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WO2006067846A1 - Lighting apparatus for microscope and lighting system for microscope - Google Patents

Lighting apparatus for microscope and lighting system for microscope Download PDF

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Publication number
WO2006067846A1
WO2006067846A1 PCT/JP2004/019257 JP2004019257W WO2006067846A1 WO 2006067846 A1 WO2006067846 A1 WO 2006067846A1 JP 2004019257 W JP2004019257 W JP 2004019257W WO 2006067846 A1 WO2006067846 A1 WO 2006067846A1
Authority
WO
WIPO (PCT)
Prior art keywords
microscope
eyepiece
attached
polarizing plate
holding cylinder
Prior art date
Application number
PCT/JP2004/019257
Other languages
French (fr)
Japanese (ja)
Inventor
Takashi Yoshimine
Masaru Nomura
Original Assignee
Takashi Yoshimine
Masaru Nomura
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Takashi Yoshimine, Masaru Nomura filed Critical Takashi Yoshimine
Priority to JP2006521750A priority Critical patent/JPWO2006067846A1/en
Priority to PCT/JP2004/019257 priority patent/WO2006067846A1/en
Publication of WO2006067846A1 publication Critical patent/WO2006067846A1/en

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Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00Microscopes
    • G02B21/06Means for illuminating specimens
    • G02B21/08Condensers
    • G02B21/082Condensers for incident illumination only

