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WO1998018152A3 - Programmable integrated passive devices and methods therefor - Google Patents

Programmable integrated passive devices and methods therefor Download PDF

Info

Publication number
WO1998018152A3
WO1998018152A3 PCT/US1997/019176 US9719176W WO9818152A3 WO 1998018152 A3 WO1998018152 A3 WO 1998018152A3 US 9719176 W US9719176 W US 9719176W WO 9818152 A3 WO9818152 A3 WO 9818152A3
Authority
WO
WIPO (PCT)
Prior art keywords
passive device
device array
integrated passive
layer
passive devices
Prior art date
Application number
PCT/US1997/019176
Other languages
French (fr)
Other versions
WO1998018152A2 (en
WO1998018152A9 (en
Inventor
Dominick Richiuso
Original Assignee
Micro Devices Corp California
Dominick Richiuso
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Micro Devices Corp California, Dominick Richiuso filed Critical Micro Devices Corp California
Priority to JP51963198A priority Critical patent/JP2002511186A/en
Priority to EP97912876A priority patent/EP0951731A4/en
Priority to AU49954/97A priority patent/AU4995497A/en
Publication of WO1998018152A2 publication Critical patent/WO1998018152A2/en
Publication of WO1998018152A9 publication Critical patent/WO1998018152A9/en
Publication of WO1998018152A3 publication Critical patent/WO1998018152A3/en

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/201—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of only components covered by H10D1/00 or H10D8/00, e.g. RLC circuits
    • H10D84/204—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of only components covered by H10D1/00 or H10D8/00, e.g. RLC circuits of combinations of diodes or capacitors or resistors
    • H10D84/212—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of only components covered by H10D1/00 or H10D8/00, e.g. RLC circuits of combinations of diodes or capacitors or resistors of only capacitors

Landscapes

  • Design And Manufacture Of Integrated Circuits (AREA)
  • Semiconductor Integrated Circuits (AREA)

Abstract

A method for endowing an integrated passive device array structure with a programmable value during manufacturing. The method includes forming a substantially conductive first layer (34) and forming a plurality of passive device array elements (40a, 40b) of the integrated passive device array structure above the substantially conductive first layer. The method further includes forming an insulating layer (42) above the plurality of passive device array elements. There is further included selectively forming vias (44) in the insulating layer. The vias facilitate electrical connections between selected ones of the plurality of passive device array elements with a substantially conductive second layer (46) subsequently deposited above the insulating layer.
PCT/US1997/019176 1996-10-18 1997-10-17 Programmable integrated passive devices and methods therefor WO1998018152A2 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP51963198A JP2002511186A (en) 1996-10-18 1997-10-17 Programmable integrated passive device and manufacturing method thereof
EP97912876A EP0951731A4 (en) 1996-10-18 1997-10-17 PROGRAMMABLE INTEGRATED PASSIVE DEVICES AND CORRESPONDING METHODS
AU49954/97A AU4995497A (en) 1996-10-18 1997-10-17 Programmable integrated passive devices and methods therefor

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US2877896P 1996-10-18 1996-10-18
US60/028,778 1996-10-18

Publications (3)

Publication Number Publication Date
WO1998018152A2 WO1998018152A2 (en) 1998-04-30
WO1998018152A9 WO1998018152A9 (en) 1998-07-30
WO1998018152A3 true WO1998018152A3 (en) 1998-10-08

Family

ID=21845363

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US1997/019176 WO1998018152A2 (en) 1996-10-18 1997-10-17 Programmable integrated passive devices and methods therefor

Country Status (4)

Country Link
EP (1) EP0951731A4 (en)
JP (1) JP2002511186A (en)
AU (1) AU4995497A (en)
WO (1) WO1998018152A2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1182778A1 (en) * 2000-07-21 2002-02-27 Semiconductor Ideas to The Market (ItoM) BV Receiver comprising a digitally controlled capacitor bank
US9576737B2 (en) * 2014-04-14 2017-02-21 Kabushiki Kaisha Toshiba Parallel capacitor and high frequency semiconductor device

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4682402A (en) * 1983-05-16 1987-07-28 Nec Corporation Semiconductor device comprising polycrystalline silicon resistor element
US5120572A (en) * 1990-10-30 1992-06-09 Microelectronics And Computer Technology Corporation Method of fabricating electrical components in high density substrates
US5310695A (en) * 1991-09-19 1994-05-10 Nec Corporation Interconnect structure in semiconductor device and method for making the same
US5530418A (en) * 1995-07-26 1996-06-25 Taiwan Semiconductor Manufacturing Company Method for shielding polysilicon resistors from hydrogen intrusion
US5635421A (en) * 1995-06-15 1997-06-03 Taiwan Semiconductor Manufacturing Company Method of making a precision capacitor array

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4028694A (en) * 1975-06-10 1977-06-07 International Business Machines Corporation A/D and D/A converter using C-2C ladder network
US5625316A (en) * 1994-07-01 1997-04-29 Motorola, Inc. Tuning circuit for an RC filter

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4682402A (en) * 1983-05-16 1987-07-28 Nec Corporation Semiconductor device comprising polycrystalline silicon resistor element
US5120572A (en) * 1990-10-30 1992-06-09 Microelectronics And Computer Technology Corporation Method of fabricating electrical components in high density substrates
US5310695A (en) * 1991-09-19 1994-05-10 Nec Corporation Interconnect structure in semiconductor device and method for making the same
US5635421A (en) * 1995-06-15 1997-06-03 Taiwan Semiconductor Manufacturing Company Method of making a precision capacitor array
US5530418A (en) * 1995-07-26 1996-06-25 Taiwan Semiconductor Manufacturing Company Method for shielding polysilicon resistors from hydrogen intrusion

Also Published As

Publication number Publication date
JP2002511186A (en) 2002-04-09
AU4995497A (en) 1998-05-15
EP0951731A2 (en) 1999-10-27
WO1998018152A2 (en) 1998-04-30
EP0951731A4 (en) 2000-02-02

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