+

WO2001053032A1 - Holding device for an ultrasonic transducer - Google Patents

Holding device for an ultrasonic transducer Download PDF

Info

Publication number
WO2001053032A1
WO2001053032A1 PCT/DE2001/000245 DE0100245W WO0153032A1 WO 2001053032 A1 WO2001053032 A1 WO 2001053032A1 DE 0100245 W DE0100245 W DE 0100245W WO 0153032 A1 WO0153032 A1 WO 0153032A1
Authority
WO
WIPO (PCT)
Prior art keywords
clamping ring
holding device
ultrasonic transducer
ultrasonic
transducer
Prior art date
Application number
PCT/DE2001/000245
Other languages
German (de)
French (fr)
Inventor
Hans-Jürgen HESSE
Jörg WALLASCHEK
Original Assignee
Hesse & Knipps Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hesse & Knipps Gmbh filed Critical Hesse & Knipps Gmbh
Priority to DE10190130T priority Critical patent/DE10190130D2/en
Priority to AU2001235352A priority patent/AU2001235352A1/en
Publication of WO2001053032A1 publication Critical patent/WO2001053032A1/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
    • B23K20/10—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating making use of vibrations, e.g. ultrasonic welding
    • B23K20/106—Features related to sonotrodes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B3/00—Methods or apparatus specially adapted for transmitting mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
    • H01L2224/78—Apparatus for connecting with wire connectors
    • H01L2224/7825—Means for applying energy, e.g. heating means
    • H01L2224/783—Means for applying energy, e.g. heating means by means of pressure
    • H01L2224/78313—Wedge

Definitions

  • the invention relates to a holding device for attaching an ultrasound transducer to a bonding head of an ultrasound wire bonding device, a sonotrode (wedge) being arranged at one end of the ultrasound transducer and an ultrasound vibration generator being arranged at the other end thereof.
  • Ultrasonic wire bonding devices or the like are used to produce electrical connections between bond pads on a semiconductor chip and contacts on carrier elements. used by mounting wire bridges between these contacts.
  • the wire bridges are assembled by attaching the wire to the contacts using ultrasonic welding.
  • the bond wire is welded to the respective contact with the aid of the wedge (bond wedge) attached to the ultrasonic transducer (sonotrode) under the action of the ultrasonic vibrations generated by the ultrasonic vibration generator and transmitted to the wedge via the ultrasonic transducer.
  • the ultrasonic transducer is therefore used to transmit ultrasonic vibrations from the ultrasonic vibration generator to the sonotrode, an amplitude transformation taking place at the same time. Since the transducer is intended to conduct the ultrasonic vibrations initiated by the ultrasonic vibration generator m mainly in the form of longitudinal vibrations to the sonotrode, care must be taken to ensure that no energy losses, for example due to steaming, or the oscillations are not otherwise disturbed. These can be reflected vibrations, for example, which are superimposed on the vibration generated by the ultrasonic vibration generator.
  • the transducer is usually fastened in such a way that it is clamped in an oscillation node in a receptacle.
  • a suitable vibration node can be easily determined for the resonance case, that is to say at the intended operating frequency. If the transducer is clamped in one of the vibration nodes, the vibration propagation is not impeded, at least in the longitudinal direction.
  • EP 0 857 535 A1 An example of such a transducer attachment is shown in EP 0 857 535 A1, which relates to an ultrasound bonding head with an ultrasound transducer attached to it.
  • the transducer is held here in clamping jaws which are clamped against one another by a screw connection.
  • Very similar solutions can also be found in US Pat. Nos. 4,817,848 and 4,653,681.
  • transducer fastenings have the disadvantage, however, that when the transducer is excited to vibrate, radial vibrations are generated in addition to the desired longitudinal oscillations, which are then transmitted to other elements, for example via the transducer fastening, and also generate vibrations there. The result is in any case a disturbance in the vibration behavior of the transducer and possibly the emission of disturbing noises.
  • the resonance frequency shifts under load, which is a result of the constantly changing damping during the bonding process, so that the vibration nodes also shift to the same extent, if only slightly. The result is that the transducer is temporarily clamped outside of the vibration node, so to speak, and that undefined vibration ratios actually arise with respect to the vibration transmission, which can negatively influence the result of the bonding process.
  • the invention is therefore based on the object of providing a transducer attachment in which the difficulties / disadvantages of the prior art shown do not occur.
  • a clamping ring is assigned to the ultrasonic transducer, which is arranged in a vibration node of the unit consisting of ultrasonic transducer, ultrasonic vibration generator and wedge, in that a clamping device belonging to the bonding head comprises the clamping ring on the outer circumference in a positive and non-positive manner and that the clamping ring is provided with a damping device for damping radial vibrations.
  • the clamping ring can be designed as a separate component, which is inserted non-positively between the end of the ultrasound transducer and the vibration generator. This can be done with a clamping screw, with which both the ultrasonic vibration generator and the clamping ring are attached to the ultrasonic transducer. In a variant of the invention, it is also possible to design the ultrasonic transducer and the clamping ring as one unit.
  • the damping device of the clamping member preferably has elements similar to fixed body joints.
  • the damping device of the clamping arm consists of at least two nng-shaped recesses, which are alternately made concentrically in the front and rear end faces of the clamping arm, so that, seen in section, a meandering structure is created.
  • This configuration has the particular advantage that, on the one hand, a very good damping of radial oscillations is achieved and, on the other hand, that the required mechanical rigidity of the clamp and thus the safe reception of the ultrasound transducers is still guaranteed.
  • the clamping ring is preferably made of metal and can also be made of the same material as the ultrasonic transducer.
  • the clamping ring consists of a material with higher damping properties.
  • the clamping ring can be made of a softer material than the ultrasonic transducer. Suitable materials for this are aluminum or brass, which have a particularly high damping effect.
  • FIG. 1 shows a transducer / ultrasonic1-Schwmger / Wedge-Emhe ⁇ t equipped with a clamping ring according to the invention
  • Fig. 2 shows a transducer / ultrasonic Schwmger / Wedge unit, in which the clamping ring is integral on the transducer is molded.
  • the ultrasonic transducer 1 shows an ultrasonic transducer 1 in which an ultrasonic vibration generator 2 is arranged at one end and a wedge 3 is arranged at the other narrow end.
  • the ultrasonic vibration generator 2 and the wedge 3 to a wire bond head (not shown) of an ultrasonic wire bond device by means of a conventional clamping device belonging to an ultrasonic bond head, one has to be attached to the ultrasonic transducer 1 Clamping ring 4 attached.
  • This clamping ring 4 is arranged in a vibration node of the unit, so that the clamping has no influence on the vibration behavior of the unit consisting of the ultrasonic transducer 1 and the ultrasonic vibration generator 2.
  • the clamping ring 4 is fastened as a separate component between the ultrasonic vibration generator 2 and the ultrasonic vibration transmitter 1 with a clamping screw 5, which in itself serves to fasten the ultrasonic vibration generator 2.
  • the clamping ring 4 is provided with a damping device 8.
  • the damping device 8 of the clamping ring 4 consists of at least two annular recesses 6, 7, which are alternately made concentrically in the front and rear end faces of the clamping ring 4, so that, seen in section, a meandering structure is created.
  • Such a damping device has the particular advantage that on the one hand a very good damping of radial vibrations is achieved and that on the other hand the required mechanical rigidity of the clamping arm 4 and thus the secure reception of the ultrasound transducers 1 in the clamping device of the bonding head is still guaranteed. Geringgla- Any displacements of the vibration node no longer have a negative effect on the vibration behavior of the system due to the clamping ring 4 designed according to the invention.
  • the clamping ring 4 can be designed as a separate component which is non-positively fastened between the ultrasonic transducer 1 and the vibration generator 2, or, as shown in FIG. 2, can also be connected in one piece to the ultrasonic transducer 1.
  • the clamping ring 4 is preferably made of metal, for example from the same material as the ultrasonic transducer 1.
  • the clamping ring 4 can also be made from a material with higher damping properties, as is the case with a softer material, such as aluminum or brass.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Apparatuses For Generation Of Mechanical Vibrations (AREA)
  • Wire Bonding (AREA)

