WO2003053845A3 - Nanolithographie par fonctionnalisation chimique - Google Patents
Nanolithographie par fonctionnalisation chimique Download PDFInfo
- Publication number
- WO2003053845A3 WO2003053845A3 PCT/US2002/026423 US0226423W WO03053845A3 WO 2003053845 A3 WO2003053845 A3 WO 2003053845A3 US 0226423 W US0226423 W US 0226423W WO 03053845 A3 WO03053845 A3 WO 03053845A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- chemical functionalization
- nanolithography
- molecules
- internal bond
- reacting
- Prior art date
Links
- 238000007306 functionalization reaction Methods 0.000 title abstract 2
- 239000000126 substance Substances 0.000 title abstract 2
- 238000005329 nanolithography Methods 0.000 title 1
- 125000000524 functional group Chemical group 0.000 abstract 2
- 238000000034 method Methods 0.000 abstract 2
- 239000000758 substrate Substances 0.000 abstract 2
- 238000000059 patterning Methods 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/16—Coating processes; Apparatus therefor
- G03F7/165—Monolayers, e.g. Langmuir-Blodgett
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
Abstract
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
AU2002365072A AU2002365072A1 (en) | 2001-10-26 | 2002-08-19 | Chemical functionalization nanolithography |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/032,649 | 2001-10-26 | ||
US10/032,649 US6835534B2 (en) | 2000-10-27 | 2001-10-26 | Chemical functionalization nanolithography |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2003053845A2 WO2003053845A2 (fr) | 2003-07-03 |
WO2003053845A3 true WO2003053845A3 (fr) | 2004-05-06 |
Family
ID=21866064
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2002/026423 WO2003053845A2 (fr) | 2001-10-26 | 2002-08-19 | Nanolithographie par fonctionnalisation chimique |
Country Status (3)
Country | Link |
---|---|
US (1) | US6835534B2 (fr) |
AU (1) | AU2002365072A1 (fr) |
WO (1) | WO2003053845A2 (fr) |
Families Citing this family (26)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002069111A (ja) * | 2000-06-13 | 2002-03-08 | Japan Science & Technology Corp | 重合分子鎖の作成方法 |
JP3543967B2 (ja) * | 2000-09-21 | 2004-07-21 | 松下電器産業株式会社 | 走査型プローブ顕微鏡探針とその作製方法、ならびにその探針を備えた走査型プローブ顕微鏡およびそれ用いた分子加工法 |
JP4502357B2 (ja) * | 2002-03-08 | 2010-07-14 | キヤノン株式会社 | 新規化合物とその合成方法、インク、インクカートリッジ、記録ユニット、インクジェット記録装置及び記録方法 |
JP4907084B2 (ja) * | 2002-05-21 | 2012-03-28 | ノースウエスタン ユニバーシティ | 静電気駆動リソグラフィー |
US7491425B2 (en) * | 2004-10-29 | 2009-02-17 | International Business Machines Corporation | Scanning probe-based lithography method |
US20060222869A1 (en) * | 2005-04-04 | 2006-10-05 | Yuguang Cai | Electropen lithography |
WO2007025023A2 (fr) | 2005-08-24 | 2007-03-01 | The Trustees Of Boston College | Appareil et procedes pour commutation optique au moyen de dispositifs optiques d'echelle nanometrique |
US7589880B2 (en) | 2005-08-24 | 2009-09-15 | The Trustees Of Boston College | Apparatus and methods for manipulating light using nanoscale cometal structures |
WO2007025013A2 (fr) | 2005-08-24 | 2007-03-01 | The Trustees Of Boston College | Microscope optique a echelle nanometrique |
