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WO2001067172A1 - Dispositif optique integre - Google Patents

Dispositif optique integre Download PDF

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Publication number
WO2001067172A1
WO2001067172A1 PCT/GB2001/000880 GB0100880W WO0167172A1 WO 2001067172 A1 WO2001067172 A1 WO 2001067172A1 GB 0100880 W GB0100880 W GB 0100880W WO 0167172 A1 WO0167172 A1 WO 0167172A1
Authority
WO
WIPO (PCT)
Prior art keywords
light
waveguide
optical device
integrated optical
input
Prior art date
Application number
PCT/GB2001/000880
Other languages
English (en)
Inventor
Arnold Peter Roscoe Harpin
Original Assignee
Bookham Technology Plc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bookham Technology Plc filed Critical Bookham Technology Plc
Priority to EP01907952A priority Critical patent/EP1261893A1/fr
Priority to AU2001235818A priority patent/AU2001235818A1/en
Publication of WO2001067172A1 publication Critical patent/WO2001067172A1/fr

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/29—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection
    • G02F1/31—Digital deflection, i.e. optical switching
    • G02F1/313—Digital deflection, i.e. optical switching in an optical waveguide structure
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/0147—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on thermo-optic effects
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/015—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on semiconductor elements having potential barriers, e.g. having a PN or PIN junction
    • G02F1/025—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on semiconductor elements having potential barriers, e.g. having a PN or PIN junction in an optical waveguide structure
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2201/00—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00
    • G02F2201/12—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 electrode
    • G02F2201/128—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 electrode field shaping
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2202/00—Materials and properties
    • G02F2202/10—Materials and properties semiconductor
    • G02F2202/105—Materials and properties semiconductor single crystal Si