Abstract

The invention relates to a holding device for fixing an ultrasonic transducer to a bonding head of an ultrasonic wire bonding device. According to said invention, a sonotrode (wedge) is located at one end of the ultrasonic transducer and an ultrasonic oscillator is located at the other end. The aim of the invention is to produce a holding device for a transducer which sufficiently dampens radial oscillations. To achieve this, a locking ring (4) which surrounds the ultrasonic transducer (1) is provided in a vibration node of the ultrasonic transducer (1), the latter forming part of a unit consisting of the ultrasonic transducer (1), the ultrasonic oscillator (2) and the wedge (3). The device is characterised in that a locking device belonging to the bonding head locks the locking ring (4) on the external periphery of the latter and that the locking ring (4) is provided with a damping device (8) for damping radial oscillations.

Description

Halteeinrichtung für UltraschaU-Transducer Holding device for ultrasonic transducers
Die Erfindung betrifft eine Halteeinrichtung zur Befestigung eines Ultraschall-Transducers an einem Bondkopf einer Ultra- schall-Drahtbondemπchtung, wobei an einem Ende des Ultraschall-Transducers eine Sonotrode (Wedge) und an dessen anderen Ende ein Ultraschall-Schwmgungserzeuger angeordnet ist.The invention relates to a holding device for attaching an ultrasound transducer to a bonding head of an ultrasound wire bonding device, a sonotrode (wedge) being arranged at one end of the ultrasound transducer and an ultrasound vibration generator being arranged at the other end thereof.
Ultraschall-Drahtbondemrichtungen werden zur Herstellung von elektrischen Verbindungen zwischen Bondpads auf einem Halblei- terchip und Kontakten auf Tragerelementen o.dgl. verwendet, indem zwischen diesen Kontakten Drahtbrucken montiert werden. Die Montage der Drahtbrucken erfolgt durch Befestigen des Drahtes an den Kontakten mittels Ultraschall-Schweißen. Der Bonddraht wird hierzu mit Hilfe des am UltraschaU-Transducer (Sonotrode) befestigten Wedges (Bondkeil) unter Einwirkung der vom Ultraschall-Schwmgungserzeuger erzeugten und über den UltraschaU-Transducer an das Wedge weitergeleiteten Ultra- schall-Schwingungen am jeweiligen Kontakt angeschweißt.Ultrasonic wire bonding devices or the like are used to produce electrical connections between bond pads on a semiconductor chip and contacts on carrier elements. used by mounting wire bridges between these contacts. The wire bridges are assembled by attaching the wire to the contacts using ultrasonic welding. For this purpose, the bond wire is welded to the respective contact with the aid of the wedge (bond wedge) attached to the ultrasonic transducer (sonotrode) under the action of the ultrasonic vibrations generated by the ultrasonic vibration generator and transmitted to the wedge via the ultrasonic transducer.
Der UltraschaU-Transducer dient also zur Übertragung von Ultraschall-Schwingungen von dem Ultraschall-Schw gungserzeuger zur Sonotrode, wobei gleichzeitig eine Amplitudentrans- formation stattfindet. Da der Transducer die vom Ultraschall- Schwmgungserzeuger eingeleiteten Ultraschallschwingungen m der Hauptsache m Form von Longitudmalschwmgungen zur Sonotrode leiten soll, muß dafür gesorgt werden, daß auf dem Über- tragungsweg möglichst keine Energieverluste, beispielsweise durch Dampfung, auftreten können, bzw. die Schwmgungen nicht anderweitig gestört werden. Das können beispielsweise reflektierte Schwingungen sein, die sich der vom Ultraschall-Schwm- gungserzeuger erzeugten Schwingung überlagern.The ultrasonic transducer is therefore used to transmit ultrasonic vibrations from the ultrasonic vibration generator to the sonotrode, an amplitude transformation taking place at the same time. Since the transducer is intended to conduct the ultrasonic vibrations initiated by the ultrasonic vibration generator m mainly in the form of longitudinal vibrations to the sonotrode, care must be taken to ensure that no energy losses, for example due to steaming, or the oscillations are not otherwise disturbed. These can be reflected vibrations, for example, which are superimposed on the vibration generated by the ultrasonic vibration generator.
Um derartige Störungen weitgehend auszuschließen, wird die Befestigung des Transducers üblicherweise derart vorgenommen, daß dieser in einem Schwingungsknoten in einer Aufnahme ge- klemmt wird. Für den Resonanzfall, also bei der vorgesehenen Betriebsfrequenz, kann problemlos ein geeigneter Schwingungsknoten ermittelt werden. Wird der Transducer m einem der Schwingungsknoten geklemmt, so wird die Schwingungsausbreitung zumindest in Longitudmalπchtung nicht behindert.In order to largely rule out such interference, the transducer is usually fastened in such a way that it is clamped in an oscillation node in a receptacle. A suitable vibration node can be easily determined for the resonance case, that is to say at the intended operating frequency. If the transducer is clamped in one of the vibration nodes, the vibration propagation is not impeded, at least in the longitudinal direction.
