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WO2005026816A1 - Commutateur optique - Google Patents

Commutateur optique Download PDF

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Publication number
WO2005026816A1
WO2005026816A1 PCT/JP2004/009813 JP2004009813W WO2005026816A1 WO 2005026816 A1 WO2005026816 A1 WO 2005026816A1 JP 2004009813 W JP2004009813 W JP 2004009813W WO 2005026816 A1 WO2005026816 A1 WO 2005026816A1
Authority
WO
WIPO (PCT)
Prior art keywords
insertion hole
fiber
optical
fiber insertion
optical fiber
Prior art date
Application number
PCT/JP2004/009813
Other languages
English (en)
Japanese (ja)
Inventor
Kaneo Yaji
Yasushi Asaji
Masaya Tamura
Original Assignee
Murata Manufacturing Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co., Ltd. filed Critical Murata Manufacturing Co., Ltd.
Publication of WO2005026816A1 publication Critical patent/WO2005026816A1/fr

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00261—Processes for packaging MEMS devices
    • B81C1/00277—Processes for packaging MEMS devices for maintaining a controlled atmosphere inside of the cavity containing the MEMS
    • B81C1/00285—Processes for packaging MEMS devices for maintaining a controlled atmosphere inside of the cavity containing the MEMS using materials for controlling the level of pressure, contaminants or moisture inside of the package, e.g. getters
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3584—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details constructional details of an associated actuator having a MEMS construction, i.e. constructed using semiconductor technology such as etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS
    • B81B2201/045—Optical switches
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2203/00—Forming microstructural systems
    • B81C2203/01—Packaging MEMS
    • B81C2203/0145—Hermetically sealing an opening in the lid
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
    • G02B6/3512—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
    • G02B6/3514—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror the reflective optical element moving along a line so as to translate into and out of the beam path, i.e. across the beam path
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/354—Switching arrangements, i.e. number of input/output ports and interconnection types
    • G02B6/3544—2D constellations, i.e. with switching elements and switched beams located in a plane
    • G02B6/3546—NxM switch, i.e. a regular array of switches elements of matrix type constellation

