WO2005069353A3 - DIFFUSION BARRIER COATING FOR Si-BASED COMPONENTS - Google Patents
DIFFUSION BARRIER COATING FOR Si-BASED COMPONENTS Download PDFInfo
- Publication number
- WO2005069353A3 WO2005069353A3 PCT/US2004/026665 US2004026665W WO2005069353A3 WO 2005069353 A3 WO2005069353 A3 WO 2005069353A3 US 2004026665 W US2004026665 W US 2004026665W WO 2005069353 A3 WO2005069353 A3 WO 2005069353A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- barrier coating
- diffusion barrier
- disposed
- silicon
- based substrate
- Prior art date
Links
- 230000004888 barrier function Effects 0.000 title abstract 10
- 239000011248 coating agent Substances 0.000 title abstract 7
- 238000000576 coating method Methods 0.000 title abstract 7
- 238000009792 diffusion process Methods 0.000 title abstract 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract 4
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 abstract 4
- 229910052760 oxygen Inorganic materials 0.000 abstract 4
- 239000001301 oxygen Substances 0.000 abstract 4
- 229910052710 silicon Inorganic materials 0.000 abstract 4
- 239000010703 silicon Substances 0.000 abstract 4
- 239000000758 substrate Substances 0.000 abstract 4
- 238000002955 isolation Methods 0.000 abstract 3
- 230000007613 environmental effect Effects 0.000 abstract 2
- 239000000356 contaminant Substances 0.000 abstract 1
- 239000012535 impurity Substances 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
- 230000003647 oxidation Effects 0.000 abstract 1
- 238000007254 oxidation reaction Methods 0.000 abstract 1
- 239000012720 thermal barrier coating Substances 0.000 abstract 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/009—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone characterised by the material treated
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
- C04B41/52—Multiple coating or impregnating multiple coating or impregnating with the same composition or with compositions only differing in the concentration of the constituents, is classified as single coating or impregnation
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
- C04B41/81—Coating or impregnation
- C04B41/89—Coating or impregnation for obtaining at least two superposed coatings having different compositions
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
- Y10T428/263—Coating layer not in excess of 5 mils thick or equivalent
- Y10T428/264—Up to 3 mils
- Y10T428/265—1 mil or less
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Materials Engineering (AREA)
- Structural Engineering (AREA)
- Organic Chemistry (AREA)
- Laminated Bodies (AREA)
- Turbine Rotor Nozzle Sealing (AREA)
Abstract
A component comprising a silicon-based substrate and a diffusion barrier coating disposed on the silicon-based substrate. The diffusion barrier coating comprises an isolation layer disposed directly on the silicon-based substrate and at least one oxygen barrier layer disposed on the isolation layer. The oxygen barrier layer prevents the diffusion of oxygen therethrough, and prevents excessive oxidation of the silicon-based substrate. The isolation layer(s) prevent contaminants and impurities from reacting with the oxygen barrier layer. An environmental barrier coating may be disposed on the diffusion barrier coating, and a thermal barrier coating may be disposed on the environmental barrier coating. Methods for making a component having a diffusion barrier coating are also disclosed.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US10/644,523 | 2003-08-18 | ||
| US10/644,523 US7300702B2 (en) | 2003-08-18 | 2003-08-18 | Diffusion barrier coating for Si-based components |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| WO2005069353A2 WO2005069353A2 (en) | 2005-07-28 |
| WO2005069353A3 true WO2005069353A3 (en) | 2005-10-06 |
Family
ID=34194117
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PCT/US2004/026665 WO2005069353A2 (en) | 2003-08-18 | 2004-08-18 | DIFFUSION BARRIER COATING FOR Si-BASED COMPONENTS |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US7300702B2 (en) |
| WO (1) | WO2005069353A2 (en) |
Families Citing this family (29)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20040234782A1 (en) * | 2003-05-22 | 2004-11-25 | Sun Ellen Y. | Environmental barrier coating for silicon based substrates |
| US7115319B2 (en) * | 2003-10-08 | 2006-10-03 | Honeywell International, Inc. | Braze-based protective coating for silicon nitride |
