WO2003019210A1 - Capteur pour instrument d'inspection et instrument d'inspection - Google Patents

Capteur pour instrument d'inspection et instrument d'inspection Download PDF

Info

Publication number: WO2003019210A1
Authority: WO; WIPO (PCT)
Prior art keywords: mosfet; inspection instrument; sensor; inputted; drain
Prior art date: 2001-08-27

Application number

PCT/JP2002/008599

Other languages

English (en)

French (fr)

Inventor

Tatsuhisa Fujii

Kazuhiro Monden

Mikiya Kasai

Shogo Ishioka

Shuji Yamaoka

Original Assignee

Oht Inc.

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2001-08-27

Filing date

2002-08-27

Publication date

2003-03-06

2002-08-27 Application filed by Oht Inc. filed Critical Oht Inc.

2002-08-27 Priority to KR10-2004-7002812A priority Critical patent/KR20040029048A/ko

2002-08-27 Priority to US10/487,828 priority patent/US7173445B2/en

2003-03-06 Publication of WO2003019210A1 publication Critical patent/WO2003019210A1/ja

Links

238000007689 inspection Methods 0.000 title abstract 4
XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 abstract 2
229910052782 aluminium Inorganic materials 0.000 abstract 2
239000004020 conductor Substances 0.000 abstract 1

Classifications

- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/302—Contactless testing
- G01R31/312—Contactless testing by capacitive methods

Landscapes

Engineering & Computer Science (AREA)
General Engineering & Computer Science (AREA)
Physics & Mathematics (AREA)
General Physics & Mathematics (AREA)
Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
Semiconductor Integrated Circuits (AREA)
Tests Of Electronic Circuits (AREA)
Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Testing Or Measuring Of Semiconductors Or The Like (AREA)

PCT/JP2002/008599 2001-08-27 2002-08-27 Capteur pour instrument d'inspection et instrument d'inspection WO2003019210A1 (fr)

Priority Applications (2)

Application Number	Priority Date	Filing Date	Title
KR10-2004-7002812A KR20040029048A (ko)	2001-08-27	2002-08-27	검사 장치용 센서 및 검사 장치
US10/487,828 US7173445B2 (en)	2001-08-27	2002-08-27	Sensor for inspection instrument and inspection instrument

Applications Claiming Priority (2)

Application Number	Priority Date	Filing Date	Title
JP2001-255621		2001-08-27
JP2001255621A JP4623887B2 (ja)	2001-08-27	2001-08-27	検査装置用センサ及び検査装置

Publications (1)

Publication Number	Publication Date
WO2003019210A1 true WO2003019210A1 (fr)	2003-03-06

Family

ID=19083559

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
PCT/JP2002/008599 WO2003019210A1 (fr)	2001-08-27	2002-08-27	Capteur pour instrument d'inspection et instrument d'inspection

Country Status (6)

Country	Link
US (1)	US7173445B2 (ja)
JP (1)	JP4623887B2 (ja)
KR (1)	KR20040029048A (ja)
CN (1)	CN100343682C (ja)
TW (1)	TW567326B (ja)
WO (1)	WO2003019210A1 (ja)

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JP3989488B2 (ja) *	2005-01-19	2007-10-10	オー・エイチ・ティー株式会社	検査装置及び検査方法並びに検査装置用センサ
TWI325980B (en) *	2005-10-26	2010-06-11	Au Optronics Corp	Non-contact panel detecting device
US11339430B2 (en)	2007-07-10	2022-05-24	Life Technologies Corporation	Methods and apparatus for measuring analytes using large scale FET arrays
ES2923759T3 (es)	2006-12-14	2022-09-30	Life Technologies Corp	Aparato para medir analitos utilizando matrices de FET
US8262900B2 (en) *	2006-12-14	2012-09-11	Life Technologies Corporation	Methods and apparatus for measuring analytes using large scale FET arrays
US20100301398A1 (en)	2009-05-29	2010-12-02	Ion Torrent Systems Incorporated	Methods and apparatus for measuring analytes
US20100137143A1 (en)	2008-10-22	2010-06-03	Ion Torrent Systems Incorporated	Methods and apparatus for measuring analytes
US8776573B2 (en)	2009-05-29	2014-07-15	Life Technologies Corporation	Methods and apparatus for measuring analytes
TWI408382B (zh) *	2009-11-13	2013-09-11		成像裝置的檢測方法及系統
US8269505B2 (en) *	2009-12-15	2012-09-18	International Business Machines Corporation	Locating short circuits in printed circuit boards
WO2012003363A1 (en)	2010-06-30	2012-01-05	Life Technologies Corporation	Ion-sensing charge-accumulation circuits and methods
TW201716791A (zh) *	2010-06-30	2017-05-16	生命技術公司	用於測試離子感測場效電晶體（ｉｓｆｅｔ）陣列之裝置及方法
JP5883857B2 (ja)	2010-06-30	2016-03-15	ライフテクノロジーズコーポレーション	化学反応および化合物の検出および測定のためのトランジスタ回路
US11307166B2 (en)	2010-07-01	2022-04-19	Life Technologies Corporation	Column ADC
EP2589065B1 (en)	2010-07-03	2015-08-19	Life Technologies Corporation	Chemically sensitive sensor with lightly doped drains
WO2012036679A1 (en)	2010-09-15	2012-03-22	Life Technologies Corporation	Methods and apparatus for measuring analytes
US20130088245A1 (en) *	2011-10-10	2013-04-11	Kla-Tencor Corporation	Capacitive Inspection Of EUV Photomasks
US9970984B2 (en)	2011-12-01	2018-05-15	Life Technologies Corporation	Method and apparatus for identifying defects in a chemical sensor array
US8786331B2 (en)	2012-05-29	2014-07-22	Life Technologies Corporation	System for reducing noise in a chemical sensor array
US9080968B2 (en)	2013-01-04	2015-07-14	Life Technologies Corporation	Methods and systems for point of use removal of sacrificial material
US9841398B2 (en)	2013-01-08	2017-12-12	Life Technologies Corporation	Methods for manufacturing well structures for low-noise chemical sensors
US8963216B2 (en)	2013-03-13	2015-02-24	Life Technologies Corporation	Chemical sensor with sidewall spacer sensor surface
CN105051525B (zh)	2013-03-15	2019-07-26	生命科技公司	具有薄导电元件的化学设备
EP2972280B1 (en)	2013-03-15	2021-09-29	Life Technologies Corporation	Chemical sensor with consistent sensor surface areas
US9835585B2 (en)	2013-03-15	2017-12-05	Life Technologies Corporation	Chemical sensor with protruded sensor surface
US20140336063A1 (en)	2013-05-09	2014-11-13	Life Technologies Corporation	Windowed Sequencing
US10458942B2 (en)	2013-06-10	2019-10-29	Life Technologies Corporation	Chemical sensor array having multiple sensors per well
TWM493114U (zh) *	2014-08-06	2015-01-01	Superc Touch Corp	具有多重連接選擇的感應電極之生物辨識裝置
TWI756167B (zh)	2014-12-18	2022-03-01	美商生命技術公司	積體電路裝置、感測器裝置及積體電路
US10077472B2 (en)	2014-12-18	2018-09-18	Life Technologies Corporation	High data rate integrated circuit with power management
TWI557414B (zh) *	2015-08-04	2016-11-11	財團法人工業技術研究院	電子電路監測系統及電子電路監測方法
WO2020059014A1 (ja) *	2018-09-18	2020-03-26	国立大学法人東北大学	容量検出エリアセンサ及び、その容量検出エリアセンサを有する導電パターン検査装置
CN114091387A (zh) *	2021-11-22	2022-02-25	海光信息技术股份有限公司	电路的检查方法、装置、电子设备、存储介质