Definitions

  • the present invention relates to an optical switch device that switches an optical path connecting a plurality of optical fibers using, for example, a mirror.
  • an optical switch device there is known an optical switch device in which, for example, a mirror is displaced between four optical fibers arranged in a substantially cross shape to switch an optical path connecting optical fibers.
  • a mirror is displaced between four optical fibers arranged in a substantially cross shape to switch an optical path connecting optical fibers.
  • Patent Document 1 US Patent No. 6315462
  • the body of the device is configured by, for example, bonding a silicon plate on a glass substrate.
  • the silicon plate is preliminarily formed with four fiber insertion holes arranged in a cross shape by means of, for example, etching, and an electrostatic actuated actuator.
  • the fiber insertion hole is formed by covering a long groove (slit) provided in the silicon plate from both sides in the plate thickness direction with each glass substrate. And an opening extending from the end surface of the silicon plate toward the inside. An optical fiber is inserted into each of the four fiber insertion holes, and the distal ends of the optical fibers face each other with a gap inside the silicon plate.
  • the actuator is provided with a mirror that reflects light emitted from the fiber.
  • the mirror advances and retreats with respect to the gap between the optical fibers, so that the optical path connecting the linearly arranged optical fibers among the four optical fibers is orthogonal to the optical path via the mirror.
  • the optical path is switched between the optical paths to which the optical fibers are connected.
  • a device using an optical fiber is configured to house the main body of the device in a highly airtight package or the like in order to protect the power such as moisture (humidity) and dust.
  • Patent Document 2 JP-A-7-63957
  • the cage is formed in, for example, a box shape opened upward, and a lid plate is joined to the opening side via a frame-shaped metal plate or the like.
  • a lid plate is joined to the opening side via a frame-shaped metal plate or the like.
  • the optical switch device is formed by a silicon plate, and the optical fiber is inserted into the inside of the device through a fiber insertion hole opened at an end surface of the silicon plate. Configuration.
  • the present invention has been made in view of the above-described problems of the related art, and an object of the present invention is to reduce the size of the entire device and stably seal the insertion portion of the optical fiber, thereby reducing the size of the actuator. It is an object of the present invention to provide an optical switch device capable of ensuring high airtightness and improving durability and reliability.
  • the present invention provides two substrates arranged to face each other, and a plurality of fiber insertion holes that are joined between the respective substrates and extend inward from a peripheral portion.
  • a plurality of optical fibers provided by being inserted into the respective fiber insertion holes from the peripheral edge of the silicon plate, and an optical path between the respective optical fibers provided inside the silicon plate.
  • an optical switch device comprising an actuator for switching between the two.
  • each fiber insertion hole of the silicon plate has a gas outlet.
  • Another object of the present invention is to provide a sealing member for sealing between an outer peripheral surface of an optical fiber and a fiber insertion hole by filling a glass material or a metal material.
  • each fiber insertion hole of the silicon plate is provided with a sealing member by filling it with a glass material or a metal material, for example, a glass material or a metal material having a low melting point is melted.
  • a glass material or a metal material for example, a glass material or a metal material having a low melting point is melted.
  • the space accommodating the tip actuator of the optical fiber and the like can be sealed from the outside, and these members can be protected from foreign matters and the durability and reliability of the device can be improved.
  • the fiber insertion hole provided in the main body of the optical switch device can be directly sealed by a sealing member, and a sealed space for accommodating an actuator or the like can be formed between each substrate and the silicon plate. it can.
  • the sealing member may be formed by mounting and melting an annular body formed in advance as a material of the sealing member on the outer peripheral side of the optical fiber.
  • the sealing member is formed by mounting and melting the annular body on the outer peripheral side of the optical fiber, when sealing the fiber insertion hole, the material of the sealing member is used.
  • the annular body By mounting the annular body on the outer peripheral side of the optical fiber, it can be easily attached to the insertion position of the optical fiber (the opening position of the fiber insertion hole). Then, by melting the annular body, the molten glass material or metal material can be smoothly filled in the fiber insertion hole.
  • the sealing member is fixed to the outer peripheral surface of the optical fiber and the peripheral wall of the fiber insertion hole over the entire circumference, and is located outside the fiber insertion hole.
  • the cylindrical portion is constituted by an annular flange portion projecting outward in the radial direction and fixed to the peripheral portion of the silicon plate.
  • the sealing member includes the cylindrical portion fixed to the outer peripheral surface of the optical fiber and the peripheral wall of the fiber insertion hole, and the annular flange fixed to the peripheral portion of the silicon plate. Accordingly, the gap between the outer peripheral surface of the optical fiber and the fiber insertion hole can be closed by the cylindrical portion of the sealing member, and foreign matter can be prevented from entering the fiber insertion hole from the outside.
  • the flange of the sealing member is disposed so as to build up the root of the optical fiber extending outside the fiber insertion hole from the radial outside, and is fixed at a position surrounding the open end of the fiber insertion hole. . For this reason, the tightness of the fiber insertion hole can be enhanced by the flange portion, and the base portion of the optical fiber can be reinforced, and this portion can be protected from external force in the direction of bending.
