fitted in, for example, two power points on the outer periphery 1 Oa of the auxiliary adapter 10. An O-ring 12 is also fitted at one power point on the inner periphery 10b of the auxiliary adapter 10, for example. These outer and inner O-rings 11 and 12 have different material forces. By doing so, the force required to attach the auxiliary adapter 10 to the microscope illumination device 100 and the microscope illumination device 100 equipped with the auxiliary adapter 10 are inserted into the eyepiece holding tube 21 (see FIG. 5). The power required when entering can be different.

For example, when the auxiliary adapter 10 is attached to the microscope illuminating device 100, the force required when the microscope illuminating device 100 with the auxiliary adapter 10 attached is inserted into the eyepiece lens holding cylinder 21. Set it to be smaller than the required force. This can be realized, for example, by using a softer material for the outer O-ring 11 than the inner O-ring 12. As a result, the microscope illumination device 100 on which the auxiliary adapter 10 is mounted can be smoothly inserted into the eyepiece holding cylinder 21. On the other hand, since both the microscope illumination device 100 and the auxiliary adapter 10 are sized so that a person can easily hold them with one hand, the force when attaching the auxiliary adapter 10 to the microscope illumination device 100 is relatively large. Even if set, it can be easily mounted. Specifically, the outer O-ring 11 may be made of, for example, silicon rubber, and the inner O-ring 12 may be made of, for example, -tolyl rubber.

In addition, the microscope has a binocular type eyepiece holding cylinder 21 as shown in FIG. 5 above, and a C mount portion for mounting a digital camera or a CCD camera on the binocular. There are types to have. Since the inner diameter of the C mount portion is different from the inner diameters of the two standards of the eyepiece lens holding cylinder 21, the microscope illumination device 100 cannot be mounted on the C mount portion as it is. Therefore, in this embodiment, a C mount adapter for mounting the microscope illumination device 100 on the C mount portion is prepared.

FIG. 8 is a view showing the C mount adapter 13. The figure (a) is a front view, and the figure (b) sectional view of force S (a). FIG. 9 is a cross-sectional view when the C-mount adapter 13 is attached to the microscope illumination device 100.

[0048] As shown in both figures, the C mount adapter 13 has a cylindrical shape, and a lower end 14 has a screw portion 15 for engaging with, for example, screwing, the C mount portion of the microscope. Is provided. In addition, the upper end 16 is provided with an insertion portion 17 into which the lower end lc-b of the mounting portion lc of the microscope illumination device 100 is inserted and locked at a predetermined position. The mounting portion lc of the microscope illumination device 100 is inserted into the insertion portion 17 via the auxiliary adapter 10 and locked at a predetermined position, and the digital camera or CCD camera mounted on the microscope illumination device 100 is locked. An optical path 18 having an optical path length that forms an image at a specific position via the C mount portion of the microscope is provided inside the C mount adapter 13. In addition, on the outer periphery of the insertion part 17 of the upper end 16 A screw hole 19 into which a screw 20 for fixing the microscope illumination device 100 inserted into the insertion portion 17 is screwed is provided.

[0049] When taking a picture using a digital camera or the like, a polarizing plate serving as an analyzer such as the polarizing plate lid 8 or 9 is required. Therefore, in this embodiment, an optical adapter 40 as shown in FIG. 10 is attached to the digital camera, and the digital camera polarizing plate 31 is attached to the lower end of the optical adapter 40. The optical adapter 40 has a stepped cylindrical shape similar to the microscope illumination device 100, and the lower end is inserted into an eyepiece holding tube having an inner diameter of φ23.2, or an eyepiece having an inner diameter of φ30 is held through the auxiliary adapter 10. It can be inserted into a cylinder or attached to the C mount via the C mount adapter 13.

[0050] As described above, in the present embodiment, the microscope illumination device 100 can be attached to two standard eyepiece holding cylinders and the C mount unit, and the polarizing plate lids 8 and 9 are also connected to each standard. Since it can be attached to the eye lens holder, various combinations are possible when observing the sample 23. Hereinafter, a method for observing the microscope illumination device 100, the polarizing plate lid 8, and the digital camera 30 attached to the eyepiece holding tube 21 or the C mount unit, and the illumination light emitted from the LED light source device 4 at that time The optical path will be described.

