WO2003031912A3 - Gyroscope a diapason - Google Patents
Gyroscope a diapason Download PDFInfo
- Publication number
- WO2003031912A3 WO2003031912A3 PCT/US2002/031721 US0231721W WO03031912A3 WO 2003031912 A3 WO2003031912 A3 WO 2003031912A3 US 0231721 W US0231721 W US 0231721W WO 03031912 A3 WO03031912 A3 WO 03031912A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- proof mass
- tuning fork
- fork gyroscope
- sense plate
- gyroscope
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6835—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/19—Details of hybrid assemblies other than the semiconductor or other solid state devices to be connected
- H01L2924/1901—Structure
- H01L2924/1904—Component type
- H01L2924/19041—Component type being a capacitor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/30—Technical effects
- H01L2924/301—Electrical effects
- H01L2924/30105—Capacitance
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/30—Technical effects
- H01L2924/301—Electrical effects
- H01L2924/3025—Electromagnetic shielding
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Gyroscopes (AREA)
Abstract
Applications Claiming Priority (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US32745001P | 2001-10-05 | 2001-10-05 | |
US32743401P | 2001-10-05 | 2001-10-05 | |
US60/327,450 | 2001-10-05 | ||
US60/327,434 | 2001-10-05 | ||
US10/004,145 | 2001-10-23 | ||
US10/004,145 US6548321B1 (en) | 2001-10-23 | 2001-10-23 | Method of anodically bonding a multilayer device with a free mass |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2003031912A2 WO2003031912A2 (fr) | 2003-04-17 |
WO2003031912A3 true WO2003031912A3 (fr) | 2004-03-04 |
Family
ID=27357574
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2002/031721 WO2003031912A2 (fr) | 2001-10-05 | 2002-10-04 | Gyroscope a diapason |
Country Status (2)
Country | Link |
---|---|
US (2) | US6862934B2 (fr) |
WO (1) | WO2003031912A2 (fr) |
Families Citing this family (29)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7093370B2 (en) | 2002-08-01 | 2006-08-22 | The Charles Stark Draper Laboratory, Inc. | Multi-gimbaled borehole navigation system |
WO2004013573A2 (fr) | 2002-08-01 | 2004-02-12 | The Charles Stark Draper Laboratory, Inc. | Systeme de navigation dans un trou de sondage |
JP2004317484A (ja) * | 2003-03-31 | 2004-11-11 | Denso Corp | 振動型角速度センサ |
US6918186B2 (en) | 2003-08-01 | 2005-07-19 | The Charles Stark Draper Laboratory, Inc. | Compact navigation system and method |
US7426861B2 (en) * | 2005-06-15 | 2008-09-23 | The Charles Stark Draper Laboratory, Inc. | Tuning fork gyroscopes, accelerometers, and other sensors with improved scale factor |
US20070114643A1 (en) * | 2005-11-22 | 2007-05-24 | Honeywell International Inc. | Mems flip-chip packaging |
US7491567B2 (en) * | 2005-11-22 | 2009-02-17 | Honeywell International Inc. | MEMS device packaging methods |
JP4310325B2 (ja) * | 2006-05-24 | 2009-08-05 | 日立金属株式会社 | 角速度センサ |
US8187902B2 (en) * | 2008-07-09 | 2012-05-29 | The Charles Stark Draper Laboratory, Inc. | High performance sensors and methods for forming the same |
TWI374268B (en) * | 2008-09-05 | 2012-10-11 | Ind Tech Res Inst | Multi-axis capacitive accelerometer |
US8205498B2 (en) * | 2008-11-18 | 2012-06-26 | Industrial Technology Research Institute | Multi-axis capacitive accelerometer |
DE102009000345A1 (de) * | 2009-01-21 | 2010-07-22 | Robert Bosch Gmbh | Drehratensensor |
EP2435789B1 (fr) * | 2009-05-27 | 2015-04-08 | King Abdullah University Of Science And Technology | Système masse-ressort-amortisseur de système microélectromécanique (mems) utilisant un schéma de suspension hors-plan |
US8534127B2 (en) | 2009-09-11 | 2013-09-17 | Invensense, Inc. | Extension-mode angular velocity sensor |
US9097524B2 (en) | 2009-09-11 | 2015-08-04 | Invensense, Inc. | MEMS device with improved spring system |
FR2974895B1 (fr) * | 2011-05-02 | 2013-06-28 | Commissariat Energie Atomique | Gyrometre a capacites parasites reduites |
US8833162B2 (en) | 2011-09-16 | 2014-09-16 | Invensense, Inc. | Micromachined gyroscope including a guided mass system |
US9714842B2 (en) | 2011-09-16 | 2017-07-25 | Invensense, Inc. | Gyroscope self test by applying rotation on coriolis sense mass |
US9170107B2 (en) | 2011-09-16 | 2015-10-27 | Invensense, Inc. | Micromachined gyroscope including a guided mass system |