Ein Beispiel für eine derartige Transducerbefestigung zeigt die EP 0 857 535 AI, die sich auf einen Ultraschall-Bondkopf mit einem daran befestigten UltraschaU-Transducer bezieht. Der Transducer wird hier in Klemmbacken gefaßt, die durch eine Verschraubung gegeneinander verspannt sind. Sehr ähnliche Losungen gehen auch aus den Patentschriften US 4,817,848 und 4,653,681 hervor.An example of such a transducer attachment is shown in EP 0 857 535 A1, which relates to an ultrasound bonding head with an ultrasound transducer attached to it. The transducer is held here in clamping jaws which are clamped against one another by a screw connection. Very similar solutions can also be found in US Pat. Nos. 4,817,848 and 4,653,681.
Aus der US 4,040,885 geht weiterhin ein UltraschaU-Transducer hervor, der mit einem Montageflansch versehen ist. Mit Hilfe dieses Montageflansches kann der UltraschaU-Transducer in Verbindung mit einer geeigneten Klemmvorrichtung am Bondkopf einer Ultraschall-Drahtbondvorrichtung befestigt werden.An ultrasonic transducer, which is provided with a mounting flange, also emerges from US Pat. No. 4,040,885. With the help of this mounting flange, the ultrasonic transducer can be attached to the bonding head of an ultrasonic wire bonding device in connection with a suitable clamping device.
Derartige Transducerbefestigungen zeigen allerdings den Nachteil, daß bei der Schwingungsanregung des Transducers neben den erwünschten Langsschwmgungen auch radiale Schwingungen erzeugt werden, die dann z.B. über die Transducerbefestigung auf andere Elemente übertragen werden und dort ebenfalls Schwingungen erzeugen. Die Folge ist auf jeden Fall eine Störung des Schwingungsverhaltens des Transducers und ggf. die Emission störender Geräusche. Weiterhin ist festzustellen, daß sich die Resonanzfrequenz unter Last verschiebt, was ein Ergebnis der sich während des Bondvorganges ständig verändernden Dämpfung ist, so daß sich auch die Schwingungsknoten in gleichem Maße, wenn auch nur geringfügig, verschieben. Die Folge ist, daß der Transducer sozusagen vorübergehend außerhalb des Schwingungsknotens geklemmt wird und daß damit hinsichtlich der Schwingungsübertragung eigentlich Undefinierte Schwingungsverhältnise entstehen, die das Ergebnis des Bondvorganges negativ beeinflus- sen können.Such transducer fastenings have the disadvantage, however, that when the transducer is excited to vibrate, radial vibrations are generated in addition to the desired longitudinal oscillations, which are then transmitted to other elements, for example via the transducer fastening, and also generate vibrations there. The result is in any case a disturbance in the vibration behavior of the transducer and possibly the emission of disturbing noises. It should also be noted that the resonance frequency shifts under load, which is a result of the constantly changing damping during the bonding process, so that the vibration nodes also shift to the same extent, if only slightly. The result is that the transducer is temporarily clamped outside of the vibration node, so to speak, and that undefined vibration ratios actually arise with respect to the vibration transmission, which can negatively influence the result of the bonding process.
Der Erfindung liegt daher die Aufgabe zugrunde, eine Transducerbefestigung zu schaffen, bei der die aufgezeigten Schwierigkeiten/Nachteile des Standes der Technik nicht auftreten.The invention is therefore based on the object of providing a transducer attachment in which the difficulties / disadvantages of the prior art shown do not occur.
Diese Aufgabe wird bei einer Halteeinrichtung für UltraschaU- Transducer der eingangs genannten Art dadurch gelöst, daß dem UltraschaU-Transducer ein Klemmring zugeordnet ist, der in einem Schwingungsknoten der aus UltraschaU-Transducer, Ul- traschall-Schwingungserzeuger und Wedge bestehenden Einheit angeordnet ist, dass eine zum Bondkopf gehörende Klemmvorrichtung den Klemmring am äußeren Umfang form- und kraftschlüssig umfaßt und dass der Klemmring mit einer Dämpfungseinrichtung zur Dämpfung radialer Schwingungen versehen ist.This object is achieved in a holding device for ultrasonic transducers of the type mentioned in the introduction in that a clamping ring is assigned to the ultrasonic transducer, which is arranged in a vibration node of the unit consisting of ultrasonic transducer, ultrasonic vibration generator and wedge, in that a clamping device belonging to the bonding head comprises the clamping ring on the outer circumference in a positive and non-positive manner and that the clamping ring is provided with a damping device for damping radial vibrations.
