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WO1999036159A1 - Procede et systeme de separation et de recuperation de gaz de composes perfluores - Google Patents

Procede et systeme de separation et de recuperation de gaz de composes perfluores Download PDF

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Publication number
WO1999036159A1
WO1999036159A1 PCT/EP1998/002272 EP9802272W WO9936159A1 WO 1999036159 A1 WO1999036159 A1 WO 1999036159A1 EP 9802272 W EP9802272 W EP 9802272W WO 9936159 A1 WO9936159 A1 WO 9936159A1
Authority
WO
WIPO (PCT)
Prior art keywords
membrane
gas
permeate
gas mixture
stream
Prior art date
Application number
PCT/EP1998/002272
Other languages
English (en)
Inventor
Yao-En Li
Joseph E. Paganessi
David Vassallo
Gregory K. Fleming
Original Assignee
L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP10007021A external-priority patent/JP2999168B2/ja
Application filed by L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude filed Critical L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude
Priority to AU74311/98A priority Critical patent/AU7431198A/en
Publication of WO1999036159A1 publication Critical patent/WO1999036159A1/fr

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/22—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by diffusion
    • B01D53/229—Integrated processes (Diffusion and at least one other process, e.g. adsorption, absorption)
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/22—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by diffusion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/22—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by diffusion
    • B01D53/225—Multiple stage diffusion