Definitions

  • the present invention relates to a microscope illumination device and a microscope illumination system that are used in a microscope and illuminate an observation sample.
  • a coaxial epi-illuminator was used that introduced illumination along the axis.
  • the optical axis on the imaging side and the optical axis on the illumination side And irradiate the sample with vertical force illumination light.
  • Patent Document 1 Japanese Unexamined Patent Publication No. 2000-292706 (paragraph [0005], FIG. 1, etc.)
  • a halogen lamp is also used.
  • the built-in light source device and the condensing lens are connected by a fiber cable, and the problem that the space is difficult to handle is still unsolved.
  • the lighting device is designed to be attached to V or any microscope! Wow! /
  • an object of the present invention is to provide a microscope illumination device and a microscope illumination system that are inexpensive and compact, can perform coaxial epi-illumination observation, and have excellent versatility. There is to do.
  • a microscope illumination apparatus includes an optical system that has an eyepiece and obtains an enlarged image of a sample, and a binocular that holds the eyepiece and has a first diameter.
  • An illumination device for use in a microscope having at least a first eyepiece holding cylinder, a cylinder having an attachment portion that can be attached to each of the first eyepiece holding cylinders at one end, and other than the cylinder And a light source for irradiating the sample with light through the optical system.
  • the optical system of the microscope includes, for example, an objective lens and a prism.
  • an LED (light emitting diode), a halogen lamp, or a tungsten lamp can be used as the light source.
  • the sample is, for example, a semiconductor substrate or the like, a metal structure, a resin sample, or a biological sample.
  • the shape of the cylinder is not limited to, for example, a cylindrical force.
  • the light source is integrally provided at the other end of the cylindrical body, and the mounting portion at one end on the opposite side can be mounted on the eyepiece lens holding cylinder. It has a very compact and easy-to-handle configuration without using flexible materials. Further, the coaxial epi-illumination observation can be easily performed through the optical system simply by mounting the mounting portion on the first eyepiece holding cylinder. That is, even in a biological microscope designed to illuminate from below the sample, it is possible to irradiate coaxial epi-illumination light by using the microscope illumination device of the present invention, and observe irregularities and scratches on the semiconductor substrate and metal structure. can do. When observing the magnified image of the sample, for example, the microscope illumination device can be attached to one first eyepiece holding cylinder, and observation can be performed from the other first eyepiece holding cylinder. .
  • the microscope illumination device is provided in the cylindrical body and collects light from the light source.
  • a condensing lens may be further provided. As a result, the light guided from the light source to the optical system becomes a parallel light flux, and observation without uneven irradiation can be performed.
  • the microscope in the microscope illumination device, includes a binocular second eyepiece holding cylinder having a second diameter larger than the first diameter.
  • the microscope illumination device further includes a first adapter that can be attached to each of the second eyepiece holding cylinders and that can be attached to and detached from the attachment portion.
  • the microscope has a C mount portion, and the microscope illumination device can be attached to the C mount portion. And a second adapter that can be attached to and detached from the cylindrical body via the first adapter in a state where the first adapter is attached to the part.
  • the microscope illumination device can also be mounted on the C mount portion for mounting the imaging device normally through the first adapter and the second adapter. Therefore, it is possible to observe a magnified image of the sample from the binocular eyepiece holding tube while applying a coaxial illumination light to the sample by attaching a microscope illumination device to the C mount part. It can be used for general purposes.
  • a microscope illumination apparatus includes an optical system that has an eyepiece and obtains an enlarged image of a sample, a binocular eyepiece holding cylinder that holds the eyepiece, and a C-matrix.
  • An illumination device for use in a microscope having a front part, the cylindrical body having a mounting part that can be mounted on each eyepiece lens holding cylinder at one end, and the other end of the cylindrical body integrally provided with the optical unit
  • the microscope illumination device is attached to one eyepiece holding tube to illuminate the sample, and the sample is observed from the other eyepiece holding tube, and at the same time, an imaging device is attached to the C mount portion to take a picture.
  • an imaging device is attached to the C mount portion to take a picture.
  • various patterns such as using a C-mount adapter to attach a microscope illumination device to the C-mount and observing from a binocular eyepiece holding tube. It is possible to observe and photograph the sample by illuminating the sample.
  • the microscope illumination device may further include a condensing lens that is provided in the cylindrical body and collects light from the light source.
  • An illumination system for a microscope includes an optical system that has an eyepiece and obtains a magnified image of a sample, and a binocular first eyepiece holding cylinder that holds the eyepiece and has a first diameter. And an illumination system used in a microscope having at least a cylindrical body having a mounting portion at one end that can be mounted on each of the first eyepiece lens holding cylinders, and integrally provided at the other end of the cylindrical body.
  • a microscope illumination device comprising: a light source for irradiating the sample with light via the optical system; and a first polarizing plate provided in the cylindrical body for polarizing light emitted from the light source.
  • Each of the first eyepiece lens holding cylinders is attachable to and detachable from the first eyepiece lens holding cylinder when the cylinder body is attached to the first eyepiece lens holding cylinder.
  • the first polarizing plate serves as a polarizer
  • the second polarizing plate serves as an analyzer.
  • the light source is integrally provided at the other end of the cylinder, and the mounting portion at the opposite end can be mounted on the eyepiece lens holding cylinder, so that the configuration is very compact and easy to handle. It has become. Further, by attaching the mounting portion to one first eyepiece lens holding cylinder and mounting the second polarizing plate to the other first eyepiece lens holding cylinder, so-called ghost and flare are eliminated.
  • the coaxial epi-illumination observation can be easily performed through the optical system, and the polarization observation can also be performed.
  • the microscope illumination system may further include a condensing lens that is provided in the cylindrical body and collects light from the light source.
  • a condensing lens that is provided in the cylindrical body and collects light from the light source.
  • the microscope in the microscope illumination system, includes a second eyepiece holding cylinder having a second diameter larger than the first diameter, and the microscope
  • the mirror illumination system can be attached to each of the second eyepiece holding cylinders, and is attachable to and detachable from the first adapter that can be attached to and detached from the mounting portion and each of the second eyepiece holding cylinders.
  • the first adapter is attached to the cylinder and the cylinder is attached to the second eyepiece holding cylinder, the other second eyepiece holding cylinder And a third polarizing plate that polarizes the reflected light of the sample force emitted from the eyepiece.
  • the microscope illumination system can be attached to and detached from an imaging device that can be attached to each of the first eyepiece lens holding cylinders, and the cylinder is the first of the first eyepiece lens holding cylinders.
  • a fourth polarizing plate that polarizes the light.
  • the microscope illumination system can be attached to and detached from an imaging device that can be attached to each of the second eyepiece holding cylinders, and the cylindrical body is the one of the second eyepieces.
  • a fourth polarizing plate is used to easily photograph the sample by the coaxial epi-illumination observation and the polarization observation, and the versatility is improved.
  • the microscope has a C mount portion, and the microscope illumination system can be attached to the C mount portion, and the at least one of When the second polarizing plate is attached to the first eyepiece holding cylinder, or when the third polarizing plate is attached to the at least one second eyepiece portion,
  • the apparatus further includes a second adapter that is attachable to and detachable from the cylindrical body via the first adapter in a state where the first adapter is attached to the attachment portion.
  • Coaxial epi-illumination observation and polarization observation corresponding to the holder can be easily performed, and versatility is further improved.
  • an imaging device is attached to the C-mount part, and a microscope illumination device and a second or third polarizing plate are attached to each first eyepiece holding cylinder, or one of the first or second eyepieces. It is possible to perform observations in various patterns, such as mounting the imaging device on the holding cylinder, mounting the second or third polarizing plate on the other, and mounting the microscope illumination device on the C mount.
  • the microscope illumination system is provided in the cylindrical body, and changes the polarization angle of the first polarizing plate by rotating the first polarizing plate.
  • a first rotating mechanism is further provided.
  • the microscope illumination system includes a second rotation mechanism for changing the polarization angle of the second polarizing plate by rotating the second polarizing plate.
  • a second rotation mechanism for changing the polarization angle of the second polarizing plate by rotating the second polarizing plate.
  • the microscope illumination system includes a second rotation mechanism for changing the polarization angle of the third polarizing plate by rotating the third polarizing plate.
  • a second rotation mechanism for changing the polarization angle of the third polarizing plate by rotating the third polarizing plate.
  • the microscope illumination system includes a second rotation mechanism for changing the polarization angle of the fourth polarizing plate by rotating the fourth polarizing plate.
  • a second rotation mechanism for changing the polarization angle of the fourth polarizing plate by rotating the fourth polarizing plate.
  • the microscope illumination system includes a sensitive color plate that is detachably provided between the first polarizing plate and the mounting portion in the cylindrical body.
  • a sensitive color plate that is detachably provided between the first polarizing plate and the mounting portion in the cylindrical body.
  • the sensitive color plate detachable it is possible to easily observe the most effective observation method by observing with only two polarizing plates or observing with the sensitive color plate in between, depending on the sample. It becomes possible to select.
  • a microscope illumination system includes an eyepiece and enlarges a sample.
  • An illumination system for use in a microscope having an optical system for obtaining an image, a binocular eyepiece holding cylinder for holding the eyepiece, and a c-mount unit, the mounting system being mountable on each eyepiece holding cylinder
  • a cylindrical body having one end at one end, a light source that is integrally provided at the other end of the cylindrical body, and that irradiates the sample with light through the optical system, and a light source that is provided in the cylindrical body, the light source
  • a microscope illumination device comprising: a first polarizing plate that polarizes emitted light; and a c-mount adapter that can be attached to and detached from the cylindrical body, and each of the eyepieces.
  • the C mount adapter by using the C mount adapter, the microscope illuminating device, the C mount adapter, and the second polarizing plate are respectively provided on the binocular eyepiece holding cylinder and the C mount portion. With appropriate mounting, it is possible to perform coaxial epi-illumination observation and polarization observation with various patterns.
  • the microscope illumination system may further include a condensing lens that is provided in the cylindrical body and collects light from the light source.
  • An illumination system for a microscope includes an optical system that has an eyepiece and obtains an enlarged image of a fluorescent sample, and a binocular eyepiece holding cylinder that holds the eyepiece.
  • An illumination system used in a microscope having a mounting portion that can be mounted on the one eyepiece lens holding tube at one end and the other end of the cylindrical body, and the optical system
  • a microscope illumination device comprising: a light source for irradiating the sample with light through a system; and an excitation filter provided in the cylindrical body for selectively transmitting light emitted from the light source; And an absorption filter that selectively transmits fluorescence from the reflected light of the sample force emitted from the eyepiece lens of the other eyepiece lens holding tube.
  • the microscope illumination device is attached to the one eyepiece holding cylinder.
  • an absorption filter to the other eyepiece holding tube while performing coaxial epi-illumination observation, simple fluorescence observation can be performed in a cheaper and more compact system.
  • a mercury lamp is used as the light source.
  • FIG. 1 is a view showing the appearance of the microscope illumination device 100 according to the present embodiment
  • FIG. 2 is a cross-sectional view of the microscope illumination device 100.
  • the main body 1 of the microscope illumination device 100 has a stepped cylindrical shape, and has a large-diameter cylindrical portion la and a small-diameter cylindrical portion lb.
  • an LED light source device 4 is provided at the upper end of the main body 1, and an attachment portion lc that can be attached to an eyepiece holding cylinder of a microscope described later is provided at the lower end.
  • the outer diameter of the mounting part lc is, for example, a little less than ⁇ 23.2 (23.2 mm, the same applies hereinafter).
  • a built-in polarizing plate 2 for polarizing illumination light emitted from the LED light source device 4 is provided inside the main body 1, and a cylindrical polarizing plate rotating handle for rotating the built-in polarizing plate 2 3 is provided integrally with the built-in polarizing plate 2. Further, an optical path 7 for allowing the illumination light to pass therethrough is formed inside the main body 1. Inside the mounting portion lc at the lower end of the main body 1 is a condenser lens 6 for condensing the illumination light emitted from the LED light source device 4 and polarized by the built-in polarizing plate 2 while passing through the optical path 7. Is provided.
  • FIG. 3 is a cross-sectional view (Fig. (A)) and a top view (Fig. (B)) of the sensitive color plate switching plate 5.
  • the sensitive plate cutting The replacement plate 5 is provided with a sensitive color plate 5a and a cavity 5b for observing the sensitive color.
  • the sensitive color plate 5a is arranged along the optical axis of the optical system composed of the LED light source device 4, the built-in polarizing plate 2 and the condenser lens 6, or the sensitive color plate 5a is removed from the optical axis force to the optical axis. It is possible to switch between using and not using the sensitive color plate 5a by arranging the cavity 5b.
  • a locking screw 5c having a diameter larger than the longitudinal length e of the slit Id is screwed, and the sensitive color plate at the stroke end of the sliding operation. The switching plate 5 comes to be locked to the main body 1.
