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WO2002016969A3 - Intravolume diffractive optical elements - Google Patents

Intravolume diffractive optical elements Download PDF

Info

Publication number
WO2002016969A3
WO2002016969A3 PCT/IL2001/000789 IL0100789W WO0216969A3 WO 2002016969 A3 WO2002016969 A3 WO 2002016969A3 IL 0100789 W IL0100789 W IL 0100789W WO 0216969 A3 WO0216969 A3 WO 0216969A3
Authority
WO
WIPO (PCT)
Prior art keywords
points
production
diffractive optical
determining
intravolume
Prior art date
Application number
PCT/IL2001/000789
Other languages
French (fr)
Other versions
WO2002016969A2 (en
Inventor
Vladimir Dmitriev
Nikolay Guletsky
Sergey Oshemkov
Original Assignee
U C Laser Ltd
Vladimir Dmitriev
Nikolay Guletsky
Sergey Oshemkov
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from IL13807700A external-priority patent/IL138077A/en
Application filed by U C Laser Ltd, Vladimir Dmitriev, Nikolay Guletsky, Sergey Oshemkov filed Critical U C Laser Ltd
Priority to US10/362,800 priority Critical patent/US6884961B1/en
Priority to CA002420370A priority patent/CA2420370A1/en
Priority to EP01961096A priority patent/EP1320770A2/en
Priority to AU2001282474A priority patent/AU2001282474A1/en
Publication of WO2002016969A2 publication Critical patent/WO2002016969A2/en
Publication of WO2002016969A3 publication Critical patent/WO2002016969A3/en

Links

Classifications

    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03HHOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H1/00Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
    • G03H1/04Processes or apparatus for producing holograms
    • G03H1/08Synthesising holograms, i.e. holograms synthesized from objects or objects from holograms
    • G03H1/0808Methods of numerical synthesis, e.g. coherent ray tracing [CRT], diffraction specific
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/32Holograms used as optical elements
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03HHOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H1/00Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
    • G03H1/04Processes or apparatus for producing holograms
    • G03H1/0476Holographic printer
    • G03H2001/0484Arranged to produce three-dimensional fringe pattern
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03HHOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H2260/00Recording materials or recording processes
    • G03H2260/50Reactivity or recording processes
    • G03H2260/62Direct etching

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
  • Glass Compositions (AREA)

Abstract

A method of producing in a solid transparent material, a diffractive optical element for the transformation of an incident wave in a predefined manner, by developing a mathematical model of the element in terms of the required transformation, then using that model for determining a set of points which form the desired diffractie optical element, and then focusing a pulsed laser beam sequentially onto the points in the set, such that it causes optical breakdown damage at those points. Numerical solutions for determining the positions of the set of points from the mathematical model are presented. The production of number of elements for specific applications is described. Complete laser systems capable of monitoring the production of the points in real time according to the results obtained by diffraction of the incident wave by the element under production.
PCT/IL2001/000789 2000-08-24 2001-08-23 Intravolume diffractive optical elements WO2002016969A2 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
US10/362,800 US6884961B1 (en) 2000-08-24 2001-08-23 Intravolume diffractive optical elements
CA002420370A CA2420370A1 (en) 2000-08-24 2001-08-23 Intravolume diffractive optical elements
EP01961096A EP1320770A2 (en) 2000-08-24 2001-08-23 Intravolume diffractive optical elements
AU2001282474A AU2001282474A1 (en) 2000-08-24 2001-08-23 Intravolume diffractive optical elements

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
IL138077 2000-08-24
IL13807700A IL138077A (en) 2000-08-24 2000-08-24 Intravolume diffractive optical elements in transparent materials
GB0031146A GB2368663B (en) 2000-08-24 2000-12-20 Intravolume diffractive optical elements in transparent materials
GB0031146.4 2000-12-20

Publications (2)

Publication Number Publication Date
WO2002016969A2 WO2002016969A2 (en) 2002-02-28
WO2002016969A3 true WO2002016969A3 (en) 2003-04-17

Family

ID=26245462

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/IL2001/000789 WO2002016969A2 (en) 2000-08-24 2001-08-23 Intravolume diffractive optical elements

Country Status (4)

Country Link
EP (1) EP1320770A2 (en)
AU (1) AU2001282474A1 (en)
CA (1) CA2420370A1 (en)
WO (1) WO2002016969A2 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7459242B2 (en) 2002-02-20 2008-12-02 Pixer Technology Ltd. Method and system for repairing defected photomasks
TWI395978B (en) 2004-12-03 2013-05-11 Ohara Kk Optical component and method of manufacturing optical component
US7297453B2 (en) * 2005-04-13 2007-11-20 Kla-Tencor Technologies Corporation Systems and methods for mitigating variances on a patterned wafer using a prediction model
CH698833B1 (en) 2007-04-03 2009-11-13 Diamond Sa Coupling piece for a plug connection.
US11366382B2 (en) 2020-02-24 2022-06-21 Carl Zeiss Smt Gmbh Method and apparatus for performing an aerial image simulation of a photolithographic mask

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2008288C1 (en) * 1991-04-23 1994-02-28 Санкт-Петербургский государственный университет Method of laser forming images in solid media
JP2000056112A (en) * 1998-08-03 2000-02-25 Japan Science & Technology Corp Three-dimensional diffraction optical device and its production
US6087617A (en) * 1996-05-07 2000-07-11 Troitski; Igor Nikolaevich Computer graphics system for generating an image reproducible inside optically transparent material

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2008288C1 (en) * 1991-04-23 1994-02-28 Санкт-Петербургский государственный университет Method of laser forming images in solid media
US6087617A (en) * 1996-05-07 2000-07-11 Troitski; Igor Nikolaevich Computer graphics system for generating an image reproducible inside optically transparent material
JP2000056112A (en) * 1998-08-03 2000-02-25 Japan Science & Technology Corp Three-dimensional diffraction optical device and its production

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
KAZANSKLY N L ET AL: "COMPUTER-AIDED DESIGN OF DIFFRACTIVE OPTICAL ELEMENTS", OPTICAL ENGINEERING, SOC. OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS. BELLINGHAM, US, vol. 33, no. 10, 1 October 1994 (1994-10-01), pages 3156 - 3166, XP000474364, ISSN: 0091-3286 *
PATENT ABSTRACTS OF JAPAN vol. 2000, no. 05 14 September 2000 (2000-09-14) *

Also Published As

Publication number Publication date
CA2420370A1 (en) 2002-02-28
AU2001282474A1 (en) 2002-03-04
EP1320770A2 (en) 2003-06-25
WO2002016969A2 (en) 2002-02-28

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