Definitions

  • the invention relates to gas separation processes
  • the invention relates to concentrating low concentration gas
  • mixtures comprising perfluorocompound gases such as those
  • gases are used either pure or diluted, for example with air
  • the effluent gases or gas mixtures are preferably
  • a resistance heater may also be generated using a resistance heater.
  • Oxygen is usually needed to drive the decomposition
  • This abatement system also uses a gas flame
  • any adsorption system is very sensitive to moisture
  • polymers such as poly dimethyl siloxane or certain particular polymers such as a substituted polyacethylene to
  • chlorofluorocarbons from, for example, air.
  • gaseous stream which can be used with a feed flow
  • the "carrier gases" of the effluent gas mixture such as air, nitrogen, oxygen, argon and/or helium
  • One aspect of the invention relates to a process to
  • SEL is greater than 1.0.
  • D p is the mobility selectivity of a
  • D c is the mobility selectivity of a carrier
  • concentrated gas mixture comprising essentially at least one
  • Preferred membranes are glassy polymeric membranes
  • glassy polymeric membranes most useful do not
  • a layer can comprise a layer, including a posttreatment layer as
  • the invention also relates
  • the invention comprises the steps of
  • pretreated gas mixture to at least one size selective
  • etching processes including oxide, metal and
  • harmful by-products i.e. harmful components which may alter
  • any pyrophoric- species including silicon hydrides
  • systems of the invention be sealed and oil-free.
  • One preferred aspect of the invention relates to a
  • PFCs gas mixture is concentrated again, for example, with a
  • inventions include provision of a vacuum pump, heat
  • PFC gas mixture may be compressed, at least partially
  • the invention includes concentrating the PFC gas mixture
  • membrane unit being capable of use as a sweep gas of the
  • a further aspect of the invention is the
  • Another aspect of the invention is a semiconductor
  • At least one reactor chamber adapted to receive
  • the membrane being preferentially
  • membrane unit further having a permeate vent conduit and a
  • non-permeate conduit the latter adapted to direct at least
  • pretreatment and/or post-treatment means such as dry or wet, (or both) scrubbers, thermal decomposers,
  • permeate conduit (preferably between the first or plurality
  • valves in liquid form for future use. Also preferred are valves
  • sensors can be any type of immediately preceding one.
  • sensors can be any type of immediately preceding one.
  • sensors can be any type of immediately preceding one.
  • samples may be taken periodically
  • This information is preferably
  • the sweep gas may either be controlled
  • present invention includes the recycle of the permeate
  • membrane units in this case, the carrier gas and other
  • the carrier gases may be any suitable carrier gases.
  • An additional recycle membrane may be provided, functioning to separate carrier
  • non-permeate streams is post-treated to remove non-
  • Post-treatment methods may include
  • Another aspect of the invention is a method of recovery
  • gas cabinets or more gas cabinets, tube trailers, clean rooms, or the
  • FIG. 1 is a graph illustrating the efficacy of
  • FIG. 2 represents a schematic drawing of one process
  • FIG. 3 is a detailed view of a portion of the process
  • FIGS. 4, 4a, 5, 6 and 7 illustrate different
  • FIG. 8 illustrates PFC concentration on the permeate
  • the membrane for different flowrates of the feed stream
  • FIG. 9 illustrates PFC concentration on the permeate
  • FIG. 10 illustrates PFC concentration on the recovery
  • FIG. 11 illustrates PFC concentration on the recovery.
  • FIGS. 12a-12a illustrate schematically a prior art gas
  • FIG. 13 illustrates schematically a gas cabinet
  • FIG. 14 illustrates multiple gas cabinets venting into
  • the non-permeate stream may either be
  • fluorinated hydrocarbons such as CF 4 , C 2 F 6 , C 3 F 8 , C 4 F 10 , and
  • PFCs also include BF 3 , COF 2 , F 2 , HF,
  • SiF 4 , WF 6 , W0F 4 as long as they are not harmful for size
  • chlorofluorocarbons or compounds comprising two hydrogen
  • Glassy polymers are one
  • first-order screening means to identify suitable polymers.
  • invention exhibits : fD fs
  • test case the minimum value shown (e.g., -12) .
  • the minimum value shown e.g., -12
  • glassy membranes such as
  • polymer membranes made preferably from polyimides
  • polyamides polyamide- imides, polyesters, polycarbonates,
  • polysulfones polyethersulfone, polyetherketone, alkyl
  • aromatic polyimides aromatic polyamides, polyamidesimides ,
  • Asymmetric membranes are prepared by the precipitation
  • membranes are typified by a dense separating layer supported
  • membranes are polyimide asymmetric gas separation membranes
  • Such zeolite coated or filled membranes may be useful
  • one side of the gas separation membrane is contacted with a
  • permeation rate through the membrane is a property of the
  • Composite gas separation membranes typically have a
  • the separating layer and the substrate are usually different
  • Composite membrane structures can be prepared by laminating
  • composite gas separation membranes may be any suitable material.
  • composite gas separation membranes may be any suitable material.
  • membranes may also be prepared by co-extrusion of multiple
  • the membrane can be post-treated with, or coated by, or
  • the hollow-fiber spinning process depends on many variables
  • the fiber onto the takeup roll, and the like may be preferable to modify the membrane morphology to enhance the
  • Typical PFCs for semiconductor processes are the
  • the membrane WF 6 , HF, F 2 , NH 3 , Cl 2 , HBr, HCl, 0 3 , and any
  • post-treatment a method for treating a subject.
  • post-treatment a method for treating a subject.
  • the scrubber means to remove components potentially
  • gaseous hydrides may be removed according to the methods disclosed in U.S. Patents 4,743,435, 4,784,837;
  • a wet scrubber is, for example, disclosed in the
  • vacuum means are retained on the non-permeate side of the membrane) , or a combination. To create this lowered
  • compressors are sealed and oil-free, such as the compressors
  • membrane unit of a series of membrane units preferably
  • a coolant such as, for example, ambient liquid water or liquid nitrogen, if the temperature