WO2007086903A2 (fr) | 2005-08-24 | 2007-08-02 | The Trustees Of Boston College | Appareils et procedes de conversion de l’energie solaire utilisant des structures nanocoaxiales |
EP1917557A4 (fr) | 2005-08-24 | 2015-07-22 | Trustees Boston College | Appareil et procedes de conversion d'energie solaire mettant en oeuvre des structures metalliques composites d'echelle nanometrique |
EP1969351A4 (fr) * | 2005-12-16 | 2010-12-29 | Univ Indiana Res & Tech Corp | Systemes de capteur a resonance plasmonique de surface a l'echelle submicrometrique |
US8355136B2 (en) | 2005-12-16 | 2013-01-15 | Indiana University Research And Technology Corporation | Sub-micron surface plasmon resonance sensor systems |
US10308514B2 (en) | 2007-09-07 | 2019-06-04 | Cbn Nano Technologies Inc. | Systems and methods for the manufacture of atomically-precise products |
US20130178627A1 (en) | 2011-07-21 | 2013-07-11 | Robert A. Freitas, JR. | Methods, Systems and Workpieces Using Mechanosynthesis |
US9244097B1 (en) | 2007-09-07 | 2016-01-26 | Robert A. Freitas, JR. | Mechanosynthetic tools for a atomic-scale fabrication |
US8171568B2 (en) | 2007-09-07 | 2012-05-01 | Freitas Robert A | Positional diamondoid mechanosynthesis |
DE102008046707A1 (de) * | 2008-09-11 | 2010-03-18 | Universität Bielefeld | Vollständig vernetzte chemisch strukturierte Monoschichten |
JP2012528726A (ja) * | 2009-05-29 | 2012-11-15 | ジョージア テック リサーチ コーポレイション | 熱化学ナノリソグラフィーの構成要素、システム、および方法 |
DE102009034575A1 (de) * | 2009-07-24 | 2011-01-27 | Universität Bielefeld | Perforierte Membranen |
US10197597B2 (en) | 2013-02-28 | 2019-02-05 | Cbn Nano Technologies Inc. | Build sequences for mechanosynthesis |
US9676677B2 (en) | 2013-02-28 | 2017-06-13 | Robert A. Freitas, JR. | Build sequences for mechanosynthesis |
US10067160B2 (en) | 2016-11-16 | 2018-09-04 | CBN Nano Technologies, Inc. | Sequential tip systems and methods for positionally controlled chemistry |
US10072031B1 (en) | 2016-05-12 | 2018-09-11 | CBN Nano Technologies, Inc. | Systems and methods for mechanosynthesis |
US11708384B2 (en) | 2016-05-12 | 2023-07-25 | Cbn Nano Technologies Inc. | Systems and methods for mechanosynthesis |
US10822229B2 (en) | 2016-11-16 | 2020-11-03 | Cbn Nano Technologies Inc. | Systems and methods for mechanosynthesis |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0506993A1 (fr) * | 1987-03-06 | 1992-10-07 | Geo-Centers, Inc. | Méthode de configuration à haute résolution dans des substrats solides |
US5648201A (en) * | 1991-04-25 | 1997-07-15 | The United Sates Of America As Represented By The Secretary Of The Navy | Efficient chemistry for selective modification and metallization of substrates |
WO1997039151A1 (fr) * | 1996-04-17 | 1997-10-23 | Affymetrix, Inc. | Procedes de synthese de matrices polymeres photolabiles |
WO1997038802A1 (fr) * | 1996-04-12 | 1997-10-23 | The Texas A & M University System | Structures polymeres mono- ou multicouches auto-assemblees et leur utilisation en photolithographie |
WO1998058293A2 (fr) * | 1997-06-18 | 1998-12-23 | Biotools - Institut Für Computerintegriertes Bioengineering Gmbh | Procede et dispositif d'immobilisation de macromolecules |