  • the sealing member is formed by melting a metal material between the outer peripheral surface of the optical fiber and the fiber insertion hole, so that the outer peripheral surface of the optical fiber and the fiber insertion hole are formed. In the vicinity, it is preferable to provide a metal film that comes into contact with the metal material when the metal material is melted.
  • the metal coating that comes into contact with the metal material serving as the sealing member is provided on the outer peripheral surface of the optical fiber and near the fiber insertion hole, the metal material serving as the sealing member is provided.
  • the filler is melted and filled into the fiber inlet, the molten metal material can be brought into contact with the metal coating on the outer peripheral surface of the optical fiber and in the vicinity of the fiber inlet, and the metal material can be brought into contact with these contact surfaces. Riding (wetting) can be improved.
  • the adhesion of the sealing member to the substrate or the silicon plate can be enhanced, and the sealing member can reliably seal the space between the optical fiber and the fiber insertion hole. Also since the metal material can be adhered to the metal coating and solidified at the position where the fiber insertion hole is closed, or the metal material can be guided along the metal coating to the back side of the fiber insertion hole.
  • the shape of the sealing member can be made uniform according to the shape and the like.
  • At least one of the substrates may be provided with a filling hole which is opened at a position different from the fiber insertion hole and fills the sealing member into the fiber insertion hole.
  • At least one of the substrates is provided with a filling hole for filling the fiber insertion hole with the sealing member. Therefore, when sealing the fiber insertion hole, the sealing member is used. And its material can be easily filled into the fiber inlet from the filling hole, and the filling operation can be performed efficiently. Then, a sealing member can be arranged as necessary at an arbitrary portion thereof, which is not restricted by the shape of the fiber insertion hole.For example, if the sealing member is filled from the opening side of the fiber insertion hole, the sealing member will not move.
  • the sealing member can also be arranged by the filling hole on the back side of the fiber insertion hole which is not provided. Further, for example, when the filling hole is opened upward, the filling operation of the sealing member can be easily performed with an upward force.
  • the actuator has a configuration that has a mirror that switches between the optical fibers by moving forward and backward between the optical fibers inside the silicon plate.
  • the actuator since the actuator has a mirror that switches the optical path between the optical fibers by moving forward and backward between the optical fibers, when the mirror enters the optical path between the optical fibers, Light emitted from an optical fiber can be reflected by a mirror and incident on another optical fiber, and the optical path can be switched as compared with the case where the mirror exits the optical path. Since the tip of each optical fiber, the mirror, and the like can be held in a sealed state by a sealing member, these can be protected against external moisture, dust, and the like, and the durability and reliability of the device can be improved.
  • FIG. 1 is a plan view showing an optical switch device according to a first embodiment of the present invention, partially cut away.
  • FIG. 2 is a cross-sectional view of the optical switch device as viewed in a direction indicated by arrows II-II in FIG. 1.
  • FIG. 3 is an explanatory view showing a state where the optical path of the optical fiber is switched by the displacement of the movable body and the mirror.
  • FIG. 4 is an enlarged cross-sectional view of a main part of the optical fiber, the fiber insertion hole, the glass sealing body, etc., as viewed from the direction of arrows IV-IV in FIG.
  • FIG. 5 is a cross-sectional view as seen from the direction indicated by arrows VV in FIG.
  • FIG. 6 is an enlarged sectional view of a main part showing a state where an annular glass material is mounted on the outer peripheral side of the optical fiber when the fiber insertion hole is sealed.
  • FIG. 7 is an enlarged sectional view of a main part showing a state in which a glass material is melted at the opening position of the fiber insertion hole to form a glass sealing body.
  • FIG. 8 is a plan view showing an optical switch device according to a second embodiment of the present invention, partially cut away.
  • FIG. 9 is an enlarged cross-sectional view of a main part of the optical fiber, the fiber insertion hole, the filling hole, the glass sealing body, and the like, as viewed from the direction of arrows IX-IX in FIG.
  • FIG. 10 is a cross-sectional view as seen from the direction indicated by arrows XX in FIG.
  • FIG. 11 is an enlarged sectional view of a main part showing a state where a granular glass material is filled into a filling hole when the fiber insertion hole is sealed.
  • FIG. 12 is an enlarged sectional view of a main part showing a state in which a glass material is melted to form a glass sealing body.
  • FIG. 13 is a sectional view showing an optical switch device according to a third embodiment of the present invention.
  • IB, 2B, 3B, 21B, 22B, 23B end face (peripheral part)
  • FIG. 1 to FIG. 7 show a first embodiment, and in the present embodiment, an electrostatic drive type optical switch device will be described as an example.
  • reference numeral 1 denotes a glass substrate as a first substrate constituting an optical switch device, and the glass substrate 1 has a plurality of optical switch devices together with a glass plate (wafer) as a material thereof. After forming, it is cut (diced) into each device to form a rectangular plate, and as shown in FIGS. 1 and 2, a flat surface 1A to which a silicon plate 3 described later is bonded is formed. And four end surfaces 1B constituting a peripheral portion of the glass substrate 1.
  • the surface 1A of the glass substrate 1 is provided with a concave groove 1C for holding the optical fiber 5 in a floating state from the glass substrate 1 at the opening position of the fiber insertion hole 4 to be described later. Is provided.
  • Reference numeral 2 denotes a lid plate as a second substrate facing the glass substrate 1 with a silicon plate 3 described later interposed therebetween.