Citations (5)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPH11153638A (ja) *	1997-11-25	1999-06-08	Nihon Densan Riido Kk	基板検査装置および基板検査方法
JP2001221824A (ja) *	2000-02-10	2001-08-17	Oht Inc	検査装置及び検査方法、検査ユニット
WO2001063307A1 (fr) *	2000-02-22	2001-08-30	Oht, Inc.	Capteur et appareil d'inspection
JP2001272430A (ja) *	2000-03-24	2001-10-05	Oht Inc	検査装置及び検査方法
JP2002022789A (ja) *	2000-07-05	2002-01-23	Oht Inc	検査装置及び検査方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US2959681A (en) *	1959-06-18	1960-11-08	Fairchild Semiconductor	Semiconductor scanning device
JP3080595B2 (ja) *	1997-02-28	2000-08-28	日本電産リード株式会社	基板検査装置および基板検査方法
JP3667058B2 (ja) *	1997-11-19	2005-07-06	キヤノン株式会社	光電変換装置
JP3415035B2 (ja) *	1998-08-07	2003-06-09	オー・エイチ・ティー株式会社	基板検査用センサプローブおよびその製造方法

2001
- 2001-08-27 JP JP2001255621A patent/JP4623887B2/ja not_active Expired - Fee Related
2002
- 2002-08-27 WO PCT/JP2002/008599 patent/WO2003019210A1/ja active Application Filing
- 2002-08-27 TW TW091119372A patent/TW567326B/zh not_active IP Right Cessation
- 2002-08-27 CN CNB028162838A patent/CN100343682C/zh not_active Expired - Fee Related
- 2002-08-27 US US10/487,828 patent/US7173445B2/en not_active Expired - Fee Related
- 2002-08-27 KR KR10-2004-7002812A patent/KR20040029048A/ko not_active Ceased

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPH11153638A (ja) *	1997-11-25	1999-06-08	Nihon Densan Riido Kk	基板検査装置および基板検査方法
JP2001221824A (ja) *	2000-02-10	2001-08-17	Oht Inc	検査装置及び検査方法、検査ユニット
WO2001063307A1 (fr) *	2000-02-22	2001-08-30	Oht, Inc.	Capteur et appareil d'inspection
JP2001272430A (ja) *	2000-03-24	2001-10-05	Oht Inc	検査装置及び検査方法
JP2002022789A (ja) *	2000-07-05	2002-01-23	Oht Inc	検査装置及び検査方法

Also Published As

Publication number	Publication date
US20040241887A1 (en)	2004-12-02
JP2003066086A (ja)	2003-03-05
KR20040029048A (ko)	2004-04-03
CN1545622A (zh)	2004-11-10
TW567326B (en)	2003-12-21
JP4623887B2 (ja)	2011-02-02
CN100343682C (zh)	2007-10-17
US7173445B2 (en)	2007-02-06

Legal Events

Date	Code	Title	Description
2003-03-06	AK	Designated states	Kind code of ref document: A1 Designated state(s): CN KR US Kind code of ref document: A1 Designated state(s): CN KR
2004-02-20	WWE	Wipo information: entry into national phase	Ref document number: 20028162838 Country of ref document: CN
2004-02-26	WWE	Wipo information: entry into national phase	Ref document number: 1020047002812 Country of ref document: KR
2004-02-27	WWE	Wipo information: entry into national phase	Ref document number: 10487828 Country of ref document: US

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