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WO2003049175A1 - Beam irradiator and laser anneal device - Google Patents

Beam irradiator and laser anneal device Download PDF

Info

Publication number
WO2003049175A1
WO2003049175A1 PCT/JP2002/012340 JP0212340W WO03049175A1 WO 2003049175 A1 WO2003049175 A1 WO 2003049175A1 JP 0212340 W JP0212340 W JP 0212340W WO 03049175 A1 WO03049175 A1 WO 03049175A1
Authority
WO
WIPO (PCT)
Prior art keywords
beam splitter
reflecting mirror
laser
anneal device
laser anneal
Prior art date
Application number
PCT/JP2002/012340
Other languages
French (fr)
Japanese (ja)
Inventor
Koichi Tsukihara
Koichi Tatsuki
Original Assignee
Sony Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corporation filed Critical Sony Corporation
Priority to KR10-2003-7010265A priority Critical patent/KR20040063079A/en
Priority to JP2003550273A priority patent/JPWO2003049175A1/en
Priority to US10/467,518 priority patent/US7109435B2/en
Publication of WO2003049175A1 publication Critical patent/WO2003049175A1/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/0604—Shaping the laser beam, e.g. by masks or multi-focusing by a combination of beams
    • B23K26/0608—Shaping the laser beam, e.g. by masks or multi-focusing by a combination of beams in the same heat affected zone [HAZ]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/34—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies not provided for in groups H01L21/18, H10D48/04 and H10D48/07, with or without impurities, e.g. doping materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/0604—Shaping the laser beam, e.g. by masks or multi-focusing by a combination of beams
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/067—Dividing the beam into multiple beams, e.g. multifocusing
    • C—CHEMISTRY; METALLURGY
    • C21—METALLURGY OF IRON
    • C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D1/00—General methods or devices for heat treatment, e.g. annealing, hardening, quenching or tempering
    • C21D1/06—Surface hardening
    • C21D1/09—Surface hardening by direct application of electrical or wave energy; by particle radiation
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/324—Thermal treatment for modifying the properties of semiconductor bodies, e.g. annealing, sintering
    • C—CHEMISTRY; METALLURGY
    • C21—METALLURGY OF IRON
    • C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D1/00—General methods or devices for heat treatment, e.g. annealing, hardening, quenching or tempering
    • C21D1/34—Methods of heating

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Plasma & Fusion (AREA)
  • General Physics & Mathematics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Thermal Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Nonlinear Science (AREA)
  • Recrystallisation Techniques (AREA)

Abstract

A laser anneal device (10) comprises first and second beam splitters (21 and 22) disposed parallel to each other and a beam splitting unit (14) having a reflecting mirror (23) in order to split one laser beam into four laser beams having no interference with each other. The transmitted beam from the first beam splitter and the laser beam from the first beam splitter after being reflected by the reflecting mirror are incident on the second beam splitter. The second beam splitter emits two transmitted beams outside, and the reflecting mirror further reflects the reflected beam from the second beam splitter and emits it outside. The distance between the two beam splitters and the distance between the first beam splitter and the reflecting mirror are set to be L/(2cos θ) or over where θ is the angle of incidence, and L is the interferential length.
PCT/JP2002/012340 2001-12-07 2002-11-26 Beam irradiator and laser anneal device WO2003049175A1 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
KR10-2003-7010265A KR20040063079A (en) 2001-12-07 2002-11-26 Beam irradiator and laser anneal device
JP2003550273A JPWO2003049175A1 (en) 2001-12-07 2002-11-26 Light irradiation apparatus and laser annealing apparatus
US10/467,518 US7109435B2 (en) 2001-12-07 2002-11-26 Beam irradiator and laser anneal device

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2001/374922 2001-12-07
JP2001374922 2001-12-07

Publications (1)

Publication Number Publication Date
WO2003049175A1 true WO2003049175A1 (en) 2003-06-12

Family

ID=19183394

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2002/012340 WO2003049175A1 (en) 2001-12-07 2002-11-26 Beam irradiator and laser anneal device

Country Status (5)

Country Link
US (1) US7109435B2 (en)
JP (1) JPWO2003049175A1 (en)
KR (1) KR20040063079A (en)
TW (1) TWI223843B (en)
WO (1) WO2003049175A1 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100683662B1 (en) * 2003-11-28 2007-02-20 삼성에스디아이 주식회사 Laser processing equipment
CN101678507B (en) * 2007-06-18 2012-11-28 应用材料公司 Pyrometer for laser annealing system compatible with amorphous carbon optical absorber layer
JP2016507075A (en) * 2013-01-21 2016-03-07 インテル・コーポレーション Methods for reducing speckle
JP2018504599A (en) * 2015-01-21 2018-02-15 トルネード スペクトラル システムズ，インコーポレイテッド Hybrid image pupil optical reformer

