WO2003010452A1 - Pneumatic diaphragm valve and method for controlling a pneumatic valve actuator - Google Patents
Pneumatic diaphragm valve and method for controlling a pneumatic valve actuator Download PDFInfo
- Publication number
- WO2003010452A1 WO2003010452A1 PCT/US2002/025200 US0225200W WO03010452A1 WO 2003010452 A1 WO2003010452 A1 WO 2003010452A1 US 0225200 W US0225200 W US 0225200W WO 03010452 A1 WO03010452 A1 WO 03010452A1
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- WIPO (PCT)
- Prior art keywords
- pilot
- valve
- supply
- valve assembly
- piston
- Prior art date
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- 238000000034 method Methods 0.000 title claims abstract description 11
- 230000001105 regulatory effect Effects 0.000 claims 3
- 238000013022 venting Methods 0.000 claims 2
- 230000001276 controlling effect Effects 0.000 claims 1
- 230000000712 assembly Effects 0.000 description 50
- 238000000429 assembly Methods 0.000 description 50
- 230000007246 mechanism Effects 0.000 description 5
- 238000007789 sealing Methods 0.000 description 5
- 230000004044 response Effects 0.000 description 4
- 230000008901 benefit Effects 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 238000010276 construction Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 208000029152 Small face Diseases 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 239000000123 paper Substances 0.000 description 1
- 239000003208 petroleum Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000002459 sustained effect Effects 0.000 description 1
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B13/00—Details of servomotor systems ; Valves for servomotor systems
- F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
- F15B13/04—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with a single servomotor
- F15B13/0401—Valve members; Fluid interconnections therefor
- F15B13/0405—Valve members; Fluid interconnections therefor for seat valves, i.e. poppet valves
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B11/00—Servomotor systems without provision for follow-up action; Circuits therefor
- F15B11/006—Hydraulic "Wheatstone bridge" circuits, i.e. with four nodes, P-A-T-B, and on-off or proportional valves in each link
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B13/00—Details of servomotor systems ; Valves for servomotor systems
- F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
- F15B13/04—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with a single servomotor
- F15B13/042—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with a single servomotor operated by fluid pressure
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
- F16K31/126—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a diaphragm, bellows, or the like
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
- F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
- F16K7/14—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B2211/00—Circuits for servomotor systems
- F15B2211/30—Directional control
- F15B2211/305—Directional control characterised by the type of valves
- F15B2211/3056—Assemblies of multiple valves
- F15B2211/30565—Assemblies of multiple valves having multiple valves for a single output member, e.g. for creating higher valve function by use of multiple valves like two 2/2-valves replacing a 5/3-valve
- F15B2211/30575—Assemblies of multiple valves having multiple valves for a single output member, e.g. for creating higher valve function by use of multiple valves like two 2/2-valves replacing a 5/3-valve in a Wheatstone Bridge arrangement (also half bridges)
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B2211/00—Circuits for servomotor systems
- F15B2211/30—Directional control
- F15B2211/315—Directional control characterised by the connections of the valve or valves in the circuit
- F15B2211/3157—Directional control characterised by the connections of the valve or valves in the circuit being connected to a pressure source, an output member and a return line
- F15B2211/31576—Directional control characterised by the connections of the valve or valves in the circuit being connected to a pressure source, an output member and a return line having a single pressure source and a single output member
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B2211/00—Circuits for servomotor systems
- F15B2211/30—Directional control
- F15B2211/32—Directional control characterised by the type of actuation
- F15B2211/327—Directional control characterised by the type of actuation electrically or electronically
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B2211/00—Circuits for servomotor systems
- F15B2211/30—Directional control
- F15B2211/35—Directional control combined with flow control
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B2211/00—Circuits for servomotor systems
- F15B2211/30—Directional control
- F15B2211/35—Directional control combined with flow control
- F15B2211/351—Flow control by regulating means in feed line, i.e. meter-in control
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B2211/00—Circuits for servomotor systems
- F15B2211/30—Directional control
- F15B2211/35—Directional control combined with flow control
- F15B2211/353—Flow control by regulating means in return line, i.e. meter-out control
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B2211/00—Circuits for servomotor systems
- F15B2211/30—Directional control
- F15B2211/355—Pilot pressure control
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B2211/00—Circuits for servomotor systems
- F15B2211/60—Circuit components or control therefor
- F15B2211/63—Electronic controllers
- F15B2211/6303—Electronic controllers using input signals
- F15B2211/632—Electronic controllers using input signals representing a flow rate
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B2211/00—Circuits for servomotor systems
- F15B2211/60—Circuit components or control therefor
- F15B2211/665—Methods of control using electronic components
- F15B2211/6654—Flow rate control
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B2211/00—Circuits for servomotor systems
- F15B2211/70—Output members, e.g. hydraulic motors or cylinders or control therefor
- F15B2211/705—Output members, e.g. hydraulic motors or cylinders or control therefor characterised by the type of output members or actuators
- F15B2211/7051—Linear output members
- F15B2211/7052—Single-acting output members
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B2211/00—Circuits for servomotor systems
- F15B2211/70—Output members, e.g. hydraulic motors or cylinders or control therefor
- F15B2211/705—Output members, e.g. hydraulic motors or cylinders or control therefor characterised by the type of output members or actuators
- F15B2211/7051—Linear output members
- F15B2211/7053—Double-acting output members
Definitions
- This invention relates to control systems for the pneumatically powered actuators of valves such as those often used in the pulp and paper, chemical and petroleum industries. More particularly, it relates to a system that provides for controlling the position of a pneumatically operated valve with an electrical control signal.