  • the non-permeate stream is controlled at a set-point value
  • monitoring and control may be incorporated, for better
  • membrane varies from about -10°C to about 100°C, preferably
  • non-permeate stream is to pass a portion of the non-permeate
  • the hollow fiber membrane that is, on the permeate side of
  • stream of a first membrane stage N can be used as feed
  • stage N stage N, stage N+l and stage N+2, etc. This means that the
  • stage such as N+l or stage N+2.
  • perfluorocompounds can be used such as distillation,
  • condensation process can be used such as the one known under
  • the PFC mixture after the PFC mixture after the PFC mixture after the PFC mixture after the PFC mixture after the PFC mixture after the PFC mixture after the PFC mixture after the PFC mixture after the PFC mixture after the PFC mixture after the PFC mixture after the PFC mixture after the PFC mixture after the PFC mixture after the PFC mixture after the PFC mixture after the PFC mixture after the PFC mixture after the PFC mixture after the PFC mixture after the PFC mixture after the PFC mixture after the PFC mixture after the PFC mixture after the PFC mixture after the PFC mixture after the PFC mixture after the PFC mixture after the PFC mixture after the PFC mixture after the PFC mixture after the PFC mixture after the PFC mixture after the PFC mixture after the PFC mixture after the PFC mixture after the PFC mixture after the PFC mixture after the PFC mixture after the PFC mixture after the PFC mixture after the PFC mixture after the PFC mixture after the PFC mixture after the PFC mixture after the PFC mixture after the PFC mixture after the PFC mixture after the PFC mixture after the PFC
  • concentration comprises species whose boiling points are
  • C 2 F 6 has a normal
  • NF 3 has a normal boiling point of -129 °C.
  • condensation is made between the various components
  • CF 4 may be separated using molecular sieves (such as
  • FIG. 1 illustrates the efficacy of a burner to destroy
  • combustion at 900°C may remove all PFCs but C 2 F ⁇ and CF 4 , which may then be separated and
  • FIG. 2 in a semiconductor
  • manufacturing process 1 (which semiconductor process may be
  • gases and any other gases 24 (such as chemically reactive
  • gas mixture is preferably passed through filter 5a, and then
  • the compressed gas mixture is
  • TEOS tetraethoxysilane
  • halogen halides
  • Gas stream 25 is sent
  • carrier gas comprises helium, and also argon, it may be
  • a separation unit for example a condensation unit
  • a heat exchanger receives
  • liquid nitrogen LN 2 in line 15 condenses the high boiling
  • condensation of various products is controlled) which are recovered as a liquid on line 12 and sent to, for example,
  • fractions are either recovered in 21 for further treatment
  • the gaseous fraction from condenser 10 is sent through
  • non-adsorbed species one or several
  • the membrane for example SiH 4 ,WF 6 , and the like
  • the membrane for example SiH 4 ,WF 6 , and the like
  • FIG. 3 is a detailed partial view of FIG. 2 of a
  • a pressure regulator 46 which may or may not be
  • FIG. 4 represents a simplified schematic diagram of one
  • Feed gas 90 from a semiconductor manufacturing process is
  • First stage (N) membrane Ml creates a permeate stream 94 comprised primarily of carrier and process gases
  • a back pressure regulator 97 provides a pressure drop across
  • Non-permeate stream 96 then enters a second
  • a second back pressure regulator 99 is provided to the M2 membrane.
  • streams 94 and 100 may be combined and either
  • valve 104 and conduit 106 which allow
  • vacuum means 102 is illustrated on the recycled gas stream.
  • Vacuum pump 102 if present, allows recycled gas stream 100
  • vacuum means 102 itmay be utilized with or
  • FIG. 4a represents the embodiment of Fig. 4, where the
  • FIG. 5 illustrates a system and process substantially
  • conduit 110 and vacuum pump 112 are optionally provided.
  • the recycle gases in conduit 108 are comprised
  • a heated gas such as nitrogen, helium, argon or the
  • Such heated gas preferably above 60°C to 70°C.
  • any PFC species such as C2F6, in the heated gas. This may be any PFC species, such as C2F6, in the heated gas. This may be any PFC species, such as C2F6, in the heated gas. This may be any PFC species, such as C2F6, in the heated gas. This may be any PFC species, such as C2F6, in the heated gas. This may be any PFC species, such as C2F6, in the heated gas. This may be any PFC species, such as C2F6, in the heated gas. This may be any PFC species, such as C2F6, in the heated gas. This may be any PFC species, such as C2F6, in the heated gas. This may be any PFC species, such as C2F6, in the heated gas. This may be any PFC species, such as C2F6, in the heated gas. This may be any PFC species, such as C2F6, in the heated gas. This may be any PFC species, such as C2F6, in the heated gas.
  • heating the tubing by any means such as a heating
  • the membrane (s) may be heated, alone or with simultaneous
  • tubing system is used to heat the PFC gas mixture, can be to circulate as heating gas the permeate gas which is recovered
  • carrier gas such as nitrogen, argon or the like
  • FIGS. 6 and 7 illustrate two other possible embodiments
  • FIG. 6 several identical or different
  • the gas exhausts from 60...61
  • permeate 65 may be vented and a non-permeate 66 and 66a
  • permeate stream 66c may be routed to one or more membrane units M 2 , M 3 , ...M N , thus improving the purity of the PFCs.
  • a sweep gas stream 66b may be employed to sweep
  • Membrane units M 2 , M 3 and M N also serve as the permeate side of Ml.
  • Membrane units M 2 , M 3 and M N also serve as the permeate side of Ml.
  • one process may be a metal
  • oxide etch another might be an oxide etch, and yet another
  • controller 200 which in this case accepts a
  • the flow measurement device Ml using a set point PFC concentration in the non-permeate stream 66.
  • the flow measurement device
  • membrane units Ml, M2 , M3 , and MN as desired.
  • FIG. 7 is a parallel processing embodiment wherein each
  • Each feed stream 74...75 is fed to a membrane system M 1 ...M N
  • permeate gases are vented together at 78 while each non-
  • permeate 79, 80 is recycled, preferably to its corresponding
  • FIG. 8 illustrates at 20°C, two different flowrates of
  • FIG. 8 clearly illustrates for low pressure

