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WO1998014132A1 - Confocal surface-measuring device - Google Patents

Confocal surface-measuring device Download PDF

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Publication number
WO1998014132A1
WO1998014132A1 PCT/DE1997/002240 DE9702240W WO9814132A1 WO 1998014132 A1 WO1998014132 A1 WO 1998014132A1 DE 9702240 W DE9702240 W DE 9702240W WO 9814132 A1 WO9814132 A1 WO 9814132A1
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WO
WIPO (PCT)
Prior art keywords
rotor
probe
light source
light
housing
Prior art date
Application number
PCT/DE1997/002240
Other languages
German (de)
French (fr)
Inventor
Johann Engelhardt
Thomas Zapf
Original Assignee
Leica Lasertechnik Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leica Lasertechnik Gmbh filed Critical Leica Lasertechnik Gmbh
Priority to DE59709932T priority Critical patent/DE59709932D1/en
Priority to EP97911121A priority patent/EP1006932B1/en
Priority to JP51614598A priority patent/JP2001510357A/en
Priority to US09/147,995 priority patent/US6263234B1/en
Publication of WO1998014132A1 publication Critical patent/WO1998014132A1/en

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Classifications

    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00—Measuring for diagnostic purposes; Identification of persons
    • A61B5/0059—Measuring for diagnostic purposes; Identification of persons using light, e.g. diagnosis by transillumination, diascopy, fluorescence
    • A61B5/0082—Measuring for diagnostic purposes; Identification of persons using light, e.g. diagnosis by transillumination, diascopy, fluorescence adapted for particular medical purposes
    • A61B5/0088—Measuring for diagnostic purposes; Identification of persons using light, e.g. diagnosis by transillumination, diascopy, fluorescence adapted for particular medical purposes for oral or dental tissue
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00—Measuring for diagnostic purposes; Identification of persons
    • A61B5/0059—Measuring for diagnostic purposes; Identification of persons using light, e.g. diagnosis by transillumination, diascopy, fluorescence
    • A61B5/0062—Arrangements for scanning
    • A61B5/0068—Confocal scanning
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61C—DENTISTRY; APPARATUS OR METHODS FOR ORAL OR DENTAL HYGIENE
    • A61C13/00—Dental prostheses; Making same
    • A61C13/0003—Making bridge-work, inlays, implants or the like
    • A61C13/0004—Computer-assisted sizing or machining of dental prostheses
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61C—DENTISTRY; APPARATUS OR METHODS FOR ORAL OR DENTAL HYGIENE
    • A61C9/00—Impression cups, i.e. impression trays; Impression methods
    • A61C9/004—Means or methods for taking digitized impressions
    • A61C9/0046—Data acquisition means or methods
    • A61C9/0053—Optical means or methods, e.g. scanning the teeth by a laser or light beam
    • G—PHYSICS
    • G16—INFORMATION AND COMMUNICATION TECHNOLOGY [ICT] SPECIALLY ADAPTED FOR SPECIFIC APPLICATION FIELDS
    • G16H—HEALTHCARE INFORMATICS, i.e. INFORMATION AND COMMUNICATION TECHNOLOGY [ICT] SPECIALLY ADAPTED FOR THE HANDLING OR PROCESSING OF MEDICAL OR HEALTHCARE DATA
    • G16H20/00—ICT specially adapted for therapies or health-improving plans, e.g. for handling prescriptions, for steering therapy or for monitoring patient compliance
    • G16H20/40—ICT specially adapted for therapies or health-improving plans, e.g. for handling prescriptions, for steering therapy or for monitoring patient compliance relating to mechanical, radiation or invasive therapies, e.g. surgery, laser therapy, dialysis or acupuncture