  • FIG. 4 is a view showing the polarizing plate lid 8 used together with the microscope illumination device 100. Same figure
  • the polarizing plate lid 8 can be attached to the eyepiece holding cylinder of the microscope so as to cover the eyepiece holding cylinder.
  • a polarizing plate 8 a is provided inside the polarizing plate lid 8.
  • the polarizing plate 8a is paired with the built-in polarizing plate 2 of the microscope illumination device 100, and the built-in polarizing plate 2 is in the vicinity of the LED light source device 4 and plays the role of a polarizer. Fulfill.
  • the inner diameter f of the polarizing plate lid 8 is about ⁇ 25, for example.
  • the polarizing plate lid 8 has a structure in which an upper portion 8c having a polarizing plate 8a and a lower portion 8d are screwed, and the polarization angle of the polarizing plate 8a can be changed by rotating the upper portion 8c. It is possible.
  • FIG. 5 is a view showing a state in which the microscope illumination device 100 and the polarizing plate lid 8 are respectively attached to the eyepiece holding cylinder of the microscope 200.
  • the mounting part lc having the smallest diameter in the main body 1 is inserted into the opposite eyepiece holding cylinder 21 and locked by the lower end lb-b of the small diameter cylindrical part lb.
  • the inner diameter of the eyepiece holding cylinder 21 of the microscope 200 is, for example, ⁇ 23.2.
  • the polarizing plate lid 8 is mounted so as to cover the other eyepiece lens holding cylinder 21.
  • the illumination light from the LED light source device 4 can also irradiate the sample 23 with vertical force through the optical system such as the objective lens 22 from the eyepiece holding tube 21, and the reflected light functions as an analyzer. It is possible to observe through the polarizing plate 8a of the polarizing plate lid 8 to be observed. That is, with the microscope illumination system, coaxial epi-illumination observation and polarization Light observation can be performed.
  • the inner diameter of the eyepiece holding cylinder 21 of the microscope there are two types of standards for the inner diameter of the eyepiece holding cylinder 21 of the microscope: ⁇ 23.2 and ⁇ 30.
  • the outer diameter of the mounting portion lc of the microscope illumination device 100 is slightly less than ⁇ 23.2
  • the outer shape of the polarizing plate lid 8 is the same as that of the eyepiece holding cylinder 21 having the inner diameter of ⁇ 23.2. Since they are formed to match the outer shape (for example, about ⁇ 25), both can be attached to an eyepiece holding tube having an inner diameter of ⁇ 23.2, but an eyepiece holding tube having an inner diameter of ⁇ 30 It cannot be installed as it is.
  • an eyepiece having an inner diameter of ⁇ 30 is provided by mounting the auxiliary adapter 10 having an outer diameter of less than ⁇ 30 on the outer periphery of the small-diameter cylindrical portion lb and the mounting portion lc of the illumination device 100 for a microscope.
  • the microscope illumination device 100 can also be attached to the lens holding tube.
  • a polarizing plate cover 9 (not shown) having a larger inner diameter than the polarizing plate cover 8 is prepared so that it can be attached to the outer diameter of the eyepiece holding cylinder having an inner diameter of ⁇ 30. . This makes it possible to meet both standards for eyepiece holding cylinders.
  • FIG. 6 is a view showing the auxiliary adapter 10.
  • Figure (a) is a front view and Figure (b) is a sectional view.
  • FIG. 7 is a cross-sectional view when the auxiliary adapter 10 is attached to the microscope illumination device 100.
  • the auxiliary adapter 10 has a large-diameter portion 10c.
  • the length g of the large diameter portion 10c in the optical axis direction is, for example, 9 mm-10 mm, and is the same as the length d (see FIG. 1) of the small diameter cylindrical portion lb in the optical axis direction.
  • the same optical path length from the LED light source device 4 can be formed depending on whether the auxiliary adapter 10 is used or not.
  • the microscope illumination device 100 can be locked at the same position with respect to the eyepiece holding cylinder by the small diameter cylindrical portion lb and the large diameter portion 10c of the auxiliary adapter 10. Thereby, the optical conditions can be made the same.
  • an O-ring 11 is fitted in, for example, two power points on the outer periphery 1 Oa of the auxiliary adapter 10.
  • An O-ring 12 is also fitted at one power point on the inner periphery 10b of the auxiliary adapter 10, for example.
  • the force required when the microscope illuminating device 100 with the auxiliary adapter 10 attached is inserted into the eyepiece lens holding cylinder 21.
  • This can be realized, for example, by using a softer material for the outer O-ring 11 than the inner O-ring 12.
  • the microscope illumination device 100 on which the auxiliary adapter 10 is mounted can be smoothly inserted into the eyepiece holding cylinder 21.
  • both the microscope illumination device 100 and the auxiliary adapter 10 are sized so that a person can easily hold them with one hand, the force when attaching the auxiliary adapter 10 to the microscope illumination device 100 is relatively large. Even if set, it can be easily mounted.
  • the outer O-ring 11 may be made of, for example, silicon rubber
  • the inner O-ring 12 may be made of, for example, -tolyl rubber.
  • the microscope has a binocular type eyepiece holding cylinder 21 as shown in FIG. 5 above, and a C mount portion for mounting a digital camera or a CCD camera on the binocular.
  • a C mount portion for mounting a digital camera or a CCD camera on the binocular.
  • FIG. 8 is a view showing the C mount adapter 13.
  • the figure (a) is a front view, and the figure (b) sectional view of force S (a).
  • FIG. 9 is a cross-sectional view when the C-mount adapter 13 is attached to the microscope illumination device 100.
  • the C mount adapter 13 has a cylindrical shape, and a lower end 14 has a screw portion 15 for engaging with, for example, screwing, the C mount portion of the microscope. Is provided.
  • the upper end 16 is provided with an insertion portion 17 into which the lower end lc-b of the mounting portion lc of the microscope illumination device 100 is inserted and locked at a predetermined position.
  • the mounting portion lc of the microscope illumination device 100 is inserted into the insertion portion 17 via the auxiliary adapter 10 and locked at a predetermined position, and the digital camera or CCD camera mounted on the microscope illumination device 100 is locked.
  • An optical path 18 having an optical path length that forms an image at a specific position via the C mount portion of the microscope is provided inside the C mount adapter 13.
  • a screw hole 19 into which a screw 20 for fixing the microscope illumination device 100 inserted into the insertion portion 17 is screwed is provided.
  • an optical adapter 40 as shown in FIG. 10 is attached to the digital camera, and the digital camera polarizing plate 31 is attached to the lower end of the optical adapter 40.
  • the optical adapter 40 has a stepped cylindrical shape similar to the microscope illumination device 100, and the lower end is inserted into an eyepiece holding tube having an inner diameter of ⁇ 23.2, or an eyepiece having an inner diameter of ⁇ 30 is held through the auxiliary adapter 10. It can be inserted into a cylinder or attached to the C mount via the C mount adapter 13.
  • the microscope illumination device 100 can be attached to two standard eyepiece holding cylinders and the C mount unit, and the polarizing plate lids 8 and 9 are also connected to each standard. Since it can be attached to the eye lens holder, various combinations are possible when observing the sample 23.
  • a method for observing the microscope illumination device 100, the polarizing plate lid 8, and the digital camera 30 attached to the eyepiece holding tube 21 or the C mount unit, and the illumination light emitted from the LED light source device 4 at that time The optical path will be described.
  • FIG. 11 shows that the microscope illumination device 100 is inserted into one eyepiece holding cylinder 21a, the polarizing plate lid 8 is attached to 2 lb of the other eyepiece holding cylinder, and the digital camera 30 is attached to the C mount 24.
  • FIG. 12 shows the optical path in this case.
  • the illumination light emitted from the LED light source device 4 is polarized by the built-in polarization plate 2 in the microscope illumination device 100, passes through the sensitive color plate 5a and the condenser lens 6, and holds one eyepiece. It passes through the eyepiece 26a of 21a, passes through the prism 25 in the microscope 200, reaches the objective lens 22 and irradiates the sample 23 from the vertical direction.
  • the reflected light reflected from the sample 23 passes through the object lens 22 and the prism 25 and is divided into two directions.
  • One reflected light is emitted from the eyepiece lens 26b of the eyepiece holding cylinder 21b and observed through the polarizing plate lid 8.
  • the other reflected light is guided to the digital camera polarizing plate 31 of the digital camera 30 mounted on the C mount unit 24, and is observed on the display unit or the like (not shown) of the digital camera 30.
  • FIG. 13 shows that both eyepiece holding cylinders 21 are fitted with polarizing plate lids 8 and microscopically mounted on the C mount.
  • the case where the mirror illumination device 100 is attached is shown.
  • FIG. 14 shows the optical path in this case.
  • the illumination light emitted from the LED light source device 4 of the C mount 24 passes through the built-in polarizing plate 2, the sensitive color plate 5a and the condenser lens 6 in the microscope illumination device 100, and enters the microscope 200.
  • the sample 23 is irradiated through the prism 25 through the objective lens 22 from the vertical direction.
  • the reflected light of the sample 23 passes through the objective lens 22 and the prism 25 and is divided into the eyepiece holding cylinders, and is guided to the polarizing plates 8a through the eyepieces 26a and 26b.
  • the digital camera 30 is attached to one eyepiece holding cylinder 21a
  • the polarizing plate lid 8 is attached to the other eyepiece holding cylinder 21b
  • the C mount Various patterns can be considered, such as when the microscope illumination device 100 is attached to the head, and the auxiliary adapter 10 and the inner diameter ⁇ are compatible with the two standards of ⁇ 23.2 and ⁇ 30 It is also possible to observe by appropriately attaching a polarizing plate lid 9 that can be attached to 30 eyepiece holding cylinders.
  • FIG. 15 is a view showing an observation image when observation is performed using a semiconductor substrate as a sample 23 in a biological microscope using the illumination system for a microscope.
  • this system we succeeded in photographing a semiconductor substrate that could not be photographed with a conventional biological microscope. That is, by applying coaxial epi-illumination from the vertical direction of the semiconductor substrate by the microscope illumination device 100 in the present embodiment, and using the built-in polarizing plate 2 as a polarizer and the polarizing plate lid 8 as an analyzer, We were able to obtain a clear image of the semiconductor substrate, free of flares and ghosts.
  • polarization observation is performed using two polarizing plates, and the polarization angle is changed by rotating each polarizing plate, so that the color contrast as shown in FIGS.
  • the semiconductor substrate can be observed more clearly, such as irregularities and scratches.
  • FIG. 16 shows an observation image when the sharp color plate is observed through the sensitive color plate switching plate 5 through 5a (FIG. (A)) and when not observed (FIG. (B)).
  • FIG. As shown in the figure, in the present embodiment, by providing the sensitive color plate 5a, the color change becomes remarkable, and more detailed observation can be performed. In addition, by making it possible to switch the sensitive color plate 5a, Depending on the material, it is possible to cope with cases where observation is difficult due to color changes.
  • the coaxial epi-illumination observation can be performed, but it is cheaper and more compact than the conventional coaxial epi-illumination device, and is excellent in versatility.
  • An illumination system can be provided.
  • FIG. 17 is a diagram showing an optical path in this case.
  • the illumination light emitted from the mercury lamp 53 is selectively transmitted by the excitation filter 51 only in the short wavelength region, passes through the sensitive color plate 5a and the condenser lens 6, and is one eyepiece.
  • the sample 23 passes through the eyepiece 26a of the holding cylinder 21a and is irradiated onto the sample 23 through the prism 25 and the objective lens 22 in the microscope.
  • the reflected light reaches the absorption filter 52 from the other eyepiece lens 26b via the objective lens 22 and the prism 25, and only the fluorescence of the reflected light is transmitted through the absorption filter 52 and observed.
  • the LED is used for the light source device.
  • a halogen lamp for the light source device.
  • a tungsten lamp etc. You can use.
  • the built-in polarizing plate 2 in the first embodiment is used as the excitation film.
  • the force that had replaced the polarizing plate lid 8 with the absorption filter 52 was left as it was, and an excitation filter was provided on the microscope illumination device 100, and an absorption filter was placed on the polarizing plate lid 8. It ’s okay to have it.
  • the microscope illumination device 100 can be employed as a light source for a laser microscope. Similarly, it can be used as a light source of a laser repair device. Furthermore, it can also be used as the light source side of a microscope autofocus.
  • FIG. 1 is a diagram showing an appearance of a microscope illumination apparatus 100 according to a first embodiment.
  • FIG. 2 is a cross-sectional view of a microscope illumination apparatus 100.
  • FIG. 3 is a cross-sectional view and a top view of a sensitive color plate switching plate 5.
  • FIG. 4 is a view showing a polarizing plate lid 8.
  • FIG. 5 is a view showing a state where the microscope illumination device 100 and the polarizing plate lid 8 are attached to the eyepiece holding cylinder of the microscope 200.
  • FIG. 6 is a view showing an auxiliary adapter 10.
  • FIG. 7 is a cross-sectional view when the auxiliary adapter 10 is attached to the microscope illumination device 100.
  • FIG. 8 is a view showing a C mount adapter 13.
  • FIG. 9 is a cross-sectional view when the C mount adapter 13 is attached to the microscope illumination device 100.
  • FIG. 10 is a view showing an optical adapter 40 to which a digital camera polarizing plate 31 is attached.
  • FIG. 11 is a view showing an example of a method of attaching the microscope illumination device 100 and the polarizing plate lid 8.
  • FIG. 12 is a diagram showing an optical path in the case of FIG.
  • FIG. 13 is a view showing another example of how to attach the microscope illumination device 100 and the polarizing plate lid 8.
  • FIG. 14 is a diagram showing an optical path in the case of FIG.
  • FIG. 15 is a diagram showing an observation image when observation is performed using a semiconductor substrate as a sample 23 in a biological microscope using the illumination system for a microscope.
  • FIG. 17 is a view showing an optical path when fluorescence observation is performed in another embodiment of the present invention.

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  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Microscoopes, Condenser (AREA)

Abstract

A lighting apparatus for a microscope and a lighting system for the microscope. The body (1) of the lighting apparatus (100) for the microscope is formed in a stepped cylindrical shape. A LED light source device (4) is fitted to the upper end part of the body (1), a mounting part (1c) mountable on the eyepiece holding tube (21) of the microscope (200) is fitted to the lower end part thereof, and a built-in polarizing plate is installed therein. The mounting part (1c) of the body (1) of the lighting apparatus (100) for the microscope where a diameter is formed minimum is fittedly inserted into one eyepiece holding tube (21) of the microscope (200). Also, a polarizing plate cover (8) is installed to cover the other eyepiece holding tube (21) of the microscope (200). Thus, the lighting apparatus can be compactly manufactured at low cost and perform coaxial epi-illumination observation.