- piezo valves are desirable to utilize piezo valves as part of a control system for a pneumatically powered valve actuator because piezo valves provide an extremely long cycle life and reliability, extremely low power requirements, and fast on/off times.
- the volume of air they pass is relatively small compared to the volume required to quickly move a control valve into a new adjusted position.
- a relatively significant force is required to achieve movement of the valve, necessitating a correspondingly large surface area on the part of the actuator exposed to air pressure.
- Piezo valves are typically unable to provide the sustained volume of air necessary over the surface area of the movable part.
- an object of the present invention is to provide a valve control system that utilizes piezo valves to take advantage of their inherently desirable characteristics, yet the volume of air supplied to the valve actuator of the system is boosted to such an extent that the actuator quickly repositions the valve into the desired adjusted position.
- the present invention contemplates a system in which multiple piezo valves are subject to an electrical control signal to either initiate or terminate a pilot pneumatic output at the established control pressure.
- pilot output is in turn directed to appropriate valve assemblies of a volume booster circuit which is likewise connected to a source of pressurized gas at the same pressure as that supplied to the piezo valves.
- the pneumatic pilot signal from the piezo valves is used to determine the opened or closed state of valve assemblies in the booster mechanism.
- These booster valve assemblies are capable of passing much greater volumes of gas to the actuators than the small pilot signals produced by the piezo valves. Consequently, the instantaneous action of the piezo valves is obtained, along with sufficiently large volumes of gas to quickly move the operating part of the actuator.
- the control system of the present invention utilizes pistons in the booster valve assemblies that operate on the principle of unequal piston areas on opposite operating surfaces thereof.
- both surfaces of the piston may be simultaneously exposed to the same operating pressure in the form of a pneumatic signal from the piezo valve and an operating volume from the gas source.
- the piston will be moved in a direction generally toward the smaller surface area because the total force on the piston is greater on the side with the larger surface area.
- the side of the piston exposed to the pneumatic signal from the piezo valve is the side with the large surface area, while the side exposed directly to the gas source is the smaller.
- control system may be either single-acting or double-acting.
- the actuator In a system configured for a single-acting actuator, the actuator has only one operating gas chamber on one side of its movable part, while a spring is disposed on the opposite side.
- pressure chambers are located on opposite sides of the movable part of the actuator so that pressurized gas is used to move the part in both of its adjusting directions of movement.
- the control system is capable of moving the actuator in valve opening or valve closing directions, plus holding the actuator in a selected stationary position.
- each booster valve assembly utilizes a piston confined between a pair of diaphragms as the shut-off valve component within the assembly.
- the piston responds to the pneumatic pilot pressure to push one of the diaphragms into sealing engagement with the valve seat and thus close the operating flow path through the valve assembly.
- pilot pressure on the large face side of the piston is absent, the source pressure on the small face side of the piston shifts it away from the diaphragm to permit the diaphragm to uncover and open the flow path.
- a second embodiment of the valve assembly uses an integral piston and valve wherein one face of the piston is directly exposed to pilot pressure from the piezo valve and the other face of the piston is both directly exposed to operating pressure from the gas source and has a sealing surface that, when engaged with the valve seat, functions to close the valve assembly.
- a third embodiment of the valve assembly uses a piston confined between a ball valve and a diaphragm. The ball valve directly opens and closes the valve seat rather than the piston, although the ball valve is physically moved by the piston as the piston responds to the presence or absence of pressure on its opposite sides.
- a fourth embodiment of the valve assembly uses a smaller piston mounted within the larger piston for controlling minute air volumes or pulses.
- This smaller piston actuates a response to small pulses of air which allows for finer control of the valve's movement.
- this actuation results in a more accurate control leading to better overall performance of the valve and the system. For example, with 80 psi supply air to the system, the pilot air has to bleed down to perhaps 25 psi before the piston opens. Because of the large size of the pistons that is required for speed on large valve moves, the minimum amount of movement is relatively large, however the smaller piston is sized to open up when the pilot air drops below 40 psi instead.
- Fig. 1 is a schematic diagram of an exemplary installation in which a control system in accordance with the principles of the present invention is utilized;
- Fig. 2 is an enlarged, fragmentary cross-sectional view of one of the booster valve assemblies utilized in the control system;
- Figs. 3, 4 and 5 are schematic illustrations of a preferred embodiment of the control system for a single-acting actuator, Fig. 3 illustrating the system in such a state that the actuator is moving in a direction to close a valve with which it is associated, Fig. 4 illustrating the system in a state for moving the actuator in a valve opening direction, and Fig. 5 illustrating the system in a state for holding the valve stationary in a selected position;
- Figs. 6, 7 and 8 disclose a second embodiment of a system for use with a double- acting actuator, Fig. 6 illustrating the system in a state where in the actuator is moving in the valve closing direction, Fig. 7 illustrating the system in a state wherein the actuator is moving in the valve opening direction, and Fig. 8 illustrating the system in a state wherein the actuator is held stationary at a selected position;
- Fig. 9 is an enlarged, fragmentary cross-sectional view of an alternative embodiment for the booster valve assembly.
- Fig. 10 is an enlarged, fragmentary cross-sectional view of another alternative embodiment for the booster valve assembly.
- Figs. 11, 12 and 13 are schematic illustrations of a preferred embodiment of the control system for a piston within a piston actuator, with Fig. 11 illustrating the system in such a state that the actuator is moving in a direction to close a valve with which it is associated, Fig. 12 illustrating the system in a state for partial movement of the actuator in a valve opening direction, and Fig. 13 illustrating the system in a state for fully opening the valve.