Der Vorteil dieser Lösung ist darin zu sehen, daß die Ausbreitung radialer Schwingungen gedämpft bzw. unterbunden wird und daß eine lastbedingte Verschiebung der Schwingungsknoten keine Auswirkungen auf das Schwingungsverhalten der Trans- ducer/Ultraschall-Schwinger/Wedge-Einheit hat. Somit läßt sich der Ultraschall-Drahtbondvorgang insgesamt besser steuern.The advantage of this solution can be seen in the fact that the propagation of radial vibrations is damped or prevented and that a load-related displacement of the vibration nodes has no effect on the vibration behavior of the transducer / ultrasonic vibrator / wedge unit. The ultrasonic wire bonding process can thus be better controlled overall.
Der Klemmring kann als separates Bauteil ausgebildet sein, das zwischen dem Ende des Ultraschall-Transducers und dem Schwin- gungserzeuger kraftschlüssig eingefügt ist. Das kann mit einer Spannschraube erfolgen, mit der sowohl der Ultraschall-Schwingungserzeuger, als auch den Klemmring am UltraschaU-Transducer befestigt wird. Es ist m einer Variante der Erfindung auch möglich, den UltraschaU-Transducer und den Klemmring als eine Einheit em- stuckig auszubilden.The clamping ring can be designed as a separate component, which is inserted non-positively between the end of the ultrasound transducer and the vibration generator. This can be done with a clamping screw, with which both the ultrasonic vibration generator and the clamping ring are attached to the ultrasonic transducer. In a variant of the invention, it is also possible to design the ultrasonic transducer and the clamping ring as one unit.
Vorzugsweise weist die Dampfungsemrichtung des Klemmr ges festkorpergelenkahnliche Elemente auf.The damping device of the clamping member preferably has elements similar to fixed body joints.
In emer besonderen Ausgestaltung der Erfindung besteht die Dampfungsemrichtung des Klemmrmges aus wenigstens zwei nng- formigen Aussparungen, die wechselweise konzentrisch in die vordere und die hintere Stirnseite des Klemmrmges eingebracht sind, so daß im Schnitt gesehen, eine maanderformige Struktur entsteht. Diese Ausgestaltung hat den besonderen Vorteil, daß einerseits eine sehr gute Dampfung radialer Schwmgungen er- reicht wird und daß andererseits die erforderliche mechanische Steifigkeit des Klemmr ges und damit die sichere Aufnahme der Ultraschall-Transducers weiterhin gewährleistet ist.In a special embodiment of the invention, the damping device of the clamping arm consists of at least two nng-shaped recesses, which are alternately made concentrically in the front and rear end faces of the clamping arm, so that, seen in section, a meandering structure is created. This configuration has the particular advantage that, on the one hand, a very good damping of radial oscillations is achieved and, on the other hand, that the required mechanical rigidity of the clamp and thus the safe reception of the ultrasound transducers is still guaranteed.
Der Klemmring besteht bevorzugt aus Metall und kann auch aus den gleichen Material gefertigt werden, wie der UltraschaU- Transducer .The clamping ring is preferably made of metal and can also be made of the same material as the ultrasonic transducer.
In weiterer Fortfuhrung der Erfindung besteht der Klemmring aus einem Material mit höheren Dampfungseigenschaften. Bei- spielsweise kann der Klemmring aus einem weicheren Material als der UltraschaU-Transducer bestehen. Geeignete Materialien hierfür sind Aluminium oder Messing, die eine besonders hohe Dampfungswirkung aufweisen.In a further development of the invention, the clamping ring consists of a material with higher damping properties. For example, the clamping ring can be made of a softer material than the ultrasonic transducer. Suitable materials for this are aluminum or brass, which have a particularly high damping effect.
D e Erfindung soll nachfolgend an einem Ausfuhrungsbeispiel naher erläutert werden. In den zugehörigen Zeichnungen zeigen:The invention is to be explained in more detail below using an exemplary embodiment. In the accompanying drawings:
Fig. 1 eine mit einem erfmdungsgemaßen Klemmring ausgestattete Transducer/Ultraschal1-Schwmger/Wedge-Emheιt; und1 shows a transducer / ultrasonic1-Schwmger / Wedge-Emheιt equipped with a clamping ring according to the invention; and
Fig. 2 eine Transducer/Ultraschall-Schwmger/Wedge-Emheit , bei welcher der Klemmring emstuckig am Transducer angeformt ist .Fig. 2 shows a transducer / ultrasonic Schwmger / Wedge unit, in which the clamping ring is integral on the transducer is molded.