US9863769B2 (en) | 2011-09-16 | 2018-01-09 | Invensense, Inc. | MEMS sensor with decoupled drive system |
US10914584B2 (en) | 2011-09-16 | 2021-02-09 | Invensense, Inc. | Drive and sense balanced, semi-coupled 3-axis gyroscope |
FI124624B (en) * | 2012-06-29 | 2014-11-14 | Murata Manufacturing Co | Improved oscillating gyroscope |
US9568491B2 (en) * | 2013-07-08 | 2017-02-14 | Honeywell International Inc. | Reducing the effect of glass charging in MEMS devices |
US9476712B2 (en) * | 2013-07-31 | 2016-10-25 | Honeywell International Inc. | MEMS device mechanism enhancement for robust operation through severe shock and acceleration |
US9958271B2 (en) | 2014-01-21 | 2018-05-01 | Invensense, Inc. | Configuration to reduce non-linear motion |
US10696541B2 (en) | 2016-05-26 | 2020-06-30 | Honeywell International Inc. | Systems and methods for bias suppression in a non-degenerate MEMS sensor |
US11530917B2 (en) | 2018-09-24 | 2022-12-20 | The Charles Stark Draper Laboratory, Inc. | Methods for fabricating silicon MEMS gyroscopes with upper and lower sense plates |
US11561094B2 (en) | 2018-10-16 | 2023-01-24 | The Charles Stark Draper Laboratory, Inc. | Method and system for control and readout of tuning fork gyroscope |
DE102020120906B4 (de) * | 2020-08-07 | 2024-09-19 | Infineon Technologies Ag | Verfahren zum Bestimmen eines Torsionswinkels eines Spiegelkörpers einer MEMS-Vorrichtung |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5911156A (en) * | 1997-02-24 | 1999-06-08 | The Charles Stark Draper Laboratory, Inc. | Split electrode to minimize charge transients, motor amplitude mismatch errors, and sensitivity to vertical translation in tuning fork gyros and other devices |
US20010001928A1 (en) * | 1997-11-04 | 2001-05-31 | Ngk Insulators, Ltd. | Vibrators, vibratory gyroscopes, devices for measuring a linear acceleration and a method of measuring a turning angular rate |
US6250156B1 (en) * | 1996-05-31 | 2001-06-26 | The Regents Of The University Of California | Dual-mass micromachined vibratory rate gyroscope |
US6257059B1 (en) * | 1999-09-24 | 2001-07-10 | The Charles Stark Draper Laboratory, Inc. | Microfabricated tuning fork gyroscope and associated three-axis inertial measurement system to sense out-of-plane rotation |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0810170B2 (ja) | 1987-03-06 | 1996-01-31 | 株式会社日立製作所 | 半導体絶対圧力センサの製造方法 |
US6155115A (en) * | 1991-01-02 | 2000-12-05 | Ljung; Per | Vibratory angular rate sensor |
US5492596A (en) * | 1994-02-04 | 1996-02-20 | The Charles Stark Draper Laboratory, Inc. | Method of making a micromechanical silicon-on-glass tuning fork gyroscope |
JP3613838B2 (ja) * | 1995-05-18 | 2005-01-26 | 株式会社デンソー | 半導体装置の製造方法 |
US5992233A (en) * | 1996-05-31 | 1999-11-30 | The Regents Of The University Of California | Micromachined Z-axis vibratory rate gyroscope |
US6265246B1 (en) * | 1999-07-23 | 2001-07-24 | Agilent Technologies, Inc. | Microcap wafer-level package |
US6272925B1 (en) * | 1999-09-16 | 2001-08-14 | William S. Watson | High Q angular rate sensing gyroscope |
JP3573048B2 (ja) * | 2000-02-14 | 2004-10-06 | 松下電器産業株式会社 | 半導体装置の製造方法 |
JP3379518B2 (ja) * | 2000-08-14 | 2003-02-24 | 株式会社村田製作所 | 圧電素子の製造方法 |
JP3957038B2 (ja) * | 2000-11-28 | 2007-08-08 | シャープ株式会社 | 半導体基板及びその作製方法 |
US6548321B1 (en) * | 2001-10-23 | 2003-04-15 | The Charles Stark Draper Laboratory, Inc. | Method of anodically bonding a multilayer device with a free mass |
EP1490699A1 (fr) * | 2002-03-26 | 2004-12-29 | The Charles Stark Draper Laboratory, INC. | Capteurs microelectromecaniques a erreur de polarisation de signaux reduite et leur procede de fabrication |
US7138293B2 (en) * | 2002-10-04 | 2006-11-21 | Dalsa Semiconductor Inc. | Wafer level packaging technique for microdevices |
-
2002
- 2002-10-04 US US10/264,887 patent/US6862934B2/en not_active Expired - Lifetime
- 2002-10-04 WO PCT/US2002/031721 patent/WO2003031912A2/fr not_active Application Discontinuation
-
2004
- 2004-10-21 US US10/970,067 patent/US7172919B2/en not_active Expired - Lifetime
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6250156B1 (en) * | 1996-05-31 | 2001-06-26 | The Regents Of The University Of California | Dual-mass micromachined vibratory rate gyroscope |