Definitions

  • This invention relates to an integrated optical device for refracting a beam of light. It also relates to an integrated optical device functioning as an optical switch.
  • the present invention provides an alternative form of device.
  • an integrated optical device for selectively directing light from one or more input waveguides to one or more output waveguides, the device comprising: a slab waveguide; one or more input waveguides for directing light into the slab waveguide; one or more output waveguides for receiving light from the input waveguide(s) after it has travelled through the slab waveguide; and adjustment means for adjusting the refractive index of one or more refracting portions of the slab waveguide through which the light travels so as to refract the light as it passes therethrough, whereby transmission of light between the input and output waveguide(s) can be selectively controlled.
  • the present invention also provides a novel integrated optical device for refracting a light beam.
  • an integrated optical device for refracting a beam of light so as to alter its direction of travel, the device comprising a slab waveguide through which the beam is directed and adjustment means for adjusting the refractive index of a portion of the slab such that the direction of light emerging from said portion can be altered by adjusting the refractive index of said portion.
  • An embodiment of a device according to the second aspect of the invention may be used in the first aspect of the invention.
  • Figure 1 shows a schematic diagram of an embodiment of the first aspect of the invention
  • Figures 2 and 3 are sectional views through a ridge waveguide and a slab waveguide formed on a silicon-on-insulator chip;
  • Figure 4 shows a portion of Figure 1 in more detail
  • Figure 5 shows a schematic diagram of another embodiment of the invention.
  • Figure 6 shows a schematic diagram of a variant of the embodiment shown in Figure 5.
  • Figure 7 shows a more detailed view of a preferred form of refracting portion used in the above devices.
  • Figure 1 shows an optical chip 1 having an input waveguide 2, a plurality of output waveguides 3 and a slab waveguide region 4 between the input and output waveguides 2, 3.
  • Figure 1 also shows a first parabolic mirror 5, a second parabolic mirror 6 and a triangular refracting portion 4A of the slab waveguide 4.
  • Light from the input waveguide 2 is confined in a vertical direction, i.e. the direction perpendicular to the plane of the chip 1 , but diverges as it travels across the slab waveguide 4 until it reaches the first mirror 5 which is arranged to collimate the beam and direct it through the refracting portion 4A to the second mirror 6.
  • the second mirror 6 receives a collimated beam from the refracting portion 4A and focuses this towards one of the output waveguides 3.
  • the refracting portion 4A has the same refractive index as the slab region 4 on the input and output sides thereof, the beam will pass through the portion 4A without deviation. However, if the refractive index of the refracting portion 4A is altered so as to differ from that of the slab regions 4 on the input and output sides thereof, it will act in the manner of a prism and refract the beam of light as it passes therethrough.
  • the refracted beam of light remains collimated but strikes the second mirror 6 at a different angle and so is focussed thereby at a different position.
  • the refractive index of the refracting portion 4A it can be arranged so that the light is directed towards a selected one of the output waveguides 3, depending upon the difference in refractive index of the said portion 4A and the slab region 4.
  • the refracting portion 4A may be part of the slab region 4 on top of which is provided a heater, e.g. in the form of a series of resistance heaters formed by narrow lines 7 of conductive material, deposited on the upper surface of the slab region as shown in Figure 4.
  • a heater e.g. in the form of a series of resistance heaters formed by narrow lines 7 of conductive material, deposited on the upper surface of the slab region as shown in Figure 4.
  • the heaters 7 By arranging the heaters 7 in a triangular pattern, they can be used to change the temperature, and hence the refractive index, of a triangular portion of the slab waveguide 4 beneath the array of heaters 7. Electrical connections to the heaters 7 are not shown in Figure 4.
  • the application of appropriate heating currents to the heaters 7 thus controls the refractive index of the triangular portion 4a of the slab waveguide 4 and thus which of the output waveguides 3 the light is directed to.
  • the device thus functions as an optical switch.
  • the chip 1 preferably comprises silicon and is preferably a silicon-on-insulator chip.
  • the input waveguide is preferably a rib waveguide 8 formed in a silicon layer 9 in a known manner.
  • Figure 2 shows a cross section through a rib waveguide formed in a silicon layer 9 supported on a substrate 10 (typically also silicon) with an insulting layer 11 (typically silicon dioxide) therebetween.
  • the height of the rib (from the top surface thereof to the oxide layer 11 ) is typically around 8 microns (but may be other sizes) and the thickness or height of the silicon layer on either side of the rib is typically around 5 microns.
  • Other types of waveguide, including optical fibres, may also be used for directing light into the slab region 4.
  • Figure 3 shows a cross-section through the slab waveguide region. This preferably comprises a continuation of the silicon layer 9 in which the rib waveguides are formed and thus also has a height of around 8 microns.
  • the slab region 4 preferably confines the light in a vertical direction, i.e. a direction perpendicular to the plane of the slab region, but does not confine the light in a horizontal direction so the light spreads out within the slab region 4 after leaving the input waveguide 1.
  • the parabolic mirrors 5, 6 may be formed by etching a recess in the silicon layer 9 so as to form a vertical curved wall on one side of the recess which forms a reflective surface. Preferably, reflection at this surface occurs by total internal reflection. In the case of silicon, this can be achieved by arranging so that the angle of incidence on the parabolic mirror is greater than 16 degrees, which is the critical angle. This holds for both polarisations so polarisation dependent losses (PDL) are low.
  • PDL polarisation dependent losses
  • FIG. 4 shows the triangular array of heaters 7 in more detail.
  • the array preferably comprises a series of resistance heaters, e.g. comprising a narrow strip of aluminium or tungsten, e.g. a titanium, tungsten, gold alloy, and may be between 5 and 20 microns wide and 0.5 to 2.0 microns thick with a spacing between adjacent strips (centre to centre) of about 30 to 50 microns.
  • An example comprising strips of tungsten alloy around 1 micron thick, 10 microns wide and at 40 micron intervals gave satisfactory results.
  • the lines are preferably perpendicular to the axis of the light beam but may be parallel thereto.
  • the array of heaters may be arranged in a variety of patterns and the lines can be individually controlled to provide the required temperature change and/or temperature gradients across the device. Changes in temperature of several tens of degrees Centigrade, e.g. in the range of 10-100 degrees Centigrade, produce a change in refractive index of the silicon layer of less than one percent but this is sufficient to cause the required deviation of the beam. Greater changes in refractive index cause a greater deviation and will be required if the switch is provided with a greater number of output waveguides.
