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WO2005095798A1 - Systeme sous vide - Google Patents

Systeme sous vide Download PDF

Info

Publication number
WO2005095798A1
WO2005095798A1 PCT/EP2005/000625 EP2005000625W WO2005095798A1 WO 2005095798 A1 WO2005095798 A1 WO 2005095798A1 EP 2005000625 W EP2005000625 W EP 2005000625W WO 2005095798 A1 WO2005095798 A1 WO 2005095798A1
Authority
WO
WIPO (PCT)
Prior art keywords
vacuum
damping ring
vacuum chamber
flange
flanges
Prior art date
Application number
PCT/EP2005/000625
Other languages
German (de)
English (en)
Inventor
Dieter Müller
Heinz-Josef Wirtzfeld
Hans Wischott
Gerhard-Wilhelm Walter
Original Assignee
Leybold Vakuum Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Vakuum Gmbh filed Critical Leybold Vakuum Gmbh
Publication of WO2005095798A1 publication Critical patent/WO2005095798A1/fr

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B39/00—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
    • F04B39/12—Casings; Cylinders; Cylinder heads; Fluid connections
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/08—Sealings
    • F04D29/083—Sealings especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/601—Mounting; Assembling; Disassembling specially adapted for elastic fluid pumps

Definitions

  • the invention relates to a vacuum system comprising a vacuum chamber and a unit connected to it via a flange connection.
  • the invention has for its object to provide a vacuum system in which the vacuum chamber and unit are sealingly connected at the beginning of vacuum generation, with vibration decoupling taking place as the vacuum increases.
  • the vacuum system according to the invention is characterized by claim 1.
  • an elastomeric damping ring is arranged between the flanges of the vacuum chamber and the unit, which is compressed in the vacuum generated by the vacuum pump in such a way that the at least one spring element arranged around the clamping bolt is relieved and therefore no longer transmits vibrations.
  • the invention is based on the idea that when the vacuum is initially generated, the flanges, including the damping ring, are pressed against one another by the tensioning bolts, with inevitable transmission of vibrations from the unit via the tensioning bolts to the vacuum chamber. Vibrations are dampened by the spring elements, but not completely kept away from the vacuum chamber.
  • the desired working value which is, for example, 10 "7 mbar
  • the flanges are pressed against each other so strongly by the effect of the vacuum that the damping ring located between them is compressed. This relieves the spring elements on the clamping bolts, so that practically no vibrations are transmitted via the clamping bolts.
  • the only value of the vibration transmission runs through the damping ring arranged between the flanges.
  • the flanges are arranged to a certain extent floating on this damping ring, whereby they are only held in axial alignment by the clamping bolts, but are not pressed against one another. The flanges are pressed on only after the stationary working state has been reached by vacuum action.
  • the vacuum chamber and unit are preferably arranged one above the other so that the influence of gravity acts axially to the flange connection.
  • the vacuum pump being attached to the side of the vacuum chamber.
  • the design has proven to be insensitive to the effects of gravity.
  • the invention can be used with advantage in units which are vacuum pumps or cold heads.
  • Cryopumps and turbopumps, in which high-frequency bearing vibrations can occur, are particularly suitable as the vacuum pump.
  • a cold head has a piston that moves back and forth in a cylinder and carries out about 50 strokes per minute, which create a high level of vibration.
  • the damping ring is thicker than the sum of the thicknesses of the spring elements on a clamping bolt.
  • the relatively thick damping ring ensures that the vacuum causes a long deformation path of the damping ring, whereby the Spring elements on the clamping bolts can be effectively relieved.
  • a thick damping ring causes high vibration damping during vacuum operation.
  • the spring elements are preferably made of an elastomer material that is similar to that of the damping layer.
  • the invention makes it possible to connect the flanges of the vacuum chamber and the unit directly to one another.
  • a base flange which is an integral part of an assembly, is provided with a coupling flange, which is fastened in a latching manner.
  • the clamping bolts can then extend through the coupling flange, which together with the base flange forms the flange.
  • Fig. 1 is a side view of a first embodiment of the vacuum system
  • FIG. 2 shows a section through detail II of FIG. 1.
  • the vacuum system of FIG. 1 has a vacuum chamber 10 which is connected to an aggregate, which here is a vacuum pump 11.
  • the vacuum chamber 10 is, for example, a recipient for the semiconductor production or for the surface treatment of other workpieces.
  • the vacuum chamber is a vacuum-tight container which has a vacuum connection 12 with a flange 13.
  • the vacuum pump 11 is a cryopump or another high-vacuum pump with a flange 14. Between the flanges 13 and 14 there is a damping ring 15 made of elastomer material with a thickness of approximately 20 mm, but preferably not less than 15 mm.
  • the vacuum pump 11 is a high-vacuum pump with a connection 16 for a forevacuum pump.
  • FIG. 2 shows the flange connection 20 with the two flanges 13 and 14 and the damping ring 15 arranged between them.
  • the flanges and the damping ring have openings which are aligned with one another and through which clamping bolts 21 are inserted.
  • the clamping bolt 21 has a molded head 22 at one end and a head 23 in the form of a threaded nut seated on a thread at its opposite end.
  • the head 23 presses against an elastomeric spring element 24 and the head 23 presses against an elastomeric spring element 25.
  • Each of these spring elements is supported by a washer 26 or 27 on the flange 13, 14 in question.
  • the screw connection is secured by a lock nut 23a.
  • the clamping bolt 21 pulls the flanges 13 and 14 against one another in such a way that they are pressed sealingly against the damping ring 15.
  • the vacuum chamber is tightly connected to the vacuum pump.
  • vibrations are transmitted along path 30, namely from Flange 14 of the vacuum pump via the spring element 25 onto the head 23 and the shaft of the clamping bolt 21, and further via the head 22, the spring element 24 and the washer 26 onto the flange 13 of the vacuum chamber.
  • the damping ring When the vacuum has reached its final value mbar, for example 10 "7, the damping ring is axially compressed between the flanges 15, so that the thickness of originally about 20 mm, for example, 19 mm is reduced.
  • the Shore hardness of the damping ring is in the present Embodiment 50
  • the damping ring 15 is a Viton ring. It dampens the vibrations by a factor between 5 and 20 depending on the frequency. In the vacuum state there is no rigid connection between the vacuum chamber and the unit.
  • the flange 14 of the vacuum pump 11 consists of a base flange part 31, which is a component of the vacuum pump, and a coupling flange part 32, which surrounds the base flange part 31 and is fastened with a clamping ring 33.
  • the clamping ring 33 blocks movement of the coupling flange part 32 in the direction of the vacuum chamber, but permits removal of the coupling flange part 32 to the rear.
  • the clamping bolts 21 extend through the coupling flange part 32.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Vibration Prevention Devices (AREA)
  • Springs (AREA)

