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WO2005111260A1 - Procede et dispositif d'application d'une substance sur un substrat - Google Patents

Procede et dispositif d'application d'une substance sur un substrat Download PDF

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Publication number
WO2005111260A1
WO2005111260A1 PCT/NL2005/000375 NL2005000375W WO2005111260A1 WO 2005111260 A1 WO2005111260 A1 WO 2005111260A1 NL 2005000375 W NL2005000375 W NL 2005000375W WO 2005111260 A1 WO2005111260 A1 WO 2005111260A1
Authority
WO
WIPO (PCT)
Prior art keywords
active substance
wire
compound
substrate
electrodes
Prior art date
Application number
PCT/NL2005/000375
Other languages
English (en)
Inventor
Michael Adrianus Theodorus Hompus
Wilhelmus Godefridus Johannes Paulus Swinkels
Original Assignee
Otb Group B.V.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Otb Group B.V. filed Critical Otb Group B.V.
Publication of WO2005111260A1 publication Critical patent/WO2005111260A1/fr

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/26—Vacuum evaporation by resistance or inductive heating of the source
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00—Organic light-emitting devices
    • H10K50/10—OLEDs or polymer light-emitting diodes [PLED]
    • H10K50/17—Carrier injection layers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass

Definitions

  • the invention relates to a method and an apparatus for depositing a layer of an active substance on a substrate, wherein the active substance is chosen from the group of substances consisting of an alkali metal, an alkali earth metal, a lanthanide, or an alloy or intermetallic mixture of one or more of the said alkali metal, alkali earth metal or lanthanide elements.
  • Applying such layers is for instance carried out in the manufacture of OLEDs and the layers particularly serve to increase the life of the OLED and to reduce the work function of the cathode so that an efficient electron injection at lower voltages is obtained. More information about this is for instance described in American patent US-A-6,255,774 and the Journal of Applied Physics, Volume 88, Number 6, of September 15, 2000, pp.
  • the invention provides a method for depositing a layer of an active substance on a substrate, wherein the active substance is chosen from the group of substances consisting of an alkali metal, an alkali earth metal, a lanthanide, or an alloy or intermetallic mixture of one or more of the said alkali metal, alkali earth metal or lanthanide elements, which method is, according to the invention, characterized in that the active substance is bound in a compound which is stable at room temperature, wherein the compound is incorporated in a wire, which wire forms a connection between two electrodes, wherein, for releasing the active substance, a current is fed through the wire, so that it heats up to a temperature at which the compound decomposes and the active substance evaporates and then precipitates on the substrate.
  • the active substance is chosen from the group of substances consisting of an alkali metal, an alkali earth metal, a lanthanide, or an alloy or intermetallic mixture of one or more of the said alkali metal, alkali earth metal or
  • the term room temperature is to be understood in a relatively broad sense, in the sense that it is to be understood to mean temperatures at which the handling, transporting, mounting and other manipulating of the wire normally take place. This should be understood to involve temperatures of less than approx. 50 degrees Celsius, more particularly temperatures in the range of 10-30 degrees Celsius. Placing the active substance in a process chamber, the transport and similar actions are therefore no problem anymore. Because the active substance of the compound is incorporated in a wire, the compound can be heated and cool down very quickly by feeding a strong electric current through at least a part of the respective wire during a certain desired interval.
  • the compound will decompose and the active substance will evaporate.
  • the active substance released in a vapor state will then precipitate on the substrate on which the layer with the desired active substance is to be deposited. Due to the fact that the compound containing active substance is provided in the shape of a wire, the time interval during which the active substance is released can be controlled very accurately. In this manner, the thickness of the layer which is deposited on the substrate can thus be controlled very accurately. Due to the quick heating which can be realized with the wire, a relatively large amount of active substance can be released in a relatively short time.
  • the invention further provides a method for manufacturing an OLED by using the above-described method.
  • the active substance which is deposited on the substrate is a hole injection layer which is part of an OLED, wherein the method further comprises applying an anode, a light -emitting organic material and a cathode, wherein the light-emitting organic material is located between the anode and the cathode.
  • the active substance which is deposited on the substrate is applied immediately before or immediately after application of a cathode-forming layer.
  • the active substance is barium and if the compound is a barium aluminum compound.