- Figure 1 illustrates a typical pipe line 10 having a valve 12 that may be adjustably positioned within a number of different positions opening or closing the pipe line 10.
- a system for controlling the position of the valve 12 is broadly denoted by the numeral 14 and includes a pneumatically powered actuator 16 mechanically coupled with the valve 12 via a mechanical connection 18.
- the system 14 also includes a valve booster circuit 20, a pilot circuit 22 for the booster circuit 20, a source of pressurized gas 24 common to both the booster circuit 20 and the pilot circuit 22, and a controller 26 electrically connected to the pilot circuit 22.
- the control system 14 may also include a sensor 28 that is connected to the pipe line 10 in a suitable manner for detecting a flow condition within the pipe line 10 and reporting that condition to the controller so that a comparison can be made with a set or desired condition known to the controller. An appropriate adjustment of the valve 12 can be made accordingly.
- the system 14 in Figure 1 utilizes a single-acting actuator 16 that is pneumatically actuated in only one direction, the opposite direction of movement being provided by mechanical spring means or the like.
- the present invention also contemplates a double-acting system.
- the pilot circuit 22 of system 14 includes pilot mechanism in the form of a pair of piezo valves 30 and 32.
- the piezo valves may be selected to be normally open, normally closed, or a combination of both.
- the manner in which the actuator 16 is mechanically coupled to the valve 12 is also obviously a factor in determining the direction of movement of the valve 12, if any, to its failed position upon electrical failure.
- the valve 30 is normally open and the valve 32 is normally closed.
- the piezo valves may take the form, for example, of the valve disclosed in U.S. Patent 5,343,894 in the name of Frisch, et al. Piezo valve 30 receives an electrical control signal from the controller 26 via a conductor 34, while the normally closed piezo valve 32 receives an electrical signal from the controller 26 via a conductor 36.
- the pilot circuit 22 further includes a pneumatic input line 38 to the normally open piezo valve 30 and a second pneumatic input line 40 to the normally closed piezo valve 32, both of such inputs 38 and 40 being connected to the source of pressurized gas 24 which, in its preferred form, is air.
- Pilot circuit 22 further includes a pneumatic output line 42 from the normally open piezo valve 30 and a similar pneumatic output line 44 from the normally closed piezo valve 32. Both output lines 42 and 44 are operable to output a pneumatic signal at system pressure.
- Each piezo valve 30, 32 is operable to connect its output line 42 or 44 to atmosphere via exhausts 31, 33 when the valve is closed.
- the booster circuit 20 comprises booster mechanism that includes a pair of identical booster valve assemblies 46a and 46b constructed as illustrated by the valve assembly 46 in Fig. 2.
- Valve assembly 46a is a supply valve assembly connected to source 24 and valve assembly 46b is an exhaust valve assembly connected to atmosphere. Assemblies 46a and 46b may be contained within a common valve block or the like.
- the booster circuit 20 includes an operating pressure input line 50 connected between the source of pressurized air 24 and the supply valve assembly 46a.
- the booster circuit 20 includes an output line 52 from the valve 46a to the actuator 16, an exhaust line 54 from the exhaust valve assembly 46b to atmosphere, and an interconnecting line 56 between supply valve assembly 46a and exhaust valve assembly 46b.
- the two valve assemblies 46a and 46b also have vents 58 and 60 as will be described in more detail below.
- the valve assembly 46 comprises three primary sections stacked on top of one another, namely a bottom section 62, an intermediate section 64, and a top section 66.
- the bottom section 62 includes an internal chamber 68 having a supply port 70 and an exhaust port 72.
- the supply port 70 has a flat valve seat 74.
- a first flexible diaphragm 76 within the chamber 68 is movable between a closed position engagably covering the valve seat 74 so as to close the same and an open position shown in Fig. 2 in which the diaphragm 76 is up off the seat 74.
- the diaphragm 76 is sandwiched between the sections 62 and 64 and seals the chamber 68 of section 62 from a chamber 80 within the intermediate section 64.
- a piston 82 is confined within the chamber 80 but is shiftable axially thereof generally toward and away from the valve seat 74.
- the piston 82 is illustrated in its valve opening position in which it is spaced away from the valve seat 74 so as to allow the diaphragm 76 to likewise be spaced above the seat 74.
- a pilot chamber 86 (see Fig. 3) is defined on the upper side of the piston 82 between the diaphragm 84 and the top section 66, the pilot chamber 86 receiving a supply of pilot air at the operating pressure via an inlet 88 in the top section 66.
- the piston 82 has an upper surface 82a that is substantially larger than its bottom surface 82b. Upper surface 82a is exposed to the effects of a pilot signal in the pilot chamber 86, while the lower surface 82b is exposed to an operating volume of air, at the same pressure as the pilot pressure, in the operating chamber 68.
- the supply port 70 and the exhaust port 72 are capable of passing air at a substantially higher volumetric rate than the piezo valves 30,32 and their pilot inlets 88.
- a vent port 90 in the chamber 80 below the enlarged pilot end of the piston 82 is adapted to communicate with the atmosphere.
- the output line 42 from the normally open piezo valve 30 connects to the pilot inlet 88 of supply valve assembly 46a.
- Input line 50 from the air source 24 connects to the supply port 70 of supply valve assembly 46a, and the outlet line 52 connects to the exhaust port 72 of supply valve assembly 46a.