  • the cover plate 2 is made of a glass material, and is formed in a square shape having substantially the same size by dicing together with the substrate 1 as described above.
  • the lid plate 2 has a flat surface 2A to which the silicon plate 3 is bonded, and four end surfaces 2B. On the surface 2A of the cover plate 2, long grooves 2C extending along the length direction of each fiber insertion hole 4 are provided.
  • Reference numeral 3 denotes a silicon plate provided between the glass substrate 1 and the lid plate 2, and the silicon plate 3 is made of, for example, a single crystal or polycrystal silicon material as shown in FIGS. (Silicon wafer) or the like, and is formed into a square shape of approximately the same size by dicing together with the glass substrate 1, the cover plate 2, and the like.
  • the silicon plate 3 is bonded to the surface 1A of the glass substrate 1 and the surface 2A of the lid plate 2 by means of, for example, anodic bonding, and constitutes a main body of the optical switch device together with these members. .
  • notch grooves 3A to be fiber insertion holes 4 described later are formed by etching or the like, and these notch grooves 3A are arranged in a cross shape, for example. Are located.
  • Each notch groove 3A is formed so as to penetrate the silicon plate 3 in the thickness direction, extends linearly from the end face 3B toward the inside of the silicon plate 3, and extends substantially in the center of the silicon plate 3. Communicate with each other.
  • Each notch groove 3A divides the silicon plate 3 into four substantially triangular islands 3C.
  • the island 3C located on the near side in FIG. For example, an actuator 7 described later is provided.
  • the optical switch device is formed as a fine structure by, for example, a micromachining technique.
  • Reference numeral 4 denotes, for example, four fiber insertion holes formed by using the notch grooves 3A of the silicon plate 3, and each of the fiber insertion holes 4 is a glass substrate 1 as shown in Figs. Are formed as long holes with a substantially rectangular cross section with the peripheral wall 1A (concave groove 1C), the long groove 2C of the cover plate 2 and the notch groove 3A of the silicon plate 3 as the peripheral wall. ).
  • Each of the fiber insertion holes 4 is located between the glass substrate 1 and the cover plate 2 and opens at the end face 3 B of the silicon plate 3, and extends straight from the end face 3 B toward the inside of the silicon plate 3. And communicate with each other at a substantially central portion of the silicon plate 3.
  • Reference numeral 5 denotes an optical fiber inserted into each fiber input hole 4, and each of the optical fibers 5 is As shown in Fig. 1, a total of four lines are arranged along two axes Ol, ⁇ 2 that intersect (orthogonally) with each other. The two optical fibers 5 arranged along each of the axes # 1, 02 oppose each other at an interval where the fiber insertion holes 4 communicate.
  • the optical fiber 5 has a core 5A and a clad 5B covering the outer periphery thereof as shown in FIG. 4, and these are formed of a glass material. Further, on the outer peripheral side of the clad 5B, a protective layer (not shown) covering the clad 5B is provided.
  • Reference numeral 6 denotes a plurality of fiber holders provided in the respective fiber insertion holes 4. Each of the fiber holders 6 is connected to the silicon plate 3 by, for example, applying an etching force to a silicon material or the like. Are formed together.
  • the fiber presser 6 projects from the island 3C of the silicon plate 3 into the fiber insertion hole 4 as shown in FIG. 1, and the distal end of the fiber presser 6 contacts the outer peripheral side of the optical fiber 5 in an elastically deformed state. ing.
  • the fiber presser 6 elastically presses the optical fiber 5 against the peripheral wall of the fiber insertion hole 4 (for example, the surface 1A of the glass substrate 1 and the cutout groove 3A of the silicon plate 3), 5 is positioned in the fiber insertion hole 4 in the radial direction.
  • Reference numeral 7 denotes an actuator formed on the island portion 3C of the silicon plate 3.
  • the actuator 7 is formed together with the silicon plate 3 using, for example, a silicon material as shown in FIGS.
  • the actuator 7 includes a rod-shaped movable body 8 arranged on the glass substrate 1 via each support beam 8A so as to be displaceable in the direction indicated by an arrow A, and is provided at one end of the movable body 8 to be movable.
  • the mirror 9 moves forward and backward with respect to the intersection of the axes ⁇ 1 and ⁇ 2 of the optical fiber 5 due to the displacement, and a comb-shaped mirror provided on the glass substrate 1 at the other end of the movable body 8.
  • the fixed electrode 10 includes a movable electrode 11 provided on the other end side of the movable body 8 and coupled to the fixed electrode 10 with a gap.
  • the movable body 8, the mirror 9, and the movable electrode 11 are connected to the glass substrate 1 and the cover plate by the support beam 8A.
  • the surface of the mirror 9 is mirror-finished by forming a metal film using a method such as sputtering or vapor deposition. Further, the fixed electrode 10 and the movable electrode 11 generate an electrostatic force between the electrodes 10 and 11 by being supplied with power from the outside, and the electrostatic force causes the movable body 8 to be piled by the spring force of each support beam 8A. To displace. As a result, the movable body 8 is moved to the position where the mirror 9 intersects the axes ⁇ 1 and ⁇ 2 of the optical fiber 5 as shown by the imaginary line in FIG. The mirror 9 is driven between an initial position where it has entered and a switching position where the mirror 9 has exited from the intersection of the axes Ol and 02 as shown by a solid line, and switches the optical path between the optical fibers 5.
  • Reference numeral 12 denotes a glass sealing body as a sealing member provided by filling each of the fiber insertion holes 4, and each of the glass sealing bodies 12 is, for example, oxidized as shown in Figs. It is composed of low-melting glass containing lead, low-melting glass that does not contain lead components that can be lead-free, and has a melting point lower than that of glass substrate 1, lid plate 2, silicon plate 3, etc. ing
  • the glass sealing body 12 is located on the outer peripheral side of the optical fiber 5 and is filled in the vicinity of the opening end of the fiber inlet 4, and the outer peripheral surface of the optical fiber 5 and the fiber inlet 4 are filled.
