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WO2001037033A3 - Modulateur spatial de lumière - Google Patents

Modulateur spatial de lumière Download PDF

Info

Publication number
WO2001037033A3
WO2001037033A3 PCT/US2000/031762 US0031762W WO0137033A3 WO 2001037033 A3 WO2001037033 A3 WO 2001037033A3 US 0031762 W US0031762 W US 0031762W WO 0137033 A3 WO0137033 A3 WO 0137033A3
Authority
WO
WIPO (PCT)
Prior art keywords
electro
optic
optic material
solid state
semiconductor substrate
Prior art date
Application number
PCT/US2000/031762
Other languages
English (en)
Other versions
WO2001037033A2 (fr
WO2001037033A9 (fr
Inventor
Feiling Wang
Kewen Kevin Li
Dean Tsang
Original Assignee
Corning Applied Technologies
Feiling Wang
Kewen Kevin Li
Dean Tsang
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Corning Applied Technologies, Feiling Wang, Kewen Kevin Li, Dean Tsang filed Critical Corning Applied Technologies
Priority to AU32629/01A priority Critical patent/AU3262901A/en
Publication of WO2001037033A2 publication Critical patent/WO2001037033A2/fr
Publication of WO2001037033A3 publication Critical patent/WO2001037033A3/fr
Publication of WO2001037033A9 publication Critical patent/WO2001037033A9/fr

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/03—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
    • G02F1/055—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect the active material being a ceramic
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/03—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
    • G02F1/0305—Constructional arrangements
    • G02F1/0311—Structural association of optical elements, e.g. lenses, polarizers, phase plates, with the crystal
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/21—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  by interference
    • G02F1/213—Fabry-Perot type
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2202/00—Materials and properties
    • G02F2202/10—Materials and properties semiconductor
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2203/00—Function characteristic
    • G02F2203/12—Function characteristic spatial light modulator
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2203/00—Function characteristic
    • G02F2203/15—Function characteristic involving resonance effects, e.g. resonantly enhanced interaction

Landscapes

  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Liquid Crystal (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)

Abstract

L'invention concerne un modulateur constitué d'un matériau électro-optique solide présentant une structure pixélisée interconnectée à un circuit sur un substrat de semi-conducteur. Des circuits intégrés CMOS sur silicium qui peuvent comporter des mémoires vives (RAM) sont utilisés comme substrat et interfacés sur un matériau électro-optique solide appliqué sur ces circuits. D'une manière spécifique, les modulateurs électro-optiques sont commandés par des cellules RAM afin de produire une modulation de lumière réfléchie. La présence d'un dispositif de bascule de cellules SRAM permet d'utiliser des mémoires SRAM. Des mémoires DRAM peuvent être utilisées avec le modulateur remplaçant la capacité de stockage DRAM. Le modulateur spatial de lumière ainsi obtenu peut être connecté sur un ordinateur numérique et commandé comme s'il était inscrit comme une mémoire, mais d'autres structures de circuits intégrés peuvent également être utilisées. Afin d'améliorer les effets de modulation, le matériau électro-optique est utilisé comme partie d'espacement pour une structure d'étalon Fabry-Pérot qui est également déposée sur un substrat de semi-conducteur. Le titanate zirconate de lanthane et de plomb (PLZT) constitue un matériau électro-optique approprié.
PCT/US2000/031762 1999-11-18 2000-11-17 Modulateur spatial de lumière WO2001037033A2 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU32629/01A AU3262901A (en) 1999-11-18 2000-11-17 Spatial light modulator

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US16638099P 1999-11-18 1999-11-18
US60/166,380 1999-11-18

Publications (3)

Publication Number Publication Date
WO2001037033A2 WO2001037033A2 (fr) 2001-05-25
WO2001037033A3 true WO2001037033A3 (fr) 2002-01-17
WO2001037033A9 WO2001037033A9 (fr) 2002-08-15

Family

ID=22603051

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2000/031762 WO2001037033A2 (fr) 1999-11-18 2000-11-17 Modulateur spatial de lumière

Country Status (2)

Country Link
AU (1) AU3262901A (fr)
WO (1) WO2001037033A2 (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6890874B1 (en) 2002-05-06 2005-05-10 Corning Incorporated Electro-optic ceramic material and device
US6746618B2 (en) 2002-05-21 2004-06-08 Corning Incorporated Electro-optic ceramic material and device
WO2007034435A2 (fr) * 2005-09-23 2007-03-29 Koninklijke Philips Electronics N.V. Dispositif compact de stockage de donnees holographiques

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1172852A (en) * 1966-03-11 1969-12-03 Plessey Co Ltd Improvements in or relating to Light Modulation Devices
EP0380326A2 (fr) * 1989-01-26 1990-08-01 Seiko Epson Corporation Procédé de fabrication d'un dispositif à semi-conducteur
JPH0418767A (ja) * 1990-05-11 1992-01-22 Nec Corp 空間光変調装置
GB2261522A (en) * 1991-11-13 1993-05-19 Northrop Corp Longitudinal PLZT light modulator

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1172852A (en) * 1966-03-11 1969-12-03 Plessey Co Ltd Improvements in or relating to Light Modulation Devices
EP0380326A2 (fr) * 1989-01-26 1990-08-01 Seiko Epson Corporation Procédé de fabrication d'un dispositif à semi-conducteur
JPH0418767A (ja) * 1990-05-11 1992-01-22 Nec Corp 空間光変調装置
GB2261522A (en) * 1991-11-13 1993-05-19 Northrop Corp Longitudinal PLZT light modulator

Non-Patent Citations (4)

* Cited by examiner, † Cited by third party
Title
LI K K ET AL: "An automatic dip coating process for dielectric thin and thick films", INTEGRATED FERROELECTRICS, 1993, UK, vol. 3, no. 1, pages 81 - 91, XP001004608, ISSN: 1058-4587 *
PATENT ABSTRACTS OF JAPAN vol. 016, no. 174 (E - 1195) 27 April 1992 (1992-04-27) *
TSEN-HWANG LIN ET AL: "TWO-DIMENSIONAL SPATIAL LIGHT MODULATORS FABRICATED IN SI/PLZT", APPLIED OPTICS,US,OPTICAL SOCIETY OF AMERICA,WASHINGTON, vol. 29, no. 11, 10 April 1990 (1990-04-10), pages 1595 - 1603, XP000113946, ISSN: 0003-6935 *
WANG F ET AL: "LARGE ELECTROOPTIC MODULATION USING FERROELECTRIC THIN FILMS IN A FABRY-PEROT CAVITY", PROCEEDINGS OF THE IEEE INTERNATIONAL SYMPOSIUM ON APPLICATIONS OF FERROELECTRICS (ISAF),US,NEW YORK, IEEE, vol. SYMP. 9, 7 August 1994 (1994-08-07), pages 683 - 686, XP000553188, ISBN: 0-7803-1858-7 *

Also Published As

Publication number Publication date
WO2001037033A2 (fr) 2001-05-25
WO2001037033A9 (fr) 2002-08-15
AU3262901A (en) 2001-05-30

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