Definitions

  • the invention relates to a device for confocal surface measurement in body cavities, in particular for measuring the surface profile of teeth in the oral cavity, with a probe that can be inserted into the body cavity, a light source that feeds the probe, a detector that receives light signals, and one that digitizes and detects the detected signals into a three-dimensional one Representation of processing processor.
  • the invention is based on a method for measuring surfaces of any kind and any contour, different methods for surface measurement being known from practice.
  • a light line sensor can be used to project a light line onto the object and observe it at an angle with a CCD camera. The geometric deformation of the light line is measured. The height differences on the object are calculated from this deformation. By shifting the object under the sensor - perpendicular to the light line - and by repeatedly measuring a profile, the surface shape can be measured or determined in series.
  • the light section sensor is a simply constructed and robust sensor, the oblique lighting required here leads to one-sided shading of steep areas. This creates asymmetries in the image or inaccuracies. Furthermore, by scattering light from different depths, for example of an at least partially transparent tooth material, the measurements are again inaccurate or falsified.
  • a device for measuring the surface profile of teeth in the oral cavity is already known, this device consisting of the main components camera, screen and computer. This device is immediately upstream of a grinding unit for making an inlay (see Dr. Klaus J. Wiedhahn in DENTAL MAGAZINE 1/95 "Cerec 2 - a new era?").
  • the camera or probe is designed in such a way that infrared light is passed over an oscillating grating, in order then to be reflected on the tooth surface coated with white TiO 2 powder in a symmetrical beam path onto those in the camera CCD sensor to be directed.
  • the three-dimensional "optical impression" obtained with the camera is displayed on a fine-drawing color monitor as a pseudoplastic image, and the image and construction data obtained are processed in the image processing arithmetic unit and the built-in processors and passed on to the grinding unit.
  • confocal microscopy is particularly suitable for the surface measurement of tooth surfaces, since only those structures are imaged that are located directly in the focal plane of the microscope objective. Measurement errors due to the partially transparent tooth material are thus effectively avoided.
  • the method of reflection measurement with the conventional confocal microscope fails on steep transitions or flanks if their angle is greater than the aperture angle of the lens, because then the back reflex no longer hits the lens and is therefore lost for evaluation (compare PC Cheng and RG Summers in Confocal Microscopy Handbook, Chapter 17).
  • the present invention is based on the object of specifying a device for confocal surface measurement, with which a three-dimensional scanning of surfaces in body cavities such as the surface of a tooth in the oral cavity of a patient is possible.
  • the probe to be inserted into the oral cavity should be sufficiently small and simple in construction.
  • the device for surface measurement according to the invention achieves the above object by the features of patent claim 1.
  • the principle of confocal microscopy is based and that a sequential or simultaneous scanning of several focal planes takes place both with regard to specular reflections and with regard to weak scattered light or fluorine essence of the respective focal plane before the very special constructive designs of the
  • the device according to the invention will be explained, the basic mode of operation in relation to the confocal surface measurement and the scanning with regard to specular reflections as well as with regard to weak scattered light or fluorescent light will be discussed below
  • this is a device for surface measurement by means of confocal microscopy in the reflection process, in particular for measuring the surface profile of machined or drilled teeth, which is confocal with high dynamics (relative sensitivity) for imaging specular reflections on the one hand and weak stray light or fluorescent light of the respective focal plane on the other.
  • the confocal imaging can be performed with high dynamics, i.e. with high relative sensitivity, so that on the one hand an image of strongly reflected flat surfaces and on the other hand a representation of the scattered light or fluorescent light is also possible on steep flanks. Consequently, imaging is also possible if the light reflected at steep points is reflected past the lens, so that - in the usual reflection method - no profilometry can be carried out.
  • the scattered light is always used for evaluation when imaging is no longer possible due to a lack of specular reflections according to conventional confocal microscopy.
  • the detection signals are digitized with high resolution, if possible with a dynamic range significantly larger than 8 bits.
  • the Relative sensitivity or dynamics of the confocal image are 16 bits.
  • a large difference in brightness can be generated by evaluating scattered light in the area of steep flanks.
  • An algorithm for height evaluation or for generating the surface profile based on the weak scattered light, which takes into account or tolerates the high dynamics of the system. This algorithm interpolates the nearest or immediate neighboring levels, with higher intensities in a local area being relatively overweighted, in order to reduce the signal background dependencies. Ultimately, a suitable algorithm is provided which, after detection of the scattered light signals and after digitization with high resolution, carries out an adequate height evaluation of the digitized signals.
  • the surface can also be scanned in a dark field arrangement.
  • Either a point light source or a light source with appropriate blanking could be provided as the light source.