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8042740B2 (en) * 2000-11-24 2011-10-25 Metrologic Instruments, Inc. Method of reading bar code symbols on objects at a point-of-sale station by passing said objects through a complex of stationary coplanar illumination and imaging planes projected into a 3D imaging volume
JP3977038B2 (en) * 2001-08-27 2007-09-19 株式会社半導体エネルギー研究所 Laser irradiation apparatus and laser irradiation method
JP2004055771A (en) * 2002-07-18 2004-02-19 Nec Lcd Technologies Ltd Semiconductor thin film manufacturing method and laser irradiation apparatus
JP2004158568A (en) * 2002-11-05 2004-06-03 Sony Corp Light irradiation device
US8536492B2 (en) * 2003-10-27 2013-09-17 Applied Materials, Inc. Processing multilayer semiconductors with multiple heat sources
JP2007110064A (en) * 2005-09-14 2007-04-26 Ishikawajima Harima Heavy Ind Co Ltd Laser annealing method and device thereof
US7615722B2 (en) * 2006-07-17 2009-11-10 Coherent, Inc. Amorphous silicon crystallization using combined beams from optically pumped semiconductor lasers
US20080013182A1 (en) * 2006-07-17 2008-01-17 Joerg Ferber Two-stage laser-beam homogenizer
US7888620B2 (en) * 2006-07-31 2011-02-15 Electro Scientific Industries, Inc. Reducing coherent crosstalk in dual-beam laser processing system
KR100900684B1 (en) * 2007-07-19 2009-06-01 삼성전기주식회사 Line beam laser device and surface measuring device using same
US8148663B2 (en) * 2007-07-31 2012-04-03 Applied Materials, Inc. Apparatus and method of improving beam shaping and beam homogenization
US20090034071A1 (en) * 2007-07-31 2009-02-05 Dean Jennings Method for partitioning and incoherently summing a coherent beam
US8460983B1 (en) * 2008-01-21 2013-06-11 Kovio, Inc. Method for modifying and controlling the threshold voltage of thin film transistors
EP2483734B8 (en) * 2009-10-01 2021-08-11 Tornado Spectral Systems, Inc. Optical slicer for improving the spectral resolution of a dispersive spectrograph
TWI543264B (en) * 2010-03-31 2016-07-21 應用材料股份有限公司 Laser beam positioning system
US8946594B2 (en) 2011-11-04 2015-02-03 Applied Materials, Inc. Optical design for line generation using microlens array
GB201200890D0 (en) * 2012-01-19 2012-02-29 Univ Dundee An ion exchange substrate and metalized product and apparatus and method for production thereof
DE102014208435A1 (en) * 2014-05-06 2015-11-12 Siemens Aktiengesellschaft Arrangement and method for layering a job layer
JP6679229B2 (en) * 2015-06-30 2020-04-15 キヤノン株式会社 Object information acquisition device and light source device
CN106785817B (en) * 2017-03-24 2020-03-06 京东方科技集团股份有限公司 Optical equipment and excimer laser annealing system
CN106980180B (en) * 2017-05-08 2019-06-11 中国科学院长春光学精密机械与物理研究所 A beam combining device and method of making the same
KR102688794B1 (en) * 2019-01-11 2024-07-29 삼성디스플레이 주식회사 Laser crystallization device
KR20210057265A (en) * 2019-11-11 2021-05-21 삼성전자주식회사 laser annealing apparatus and manufacturing method of semiconductor device using the same
KR102759423B1 (en) * 2020-08-31 2025-01-31 삼성디스플레이 주식회사 Laser irradiation apparatus
DE102021131456A1 (en) 2021-11-30 2023-06-01 Trumpf Laser- Und Systemtechnik Gmbh line optics system

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5003543A (en) * 1990-01-19 1991-03-26 California Jamar, Incorporated Laser plasma X-ray source
US5005969A (en) * 1988-03-30 1991-04-09 Hitachi, Ltd. Optical projection apparatus with the function of controlling laser coherency
US5071225A (en) * 1989-12-29 1991-12-10 Hoya Corporation Beam splitter for producing a plurality of splitted light beams for each of wavelength components of an incident light beam
JPH0476553A (en) * 1990-07-18 1992-03-11 Dainippon Screen Mfg Co Ltd Color image recording device
JPH0629177A (en) * 1992-07-09 1994-02-04 Nec Corp Semiconductor exposure apparatus
JPH0882711A (en) * 1994-09-12 1996-03-26 Nippon Telegr & Teleph Corp <Ntt> Optical multiplxer and optical demultiplexer
EP0785473A2 (en) * 1996-01-16 1997-07-23 AT&T Corp. Reduction in damage to optical elements used in optical lithography for device fabrication
US20010005606A1 (en) * 1999-12-24 2001-06-28 Koichiro Tanaka Laser irradiation apparatus and method of fabricating a semiconductor device