- the output line 44 from normally closed piezo valve 32 connects to the pilot inlet 88 of exhaust valve assembly 46b, the interconnect line 56 is connected to the supply port 70 of exhaust valve assembly 46b, and the exhaust line 54 is connected to the exhaust port 72 of exhaust valve assembly 46b.
- Output line 52 from supply valve assembly 46a connects to the operating chamber 92 of actuator 16 so as to supply variable amounts of pressurized air to the chamber 92.
- a movable part of the actuator 16 illustrated in the preferred embodiment in the nature of a piston 94 is responsive to the increase or decrease of air within chamber 92 to move leftwardly or rightwardly as viewed in the figures so as to extend or retract the rod which forms the mechanical connection 18 with the control valve 12 as designated in Figure 1.
- a spring 96 housed within the actuator 16 yieldably biases the piston 94 leftwardly viewing Figs. 3, 4 and 5.
- Figure 3 illustrates the condition of the control system 14 for moving the piston 94 leftwardly in the direction of the arrow 98 to adjust the valve 12. This may be selected as the direction for closing the valve 12, if desired.
- no electrical signal is supplied from the controller 26 to the piezo valves 30 and 32 such that they remain in their normal, de-energized condition.
- the normally open valve 30 allows a pneumatic pilot signal to pass along the output line 42 and into the pilot chamber 86 of supply valve assembly 46a.
- Supply pressure is also present in input line 50 and at supply port 70 of the supply valve assembly 46a, but the pressures are the same in both pilot chamber 86 and operating chamber 68.
- FIG. 4 illustrates the condition of the control system 14 for moving the rod 18 of the actuator 16 rightwardly in the direction of the arrow 100. This may be selected as the direction for opening the valve 12, if desired.
- the controller 26 has supplied electrical control signals to the piezo pilot valves 30 and 32 such that they are both in their energized positions. Thus, the piezo valve 30 becomes closed, while the piezo valve 32 becomes opened.
- Fig. 5 illustrates the condition of the system 14 for holding the actuator 16 stationary in any selected position.
- the piezo valve 30 is not receiving a signal from the controller 26 at this time; thus, the de-energized valve 30 remains open to pass a pneumatic pilot signal into the pilot chamber 86 of supply valve assembly 46a via output line 42. Consequently, the piston 82 of supply valve assembly 46a pushes the diaphragm 76 against seat 74 to close the supply port 70, even though supply pressure is present in the input line 50 and at supply port 70.
- the normally closed piezo valve 32 receives a control signal from the controller 26 and becomes energized so as to allow passage therethrough of air at supply pressure.
- Supply pressure is therefore applied to the pilot chamber 86 of exhaust valve assembly 46b via output line 44.
- Such closure of supply port 70 has the effect of closing off access of the operating chamber 42 to the exhaust line 54 such that the piston 94 of actuator 16 cannot move leftwardly.
- the return spring 96 prevents it from moving rightwardly, and as there is no incoming air at supply pressure, the operating rod 18 of the actuator 16 stays in a fixed position.
- Figs. 6, 7 and 8 illustrate a double-acting control system for performing the same functions as the single-acting system of Figs. 3-5.
- both sides of the piston have access to gas under supply pressure and atmosphere at appropriate times such that, depending upon which valves are opened and which are closed, the piston either moves to the right or left in response to changes in the volume of pressurized air introduced into the chambers on opposite sides of the piston.
- the double-acting system of Figs. 6-8 utilizes the same booster valve assembly 46 as the single-acting system, but five of such valve assemblies 46 are utilized in the double-acting system and they are arranged differently.
- the same type of piezo valves are utilized, three of such valves are utilized instead of two, one of them being normally open and two being normally closed.
- the double-acting system 200 of Figs. 6-8 includes a source of pressurized air 202 (or other gas), a double-acting actuator 204, a pilot circuit 206, and a booster circuit 208.
- the pilot circuit 206 includes pilot valve mechanism in the form of three piezo valves 210, 212 and 214.
- the piezo valves of pilot circuit 206 may be selected to be normally open, normally closed, or combinations of both.
- the piezo valve 210 is normally open, while piezo valves 212 and 214 are normally closed.
- Valve 210 has an input line 216
- the valve 212 has an input line 218, and valve 214 has an input line 220, all in direct communication with the air source 202.
- Valve 210 has an output line 222
- valve 218 has an output line 224
- valve 214 has an output line 226.
- Piezo valves 210-214 are operable when closed to connect their respective output lines 222-226 to atmosphere.
- the booster circuit 208 includes booster valve mechanism in the form of five of the booster valve assemblies 46. There is a supply valve assembly and an exhaust valve assembly for each end of the actuator 204, as well as a single control valve assembly that is common to the two exhaust valve assemblies and determines when the exhaust valve assemblies will be open to atmosphere. In the double-acting system 200, the five valve assemblies have been designated as supply valve assembly 228a, exhaust valve assembly 228b, control valve assembly 228c, exhaust valve assembly 228d, and supply valve assembly 228e. Each of the booster valve assemblies 228a-e is identical to the valve assembly 46 illustrated in Fig. 2, and the internal parts of the booster valve assemblies 228a-e will be described using the same reference numerals for such parts as used with respect to Fig. 2.
- the booster circuit 208 also includes a number of flow lines.
- Such flow lines include an input line 230 from the air source 202 to the supply port 70 of supply valve assembly 228a.
- Another input line 232 is connected between the air source 202 and the supply port 70 of supply valve assembly 228e.
- An output line 234 connects the exhaust port 72 of supply valve assembly 228a with a chamber 236 on the left side of the piston 238 of actuator 204, while an output line 240 connects the exhaust port 72 of supply valve assembly 228e with a chamber 242 on the right side of the piston 238.