Description

明 細 書  Specification
顕微鏡用照明装置及び顕微鏡用照明システム  Microscope illumination device and microscope illumination system
技術分野  Technical field
[0001] 本発明は、顕微鏡に用いられ、観察試料を照らすための顕微鏡用照明装置及び 顕微鏡用照明システムに関する。  The present invention relates to a microscope illumination device and a microscope illumination system that are used in a microscope and illuminate an observation sample.
背景技術  Background art
[0002] 従来、顕微鏡で金属組織や半導体基板等を比較的高倍率で観察する場合や、凹 凸があって光が深部まで届きづら!/、サンプルを観察する場合には、対物レンズの光 軸に沿って照明を導入する、同軸落射照明装置が用いられていた。この場合、例え ば対物レンズの上部に、 45度に設定されたノヽーフミラーを設けて、当該当該ハーフミ ラーに側面力 水平方向に照明を当てることで、撮像側の光軸と照明側の光軸とを 同軸化させ、試料に対して垂直方向力 照明光を照射する。  Conventionally, when observing a metal structure, a semiconductor substrate, etc. with a microscope at a relatively high magnification, or when there is a concave / convex surface and light does not reach the deep part! / A coaxial epi-illuminator was used that introduced illumination along the axis. In this case, for example, by providing a 45 degree mirror to the top of the objective lens and illuminating the half mirror in a horizontal direction, the optical axis on the imaging side and the optical axis on the illumination side And irradiate the sample with vertical force illumination light.
[0003] しかし、当該同軸落射照明装置においては、側面から照明を照射するため、ハー フミラー等が収容されたユニットのほかランプハウスやファイバー照明、外部トランス、 アタッチメント等の装置が必要となり、特に横方向のスペースを取られて扱いにくいと いう問題がある。また、それらの装置は高価であり、かつそれらの装置を取り付けるた めには専用の顕微鏡が必要となる。  [0003] However, in the coaxial epi-illumination device, in order to irradiate the illumination from the side, in addition to a unit housing a half mirror, devices such as a lamp house, fiber illumination, an external transformer, and an attachment are required. There is a problem that it is difficult to handle due to the space in the direction. In addition, these devices are expensive, and a dedicated microscope is required to install them.
[0004] これらの問題のうち、価格面の問題については、同軸落射照明装置よりも安価な照 明装置として、例えば、顕微鏡の 2つの接眼レンズのうちいずれか一方を外して、当 該接眼レンズの代わりに取り付けられる集光レンズと、ハロゲンランプが内蔵された光 源装置と、この光源装置と集光レンズとの間に取り付けられ、光源装置のハロゲンラ ンプの光を、集光レンズを通して試料に垂直に当てるためのファイバーケーブルとか ら構成される照明装置が開示されている。(特許文献 1参照。 ) o [0004] Among these problems, regarding the price problem, as an illuminating device that is less expensive than the coaxial epi-illumination device, for example, one of the two eyepieces of a microscope is removed and the eyepiece lens is removed. A condensing lens attached instead of the light source device, a light source device incorporating a halogen lamp, and a light source device attached between the light source device and the condensing lens. An illuminating device comprising a fiber cable for vertical application is disclosed. (See Patent Document 1.) o
特許文献 1:特開 2000— 292706号公報 (段落 [0005]、図 1等)  Patent Document 1: Japanese Unexamined Patent Publication No. 2000-292706 (paragraph [0005], FIG. 1, etc.)
発明の開示  Disclosure of the invention
発明が解決しょうとする課題  Problems to be solved by the invention
[0005] し力しながら、上記特許文献 1に開示された照明装置においても、ハロゲンランプを 内蔵した光源装置と集光レンズとをファイバーケーブルで接続しており、スペースをと られて扱いにくいという問題は依然として解決されていない。また、当該照明装置は、 V、かなる顕微鏡にも取り付けられるようには構成されて!、な!/、。 However, in the illumination device disclosed in Patent Document 1, a halogen lamp is also used. The built-in light source device and the condensing lens are connected by a fiber cable, and the problem that the space is difficult to handle is still unsolved. In addition, the lighting device is designed to be attached to V or any microscope! Wow! /
[0006] 以上のような事情に鑑み、本発明の目的は、安価かつコンパクトで、同軸落射照明 観察を行なうことができ、汎用性にも優れた顕微鏡用照明装置及び顕微鏡用照明シ ステムを提供することにある。 [0006] In view of the circumstances as described above, an object of the present invention is to provide a microscope illumination device and a microscope illumination system that are inexpensive and compact, can perform coaxial epi-illumination observation, and have excellent versatility. There is to do.
課題を解決するための手段  Means for solving the problem
[0007] 上記課題を解決するため、本発明の顕微鏡用照明装置は、接眼レンズを有し試料 の拡大像を得るための光学系と、前記接眼レンズを保持し第 1の径でなる双眼の第 1 の接眼レンズ保持筒とを少なくとも有する顕微鏡に用いられる照明装置であって、前 記各第 1の接眼レンズ保持筒に装着可能な装着部を一端に有する筒体と、前記筒 体の他端に一体的に設けられ、前記光学系を介して前記試料へ光を照射するため の光源とを具備する。 In order to solve the above-described problems, a microscope illumination apparatus according to the present invention includes an optical system that has an eyepiece and obtains an enlarged image of a sample, and a binocular that holds the eyepiece and has a first diameter. An illumination device for use in a microscope having at least a first eyepiece holding cylinder, a cylinder having an attachment portion that can be attached to each of the first eyepiece holding cylinders at one end, and other than the cylinder And a light source for irradiating the sample with light through the optical system.
[0008] ここで上記顕微鏡の光学系とは、例えば対物レンズやプリズム等を含む。光源は例 えば LED(light emitting diode),ハロゲンランプ、タングステンランプ等を用いることが できる。試料は例えば半導体基板等や金属組織、榭脂試料、生物試料等である。ま た筒体の形状は例えば円筒である力 これに限られない。  Here, the optical system of the microscope includes, for example, an objective lens and a prism. For example, an LED (light emitting diode), a halogen lamp, or a tungsten lamp can be used as the light source. The sample is, for example, a semiconductor substrate or the like, a metal structure, a resin sample, or a biological sample. Moreover, the shape of the cylinder is not limited to, for example, a cylindrical force.
[0009] 本発明では、上記筒体の他端に光源が一体的に設けられており、その反対側の一 端の装着部が接眼レンズ保持筒に装着可能となっているため、ケーブル等のフレキ シブルな部材等を介さず、非常にコンパクトで取り扱いやすい構成となっている。また 当該装着部を第 1の接眼レンズ保持筒に装着するだけで、上記光学系を介して容易 に同軸落射照明観察を行なうことができる。すなわち、照明が試料の下方から照射さ れる設計の生物顕微鏡においても、本発明の顕微鏡用照明装置を用いることで同軸 落射照明光を照射でき、半導体基板や金属組織等の凹凸や傷等を観察することが できる。試料の拡大像を観察する際には、例えば一方の第 1の接眼レンズ保持筒に 当該顕微鏡用照明装置を装着して、他方の第 1の接眼レンズ保持筒から観察を行な うことができる。  [0009] In the present invention, the light source is integrally provided at the other end of the cylindrical body, and the mounting portion at one end on the opposite side can be mounted on the eyepiece lens holding cylinder. It has a very compact and easy-to-handle configuration without using flexible materials. Further, the coaxial epi-illumination observation can be easily performed through the optical system simply by mounting the mounting portion on the first eyepiece holding cylinder. That is, even in a biological microscope designed to illuminate from below the sample, it is possible to irradiate coaxial epi-illumination light by using the microscope illumination device of the present invention, and observe irregularities and scratches on the semiconductor substrate and metal structure. can do. When observing the magnified image of the sample, for example, the microscope illumination device can be attached to one first eyepiece holding cylinder, and observation can be performed from the other first eyepiece holding cylinder. .
[0010] 上記顕微鏡用照明装置は、前記筒体内に設けられ、前記光源からの光を集光する 集光レンズを更に具備していてもよい。これにより、上記光源から上記光学系へ導か れる光が平行光束となり、より照射ムラのない観察を行なうことができる。 [0010] The microscope illumination device is provided in the cylindrical body and collects light from the light source. A condensing lens may be further provided. As a result, the light guided from the light source to the optical system becomes a parallel light flux, and observation without uneven irradiation can be performed.
[0011] 本発明の一の形態によれば、上記顕微鏡用照明装置において、前記顕微鏡は前 記第 1の径よりも大きい第 2の径を有する双眼の第 2の接眼レンズ保持筒を有し、該 顕微鏡用照明装置は、前記各第 2の接眼レンズ保持筒に装着可能であり、かつ、前 記装着部に着脱可能な第 1のアダプタを更に具備する。これにより、上記第 1のァダ プタを筒体の装着部に装着することで、異なる 2つの径を持った接眼レンズ保持筒に それぞれ対応して容易に同軸落射照明観察を行なうことができ、汎用性が向上する  [0011] According to one aspect of the present invention, in the microscope illumination device, the microscope includes a binocular second eyepiece holding cylinder having a second diameter larger than the first diameter. The microscope illumination device further includes a first adapter that can be attached to each of the second eyepiece holding cylinders and that can be attached to and detached from the attachment portion. As a result, by mounting the first adapter on the mounting portion of the cylindrical body, it is possible to easily perform the coaxial epi-illumination observation corresponding to each of the eyepiece holding cylinders having two different diameters, Improved versatility
[0012] 本発明の一の形態によれば、上記顕微鏡用照明装置において、前記顕微鏡は C マウント部を有し、該顕微鏡用照明装置は、前記 Cマウント部に装着可能であり、前 記装着部に前記第 1のアダプタが装着された状態で、前記第 1のアダプタを介して前 記筒体に着脱可能な第 2のアダプタを更に具備する。これにより、上記第 1のァダプ タ及び第 2のアダプタを介することで、通常は撮像装置を装着するための Cマウント部 に、当該顕微鏡用照明装置も装着することができる。よって、 Cマウント部に顕微鏡用 照明装置を装着して試料に同軸落射照明光を当てながら、双眼の接眼レンズ保持 筒から試料の拡大像の観察を行なうこともでき、当該顕微鏡用照明装置により広い汎 用性を持たせることができる。 [0012] According to one aspect of the present invention, in the microscope illumination device, the microscope has a C mount portion, and the microscope illumination device can be attached to the C mount portion. And a second adapter that can be attached to and detached from the cylindrical body via the first adapter in a state where the first adapter is attached to the part. As a result, the microscope illumination device can also be mounted on the C mount portion for mounting the imaging device normally through the first adapter and the second adapter. Therefore, it is possible to observe a magnified image of the sample from the binocular eyepiece holding tube while applying a coaxial illumination light to the sample by attaching a microscope illumination device to the C mount part. It can be used for general purposes.
[0013] 本発明の他の観点に係る顕微鏡用照明装置は、接眼レンズを有し試料の拡大像 を得るための光学系と、前記接眼レンズを保持する双眼の接眼レンズ保持筒と、 Cマ ゥント部とを有する顕微鏡に用いられる照明装置であって、前記各接眼レンズ保持筒 に装着可能な装着部を一端に有する筒体と、前記筒体の他端に一体的に設けられ 、前記光学系を介して前記試料へ光を照射するための光源と、前記 Cマウント部に装 着可能であり、かつ、前記筒体に着脱可能な Cマウントアダプタとを具備する。これに より、例えば当該顕微鏡用照明装置を一方の接眼レンズ保持筒に装着して試料を照 明し、他方の接眼レンズ保持筒から観察し、同時に Cマウント部に撮像装置を装着し て撮影を行なったり、また Cマウントアダプタにより Cマウント部に顕微鏡用照明装置 を装着して双眼の接眼レンズ保持筒から観察を行なったりする等、様々なパターンで 試料を照明して試料の観察や撮影を行なうことが可能となる。 [0013] A microscope illumination apparatus according to another aspect of the present invention includes an optical system that has an eyepiece and obtains an enlarged image of a sample, a binocular eyepiece holding cylinder that holds the eyepiece, and a C-matrix. An illumination device for use in a microscope having a front part, the cylindrical body having a mounting part that can be mounted on each eyepiece lens holding cylinder at one end, and the other end of the cylindrical body integrally provided with the optical unit A light source for irradiating the sample with light through a system, and a C mount adapter that can be attached to the C mount and detachable from the cylinder. As a result, for example, the microscope illumination device is attached to one eyepiece holding tube to illuminate the sample, and the sample is observed from the other eyepiece holding tube, and at the same time, an imaging device is attached to the C mount portion to take a picture. In various patterns, such as using a C-mount adapter to attach a microscope illumination device to the C-mount and observing from a binocular eyepiece holding tube. It is possible to observe and photograph the sample by illuminating the sample.
[0014] また、当該顕微鏡用照明装置は、前記筒体内に設けられ、前記光源からの光を集 光する集光レンズを更に具備するようにしてもょ 、。  [0014] The microscope illumination device may further include a condensing lens that is provided in the cylindrical body and collects light from the light source.
[0015] 本発明の顕微鏡用照明システムは、接眼レンズを有し試料の拡大像を得るための 光学系と、前記接眼レンズを保持し第 1の径でなる双眼の第 1の接眼レンズ保持筒と を少なくとも有する顕微鏡に用いられる照明システムであって、前記各第 1の接眼レ ンズ保持筒に装着可能な装着部を一端に有する筒体と、前記筒体の他端に一体的 に設けられ、前記光学系を介して前記試料へ光を照射するための光源と、前記筒体 内に設けられ、前記光源から出射する光を偏光させる第 1の偏光板とを有する顕微 鏡用照明装置と、前記各第 1の接眼レンズ保持筒に着脱可能であり、前記筒体が前 記一方の第 1の接眼レンズ保持筒に装着された場合に、前記他方の第 1の接眼レン ズ保持筒の接眼レンズから出射する前記試料力 の反射光を偏光させる第 2の偏光 板とを具備する。  An illumination system for a microscope according to the present invention includes an optical system that has an eyepiece and obtains a magnified image of a sample, and a binocular first eyepiece holding cylinder that holds the eyepiece and has a first diameter. And an illumination system used in a microscope having at least a cylindrical body having a mounting portion at one end that can be mounted on each of the first eyepiece lens holding cylinders, and integrally provided at the other end of the cylindrical body. A microscope illumination device comprising: a light source for irradiating the sample with light via the optical system; and a first polarizing plate provided in the cylindrical body for polarizing light emitted from the light source. Each of the first eyepiece lens holding cylinders is attachable to and detachable from the first eyepiece lens holding cylinder when the cylinder body is attached to the first eyepiece lens holding cylinder. A second light that polarizes the reflected light of the sample force emitted from the eyepiece; ; And a light plate.
[0016] ここで第 1の偏光板はボラライザ一の役割を果たし、第 2の偏光板はアナライザーの 役割を果たす。このシステムでは、筒体の他端に光源が一体的に設けられ、その反 対側の一端の装着部が接眼レンズ保持筒に装着可能となっているため、非常にコン パクトで取り扱いやすい構成となっている。また当該装着部を一方の第 1の接眼レン ズ保持筒に装着して、上記第 2の偏光板を他方の第 1の接眼レンズ保持筒に装着す ることで、いわゆるゴーストやフレアを排除しながら、上記光学系を介して容易に同軸 落射照明観察を行なうことができるとともに、偏光観察を行なうこともできる。  [0016] Here, the first polarizing plate serves as a polarizer, and the second polarizing plate serves as an analyzer. In this system, the light source is integrally provided at the other end of the cylinder, and the mounting portion at the opposite end can be mounted on the eyepiece lens holding cylinder, so that the configuration is very compact and easy to handle. It has become. Further, by attaching the mounting portion to one first eyepiece lens holding cylinder and mounting the second polarizing plate to the other first eyepiece lens holding cylinder, so-called ghost and flare are eliminated. However, the coaxial epi-illumination observation can be easily performed through the optical system, and the polarization observation can also be performed.
[0017] また、当該顕微鏡照明システムは、前記筒体内に設けられ、前記光源からの光を 集光する集光レンズを更に具備していてもよい。これにより、上記光源から上記光学 系へ導かれる光が平行光束となるため、より照射ムラがなくなり、またフレアやゴースト をより排除しながら観察を行なうことができる。  [0017] The microscope illumination system may further include a condensing lens that is provided in the cylindrical body and collects light from the light source. As a result, the light guided from the light source to the optical system becomes a parallel light flux, so that irradiation unevenness is further eliminated, and observation can be performed while further eliminating flare and ghost.