  • the space between the peripheral wall that is, the concave groove 1C of the glass substrate 1, the long groove 2C of the cover plate 2, and the cutout groove 3A of the silicon plate 3) is sealed in a gas-liquid tight manner.
  • the glass sealing body 12 is formed by melting a glass annular body 14 mounted on the outer peripheral side of the optical fiber 5 near the opening end of the fiber insertion hole 4 as shown in FIG. It is formed by flowing this into the fiber insertion hole 4 and solidifying it.
  • the glass sealing body 12 has a cylindrical portion 12A fixed to the outer peripheral surface of the optical fiber 5 and the peripheral wall of the fiber insertion hole 4 over the entire circumference, and the cylindrical portion 12A positioned outside the fiber insertion hole 4.
  • An annular flange portion 12B protruding radially outward and having a substantially triangular cross-sectional shape (fillet shape) is formed.
  • the cylindrical portion 12A closes a gap formed between the outer peripheral surface of the optical fiber 5 and the peripheral wall of the fiber insertion hole 4, and foreign matter such as moisture and dust from the outside is removed.
  • the space defined between the glass substrate 1 and the lid plate 2 and defined inside the silicon plate 3 becomes a closed space 13 closed by each glass sealing body 12, and this closed space Inside 13 is housed a factor actuator 7 of each optical fiber 5 and the like.
  • the flange portion 12B is arranged so as to build up the root portion of the optical fiber 5 extending outside the fiber insertion hole 4 from the radial outside, and surrounds the open end of the fiber insertion hole 4. At positions, they are fixed to the end faces 1B, 2B, 3B of the glass substrate 1, the lid plate 2, and the silicon plate 3. As a result, the flange 12B enhances the sealing performance of the fiber insertion hole 4 and complements the root of the optical fiber 5. This part is protected from external force in the direction of bending this part.
  • the optical switch device according to the present embodiment has the above-described configuration. Next, the operation thereof will be described.
  • the movable body 8 is held at the initial position by the spring force of each support beam 8A as shown in FIG. Has entered the intersection of the optical fiber 5 axis Ol and 02.
  • light emitted from the optical fiber 5 located at the upper left in FIG. 1 is reflected by the mirror 9 and enters the lower left optical fiber 5 orthogonal to the mirror.
  • the light emitted from the upper right optical fiber 5 enters the lower right optical fiber 5.
  • the mirror 9, the electrodes 10, and the like of the actuator 7 are housed in the closed space 13 closed by the respective glass sealing bodies 12, foreign matters such as moisture and dust are sealed from the outside. It is possible to prevent the mirror 13 and the electrodes 10 and 11 from entering the space 13 and adhere to the mirror 13, and the actuator 7 can be operated stably.
  • annular (for example, annular ring-shaped or square ring-shaped) glass material (hereinafter, referred to as an annular body 14) made of, for example, low-melting glass is formed in advance.
  • the ring 14 is attached to the outer periphery of the optical fiber 5. Then, the end of the optical fiber 5 is inserted into the fiber insertion hole 4 to a predetermined position, and the annular body 14 is brought into contact with the end faces IB, 2B, 3B of the glass substrate 1, the cover plate 2, and the silicon plate 3. .
  • the annular body 14 is heated and melted at the insertion position of the optical fiber 5 (the position of the end faces 1B, 2B, 3B).
  • the heating means for the annular body 14 for example, a non-contact heating means using a halogen lamp, a xenon lamp, a laser beam, or the like, or an apparatus Use a contact-type heating unit that heats the whole unit with a hot plate or the like, or use a heating unit that uses both of them.
  • the amount of the cylindrical portion 12A entering the fiber insertion hole 4 the amount of the fiber
  • the fillet shape and the like of the flange 12B that is built up on the base of the optical fiber 5 outside the entrance hole 4 can be adjusted to a desired state.
  • each of the fiber insertion holes 4 of the silicon plate 3 is filled with a glass material such as low-melting glass to provide a glass sealing body 12. Therefore, the space between the outer peripheral surface of the optical fiber 5 and the fiber insertion hole 4 can be stably sealed, and it is ensured that foreign substances such as moisture and dust enter the inside of the apparatus through the fiber insertion hole 4 from outside. Preventing force S can.
  • the sealed space 13 in which the mirror 9 of the tip end actuator 7 of the optical fiber 5 and the like are accommodated can be stably sealed from the outside, and these members can be protected from foreign substances, and the device can be protected. Durability and reliability can be improved.
  • the fiber insertion hole 4 provided in the main body can be directly sealed by the glass sealing body 12.
  • a closed space 13 for accommodating the actuator 7 and the like can be formed between the glass substrate 1, the lid plate 2, and the silicon plate 3.
  • the glass sealing body 12 is formed by attaching a glass annular body 14 to the outer peripheral side of the optical fiber 5.
  • the annular body 14 is attached to the outer peripheral side of the optical fiber 5 so that the fiber insertion hole 4 is filled with the optical fiber 5 when the fiber insertion hole 4 is sealed. It can be easily attached to the insertion position (the opening position of the fiber insertion hole 4), and the molten glass material can be smoothly filled into the fiber insertion hole 4 by melting the annular body 14.
  • the minute gap between the optical fiber 5 and the fiber insertion hole 4 can be reliably filled by a simple operation of attaching the annular body 14 to the optical fiber 5 and melting it. This eliminates the need to perform a fine work of directly filling the gap with a sealing material, so that the fiber inlet 4 can be efficiently sealed.
  • the glass sealing body 12 is constituted by the cylindrical portion 12A and the flange portion 12B, the gap between the outer peripheral surface of the optical fiber 5 and the fiber insertion hole 4 is stably formed by the cylindrical portion 12A.
  • the flange portion 12B can be disposed so as to be built up on the root portion of the optical fiber 5, so that the sealing performance of the fiber insertion hole 4 can be further improved, and the root portion of the optical fiber 5 is supplemented by the flange portion 12B. It can be strong and can be protected from external force in the direction of bending this part.