[0051] FIG. 11 shows that the microscope illumination device 100 is inserted into one eyepiece holding cylinder 21a, the polarizing plate lid 8 is attached to 2 lb of the other eyepiece holding cylinder, and the digital camera 30 is attached to the C mount 24. The case where it mounts is shown. FIG. 12 shows the optical path in this case. As shown in both figures, the illumination light emitted from the LED light source device 4 is polarized by the built-in polarization plate 2 in the microscope illumination device 100, passes through the sensitive color plate 5a and the condenser lens 6, and holds one eyepiece. It passes through the eyepiece 26a of 21a, passes through the prism 25 in the microscope 200, reaches the objective lens 22 and irradiates the sample 23 from the vertical direction. The reflected light reflected from the sample 23 passes through the object lens 22 and the prism 25 and is divided into two directions. One reflected light is emitted from the eyepiece lens 26b of the eyepiece holding cylinder 21b and observed through the polarizing plate lid 8. The other reflected light is guided to the digital camera polarizing plate 31 of the digital camera 30 mounted on the C mount unit 24, and is observed on the display unit or the like (not shown) of the digital camera 30.

[0052] FIG. 13 shows that both eyepiece holding cylinders 21 are fitted with polarizing plate lids 8 and microscopically mounted on the C mount. The case where the mirror illumination device 100 is attached is shown. FIG. 14 shows the optical path in this case. As shown in both figures, the illumination light emitted from the LED light source device 4 of the C mount 24 passes through the built-in polarizing plate 2, the sensitive color plate 5a and the condenser lens 6 in the microscope illumination device 100, and enters the microscope 200. The sample 23 is irradiated through the prism 25 through the objective lens 22 from the vertical direction. The reflected light of the sample 23 passes through the objective lens 22 and the prism 25 and is divided into the eyepiece holding cylinders, and is guided to the polarizing plates 8a through the eyepieces 26a and 26b.

[0053] Although not shown, in addition to the above case, for example, the digital camera 30 is attached to one eyepiece holding cylinder 21a, the polarizing plate lid 8 is attached to the other eyepiece holding cylinder 21b, and the C mount Various patterns can be considered, such as when the microscope illumination device 100 is attached to the head, and the auxiliary adapter 10 and the inner diameter φ are compatible with the two standards of φ 23.2 and φ 30 It is also possible to observe by appropriately attaching a polarizing plate lid 9 that can be attached to 30 eyepiece holding cylinders.

[0054] Next, effects of using the microscope illumination system according to the present embodiment will be described. FIG. 15 is a view showing an observation image when observation is performed using a semiconductor substrate as a sample 23 in a biological microscope using the illumination system for a microscope. As shown in the figure, using this system, we succeeded in photographing a semiconductor substrate that could not be photographed with a conventional biological microscope. That is, by applying coaxial epi-illumination from the vertical direction of the semiconductor substrate by the microscope illumination device 100 in the present embodiment, and using the built-in polarizing plate 2 as a polarizer and the polarizing plate lid 8 as an analyzer, We were able to obtain a clear image of the semiconductor substrate, free of flares and ghosts.

[0055] In addition, polarization observation is performed using two polarizing plates, and the polarization angle is changed by rotating each polarizing plate, so that the color contrast as shown in FIGS. For example, the semiconductor substrate can be observed more clearly, such as irregularities and scratches.

[0056] FIG. 16 shows an observation image when the sharp color plate is observed through the sensitive color plate switching plate 5 through 5a (FIG. (A)) and when not observed (FIG. (B)). FIG. As shown in the figure, in the present embodiment, by providing the sensitive color plate 5a, the color change becomes remarkable, and more detailed observation can be performed. In addition, by making it possible to switch the sensitive color plate 5a, Depending on the material, it is possible to cope with cases where observation is difficult due to color changes.

