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WO2003036229A1 - Surface shape measuring method and device therefor - Google Patents

Surface shape measuring method and device therefor Download PDF

Info

Publication number
WO2003036229A1
WO2003036229A1 PCT/JP2001/009416 JP0109416W WO03036229A1 WO 2003036229 A1 WO2003036229 A1 WO 2003036229A1 JP 0109416 W JP0109416 W JP 0109416W WO 03036229 A1 WO03036229 A1 WO 03036229A1
Authority
WO
WIPO (PCT)
Prior art keywords
face
peak position
band
optical path
measured
Prior art date
Application number
PCT/JP2001/009416
Other languages
French (fr)
Japanese (ja)
Inventor
Akira Hirabayashi
Katsuichi Kitagawa
Original Assignee
Toray Engineering Co., Ltd.
Yugen Kaisha Yamaguchi Tlo
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toray Engineering Co., Ltd., Yugen Kaisha Yamaguchi Tlo filed Critical Toray Engineering Co., Ltd.
Priority to JP2003538684A priority Critical patent/JPWO2003036229A1/en
Priority to PCT/JP2001/009416 priority patent/WO2003036229A1/en
Publication of WO2003036229A1 publication Critical patent/WO2003036229A1/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02056—Passive reduction of errors
    • G01B9/02057—Passive reduction of errors by using common path configuration, i.e. reference and object path almost entirely overlapping
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/0209—Low-coherence interferometers

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

A reference face (15) and a face (31) to be measured are irradiated with a white light from a white light source (10) to make an optical path difference. A CPU (20) samples the intensity value of an interference light varying at a specific portion of the face (31) because of the optical path difference, at sampling intervals of a product M•Δ of Δ = (λC2 - λB2)/4λC and a natural number M where λC is the center wavelength of a specific frequency band restricted by a band-pass filter (11) and 2 λB is the band width of the wavelength. In the case of a spectral distribution symmetric with respect to a center wave number kC of the specific frequency band, a characteristic function having a peak position which is identical to the peak position of the interference light is inferred. The irregular shape of the face (31) is measured by determining the height of the peak position of the characteristic function.
PCT/JP2001/009416 2001-10-25 2001-10-25 Surface shape measuring method and device therefor WO2003036229A1 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2003538684A JPWO2003036229A1 (en) 2001-10-25 2001-10-25 Surface shape measuring method and apparatus
PCT/JP2001/009416 WO2003036229A1 (en) 2001-10-25 2001-10-25 Surface shape measuring method and device therefor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2001/009416 WO2003036229A1 (en) 2001-10-25 2001-10-25 Surface shape measuring method and device therefor

Publications (1)

Publication Number Publication Date
WO2003036229A1 true WO2003036229A1 (en) 2003-05-01

Family

ID=11737875

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2001/009416 WO2003036229A1 (en) 2001-10-25 2001-10-25 Surface shape measuring method and device therefor

Country Status (2)

Country Link
JP (1) JPWO2003036229A1 (en)
WO (1) WO2003036229A1 (en)

Cited By (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1300550C (en) * 2004-03-22 2007-02-14 财团法人工业技术研究院 Device and method for measuring surface profile of object to be measured
WO2007044786A2 (en) * 2005-10-11 2007-04-19 Zygo Corporation Interferometry method and system including spectral decomposition
CN100414251C (en) * 2005-10-31 2008-08-27 致茂电子股份有限公司 Method for repairing dark spot area of surface topography
US7428057B2 (en) 2005-01-20 2008-09-23 Zygo Corporation Interferometer for determining characteristics of an object surface, including processing and calibration
US7456975B2 (en) 2003-09-15 2008-11-25 Zygo Corporation Methods and systems for interferometric analysis of surfaces and related applications
US7466429B2 (en) 2003-03-06 2008-12-16 Zygo Corporation Profiling complex surface structures using scanning interferometry
US7522288B2 (en) 2006-07-21 2009-04-21 Zygo Corporation Compensation of systematic effects in low coherence interferometry
US7619746B2 (en) 2007-07-19 2009-11-17 Zygo Corporation Generating model signals for interferometry
US20100128283A1 (en) * 2008-11-26 2010-05-27 Zygo Corporation Interferometric systems and methods featuring spectral analysis of unevenly sampled data
US9025162B2 (en) 2007-01-31 2015-05-05 Zygo Corporation Interferometry for lateral metrology
US9044164B2 (en) 2008-12-23 2015-06-02 Carl Zeiss Meditec Ag Device for swept source optical coherence domain reflectometry
JP2016090520A (en) * 2014-11-10 2016-05-23 株式会社ミツトヨ Non-contact surface shape measurement method and device using white light interferometer optical head
US9451213B2 (en) 2010-07-23 2016-09-20 Toyota Jidosha Kabushiki Kaisha Distance measuring apparatus and distance measuring method
CN108291802A (en) * 2015-11-12 2018-07-17 Ntn株式会社 Height detecting device and the applying device for carrying the height detecting device
CN108917641A (en) * 2018-05-15 2018-11-30 广东工业大学 Exemplar in-profile detection method and system based on the synthesis of laser wave number
US11326871B2 (en) 2015-11-12 2022-05-10 Ntn Corporation Height detection apparatus and coating apparatus equipped with the same

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5471303A (en) * 1994-04-29 1995-11-28 Wyko Corporation Combination of white-light scanning and phase-shifting interferometry for surface profile measurements
JPH09318329A (en) * 1996-05-31 1997-12-12 Tokyo Seimitsu Co Ltd Method and apparatus for measuring non-contact surface shape
US6028670A (en) * 1998-01-19 2000-02-22 Zygo Corporation Interferometric methods and systems using low coherence illumination
JP2001066122A (en) * 1999-08-27 2001-03-16 Rikogaku Shinkokai Surface shape measuring method and its device

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5471303A (en) * 1994-04-29 1995-11-28 Wyko Corporation Combination of white-light scanning and phase-shifting interferometry for surface profile measurements
JPH09318329A (en) * 1996-05-31 1997-12-12 Tokyo Seimitsu Co Ltd Method and apparatus for measuring non-contact surface shape
US6028670A (en) * 1998-01-19 2000-02-22 Zygo Corporation Interferometric methods and systems using low coherence illumination
JP2001066122A (en) * 1999-08-27 2001-03-16 Rikogaku Shinkokai Surface shape measuring method and its device

Cited By (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7466429B2 (en) 2003-03-06 2008-12-16 Zygo Corporation Profiling complex surface structures using scanning interferometry
US7586620B2 (en) 2003-09-15 2009-09-08 Zygo Corporation Methods and systems for interferometric analysis of surfaces and related applications
US7456975B2 (en) 2003-09-15 2008-11-25 Zygo Corporation Methods and systems for interferometric analysis of surfaces and related applications
CN1300550C (en) * 2004-03-22 2007-02-14 财团法人工业技术研究院 Device and method for measuring surface profile of object to be measured
US7616323B2 (en) 2005-01-20 2009-11-10 Zygo Corporation Interferometer with multiple modes of operation for determining characteristics of an object surface
US7428057B2 (en) 2005-01-20 2008-09-23 Zygo Corporation Interferometer for determining characteristics of an object surface, including processing and calibration
US7446882B2 (en) 2005-01-20 2008-11-04 Zygo Corporation Interferometer for determining characteristics of an object surface
US7636168B2 (en) 2005-10-11 2009-12-22 Zygo Corporation Interferometry method and system including spectral decomposition
WO2007044786A2 (en) * 2005-10-11 2007-04-19 Zygo Corporation Interferometry method and system including spectral decomposition
WO2007044786A3 (en) * 2005-10-11 2008-01-10 Zygo Corp Interferometry method and system including spectral decomposition
CN100414251C (en) * 2005-10-31 2008-08-27 致茂电子股份有限公司 Method for repairing dark spot area of surface topography
US7522288B2 (en) 2006-07-21 2009-04-21 Zygo Corporation Compensation of systematic effects in low coherence interferometry
US9025162B2 (en) 2007-01-31 2015-05-05 Zygo Corporation Interferometry for lateral metrology
US7619746B2 (en) 2007-07-19 2009-11-17 Zygo Corporation Generating model signals for interferometry
US20100128283A1 (en) * 2008-11-26 2010-05-27 Zygo Corporation Interferometric systems and methods featuring spectral analysis of unevenly sampled data
US8120781B2 (en) * 2008-11-26 2012-02-21 Zygo Corporation Interferometric systems and methods featuring spectral analysis of unevenly sampled data
US8902431B2 (en) 2008-11-26 2014-12-02 Zygo Corporation Low coherence interferometry with scan error correction
US9044164B2 (en) 2008-12-23 2015-06-02 Carl Zeiss Meditec Ag Device for swept source optical coherence domain reflectometry
US9451213B2 (en) 2010-07-23 2016-09-20 Toyota Jidosha Kabushiki Kaisha Distance measuring apparatus and distance measuring method
JP2016090520A (en) * 2014-11-10 2016-05-23 株式会社ミツトヨ Non-contact surface shape measurement method and device using white light interferometer optical head
CN108291802A (en) * 2015-11-12 2018-07-17 Ntn株式会社 Height detecting device and the applying device for carrying the height detecting device
CN108291802B (en) * 2015-11-12 2020-09-08 Ntn株式会社 Height detection device and coating device equipped with the same
US11326871B2 (en) 2015-11-12 2022-05-10 Ntn Corporation Height detection apparatus and coating apparatus equipped with the same
US11402195B2 (en) 2015-11-12 2022-08-02 Ntn Corporation Height detection apparatus and coating apparatus equipped with the same
CN108917641A (en) * 2018-05-15 2018-11-30 广东工业大学 Exemplar in-profile detection method and system based on the synthesis of laser wave number

Also Published As

Publication number Publication date
JPWO2003036229A1 (en) 2005-02-17

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