Abstract

Selon l'invention concerne un système sous vide comprenant une chambre sous vide (10) et un agrégat (11), qui sont reliés par une liaison à collerette (20). Afin d'éviter la transmission de vibration de l'agrégat (11) sur la chambre sous vide (10), un anneau d'atténuation (15) élastomère est situé entre les collerettes (13, 14). Des boulons de tension (21) qui pressent les collerettes (13, 14) contre l'anneau d'atténuation (15), contiennent des éléments à ressorts (24, 25) sous les têtes (22, 23). Lorsque le vide a atteint la taille de travail, l'anneau d'atténuation (15) peut être comprimé sous l'action du vide, de sorte que les boulons de tension (21) et les éléments ressorts (24, 25) sont soulagés. De ce fait, le passage de transmission des vibrations (30) est interrompu par les boulons de tension.
PCT/EP2005/000625 2004-03-16 2005-01-22 Systeme sous vide WO2005095798A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE200410012677 DE102004012677A1 (de) 2004-03-16 2004-03-16 Vakuumsystem
DE102004012677.1 2004-03-16

Publications (1)

Publication Number Publication Date
WO2005095798A1 true WO2005095798A1 (fr) 2005-10-13

Family

ID=34960389

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2005/000625 WO2005095798A1 (fr) 2004-03-16 2005-01-22 Systeme sous vide

Country Status (2)

Country Link
DE (1) DE102004012677A1 (fr)
WO (1) WO2005095798A1 (fr)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102852758A (zh) * 2012-08-24 2013-01-02 北京天海工业有限公司 全真空泵池
EP2918843A1 (fr) * 2014-03-14 2015-09-16 Pfeiffer Vacuum Gmbh Amortisseur pour pompes à vide
JP2017096286A (ja) * 2015-11-19 2017-06-01 プファイファー・ヴァキューム・ゲーエムベーハー 真空ポンプ
US9995421B2 (en) 2010-04-16 2018-06-12 Agilent Technologies, Inc. Vibration damper for vacuum pumps

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2579791B (en) * 2018-12-13 2021-07-14 Edwards Ltd Vacuum pump with variable axial position
CN116146449A (zh) * 2022-12-08 2023-05-23 苏州八匹马超导科技有限公司 一种减振低温泵

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2159891A (en) * 1984-05-02 1985-12-11 Zeiss Jena Veb Carl Damping oscillations in vacuum systems
WO1993009376A1 (fr) * 1991-10-28 1993-05-13 Varian Associates, Inc. Bride rotative a vide
US5516122A (en) * 1993-12-10 1996-05-14 Caffee; Barry K. Ultra high vacuum elastomer seal
EP1118774A2 (fr) * 1999-12-21 2001-07-25 Seiko Seiki Kabushiki Kaisha Pompe à vide

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2159891A (en) * 1984-05-02 1985-12-11 Zeiss Jena Veb Carl Damping oscillations in vacuum systems
WO1993009376A1 (fr) * 1991-10-28 1993-05-13 Varian Associates, Inc. Bride rotative a vide
US5516122A (en) * 1993-12-10 1996-05-14 Caffee; Barry K. Ultra high vacuum elastomer seal
EP1118774A2 (fr) * 1999-12-21 2001-07-25 Seiko Seiki Kabushiki Kaisha Pompe à vide

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9995421B2 (en) 2010-04-16 2018-06-12 Agilent Technologies, Inc. Vibration damper for vacuum pumps
CN102852758A (zh) * 2012-08-24 2013-01-02 北京天海工业有限公司 全真空泵池
CN102852758B (zh) * 2012-08-24 2015-05-20 北京天海工业有限公司 全真空泵池
EP2918843A1 (fr) * 2014-03-14 2015-09-16 Pfeiffer Vacuum Gmbh Amortisseur pour pompes à vide
JP2017096286A (ja) * 2015-11-19 2017-06-01 プファイファー・ヴァキューム・ゲーエムベーハー 真空ポンプ

Also Published As

Publication number Publication date
DE102004012677A1 (de) 2005-10-13

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