  • the inlay to be manufactured is scanned after a first processing and if the further processing is under
  • the correction values obtained on the basis of a target / actual comparison are used.
  • a correction for verifying the inlay shape is possible, so that when this process is repeated, a high precision of the production of the inlay and thus an optimal occlusion is possible.
  • the above measure also allows device or tool-related inaccuracies, for example due to wear and tear on the tool, to be taken into account, so that an optimal adjustment of the inlay and thus an optimal occlusion is possible even with dynamics in the processing station.
  • the hole created in the tooth is filled with a plastic mass, the points of contact with the opposite teeth being marked in the plastic mass by biting the patient on it.
  • the resulting surface profile is then scanned, the measured values obtained relating to the surface profile are stored and taken into account when calculating the surface or the dimensions of the inlay to be processed.
  • the probe is designed in the sense of a rotation scanner, namely that the illuminating beam scans the surface or tooth to be measured in a rotating manner, the "focal plane" to be scanned here. Due to the rotating movement of the illuminating beam in Form of a cylinder segment is formed. Accordingly, in the further data processing, a transformation of the coordinates of the scanned cylinder segments into a real focal plane, ie a geometry correction, is required, which will be referred to later.
  • the probe which is designed in the sense of a rotation scanner, comprises a deflecting device with at least one reflection surface, which directs the illuminating beam in the direction of the surface to be measured.
  • the deflection device or the reflecting surface can be displaced in a further axis to be scanned in order to advance the illuminating beam rotating by deflecting, so that the rotating illuminating beam executes a spiral or helical movement with simultaneous linear displacement of the deflecting direction.
  • the entire surface profile with different heights i.e.
  • a device for sequential or simultaneous scanning of several focal planes is also required, this device preferably being assigned to the detector.
  • the object is illuminated or scanned by the illuminating beam over a specifiable focus area. That after the interaction with the object or the
  • the light returning the surface of the object is focused by collecting optics in the image area, where in several image planes essentially central portions of the light focused there are directed in the direction of the detection means. Regardless of a specific design of the device for sequential or simultaneous scanning of several focal planes, it is essential in any case that such a scan - sequential or simultaneous - takes place both with regard to specular reflections and with regard to weak stray light or fluorescent light.
  • the deflection device is designed as a single mirror. This single mirror is for deflecting the illumination beam at a corresponding angle to Illuminating beam rotatably or rotatably arranged
  • the deflection device could be designed as a prism or as a polygon with several facets to form several beam guides , which will be referred to later
  • the probe can comprise a housing that is used for insertion into the oral cavity, a rotatable rotor having the deflection device being provided within the housing.
  • the deflection device is arranged in the region of an illumination and detection window of the housing, so that the object to be scanned directed illumination beam can reach the surface to be scanned unhindered at least in a region predetermined by the illumination and detection window.
  • the reflected detection beam accordingly returns through the illumination and detection window via the deflection device back into the probe up to a detector which will be explained later
  • an optics focusing the illumination beam running parallel to the axis of rotation is arranged within the rotor.
  • This optics rotates together with the rotor, so that a rotationally symmetrical one Design is required, the optics and the deflection device rotating together due to the arrangement in or on the rotor
  • the rotor is freely rotatably and linearly guided or mounted within the housing for the rotary movement and the linear feed of the rotor, a special rotor drive is provided, two for the rotary movement and for the linear feed of the rotor independent drives can be used
  • the rotary movement and the linear feed of the rotor are positively coupled, namely in that the rotor is rotatably guided by an external thread in an internal thread of the housing, so that the surfaces can now be scanned at very small distances.
  • the threads are the threads as fine threads with a small pitch, such fine threads are sufficient for a miniature linear feed in any case if the deflection device is a polygon with several facets, so that the interplay between a small pitch un d the geometrical arrangement of the facets can lead to a linear feed in the range of approximately 500 micrometers per scan line
  • the thread is designed as a differential thread with a very small feed, after which a feed in the range of preferably 50 micrometers per scan line can be realized.
  • a feed in the range of preferably 50 micrometers per scan line can be realized.
  • the interposition of a further device for under- or translation of the linear feed is possible
  • the rotor drive used for the rotary movement and / or for the linear feed is advantageously assigned to the housing and acts directly between the housing and the rotor.
  • This drive could, for example, encompass the rotor with a fixed connection to the housing and in the case of a Design of the rotor with an external thread directly access the external thread in the sense of a spindle drive.
  • Other drive and power transmission variants can also be implemented here.
  • the light source used to provide the illuminating beam could be designed as a laser light source, in particular as a diode laser.