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Separation Using Semi-Permeable Membranes (AREA)
  • Treating Waste Gases (AREA)

Abstract

L'invention concerne des procédés et des systèmes pour récupérer au moins un gaz de composés perfluorés à partir d'un mélange gazeux. Selon un mode de réalisation, le procédé selon l'invention consiste à fournir un mélange gazeux comprenant au moins un gaz de composés perfluorés et au moins un gaz porteur, ce mélange gazeux présentant au moins une pression prédéterminée; à fournir au moins une membrane de sélection de taille possédant un côté alimentation et un côté perméat, à placer le côté alimentation de cette membrane en contact avec le mélange gazeux; à retirer du côté alimentation de la membrane un courant ne formant pas un courant de perméat dont la pression est sensiblement égale à la pression prédéterminée d'un mélange gazeux concentré, comprenant essentiellement au moins ce gaz de composé perfluoré; et à retirer du côté perméat de la membrane sous forme d'un courant de perméat, un mélange gazeux appauvri comprenant essentiellement le gaz porteur.
PCT/EP1998/002272 1998-01-16 1998-04-16 Procede et systeme de separation et de recuperation de gaz de composes perfluores WO1999036159A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU74311/98A AU7431198A (en) 1998-01-16 1998-04-16 Process and system for separation and recovery of perfluorocompound gases

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP10007021A JP2999168B2 (ja) 1997-01-16 1998-01-16 ペルフルオロ化合物ガスの分離および回収のための改良された方法および装置
JP8/7021 1998-01-16

Publications (1)

Publication Number Publication Date
WO1999036159A1 true WO1999036159A1 (fr) 1999-07-22

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WO (1) WO1999036159A1 (fr)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1065459A3 (fr) * 1999-06-28 2001-01-17 Praxair Technology, Inc. Récupération de PFC par condensation
WO2010144523A1 (fr) * 2009-06-10 2010-12-16 L'air Liquide Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude Procédé et système pour récupérer du gaz à l'aide d'une membrane et d'une quantité réglable de pérméat recyclé combinée à une charge d'alimentation
US8357228B2 (en) 2007-10-12 2013-01-22 Taiyo Nippon Sanso Corporation Gas purification method
WO2021094709A1 (fr) * 2019-11-13 2021-05-20 Edwards Limited Récupération de gaz inerte à partir d'outil de fabrication de semi-conducteurs
WO2022023725A1 (fr) * 2020-07-28 2022-02-03 Edwards Limited Système de récupération de gaz noble
US12285715B2 (en) 2020-07-28 2025-04-29 Edwards Limited Noble gas recovery system

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5089135A (en) * 1988-01-20 1992-02-18 Mitsubishi Rayon Co., Ltd. Carbon based porous hollow fiber membrane and method for producing same
EP0649676A1 (fr) * 1993-10-20 1995-04-26 L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude Posttraitement de membranes pour la séparation de gaz avec fluoropolymère
EP0754487A1 (fr) * 1995-07-17 1997-01-22 L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude Procédé et dispositif pour séparer et récupérer des composés perfluoriques gazeux

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5089135A (en) * 1988-01-20 1992-02-18 Mitsubishi Rayon Co., Ltd. Carbon based porous hollow fiber membrane and method for producing same
EP0649676A1 (fr) * 1993-10-20 1995-04-26 L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude Posttraitement de membranes pour la séparation de gaz avec fluoropolymère
EP0754487A1 (fr) * 1995-07-17 1997-01-22 L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude Procédé et dispositif pour séparer et récupérer des composés perfluoriques gazeux

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
W. J. KOROS ET AL.: "Controlled permeability polymer membranes", ANNU. REV. MATER. SCI., no. 22, 1992, pages 47 - 89, XP002078858 *

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1065459A3 (fr) * 1999-06-28 2001-01-17 Praxair Technology, Inc. Récupération de PFC par condensation
US6257018B1 (en) 1999-06-28 2001-07-10 Praxair Technology, Inc. PFC recovery using condensation
US8357228B2 (en) 2007-10-12 2013-01-22 Taiyo Nippon Sanso Corporation Gas purification method
WO2010144523A1 (fr) * 2009-06-10 2010-12-16 L'air Liquide Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude Procédé et système pour récupérer du gaz à l'aide d'une membrane et d'une quantité réglable de pérméat recyclé combinée à une charge d'alimentation
CN102458612A (zh) * 2009-06-10 2012-05-16 乔治洛德方法研究和开发液化空气有限公司 用于再循环至供给气的渗透量可调整的基于膜的气体回收系统和方法
US8444749B2 (en) 2009-06-10 2013-05-21 L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude Method and system for membrane-based gas recovery
CN102458612B (zh) * 2009-06-10 2014-08-13 乔治洛德方法研究和开发液化空气有限公司 用于再循环至供给气的渗透量可调整的基于膜的气体回收系统和方法
WO2021094709A1 (fr) * 2019-11-13 2021-05-20 Edwards Limited Récupération de gaz inerte à partir d'outil de fabrication de semi-conducteurs
WO2022023725A1 (fr) * 2020-07-28 2022-02-03 Edwards Limited Système de récupération de gaz noble
US12285715B2 (en) 2020-07-28 2025-04-29 Edwards Limited Noble gas recovery system

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