Aus Fig. 1 ist ein UltraschaU-Transducer 1 ersichtlich, bei dem an einem Ende ein Ultraschall-Schwingungserzeuger 2 und am anderen schmaleren Ende ein Wedge 3 angeordnet sind. Um die aus dem UltraschaU-Transducer 1, dem Ultraschall-Schwingungserzeuger 2 und dem Wedge 3 bestehende Einheit an einem nicht dargestellten Drahtbondkopf einer Ultraschall-Drahtbondeinrichtung mittels einer üblichen zu einem Ultraschall-Bondkopf gehörenden Klemmeinrichtung befestigen zu können, ist am UltraschaU-Transducer 1 ein Klemmring 4 befestigt. Dieser Klemmring 4 ist in einem Schwingungsknoten der Einheit angeordnet, so daß die Klemmung keinen Einfluß auf das Schwingungsverhalten der aus dem UltraschaU-Transducer 1 und des Ultraschall-Schwingungserzeugers 2 bestehenden Einheit ausübt. Der Klemmring 4 ist nach Fig. 1 als separates Bauteil zwischen dem Ultraschall-Schwingungserzeuger 2 und dem Ultraschall- Schwingungsübertrager 1 mit einer Spannschraube 5 befestigt, die an sich zur Befestigung des Ultraschall-Schwingungserzeu- gers 2 dient.1 shows an ultrasonic transducer 1 in which an ultrasonic vibration generator 2 is arranged at one end and a wedge 3 is arranged at the other narrow end. In order to be able to fasten the unit consisting of the ultrasonic transducer 1, the ultrasonic vibration generator 2 and the wedge 3 to a wire bond head (not shown) of an ultrasonic wire bond device by means of a conventional clamping device belonging to an ultrasonic bond head, one has to be attached to the ultrasonic transducer 1 Clamping ring 4 attached. This clamping ring 4 is arranged in a vibration node of the unit, so that the clamping has no influence on the vibration behavior of the unit consisting of the ultrasonic transducer 1 and the ultrasonic vibration generator 2. According to FIG. 1, the clamping ring 4 is fastened as a separate component between the ultrasonic vibration generator 2 and the ultrasonic vibration transmitter 1 with a clamping screw 5, which in itself serves to fasten the ultrasonic vibration generator 2.
Um nun eine Dämpfung radialer Schwingungen, die sich sonst über den Klemmring 4 auf die Klemmeinrichtung übertragen würden, zu erreichen, ist der Klemmring 4 mit einer Dämpfungsein- richtung 8 versehen.In order to dampen radial vibrations that would otherwise be transmitted to the clamping device via the clamping ring 4, the clamping ring 4 is provided with a damping device 8.
Die Dämpfungseinrichtung 8 des Klemmringes 4 besteht aus wenigstens zwei ringförmigen Aussparungen 6, 7, die wechselweise konzentrisch in die vordere und die hintere Stirnseite des Klemmringes 4 eingebracht sind, so dass im Schnitt gesehen, eine mäanderförmige Struktur entsteht.The damping device 8 of the clamping ring 4 consists of at least two annular recesses 6, 7, which are alternately made concentrically in the front and rear end faces of the clamping ring 4, so that, seen in section, a meandering structure is created.
Eine derartige Dämpfungseinrichtung hat den besonderen Vorteil, daß einerseits eine sehr gute Dämpfung radialer Schwin- gungen erreicht wird und daß andererseits die erforderliche mechanische Steifigkeit des Klemmrmges 4 und damit die sichere Aufnahme der Ultraschall-Transducers 1 in der Klemmeinrichtung des Bondkopfes weiterhin gewährleistet ist. Geringfü- gige Verschiebungen des Schwingungsknotens wirken sich durch den erfindungsgemäß ausgestalteten Klemmring 4 nicht mehr negativ auf das Schwingungsverhalten des Systemes aus.Such a damping device has the particular advantage that on the one hand a very good damping of radial vibrations is achieved and that on the other hand the required mechanical rigidity of the clamping arm 4 and thus the secure reception of the ultrasound transducers 1 in the clamping device of the bonding head is still guaranteed. Geringfü- Any displacements of the vibration node no longer have a negative effect on the vibration behavior of the system due to the clamping ring 4 designed according to the invention.
Der Klemmring 4 kann, wie bereits beschrieben, als separates Bauteil ausgebildet sein, das zwischen dem UltraschaU-Transducer 1 und dem Schwingungserzeuger 2 kraftschlüssig befestigt ist, oder wie in Fig. 2 dargestellt, auch einstückig mit dem UltraschaU-Transducer 1 verbunden sein.As already described, the clamping ring 4 can be designed as a separate component which is non-positively fastened between the ultrasonic transducer 1 and the vibration generator 2, or, as shown in FIG. 2, can also be connected in one piece to the ultrasonic transducer 1.
Der Klemmring 4 besteht bevorzugt aus Metall, beispielsweise aus dem gleichen Material, wie der UltraschaU-Transducer 1.The clamping ring 4 is preferably made of metal, for example from the same material as the ultrasonic transducer 1.
Um höhere Dämpfungseigenschaften zu erreichen, kann der Klemm- ring 4 auch aus einem Material mit höheren Dämpfungseigenschaften gefertigt werden, wie dies bei einem weicheren Material, z.B. Aluminium oder Messing, der Fall ist. In order to achieve higher damping properties, the clamping ring 4 can also be made from a material with higher damping properties, as is the case with a softer material, such as aluminum or brass.
Halteeinrichtung für UltraschaU-TransducerHolding device for ultrasonic transducers
BezugszeichenlisteLIST OF REFERENCE NUMBERS
UltraschaU-Transducer Ultrascha11-Schwingungserzeuger Wedge Klemmring Spannschraube Aussparung Aussparung Dämpfungseinrichtung Ultrasonic transducer Ultrasonic 11 vibration generator Wedge clamping ring clamping screw recess recess damping device