  • the light source in the illuminating beam path can be followed by a beam splitter and a device for focus control or for changing the focal length of the illuminating beam. If the light source is a polyfocal light source, i.e. is a light source with different focal lengths, the provision of focus control is unnecessary, so that the device can be simplified again. Accordingly, only the beam splitter would then be arranged downstream of the light source in the illuminating beam path and the detector would accordingly be a polyfocal detector.
  • the probe is essentially defined by the housing - in spatial terms.
  • the light is fed into the probe and the signals derived from the interaction on the surface of the object to be scanned are derived from the probe in an advantageous manner via an optical fiber.
  • the processor takes on several tasks, namely for controlling, transforming or correcting the geometry and digitizing the signals, for calculating the three-dimensional surface profile and for storing the data.
  • FIG. 1 in a schematic representation of a first
  • FIG. 2 shows a schematic representation of a second exemplary embodiment of a device according to the invention
  • FIG. 3 shows a schematic representation of a third exemplary embodiment of a device according to the invention
  • Fig. 4 is a schematic representation of the scanning of an object after deflection of the illumination beam on a polygon, the interaction of rotating movement and linear feed of the illumination beam leads to a scan in cylinder segments and
  • 5 shows a schematic representation of the result of the scanning after transformation or geometry correction.
  • Figures 1 to 3 show three different embodiments of a device according to the invention for confocal surface measurement of the surface profile 1 of teeth 2 in an oral cavity, not shown here.
  • the device comprises a probe 3 that can be inserted into the body cavity, a light source 4 that feeds the probe 3, a detector 5 that receives light signals, and a processor 6 that digitizes the detected signals and processes them into a three-dimensional representation.
  • the probe 3 is designed in the sense of a rotation scanner, the probe 3 comprising a deflection device 7 with a reflection surface 8.
  • the deflection device 7 directs the illumination beam 9 in the direction of the surface 1 to be measured, the deflection device 7 being displaceable in a further axis 10 to be scanned in order to advance the rotating illumination beam 9.
  • the detector 5 has a device, not shown in the figures, for sequential or simultaneous scanning of a plurality of focal planes both with regard to specular reflections and with regard to weak scattered light or fluorescent light from the respective focal plane, so that the entire sample or tooth 2 can be scanned three-dimensionally.
  • the deflection device 7 is designed as a single mirror with a single reflection surface 8.
  • Further possible configurations are referred to the general description in order to avoid repetitions
  • the exemplary embodiments shown in FIGS. 1 to 3 have in common that the probe 3 comprises a housing 11 with a rotor 12 having the deflection device 7 and rotatable in the housing 11.
  • the deflection device 7 or the reflection surface 8 is in the region of an illumination and detection window 13 of the housing 11 arranged
  • an optical system 15 Arranged within the rotor 12 is an optical system 15 which focuses the illumination beam 9 which runs parallel to the axis of rotation 14
  • the rotor 12 is guided or mounted freely rotatably and linearly displaceably within the housing 11.
  • a common rotor drive 16 is provided both for the rotary movement and for the linear feed of the rotor 12, this drive being provided via a special transmission gear the rotor 12 can act
  • the rotor 12 is rotatably guided with an external thread 17 in an internal thread 18 of the housing 11.
  • the rotational movement of the rotor 12 is positively coupled with its linear feed.
  • the threads 17, 18 are fine threads with a small pitch
  • only one rotor drive 16 is provided for rotating the rotor and thus - forcibly - for linear feed of the rotor 12.
  • the rotor drive 16 is directly assigned to the housing 11 and the rotor drive 16 thus acts directly between the Housing 11 and the rotor 12
  • the light source 4 is designed as a laser light source.
  • a beam splitter 20 and a device 21 for focus control or focal length change are arranged downstream of the light source 4 in the illumination beam path 19
  • the light source 4 is a polyfocal light source.
  • the light source 4 in the illuminating beam path 19 is only followed by a beam splitter 20, the detector 5 being a polyfocal detector.
  • a device for focus control or focal length change is not necessary here
  • the light is fed into the probe 3 and the light is derived from the probe 3 via an optical fiber, not shown in the figures, which acts as a flexible connection between the probe 3 and the light source 4 on the one hand and the evaluation units on the other hand and thus for feeding the light and for deriving the signals resulting from the interaction of the light on the surface of the tooth 2 to be scanned
  • FIGS. 4 and 5 show a schematic representation of the scanning process with a rotating light beam and linear feed, a polygon 22 being provided there as deflection device 7.
  • the illumination beam 9 is reflected on a facet 23 of the polygon 22 and from there reaches the surface profile 1 of the tooth 2
  • the surface profile 1 - cylinder segment for cylinder segment - is scanned, different focal planes being obtained by sequential or simultaneous scanning both with regard to specular reflections and also with regard to weak scattered light or fluorescent light of the respective focal plane.
  • the sample values relating to cylinder segments are transformed to a "real" focal plane as part of a geometry correction, so that an undistorted three-dimensional representation of the surface profile 1 or tooth 2 can be calculated from the samples.