  • the example shown comprises four output waveguides 3 but many more may be used, e.g. a hundred or even several hundred.
  • the distance between the second mirror 6 and the output waveguides 3 may be increased to provide greater separation between the output waveguides for a given angle of deviation caused by the refracting portion 4A, although the shape of the mirror 6 needs to be altered as well so that the light is still focussed on the input ends of the output waveguides.
  • the collimated beam may have a width of around 100 microns and the triangular region 6A has similar dimensions so as to interrupt the entire width of the beam.
  • the components of the device would be spaced apart by distances greater than indicated in the schematic diagram and the overall dimensions of the chip may typically be around 15 mm long (from the input side to the output side) and around 5 mm wide. Other layouts and dimensions may, however, be used depending on the circumstances.
  • a simple beam steering device may comprise a slab waveguide through which a light beam is directed with adjustment means for adjusting the refractive index of a portion of the slab region so the direction of light emerging from the portion can be altered by adjusting the refractive index of that portion.
  • the portion preferably has a shape selected to imitate an optical component such as a prism or a lens.
  • the ends of the input and output waveguides are preferably provided with tapers to widen the ends thereof to provide a better match to the planar waveguide.
  • the ends have a width of around 12 microns. This provides a restriction on the spacing of the output waveguides and the typical centre to centre spacing therebetween may be double this figure, i.e. about 24 microns.
  • the angular deviation between adjacent waveguides is the inverse tan of 24/6000, i.e. about 0.28 degrees.
  • silicon a temperature deviation of 200 degrees Centigrade gives a refractive index shift of about 0.04.
  • the maximum deviation is about 10 degrees, so providing the capability to switch between up to 35 output waveguides.
  • Prisms could be cascaded to provide more deviation and hence a higher number of switching outputs.
  • Figure 1 shows a 1 x n switch, in which light from a single input waveguide 2 can be switched to any one of a plurality n output waveguides 3.
  • Figure 5 shows an n x n switch in which light from any one of n input waveguides 12A, 12B, ... can be switched to any one of n output waveguides 13A, 13B, ...(whilst Figure 5 only shows two input and two output waveguides, the arrangement can be extended to a larger number, e.g. up to one hundred or more).
  • Input waveguide 12A is positioned at the focus of an input parabolic mirror 14A associated therewith and, as shown in Figure 5, light from input waveguide 12A is collimated by the input mirror 14A and directed towards a first refracting portion 15A. If the refractive index of refracting portion 15A is ' the same as the surrounding slab material 16, light passes through the first refractive portion 15A to a second refracting portion 16A. If the refractive index of the second refracting portion 16A is the same as that of the surrounding slab material, light passes through the second refracting portion 16A to an output parabolic mirror 17A which focuses the light to output waveguide 13A which is positioned at the focus of the mirror 17A.
  • light from the first input waveguide 12A may be switched to the second output waveguide 13B by altering the refractive index of the first refracting portion 15A so as to refract the light to a refracting portion 16B associated with the second output waveguide 13B.
  • the refracting portion 16B is controlled to refract the light to a parabolic mirror 17B which focusses the light into the second output waveguide 13B.
  • light from the first input waveguide can be directed via components 14A, 15A, 16A and 17A to the first output waveguide 13A, or via components 14A, 15A, 16B and 17B to the second output waveguide 13B.
  • the system can be extended by providing N input waveguides 12A - 12N, N input parabolic mirrors 14A - 14N, N first refracting portions 15A - 15N, N second refracting portions 16A - 16N, N output parabolic mirrors 17A - 17N and N output waveguides 13A - 13N.
  • Light can thus be directed from the first input waveguide 12A to the nth output waveguide by components 14A, 15A, 16n and 17n.
  • light may be directed from any of the input waveguides 14A - 14N to any of the output waveguides 13A - 13N.
  • Figure 5 shows light being directed from input waveguide 12B via components 14B, 15B, 16B and 17B to second output waveguide 13B and (via the dotted lines) from input waveguide 12B via components 14B, 15B, 16A and 17A to first output waveguide 13A.
  • Figure 5 is highly schematic in that, in practice, the spacings between components and the angles of refraction will be very different from that shown.
  • the spacing D between the first refracting portions 15A, 15B,... and the corresponding second refracting portions 16A, ' 16B, ... will be considerably greater than that shown, e.g. of the order of 100,000 microns (10cm).
  • This enables the nxn arrangement shown in Figure 5 to switch between a greater number of waveguides than the 1xn arrangement shown in Figure 1 , as an increase in the spacing D enables the separation between signals for a given angle of deflection by the refracting portions to be increased without affecting the arrangement of the components at each end of this path. This avoids any problems which might arise due, for instance, to the output waveguides having only a small acceptance angle.
  • the refracting portions in each set are typically spaced apart by a distance E of about 200 microns.
  • a prism capable of providing a maximum deviation of about 8 degrees, as described above and a spacing D of 1 cm this allows switching between up to 7 outputs.
  • this arrangement can be enlarged further without changing the geometry of the input and output optical paths.
  • cascading of prisms may be used for higher way switching.
  • each input beam has a mirror and first refracting portion associated therewith, each of the input and output waveguides are positioned at the focus of the associated parabolic mirror and the individual members of each set of components are all orientated in approximately the same direction.
  • Figure 6 shows an alternative embodiment which is similar to that shown in Figure 5 but in which a single large input parabolic mirror 18 replaces the individual mirrors 14A, 14B, ... and a single, large output parabolic mirror 19 replaces the individual mirrors 17A, 17B, ...
  • the input waveguides 20A, 20B, ... are angled with respect to each other as are the output waveguides 21 A, 21 B, ...
  • FIGs 1 to 6 illustrate each refracting portion as a single triangular prism.
  • the refractive index of the prism is changed by heating the prism by means of heating elements.
  • a preferred arrangement is for each prism to comprise two opposing triangles side by side as shown in Figure 7. The first prism 22 deflects the beam in one direction and the second prism 23 deflects it in the opposite direction so the appropriate prism is activated depending on the directions of refraction required. The range of refraction angles is thus doubled.
  • the device is preferably formed on a suspended portion of a chip, e.g. by removing the silicon beneath the device.
  • the silicon may be removed from beneath the whole device or just from a triangular area immediately below the heated portion so the shape of the heated portion is defined by a shape etched in the silicon layer as well as by the layout of the heating elements.