As described above, according to this embodiment, the coaxial epi-illumination observation can be performed, but it is cheaper and more compact than the conventional coaxial epi-illumination device, and is excellent in versatility. An illumination system can be provided.

[0058] (Second Embodiment)

Next, a second embodiment of the present invention will be described. In the present embodiment, parts having the same configurations as those of the first embodiment are denoted by the same reference numerals, and description thereof is omitted or simplified.

[0059] In the present embodiment, simple fluorescence observation is performed by replacing the internal polarizing plate 2 functioning as a polarizer and the polarizing plate 8a functioning as an analyzer in the first embodiment with an excitation filter and an absorption filter, respectively. Is possible. In this case, for example, a mercury lamp is used as the light source.

FIG. 17 is a diagram showing an optical path in this case. As shown in the figure, the illumination light emitted from the mercury lamp 53 is selectively transmitted by the excitation filter 51 only in the short wavelength region, passes through the sensitive color plate 5a and the condenser lens 6, and is one eyepiece. The sample 23 passes through the eyepiece 26a of the holding cylinder 21a and is irradiated onto the sample 23 through the prism 25 and the objective lens 22 in the microscope. The reflected light reaches the absorption filter 52 from the other eyepiece lens 26b via the objective lens 22 and the prism 25, and only the fluorescence of the reflected light is transmitted through the absorption filter 52 and observed.

As described above, simple fluorescence observation is possible only by replacing the two polarizing plates with the excitation filter 51 and the absorption filter 52, respectively.

[0062] It should be noted that the present invention is not limited to the above-described embodiments, and various changes can be made without departing from the scope of the present invention.

[0063] In the above-described embodiment, the LED is used for the light source device. However, as long as it can be provided integrally with the main body 1 of the microscope illumination device 100, a halogen lamp, a tungsten lamp, etc. You can use.

[0064] In the second embodiment described above, the built-in polarizing plate 2 in the first embodiment is used as the excitation film. The force that had replaced the polarizing plate lid 8 with the absorption filter 52 was left as it was, and an excitation filter was provided on the microscope illumination device 100, and an absorption filter was placed on the polarizing plate lid 8. It ’s okay to have it.

In addition, by arranging a laser as a light source, the microscope illumination device 100 can be employed as a light source for a laser microscope. Similarly, it can be used as a light source of a laser repair device. Furthermore, it can also be used as the light source side of a microscope autofocus.

Brief Description of Drawings

FIG. 1 is a diagram showing an appearance of a microscope illumination apparatus 100 according to a first embodiment.

FIG. 2 is a cross-sectional view of a microscope illumination apparatus 100.

FIG. 3 is a cross-sectional view and a top view of a sensitive color plate switching plate 5.

FIG. 4 is a view showing a polarizing plate lid 8.

FIG. 5 is a view showing a state where the microscope illumination device 100 and the polarizing plate lid 8 are attached to the eyepiece holding cylinder of the microscope 200.

FIG. 6 is a view showing an auxiliary adapter 10.

FIG. 7 is a cross-sectional view when the auxiliary adapter 10 is attached to the microscope illumination device 100.

FIG. 8 is a view showing a C mount adapter 13.

FIG. 9 is a cross-sectional view when the C mount adapter 13 is attached to the microscope illumination device 100.

FIG. 10 is a view showing an optical adapter 40 to which a digital camera polarizing plate 31 is attached.

FIG. 11 is a view showing an example of a method of attaching the microscope illumination device 100 and the polarizing plate lid 8.

12 is a diagram showing an optical path in the case of FIG.

FIG. 13 is a view showing another example of how to attach the microscope illumination device 100 and the polarizing plate lid 8.

FIG. 14 is a diagram showing an optical path in the case of FIG.

FIG. 15 is a diagram showing an observation image when observation is performed using a semiconductor substrate as a sample 23 in a biological microscope using the illumination system for a microscope.

[Fig.16] Observation with sensitive color plate switching plate 5 with and without sensitive color plate observed through 5a It is the figure which showed the observation image in the case of doing.

FIG. 17 is a view showing an optical path when fluorescence observation is performed in another embodiment of the present invention.

