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WO2003016819A1 - Procede pour mesurer des structures superficielles - Google Patents

Procede pour mesurer des structures superficielles Download PDF

Info

Publication number
WO2003016819A1
WO2003016819A1 PCT/EP2001/009402 EP0109402W WO03016819A1 WO 2003016819 A1 WO2003016819 A1 WO 2003016819A1 EP 0109402 W EP0109402 W EP 0109402W WO 03016819 A1 WO03016819 A1 WO 03016819A1
Authority
WO
WIPO (PCT)
Prior art keywords
infrared
infrared light
pattern
light pattern
test specimen
Prior art date
Application number
PCT/EP2001/009402
Other languages
German (de)
English (en)
Inventor
Jean Blondeau
Original Assignee
Metronom Gmbh Industrial Measurement
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Metronom Gmbh Industrial Measurement filed Critical Metronom Gmbh Industrial Measurement
Priority to PCT/EP2001/009402 priority Critical patent/WO2003016819A1/fr
Publication of WO2003016819A1 publication Critical patent/WO2003016819A1/fr

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/306—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces for measuring evenness

Definitions

  • the invention relates to a method and a device for measuring long-wave surface structures on flat components.
  • Long-wave means an order of magnitude that goes beyond the roughness of the material, e.g. for dents, dents and ripple.
  • the accuracy of the parts produced using the new technology or the new tool can be checked using an appropriate checking method.
  • the methods mentioned require long measuring and evaluation times, which can take up to half a minute to a minute.
  • test object is irradiated with an illumination pattern and the reflected light is recorded and analyzed.
  • the change in the lighting pattern due to the reflection is used to measure the surface structures.
  • the component must therefore be pretreated, painted or oiled before the inspection and cleaned after the inspection if necessary, which in turn means a delay.
  • the object of the present invention is to provide a method and a device with the aid of which surface structures can be detected with a short measuring time and precise resolution.
  • the object is achieved with a method with the features of claim 1 and a device with the features of claim 11.
  • the flat test specimen is irradiated with a pattern of infrared light.
  • the directly reflected infrared light is recorded with an infrared camera and the reflected pattern is analyzed to determine the surface structure.
  • the specular reflection of the light pattern in the infrared range can be used directly for analysis.
  • a surface treatment of a rough surface is no longer necessary. This significantly shortens the checking process and can also be used in processes in which only a few seconds are available for checking a flat component, without the resolution and accuracy being restricted.
  • the method according to the invention has a resolution of a few micrometers with measurement and evaluation times of a few seconds and it can be used without the use of brighteners, painting or oiling.
  • the device according to the invention provides an infrared light source which emits a defined light pattern which can be directed onto the test specimen.
  • An infrared camera is provided, with the aid of which the light pattern reflected by the test specimen can be recorded and sent to an analysis unit.
  • the signal can either be evaluated directly or compared with the incident light pattern.
  • the reflected light pattern with a previously certain reference patterns for an ideal surface are compared in order to determine the surface structure of the surface from the change in the light pattern.
  • the reflected light pattern with a previously certain reference patterns for an ideal surface are compared in order to determine the surface structure of the surface from the change in the light pattern.
  • a line-shaped light pattern is advantageous for later analysis. Such a line-shaped light pattern is used to analyze only one area of the test specimen, so that the exact position of a surface structure that may occur can be easily determined.
  • Such a line-shaped light pattern can e.g. to be scanned perpendicular to the extent of the line over the entire test object in order to test the entire test object.
  • a grid-shaped stripe pattern is blasted onto the test specimen and recorded with the infrared camera. By evaluating the individual reflected line patterns, the entire test object is analyzed directly in a parallel process.
  • the light pattern can easily be generated with the help of an infrared lamp and a correspondingly shaped aperture.
  • the light recorded by the infrared camera can be evaluated using various methods.
  • a conversion device can be used to convert it into a visible light pattern and display it on a screen, for example.
  • a Fourier analysis of a reflected stripe pattern is particularly simple and advantageous.
  • the evaluation of Fourier spectra can be used directly with known methods to determine the dimensions of the individual surface structures. In this way, the depth and extent of the individual surface structures and their periods, if any, can be determined quickly and easily.