  • FIGS. 8 to 12 show a second embodiment according to the present invention, which is characterized in that a filling hole for filling a sealing member is provided in a substrate. It is in. Note that, in the present embodiment, the same components as those in the first embodiment are denoted by the same reference numerals, and description thereof will be omitted.
  • Reference numeral 21 denotes a glass substrate of the optical switch device, and a plurality of glass substrates 21 are formed on a glass plate (wafer) as a material thereof in substantially the same manner as in the first embodiment as shown in FIGS. After the optical switch devices are formed together, they are cut (diced) into individual devices to form a rectangular plate, and have a surface 21A and four side end surfaces 21B. In addition, a concave groove 21C is provided on the surface 21A of the glass substrate 21 where necessary to hold the optical fiber 5 in a floating state from the glass substrate 21 at the opening position of the filling hole 25 described later.
  • Reference numeral 22 denotes a lid plate facing the glass substrate 1 with a silicon plate 23 described later interposed therebetween.
  • the lid plate 22 is made of a glass material almost in the same manner as in the first embodiment. It is formed in a square shape having an end surface 22B and a long groove 22C is provided on the surface 22A. ing. Filling holes 25 are provided in the cover plate 22 at positions corresponding to the fiber insertion holes 24 described later.
  • Reference numeral 23 denotes a silicon plate provided between the glass substrate 21 and the surfaces 21A and 22A of the lid plate 22.
  • the silicon plate 23 is made of, for example, a silicon material (silicon wafer) diced in a square shape. It has notches 23A, four end faces 23B, and four islands 23C.
  • the actuator 7 is provided on one island 23C.
  • Reference numeral 24 denotes, for example, four fiber insertion holes formed by using the notch grooves 23A of the silicon plate 23.
  • Each of the fiber insertion holes 24 is substantially the same as in the first embodiment. It is formed as an elongated hole having a substantially rectangular cross section with the surface 21A (concave groove 21C) of the glass substrate 21, the long groove 22C of the cover plate 22 and the cutout groove 23A of the silicon plate 23 as the peripheral wall, and the end surface 23B of the silicon plate 23 It extends straight inward.
  • the optical fibers 5 are passed through the respective fiber insertion holes 24.
  • Reference numeral 25 denotes, for example, four filling holes (only two are shown) provided in the cover plate 22 at positions corresponding to the respective fiber insertion holes 24.
  • Each of the filling holes 25 is shown in FIGS.
  • the cover plate 22 is formed so as to penetrate in a thickness direction at a portion near the end face 22B, and is opened at a portion of the fiber insertion hole 24 in the longitudinal direction.
  • the filling hole 25 is for filling a glass sealing body 26 described later into the insertion hole 24 from a position different from the opening of each fiber insertion hole 24.
  • Reference numeral 26 denotes a glass sealing body as a sealing member provided by filling each of the fiber insertion holes 24, and each of the glass sealing bodies 26 is substantially the same as in the first embodiment.
  • it is made of low melting point glass or the like, and the gap between the outer peripheral surface of the optical fiber 5 and the peripheral wall of the fiber insertion hole 24 (the concave groove 21C of the glass substrate 21, the long groove 22C of the cover plate 22, and the cutout groove 23A of the silicon plate 23) is formed. It is sealed gas-liquid tightly.
  • a granular (pellet) or powder glass material 27 is filled with the filling hole 25 of the cover plate 22. From the fiber inlet hole 24.
  • the glass material 27 is heated and melted by the same heating means as in the first embodiment, whereby the glass sealing body 26 can be formed.
  • the present embodiment configured as described above can obtain substantially the same operation and effect as the first embodiment.
  • the filling hole 25 is provided in the cover plate 22. Therefore, when the fiber insertion hole 24 is sealed, the glass material 27 is easily filled with the filling hole 25. The filling operation can be performed efficiently.
  • the glass sealing body 26 can be disposed as needed at an arbitrary part of the fiber insertion hole 24 without being restricted by the shape or the like.
  • the glass sealing body 26 can be arranged by the filling hole 25 also on the back side of the fiber insertion hole 24 where the glass sealing body 26 does not reach. Further, by opening the filling hole 25 upward, the work of filling the glass material 27 can be easily performed from above.
  • FIG. 13 shows a third embodiment according to the present invention.
  • the feature of this embodiment lies in that the sealing member is made of a metal material. Note that, in the present embodiment, the same components as those in the first embodiment are denoted by the same reference numerals, and description thereof will be omitted.
  • Reference numeral 31 denotes a metal sealing body as a sealing member provided to fill each fiber insertion hole 4 of the optical switch device.
  • the metal sealing body 31 is, for example, a glass substrate 1, a cover plate 2, It is a metal material having a lower melting point than the silicon plate 3 and the like, and is formed of, for example, a solder containing gold, tin, or the like.
  • the metal sealing body 31 is substantially the same as the glass sealing body 12 according to the first embodiment, and includes a cylindrical portion 31A and a flange portion 31B, and is located on the outer peripheral side of the optical fiber 5. Filled near the open end of the fiber insertion hole 4. Accordingly, the metal sealing body 31 seals the space between the outer peripheral surface of the optical fiber 5 and the peripheral wall of the fiber insertion hole 4 in a gas-liquid tight manner, and foreign matters such as moisture and dust are externally sealed in the fiber insertion hole 4. Prevents intrusion into the back (closed space 13).
  • a granular or powdery metal material is melted in a state filled in the fiber insertion hole 4, or a wire-like metal material such as a solder wire is used. It is formed by melting the distal end side while inserting into the fiber insertion hole 4.
