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WO2004091792A3 - Microfluidic device with ultraphobic surfaces - Google Patents

Microfluidic device with ultraphobic surfaces Download PDF

Info

Publication number
WO2004091792A3
WO2004091792A3 PCT/US2004/011580 US2004011580W WO2004091792A3 WO 2004091792 A3 WO2004091792 A3 WO 2004091792A3 US 2004011580 W US2004011580 W US 2004011580W WO 2004091792 A3 WO2004091792 A3 WO 2004091792A3
Authority
WO
WIPO (PCT)
Prior art keywords
asperities
microfluidic device
ultraphobic
line density
equal
Prior art date
Application number
PCT/US2004/011580
Other languages
French (fr)
Other versions
WO2004091792A2 (en
Inventor
Charles W Extrand
Michael Wright
Original Assignee
Entegris Inc
Charles W Extrand
Michael Wright
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US10/454,742 external-priority patent/US6845788B2/en
Priority claimed from US10/652,586 external-priority patent/US6923216B2/en
Application filed by Entegris Inc, Charles W Extrand, Michael Wright filed Critical Entegris Inc
Priority to EP04759543A priority Critical patent/EP1618035A4/en
Priority to JP2006510056A priority patent/JP2006523533A/en
Publication of WO2004091792A2 publication Critical patent/WO2004091792A2/en
Publication of WO2004091792A3 publication Critical patent/WO2004091792A3/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L9/00—Supporting devices; Holding devices
    • B01L9/52—Supports specially adapted for flat sample carriers, e.g. for plates, slides, chips
    • B01L9/527—Supports specially adapted for flat sample carriers, e.g. for plates, slides, chips for microfluidic devices, e.g. used for lab-on-a-chip
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B63—SHIPS OR OTHER WATERBORNE VESSELS; RELATED EQUIPMENT
    • B63B—SHIPS OR OTHER WATERBORNE VESSELS; EQUIPMENT FOR SHIPPING 
    • B63B1/00—Hydrodynamic or hydrostatic features of hulls or of hydrofoils
    • B63B1/32—Other means for varying the inherent hydrodynamic characteristics of hulls
    • B63B1/34—Other means for varying the inherent hydrodynamic characteristics of hulls by reducing surface friction
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • B01L3/502715—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by interfacing components, e.g. fluidic, electrical, optical or mechanical interfaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • B01L3/502746—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by the means for controlling flow resistance, e.g. flow controllers, baffles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B17/00—Methods preventing fouling
    • B08B17/02—Preventing deposition of fouling or of dust
    • B08B17/06—Preventing deposition of fouling or of dust by giving articles subject to fouling a special shape or arrangement
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B17/00—Methods preventing fouling
    • B08B17/02—Preventing deposition of fouling or of dust
    • B08B17/06—Preventing deposition of fouling or of dust by giving articles subject to fouling a special shape or arrangement
    • B08B17/065—Preventing deposition of fouling or of dust by giving articles subject to fouling a special shape or arrangement the surface having a microscopic surface pattern to achieve the same effect as a lotus flower
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B64—AIRCRAFT; AVIATION; COSMONAUTICS
    • B64B—LIGHTER-THAN AIR AIRCRAFT
    • B64B1/00—Lighter-than-air aircraft
    • B64B1/06—Rigid airships; Semi-rigid airships
    • B64B1/14—Outer covering
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B64—AIRCRAFT; AVIATION; COSMONAUTICS
    • B64C—AEROPLANES; HELICOPTERS
    • B64C1/00—Fuselages; Constructional features common to fuselages, wings, stabilising surfaces or the like
    • B64C1/38—Constructions adapted to reduce effects of aerodynamic or other external heating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82B—NANOSTRUCTURES FORMED BY MANIPULATION OF INDIVIDUAL ATOMS, MOLECULES, OR LIMITED COLLECTIONS OF ATOMS OR MOLECULES AS DISCRETE UNITS; MANUFACTURE OR TREATMENT THEREOF
    • B82B1/00—Nanostructures formed by manipulation of individual atoms or molecules, or limited collections of atoms or molecules as discrete units
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15D—FLUID DYNAMICS, i.e. METHODS OR MEANS FOR INFLUENCING THE FLOW OF GASES OR LIQUIDS
    • F15D1/00—Influencing flow of fluids
    • F15D1/02—Influencing flow of fluids in pipes or conduits
    • F15D1/06—Influencing flow of fluids in pipes or conduits by influencing the boundary layer
    • F15D1/065—Whereby an element is dispersed in a pipe over the whole length or whereby several elements are regularly distributed in a pipe
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L13/00—Cleaning or rinsing apparatus
    • B01L13/02—Cleaning or rinsing apparatus for receptacle or instruments
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00—Additional constructional details
    • B01L2300/16—Surface properties and coatings
    • B01L2300/161—Control and use of surface tension forces, e.g. hydrophobic, hydrophilic
    • B01L2300/165—Specific details about hydrophobic, oleophobic surfaces
    • B01L2300/166—Suprahydrophobic; Ultraphobic; Lotus-effect
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2400/00—Moving or stopping fluids
    • B01L2400/08—Regulating or influencing the flow resistance
    • B01L2400/084—Passive control of flow resistance
    • B01L2400/086—Passive control of flow resistance using baffles or other fixed flow obstructions
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L9/00—Supporting devices; Holding devices
    • B01L9/52—Supports specially adapted for flat sample carriers, e.g. for plates, slides, chips
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles
    • B65G2201/0235—Containers
    • B65G2201/0258—Trays, totes or bins
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Nanotechnology (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • Clinical Laboratory Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Analytical Chemistry (AREA)
  • Dispersion Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Hematology (AREA)
  • Aviation & Aerospace Engineering (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Materials Engineering (AREA)
  • Composite Materials (AREA)
  • General Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Ocean & Marine Engineering (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Micromachines (AREA)