  • the time interval during which the wire is excited by current can be made to depend on the desired layer thickness of the active substance. For instance, after a first substrate, the layer thickness obtained can be measured and then it can be determined whether the time interval of excitement of the wire with electric current for heating thereof which is used for that substrate has yielded the desired result. If the layer thickness is found to be too small, the time interval can be increased and/or the current intensity can be increased. If the layer thickness is found to be too large, the time interval can be shortened and/or the current intensity can be reduced.
  • the layer thickness of the active substance is measured during the application process, while the measurement data are used for determining the moment when the feeding of the current through the wire is stopped. With such a course of action, no substrate at all is lost in experimentation and the desired result is obtained immediately.
  • the wire can be provided by filling a casing from a carrier material, such as for instance steel, with the above-mentioned compound, while, in longitudinal direction, the casing is provided with at least one opening extending in longitudinal direction, through which the active substance can leave the casing during evaporation of this active substance.
  • the active substance will particularly be released in that direction defined by the opening.
  • the advantage thereof is that the substrate can be evaporated in any orientation.
  • active substance can be released in different directions.
  • the method can be used for manufacturing an OLED.
  • the invention further provides an apparatus for carrying out the method according to the invention, wherein the apparatus comprises a process chamber arranged for providing a conditioned environment therein, wherein, in the process chamber, two electrodes are provided between which a wire extends, which wire comprises a compound which is stable at room temperature of an active substance and at least one stabilizing substance, wherein the active substance is chosen from the group of substances consisting of an alkali metal, an alkali earth metal, a lanthanide, or an alloy or intermetallic mixture of one or more of the said alkali metal, alkali earth metal or lanthanide elements, wherein the electrodes are connectable with a power source.
  • the above-described method can be carried out and the associated advantages can be realized in a simple manner.
  • Fig. 1 shows a schematic cross-sectional view of an exemplary embodiment of an apparatus according to the invention
  • Fig. 2 shows a perspective view of a part of the wire.
  • Fig. 1 schematically shows a process chamber 1 in which a substrate 2 is present which is supported by a substrate carrier 3. The substrate is for instance a substrate for manufacturing an OLED. Further, in the process chamber, a wire 4 is present which extends between two electrodes 5, 6. The electrodes 5, 6 are connected to a power source 7 which is in connection with a control 8.
  • a feed reel 9 from which the wire 4 is fed and a take-up reel 10 on which the wire 4 is taken up are accommodated.
  • Fig. 2 shows the wire 4 in a perspective schematic view.
  • the wire 4 is provided with a casing 11 from steel which is bent in a cu -shaped configuration and is provided with an opening 12 extending in longitudinal direction.
  • the compound 13 containing active substance is present in the casing.
  • the wire may also be provided with openings oriented in different directions, so that it is possible to evaporate in multiple directions.
  • the compound 13 is formed by BaAl 4 ; the active substance is barium.
  • active substances are also possible; options to be considered are substances chosen from the group consisting of an alkali metal (Li, Na, K, Rb or Cs), an alkali earth metal (Mg, Ca, Sr or Ba), a lanthanide (Sm, Eu, Tb or Yb), or an alloy or intermetallic mixture of one or more of the said alkali metal, alkali earth metal or lanthanide elements (such as for instance Mg:Al, Mg:In, Mg:Ag, Al:Li, BaAl 4 or CaAl 2 ).
  • the wire 4 is heated as a result of a large amount of electric current being fed through it, the compound 13 will decompose and the active substance from the compound 13 will evaporate.
  • the apparatus is provided with the feed reel 9 and the take-up reel 10.
  • the take-up reel 10 is provided with a drive which is controllable with the aid of the control 8. By switching on the drive, a part of the wire 4 can be taken up on take-up reel 10, and further a new part of wire will automatically be fed from feed reel 9.
  • the drive of the take-up reel 10 can be switched on continuously, so that each time an new wire part containing compound is provided between the electrodes 5, 6.
  • Fig. 1 further shows a measuring provision 14 which is connected to the control 8 for measuring the thickness of the layer of the active substance which is applied to the substrate 2. With the aid of the data obtained by the measuring device 14, the control 8 can control the current intensity of the source 7 and/or the time interval during which the current is fed through the wire 4.
  • the measuring device can also be arranged outside the process chamber 1 and for instance carries out measurements of the substrate 2 through an inspection window. It will be clear that the invention is not limited to the exemplary embodiment described but that various modifications are possible within the framework of the invention as defined by the claims.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Electroluminescent Light Sources (AREA)