[0018] 本発明の一の形態によれば、上記顕微鏡用照明システムにおいて、前記顕微鏡は 前記第 1の径よりも大きい第 2の径を有する第 2の接眼レンズ保持筒を有し、該顕微 鏡用照明システムは、前記各第 2の接眼レンズ保持筒に装着可能であり、かつ、前 記装着部に着脱可能な第 1のアダプタと、前記各第 2の接眼レンズ保持筒に着脱可 能であり、前記筒体に前記第 1のアダプタが装着された状態で該筒体が前記一方の 第 2の接眼レンズ保持筒に装着された場合に、前記他方の第 2の接眼レンズ保持筒 の接眼レンズから出射する前記試料力 の反射光を偏光させる第 3の偏光板とを更 に具備する。これにより、異なる 2つの径を持った接眼レンズ保持筒を有する顕微鏡 での同軸落射照明観察及び偏光観察にそれぞれ容易に対応でき、汎用性が向上 する。 [0018] According to one aspect of the present invention, in the microscope illumination system, the microscope includes a second eyepiece holding cylinder having a second diameter larger than the first diameter, and the microscope The mirror illumination system can be attached to each of the second eyepiece holding cylinders, and is attachable to and detachable from the first adapter that can be attached to and detached from the mounting portion and each of the second eyepiece holding cylinders. And when the first adapter is attached to the cylinder and the cylinder is attached to the second eyepiece holding cylinder, the other second eyepiece holding cylinder And a third polarizing plate that polarizes the reflected light of the sample force emitted from the eyepiece. As a result, it is possible to easily cope with coaxial epi-illumination observation and polarization observation with a microscope having an eyepiece holding cylinder having two different diameters, and the versatility is improved.
[0019] 本発明の一の形態によれば、上記顕微鏡用照明システムは、前記各第 1の接眼レ ンズ保持筒に装着可能な撮像装置に着脱可能であり、前記筒体が前記一方の第 1 の接眼レンズ保持筒に装着され前記撮像装置が前記他方の第 1の接眼レンズ保持 筒に装着された場合に、該他方の第 1の接眼レンズ保持筒から出射する前記試料か らの反射光を偏光させる第 4の偏光板を更に具備する。これにより、上記第 4の偏光 板を用いることで、撮像装置で試料の撮影を行なう場合でも同軸落射照明観察及び 偏光観察による撮影を容易に行なうことができる。  According to an aspect of the present invention, the microscope illumination system can be attached to and detached from an imaging device that can be attached to each of the first eyepiece lens holding cylinders, and the cylinder is the first of the first eyepiece lens holding cylinders. Reflected light from the sample emitted from the other first eyepiece holding cylinder when the imaging device is attached to the other first eyepiece holding cylinder and attached to the first eyepiece holding cylinder. And a fourth polarizing plate that polarizes the light. Thus, by using the fourth polarizing plate, it is possible to easily perform imaging by coaxial epi-illumination observation and polarization observation even when a sample is imaged by the imaging device.
[0020] 本発明の一の形態によれば、顕微鏡用照明システムは、前記各第 2の接眼レンズ 保持筒に装着可能な撮像装置に着脱可能であり、前記筒体が前記一方の第 2の接 眼レンズ保持筒に装着され前記撮像装置が前記他方の第 2の接眼レンズ保持筒に 装着された場合に、該他方の第 2の接眼レンズ保持筒から出射する前記試料からの 反射光を偏光させる第 4の偏光板を更に具備する。これにより、異なる 2つの径を有 する接眼レンズ保持筒に対応して、同軸落射照明観察及び偏光観察による試料の 撮影を容易に行なうことができ、汎用性が向上する。  [0020] According to one aspect of the present invention, the microscope illumination system can be attached to and detached from an imaging device that can be attached to each of the second eyepiece holding cylinders, and the cylindrical body is the one of the second eyepieces. Polarized light reflected from the sample emitted from the other second eyepiece holding cylinder when the imaging device is attached to the other second eyepiece holding cylinder attached to the eyepiece holding cylinder. And a fourth polarizing plate. As a result, in correspondence with the eyepiece holding cylinders having two different diameters, it is possible to easily photograph the sample by the coaxial epi-illumination observation and the polarization observation, and the versatility is improved.
[0021] 本発明の一の形態によれば、上記顕微鏡用照明システムにおいて、前記顕微鏡は Cマウント部を有し、該顕微鏡用照明システムは、前記 Cマウント部に装着可能であり 、前記少なくとも一方の第 1の接眼レンズ保持筒に前記第 2の偏光板が装着された場 合、または、前記少なくとも一方の第 2の接眼レンズ部に前記第 3の偏光板が装着さ れた場合に、前記装着部に前記第 1のアダプタが装着された状態で、前記第 1のァ ダプタを介して前記筒体に着脱可能な第 2のアダプタを更に具備する。これにより、 上記第 1のアダプタ及び第 2のアダプタを介することで、撮像装置のみならず、上記 顕微鏡用照明装置を Cマウント部に装着して、異なる 2つの径を有する接眼レンズ保 持筒に対応した同軸落射照明観察及び偏光観察を容易に行なうことができ、汎用性 が更に向上する。また、 Cマウント部に撮像装置を装着して各第 1の接眼レンズ保持 筒にそれぞれ顕微鏡用照明装置と第 2または第 3の偏光板を装着したり、一方の第 1 または第 2の接眼レンズ保持筒に撮像装置を装着して他方に第 2または第 3の偏光 板を装着し、 Cマウント部に顕微鏡用照明装置を装着する等、様々なパターンでの観 察を行なうことができる。 [0021] According to an aspect of the present invention, in the microscope illumination system, the microscope has a C mount portion, and the microscope illumination system can be attached to the C mount portion, and the at least one of When the second polarizing plate is attached to the first eyepiece holding cylinder, or when the third polarizing plate is attached to the at least one second eyepiece portion, The apparatus further includes a second adapter that is attachable to and detachable from the cylindrical body via the first adapter in a state where the first adapter is attached to the attachment portion. As a result, through the first adapter and the second adapter, not only the imaging device but also the microscope illumination device is attached to the C mount part, and the eyepiece lens having two different diameters is mounted. Coaxial epi-illumination observation and polarization observation corresponding to the holder can be easily performed, and versatility is further improved. In addition, an imaging device is attached to the C-mount part, and a microscope illumination device and a second or third polarizing plate are attached to each first eyepiece holding cylinder, or one of the first or second eyepieces. It is possible to perform observations in various patterns, such as mounting the imaging device on the holding cylinder, mounting the second or third polarizing plate on the other, and mounting the microscope illumination device on the C mount.
[0022] 本発明の一の形態によれば、上記顕微鏡用照明システムは、前記筒体内に設けら れ、前記第 1の偏光板を回転させることで該第 1の偏光板の偏光角度を変更するた めの第 1の回転機構を更に具備する。これにより、当該偏光角度を変更することで、 観察像の色や明暗のコントラストを調整して、より詳細な観察を行なうことができる。  [0022] According to one aspect of the present invention, the microscope illumination system is provided in the cylindrical body, and changes the polarization angle of the first polarizing plate by rotating the first polarizing plate. A first rotating mechanism is further provided. Thus, by changing the polarization angle, it is possible to adjust the color of the observation image and the contrast of light and dark and perform more detailed observation.
[0023] 本発明の一の形態によれば、上記顕微鏡用照明システムは、前記第 2の偏光板を 回転させることで該第 2の偏光板の偏光角度を変更するための第 2の回転機構を更 に具備する。  According to an aspect of the present invention, the microscope illumination system includes a second rotation mechanism for changing the polarization angle of the second polarizing plate by rotating the second polarizing plate. In addition.
[0024] 本発明の一の形態によれば、上記顕微鏡用照明システムは、前記第 3の偏光板を 回転させることで該第 3の偏光板の偏光角度を変更するための第 2の回転機構を更 に具備する。  [0024] According to one aspect of the present invention, the microscope illumination system includes a second rotation mechanism for changing the polarization angle of the third polarizing plate by rotating the third polarizing plate. In addition.
[0025] 本発明の一の形態によれば、上記顕微鏡用照明システムは、前記第 4の偏光板を 回転させることで該第 4の偏光板の偏光角度を変更するための第 2の回転機構を更 に具備する。  [0025] According to one aspect of the present invention, the microscope illumination system includes a second rotation mechanism for changing the polarization angle of the fourth polarizing plate by rotating the fourth polarizing plate. In addition.
[0026] これらの第 2の回転機構と上記第 1の回転機構とを併用することで、偏光角度の調 整をより容易に行なうことができる。  [0026] By using these second rotation mechanism and the first rotation mechanism together, the polarization angle can be adjusted more easily.
[0027] 本発明の一の形態によれば、上記顕微鏡用照明システムは、前記筒体内であって 前記第 1の偏光板と前記装着部との間に着脱可能に設けられた鋭敏色板を更に具 備する。これにより、観察像の色の変化を顕著にして、試料の微細な観察をより容易 に行なうことができる。また、鋭敏色板を着脱可能としたことで、試料に応じて 2枚の偏 光板のみで観察したり、鋭敏色板を挟んで観察したりして、最も効果的な観察法を容 易に選択することが可能となる。  According to an aspect of the present invention, the microscope illumination system includes a sensitive color plate that is detachably provided between the first polarizing plate and the mounting portion in the cylindrical body. In addition, prepare. As a result, the change in the color of the observation image is noticeable, and the fine observation of the sample can be performed more easily. In addition, by making the sensitive color plate detachable, it is possible to easily observe the most effective observation method by observing with only two polarizing plates or observing with the sensitive color plate in between, depending on the sample. It becomes possible to select.
[0028] 本発明の他の観点に係る顕微鏡用照明システムは、接眼レンズを有し試料の拡大 像を得るための光学系と、前記接眼レンズを保持する双眼の接眼レンズ保持筒と、 c マウント部とを有する顕微鏡に用いられる照明システムであって、前記各接眼レンズ 保持筒に装着可能な装着部を一端に有する筒体と、前記筒体の他端に一体的に設 けられ、前記光学系を介して前記試料へ光を照射するための光源と、前記筒体内に 設けられ、前記光源力 出射する光を偏光させる第 1の偏光板と、前記 cマウント部 に装着可能であり、かつ、前記筒体に着脱可能な cマウントアダプタとを有する顕微 鏡用照明装置と、前記各接眼レンズ保持筒に着脱可能であり、前記筒体が前記 Cマ ゥントアダプタを介して前記 Cマウント部に装着された場合に、前記各接眼レンズ保 持筒の各接眼レンズから出射する前記試料力 の反射光を偏光させ、または、前記 筒体が前記一方の接眼レンズ保持筒に装着された場合に、前記他方の接眼レンズ 保持筒の接眼レンズから出射する前記試料からの反射光を偏光させる第 2の偏光板 とを具備する。 [0028] A microscope illumination system according to another aspect of the present invention includes an eyepiece and enlarges a sample. An illumination system for use in a microscope having an optical system for obtaining an image, a binocular eyepiece holding cylinder for holding the eyepiece, and a c-mount unit, the mounting system being mountable on each eyepiece holding cylinder A cylindrical body having one end at one end, a light source that is integrally provided at the other end of the cylindrical body, and that irradiates the sample with light through the optical system, and a light source that is provided in the cylindrical body, the light source A microscope illumination device comprising: a first polarizing plate that polarizes emitted light; and a c-mount adapter that can be attached to and detached from the cylindrical body, and each of the eyepieces. Reflected light of the sample force emitted from each eyepiece of each eyepiece holding cylinder when the cylinder is attached to the C mount portion via the C mount adapter. Polarized, or A second polarizing plate that polarizes the reflected light from the sample emitted from the eyepiece of the other eyepiece holding cylinder when the cylinder is attached to the one eyepiece holding cylinder. .
[0029] この構成によれば、上記 Cマウントアダプタを用いることで、双眼の接眼レンズ保持 筒と Cマウント部に、上記顕微鏡用照明装置、 Cマウントアダプタ、第 2の偏光板をそ れぞれ適宜装着して、様々なパターンで同軸落射照明観察及び偏光観察を行なうこ とが可能となる。  [0029] According to this configuration, by using the C mount adapter, the microscope illuminating device, the C mount adapter, and the second polarizing plate are respectively provided on the binocular eyepiece holding cylinder and the C mount portion. With appropriate mounting, it is possible to perform coaxial epi-illumination observation and polarization observation with various patterns.
[0030] また、当該顕微鏡用照明システムは、前記筒体内に設けられ、前記光源からの光 を集光する集光レンズを更に具備して 、てもよ 、。  [0030] Further, the microscope illumination system may further include a condensing lens that is provided in the cylindrical body and collects light from the light source.
[0031] 本発明の更に別の観点に係る顕微鏡用照明システムは、接眼レンズを有し蛍光試 料の拡大像を得るための光学系と、前記接眼レンズを保持する双眼の接眼レンズ保 持筒とを有する顕微鏡に用いられる照明システムであって、前記一方の接眼レンズ 保持筒に装着可能な装着部を一端に有する筒体と、前記筒体の他端に一体的に設 けられ、前記光学系を介して前記試料へ光を照射するための光源と、前記筒体内に 設けられ、前記光源から出射する光を選択的に透過させる励起フィルタとを有する顕 微鏡用照明装置と、前記他方の接眼レンズ保持筒に着脱可能であり、前記他方の接 眼レンズ保持筒の接眼レンズから出射する前記試料力ゝらの反射光のうち蛍光を選択 的に透過させる吸収フィルタとを具備する。  [0031] An illumination system for a microscope according to still another aspect of the present invention includes an optical system that has an eyepiece and obtains an enlarged image of a fluorescent sample, and a binocular eyepiece holding cylinder that holds the eyepiece. An illumination system used in a microscope having a mounting portion that can be mounted on the one eyepiece lens holding tube at one end and the other end of the cylindrical body, and the optical system A microscope illumination device comprising: a light source for irradiating the sample with light through a system; and an excitation filter provided in the cylindrical body for selectively transmitting light emitted from the light source; And an absorption filter that selectively transmits fluorescence from the reflected light of the sample force emitted from the eyepiece lens of the other eyepiece lens holding tube.
[0032] この構成により、上記顕微鏡用照明装置を上記一方の接眼レンズ保持筒に装着し て同軸落射照明観察を行ないながら、他方の接眼レンズ保持筒に吸収フィルタを装 着することで、より安価でコンパクトなシステムにおいて簡易蛍光観察を行なうことが 可能である。なおこの場合上記光源には例えば水銀ランプを用いる。 With this configuration, the microscope illumination device is attached to the one eyepiece holding cylinder. By attaching an absorption filter to the other eyepiece holding tube while performing coaxial epi-illumination observation, simple fluorescence observation can be performed in a cheaper and more compact system. In this case, for example, a mercury lamp is used as the light source.
発明の効果  The invention's effect
[0033] 本発明によれば、安価かつコンパクトで、同軸落射照明観察を行なうことができ、汎 用性にも優れた顕微鏡用照明装置及び顕微鏡用照明システムを提供することができ る。  [0033] According to the present invention, it is possible to provide a microscope illumination device and a microscope illumination system that are inexpensive and compact, can perform coaxial epi-illumination observation, and have excellent versatility.
発明を実施するための最良の形態  BEST MODE FOR CARRYING OUT THE INVENTION
[0034] 以下、本発明の実施の形態を図面に基づき説明する。  Hereinafter, embodiments of the present invention will be described with reference to the drawings.
[0035] (第 1実施形態)  [0035] (First embodiment)
まず、本発明の第 1の実施形態としての顕微鏡用照明システムについて説明する。 当該顕微鏡用照明システムは、顕微鏡用照明装置と、各種のアダプタ等の付属品で 構成される。図 1は本実施形態における顕微鏡用照明装置 100の外観を示す図であ り、図 2は顕微鏡用照明装置 100の断面図である。  First, a microscope illumination system according to a first embodiment of the present invention will be described. The microscope illumination system includes a microscope illumination device and accessories such as various adapters. FIG. 1 is a view showing the appearance of the microscope illumination device 100 according to the present embodiment, and FIG. 2 is a cross-sectional view of the microscope illumination device 100.
[0036] 両図に示すように、顕微鏡用照明装置 100の本体 1は段付き円筒の形状を有して おり、大径筒部 la及び小径筒部 lbを有している。また本体 1の上端部には、 LED光 源装置 4が設けられ、下端部には、後述する顕微鏡の接眼レンズ保持筒に装着可能 な装着部 lcを有している。装着部 lcの外径は例えば φ 23. 2 (23. 2mm、単位は以 下同じ。)弱である。  As shown in both figures, the main body 1 of the microscope illumination device 100 has a stepped cylindrical shape, and has a large-diameter cylindrical portion la and a small-diameter cylindrical portion lb. In addition, an LED light source device 4 is provided at the upper end of the main body 1, and an attachment portion lc that can be attached to an eyepiece holding cylinder of a microscope described later is provided at the lower end. The outer diameter of the mounting part lc is, for example, a little less than φ 23.2 (23.2 mm, the same applies hereinafter).
[0037] 本体 1の内部には、上記 LED光源装置 4から出射する照明光を偏光させるための 内蔵偏光板 2が設けられ、当該内蔵偏光板 2を回転させるための筒状の偏光板回転 ハンドル 3が内蔵偏光板 2と一体的に設けられている。また本体 1の内部には、当該 照明光を通過させるための光路 7が形成されている。本体 1の下端部の装着部 lcの 内部には、上記 LED光源装置 4から出射され、光路 7を通過しながら上記内蔵偏光 板 2により偏光された照明光を集光するための集光レンズ 6が設けられている。  [0037] A built-in polarizing plate 2 for polarizing illumination light emitted from the LED light source device 4 is provided inside the main body 1, and a cylindrical polarizing plate rotating handle for rotating the built-in polarizing plate 2 3 is provided integrally with the built-in polarizing plate 2. Further, an optical path 7 for allowing the illumination light to pass therethrough is formed inside the main body 1. Inside the mounting portion lc at the lower end of the main body 1 is a condenser lens 6 for condensing the illumination light emitted from the LED light source device 4 and polarized by the built-in polarizing plate 2 while passing through the optical path 7. Is provided.