| US20070003416A1 (en) * | 2005-06-30 | 2007-01-04 | General Electric Company | Niobium silicide-based turbine components, and related methods for laser deposition |
| EP1996341B1 (en) * | 2006-02-20 | 2018-09-26 | Kang N. Lee | Article including enviromental barrier coating system |
| US7763356B2 (en) | 2006-03-13 | 2010-07-27 | United Technologies Corporation | Bond coating and thermal barrier compositions, processes for applying both, and their coated articles |
| US7993704B2 (en) * | 2007-12-05 | 2011-08-09 | Honeywell International Inc. | Protective coating systems for gas turbine engine applications and methods for fabricating the same |
| US20100154425A1 (en) * | 2008-12-24 | 2010-06-24 | United Technologies Corporation | Strain tolerant thermal barrier coating system |
| US20110097589A1 (en) * | 2009-10-28 | 2011-04-28 | General Electric Company | Article for high temperature service |
| US8980434B2 (en) * | 2011-12-16 | 2015-03-17 | Wisconsin Alumni Research Foundation | Mo—Si—B—based coatings for ceramic base substrates |
| US10774682B2 (en) | 2012-06-22 | 2020-09-15 | The United States of America as Represented by the Administrator of National Aeromautics and Space Administration | Advanced high temperature and fatigue resistant environmental barrier coating bond coat systems for SiC/SiC ceramic matrix composites |
| BR112015021737A2 (en) * | 2013-03-05 | 2017-07-18 | Gen Electric | high temperature operable ceramic matrix composite and method for manufacturing a high temperature operable turbine engine component |
| US10093810B2 (en) | 2013-03-15 | 2018-10-09 | General Electric Company | Composite coatings and methods therefor |
| US10094236B2 (en) * | 2013-03-15 | 2018-10-09 | General Electric Company | Recession resistant ceramic matrix composites and environmental barrier coatings |
| WO2014204480A1 (en) * | 2013-06-21 | 2014-12-24 | United States Of America, As Represented By The Administrator Of The National Aeronautics And Space Administration | Environmental barrier coating bond coat systems |
| WO2015147960A1 (en) * | 2014-01-14 | 2015-10-01 | United Technologies Corporation | Silicon oxycarbide environmental barrier coating |
| US10047614B2 (en) * | 2014-10-09 | 2018-08-14 | Rolls-Royce Corporation | Coating system including alternating layers of amorphous silica and amorphous silicon nitride |
| EP3070073B1 (en) * | 2015-03-19 | 2019-09-18 | Rolls-Royce Corporation | Diffusion barrier layers for ceramic matrix composites |
| US10604454B1 (en) | 2016-06-16 | 2020-03-31 | United States Of America As Represented By The Administrator Of National Aeronautics And Space Administration | Advanced high temperature environmental barrier coating for SiC/SiC ceramic matrix composites |
| US11958786B1 (en) | 2016-12-05 | 2024-04-16 | United States Government Administrator Of Nasa | Calcium-magnesium aluminosilicate (CMAS) resistant thermal and environmental barrier coatings |
| CA3002295A1 (en) | 2017-06-21 | 2018-12-21 | Rolls-Royce Corporation | Impurity barrier layer for ceramic matrix composite substrate |
| US11976013B2 (en) | 2017-09-27 | 2024-05-07 | Rolls-Royce Corporation | Composite coating layer for ceramic matrix composite substrate |
| US12091368B2 (en) | 2018-11-30 | 2024-09-17 | Rolls-Royce Corporation | Reaction barrier layer for environmental barrier coating |
| US11479515B2 (en) | 2018-12-21 | 2022-10-25 | General Electric Company | EBC with mullite bondcoat that includes an oxygen getter phase |
| US10927046B2 (en) | 2018-12-21 | 2021-02-23 | General Electric Company | EBC with mullite bondcoat having a non-oxide silicon ceramic |
| CN114507839B (en) * | 2020-10-28 | 2023-11-28 | 中国科学院理化技术研究所 | CMAS erosion resistant thermal barrier coating material and preparation process thereof |
| US11624289B2 (en) | 2021-04-21 | 2023-04-11 | Rolls-Royce Corporation | Barrier layer and surface preparation thereof |
| CN114085098B (en) * | 2021-11-26 | 2023-02-28 | 云南警官学院 | Corrosion-resistant, sintering-resistant and high-temperature creep-resistant alumina composite ceramic and preparation method thereof |
| CN114605173B (en) * | 2022-04-18 | 2023-02-03 | 中南大学 | Zirconium silicate-high alumina glass/HTBS high-entropy ceramic coating resistant to ablation and thermal shock and its preparation method and application |
| CN117535000A (en) * | 2023-12-28 | 2024-02-09 | 昆明理工大学 | Fire retardant coating and preparation method thereof |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5736198A (en) * | 1993-09-20 | 1998-04-07 | Hitachi, Ltd. | Self-recoverable covering material and method for fabricating the same |