  • a movable mounting of the infrared camera can advantageously be provided in order to be able to examine the entire test specimen.
  • the infrared light source can also be provided so that it can move over the test specimen.
  • the test specimen can also be movably received and moved by the light pattern.
  • FIG. 1 shows a schematic structure of a first embodiment of the arrangement according to the invention
  • the analysis unit 15 comprises a memory in which corresponding reference data are stored, which are expected when examining an ideal test object.
  • FIG. 2 shows an embodiment in which the infrared lamp 1 and the strip grating diaphragm 3 are replaced by an arrangement 30 of parallel filaments 30a.
  • the filaments 30a are fed by the current source 30b.
  • FIG. 3 shows in the left part a typical reflection pattern which is produced with an arrangement according to the invention and is output by the infrared camera 7.
  • a Fourier spectrum determined therefrom is shown, which is used for the analysis of the surface structures. The intensity is plotted against the spatial frequency f.
  • An arrangement according to the invention can e.g. be arranged directly after a press in the body shop in order to check the pressed parts directly for their accuracy.
  • the device under test 5 e.g. a body part is exposed to the infrared light stripe pattern which is produced by the infrared lamp 1 in connection with the stripe-grid-shaped diaphragm 3.
  • the untreated test object usually has a matt surface that diffusely reflects visible light.
  • Infrared light has a wavelength in the mirometer range, i.e. larger than the typical surface roughness of the test specimens, so that the irradiated infrared light pattern is reflected in a specular manner.
  • the specularly reflected infrared light pattern is recorded using the infrared camera 7. Due to the reflection on the test specimen, the striped infrared light pattern changes and a pattern is created, for example, as can be seen in the left part of FIG. 3.
  • the shape of the reflected pattern depends directly on the surface shape of the specimen. Bumps, dents or little bits are reflected in correspondingly distorted lines.
  • the output signal of the infrared camera is sent to the analysis device 15. All possible analysis and measurement methods can be used there. There, for example, the distorted infrared light pattern or the difference between the distorted pattern and a reference pattern is displayed on a screen as in a false color camera, the corresponding infrared frequencies having been assigned to the different infrared frequencies.
  • the individual strips of the distorted reflected infrared light pattern z. B. subjected to a Fourier analysis.
  • a reference pattern that is expected for an ideal surface is subtracted from the distorted pattern and the difference is subjected to the Fourier analysis.
  • a Fourier analysis of the distorted pattern can first be carried out, a Fourier spectrum similar to that shown in the right part of FIG. 3 being produced, and the Fourier spectrum of a reference pattern then being subtracted from this.
  • the surface structure of the test object can be determined directly.
  • the periods of long-wave surface structures, the depth of surface structures and their lateral extent can be determined very precisely from the Fourier spectra in a known manner.
  • the evaluation unit 15 can also be set up in such a way that a signal is output when a threshold value of the intensity in the Fourier spectrum is exceeded, or when a structure is present in the Fourier spectrum that indicates an undesired surface structure.
  • the dimensions of the strip-shaped diaphragm 3 depend on the area of the test specimen whose surface structure is to be examined.
  • the number of strip-shaped openings in the strip-grid-shaped diaphragm 3 depends on the desired resolution. The smaller the distance between two strips, the greater the resolution of surface structures in a direction perpendicular to the extension of the strips.
  • test specimen If the test specimen is larger than the area irradiated by the light pattern, it is moved by the light pattern and the reflected light pattern is recorded and analyzed as a function of time.
  • the infrared lamp 1 and / or the strip grating 3 can be moved accordingly to illuminate different areas of the test specimen. Even then, the recording by the camera 7 and the analysis by the analysis device 15 are time-dependent.
  • the infrared camera 7 When the infrared camera 7 is movably mounted, it is possible for the infrared camera 7 to also examine test specimens 5 whose dimensions are larger than the image area which can be detected by the camera 7.
  • the method is carried out in an analogous manner.
  • the strip-shaped diaphragm 3 and the infrared lamp 1 are replaced by the strip-shaped arrangement 30 of glow wires 30a.
  • the method according to the invention can be used alone or in combination with other methods for surface examination.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