[0038] また本体 1の表面であって上記内蔵偏光板 2の下方にはスリット Idが設けられ、当 該スリット Idに挿入されるように、鋭敏色板切替板 5が設けられている。図 3は当該鋭 敏色板切替板 5の断面図(同図(a) )及び上面図(同図 (b) )である。当該鋭敏色板切 替板 5には、鋭敏色を観察するための鋭敏色板 5aと空洞 5bが設けられており、鋭敏 色板切替板 5を水平方向(図 1の矢印 A方向)にスライドさせることで、上記 LED光源 装置 4、内蔵偏光板 2及び集光レンズ 6からなる光学系の光軸に沿うように鋭敏色板 5aを配置したり、また鋭敏色板 5aを当該光軸力 外して上記光軸に空洞 5bが配置 されるようにしたりして、鋭敏色板 5aの使用 ·不使用を切り替えることが可能となって V、る。なお当該鋭敏色板切替板 5の長手方向の両端部にはスリット Idの縦方向の長 さ eよりも径の大き 、係止ネジ 5cがそれぞれ螺着され、スライド動作のストロークエンド で鋭敏色板切替板 5が本体 1に係止されるようになって ヽる。 [0038] A slit Id is provided on the surface of the main body 1 and below the built-in polarizing plate 2, and a sensitive color plate switching plate 5 is provided so as to be inserted into the slit Id. FIG. 3 is a cross-sectional view (Fig. (A)) and a top view (Fig. (B)) of the sensitive color plate switching plate 5. The sensitive plate cutting The replacement plate 5 is provided with a sensitive color plate 5a and a cavity 5b for observing the sensitive color. By sliding the sensitive color plate switching plate 5 in the horizontal direction (direction of arrow A in FIG. 1), The sensitive color plate 5a is arranged along the optical axis of the optical system composed of the LED light source device 4, the built-in polarizing plate 2 and the condenser lens 6, or the sensitive color plate 5a is removed from the optical axis force to the optical axis. It is possible to switch between using and not using the sensitive color plate 5a by arranging the cavity 5b. In addition, at both ends in the longitudinal direction of the sensitive color plate switching plate 5, a locking screw 5c having a diameter larger than the longitudinal length e of the slit Id is screwed, and the sensitive color plate at the stroke end of the sliding operation. The switching plate 5 comes to be locked to the main body 1.
[0039] 図 4は顕微鏡用照明装置 100と共に用いられる偏光板蓋 8を示した図である。同図 FIG. 4 is a view showing the polarizing plate lid 8 used together with the microscope illumination device 100. Same figure
(a)が断面図、同図 (b)が上面図である。偏光板蓋 8は、顕微鏡の接眼レンズ保持筒 に、当該接眼レンズ保持筒を覆うように装着することが可能となっている。また偏光板 蓋 8の内部には偏光板 8aが設けられている。当該偏光板 8aは、顕微鏡用照明装置 100の内蔵偏光板 2と対となり、内蔵偏光板 2が、 LED光源装置 4の近傍にあってポ ラライザ一の役割を果たすのに対して、アナライザーの役割を果たす。偏光板蓋 8の 内径 fは例えば約 φ 25である。また偏光板蓋 8には内径調節ネジ 8bが例えば 3っ螺 着され、接眼レンズ保持筒の外径に適合するように内径を微調節することができるよ うになつている。更に、偏光板蓋 8は、偏光板 8aを有する上部 8cと下部 8dとが螺着さ れた構造をとつており、上部 8cを回転させることで偏光板 8aの偏光角度を変更するこ とが可能となっている。  (a) is a sectional view, and (b) is a top view. The polarizing plate lid 8 can be attached to the eyepiece holding cylinder of the microscope so as to cover the eyepiece holding cylinder. A polarizing plate 8 a is provided inside the polarizing plate lid 8. The polarizing plate 8a is paired with the built-in polarizing plate 2 of the microscope illumination device 100, and the built-in polarizing plate 2 is in the vicinity of the LED light source device 4 and plays the role of a polarizer. Fulfill. The inner diameter f of the polarizing plate lid 8 is about φ25, for example. Also, for example, three inner diameter adjusting screws 8b are screwed to the polarizing plate lid 8, so that the inner diameter can be finely adjusted so as to match the outer diameter of the eyepiece lens holding cylinder. Furthermore, the polarizing plate lid 8 has a structure in which an upper portion 8c having a polarizing plate 8a and a lower portion 8d are screwed, and the polarization angle of the polarizing plate 8a can be changed by rotating the upper portion 8c. It is possible.
[0040] 図 5は、顕微鏡用照明装置 100及び偏光板蓋 8を顕微鏡 200の接眼レンズ保持筒 にそれぞれ装着した場合の様子を示した図である。同図に示すように、本体 1のうち 径が最小に形成された装着部 lcがー方の接眼レンズ保持筒 21に挿入され、小径筒 部 lbの下端 lb— bで係止する。この顕微鏡 200の接眼レンズ保持筒 21の内径は例 えば Φ 23. 2である。また偏光板蓋 8は他方の接眼レンズ保持筒 21を覆うように装着 される。このように装着することで、 LED光源装置 4からの照明光を接眼レンズ保持 筒 21から対物レンズ 22等の光学系を通して試料 23に垂直方向力も照射して、その 反射光を、アナライザ一として機能する偏光板蓋 8の偏光板 8aを通して観察すること ができる。すなわち、当該顕微鏡用照明システムにより、同軸落射照明観察及び偏 光観察を行なうことができる。 FIG. 5 is a view showing a state in which the microscope illumination device 100 and the polarizing plate lid 8 are respectively attached to the eyepiece holding cylinder of the microscope 200. As shown in the figure, the mounting part lc having the smallest diameter in the main body 1 is inserted into the opposite eyepiece holding cylinder 21 and locked by the lower end lb-b of the small diameter cylindrical part lb. The inner diameter of the eyepiece holding cylinder 21 of the microscope 200 is, for example, Φ23.2. The polarizing plate lid 8 is mounted so as to cover the other eyepiece lens holding cylinder 21. By mounting in this way, the illumination light from the LED light source device 4 can also irradiate the sample 23 with vertical force through the optical system such as the objective lens 22 from the eyepiece holding tube 21, and the reflected light functions as an analyzer. It is possible to observe through the polarizing plate 8a of the polarizing plate lid 8 to be observed. That is, with the microscope illumination system, coaxial epi-illumination observation and polarization Light observation can be performed.
[0041] ところで、顕微鏡の接眼レンズ保持筒 21の内径の規格には、 φ 23. 2と φ 30の 2種 類がある。上記顕微鏡用照明装置 100の装着部 lcの外径は上述したように φ 23. 2 弱であり、また偏光板蓋 8の外形も当該 φ 23. 2の内径を有する接眼レンズ保持筒 2 1の外形 (例えば約 φ 25)に合わせて形成されているため、両者とも φ 23. 2の内径 を有する接眼レンズ保持筒には装着可能であるが、 φ 30の内径を有する接眼レンズ 保持筒にはそのままでは装着できない。そこで、本実施形態においては、顕微鏡用 照明装置 100の小径筒部 lb及び装着部 lcの外周に、外径が φ 30弱の補助ァダプ タ 10を装着することで、 φ 30の内径を有する接眼レンズ保持筒にも顕微鏡用照明装 置 100を装着可能としている。また、偏光板蓋についても、 φ 30の内径を有する接 眼レンズ保持筒の外径に装着可能なように上記偏光板蓋 8よりも内径の大きい偏光 板蓋 9 (図示せず)を用意する。これにより、接眼レンズ保持筒の両規格に対応可能と なる。  By the way, there are two types of standards for the inner diameter of the eyepiece holding cylinder 21 of the microscope: φ23.2 and φ30. As described above, the outer diameter of the mounting portion lc of the microscope illumination device 100 is slightly less than φ23.2, and the outer shape of the polarizing plate lid 8 is the same as that of the eyepiece holding cylinder 21 having the inner diameter of φ23.2. Since they are formed to match the outer shape (for example, about φ25), both can be attached to an eyepiece holding tube having an inner diameter of φ23.2, but an eyepiece holding tube having an inner diameter of φ30 It cannot be installed as it is. Therefore, in the present embodiment, an eyepiece having an inner diameter of φ30 is provided by mounting the auxiliary adapter 10 having an outer diameter of less than φ30 on the outer periphery of the small-diameter cylindrical portion lb and the mounting portion lc of the illumination device 100 for a microscope. The microscope illumination device 100 can also be attached to the lens holding tube. As for the polarizing plate cover, a polarizing plate cover 9 (not shown) having a larger inner diameter than the polarizing plate cover 8 is prepared so that it can be attached to the outer diameter of the eyepiece holding cylinder having an inner diameter of φ30. . This makes it possible to meet both standards for eyepiece holding cylinders.
[0042] 図 6は、当該補助アダプタ 10を示した図である。同図(a)が正面図、同図 (b)が断 面図である。また図 7は、当該補助アダプタ 10が顕微鏡用照明装置 100に装着され た場合の断面図である。  FIG. 6 is a view showing the auxiliary adapter 10. Figure (a) is a front view and Figure (b) is a sectional view. FIG. 7 is a cross-sectional view when the auxiliary adapter 10 is attached to the microscope illumination device 100.
[0043] 両図に示すように、補助アダプタ 10には、大径部 10cが形成されている。この大径 部 10cの光軸方向の長さ gは例えば 9mm— 10mmとされており、上記小径筒部 lb の光軸方向の長さ d (図 1参照)と同一とされている。これにより、補助アダプタ 10を用 V、る場合と用いな 、場合とで、 LED光源装置 4からの同一の光路長を形成させること ができる。すなわち、小径筒部 lbによっても、補助アダプタ 10の大径部 10cによって も、接眼レンズ保持筒に対して同じ位置で顕微鏡用照明装置 100を係止させること ができる。これにより光学的条件を同一にすることができる。  [0043] As shown in both drawings, the auxiliary adapter 10 has a large-diameter portion 10c. The length g of the large diameter portion 10c in the optical axis direction is, for example, 9 mm-10 mm, and is the same as the length d (see FIG. 1) of the small diameter cylindrical portion lb in the optical axis direction. Thereby, the same optical path length from the LED light source device 4 can be formed depending on whether the auxiliary adapter 10 is used or not. In other words, the microscope illumination device 100 can be locked at the same position with respect to the eyepiece holding cylinder by the small diameter cylindrical portion lb and the large diameter portion 10c of the auxiliary adapter 10. Thereby, the optical conditions can be made the same.
[0044] また当該補助アダプタ 10の外周 1 Oaの例えば 2力所には Oリング 11がはめ込まれ ている。補助アダプタ 10の内周 10bの例えば 1力所にも Oリング 12がはめ込まれてい る。これら外側及と内側の Oリング 11、 12は互いに異なる材質力もなる。そうすること で顕微鏡用照明装置 100に補助アダプタ 10を装着するときに必要な力と、補助ァダ プタ 10が装着された顕微鏡用照明装置 100を接眼レンズ保持筒 21 (図 5参照)に挿 入するときに必要な力とを異ならせることができる。 In addition, an O-ring 11 is fitted in, for example, two power points on the outer periphery 1 Oa of the auxiliary adapter 10. An O-ring 12 is also fitted at one power point on the inner periphery 10b of the auxiliary adapter 10, for example. These outer and inner O-rings 11 and 12 have different material forces. By doing so, the force required to attach the auxiliary adapter 10 to the microscope illumination device 100 and the microscope illumination device 100 equipped with the auxiliary adapter 10 are inserted into the eyepiece holding tube 21 (see FIG. 5). The power required when entering can be different.
[0045] 例えば補助アダプタ 10が装着された顕微鏡用照明装置 100を接眼レンズ保持筒 2 1に挿入するときに必要な力の方を、顕微鏡用照明装置 100に補助アダプタ 10を装 着するときに必要な力より小さくなるように設定する。これは、例えば外側の Oリング 1 1を内側 Oリング 12より柔らかい材質を用いることで実現できる。これにより、補助ァダ プタ 10が装着された顕微鏡用照明装置 100を接眼レンズ保持筒 21にスムーズに挿 入できる。一方、顕微鏡用照明装置 100も補助アダプタ 10も人が片手で容易に持つ ことができる大きさであるため、補助アダプタ 10を顕微鏡用照明装置 100に装着する ときの力を比較的大きくなるように設定しても容易に装着することができる。具体的に は、外側の Oリング 11は例えばシリコンゴムとし、内側の Oリング 12は例えば-トリル ゴムとすればよい。  For example, when the auxiliary adapter 10 is attached to the microscope illuminating device 100, the force required when the microscope illuminating device 100 with the auxiliary adapter 10 attached is inserted into the eyepiece lens holding cylinder 21. Set it to be smaller than the required force. This can be realized, for example, by using a softer material for the outer O-ring 11 than the inner O-ring 12. As a result, the microscope illumination device 100 on which the auxiliary adapter 10 is mounted can be smoothly inserted into the eyepiece holding cylinder 21. On the other hand, since both the microscope illumination device 100 and the auxiliary adapter 10 are sized so that a person can easily hold them with one hand, the force when attaching the auxiliary adapter 10 to the microscope illumination device 100 is relatively large. Even if set, it can be easily mounted. Specifically, the outer O-ring 11 may be made of, for example, silicon rubber, and the inner O-ring 12 may be made of, for example, -tolyl rubber.
[0046] また、顕微鏡には、上記図 5で示したような、接眼レンズ保持筒 21が双眼のタイプと 、当該双眼にカ卩えて、デジタルカメラや CCDカメラを装着するための Cマウント部を 有するタイプがある。当該 Cマウント部の内径は上記接眼レンズ保持筒 21の 2つの規 格の内径とは異なるため、上記顕微鏡用照明装置 100は、そのままでは Cマウント部 に装着することはできない。そこで、本実施形態においては、 Cマウント部に顕微鏡 用照明装置 100を装着するための Cマウントアダプタを用意する。  In addition, the microscope has a binocular type eyepiece holding cylinder 21 as shown in FIG. 5 above, and a C mount portion for mounting a digital camera or a CCD camera on the binocular. There are types to have. Since the inner diameter of the C mount portion is different from the inner diameters of the two standards of the eyepiece lens holding cylinder 21, the microscope illumination device 100 cannot be mounted on the C mount portion as it is. Therefore, in this embodiment, a C mount adapter for mounting the microscope illumination device 100 on the C mount portion is prepared.
[0047] 図 8は、当該 Cマウントアダプタ 13を示した図である。同図(a)が正面図、同図(b) 力 S (a)の断面図である。また図 9は、当該 Cマウントアダプタ 13が顕微鏡用照明装置 100に装着された場合の断面図である。  FIG. 8 is a view showing the C mount adapter 13. The figure (a) is a front view, and the figure (b) sectional view of force S (a). FIG. 9 is a cross-sectional view when the C-mount adapter 13 is attached to the microscope illumination device 100.
[0048] 両図に示すように、 Cマウントアダプタ 13は筒状の形状を有しており、その下端 14 には、顕微鏡の Cマウント部等に係合、つまり螺着するためのネジ部 15が設けられて いる。また、上端 16には、顕微鏡用照明装置 100の装着部 lcの下端 lc-bが挿入さ れて所定の位置で係止する挿入部 17が設けられて 、る。この挿入部 17に上記補助 アダプタ 10を介して顕微鏡用照明装置 100の装着部 lcが挿入されて所定の位置で 係止した状態で、顕微鏡用照明装置 100に装着されたデジタルカメラや CCDカメラ の特定の位置に顕微鏡の Cマウント部を介して像を結像させる光路長の光路 18が C マウントアダプタ 13の内部に設けられている。なお、上端 16の揷入部 17の外周には 、挿入部 17に挿入された顕微鏡用照明装置 100を固定するためのネジ 20が螺着さ れるネジ穴 19が設けられて!/、る。 [0048] As shown in both figures, the C mount adapter 13 has a cylindrical shape, and a lower end 14 has a screw portion 15 for engaging with, for example, screwing, the C mount portion of the microscope. Is provided. In addition, the upper end 16 is provided with an insertion portion 17 into which the lower end lc-b of the mounting portion lc of the microscope illumination device 100 is inserted and locked at a predetermined position. The mounting portion lc of the microscope illumination device 100 is inserted into the insertion portion 17 via the auxiliary adapter 10 and locked at a predetermined position, and the digital camera or CCD camera mounted on the microscope illumination device 100 is locked. An optical path 18 having an optical path length that forms an image at a specific position via the C mount portion of the microscope is provided inside the C mount adapter 13. In addition, on the outer periphery of the insertion part 17 of the upper end 16 A screw hole 19 into which a screw 20 for fixing the microscope illumination device 100 inserted into the insertion portion 17 is screwed is provided.
[0049] なお、デジタルカメラ等を用いて撮影を行なう場合には、上記偏光板蓋 8や 9のよう なアナライザーの役割を果たす偏光板が必要になる。そこで、本実施形態において は、デジタルカメラに図 10に示すような光学アダプタ 40を装着して、当該光学ァダプ タ 40の下端にデジタルカメラ偏光板 31を装着するようにする。当該光学アダプタ 40 は顕微鏡用照明装置 100と同様の段付円筒形状であり、下端を内径 φ 23. 2の接眼 レンズ保持筒に挿入したり、補助アダプタ 10を介して内径 φ 30の接眼レンズ保持筒 に挿入したり、あるいは Cマウントアダプタ 13を介して Cマウント部に装着することが可 會な構造となっている。 [0049] When taking a picture using a digital camera or the like, a polarizing plate serving as an analyzer such as the polarizing plate lid 8 or 9 is required. Therefore, in this embodiment, an optical adapter 40 as shown in FIG. 10 is attached to the digital camera, and the digital camera polarizing plate 31 is attached to the lower end of the optical adapter 40. The optical adapter 40 has a stepped cylindrical shape similar to the microscope illumination device 100, and the lower end is inserted into an eyepiece holding tube having an inner diameter of φ23.2, or an eyepiece having an inner diameter of φ30 is held through the auxiliary adapter 10. It can be inserted into a cylinder or attached to the C mount via the C mount adapter 13.