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4733944A (en) * 1986-01-24 1988-03-29 Xmr, Inc. Optical beam integration system
JPH052152A (en) * 1990-12-19 1993-01-08 Hitachi Ltd Light beam forming method, apparatus, dimension measuring method using the same, appearance inspection method, height measuring method, exposure method, and semiconductor integrated circuit device manufacturing method
US5303084A (en) * 1991-08-27 1994-04-12 Kaman Aerospace Corporation Laser light beam homogenizer and imaging lidar system incorporating same
JP2655465B2 (en) * 1993-01-20 1997-09-17 日本電気株式会社 Reflection type homogenizer and reflection type illumination optical device
EP0656241B1 (en) * 1993-06-04 1998-12-23 Seiko Epson Corporation Apparatus and method for laser machining
AU2076099A (en) * 1998-01-29 1999-08-16 Nikon Corporation Exposure method and device
US6229639B1 (en) * 1998-07-09 2001-05-08 Cymer, Inc. Multiplexer for laser lithography
KR100430231B1 (en) * 1998-10-02 2004-07-19 엘지.필립스 엘시디 주식회사 Laser Annealing Equipment
US6778272B2 (en) * 1999-03-02 2004-08-17 Renesas Technology Corp. Method of processing a semiconductor device
DE19915000C2 (en) * 1999-04-01 2002-05-08 Microlas Lasersystem Gmbh Device and method for controlling the intensity distribution of a laser beam
JP4514861B2 (en) * 1999-11-29 2010-07-28 株式会社半導体エネルギー研究所 Laser irradiation apparatus, laser irradiation method, and manufacturing method of semiconductor device
JP2001244213A (en) 1999-12-24 2001-09-07 Semiconductor Energy Lab Co Ltd Laser beam irradiating device and method of manufacturing semiconductor device
US6856630B2 (en) * 2000-02-02 2005-02-15 Semiconductor Energy Laboratory Co., Ltd. Beam homogenizer, laser irradiation apparatus, semiconductor device, and method of fabricating the semiconductor device
JP2002216403A (en) * 2001-01-16 2002-08-02 Canon Inc Magneto-optical disk annealing method, and magneto- optical disk
JP3903761B2 (en) * 2001-10-10 2007-04-11 株式会社日立製作所 Laser annealing method and laser annealing apparatus
CN1975567A (en) * 2002-04-23 2007-06-06 株式会社液晶先端技术开发中心 Phase shift mask
US6710293B2 (en) * 2002-07-25 2004-03-23 Matsushita Electric Industrial Co., Ltd. System for and method of custom microfilter design with beamsplitter characterization

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5005969A (en) * 1988-03-30 1991-04-09 Hitachi, Ltd. Optical projection apparatus with the function of controlling laser coherency
US5071225A (en) * 1989-12-29 1991-12-10 Hoya Corporation Beam splitter for producing a plurality of splitted light beams for each of wavelength components of an incident light beam
US5003543A (en) * 1990-01-19 1991-03-26 California Jamar, Incorporated Laser plasma X-ray source
JPH0476553A (en) * 1990-07-18 1992-03-11 Dainippon Screen Mfg Co Ltd Color image recording device
JPH0629177A (en) * 1992-07-09 1994-02-04 Nec Corp Semiconductor exposure apparatus
JPH0882711A (en) * 1994-09-12 1996-03-26 Nippon Telegr & Teleph Corp <Ntt> Optical multiplxer and optical demultiplexer
EP0785473A2 (en) * 1996-01-16 1997-07-23 AT&T Corp. Reduction in damage to optical elements used in optical lithography for device fabrication
US20010005606A1 (en) * 1999-12-24 2001-06-28 Koichiro Tanaka Laser irradiation apparatus and method of fabricating a semiconductor device

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100683662B1 (en) * 2003-11-28 2007-02-20 삼성에스디아이 주식회사 Laser processing equipment
CN101678507B (en) * 2007-06-18 2012-11-28 应用材料公司 Pyrometer for laser annealing system compatible with amorphous carbon optical absorber layer
JP2016507075A (en) * 2013-01-21 2016-03-07 インテル・コーポレーション Methods for reducing speckle
JP2018504599A (en) * 2015-01-21 2018-02-15 トルネード スペクトラル システムズ，インコーポレイテッド Hybrid image pupil optical reformer

Also Published As

Publication number Publication date
US20040120050A1 (en) 2004-06-24
TWI223843B (en) 2004-11-11
US7109435B2 (en) 2006-09-19
KR20040063079A (en) 2004-07-12
TW200305231A (en) 2003-10-16
JPWO2003049175A1 (en) 2005-04-21

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