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WO2003025689A3 - Commande de processus a grande echelle par identification de facteurs d'entrainement - Google Patents

Commande de processus a grande echelle par identification de facteurs d'entrainement Download PDF

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Publication number
WO2003025689A3
WO2003025689A3 PCT/US2002/029206 US0229206W WO03025689A3 WO 2003025689 A3 WO2003025689 A3 WO 2003025689A3 US 0229206 W US0229206 W US 0229206W WO 03025689 A3 WO03025689 A3 WO 03025689A3
Authority
WO
WIPO (PCT)
Prior art keywords
process control
factor identification
large scale
driving factor
nonlinear regression
Prior art date
Application number
PCT/US2002/029206
Other languages
English (en)
Other versions
WO2003025689A2 (fr
Inventor
Edward A Rietman
Jill P Card
Original Assignee
Ibex Process Technology Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ibex Process Technology Inc filed Critical Ibex Process Technology Inc
Publication of WO2003025689A2 publication Critical patent/WO2003025689A2/fr
Publication of WO2003025689A3 publication Critical patent/WO2003025689A3/fr

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Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B13/00—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion
    • G05B13/02—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric
    • G05B13/0265—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric the criterion being a learning criterion
    • G05B13/027—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric the criterion being a learning criterion using neural networks only
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B17/00—Systems involving the use of models or simulators of said systems
    • G05B17/02—Systems involving the use of models or simulators of said systems electric
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
    • G05B19/4188—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by CIM planning or realisation
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
    • G05B19/41885—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by modeling, simulation of the manufacturing system
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/32—Operator till task planning
    • G05B2219/32015—Optimize, process management, optimize production line
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/32—Operator till task planning
    • G05B2219/32193—Ann, neural base quality management
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/32—Operator till task planning
    • G05B2219/32335—Use of ann, neural network
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/32—Operator till task planning
    • G05B2219/32343—Derive control behaviour, decisions from simulation, behaviour modelling
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/32—Operator till task planning
    • G05B2219/32352—Modular modeling, decompose large system in smaller systems to simulate
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/42—Servomotor, servo controller kind till VSS
    • G05B2219/42001—Statistical process control spc
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

Landscapes

  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Artificial Intelligence (AREA)
  • Manufacturing & Machinery (AREA)
  • Quality & Reliability (AREA)
  • General Engineering & Computer Science (AREA)
  • Evolutionary Computation (AREA)
  • Health & Medical Sciences (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Medical Informatics (AREA)
  • Software Systems (AREA)
  • Management, Administration, Business Operations System, And Electronic Commerce (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

L'invention concerne des systèmes et des procédés de commande de processus complexes utilisant une identification de facteurs d'entraînement basée sur des modèles de régression non linéaire et sur une optimisation d'étapes de processus. Dans un mode de réalisation, l'invention concerne un procédé permettant de produire un modèle de système pour un processus complexe constitué de modèles de régression non linéaire pour au moins deux étapes de processus choisies, ces étapes de processus étant choisies pour être incluses dans le modèle de système en fonction d'une analyse de sensibilité d'un modèle de régression non linéaire initial du processus, de sorte à évaluer les facteurs d'entraînement de ce processus.
PCT/US2002/029206 2001-09-14 2002-09-13 Commande de processus a grande echelle par identification de facteurs d'entrainement WO2003025689A2 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US32240301P 2001-09-14 2001-09-14
US60/322,403 2001-09-14

Publications (2)

Publication Number Publication Date
WO2003025689A2 WO2003025689A2 (fr) 2003-03-27
WO2003025689A3 true WO2003025689A3 (fr) 2003-10-16

Family

ID=23254728

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2002/029206 WO2003025689A2 (fr) 2001-09-14 2002-09-13 Commande de processus a grande echelle par identification de facteurs d'entrainement

Country Status (2)

Country Link
US (1) US6904328B2 (fr)
WO (1) WO2003025689A2 (fr)

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US7878882B2 (en) * 1999-04-01 2011-02-01 Charles J. Molnar Advanced workpiece finishing
US8353738B2 (en) * 1998-11-06 2013-01-15 Semcon Tech, Llc Advanced finishing control
US7131890B1 (en) 1998-11-06 2006-11-07 Beaver Creek Concepts, Inc. In situ finishing control
US7037172B1 (en) 1999-04-01 2006-05-02 Beaver Creek Concepts Inc Advanced wafer planarizing
US7377836B1 (en) 2000-10-10 2008-05-27 Beaver Creek Concepts Inc Versatile wafer refining
US7110525B1 (en) 2001-06-25 2006-09-19 Toby Heller Agent training sensitive call routing system
US7058917B1 (en) * 2002-06-04 2006-06-06 Cadence Design Systems, Inc. Method and apparatus for specifying a cost function that represents the estimated distance between an external state and a set of states in a space
US9818136B1 (en) 2003-02-05 2017-11-14 Steven M. Hoffberg System and method for determining contingent relevance
GB0320670D0 (en) 2003-09-04 2003-10-01 Curvaceous Software Ltd Multi-variable operations
KR100618822B1 (ko) * 2004-03-13 2006-08-31 삼성전자주식회사 변수 소거법을 이용하는 전력 분배 네트워크 시뮬레이션방법
US7272817B1 (en) 2004-04-15 2007-09-18 Bank Of America Corporation Method and apparatus for modeling a business process to facilitate evaluation of driving metrics
US7291285B2 (en) * 2005-05-10 2007-11-06 International Business Machines Corporation Method and system for line-dimension control of an etch process
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EP1746475A1 (fr) * 2005-07-19 2007-01-24 MTU Aero Engines GmbH Procédé pour la génération des chaines de traitement
US7761172B2 (en) * 2006-03-21 2010-07-20 Exxonmobil Research And Engineering Company Application of abnormal event detection (AED) technology to polymers
US8041440B2 (en) * 2006-07-13 2011-10-18 Taiwan Semiconductor Manufacturing Company, Ltd. Method and system for providing a selection of golden tools for better defect density and product yield
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US7991499B2 (en) * 2006-12-27 2011-08-02 Molnar Charles J Advanced finishing control
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US9639815B2 (en) * 2011-07-14 2017-05-02 International Business Machines Corporation Managing processes in an enterprise intelligence (‘EI’) assembly of an EI framework
US8930008B2 (en) * 2012-01-26 2015-01-06 Sakti3, Inc. Methodology for design of a manufacturing facility for fabrication of solid state hybrid thin film energy storage and conversion devices
EP3167529A4 (fr) * 2014-05-16 2018-01-03 HST Solar Farms, Inc. Systèmes et procédés permettant une ingénierie de réseau photovoltaïque solaire
CN103984331B (zh) * 2014-05-30 2016-08-17 西安交通大学 一种复杂产品装配质量的误差敏感性分析与控制方法
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Also Published As

Publication number Publication date
US20030093762A1 (en) 2003-05-15
WO2003025689A2 (fr) 2003-03-27
US6904328B2 (en) 2005-06-07

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