- the output line 234 from supply valve assembly 228a has a branch 234a that connects to the supply port 70 of exhaust valve assembly 228b, while the output line 240 has a branch 240a that connects to the supply port 70 of exhaust valve assembly 228d.
- An interconnect line 244 connects the exhaust port 72 of exhaust valve assembly 228b with the exhaust port 72 of exhaust valve assembly 228d.
- Interconnect line 244 has a branch 244a connected to the supply port 70 of control valve assembly 228c, and an exhaust line 246 communicates the exhaust port 72 of control valve assembly 228c with atmosphere.
- the pilot circuit 206 in addition to the piezo valves 210-214, the input lines 216- 220, and the output lines 22 2-226, also includes a branch 222a of output line 222 that connects to the pilot inlet 88 of exhaust valve assembly 228d, and a branch 226a of output line 226 that connects to the pilot inlet 88 of exhaust valve assembly 228b.
- Output line 222 from piezo valve 210 connects to the pilot inlet 88 of supply valve assembly 228a
- the output line 224 of piezo valve 212 connects to the pilot inlet 88 of control valve assembly 228c
- the outlet line 226 of piezo valve 214 connects to the pilot inlet 88 of supply valve assembly 228e.
- Fig. 6 illustrates the condition of the control system 200 for moving the rod 248 of the actuator 204 leftwardly as indicated by the arrow 250. This may be selected as the valve closing direction for valve 12, if desired. In this condition, all three of the piezo valves 210, 212 and 214 are de-energized. Thus, pressurized air flows through the normally open piezo valve 210, but not through the normally closed piezo valves 212 and 214. This applies supply pressure to output line 222 and branch 222a, introducing pilot pressure into the pilot chambers 86 of supply valve assembly 228a and exhaust valve assembly 228d. Thus, supply valve assembly 228a and exhaust valve assembly 228d are closed.
- exhaust valve assembly 228b and control valve assembly 228c open as their diaphragms 76 are free to be unseated by the air seeking to exhaust from the left chamber 236 of actuator 204, opening chamber 236 to atmosphere.
- Such exhaust path comprises line 234, branch 234a, open exhaust valve assembly 228b, line 244, branch 244a, open control valve assembly 228c, and exhaust line 246.
- Fig. 7 illustrates the condition of the control system 200 for moving the rod 248 of actuator 204 rightwardly as illustrated by the arrow 252. This may be selected as the valve opening direction for the valve 12, if desired.
- the normally open piezo valve 210 is energized by a control signal from the controller 26, the normally closed piezo valve 212 is de-energized, and the normally closed piezo valve 214 is energized. Consequently, no pilot pressure is present on output line 222 for supply valve assembly 228a, or on branch line 222a for exhaust valve assembly 228d. These valve assemblies are therefore free to open.
- Fig. 8 illustrates the condition of the control system 200 for holding the actuator 204 in any selected position.
- the normally open piezo valve 210 is de- energized
- the normally closed piezo valve 212 is de-energized
- the normally closed piezo valve 214 is energized by a control signal from the controller 26. Consequently, pilot pressure is present in the pilot chambers 86 of supply valve assembly 228a and exhaust valve assembly 228d to close those valve assemblies.
- pilot pressure is present in the pilot chambers 86 of supply valve assembly 228e and exhaust valve assembly 228b via output line 226 and branch 226a to close those valve assemblies.
- lines 234 and 240 connected to the actuator chambers 236 and 242 respectively are effectively blocked from both the source of supply 202 and atmosphere. Consequently, the piston 238 is trapped against movement, holding the rod 248 in a fixed position.
- control valve assembly 228c is free to be opened at this time due to a lack of a pneumatic pilot signal from closed piezo valve 212, there is no exhausting air from either side of the actuator 204, and there is no way such chambers can be communicated with the exhaust line 246 through the opened control valve assembly 228c.
- Fig. 9 illustrates an alternative embodiment 300 of the booster valve assembly 46.
- the primary difference between the booster valve assembly 46 and the booster valve assembly 300 lies in the internal movable valve component.
- the valve component comprises two major parts, i.e., the diaphragm 76 and the separate piston 82
- the valve component comprises a single integrated part wherein the two functions of the piston and diaphragm are combined into a single structure.
- Valve assembly 300 includes a lower section 302 and a upper section 304.
- the lower section 302 includes an internal chamber 306 having a supply port 308 and an exhaust port 310.
- the supply port 308 has a valve seat 312 at its upper end.
- the chamber 306 has an upper enlarged portion 306a and a lower, smaller diameter portion 306b.
- a piston 314 reciprocates within the chamber 306, the larger diameter portion 314a thereof being received within the enlarged portion 306a and the smaller diameter portion 314b thereof being received within the smaller diameter portion 306b of the chamber 306.
- O- ring seals 316 and 318 encircle the enlarged piston portion 314a and the smaller piston portion 314b respectively so as to seal the chamber portions 306a and 306b from one another.
- a sealing pad 320 at the lower end of the piston 314 faces the valve seat 312 and makes sealing engagement therewith when the piston 314 is in its closed position, shifted downwardly from the opened position illustrated in Fig. 9.
- the upper section 304 of valve assembly 300 includes a pilot chamber 322 immediately overlying the upper surface of the piston 314.
- An inlet 324 in the upper section 304 is used to communicate the pilot chamber 322 with a source of pressurized air.