Abstract

A microfluidic device having durable ultraphobic fluid contact surfaces in the fluid flow channels of the device. The ultraphobic surface generally includes a substrate portion with a multiplicity of projecting regularly shaped microscale or nanoscale asperities disposed in a regular array so that the surface has a predetermined contact line density equal to or greater than a critical contact line density, and so that the ratio of the cross-sectional dimension of the asperities to the spacing dimension of the asperities is less than or equal to 0.1.
PCT/US2004/011580 2003-04-15 2004-04-15 Microfluidic device with ultraphobic surfaces WO2004091792A2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
EP04759543A EP1618035A4 (en) 2003-04-15 2004-04-15 Microfluidic device with ultraphobic surfaces
JP2006510056A JP2006523533A (en) 2003-04-15 2004-04-15 Microfluidic device with super water-repellent surface

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
US46296303P 2003-04-15 2003-04-15
US60/462,963 2003-04-15
US10/454,742 2003-06-03
US10/454,742 US6845788B2 (en) 2003-04-15 2003-06-03 Fluid handling component with ultraphobic surfaces
US10/652,586 2003-08-29
US10/652,586 US6923216B2 (en) 2003-04-15 2003-08-29 Microfluidic device with ultraphobic surfaces

Publications (2)

Publication Number Publication Date
WO2004091792A2 WO2004091792A2 (en) 2004-10-28
WO2004091792A3 true WO2004091792A3 (en) 2005-06-09

Family

ID=33303890

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2004/011580 WO2004091792A2 (en) 2003-04-15 2004-04-15 Microfluidic device with ultraphobic surfaces

Country Status (5)

Country Link
EP (1) EP1618035A4 (en)
JP (1) JP2006523533A (en)
KR (1) KR20060003001A (en)
MY (1) MY135712A (en)
WO (1) WO2004091792A2 (en)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004103891A1 (en) 2003-05-23 2004-12-02 Gyros Patent Ab Fluidic functions based on non-wettable surfaces
US20070031639A1 (en) * 2005-08-03 2007-02-08 General Electric Company Articles having low wettability and methods for making
US20070140913A1 (en) * 2005-12-15 2007-06-21 Cohen David S Rough channel microfluidic devices
KR101603489B1 (en) * 2008-09-22 2016-03-17 한국표준과학연구원 Fluid Transportation Unit
EP2172260A1 (en) * 2008-09-29 2010-04-07 Corning Incorporated Multiple flow path microfluidic devices
KR101533277B1 (en) * 2008-12-09 2015-07-03 삼성전자주식회사 An image forming apparatus having a developer contact medium on which a nano roughness is formed
WO2010122720A1 (en) * 2009-04-20 2010-10-28 パナソニック株式会社 Flow path device
JP5322173B2 (en) * 2009-09-07 2013-10-23 国立大学法人 宮崎大学 Formation method of fine channel
EP2569162B1 (en) * 2010-05-10 2014-10-01 Hewlett Packard Development Company, L.P. Liquid supply
KR101336819B1 (en) 2011-11-11 2013-12-04 부산대학교 산학협력단 method for designing super-hydrophobic surface structures
KR101586256B1 (en) * 2014-06-02 2016-01-18 서울대학교 산학협력단 Apparatus and method for mixing flow
JP7119308B2 (en) * 2017-08-09 2022-08-17 コニカミノルタ株式会社 Microfluidic device and image forming apparatus
KR102747379B1 (en) * 2017-12-22 2024-12-26 켈라 미카엘 오 Cladding to reduce viscosity drag

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4044797A (en) * 1974-11-25 1977-08-30 Hitachi, Ltd. Heat transfer pipe
US6371414B1 (en) * 1999-07-16 2002-04-16 Lockheed Martin Corporation System and method for manipulating and controlling fluid flow over a surface
US20040081760A1 (en) * 2001-08-02 2004-04-29 Siemens Westinghouse Power Corporation Segmented thermal barrier coating and method of manufacturing the same

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5674592A (en) * 1995-05-04 1997-10-07 Minnesota Mining And Manufacturing Company Functionalized nanostructured films
DE19914007A1 (en) * 1999-03-29 2000-10-05 Creavis Tech & Innovation Gmbh Structured liquid-repellent surfaces with locally defined liquid-wetting parts
AU2002239641A1 (en) * 2000-12-18 2002-07-01 The Regents Of The University Of California Microchannels for efficient fluid transport

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4044797A (en) * 1974-11-25 1977-08-30 Hitachi, Ltd. Heat transfer pipe
US6371414B1 (en) * 1999-07-16 2002-04-16 Lockheed Martin Corporation System and method for manipulating and controlling fluid flow over a surface
US20040081760A1 (en) * 2001-08-02 2004-04-29 Siemens Westinghouse Power Corporation Segmented thermal barrier coating and method of manufacturing the same

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of EP1618035A4 *

Also Published As

Publication number Publication date
KR20060003001A (en) 2006-01-09
EP1618035A4 (en) 2006-06-14
MY135712A (en) 2008-06-30
EP1618035A2 (en) 2006-01-25
JP2006523533A (en) 2006-10-19
WO2004091792A2 (en) 2004-10-28

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