US5911156A (en) * | 1997-02-24 | 1999-06-08 | The Charles Stark Draper Laboratory, Inc. | Split electrode to minimize charge transients, motor amplitude mismatch errors, and sensitivity to vertical translation in tuning fork gyros and other devices |
US20010001928A1 (en) * | 1997-11-04 | 2001-05-31 | Ngk Insulators, Ltd. | Vibrators, vibratory gyroscopes, devices for measuring a linear acceleration and a method of measuring a turning angular rate |
US6257059B1 (en) * | 1999-09-24 | 2001-07-10 | The Charles Stark Draper Laboratory, Inc. | Microfabricated tuning fork gyroscope and associated three-axis inertial measurement system to sense out-of-plane rotation |
Also Published As
Publication number | Publication date |
---|---|
WO2003031912A2 (fr) | 2003-04-17 |
US6862934B2 (en) | 2005-03-08 |
US7172919B2 (en) | 2007-02-06 |
US20050081631A1 (en) | 2005-04-21 |
US20070062283A9 (en) | 2007-03-22 |
US20030066351A1 (en) | 2003-04-10 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
WO2003031912A3 (fr) | Gyroscope a diapason | |
WO2005040715A3 (fr) | Capteur a systemes micro electro-mecaniques (mems) de vitesse angulaire autour de l'axe z | |
WO2001095304A8 (fr) | Outil de navigation | |
WO2002102081A3 (fr) | Structure de table mpeg | |
WO2003007227A3 (fr) | Ecran tactile a sources de pression selectives | |
DE69928061D1 (de) | Halbleiter-beschleunigungssensor mit selbstdiagnose | |
GB0106091D0 (en) | A method of determining the orientation of a seismic receiver, a seismic receiver, and a method of seismic surveying | |
EP0609065A3 (en) | Gas sensors. | |
AU2001273436A1 (en) | Sand screen with integrated sensors | |
WO2002082045A3 (fr) | Mosaiques de capteurs a couche mince micro-usines pour la detection de gaz contenant h2, nh3 et du soufre, et leur procede de fabrication | |
WO2003030123A1 (fr) | Systeme de gestion, appareil de gestion, appareil de commande de detecteurs et appareil de reseau | |
AU2001234129A1 (en) | Acceleration detection type gyro device | |
GB2402157A (en) | Interlocking and securable retaining wall block and system | |
WO1999006788A3 (fr) | Dispositif et procede permettant de mesurer une distance | |
AU7552298A (en) | Sensor and method for sensing the position of the surface of object, aligner provided with the sensor and method of manufacturing the aligner, and method of manufacturing devices by using the aligner | |
WO2003107397A3 (fr) | Systeme et procede microelectromecaniques servant a determiner des profils de temperature et d'humidite a l'interieur d'emballages pharmaceutiques | |
EP1188625A3 (fr) | Dispositif de protection contre le vol pour véhicules | |
AU2000264217A1 (en) | Method for detecting serum and for determining the quality thereof, and corresponding devices | |
AU3271600A (en) | Sensor-measuring field for controlling functioning of a micropipette | |
AU2001280050A1 (en) | Bolt tamper sensor | |
AU5251300A (en) | Acceleration sensor | |
GB2343952B (en) | Pendulum mass acceleration sensor | |
WO2004047128A3 (fr) | Detecteur de metaux des terres rares | |
USD453715S1 (en) | Motorcycle meter panel | |
AU2002358703A1 (en) | Gas sensor and method for detecting substances according to the work function principle |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
AK | Designated states |
Kind code of ref document: A2 Designated state(s): AE AG AL AM AT AU AZ BA BB BG BY BZ CA CH CN CO CR CU CZ DE DM DZ EC EE ES FI GB GD GE GH HR HU ID IL IN IS JP KE KG KP KR LC LK LR LS LT LU LV MA MD MG MN MW MX MZ NO NZ OM PH PL PT RU SD SE SG SI SK SL TJ TM TN TR TZ UA UG UZ VN YU ZA ZM |
|
AL | Designated countries for regional patents |
Kind code of ref document: A2 Designated state(s): GH GM KE LS MW MZ SD SL SZ UG ZM ZW AM AZ BY KG KZ RU TJ TM AT BE BG CH CY CZ DK EE ES FI FR GB GR IE IT LU MC PT SE SK TR BF BJ CF CG CI GA GN GQ GW ML MR NE SN TD TG |
|
121 | Ep: the epo has been informed by wipo that ep was designated in this application | ||
DFPE | Request for preliminary examination filed prior to expiration of 19th month from priority date (pct application filed before 20040101) | ||
122 | Ep: pct application non-entry in european phase | ||
NENP | Non-entry into the national phase |
Ref country code: JP |
|
WWW | Wipo information: withdrawn in national office |
Country of ref document: JP |