- the surface area of the upper face of the piston 314 exposed to pressurized air in the pilot chamber 322 is considerably larger than the surface area of the bottom face of the piston 314 exposed to pressurized air within the chamber 306. Consequently, when pressures are equal on opposite faces of the piston 314, it is shifted down into its closed position.
- a vent 326 within the lower section 302 communicates the larger diameter chamber portion 306a with the atmosphere.
- valve assembly 300 may be substituted for the assembly 46 in either of the applications illustrated in Figs. 1-8.
- the functions and operating sequences are the same in either case.
- Fig. 10 illustrates another alternative embodiment 400 of booster valve assembly.
- the valve assembly 400 comprises three primary sections stacked on top of one another, i.e., a bottom section 402, an intermediate section 404, and a top section 405.
- the bottom section 402 includes an internal chamber 406 having a supply port 408 and an exhaust port 410.
- the supply port 408 has a beveled valve seat 412.
- a valve ball 414 within the chamber 406 is movable between a closed position engaging the valve seat 412 so as to close the same and an open position in which the ball 414 is up off the seat 412.
- a flow path is established between the supply port 408 and the exhaust port 410 through the chamber 406; when the ball 414 is engaged with the seat 412, such flow path is closed.
- a diaphragm 416 is sandwiched between the sections 402 and 404 and seals the chamber 406 of section 402 from a chamber 418 within the intermediate section 404.
- a piston 420 is confined within the chamber 404 but is shiftable axially thereof generally toward and away from the valve seat 412. In Figure 10, the piston 420 is illustrated in its valve closing position in which it pushes the valve ball 414 into engagement with the valve seat 412.
- a pilot chamber 422 is defined on the upper side of the piston 420 between the diaphragm 421 and the top section 405, the pilot chamber 422 receiving a supply of pilot air at the operating pressure via an inlet 424 in the top section 405.
- a vent port 426 in the chamber 418 below the enlarged pilot end of the piston 420 is adapted to communicate with the atmosphere.
- the valve assembly 400 may be substituted for the assembly 46 in either of the applications illustrated in Figs. 1-8. The functions and operating sequences are the same in either case.
- the valve assembly 46 comprises three primary sections stacked one on top of the other.
- the three primary sections include a bottom section 502, an intermediate section 504, and a top section 506.
- the bottom section 502 includes an internal chamber 508, having a supply port 510 and an exhaust port 512.
- a first flexible diaphragm 514 is movable between a closed position, which engagably covers the supply port 510 as shown in Fig. 11 , and an open position. In an open position, the diaphragm is disengaged from the supply port 510, and a flow path is established between the supply port 510 and the exhaust 512. When the diaphragm is engaged with the supply port 510, the flow path is closed.
- the diaphragm 514 is sandwiched between the bottom section 502 and the intermediate section 504, and seals the chamber 508, of the bottom section 502, from a chamber 516 within the intermediate section 504.
- the piston 518 is confined within chamber 516, but is shiftable, axially, toward and away from the diaphragm 514.
- the diaphragm 520 Sandwiched between the intermediate section 504 and the top section 506 is another flexible diaphragm 520.
- the diaphragm 520 is engagably positioned on the piston 518. In a closed position, the diaphragm 520 seals off the intermediate section 504 from the upper section 506.
- the upper section 506 includes a pilot inlet 524 and a pilot chamber 526.
- the pilot chamber 526 receives a supply of pilot air at an operating pressure via the inlet 524.
- the diaphragm 520 In an open position, as shown in Fig. 11, the diaphragm 520 is positioned to allow a flow path in the pilot chamber. In a closed position, the diaphragm 520 closes the flow path between the pilot inlet 524 and pilot chamber 526.
- a vent 528 may be provided within the intermediate section 504. [ Please explain the how the vent contributes to the critical features of the invention.] The operation of the valve 46 will become clear
- Figs. 12-19 illustrate two-piezo pneumatic volume booster assemblies for single- acting, as well as double acting, actuators.
- Figs. 12-15 illustrate two-piezo pneumatic volume booster assemblies for single-acting actuators
- Figs. 16-19 illustrate two-piezo pneumatic volume booster assemblies for double-acting actuators.
- the valve booster circuit 20 includes four (4) valve assemblies 46c-46f.
- Fig. 12 illustrates the condition of the control system 14 for moving the piston 94 leftwardly, in the direction of the arrow 530. This may be selected as the direction for closing the valve 12, Fig. 1.
- no electrical signal is supplied from the controller 26, Fig. 1, to the piezo valves 30 and 32, such that they remain in their normal, de-energized condition.
- the normally open valve 30 allows a pneumatic pilot signal to pass along the output line and into the pilot chamber 526 of valve assemblies 46c and 46d, which forces the diaphragm 514 of valve assemblies 46c and 46d to seal the supply port of 46c and 46d.
- Supply pressure is also present at the supply port 510 of valve assemblies 46c and 46d.
- valve assembly 46c does not contribute any pressure to the chamber 92 of the actuator 16 or to valve assembly 46f.
- Valve assemblies 46e and 46f in their normally closed state, do not supply any pressure to the chamber 92 of the actuator 16.
- the supply pressure at valve assembly 46e is blocked because the exhaust 512 of valve assembly 46e is plugged, and the supply port 510 of valve assembly 46d is sealed by diaphragm 514 of valve assembly 46d.
- no supply pressure is input to valve assembly 46f. Accordingly, the piston 94 is able to move leftwardly, because there is no opposing pressure.
- the pressure in chamber 92 enters the supply port 510 of valve assembly 46f and is exhausted at the exhaust port 512 of valve assembly 46f.