[0050] 以上のように、本実施形態においては、顕微鏡用照明装置 100が 2つの規格の接 眼レンズ保持筒及び Cマウント部に装着可能であり、偏光板蓋 8及び 9も各規格の接 眼レンズ保持筒に装着可能であるため、試料 23を観察する際には様々な組み合わ せが考えられる。以下、上記顕微鏡用照明装置 100、偏光板蓋 8及びデジタルカメラ 30を接眼レンズ保持筒 21や Cマウント部に装着して観察する際の方法及びその際 に LED光源装置 4から照射される照明光の光路について説明する。  [0050] As described above, in the present embodiment, the microscope illumination device 100 can be attached to two standard eyepiece holding cylinders and the C mount unit, and the polarizing plate lids 8 and 9 are also connected to each standard. Since it can be attached to the eye lens holder, various combinations are possible when observing the sample 23. Hereinafter, a method for observing the microscope illumination device 100, the polarizing plate lid 8, and the digital camera 30 attached to the eyepiece holding tube 21 or the C mount unit, and the illumination light emitted from the LED light source device 4 at that time The optical path will be described.
[0051] 図 11は、一方の接眼レンズ保持筒 21aに顕微鏡用照明装置 100を挿入し、他方の 接眼レンズ保持筒 2 lbに偏光板蓋 8を装着し、 Cマウント部 24にデジタルカメラ 30を 装着した場合を示している。図 12は、この場合の光路を示した図である。両図に示す ように、 LED光源装置 4から出射した照明光は顕微鏡用照明装置 100内の内蔵偏 光板 2により偏光され、鋭敏色板 5a及び集光レンズ 6を通って一方の接眼レンズ保持 筒 21aの接眼レンズ 26aを通過し、顕微鏡 200内のプリズム 25を通って対物レンズ 2 2へ達し、試料 23に垂直方向から照射される。試料 23に反射した反射光は、上記対 物レンズ 22及びプリズム 25を通り、 2方向に分かれる。一方の反射光は、接眼レンズ 保持筒 21bの接眼レンズ 26bから出射し、偏光板蓋 8を通って観察される。他方の反 射光は、 Cマウント部 24に装着されたデジタルカメラ 30のデジタルカメラ偏光板 31へ 導かれ、デジタルカメラ 30の図示しな 、表示部等で観察される。  [0051] FIG. 11 shows that the microscope illumination device 100 is inserted into one eyepiece holding cylinder 21a, the polarizing plate lid 8 is attached to 2 lb of the other eyepiece holding cylinder, and the digital camera 30 is attached to the C mount 24. The case where it mounts is shown. FIG. 12 shows the optical path in this case. As shown in both figures, the illumination light emitted from the LED light source device 4 is polarized by the built-in polarization plate 2 in the microscope illumination device 100, passes through the sensitive color plate 5a and the condenser lens 6, and holds one eyepiece. It passes through the eyepiece 26a of 21a, passes through the prism 25 in the microscope 200, reaches the objective lens 22 and irradiates the sample 23 from the vertical direction. The reflected light reflected from the sample 23 passes through the object lens 22 and the prism 25 and is divided into two directions. One reflected light is emitted from the eyepiece lens 26b of the eyepiece holding cylinder 21b and observed through the polarizing plate lid 8. The other reflected light is guided to the digital camera polarizing plate 31 of the digital camera 30 mounted on the C mount unit 24, and is observed on the display unit or the like (not shown) of the digital camera 30.
[0052] 図 13は、双方の接眼レンズ保持筒 21に偏光板蓋 8を装着し、 Cマウント部に顕微 鏡用照明装置 100を装着した場合を示している。図 14は、この場合の光路を示した 図である。両図に示すように、 Cマウント部 24の LED光源装置 4から出射した照明光 は顕微鏡用照明装置 100内の内蔵偏光板 2、鋭敏色板 5a及び集光レンズ 6を通つ て顕微鏡 200内のプリズム 25を通り、対物レンズ 22を介して試料 23に垂直方向から 照射される。試料 23の反射光は、上記対物レンズ 22及びプリズム 25を通って各接 眼レンズ保持筒へ分かれて、各接眼レンズ 26a及び 26bを介して各偏光板 8aへ導か れて観察される。 [0052] FIG. 13 shows that both eyepiece holding cylinders 21 are fitted with polarizing plate lids 8 and microscopically mounted on the C mount. The case where the mirror illumination device 100 is attached is shown. FIG. 14 shows the optical path in this case. As shown in both figures, the illumination light emitted from the LED light source device 4 of the C mount 24 passes through the built-in polarizing plate 2, the sensitive color plate 5a and the condenser lens 6 in the microscope illumination device 100, and enters the microscope 200. The sample 23 is irradiated through the prism 25 through the objective lens 22 from the vertical direction. The reflected light of the sample 23 passes through the objective lens 22 and the prism 25 and is divided into the eyepiece holding cylinders, and is guided to the polarizing plates 8a through the eyepieces 26a and 26b.
[0053] なお、図示しないが、上記の場合以外にも、例えば一方の接眼レンズ保持筒 21aに デジタルカメラ 30を装着し、他方の接眼レンズ保持筒 21bに偏光板蓋 8を装着し、 C マウント部に顕微鏡用照明装置 100を装着する場合等、様々なパターンが考えられ 、また、接眼レンズ保持筒の φ 23. 2と φ 30の 2つの規格に対応して、補助アダプタ 10や、内径 φ 30の接眼レンズ保持筒に装着可能な偏光板蓋 9を適宜装着して観察 することも可會である。  [0053] Although not shown, in addition to the above case, for example, the digital camera 30 is attached to one eyepiece holding cylinder 21a, the polarizing plate lid 8 is attached to the other eyepiece holding cylinder 21b, and the C mount Various patterns can be considered, such as when the microscope illumination device 100 is attached to the head, and the auxiliary adapter 10 and the inner diameter φ are compatible with the two standards of φ 23.2 and φ 30 It is also possible to observe by appropriately attaching a polarizing plate lid 9 that can be attached to 30 eyepiece holding cylinders.
[0054] 次に、本実施形態における顕微鏡用照明システムを用いた場合の効果について説 明する。図 15は、本顕微鏡用照明システムを用いて、生物顕微鏡において、試料 23 として半導体基板を用いて観察を行なった場合の観察像を示した図である。同図に 示すように、本システムを用いることで、従来の生物顕微鏡においては撮影ができな かった半導体基板の撮影に成功した。すなわち、本実施形態における顕微鏡用照 明装置 100によって半導体基板の垂直方向から同軸落射照明を当て、かつ、ポララ ィザ一としての内蔵偏光板 2及びアナライザーとしての偏光板蓋 8を用いることで、フ レアやゴーストの無 ヽ、鮮明な半導体基板の画像を得ることができた。  [0054] Next, effects of using the microscope illumination system according to the present embodiment will be described. FIG. 15 is a view showing an observation image when observation is performed using a semiconductor substrate as a sample 23 in a biological microscope using the illumination system for a microscope. As shown in the figure, using this system, we succeeded in photographing a semiconductor substrate that could not be photographed with a conventional biological microscope. That is, by applying coaxial epi-illumination from the vertical direction of the semiconductor substrate by the microscope illumination device 100 in the present embodiment, and using the built-in polarizing plate 2 as a polarizer and the polarizing plate lid 8 as an analyzer, We were able to obtain a clear image of the semiconductor substrate, free of flares and ghosts.
[0055] また、 2枚の偏光板を用いて偏光観察を行ない、各偏光板を回転させて偏光角度 を変更することで、同図(a)— (c)に示すような色のコントラストの変化をもたらし、例 えば半導体基板の凹凸や傷等をより鮮明に観察することができるようになった。  [0055] In addition, polarization observation is performed using two polarizing plates, and the polarization angle is changed by rotating each polarizing plate, so that the color contrast as shown in FIGS. For example, the semiconductor substrate can be observed more clearly, such as irregularities and scratches.
[0056] 図 16は、上記鋭敏色板切替板 5により鋭敏色板を 5a通して観察した場合(同図(a) )と通さないで観察した場合(同図 (b) )の観察像を示した図である。同図に示すよう に、本実施形態においては、鋭敏色板 5aを設けたことで、色の変化が顕著になり、よ り詳細な観察を行なうことができた。また鋭敏色板 5aを切り替え可能としたことで、試 料によっては色の変化により逆に観察がしにくくなるような場合等にも対応可能とした [0056] FIG. 16 shows an observation image when the sharp color plate is observed through the sensitive color plate switching plate 5 through 5a (FIG. (A)) and when not observed (FIG. (B)). FIG. As shown in the figure, in the present embodiment, by providing the sensitive color plate 5a, the color change becomes remarkable, and more detailed observation can be performed. In addition, by making it possible to switch the sensitive color plate 5a, Depending on the material, it is possible to cope with cases where observation is difficult due to color changes.
[0057] 以上説明したように、本実施形態によれば、同軸落射照明観察が行なうことができ ながら、従来の同軸落射照明装置よりも安価かつコンパクトで、汎用性にも優れた顕 微鏡用照明システムを提供することができる。 As described above, according to this embodiment, the coaxial epi-illumination observation can be performed, but it is cheaper and more compact than the conventional coaxial epi-illumination device, and is excellent in versatility. An illumination system can be provided.
[0058] (第 2実施形態) [0058] (Second Embodiment)
次に、本発明の第 2の実施形態について説明する。本実施形態において上記第 1 実施形態と同一の構成となる部分については同一の符号を付し、説明を省略または 簡略化する。  Next, a second embodiment of the present invention will be described. In the present embodiment, parts having the same configurations as those of the first embodiment are denoted by the same reference numerals, and description thereof is omitted or simplified.
[0059] 本実施形態においては、上記第 1実施形態においてボラライザ一として機能した内 蔵偏光板 2と、アナライザ一として機能した偏光板 8aをそれぞれ励起フィルタと吸収 フィルタに置き換えることで、簡易蛍光観察を可能とする。なお、この場合の光源には 例えば水銀ランプを用いる。  [0059] In the present embodiment, simple fluorescence observation is performed by replacing the internal polarizing plate 2 functioning as a polarizer and the polarizing plate 8a functioning as an analyzer in the first embodiment with an excitation filter and an absorption filter, respectively. Is possible. In this case, for example, a mercury lamp is used as the light source.
[0060] 図 17は、この場合の光路を示した図である。同図に示すように、水銀ランプ 53から 出射した照明光は、励起フィルタ 51により短波長域の光のみ選択的に透過され、鋭 敏色板 5a及び集光レンズ 6を通って一方の接眼レンズ保持筒 21aの接眼レンズ 26a を通過し、顕微鏡内のプリズム 25及び対物レンズ 22を介して試料 23に照射される。 その反射光は、対物レンズ 22及びプリズム 25を介して他方の接眼レンズ 26bから吸 収フィルタ 52へ達し、当該吸収フィルタ 52により、反射光のうち蛍光のみが透過され 、観察される。  FIG. 17 is a diagram showing an optical path in this case. As shown in the figure, the illumination light emitted from the mercury lamp 53 is selectively transmitted by the excitation filter 51 only in the short wavelength region, passes through the sensitive color plate 5a and the condenser lens 6, and is one eyepiece. The sample 23 passes through the eyepiece 26a of the holding cylinder 21a and is irradiated onto the sample 23 through the prism 25 and the objective lens 22 in the microscope. The reflected light reaches the absorption filter 52 from the other eyepiece lens 26b via the objective lens 22 and the prism 25, and only the fluorescence of the reflected light is transmitted through the absorption filter 52 and observed.
[0061] このように、上記 2枚の偏光板をそれぞれ励起フィルタ 51及び吸収フィルタ 52に置 き換えるだけで、簡易的な蛍光観察が可能となる。  As described above, simple fluorescence observation is possible only by replacing the two polarizing plates with the excitation filter 51 and the absorption filter 52, respectively.
[0062] なお、本発明は、上述の実施形態にのみ限定されるものではなぐ本発明の要旨を 逸脱しな 、範囲内にお 、て種々変更をカ卩ぇ得ることは勿論である。 [0062] It should be noted that the present invention is not limited to the above-described embodiments, and various changes can be made without departing from the scope of the present invention.
[0063] 上述の実施形態においては、光源装置に LEDを用いていたが、顕微鏡用照明装 置 100の本体 1に一体的に設けることが可能であれば、その他にもハロゲンランプや タングステンランプ等を用いてもよ 、。 [0063] In the above-described embodiment, the LED is used for the light source device. However, as long as it can be provided integrally with the main body 1 of the microscope illumination device 100, a halogen lamp, a tungsten lamp, etc. You can use.
[0064] 上述の第 2実施形態においては、第 1実施形態における内蔵偏光板 2を励起フィル タ 51に、また偏光板蓋 8を吸収フィルタ 52に置き換えていた力 2枚の偏光板はその まま残して、更に顕微鏡用照明装置 100に励起フィルタを設け、偏光板蓋 8に吸収フ ィルタを設けるようにしても構わな 、。 [0064] In the second embodiment described above, the built-in polarizing plate 2 in the first embodiment is used as the excitation film. The force that had replaced the polarizing plate lid 8 with the absorption filter 52 was left as it was, and an excitation filter was provided on the microscope illumination device 100, and an absorption filter was placed on the polarizing plate lid 8. It ’s okay to have it.
[0065] また、光源にレーザーを配置することにより、顕微鏡用照明装置 100をレーザー顕 微鏡用の光源としても採用することができる。また、同様にレーザーリペア装置の光 源としても用いることができる。更に、顕微鏡用オートフォーカスの光源側としても採 用することも可能である。 In addition, by arranging a laser as a light source, the microscope illumination device 100 can be employed as a light source for a laser microscope. Similarly, it can be used as a light source of a laser repair device. Furthermore, it can also be used as the light source side of a microscope autofocus.
図面の簡単な説明  Brief Description of Drawings
[0066] [図 1]第 1実施形態における顕微鏡用照明装置 100の外観を示す図である。 FIG. 1 is a diagram showing an appearance of a microscope illumination apparatus 100 according to a first embodiment.
[図 2]顕微鏡用照明装置 100の断面図である。  FIG. 2 is a cross-sectional view of a microscope illumination apparatus 100.
[図 3]鋭敏色板切替板 5の断面図及び上面図である。  FIG. 3 is a cross-sectional view and a top view of a sensitive color plate switching plate 5.
[図 4]偏光板蓋 8を示した図である。  FIG. 4 is a view showing a polarizing plate lid 8.
[図 5]顕微鏡用照明装置 100及び偏光板蓋 8を顕微鏡 200の接眼レンズ保持筒に装 着した場合の様子を示した図である。  FIG. 5 is a view showing a state where the microscope illumination device 100 and the polarizing plate lid 8 are attached to the eyepiece holding cylinder of the microscope 200.
[図 6]補助アダプタ 10を示した図である。  FIG. 6 is a view showing an auxiliary adapter 10.
[図 7]補助アダプタ 10が顕微鏡用照明装置 100に装着された場合の断面図である。  FIG. 7 is a cross-sectional view when the auxiliary adapter 10 is attached to the microscope illumination device 100.
[図 8]Cマウントアダプタ 13を示した図である。  FIG. 8 is a view showing a C mount adapter 13.
[図 9]Cマウントアダプタ 13が顕微鏡用照明装置 100に装着された場合の断面図で ある。  FIG. 9 is a cross-sectional view when the C mount adapter 13 is attached to the microscope illumination device 100.
[図 10]デジタルカメラ偏光板 31が装着された光学アダプタ 40を示した図である。  FIG. 10 is a view showing an optical adapter 40 to which a digital camera polarizing plate 31 is attached.
[図 11]顕微鏡用照明装置 100や偏光板蓋 8の装着方法の一例を示した図である。  FIG. 11 is a view showing an example of a method of attaching the microscope illumination device 100 and the polarizing plate lid 8.
[図 12]図 10の場合の光路を示した図である。  12 is a diagram showing an optical path in the case of FIG.
[図 13]顕微鏡用照明装置 100や偏光板蓋 8の装着方法の別の一例を示した図であ る。  FIG. 13 is a view showing another example of how to attach the microscope illumination device 100 and the polarizing plate lid 8.
[図 14]図 13の場合の光路を示した図である。  FIG. 14 is a diagram showing an optical path in the case of FIG.
[図 15]本顕微鏡用照明システムを用いて、生物顕微鏡において、試料 23として半導 体基板を用いて観察を行なった場合の観察像を示した図である。  FIG. 15 is a diagram showing an observation image when observation is performed using a semiconductor substrate as a sample 23 in a biological microscope using the illumination system for a microscope.
[図 16]鋭敏色板切替板 5により鋭敏色板を 5a通して観察した場合と通さないで観察 した場合の観察像を示した図である。 [Fig.16] Observation with sensitive color plate switching plate 5 with and without sensitive color plate observed through 5a It is the figure which showed the observation image in the case of doing.
[図 17]本発明の他の実施形態において蛍光観察を行なう場合の光路を示した図で ある。  FIG. 17 is a view showing an optical path when fluorescence observation is performed in another embodiment of the present invention.
符号の説明 Explanation of symbols
1·· '本体  1 '
lc- …装着部  lc-… Mounting part
2·· -内蔵偏光板  2 ... Built-in polarizing plate
3·· '偏光板回転ハンドル  3 · 'Polarizing plate rotation handle
4·· •LED光源装置  4. LED light source device
5··信色板切替板  5 · Light color plate switching plate
5a- ··鋭敏色板  5a- ··· Sensitive color board
6·· -集光レンズ  6 ... Condenser lens
7·· -光路  7 ··-Light path
8、 9…偏光板蓋  8, 9 ... Polarizing plate lid
8a- ··偏光板  8a- ··· Polarizing plate
10· '··ネ ΐ助アダプタ  10 ···· Assist adapter
21· ··接眼レンズ保持筒  21 ···· Eyepiece holding tube
22- …対物レンズ  22-… Objective lens
23- 料  23- Fee
24· ••Cマウント部  24 •• C mount
30· ··デジタノレカメラ  30 ···· Digital Nore Camera
31· "デジタルカメラ偏光板  31 · "Digital Camera Polarizer
40· ··光学アダプタ  40 ··· Optical adapter
51· ··励起フィルタ  51..Excitation filter
52· ··吸収フィルタ  52 ··· Absorption filter
53· ··水銀ランプ  53 ··· Mercury lamp