Claims

Halteeinrichtung für UltraschaU-TransducerPatentansprüche Holding device for ultrasonic transducer patent claims
1. Halteeinrichtung zur Befestigung eines Ultraschall-Transducers an einem Bondkopf einer Ultraschall-Drahtbondeinrichtung, wobei an einem Ende des Ultraschall-Transducers eine Sonotrode (Wedge) und an dessen anderem Ende ein Ultraschall-Schwingungserzeuger angeordnet ist, d a d u r c h g e k e n n z e i c h n e t, dass dem UltraschaU-Transducer (1) ein Klemmring (4) zugeordnet ist, der in einem Schwingungsknoten der aus UltraschaU-Transducer (1), Ultraschall-Schwingungserzeuger (2) und Wedge (3) bestehenden Einheit angeordnet ist, dass eine zum Bondkopf gehörende Klemmvorrichtung den Klemmring (4) am äußeren Umfang form- und kraftschlüssig umfaßt und dass der Klemmring (4) mit einer Dämpfungseinrichtung (8) zur Dämpfung radialer Schwingungen versehen ist.1. Holding device for attaching an ultrasound transducer to a bonding head of an ultrasound wire bonding device, a sonotrode (wedge) being arranged at one end of the ultrasound transducer and an ultrasound vibration generator being arranged at the other end thereof, characterized in that the ultrasound transducer ( 1) a clamping ring (4) is assigned, which is arranged in a vibration node of the unit consisting of ultrasonic transducer (1), ultrasonic vibration generator (2) and wedge (3), that a clamping device belonging to the bonding head holds the clamping ring (4) on the outer circumference is positively and non-positively and that the clamping ring (4) is provided with a damping device (8) for damping radial vibrations.
2. Halteeinrichtung nach Anspruch 1, d a d u r c h g e k e n n z e i c h n e t, dass der Klemmring (4) als separates Bauteil ausgebildet ist, das zwischen dem UltraschaU-Transducer (1) und dem Schwingungserzeuger (2) kraftschlüssig befestigt ist. 2. Holding device according to claim 1, so that the clamping ring (4) is designed as a separate component which is non-positively fastened between the ultrasonic transducer (1) and the vibration generator (2).
Halteeinrichtung nach Anspruch 1, d a d u r c h g e k e n n z e i c h n e t, dass das der UltraschaU-Transducer (1) und der Klemmring (4) als eine Einheit einstük- kig ausgebildet sind. Holding device according to claim 1, characterized in that the ultrasonic transducer (1) and the clamping ring (4) are formed as one unit.
Halteeinrichtung nach einem der Ansprüche 1 bis 3, d a - d u r c h g e k e n n z e i c h n e t, dass die Dämpfungseinrichtung (8) des Klemmringes (4) festkörpergelenk- ähnliche Elemente aufweist.Holding device according to one of claims 1 to 3, that the damping device (8) of the clamping ring (4) has elements similar to solid articulations.
5. Halteeinrichtung nach Anspruch 4, d a d u r c h g e k e n n z e i c h n e t, dass die Dämpfungseinrichtung (8) des Klemmringes (4) aus wenigstens zwei ringförmigen Aussparungen (6, 7) besteht, die wechselweise konzentrisch in die vordere und die hintere Stirnseite des Klemmringes (4) eingebracht sind, so dass im Schnitt gesehen, eine mäan- derförmige Struktur entsteht.5. Holding device according to claim 4, characterized in that the damping device (8) of the clamping ring (4) consists of at least two annular recesses (6, 7) which are alternately introduced concentrically into the front and rear end faces of the clamping ring (4), so that seen in section, a meandering structure is created.
6. Halteeinrichtung nach Anspruch 5, d a d u r c h g e - k e n n z e i c h n e t, dass die die ringförmigen Aussparungen (6, 7) begrenzenden Stege (9, 10) annähernd gleiche Materialstärke aufweisen.6. Holding device according to claim 5, so that the webs (9, 10) delimiting the annular recesses (6, 7) have approximately the same material thickness.
7. Halteeinrichtung nach einem der Ansprüche 1 bis 6, d a - d u r c h g e k e n n z e i c h n e t, dass der Klemmring7. Holding device according to one of claims 1 to 6, d a - d u r c h g e k e n n z e i c h n e t that the clamping ring
(4) aus Metall besteht.(4) is made of metal.
8. Halteeinrichtung nach Anspruch 7, d a d u r c h g e k e n n z e i c h n e t, dass der Klemmring (4) aus dem gleichen Material besteht, wie der UltraschaU-Transducer (1).8. Holding device according to claim 7, so that the clamping ring (4) consists of the same material as the ultrasonic transducer (1).
9. Halteeinrichtung nach Anspruch 7, d a d u r c h g e k e n n z e i c h n e t, dass der Klemmring (4) aus einem Material mit höheren Dämpfungseigenschaften besteht.9. Holding device according to claim 7, d a d u r c h g e k e n n z e i c h n e t that the clamping ring (4) consists of a material with higher damping properties.
10. Halteeinrichtung nach Anspruch 9, d a d u r c h g e k e n n z e i c h n e t, dass der Klemmring (4) aus einem weicheren Material als der UltraschaU-Transducer ( 1 ) besteht .10. Holding device according to claim 9, characterized in that the clamping ring (4) from one softer material than the ultrasonic transducer (1).
11. Halteeinrichtung nach Anspruch 10, d a d u r c h g e k e n n z e i c h n e t, dass der Klemmring (4) aus Aluminium oder Messing besteht. 11. Holding device according to claim 10, d a d u r c h g e k e n n z e i c h n e t that the clamping ring (4) consists of aluminum or brass.
PCT/DE2001/000245 2000-01-21 2001-01-22 Holding device for an ultrasonic transducer WO2001053032A1 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
DE10190130T DE10190130D2 (en) 2000-01-21 2001-01-22 Holding device for ultrasonic transducers
AU2001235352A AU2001235352A1 (en) 2000-01-21 2001-01-22 Holding device for an ultrasonic transducer