- Fig. 13 illustrates the condition of the control system 14 for moving the piston 94 lightwardly, in the direction of the arrow 532. This may be selected as the direction for opening the valve 12, if desired.
- the controller has supplied electrical control signals to the piezo pilot valves 30 and 32, such that they are both in their energized positions.
- the only valve assembly that contributes supply pressure to the moving of the piston 94, is valve assembly 46c. Valve assembly 46c receives supply pressure at its supply port 510, which is exhausted, at its exhaust port 512 into the actuator chamber 94.
- valve assembly 46f The pressure is blocked from entering the supply port 510 of valve assembly 46f because the supply pressure that enters 46f pushes down diaphragm 514 of valve assembly 46f, such that it seals the supply port of valve assembly 46f, preventing any pressure from being exhausted from value assembly 46f. Consequently, all of the supply pressure that enters 510 of 46c is exhausted into chamber 236, and moves the piston 94 rightwardly.
- Fig 14 illustrates the condition of the control system 14 for holding the piston at any location, so as to not move the piston 94 leftwardly or rightwardly.
- the controller 26 has supplied electrical control signals to piezo valves 30 and 32, such that piezo valve 30 is in its de-energized state and piezo valve 32 is energized. Consequently, supply pressure enters the pilot chamber 526 of each of the valve assemblies 46c-46f.
- the piston 94 will likewise be held in the last position, if for some reason the control system 14 fails. As illustrated in Fig. 15, for example, if the control system 14 fails, and the normally-closed piezo valve 32 remains open, all of the piezo valve assemblies 46c-46f will remain open, and the conditions referenced in the description of Fig. 14 will exist. Therefore, the piston will also be held in its last position, and not move either rightwardly or leftwardly.
- Figs. 16-19 illustrate a double-acting control system for performing the same functions as the single-acting system of Figs. 12-15.
- both sides of the piston have access to gas under supply pressure atmosphere at appropriate times such that, depending upon which valves are opened and which are closed, the piston either moves to the right or to the left, in response to changes in the volume of pressurized air introduced into the chambers on opposite sides of the piston.
- the double-acting system of Figs. 16-19 utilize the same booster valve assembly 46 as the single-acting system Figs. 12-15, except for the configuration.
- Fig. 16 illustrates the condition of the control system 14 for moving the piston 94 leftwardly, in the direction of the arrow 530. This may be selected as the direction for closing the valve.
- electrical signals are supplied from the controller 26 to piezo valves 30 and 32, such that they remain in their normal de-energized positions. Thus, no electrical signals may be supplied from the controller 26 to piezo valves 30 and 32.
- valve assemblies 46c and 46d are normally open, and valve assemblies 46e and 46f are normally closed.
- valve assemblies 46c and 46d forces the piston down, and the diaphragm 514 of each of the valve assemblies 46c and 46d prevent a flow path from the supply 510 of each of the valve assemblies 46c and 46d to the exhaust of valve assemblies 46c and 46d.
- the supply pressure at the normally closed valve assembly 46e has a flow path to the exhaust 512 of valve assembly 46e into chamber 242. There is no flow path created between valve assembly 46e and 46d because the diaphragm 514 of valve assembly 46d seals the supply 510 of valve assembly 46d.
- Fig. 17 illustrates the condition of the control system 14 for moving the piston 94 rightwardly, in the direction of the arrow 532. This may be selected as the direction for opening the valve. In this condition electrical signals are supplied to both piezo valves 30 and 32, and they are energized. When the normally-open piezo valve 30 is energized the supply pressure at the pilot inlet 524 of valve assembly 46c and 46d, is prevented from entering the pilot chamber 526.
- valve assembly 46c The supply pressure at the supply 510 of valve assembly 46c, pushes the piston 518 upward and the supply pressure flows through the exhaust of 46c and into chamber 236 of the actuator 16.
- the supply pressure from the exhaust 512 of 46c does not flow through 46f because, in its energized state, valve assembly 46f allows supply pressure to enter its pilot chamber and forces the piston down, and forces the flexible diaphragm 514 to seal the supply port 510 of 46f.
- No supply pressure enters chamber 242 of the actuator 16 because in its energized state, valve assembly 46e allows supply pressure to enter the pilot chamber 526 and the diaphragm is pushed downward, thus, preventing the supply pressure at the supply port 510 of 46e from flowing to chamber 242 or to valve assembly 46d.
- no supply pressure enters chamber 242, and the supply pressure entering chamber 236 moves the piston 94 rightwardly.
- Fig. 18 illustrates the condition of the control system 14 for holding piston 94 at any location.
- the piston 94 does not move rightwardly or leftwardly.
- electrical signals are supplied to piezo valves 30 and 32, such that piezo valve 30 remains de-energized and piezo valve 32 is energized.
- each of the valve assemblies 46c-46f is in an open state and supply pressure at the pilot inlet 524 of each of the valve assemblies 46c-46f is allowed to enter the pilot chamber of each of valve assemblies 46c- 46f.
- the supply pressure forces each piston downward, and the flexible diaphragm 514 of each of valve assemblies 46c-46f seals the supply port 510 of each of the valve assemblies 46c-46f.
- the supply pressure at the supply ports 46c and 46e is prevented from flowing to valve assemblies 46f and 46d, respectively.
- the supply pressure at the supply ports 46c and 46f is also prevented from flowing into the chambers 236 and 242, respectively, of the actuator 16. Because pressure does not enter either of the chambers 236 and 242, the piston 94 is not forced in any direction.
- Fig. 19 illustrates the condition when, for some reason, the control 14 fails in its last state, and the normally-closed piezo valve, for example, remains open, and signals are supplied to piezo valves 30 and 32 such that they remain de-energized.