Claims

請求の範囲 The scope of the claims
[1] 接眼レンズを有し試料の拡大像を得るための光学系と、前記接眼レンズを保持し第 1の径でなる双眼の第 1の接眼レンズ保持筒とを少なくとも有する顕微鏡に用いられ る照明装置であって、  [1] Used in a microscope having at least an optical system having an eyepiece and obtaining a magnified image of a sample, and a binocular first eyepiece holding cylinder holding the eyepiece and having a first diameter. A lighting device,
前記各第 1の接眼レンズ保持筒に装着可能な装着部を一端に有する筒体と、 前記筒体の他端に一体的に設けられ、前記光学系を介して前記試料へ光を照射 するための光源と  A cylindrical body having an attachment portion that can be attached to each first eyepiece lens holding cylinder at one end and an other end of the cylindrical body that are integrally provided to irradiate the sample with light through the optical system With the light source
を具備することを特徴とする顕微鏡用照明装置。  A microscope illumination device comprising:
[2] 請求項 1に記載の顕微鏡用照明装置であって、  [2] The illumination device for a microscope according to claim 1,
前記筒体内に設けられ、前記光源からの光を集光する集光レンズを更に具備する ことを特徴とする顕微鏡用照明装置。  An illumination device for a microscope, further comprising a condensing lens that is provided in the cylindrical body and condenses light from the light source.
[3] 請求項 1に記載の顕微鏡用照明装置であって、 [3] The microscope illumination device according to claim 1,
前記顕微鏡は前記第 1の径よりも大きい第 2の径を有する双眼の第 2の接眼レンズ 保持筒を有し、  The microscope has a binocular second eyepiece holding cylinder having a second diameter larger than the first diameter,
該顕微鏡用照明装置は、  The illumination device for a microscope is
前記各第 2の接眼レンズ保持筒に装着可能であり、かつ、前記装着部に着脱可能 な第 1のアダプタを更に具備することを特徴とする顕微鏡用照明装置。  An illumination device for a microscope, further comprising a first adapter that can be attached to each of the second eyepiece holding cylinders and that can be attached to and detached from the attachment portion.
[4] 請求項 3に記載の顕微鏡用照明装置であって、 [4] The microscope illumination device according to claim 3,
前記顕微鏡は Cマウント部を有し、  The microscope has a C-mount part,
該顕微鏡用照明装置は、  The illumination device for a microscope is
前記 Cマウント部に装着可能であり、前記装着部に前記第 1のアダプタが装着され た状態で、前記第 1のアダプタを介して前記筒体に着脱可能な第 2のアダプタを更に 具備することを特徴とする顕微鏡用照明装置。  A second adapter that can be attached to the C-mount portion, and that can be attached to and detached from the cylindrical body via the first adapter in a state where the first adapter is attached to the attachment portion; A microscope illumination device characterized by the above.
[5] 接眼レンズを有し試料の拡大像を得るための光学系と、前記接眼レンズを保持する 双眼の接眼レンズ保持筒と、 Cマウント部とを有する顕微鏡に用いられる照明装置で あって、 [5] An illumination device used for a microscope having an eyepiece and an optical system for obtaining an enlarged image of a sample, a binocular eyepiece holding cylinder holding the eyepiece, and a C mount portion,
前記各接眼レンズ保持筒に装着可能な装着部を一端に有する筒体と、 前記筒体の他端に一体的に設けられ、前記光学系を介して前記試料へ光を照射 するための光源と、 A cylindrical body having an attachment portion that can be attached to each eyepiece lens holding cylinder at one end, and an integral part at the other end of the cylindrical body, and irradiating the sample with light through the optical system A light source for
前記 Cマウント部に装着可能であり、かつ、前記筒体に着脱可能な Cマウントァダプ タと  A C-mount adapter that can be attached to the C-mount portion and detachable from the cylinder;
を具備することを特徴とする顕微鏡用照明装置。  A microscope illumination device comprising:
[6] 請求項 5に記載の顕微鏡用照明装置であって、  [6] The illumination device for a microscope according to claim 5,
前記筒体内に設けられ、前記光源からの光を集光する集光レンズを更に具備する ことを特徴とする顕微鏡用照明装置。  An illumination device for a microscope, further comprising a condensing lens that is provided in the cylindrical body and condenses light from the light source.
[7] 接眼レンズを有し試料の拡大像を得るための光学系と、前記接眼レンズを保持し第 1の径でなる双眼の第 1の接眼レンズ保持筒とを少なくとも有する顕微鏡に用いられ る照明システムであって、 [7] Used in a microscope having at least an eyepiece lens and an optical system for obtaining an enlarged image of a sample, and a binocular first eyepiece holding cylinder holding the eyepiece and having a first diameter. A lighting system,
前記各第 1の接眼レンズ保持筒に装着可能な装着部を一端に有する筒体と、前記 筒体の他端に一体的に設けられ、前記光学系を介して前記試料へ光を照射するた めの光源と、前記筒体内に設けられ、前記光源から出射する光を偏光させる第 1の 偏光板とを有する顕微鏡用照明装置と、  A cylindrical body having an attachment portion that can be attached to each first eyepiece holding cylinder at one end, and the other end of the cylindrical body are provided integrally, and the sample is irradiated with light through the optical system. An illumination device for a microscope having a light source for light and a first polarizing plate provided in the cylinder and polarizing light emitted from the light source;
前記各第 1の接眼レンズ保持筒に着脱可能であり、前記筒体が前記一方の第 1の 接眼レンズ保持筒に装着された場合に、前記他方の第 1の接眼レンズ保持筒の接眼 レンズから出射する前記試料力 の反射光を偏光させる第 2の偏光板と  When the cylindrical body is attached to the first eyepiece holding cylinder, the eyepiece of the other first eyepiece holding cylinder can be attached to and detached from each first eyepiece holding cylinder. A second polarizing plate that polarizes the reflected light of the sample force that exits;
を具備することを特徴とする顕微鏡用照明システム。  A microscope illumination system comprising:
[8] 請求項 7に記載の顕微鏡照明システムであって、 [8] The microscope illumination system according to claim 7,
前記筒体内に設けられ、前記光源からの光を集光する集光レンズを更に具備する ことを特徴とする顕微鏡照明システム。  A microscope illumination system, further comprising a condenser lens that is provided in the cylinder and collects light from the light source.
[9] 請求項 7に記載の顕微鏡用照明システムであって、 [9] The illumination system for a microscope according to claim 7,
前記顕微鏡は前記第 1の径よりも大きい第 2の径を有する第 2の接眼レンズ保持筒 を有し、  The microscope has a second eyepiece holding cylinder having a second diameter larger than the first diameter,
該顕微鏡用照明システムは、  The microscope illumination system comprises:
前記各第 2の接眼レンズ保持筒に装着可能であり、かつ、前記装着部に着脱可能 な第 1のアダプタと、  A first adapter that can be attached to each second eyepiece holding cylinder and detachable from the attachment portion;
前記各第 2の接眼レンズ保持筒に着脱可能であり、前記筒体に前記第 1のアダプタ が装着された状態で該筒体が前記一方の第 2の接眼レンズ保持筒に装着された場 合に、前記他方の第 2の接眼レンズ保持筒の接眼レンズから出射する前記試料から の反射光を偏光させる第 3の偏光板と Removably attached to each second eyepiece holding cylinder, and the first adapter is attached to the cylinder. When the cylindrical body is mounted on the one second eyepiece holding cylinder with the lens mounted, the reflected light from the sample that is emitted from the eyepiece of the other second eyepiece holding cylinder A third polarizing plate to polarize
を更に具備することを特徴とする顕微鏡用照明システム。  An illumination system for a microscope, further comprising:
[10] 請求項 9に記載の顕微鏡用照明システムであって、 [10] The illumination system for a microscope according to claim 9,
前記各第 1の接眼レンズ保持筒に装着可能な撮像装置に着脱可能であり、前記筒 体が前記一方の第 1の接眼レンズ保持筒に装着され前記撮像装置が前記他方の第 1の接眼レンズ保持筒に装着された場合に、該他方の第 1の接眼レンズ保持筒から 出射する前記試料からの反射光を偏光させる第 4の偏光板を更に具備することを特 徴とする顕微鏡用照明システム。  The imaging device can be attached to and detached from each first eyepiece holding cylinder, the cylinder is attached to the first eyepiece holding cylinder, and the imaging device is the other first eyepiece. A microscope illumination system, further comprising a fourth polarizing plate that polarizes the reflected light from the sample emitted from the other first eyepiece lens holding tube when mounted on the holding tube. .
[11] 請求項 9に記載の顕微鏡用照明システムであって、 [11] The microscope illumination system according to claim 9,
前記各第 2の接眼レンズ保持筒に装着可能な撮像装置に着脱可能であり、前記筒 体が前記一方の第 2の接眼レンズ保持筒に装着され前記撮像装置が前記他方の第 2の接眼レンズ保持筒に装着された場合に、該他方の第 2の接眼レンズ保持筒から 出射する前記試料からの反射光を偏光させる第 4の偏光板を更に具備することを特 徴とする顕微鏡用照明システム。  It is detachable from an imaging device that can be attached to each second eyepiece holding cylinder, the cylinder is attached to the one second eyepiece holding cylinder, and the imaging device is the other second eyepiece. A microscope illumination system, further comprising a fourth polarizing plate that polarizes reflected light from the sample emitted from the other second eyepiece lens holding tube when mounted on the holding tube. .
[12] 請求項 9に記載の顕微鏡用照明システムであって、 [12] The illumination system for a microscope according to claim 9,
前記顕微鏡は Cマウント部を有し、  The microscope has a C-mount part,
該顕微鏡用照明システムは、  The microscope illumination system comprises:
前記 Cマウント部に装着可能であり、前記少なくとも一方の第 1の接眼レンズ保持筒 に前記第 2の偏光板が装着された場合、または、前記少なくとも一方の第 2の接眼レ ンズ部に前記第 3の偏光板が装着された場合に、前記装着部に前記第 1のアダプタ が装着された状態で、前記第 1のアダプタを介して前記筒体に着脱可能な第 2のァ ダプタを更に具備することを特徴とする顕微鏡用照明システム。  When the second polarizing plate is mounted on the at least one first eyepiece holding cylinder, or when the second polarizing plate is mounted on the at least one second eyepiece lens portion. When the third polarizing plate is mounted, the second adapter further includes a second adapter that can be attached to and detached from the cylindrical body via the first adapter in a state where the first adapter is mounted on the mounting portion. The illumination system for microscopes characterized by doing.
[13] 請求項 7に記載の顕微鏡用照明システムであって、 [13] The microscope illumination system according to claim 7,
前記筒体内に設けられ、前記第 1の偏光板を回転させることで該第 1の偏光板の偏 光角度を変更するための第 1の回転機構を更に具備することを特徴とする顕微鏡用 照明システム。 A microscope illumination, further comprising a first rotation mechanism provided in the cylindrical body and configured to change a polarization angle of the first polarizing plate by rotating the first polarizing plate. system.
[14] 請求項 7に記載の顕微鏡用照明システムであって、 [14] The microscope illumination system according to claim 7,
前記第 2の偏光板を回転させることで該第 2の偏光板の偏光角度を変更するため の第 2の回転機構を更に具備することを特徴とする顕微鏡用照明システム。  An illumination system for a microscope, further comprising a second rotation mechanism for changing a polarization angle of the second polarizing plate by rotating the second polarizing plate.
[15] 請求項 9に記載の顕微鏡用照明システムであって、 [15] The microscope illumination system according to claim 9,
前記第 3の偏光板を回転させることで該第 3の偏光板の偏光角度を変更するため の第 2の回転機構を更に具備することを特徴とする顕微鏡用照明システム。  An illumination system for a microscope, further comprising a second rotation mechanism for changing the polarization angle of the third polarizing plate by rotating the third polarizing plate.
[16] 請求項 10または請求項 11に記載の顕微鏡用照明システムであって、 [16] The illumination system for a microscope according to claim 10 or claim 11,
前記第 4の偏光板を回転させることで該第 4の偏光板の偏光角度を変更するため の第 2の回転機構を更に具備することを特徴とする顕微鏡用照明システム。  An illumination system for a microscope, further comprising a second rotation mechanism for changing a polarization angle of the fourth polarizing plate by rotating the fourth polarizing plate.
[17] 請求項 7に記載の顕微鏡用照明システムであって、 [17] The microscope illumination system according to claim 7,
前記筒体内であって前記第 1の偏光板と前記装着部との間に着脱可能に設けられ た鋭敏色板を更に具備することを特徴とする顕微鏡用照明システム。  An illumination system for a microscope, further comprising a sensitive color plate that is detachably provided in the cylinder and between the first polarizing plate and the mounting portion.
[18] 接眼レンズを有し試料の拡大像を得るための光学系と、前記接眼レンズを保持する 双眼の接眼レンズ保持筒と、 Cマウント部とを有する顕微鏡に用いられる照明システ ムであって、 [18] An illumination system for use in a microscope having an eyepiece and an optical system for obtaining a magnified image of a sample, a binocular eyepiece holding cylinder for holding the eyepiece, and a C mount portion. ,
前記各接眼レンズ保持筒に装着可能な装着部を一端に有する筒体と、前記筒体 の他端に一体的に設けられ、前記光学系を介して前記試料へ光を照射するための 光源と、前記筒体内に設けられ、前記光源力 出射する光を偏光させる第 1の偏光 板と、前記 Cマウント部に装着可能であり、かつ、前記筒体に着脱可能な Cマウントァ ダプタとを有する顕微鏡用照明装置と、  A cylindrical body having an attachment portion which can be attached to each eyepiece lens holding cylinder at one end; a light source which is integrally provided at the other end of the cylindrical body and irradiates light to the sample via the optical system; A microscope having a first polarizing plate provided in the cylindrical body for polarizing the light emitted from the light source force, and a C-mount adapter that can be attached to the C-mount unit and can be attached to and detached from the cylindrical body. A lighting device;
前記各接眼レンズ保持筒に着脱可能であり、前記筒体が前記 Cマウントアダプタを 介して前記 Cマウント部に装着された場合に、前記各接眼レンズ保持筒の各接眼レ ンズから出射する前記試料からの反射光を偏光させ、または、前記筒体が前記一方 の接眼レンズ保持筒に装着された場合に、前記他方の接眼レンズ保持筒の接眼レン ズ力 出射する前記試料力 の反射光を偏光させる第 2の偏光板と  The sample that can be attached to and detached from each eyepiece holding cylinder, and emits from each eyepiece lens of each eyepiece holding cylinder when the cylinder is attached to the C mount portion via the C mount adapter. The reflected light from the sample force that is emitted from the eyepiece lens force of the other eyepiece lens holding cylinder when the cylindrical body is attached to the one eyepiece lens holding cylinder is polarized. With a second polarizing plate
を具備することを特徴とする顕微鏡用照明システム。  A microscope illumination system comprising:
[19] 請求項 18に記載の顕微鏡用照明システムであって、 [19] The microscope illumination system according to claim 18,
前記筒体内に設けられ、前記光源からの光を集光する集光レンズを更に具備する ことを特徴とする顕微鏡照明システム。 A condensing lens is provided in the cylindrical body and condenses light from the light source. A microscope illumination system characterized by that.
接眼レンズを有し蛍光試料の拡大像を得るための光学系と、前記接眼レンズを保 持する双眼の接眼レンズ保持筒とを有する顕微鏡に用いられる照明システムであつ て、  An illumination system for use in a microscope having an eyepiece and an optical system for obtaining an enlarged image of a fluorescent sample, and a binocular eyepiece holding cylinder for holding the eyepiece.
前記一方の接眼レンズ保持筒に装着可能な装着部を一端に有する筒体と、前記 筒体の他端に一体的に設けられ、前記光学系を介して前記試料へ光を照射するた めの光源と、前記筒体内に設けられ、前記光源力 出射する光を選択的に透過させ る励起フィルタとを有する顕微鏡用照明装置と、  A cylindrical body having an attachment portion that can be attached to the one eyepiece lens holding cylinder at one end and an other end of the cylindrical body that are integrally provided, and for irradiating the sample with light through the optical system A microscope illumination device including a light source and an excitation filter that is provided in the cylinder and selectively transmits light emitted from the light source force;
前記他方の接眼レンズ保持筒に着脱可能であり、前記他方の接眼レンズ保持筒の 接眼レンズから出射する前記試料力 の反射光のうち蛍光を選択的に透過させる吸 収フィルタと  An absorption filter that is detachable from the other eyepiece lens holding tube and selectively transmits fluorescence among the reflected light of the sample force emitted from the eyepiece lens of the other eyepiece lens holding tube;
を具備することを特徴とする顕微鏡用照明システム。  A microscope illumination system comprising:
PCT/JP2004/019257 2004-12-22 2004-12-22 Lighting apparatus for microscope and lighting system for microscope WO2006067846A1 (en)

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KR20210081470A (en) * 2019-12-23 2021-07-02 주식회사 리암솔루션 Module for Collector lens
CN113433126A (en) * 2021-06-24 2021-09-24 褚崇胜 Rice pollen fertility microscopic examination instrument

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CN113433126B (en) * 2021-06-24 2024-03-08 褚崇胜 Rice pollen fertility microscopic examination instrument

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