WO2003005007A1 - Method and device for inspecting defect of sheet-shaped transparent body - Google Patents

Method and device for inspecting defect of sheet-shaped transparent body Download PDF

Info

Publication number: WO2003005007A1
Authority: WO; WIPO (PCT)
Prior art keywords: defect; sheet; transparent body; shaped transparent; image data
Prior art date: 2001-07-05

Application number

PCT/JP2002/006720

Other languages

English (en)

French (fr)

Inventor

Shinji Maezono

Satoshi Kanki

Original Assignee

Nippon Sheet Glass Co., Ltd.

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2001-07-05

Filing date

2002-07-03

Publication date

2003-01-16

2002-07-03 Application filed by Nippon Sheet Glass Co., Ltd. filed Critical Nippon Sheet Glass Co., Ltd.

2002-07-03 Priority to KR10-2003-7015820A priority Critical patent/KR20040015728A/ko

2002-07-03 Priority to US10/473,442 priority patent/US6930772B2/en

2002-07-03 Priority to JP2003510932A priority patent/JP4132046B2/ja

2003-01-16 Publication of WO2003005007A1 publication Critical patent/WO2003005007A1/ja

Links

Classifications

- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
- G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
- G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod

Landscapes

General Physics & Mathematics (AREA)
Physics & Mathematics (AREA)
Chemical & Material Sciences (AREA)
Analytical Chemistry (AREA)
Textile Engineering (AREA)
Health & Medical Sciences (AREA)
Life Sciences & Earth Sciences (AREA)
Biochemistry (AREA)
General Health & Medical Sciences (AREA)
Engineering & Computer Science (AREA)
Immunology (AREA)
Pathology (AREA)
Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

PCT/JP2002/006720 2001-07-05 2002-07-03 Method and device for inspecting defect of sheet-shaped transparent body WO2003005007A1 (en)

Priority Applications (3)

Application Number	Priority Date	Filing Date	Title
KR10-2003-7015820A KR20040015728A (ko)	2001-07-05	2002-07-03	시트형 투명체의 결점을 검사하는 방법 및 장치
US10/473,442 US6930772B2 (en)	2001-07-05	2002-07-03	Method and device for inspecting defect of sheet-shaped transparent body
JP2003510932A JP4132046B2 (ja)	2001-07-05	2002-07-03	シート状透明体の欠点を検査する装置

Applications Claiming Priority (2)

Application Number	Priority Date	Filing Date	Title
JP2001204571		2001-07-05
JP2001-204571		2001-07-05

Publications (1)

Publication Number	Publication Date
WO2003005007A1 true WO2003005007A1 (en)	2003-01-16

Family

ID=19041012

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
PCT/JP2002/006720 WO2003005007A1 (en)	2001-07-05	2002-07-03	Method and device for inspecting defect of sheet-shaped transparent body

Country Status (5)

Country	Link
US (1)	US6930772B2 (ja)
JP (1)	JP4132046B2 (ja)
KR (1)	KR20040015728A (ja)
CN (1)	CN1293381C (ja)
WO (1)	WO2003005007A1 (ja)

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EP2278304A1 (de) *	2003-04-04	2011-01-26	Schott AG	Vorrichtung zur Erkennung von Fehlern in transparentem Material
JP2012015230A (ja) *	2010-06-30	2012-01-19	Daiichi Jitsugyo Viswill Co Ltd	チップｌｅｄ検査装置
WO2013140952A1 (ja) *	2012-03-23	2013-09-26	富士フイルム株式会社	欠陥検査方法
CN103983430A (zh) *	2014-04-25	2014-08-13	中国科学院长春光学精密机械与物理研究所	日盲紫外像增强器带外相对光谱响应度测试装置及方法
JP2014202694A (ja) *	2013-04-09	2014-10-27	住友化学株式会社	欠陥検査装置、光学表示デバイスの生産システム、光学シートの製造システム及び欠陥検査方法
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JP2007192660A (ja) *	2006-01-19	2007-08-02	Fujifilm Corp	フイルムの表面欠陥検出方法及び検出機
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Citations (5)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPH08128968A (ja) *	1994-10-31	1996-05-21	Sumitomo Chem Co Ltd	透明シート状成形体の欠陥検査法
JPH08178855A (ja) *	1994-12-20	1996-07-12	Asahi Glass Co Ltd	透光性物体あるいは鏡面性物体の検査方法
JPH08220021A (ja) *	1995-02-10	1996-08-30	Central Glass Co Ltd	透明板状体の欠点検出方法
JPH08247954A (ja) *	1995-03-15	1996-09-27	Asahi Glass Co Ltd	光学歪の測定方法
WO1999049303A1 (de) *	1998-03-25	1999-09-30	Lasor Ag	Verfahren und vorrichtung zur detektion von fehlern in flachglas