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10002634.6 2000-01-21
DE10002634 2000-01-21

Publications (1)

Publication Number Publication Date
WO2001053032A1 true WO2001053032A1 (en) 2001-07-26

Family

ID=7628352

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/DE2001/000245 WO2001053032A1 (en) 2000-01-21 2001-01-22 Holding device for an ultrasonic transducer

Country Status (3)

Country Link
AU (1) AU2001235352A1 (en)
DE (1) DE10190130D2 (en)
WO (1) WO2001053032A1 (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003070387A2 (en) * 2002-02-15 2003-08-28 3M Innovative Properties Company Mount for vibratory elements
WO2006099872A1 (en) * 2005-03-23 2006-09-28 3L-Ludvigsen A/S Rotary ultrasonic sealer
US7766067B2 (en) 2006-09-28 2010-08-03 3-L Ludvigsen A/S Rotary ultrasonic sealer
CN102945813A (en) * 2012-10-25 2013-02-27 广东工业大学 Bonding head device applied to full-automatic wire bonding device
DE102011086326A1 (en) * 2011-11-15 2013-05-16 Söring GmbH Ultrasound surgical instrument
CN109365252A (en) * 2018-11-16 2019-02-22 广州汇专工具有限公司 It is a kind of to have the function of multidirectional vibration isolation, the energy converter for ultrasonic unit
DE102017127826A1 (en) * 2017-11-24 2019-05-29 Herrmann Ultraschalltechnik Gmbh & Co. Kg Ultrasonic vibration unit with damping

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2928360A1 (en) * 1979-07-13 1981-01-15 Siemens Ag Sonotrode for ultrasonic resistance welding rig - has current connection through diaphragm flange in vibration node
US5364005A (en) * 1993-11-08 1994-11-15 Verity Instruments Inc. Ultrasonic transducer and mount
US5411195A (en) * 1993-01-18 1995-05-02 Kabushiki Kaisha Shinkawa Bonding apparatus

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2928360A1 (en) * 1979-07-13 1981-01-15 Siemens Ag Sonotrode for ultrasonic resistance welding rig - has current connection through diaphragm flange in vibration node
US5411195A (en) * 1993-01-18 1995-05-02 Kabushiki Kaisha Shinkawa Bonding apparatus
US5364005A (en) * 1993-11-08 1994-11-15 Verity Instruments Inc. Ultrasonic transducer and mount

Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100939386B1 (en) * 2002-02-15 2010-01-28 쓰리엠 이노베이티브 프로퍼티즈 컴파니 Mount for vibratory elements
WO2003070387A2 (en) * 2002-02-15 2003-08-28 3M Innovative Properties Company Mount for vibratory elements
US7243894B2 (en) 2002-02-15 2007-07-17 3M Innovative Properties Company Mount for vibratory elements
CN100408205C (en) * 2002-02-15 2008-08-06 3M创新有限公司 Mount for vibratory elements
WO2003070387A3 (en) * 2002-02-15 2003-11-27 3M Innovative Properties Co Mount for vibratory elements
US7980536B2 (en) 2002-02-15 2011-07-19 3M Innovative Properties Company Mount for vibratory elements
WO2006099872A1 (en) * 2005-03-23 2006-09-28 3L-Ludvigsen A/S Rotary ultrasonic sealer
US7644746B2 (en) 2005-03-23 2010-01-12 3L-Ludvigsen A/S Rotary ultrasonic sealer
US7766067B2 (en) 2006-09-28 2010-08-03 3-L Ludvigsen A/S Rotary ultrasonic sealer
DE102011086326A1 (en) * 2011-11-15 2013-05-16 Söring GmbH Ultrasound surgical instrument
CN102945813A (en) * 2012-10-25 2013-02-27 广东工业大学 Bonding head device applied to full-automatic wire bonding device
DE102017127826A1 (en) * 2017-11-24 2019-05-29 Herrmann Ultraschalltechnik Gmbh & Co. Kg Ultrasonic vibration unit with damping
US11376630B2 (en) 2017-11-24 2022-07-05 Herrmann Ultraschalltechnik Gmbh & Co. Kg Ultrasonic vibration unit with damping
CN109365252A (en) * 2018-11-16 2019-02-22 广州汇专工具有限公司 It is a kind of to have the function of multidirectional vibration isolation, the energy converter for ultrasonic unit
CN109365252B (en) * 2018-11-16 2023-12-19 汇专科技集团股份有限公司 Transducer with multidirectional vibration isolation function for ultrasonic device

Also Published As

Publication number Publication date
AU2001235352A1 (en) 2001-07-31
DE10190130D2 (en) 2002-12-19

Similar Documents

Publication Publication Date Title
DE2053615C3 (en) Electromechanical converter for machine tools
EP2288450B1 (en) Sonotrode for an ultrasonic oscillating unit
DE3787677T2 (en) Non-directional ultrasound transducer.
DE2312446C3 (en) Electromechanical oscillator for welding machines
DE2809820A1 (en) ULTRASONIC CONVERTER
DE102009027021B3 (en) Ultrasound welding device for welding two components, comprises a rod-shaped first sonotrode for generating longitudinal waves coupled at its first end on a first converter and at its second end on a second converter
WO2001053032A1 (en) Holding device for an ultrasonic transducer
EP1340964A1 (en) Ultrasonic transducer system with ultrasonic filter
DE2336385A1 (en) MOUNTING ARRANGEMENT FOR A CRYSTAL AS A LONGITUDINAL FLEXIBLE VIBRATOR
WO2018224325A1 (en) Ultrasonic sensor
EP0639759B1 (en) One-piece flat vibratory measuring element with two nodes for measuring displacement or force
DE19859355A1 (en) Ultrasonic device for welding electrical wires to connector, has ultrasonic oscillator and sonotrode integral with head and converter.
WO2019101666A1 (en) Ultrasonic vibration unit with damping
DE1265888B (en) Electromechanical filter
DE1158588B (en) Electrostrictive torsional vibrator
EP0659516B1 (en) Ultrasonic welding apparatus
DE2034928A1 (en) Ultrasonic generator and plate for this to hold the working element on a holder
DE10028774A1 (en) Ultrasonic transducer for wire bonding device has oscillation generator provided by 2 partial oscillation generators at perpendicular end face of transducer tapering towards opposite end supporting wedge
WO2012095385A2 (en) Method and device for producing a vibrating motion of a mass
DE3114657A1 (en) Device for generating ultrasonic waves in a quantity of liquid
DE1116326B (en) Electromechanical filter in which plate-shaped resonators are provided which are excited to flexural vibrations
DE2164423C2 (en) Scanner with a transducer
DE1807861C3 (en) Piezoelectric device
DE1541974C3 (en) Electromechanical belt filter
DE10057533A1 (en) Ultrasound transducer for wire bonding equipment, has slot-shaped pass for bonding wire along axis of symmetry of transducer

Legal Events

Date Code Title Description
AK Designated states

Kind code of ref document: A1

Designated state(s): AE AG AL AM AT AU AZ BA BB BG BR BY BZ CA CH CN CR CU CZ DE DK DM DZ EE ES FI GB GD GE GH GM HR HU ID IL IN IS JP KE KG KP KR KZ LC LK LR LS LT LU LV MA MD MG MK MN MW MX MZ NO NZ PL PT RO RU SD SE SG SI SK SL TJ TM TR TT TZ UA UG US UZ VN YU ZA ZW

AL Designated countries for regional patents

Kind code of ref document: A1

Designated state(s): GH GM KE LS MW MZ SD SL SZ TZ UG ZW AM AZ BY KG KZ MD RU TJ TM AT BE CH CY DE DK ES FI FR GB GR IE IT LU MC NL PT SE TR BF BJ CF CG CI CM GA GN GW ML MR NE SN TD TG

121 Ep: the epo has been informed by wipo that ep was designated in this application
DFPE Request for preliminary examination filed prior to expiration of 19th month from priority date (pct application filed before 20040101)
122 Ep: pct application non-entry in european phase
NENP Non-entry into the national phase

Ref country code: JP

点击 这是indexloc提供的php浏览器服务，不要输入任何密码和下载