Landscapes

  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Optical Integrated Circuits (AREA)

Abstract

Ce dispositif intégré, destiné à diriger de manière sélective la lumière, à partir d'au moins un guide d'ondes d'entrée (2; 12A...) et vers au moins un guide d'ondes de sortie (3; 13A...), comprend: un guide d'ondes bidimensionnel (4), au moins un guide d'ondes d'entrée (2; 12A...), dirigeant la lumière dans le guide d'ondes bidimensionnel (4), au moins un guide d'ondes de sortie (3; 13A...) recevant la lumière à partir d'un guide d'onde d'entrée au moins, après que celle-ci ait voyagé à travers le guide d'ondes bidimensionnel, ainsi qu'au moins une portion de réfraction (4A; 15A..., 16A...) dont l'indice de réfraction peut être modifié de manière que cette portion réfracte la lumière lorsque celle-ci passe à travers le guide d'ondes bidimensionnel, de sorte que la transmission de la lumière entre les guides d'ondes d'entrée et de sortie peut être commandée de manière sélective. Un commutateur 1xn et un commutateur nxn sont décrits. Il est également possible d'utiliser une telle portion de réfraction pour diriger un faisceau lumineux, cette portion pouvant de même être conçue pour fonctionner à la manière d'un composant optique, par exemple un prisme ou une lentille.
PCT/GB2001/000880 2000-03-04 2001-03-02 Dispositif optique integre WO2001067172A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
EP01907952A EP1261893A1 (fr) 2000-03-04 2001-03-02 Dispositif optique integre
AU2001235818A AU2001235818A1 (en) 2000-03-04 2001-03-02 Integrated optical device