Explanation of symbols

1 '

lc-… Mounting part

2 ... Built-in polarizing plate

3 · 'Polarizing plate rotation handle

4. LED light source device

5 · Light color plate switching plate

5a- ··· Sensitive color board

6 ... Condenser lens

7 ··-Light path

8, 9 ... Polarizing plate lid

8a- ··· Polarizing plate

10 ···· Assist adapter

21 ···· Eyepiece holding tube

22-… Objective lens

23- Fee

24 •• C mount

30 ···· Digital Nore Camera

31 · "Digital Camera Polarizer

40 ··· Optical adapter

51..Excitation filter

52 ··· Absorption filter

53 ··· Mercury lamp

Claims

The scope of the claims

[1] Used in a microscope having at least an optical system having an eyepiece and obtaining a magnified image of a sample, and a binocular first eyepiece holding cylinder holding the eyepiece and having a first diameter. A lighting device,

A cylindrical body having an attachment portion that can be attached to each first eyepiece lens holding cylinder at one end and an other end of the cylindrical body that are integrally provided to irradiate the sample with light through the optical system With the light source

A microscope illumination device comprising:

[2] The illumination device for a microscope according to claim 1,

An illumination device for a microscope, further comprising a condensing lens that is provided in the cylindrical body and condenses light from the light source.

[3] The microscope illumination device according to claim 1,

The microscope has a binocular second eyepiece holding cylinder having a second diameter larger than the first diameter,

The illumination device for a microscope is

An illumination device for a microscope, further comprising a first adapter that can be attached to each of the second eyepiece holding cylinders and that can be attached to and detached from the attachment portion.

[4] The microscope illumination device according to claim 3,

The microscope has a C-mount part,

The illumination device for a microscope is

A second adapter that can be attached to the C-mount portion, and that can be attached to and detached from the cylindrical body via the first adapter in a state where the first adapter is attached to the attachment portion; A microscope illumination device characterized by the above.

[5] An illumination device used for a microscope having an eyepiece and an optical system for obtaining an enlarged image of a sample, a binocular eyepiece holding cylinder holding the eyepiece, and a C mount portion,

A cylindrical body having an attachment portion that can be attached to each eyepiece lens holding cylinder at one end, and an integral part at the other end of the cylindrical body, and irradiating the sample with light through the optical system A light source for

A C-mount adapter that can be attached to the C-mount portion and detachable from the cylinder;

A microscope illumination device comprising:

[6] The illumination device for a microscope according to claim 5,

[7] Used in a microscope having at least an eyepiece lens and an optical system for obtaining an enlarged image of a sample, and a binocular first eyepiece holding cylinder holding the eyepiece and having a first diameter. A lighting system,

A cylindrical body having an attachment portion that can be attached to each first eyepiece holding cylinder at one end, and the other end of the cylindrical body are provided integrally, and the sample is irradiated with light through the optical system. An illumination device for a microscope having a light source for light and a first polarizing plate provided in the cylinder and polarizing light emitted from the light source;

When the cylindrical body is attached to the first eyepiece holding cylinder, the eyepiece of the other first eyepiece holding cylinder can be attached to and detached from each first eyepiece holding cylinder. A second polarizing plate that polarizes the reflected light of the sample force that exits;

A microscope illumination system comprising:

[8] The microscope illumination system according to claim 7,

A microscope illumination system, further comprising a condenser lens that is provided in the cylinder and collects light from the light source.

[9] The illumination system for a microscope according to claim 7,

The microscope has a second eyepiece holding cylinder having a second diameter larger than the first diameter,

The microscope illumination system comprises:

A first adapter that can be attached to each second eyepiece holding cylinder and detachable from the attachment portion;

Removably attached to each second eyepiece holding cylinder, and the first adapter is attached to the cylinder. When the cylindrical body is mounted on the one second eyepiece holding cylinder with the lens mounted, the reflected light from the sample that is emitted from the eyepiece of the other second eyepiece holding cylinder A third polarizing plate to polarize

An illumination system for a microscope, further comprising:

[10] The illumination system for a microscope according to claim 9,

The imaging device can be attached to and detached from each first eyepiece holding cylinder, the cylinder is attached to the first eyepiece holding cylinder, and the imaging device is the other first eyepiece. A microscope illumination system, further comprising a fourth polarizing plate that polarizes the reflected light from the sample emitted from the other first eyepiece lens holding tube when mounted on the holding tube. .