WO2003023517A1 (fr) * | 2001-09-12 | 2003-03-20 | Postech Foundation | Procede de reproduction haute resolution de modeles a l'aide de rayons x doux, procede de preparation du nano-dispositif a l'aide de ce procede |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0249457B1 (fr) * | 1986-06-12 | 1991-08-21 | Matsushita Electric Industrial Co., Ltd. | Procédé pour obtenir des images |
US5079600A (en) * | 1987-03-06 | 1992-01-07 | Schnur Joel M | High resolution patterning on solid substrates |
US5468597A (en) * | 1993-08-25 | 1995-11-21 | Shipley Company, L.L.C. | Selective metallization process |
US5514501A (en) * | 1994-06-07 | 1996-05-07 | The United States Of America As Represented By The Secretary Of Commerce | Process for UV-photopatterning of thiolate monolayers self-assembled on gold, silver and other substrates |
-
2001
- 2001-10-26 US US10/032,649 patent/US6835534B2/en not_active Expired - Lifetime
-
2002
- 2002-08-19 AU AU2002365072A patent/AU2002365072A1/en not_active Abandoned
- 2002-08-19 WO PCT/US2002/026423 patent/WO2003053845A2/fr not_active Application Discontinuation
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0506993A1 (fr) * | 1987-03-06 | 1992-10-07 | Geo-Centers, Inc. | Méthode de configuration à haute résolution dans des substrats solides |
US5648201A (en) * | 1991-04-25 | 1997-07-15 | The United Sates Of America As Represented By The Secretary Of The Navy | Efficient chemistry for selective modification and metallization of substrates |
WO1997038802A1 (fr) * | 1996-04-12 | 1997-10-23 | The Texas A & M University System | Structures polymeres mono- ou multicouches auto-assemblees et leur utilisation en photolithographie |
WO1997039151A1 (fr) * | 1996-04-17 | 1997-10-23 | Affymetrix, Inc. | Procedes de synthese de matrices polymeres photolabiles |
WO1998058293A2 (fr) * | 1997-06-18 | 1998-12-23 | Biotools - Institut Für Computerintegriertes Bioengineering Gmbh | Procede et dispositif d'immobilisation de macromolecules |
WO2003023517A1 (fr) * | 2001-09-12 | 2003-03-20 | Postech Foundation | Procede de reproduction haute resolution de modeles a l'aide de rayons x doux, procede de preparation du nano-dispositif a l'aide de ce procede |
Non-Patent Citations (6)
Title |
---|
CALVERT, JEFFREY M., J. VAC. SCI. TECHNOL. B, vol. 11, no. 6, 1993, pages 2155 - 2163, XP002273957 * |
GOELZHAESER A ET AL: "CHEMICAL NANOLITHOGRAPHY WITH ELECTRON BEAMS", ADVANCED MATERIALS, VCH VERLAGSGESELLSCHAFT, WEINHEIM, DE, vol. 13, no. 11, 5 June 2001 (2001-06-05), pages 806 - 809, XP001132523, ISSN: 0935-9648 * |
MUELLER W T ET AL: "A STRATEGY FOR THE CHEMICAL SYNTHESIS OF NANOSTRUCTURES", SCIENCE, AMERICAN ASSOCIATION FOR THE ADVANCEMENT OF SCIENCE,, US, vol. 268, 14 April 1995 (1995-04-14), pages 272 - 273, XP000673038, ISSN: 0036-8075 * |
SAKAKI, JUN-ICHI ET AL., CHEM. PHARM. BULL., vol. 38, no. 8, 1990, pages 2262 - 2264, XP002273958 * |
WOLLMAN, ERIC W. ET AL., LANGMUIR, vol. 9, 1993, pages 1517 - 1520, XP002273956 * |
YAN, LIN ET AL., J. AM. CHEM. SOC., vol. 120, 1998, pages 6179 - 6180, XP002273955 * |
Also Published As
Publication number | Publication date |
---|---|
WO2003053845A2 (fr) | 2003-07-03 |
US20020127491A1 (en) | 2002-09-12 |
US6835534B2 (en) | 2004-12-28 |
AU2002365072A1 (en) | 2003-07-09 |
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