- each of the valve assemblies 46c-46f will be in an open state, as described with reference to Fig. 18, and the piston will also be held in its last state, and not move in any direction.
- each of the piezo valve assemblies 46c-46f allows the supply pressure at the pilot inlet 524 of each of 46c-46f to enter the pilot chamber 526 of each of the valve assemblies 46c-46f.
- the supply pressure in each pilot chamber 521 causes the piston to push each diaphragm 514 downward, sealing the supply chambers 510 of each of valve assemblies 46c-46f.
- the piston does not move either leftward or rightward.
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Fluid-Driven Valves (AREA)
Abstract
Description
Claims
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP02750452A EP1409900A1 (en) | 2001-07-24 | 2002-07-24 | Pneumatic diaphragm valve and method for controlling a pneumatic valve actuator |
CA002423350A CA2423350A1 (en) | 2001-07-24 | 2002-07-24 | Pneumatic diaphragm valve and method for controlling a pneumatic valve actuator |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US47172301A | 2001-07-24 | 2001-07-24 | |
US09/471,723 | 2001-07-24 |
Publications (2)
Publication Number | Publication Date |
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WO2003010452A1 true WO2003010452A1 (en) | 2003-02-06 |
WO2003010452A8 WO2003010452A8 (en) | 2004-08-12 |
Family
ID=23872746
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2002/025200 WO2003010452A1 (en) | 2001-07-24 | 2002-07-24 | Pneumatic diaphragm valve and method for controlling a pneumatic valve actuator |
Country Status (2)
Country | Link |
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EP (1) | EP1409900A1 (en) |
WO (1) | WO2003010452A1 (en) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2008029223A1 (en) * | 2006-09-05 | 2008-03-13 | ITW Oberflächentechnik GmbH & Co. KG | Control device of an air motor, in particular in combination with a pump and a spray coating installation |
WO2011105952A1 (en) * | 2010-02-24 | 2011-09-01 | Scania Cv Ab | Arrangement and method for control of a piston movement |
WO2012135490A1 (en) * | 2011-04-01 | 2012-10-04 | General Equipment And Manufacturing Company, Inc., D/B/A Topworx, Inc. | Poppet valve assembly for controlling a pneumatic actuator |
CN113007407A (en) * | 2021-03-23 | 2021-06-22 | 嘉兴志嘉智能电器有限公司 | Pressure stabilizing valve capable of automatically closing flow path and flow path pressure adjusting method |
CN114688296A (en) * | 2020-12-29 | 2022-07-01 | 上海微电子装备(集团)股份有限公司 | Pneumatic control device and system and photoetching equipment |
WO2025021949A3 (en) * | 2023-07-25 | 2025-03-06 | Norgren Gmbh | Quick-filling valve device |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5343894A (en) | 1991-09-30 | 1994-09-06 | Hoerbiger Ventilwerke Aktiengesellschaft | Piezo valve |
WO2001046595A1 (en) * | 1999-12-23 | 2001-06-28 | Spx Corporation | Pneumatic volume booster for valve positioner |
-
2002
- 2002-07-24 WO PCT/US2002/025200 patent/WO2003010452A1/en not_active Application Discontinuation
- 2002-07-24 EP EP02750452A patent/EP1409900A1/en not_active Withdrawn
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5343894A (en) | 1991-09-30 | 1994-09-06 | Hoerbiger Ventilwerke Aktiengesellschaft | Piezo valve |
WO2001046595A1 (en) * | 1999-12-23 | 2001-06-28 | Spx Corporation | Pneumatic volume booster for valve positioner |
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2008029223A1 (en) * | 2006-09-05 | 2008-03-13 | ITW Oberflächentechnik GmbH & Co. KG | Control device of an air motor, in particular in combination with a pump and a spray coating installation |
WO2011105952A1 (en) * | 2010-02-24 | 2011-09-01 | Scania Cv Ab | Arrangement and method for control of a piston movement |
WO2012135490A1 (en) * | 2011-04-01 | 2012-10-04 | General Equipment And Manufacturing Company, Inc., D/B/A Topworx, Inc. | Poppet valve assembly for controlling a pneumatic actuator |
CN102734500A (en) * | 2011-04-01 | 2012-10-17 | 通用设备和制造公司 | Poppet valve assembly for controlling pneumatic actuator |
JP2014512496A (en) * | 2011-04-01 | 2014-05-22 | ジェネラル イクイップメント アンド マニュファクチャリング カンパニー, インコーポレイテッド, ディー/ビー/エー トップワークス, インコーポレイテッド | Poppet valve assembly for controlling pneumatic actuators |
US9279433B2 (en) | 2011-04-01 | 2016-03-08 | General Equipment And Manufacturing Company, Inc. | Poppet valve assembly for controlling a pneumatic actuator |
CN114688296A (en) * | 2020-12-29 | 2022-07-01 | 上海微电子装备(集团)股份有限公司 | Pneumatic control device and system and photoetching equipment |
CN113007407A (en) * | 2021-03-23 | 2021-06-22 | 嘉兴志嘉智能电器有限公司 | Pressure stabilizing valve capable of automatically closing flow path and flow path pressure adjusting method |
WO2025021949A3 (en) * | 2023-07-25 | 2025-03-06 | Norgren Gmbh | Quick-filling valve device |
Also Published As
Publication number | Publication date |
---|---|
EP1409900A1 (en) | 2004-04-21 |
WO2003010452A8 (en) | 2004-08-12 |
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