[11] The microscope illumination system according to claim 9,

It is detachable from an imaging device that can be attached to each second eyepiece holding cylinder, the cylinder is attached to the one second eyepiece holding cylinder, and the imaging device is the other second eyepiece. A microscope illumination system, further comprising a fourth polarizing plate that polarizes reflected light from the sample emitted from the other second eyepiece lens holding tube when mounted on the holding tube. .

[12] The illumination system for a microscope according to claim 9,

The microscope has a C-mount part,

The microscope illumination system comprises:

When the second polarizing plate is mounted on the at least one first eyepiece holding cylinder, or when the second polarizing plate is mounted on the at least one second eyepiece lens portion. When the third polarizing plate is mounted, the second adapter further includes a second adapter that can be attached to and detached from the cylindrical body via the first adapter in a state where the first adapter is mounted on the mounting portion. The illumination system for microscopes characterized by doing.

[13] The microscope illumination system according to claim 7,

A microscope illumination, further comprising a first rotation mechanism provided in the cylindrical body and configured to change a polarization angle of the first polarizing plate by rotating the first polarizing plate. system.

[14] The microscope illumination system according to claim 7,

An illumination system for a microscope, further comprising a second rotation mechanism for changing a polarization angle of the second polarizing plate by rotating the second polarizing plate.

[15] The microscope illumination system according to claim 9,

An illumination system for a microscope, further comprising a second rotation mechanism for changing the polarization angle of the third polarizing plate by rotating the third polarizing plate.

[16] The illumination system for a microscope according to claim 10 or claim 11,

An illumination system for a microscope, further comprising a second rotation mechanism for changing a polarization angle of the fourth polarizing plate by rotating the fourth polarizing plate.

[17] The microscope illumination system according to claim 7,

An illumination system for a microscope, further comprising a sensitive color plate that is detachably provided in the cylinder and between the first polarizing plate and the mounting portion.

[18] An illumination system for use in a microscope having an eyepiece and an optical system for obtaining a magnified image of a sample, a binocular eyepiece holding cylinder for holding the eyepiece, and a C mount portion. ,

A cylindrical body having an attachment portion which can be attached to each eyepiece lens holding cylinder at one end; a light source which is integrally provided at the other end of the cylindrical body and irradiates light to the sample via the optical system; A microscope having a first polarizing plate provided in the cylindrical body for polarizing the light emitted from the light source force, and a C-mount adapter that can be attached to the C-mount unit and can be attached to and detached from the cylindrical body. A lighting device;

The sample that can be attached to and detached from each eyepiece holding cylinder, and emits from each eyepiece lens of each eyepiece holding cylinder when the cylinder is attached to the C mount portion via the C mount adapter. The reflected light from the sample force that is emitted from the eyepiece lens force of the other eyepiece lens holding cylinder when the cylindrical body is attached to the one eyepiece lens holding cylinder is polarized. With a second polarizing plate

A microscope illumination system comprising:

[19] The microscope illumination system according to claim 18,

A condensing lens is provided in the cylindrical body and condenses light from the light source. A microscope illumination system characterized by that.

An illumination system for use in a microscope having an eyepiece and an optical system for obtaining an enlarged image of a fluorescent sample, and a binocular eyepiece holding cylinder for holding the eyepiece.

A cylindrical body having an attachment portion that can be attached to the one eyepiece lens holding cylinder at one end and an other end of the cylindrical body that are integrally provided, and for irradiating the sample with light through the optical system A microscope illumination device including a light source and an excitation filter that is provided in the cylinder and selectively transmits light emitted from the light source force;

An absorption filter that is detachable from the other eyepiece lens holding tube and selectively transmits fluorescence among the reflected light of the sample force emitted from the eyepiece lens of the other eyepiece lens holding tube;

A microscope illumination system comprising: