WO2003034452A1 - Condensateur a capacitance variable - Google Patents

Condensateur a capacitance variable Download PDF

Info

Publication number: WO2003034452A1
Authority: WO; WIPO (PCT)
Prior art keywords: variable capacitance; capacitor device; capacitance capacitor; capacitor electrodes; conductor
Prior art date: 2001-10-18

Application number

PCT/JP2002/010485

Other languages

English (en)

French (fr)

Inventor

Norikazu Nakayama

Original Assignee

Sony Corporation

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2001-10-18

Filing date

2002-10-09

Publication date

2003-04-24

2002-10-09 Application filed by Sony Corporation filed Critical Sony Corporation

2002-10-09 Priority to KR10-2003-7008067A priority Critical patent/KR20040049295A/ko

2002-10-09 Priority to US10/450,867 priority patent/US6885537B2/en

2003-04-24 Publication of WO2003034452A1 publication Critical patent/WO2003034452A1/ja

2005-04-13 Priority to US11/104,908 priority patent/US7002787B2/en

2005-04-14 Priority to US11/107,002 priority patent/US6970340B2/en

2005-04-23 Priority to US11/112,686 priority patent/US6961228B2/en

Links

239000003990 capacitor Substances 0.000 title abstract 6
239000004020 conductor Substances 0.000 abstract 2
239000000758 substrate Substances 0.000 abstract 2
239000011810 insulating material Substances 0.000 abstract 1

Classifications

- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G5/00—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture
- H01G5/16—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture using variation of distance between electrodes
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G5/00—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture
- H01G5/16—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture using variation of distance between electrodes
- H01G5/18—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture using variation of distance between electrodes due to change in inclination, e.g. by flexing, by spiral wrapping

Landscapes

Engineering & Computer Science (AREA)
Power Engineering (AREA)
Microelectronics & Electronic Packaging (AREA)
Micromachines (AREA)
Fixed Capacitors And Capacitor Manufacturing Machines (AREA)

PCT/JP2002/010485 2001-10-18 2002-10-09 Condensateur a capacitance variable WO2003034452A1 (fr)

Priority Applications (5)

Application Number	Priority Date	Filing Date	Title
KR10-2003-7008067A KR20040049295A (ko)	2001-10-18	2002-10-09	용량 가변형 캐패시터 장치
US10/450,867 US6885537B2 (en)	2001-10-18	2002-10-09	Capacitor apparatus of the capacity variable type
US11/104,908 US7002787B2 (en)	2001-10-18	2005-04-13	Capacitor apparatus of the capacity variable type
US11/107,002 US6970340B2 (en)	2001-10-18	2005-04-14	Capacitor apparatus of the capacity variable type
US11/112,686 US6961228B2 (en)	2001-10-18	2005-04-23	Capacitor apparatus of the capacity variable type

Applications Claiming Priority (2)

Application Number	Priority Date	Filing Date	Title
JP2001-321026		2001-10-18
JP2001321026A JP3890952B2 (ja)	2001-10-18	2001-10-18	容量可変型キャパシタ装置

Related Child Applications (4)

Application Number	Title	Priority Date	Filing Date
US10450867 A-371-Of-International		2002-10-09
US11/104,908 Continuation US7002787B2 (en)	2001-10-18	2005-04-13	Capacitor apparatus of the capacity variable type
US11/107,002 Continuation US6970340B2 (en)	2001-10-18	2005-04-14	Capacitor apparatus of the capacity variable type
US11/112,686 Continuation US6961228B2 (en)	2001-10-18	2005-04-23	Capacitor apparatus of the capacity variable type

Publications (1)

Publication Number	Publication Date
WO2003034452A1 true WO2003034452A1 (fr)	2003-04-24

Family

ID=19138320

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
PCT/JP2002/010485 WO2003034452A1 (fr)	2001-10-18	2002-10-09	Condensateur a capacitance variable

Country Status (5)

Country	Link
US (4)	US6885537B2 (ja)
JP (1)	JP3890952B2 (ja)
KR (1)	KR20040049295A (ja)
CN (1)	CN1316525C (ja)
WO (1)	WO2003034452A1 (ja)

Cited By (1)

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KR100540820B1 (ko) *	2004-01-12	2006-01-11	엘지이노텍 주식회사	인버터의 커패시턴스 가변 방법

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KR100549003B1 (ko) *	2004-02-04	2006-02-02	삼성전자주식회사	넓은 튜닝 범위를 갖는 멤스 튜너블 커패시터 및 그것을제조하는 방법
EP1585219A1 (en)	2004-04-06	2005-10-12	Seiko Epson Corporation	A micro-flap type nano/micro mechanical device and fabrication method thereof
WO2005117042A1 (ja) *	2004-05-31	2005-12-08	Fujitsu Limited	可変キャパシタ及びその製造方法
US7657242B2 (en) *	2004-09-27	2010-02-02	Qualcomm Mems Technologies, Inc.	Selectable capacitance circuit
US7653371B2 (en) *	2004-09-27	2010-01-26	Qualcomm Mems Technologies, Inc.	Selectable capacitance circuit
US7345867B2 (en) *	2005-11-18	2008-03-18	Alps Electric Co., Ltd	Capacitive pressure sensor and method of manufacturing the same
US8194386B2 (en)	2005-12-22	2012-06-05	Epcos Ag	Arrangement of MEMS devices having series coupled capacitors
JP4905448B2 (ja)	2006-02-20	2012-03-28	富士通株式会社	半導体回路
US7907033B2 (en) *	2006-03-08	2011-03-15	Wispry, Inc.	Tunable impedance matching networks and tunable diplexer matching systems
US7454967B2 (en) *	2006-07-10	2008-11-25	Lv Sensors, Inc.	Signal conditioning methods and circuits for a capacitive sensing integrated tire pressure sensor
JP5232378B2 (ja)	2006-10-31	2013-07-10	株式会社アドバンテスト	可変容量素子、共振器および変調器
JP4910679B2 (ja) *	2006-12-21	2012-04-04	株式会社ニコン	可変キャパシタ、可変キャパシタ装置、高周波回路用フィルタ及び高周波回路
KR100947942B1 (ko) *	2007-12-10	2010-03-15	주식회사 동부하이텍	반도체 소자의 캐패시터, 그 형성 방법
US8362853B2 (en)	2009-06-19	2013-01-29	Qualcomm Incorporated	Tunable MEMS resonators
JP2011018831A (ja) *	2009-07-10	2011-01-27	Toshiba Corp	可変容量素子
JP2011044556A (ja) *	2009-08-20	2011-03-03	Toshiba Corp	プログラマブルアクチュエータ及びそのプログラミング方法
JP5204066B2 (ja) *	2009-09-16	2013-06-05	株式会社東芝	Ｍｅｍｓデバイス
JP5338615B2 (ja) *	2009-10-27	2013-11-13	富士通株式会社	可変容量デバイスおよび可変容量素子の駆動方法
WO2011058826A1 (ja) *	2009-11-11	2011-05-19	株式会社村田製作所	可変容量装置
WO2011092980A1 (ja) *	2010-01-28	2011-08-04	株式会社村田製作所	可変容量装置
CN102754172B (zh)	2010-02-08	2015-08-05	株式会社村田制作所	可变电容元件
JP5418316B2 (ja)	2010-03-11	2014-02-19	富士通株式会社	Ｍｅｍｓデバイス
JP5569689B2 (ja) *	2010-10-15	2014-08-13	ソニー株式会社	可変容量装置、アンテナモジュールおよび通信装置
WO2012056889A1 (ja) *	2010-10-29	2012-05-03	株式会社村田製作所	可変容量装置
KR101262606B1 (ko)	2011-11-24	2013-05-08	엘지이노텍 주식회사	커패시터 및 이의 제조방법
JP2013211650A (ja) *	2012-03-30	2013-10-10	Seiko Epson Corp	Ｍｅｍｓ振動子およびｍｅｍｓ振動子の製造方法
KR101359578B1 (ko) *	2012-06-27	2014-02-12	한국과학기술원	멤즈 가변 커패시터
KR101393787B1 (ko) *	2012-06-29	2014-05-12	엘지이노텍 주식회사	커패시터 및 이의 제조방법
JP6183957B2 (ja) *	2014-05-15	2017-08-23	日本電信電話株式会社	光変調装置
JP6515677B2 (ja) *	2014-07-24	2019-05-22	ソニー株式会社	コンタクト構造体、及び該コンタクト構造体を用いた生体試料用電気的測定装置
JP2016059191A (ja) *	2014-09-11	2016-04-21	ソニー株式会社	静電型デバイス
CN105712290B (zh) *	2014-12-04	2017-09-29	无锡华润上华半导体有限公司	Mems静电驱动器的制作方法
CN109081302B (zh) *	2018-07-13	2020-10-16	潍坊歌尔微电子有限公司	一种微通道加工方法、微通道
CN111750905B (zh) *	2019-03-29	2023-05-09	财团法人工业技术研究院	可调整感应电容值的微机电感测装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPH0982569A (ja) *	1995-09-20	1997-03-28	Murata Mfg Co Ltd	可変容量コンデンサ
JPH09153436A (ja) *	1995-11-30	1997-06-10	Murata Mfg Co Ltd	可変容量コンデンサ

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US5557495A (en) *	1994-09-29	1996-09-17	Harris Corporation	Variable capacitor and method
US5982608A (en) *	1998-01-13	1999-11-09	Stmicroelectronics, Inc.	Semiconductor variable capacitor
US6242989B1 (en) *	1998-09-12	2001-06-05	Agere Systems Guardian Corp.	Article comprising a multi-port variable capacitor
US6396677B1 (en) *	2000-05-17	2002-05-28	Xerox Corporation	Photolithographically-patterned variable capacitor structures and method of making
US6377438B1 (en) *	2000-10-23	2002-04-23	Mcnc	Hybrid microelectromechanical system tunable capacitor and associated fabrication methods
US6856499B2 (en) *	2003-03-28	2005-02-15	Northrop Gurmman Corporation	MEMS variable inductor and capacitor

2001
- 2001-10-18 JP JP2001321026A patent/JP3890952B2/ja not_active Expired - Fee Related
2002
- 2002-10-09 US US10/450,867 patent/US6885537B2/en not_active Expired - Fee Related
- 2002-10-09 CN CNB028031881A patent/CN1316525C/zh not_active Expired - Fee Related
- 2002-10-09 WO PCT/JP2002/010485 patent/WO2003034452A1/ja active Application Filing
- 2002-10-09 KR KR10-2003-7008067A patent/KR20040049295A/ko not_active Abandoned
2005
- 2005-04-13 US US11/104,908 patent/US7002787B2/en not_active Expired - Fee Related
- 2005-04-14 US US11/107,002 patent/US6970340B2/en not_active Expired - Fee Related
- 2005-04-23 US US11/112,686 patent/US6961228B2/en not_active Expired - Fee Related

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPH0982569A (ja) *	1995-09-20	1997-03-28	Murata Mfg Co Ltd	可変容量コンデンサ
JPH09153436A (ja) *	1995-11-30	1997-06-10	Murata Mfg Co Ltd	可変容量コンデンサ

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
KR100540820B1 (ko) *	2004-01-12	2006-01-11	엘지이노텍 주식회사	인버터의 커패시턴스 가변 방법

Also Published As

Publication number	Publication date
US20050190526A1 (en)	2005-09-01
KR20040049295A (ko)	2004-06-11
US20040075158A1 (en)	2004-04-22
US20050254195A1 (en)	2005-11-17
US7002787B2 (en)	2006-02-21
JP3890952B2 (ja)	2007-03-07
JP2003124063A (ja)	2003-04-25
US6970340B2 (en)	2005-11-29
US6961228B2 (en)	2005-11-01
US20050180089A1 (en)	2005-08-18
CN1316525C (zh)	2007-05-16
US6885537B2 (en)	2005-04-26
CN1476619A (zh)	2004-02-18

Legal Events

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2003-04-24	AK	Designated states	Kind code of ref document: A1 Designated state(s): CN KR
2003-06-12	WWE	Wipo information: entry into national phase	Ref document number: 028031881 Country of ref document: CN
2003-06-17	WWE	Wipo information: entry into national phase	Ref document number: 1020037008067 Country of ref document: KR
2003-11-24	WWE	Wipo information: entry into national phase	Ref document number: 10450867 Country of ref document: US
2004-06-11	WWP	Wipo information: published in national office	Ref document number: 1020037008067 Country of ref document: KR

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WO2003034452A1 - Condensateur a capacitance variable - Google Patents

Info

Links

Classifications

Landscapes

Priority Applications (5)

Applications Claiming Priority (2)

Related Child Applications (4)

Publications (1)

Family

ID=19138320

Family Applications (1)

Country Status (5)

Cited By (1)

Families Citing this family (34)

Citations (2)

Family Cites Families (6)

Patent Citations (2)

Cited By (1)

Also Published As

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