| EP1187191A2 (en) * | 2000-08-27 | 2002-03-13 | Infineon Technologies AG | SOI substrate with semiconductor circuit therein and method of manufacturing same |
| US6475928B1 (en) * | 1997-07-15 | 2002-11-05 | France Telecom | Process for depositing a Ta2O5 dielectric layer |
Family Cites Families (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5499905A (en) * | 1988-02-05 | 1996-03-19 | Siemens Aktiengesellschaft | Metallic component of a gas turbine installation having protective coatings |
| US5738198A (en) * | 1994-01-21 | 1998-04-14 | Luk Getriebe-Systeme Gmbh | Friction element for use in clutches |
| US5585136A (en) * | 1995-03-22 | 1996-12-17 | Queen's University At Kingston | Method for producing thick ceramic films by a sol gel coating process |
| US6121133A (en) * | 1997-08-22 | 2000-09-19 | Micron Technology, Inc. | Isolation using an antireflective coating |
| DE59802578D1 (en) * | 1997-11-03 | 2002-01-31 | Siemens Ag | PRODUCT DESIGNED FOR HOT GAS APPLICATION AND METHOD FOR PRODUCING A COATING FOR THIS PRODUCT |
| US6558998B2 (en) * | 1998-06-15 | 2003-05-06 | Marc Belleville | SOI type integrated circuit with a decoupling capacity and process for embodiment of such a circuit |
| US6306515B1 (en) * | 1998-08-12 | 2001-10-23 | Siemens Westinghouse Power Corporation | Thermal barrier and overlay coating systems comprising composite metal/metal oxide bond coating layers |
| US6168875B1 (en) * | 1998-10-02 | 2001-01-02 | Asea Brown Boveri Ag | Coatings for turbine components |
| US6071622A (en) * | 1998-10-30 | 2000-06-06 | Beesabathina; Durga Prasad | Stabilized two-phase-glass diffusion barrier |
| US6294807B1 (en) * | 1999-02-26 | 2001-09-25 | Agere Systems Guardian Corp. | Semiconductor device structure including a tantalum pentoxide layer sandwiched between silicon nitride layers |
| US6296941B1 (en) * | 1999-04-15 | 2001-10-02 | General Electric Company | Silicon based substrate with yttrium silicate environmental/thermal barrier layer |
| US6335105B1 (en) * | 1999-06-21 | 2002-01-01 | General Electric Company | Ceramic superalloy articles |
| US6207295B1 (en) * | 1999-07-13 | 2001-03-27 | General Electric Company | Article with tailorable high temperature coating |
| US6582779B2 (en) * | 1999-08-11 | 2003-06-24 | Alliedsignal, Inc. | Silicon nitride components with protective coating |
| US6645649B2 (en) * | 2000-10-31 | 2003-11-11 | Kyocera Corporation | Surface-coated sintered body of silicon nitride |
| US6607852B2 (en) * | 2001-06-27 | 2003-08-19 | General Electric Company | Environmental/thermal barrier coating system with silica diffusion barrier layer |
| US6759151B1 (en) * | 2002-05-22 | 2004-07-06 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Multilayer article characterized by low coefficient of thermal expansion outer layer |
| US6733908B1 (en) * | 2002-07-08 | 2004-05-11 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Multilayer article having stabilized zirconia outer layer and chemical barrier layer |
| US7005191B2 (en) * | 2003-05-01 | 2006-02-28 | Wisconsin Alumni Research Foundation | Oxidation resistant coatings for ultra high temperature transition metals and transition metal alloys |
-
2003
- 2003-08-18 US US10/644,523 patent/US7300702B2/en not_active Expired - Lifetime
-
2004
- 2004-08-18 WO PCT/US2004/026665 patent/WO2005069353A2/en active Application Filing
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5736198A (en) * | 1993-09-20 | 1998-04-07 | Hitachi, Ltd. | Self-recoverable covering material and method for fabricating the same |
| US6475928B1 (en) * | 1997-07-15 | 2002-11-05 | France Telecom | Process for depositing a Ta2O5 dielectric layer |
| EP1187191A2 (en) * | 2000-08-27 | 2002-03-13 | Infineon Technologies AG | SOI substrate with semiconductor circuit therein and method of manufacturing same |
Non-Patent Citations (1)
| Title |
|---|
| JOSEPH BAIXERAS: "influence of rapid thermal annealing parameters on properties of YBaCuO thin films sputtered on silicon-based substrates", SPIE,HIGH TC SUPERCONDUCTIVITY: THIN FILMS AND APPLICATIONS, 1990, paris,fr, pages 185 - 197, XP002335434 * |
Also Published As
| Publication number | Publication date |
|---|---|
| US20050042461A1 (en) | 2005-02-24 |
| WO2005069353A2 (en) | 2005-07-28 |
| US7300702B2 (en) | 2007-11-27 |
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