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
FI80959C (fi) *	1988-04-21	1990-08-10	Outokumpu Oy	Foerfarande och anordning foer inspektion av spegelreflexionsytor.
DE4031633A1 (de) *	1990-10-05	1992-04-16	Sick Optik Elektronik Erwin	Optische inspektionsvorrichtung
JP2795595B2 (ja) *	1992-06-26	1998-09-10	セントラル硝子株式会社	透明板状体の欠点検出方法
US5870203A (en) *	1996-03-15	1999-02-09	Sony Corporation	Adaptive lighting control apparatus for illuminating a variable-speed web for inspection
DE19643018B4 (de) *	1996-10-18	2010-06-17	Isra Surface Vision Gmbh	Verfahren und Vorrichtung zum Messen des Verlaufs reflektierender Oberflächen
DE19813073A1 (de) *	1998-03-25	1999-09-30	Laser Sorter Gmbh	Verfahren und Vorrichtung zur Bestimmung der optischen Qualität und zur Detektion von Fehlern von Flachglas und anderen optisch transparenten Materialien, insbesondere von Drips, Fäden und Linien
JP2004125661A (ja) *	2002-10-03	2004-04-22	Fuji Photo Film Co Ltd	磁気テープの表面歪み検査装置

2002
- 2002-07-03 US US10/473,442 patent/US6930772B2/en not_active Expired - Fee Related
- 2002-07-03 JP JP2003510932A patent/JP4132046B2/ja not_active Expired - Fee Related
- 2002-07-03 KR KR10-2003-7015820A patent/KR20040015728A/ko not_active Ceased
- 2002-07-03 WO PCT/JP2002/006720 patent/WO2003005007A1/ja active Application Filing
- 2002-07-03 CN CNB028094824A patent/CN1293381C/zh not_active Expired - Fee Related

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPH08128968A (ja) *	1994-10-31	1996-05-21	Sumitomo Chem Co Ltd	透明シート状成形体の欠陥検査法
JPH08178855A (ja) *	1994-12-20	1996-07-12	Asahi Glass Co Ltd	透光性物体あるいは鏡面性物体の検査方法
JPH08220021A (ja) *	1995-02-10	1996-08-30	Central Glass Co Ltd	透明板状体の欠点検出方法
JPH08247954A (ja) *	1995-03-15	1996-09-27	Asahi Glass Co Ltd	光学歪の測定方法
WO1999049303A1 (de) *	1998-03-25	1999-09-30	Lasor Ag	Verfahren und vorrichtung zur detektion von fehlern in flachglas

Cited By (13)

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EP2278304A1 (de) *	2003-04-04	2011-01-26	Schott AG	Vorrichtung zur Erkennung von Fehlern in transparentem Material
WO2006093381A1 (en) *	2005-03-02	2006-09-08	Semi Sysco Co., Ltd.	Apparatus and method for inspecting edge defect and discoloration of glass substrate
JP2009047517A (ja) *	2007-08-17	2009-03-05	Kokusai Gijutsu Kaihatsu Co Ltd	検査装置
JP2012015230A (ja) *	2010-06-30	2012-01-19	Daiichi Jitsugyo Viswill Co Ltd	チップｌｅｄ検査装置
WO2013140952A1 (ja) *	2012-03-23	2013-09-26	富士フイルム株式会社	欠陥検査方法
JP2013195413A (ja) *	2012-03-23	2013-09-30	Fujifilm Corp	欠陥検査方法
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CN103983430A (zh) *	2014-04-25	2014-08-13	中国科学院长春光学精密机械与物理研究所	日盲紫外像增强器带外相对光谱响应度测试装置及方法
JP2016017839A (ja) *	2014-07-08	2016-02-01	株式会社メック	欠陥検査装置および欠陥検査方法
WO2016009920A1 (ja) *	2014-07-14	2016-01-21	住友化学株式会社	基板の検査装置及び基板の検査方法
JP2016020824A (ja) *	2014-07-14	2016-02-04	株式会社サイオクス	基板の検査装置及び基板の検査方法
US10209203B2 (en)	2014-07-14	2019-02-19	Sumitomo Chemical Company, Limited	Wafer inspection apparatus and wafer inspection method
JP2018155548A (ja) *	2017-03-16	2018-10-04	コニカミノルタ株式会社	欠陥検査方法、欠陥検査プログラム、および欠陥検査装置

Also Published As

Publication number	Publication date
JP4132046B2 (ja)	2008-08-13
KR20040015728A (ko)	2004-02-19
CN1293381C (zh)	2007-01-03
CN1520512A (zh)	2004-08-11
US6930772B2 (en)	2005-08-16
JPWO2003005007A1 (ja)	2004-10-28
US20040179193A1 (en)	2004-09-16

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