  • the molten metal material such as solder comes into contact with the outer coating portion 32A and the inner coating portion 32B of the metal coating 32, which will be described later, and the metal coating 33 on the optical fiber 5 side, and is guided by these to a predetermined shape.
  • the cylindrical portion 31A and the flange portion 31B of the metal sealing body 31 are formed.
  • Reference numeral 32 denotes a metal coating provided over the inside of each fiber insertion hole 4 and near the opening thereof.
  • the metal coating 32 includes a cylindrical portion 31A and a flange portion 31B of the metal sealing body 31. Is in contact with. As a result, when the metal film 32 melts the solder or the like that forms the metal sealing body 31 and fills the fiber insertion hole 4, the metal film 32 contacts the melted solder or the like to improve the riding (wetting) of the solder. As well as to enhance its adhesion.
  • the metal film 32 is, for example, a solder base metal containing gold, nickel, or the like.
  • the metal film 32 may be, for example, a nickel film formed inside or near the fiber insertion hole 4 by means of, for example, sputtering, vapor deposition, plating, or the like, and a gold film covering the surface thereof (both shown). Z).
  • the metal coating 32 is fixed to the end faces IB, 2B, 3B of the glass substrate 1, the lid plate 2, and the silicon plate 3 at a position outside the fiber insertion hole 4 and surrounding the open end thereof.
  • the outer coating portion 32A improves the riding of the solder on the end surfaces IB, 2B, and 3B, and easily forms the flange portion 31B and the like of the metal sealing body 31. Further, the inner coating portion 32B guides the molten solder into the fiber insertion hole 4 to enhance the hermeticity of the fiber insertion hole 4.
  • Reference numeral 33 denotes another metal coating provided near the opening of the fiber insertion hole 4 so as to cover the outer peripheral surface of the optical fiber 5.
  • the metal coating 33 is substantially the same as the metal coating 32, for example, gold, nickel, or the like.
  • the cylindrical portion 31A of the metal sealing body 31 and the flange portion 31B are in contact with the surface thereof.
  • the metal coating 33 improves the soldering (wetting) of the solder on the outer peripheral surface of the optical fiber 5.
  • the sealing member is formed as a metal sealing body 31, and a metal coating 32 that comes into contact with the metal sealing body 31 is provided in the vicinity of the fiber insertion hole 4, and the outer periphery of the optical fiber 5 is provided.
  • the surface is provided with another metal coating 33 to cover it. Yes.
  • the metal material to be the metal sealing body 31 when the metal material to be the metal sealing body 31 is melted and filled into the fiber insertion hole 4, the molten metal material comes into contact with the metal coatings 32 and 33 in the vicinity of the fiber insertion hole 4, respectively. It is possible to improve the riding (wetting) of the metal material on these contact surfaces. As a result, the adhesion of the metal sealing body 31 to the outer peripheral surface of the optical fiber 5 can be improved, and the end faces IB, 2B, 3B of the glass substrate 1, the lid plate 2, and the silicon plate 3 Since the adhesiveness of the metal sealing body 31 to the peripheral wall of the fiber can be enhanced, the fiber insertion hole 4 can be securely sealed by the metal sealing body 31.
  • a force S can be provided for stably forming the flange portion 31B of the metal sealing body 31.
  • the metal sealing body 31 can be formed in a desired shape in accordance with the arrangement, the shape, and the like of the metal films 32, 33, and the shapes can be made uniform.
  • the annular body 14 used for forming the glass sealing body 12 is not limited to an annular (ring-like) shape, and may be, for example, a square, a rectangle, an ellipse, or the like. It may be configured to use the above-mentioned annular body.
  • a glass material formed, for example, in the form of granules or powder is filled into the opening end side of the fiber insertion hole 4 and melted and solidified to form a glass sealing body 12. May be configured.
  • annular body 14 for example, a C-shaped annular body having a cutout at one location in the circumferential direction, an annular body having a shape close to a half-shape, or the like is used.
  • the optical fiber 5 can be fitted to the inner peripheral side of the annular body through the notch from the outer peripheral side. It can be easily mounted so that it can be hooked from. Accordingly, it is not necessary to move the annular body from the end of the optical fiber 5 to the mounting site along the length direction, and the mounting operation can be performed efficiently.
  • the cover plate 22 is provided with the filling hole 25.
  • the book The invention is not limited to this.
  • a configuration in which the filling hole is provided in the glass substrate 21 or a configuration in which the filling hole is provided in both the glass substrate 21 and the cover plate 22 may be employed.
  • the glass sealing body 26 is filled in the fiber insertion hole 24.
  • the present invention is not limited to this.
  • a configuration may be employed in which a metal material such as solder is filled from the filling hole 25 of the cover plate 22 into the fiber insertion hole 24.
  • the metal coating 32 is constituted by the outer coating 32A and the inner coating 32B.
  • the present invention is not limited to this.
  • the metal coating may be formed only as the outer coating 32A and the inner coating 32B may be omitted.
  • the metal sealing body 31 is formed using, for example, a solder containing gold, tin, or the like, and nickel, gold, or the like is formed on the metal film 32 correspondingly.
  • the configuration was used.
  • the present invention is not limited to these metals, and it goes without saying that other metal materials may be used.
  • the glass substrates 1 and 21 are provided with the concave grooves 1 C and 21 C for floating the optical fiber 5.
  • the present invention does not necessarily require these concave grooves 1C and 21C, and may be configured to use a glass substrate having no concave grooves 1C and 21C.
  • the configuration is such that the glass substrates 1 and 21 and the cover plates 2 and 22 are used as the two substrates.
  • the present invention is not limited to this, and at least one or both of the substrates may be made of, for example, a single crystal or polycrystalline silicon substrate.