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB0005193.8 2000-03-04
GB0005193A GB2359898A (en) 2000-03-04 2000-03-04 An integrated optical waveguide

Publications (1)

Publication Number Publication Date
WO2001067172A1 true WO2001067172A1 (fr) 2001-09-13

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Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/GB2001/000880 WO2001067172A1 (fr) 2000-03-04 2001-03-02 Dispositif optique integre

Country Status (4)

Country Link
EP (1) EP1261893A1 (fr)
AU (1) AU2001235818A1 (fr)
GB (1) GB2359898A (fr)
WO (1) WO2001067172A1 (fr)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2377762A (en) * 2001-07-17 2003-01-22 Bookham Technology Plc Divergent beam steerer formed in a substrate
US6603889B2 (en) 2001-05-17 2003-08-05 Optronx, Inc. Optical deflector apparatus and associated method
US6611636B2 (en) 2001-05-17 2003-08-26 Optronx, Inc. Hybrid active electronic and optical Fabry Perot cavity
US6947615B2 (en) 2001-05-17 2005-09-20 Sioptical, Inc. Optical lens apparatus and associated method
CN109298404A (zh) * 2018-10-22 2019-02-01 上海交通大学 基于透镜的集成二维光束转向装置
WO2020171244A1 (fr) * 2019-02-18 2020-08-27 (주)트루아이즈 Guide d'ondes optique, système optique et capteur de gaz optique

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US11500154B1 (en) 2019-10-18 2022-11-15 Apple Inc. Asymmetric optical power splitting system and method
US11852865B2 (en) * 2020-09-24 2023-12-26 Apple Inc. Optical system with phase shifting elements

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Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6603889B2 (en) 2001-05-17 2003-08-05 Optronx, Inc. Optical deflector apparatus and associated method
US6611636B2 (en) 2001-05-17 2003-08-26 Optronx, Inc. Hybrid active electronic and optical Fabry Perot cavity
US6826320B2 (en) 2001-05-17 2004-11-30 Sioptical, Inc. Focusing mirror and lens
US6869881B2 (en) 2001-05-17 2005-03-22 Sioptical, Inc. Method for forming passive optical coupling device
US6895136B2 (en) 2001-05-17 2005-05-17 Sioptical, Inc. Integrated optical/electronic circuits and associated methods of simultaneous generation thereof
US6912330B2 (en) 2001-05-17 2005-06-28 Sioptical Inc. Integrated optical/electronic circuits and associated methods of simultaneous generation thereof
US6944369B2 (en) 2001-05-17 2005-09-13 Sioptical, Inc. Optical coupler having evanescent coupling region
US6947615B2 (en) 2001-05-17 2005-09-20 Sioptical, Inc. Optical lens apparatus and associated method
GB2377762A (en) * 2001-07-17 2003-01-22 Bookham Technology Plc Divergent beam steerer formed in a substrate
CN109298404A (zh) * 2018-10-22 2019-02-01 上海交通大学 基于透镜的集成二维光束转向装置
WO2020171244A1 (fr) * 2019-02-18 2020-08-27 (주)트루아이즈 Guide d'ondes optique, système optique et capteur de gaz optique

Also Published As

Publication number Publication date
AU2001235818A1 (en) 2001-09-17
GB2359898A (en) 2001-09-05
EP1261893A1 (fr) 2002-12-04
GB0005193D0 (en) 2000-04-26

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