Abstract

L'invention concerne un procédé de dépôt d'une couche de substance active sur un substrat (2). La substance active est choisie dans le groupe de substances comprenant un métal alcalin, un métal alcalin terreux, un lanthanide, ou un alliage ou un mélange intermétallique d'un ou de plusieurs de ces éléments. Ce procédé est caractérisé en ce que la substance active est liée dans un composé stable à température ambiante. Ce composé est intégré dans un fil (4), lequel forme une connexion entre deux électrodes (5, 6). Pour libérer la substance active, un courant (7) est introduit dans le fil pour le chauffer jusqu'à la température à laquelle le composé se décompose et la substance active s'évapore puis se précipite sur le substrat. Par ailleurs, l'invention concerne un dispositif d'application de ce procédé.
PCT/NL2005/000375 2004-05-18 2005-05-18 Procede et dispositif d'application d'une substance sur un substrat WO2005111260A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
NL1026214 2004-05-18
NL1026214A NL1026214C2 (nl) 2004-05-18 2004-05-18 Werkwijze en inrichting voor opbrengen van een actieve stof op een substraat.

Publications (1)

Publication Number Publication Date
WO2005111260A1 true WO2005111260A1 (fr) 2005-11-24

Family

ID=34969138

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/NL2005/000375 WO2005111260A1 (fr) 2004-05-18 2005-05-18 Procede et dispositif d'application d'une substance sur un substrat

Country Status (2)

Country Link
NL (1) NL1026214C2 (fr)
WO (1) WO2005111260A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007105252A1 (fr) * 2006-03-13 2007-09-20 Saes Getters S.P.A. Utilisation de compositions à base de magnésium-cuivre pour l'évaporation du magnésium et de distributeurs de magnésium

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2930879A (en) * 1957-12-16 1960-03-29 New York Air Brake Co Vaporization of metals
FR1321132A (fr) * 1962-04-20 1963-03-15 Baird Atomic Four à haute température
GB1070406A (en) * 1964-06-16 1967-06-01 Mullard Ltd Improvements in or relating to methods of generating the vapour of an alkali metal
US3490965A (en) * 1967-04-13 1970-01-20 Webb James E Radiation resistant silicon semiconductor devices
US6255774B1 (en) * 1996-09-04 2001-07-03 Cambridge Display Technology, Ltd. Multilayer cathode for organic light-emitting device

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2930879A (en) * 1957-12-16 1960-03-29 New York Air Brake Co Vaporization of metals
FR1321132A (fr) * 1962-04-20 1963-03-15 Baird Atomic Four à haute température
GB1070406A (en) * 1964-06-16 1967-06-01 Mullard Ltd Improvements in or relating to methods of generating the vapour of an alkali metal
US3490965A (en) * 1967-04-13 1970-01-20 Webb James E Radiation resistant silicon semiconductor devices
US6255774B1 (en) * 1996-09-04 2001-07-03 Cambridge Display Technology, Ltd. Multilayer cathode for organic light-emitting device

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
QIU CHENGFENG ET AL: "Praseodymium oxide coated anode for organic light-emitting diode", APPLIED PHYSICS LETTERS, AMERICAN INSTITUTE OF PHYSICS. NEW YORK, US, vol. 80, no. 19, 13 May 2002 (2002-05-13), pages 3485 - 3487, XP012030814, ISSN: 0003-6951 *
ROMANO P ET AL: "A simple method for preparing superconducting high Tc thin films", IEEE TRANSACTIONS ON MAGNETICS USA, vol. 25, no. 2, 21 August 1988 (1988-08-21), pages 2481 - 2483, XP002310931, ISSN: 0018-9464 *

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007105252A1 (fr) * 2006-03-13 2007-09-20 Saes Getters S.P.A. Utilisation de compositions à base de magnésium-cuivre pour l'évaporation du magnésium et de distributeurs de magnésium
US8029597B2 (en) 2006-03-13 2011-10-04 Saes Getters S.P.A. Use of magnesium-copper compositions for the evaporation of magnesium and magnesium dispensers

Also Published As

Publication number Publication date
NL1026214C2 (nl) 2005-11-21

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