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Tumbler Switches (AREA)
  • Switch Cases, Indication, And Locking (AREA)

Abstract

L'invention porte sur un commutateur optique dont le trou d'insertion de la fibre est scellé par du verre ou du métal de manière à empêcher la pénétration de corps étrangers, à en améliorer la fiabilité et à en réduire la taille. A cet effet une plaque de silicium (3), collée entre un substrat de verre (1) et une plaque de couverture (2), est pourvue d'un trou d'insertion (4) de la fibre, d'un actuateur (7) et analogue, et la commutation des trajectoires optiques entre les fibres optiques (5) s'établit en déplaçant le miroir (9) de l'actionneur (7) dans ou hors des trajectoires optiques. Chacun des trou (4) d'insertion de fibre est rempli par un élément de scellement (12) de verre à bas point de fusion et l'espace entre la surface périphérique extérieure d'une fibre optique (5) et un trou (4) d'insertion de fibre est scellé de manière à former un espace clos autour du commutateur optique. Ainsi, comme il n'est pas nécessaire de placer le commutateur dans boîtier étanche, son encombrement peut être réduit en simplifiant la structure de scellement et l'actionneur et analogue peuvent être placés dans une atmosphère étanche.
PCT/JP2004/009813 2003-09-09 2004-07-09 Commutateur optique WO2005026816A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2003-316838 2003-09-09
JP2003316838 2003-09-09

Publications (1)

Publication Number Publication Date
WO2005026816A1 true WO2005026816A1 (fr) 2005-03-24

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WO (1) WO2005026816A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007074570A1 (fr) 2006-08-10 2007-07-05 Kawasaki Jukogyo Kabushiki Kaisha Installation de production d'énergie par chaleur solaire et installation d'alimentation de véhicule thermique

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101833147B (zh) * 2010-05-20 2014-05-07 潮州三环（集团）股份有限公司 用于光开关气密性封装的多芯光纤插芯体

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50153657A (fr) * 1974-05-30 1975-12-10
JPS601103U (ja) * 1983-06-15 1985-01-07 日本航空電子工業株式会社 光フアイバのハ−メチツクシ−ル構造
JPH0792334A (ja) * 1993-09-21 1995-04-07 Furukawa Electric Co Ltd:The 光ファイバ貫通部の気密封止構造
JP2001296486A (ja) * 2000-04-13 2001-10-26 Sumitomo Osaka Cement Co Ltd マトリクス光スイッチ
US6315462B1 (en) * 1996-09-20 2001-11-13 Ascom Ag Fiber optic circuit switch and a process for its production

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50153657A (fr) * 1974-05-30 1975-12-10
JPS601103U (ja) * 1983-06-15 1985-01-07 日本航空電子工業株式会社 光フアイバのハ−メチツクシ−ル構造
JPH0792334A (ja) * 1993-09-21 1995-04-07 Furukawa Electric Co Ltd:The 光ファイバ貫通部の気密封止構造
US6315462B1 (en) * 1996-09-20 2001-11-13 Ascom Ag Fiber optic circuit switch and a process for its production
JP2001296486A (ja) * 2000-04-13 2001-10-26 Sumitomo Osaka Cement Co Ltd マトリクス光スイッチ

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007074570A1 (fr) 2006-08-10 2007-07-05 Kawasaki Jukogyo Kabushiki Kaisha Installation de production d'énergie par chaleur solaire et installation d'alimentation de véhicule thermique

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