L'invention concerne un procédé pour identifier des structures superficielles de grande longueur d'onde sur des échantillons plans. Selon l'invention, un modèle de lumière infrarouge est irradié un échantillon, le modèle lumineux infrarouge réfléchi par l'échantillon est photographié par une caméra infrarouge puis analysé pour l'identification de la structure superficielle. La présente invention porte également sur un dispositif associé.
PCT/EP2001/009402 2001-08-14 2001-08-14 Procede pour mesurer des structures superficielles WO2003016819A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
PCT/EP2001/009402 WO2003016819A1 (fr) 2001-08-14 2001-08-14 Procede pour mesurer des structures superficielles

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/EP2001/009402 WO2003016819A1 (fr) 2001-08-14 2001-08-14 Procede pour mesurer des structures superficielles

Publications (1)

Publication Number Publication Date
WO2003016819A1 true WO2003016819A1 (fr) 2003-02-27

Family

ID=8164547

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2001/009402 WO2003016819A1 (fr) 2001-08-14 2001-08-14 Procede pour mesurer des structures superficielles

Country Status (1)

Country Link
WO (1) WO2003016819A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102015211954A1 (de) * 2015-06-26 2016-12-29 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren und Vorrichtung zum berührungslosen Vermessen einer Objektoberfläche
WO2019012404A1 (fr) * 2017-07-10 2019-01-17 Tekno Idea S.R.L. Dispositif et procédé de détection de défauts de surface

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4863268A (en) * 1984-02-14 1989-09-05 Diffracto Ltd. Diffractosight improvements
US5424836A (en) * 1992-06-03 1995-06-13 Geyer Medizin- Und Fertigungstechnik Gmbh Apparatus for contact-free optical measurement of a three-dimensional object
WO1996009518A1 (fr) * 1994-09-19 1996-03-28 Amcor Limited Dispositif de mesure de gondolage
DE19751399A1 (de) * 1997-11-20 1999-05-27 Richard Dr Hauck Verfahren und Vorrichtung zur Klassifizierung von Oberflächenwelligkeiten
WO2000014478A1 (fr) * 1998-09-04 2000-03-16 Siemens Aktiengesellschaft Dispositif et procede pour determiner une information relative au relief et a la couleur d'un objet dont on veut faire des prises de vue
US6239436B1 (en) * 1996-04-22 2001-05-29 Perceptron, Inc. Method and system for inspecting a low gloss surface of an object at a vision station
DE10006663A1 (de) * 2000-02-15 2001-08-23 Metronom Indvermessung Gmbh Verfahren zur Vermessung von Oberflächenstrukturen

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4863268A (en) * 1984-02-14 1989-09-05 Diffracto Ltd. Diffractosight improvements
US5424836A (en) * 1992-06-03 1995-06-13 Geyer Medizin- Und Fertigungstechnik Gmbh Apparatus for contact-free optical measurement of a three-dimensional object
WO1996009518A1 (fr) * 1994-09-19 1996-03-28 Amcor Limited Dispositif de mesure de gondolage
US6239436B1 (en) * 1996-04-22 2001-05-29 Perceptron, Inc. Method and system for inspecting a low gloss surface of an object at a vision station
DE19751399A1 (de) * 1997-11-20 1999-05-27 Richard Dr Hauck Verfahren und Vorrichtung zur Klassifizierung von Oberflächenwelligkeiten
WO2000014478A1 (fr) * 1998-09-04 2000-03-16 Siemens Aktiengesellschaft Dispositif et procede pour determiner une information relative au relief et a la couleur d'un objet dont on veut faire des prises de vue
DE10006663A1 (de) * 2000-02-15 2001-08-23 Metronom Indvermessung Gmbh Verfahren zur Vermessung von Oberflächenstrukturen

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102015211954A1 (de) * 2015-06-26 2016-12-29 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren und Vorrichtung zum berührungslosen Vermessen einer Objektoberfläche
DE102015211954B4 (de) * 2015-06-26 2017-12-28 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren und Vorrichtung zum berührungslosen Vermessen einer Objektoberfläche
WO2019012404A1 (fr) * 2017-07-10 2019-01-17 Tekno Idea S.R.L. Dispositif et procédé de détection de défauts de surface
US11105614B2 (en) 2017-07-10 2021-08-31 Tekno Idea S.R.L. Devices and processes for detecting surface defects
US11629953B2 (en) 2017-07-10 2023-04-18 Tekno Idea S.R.L. Devices for detecting painting defects on at least one painted surface to be inspected

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