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Abstract

The invention concerns a device for the confocal measuring of surfaces inside cavities of the body, specially to measure the surface profile (1) of teeth (2) in the mouth cavity. Said device has a probe (3) that can be introduced into the cavity of the body, a light source feeding the probe (3), a detector picking up a light signal (5) and a processor (6) to digitalize the detected signal transforming it into a tridimensional representation. The device is designed using a simple construction and enabling an error free scanning of the surfaces. To this end, the probe (3) is designed as a rotary scanner having at least one deviating device (7) deflecting the light beam (9) in the direction of the surface that is to be measured (1), the deviating device (7) can be positioned in another scanning axis (10) to forward the rotating light beam (9), and the detector (5) comprises a device for sequential or simultaneous scanning of several focal planes, both with regards to specular reflection and to weak scattered light or fluorescent light of the focal plane concerned.

Description

Vorrichtung zur konfokalen Oberflächenvermessung Device for confocal surface measurement
Die Erfindung betrifft eine Vorrichtung zur konfokalen Oberflächenvermessung in Körperhöhlen, insbesondere zur Vermessung des Oberflächenprofils von Zähnen in der Mundhöhle, mit einer in die Körperhöhle einführbaren Sonde, einer die Sonde speisenden Lichtquelle, einem Lichtsignale aufnehmenden Detektor und einem die detektierten Signale digitalisierenden und zu einer dreidimensionalen Darstellung weiterverarbeitenden Prozessor.The invention relates to a device for confocal surface measurement in body cavities, in particular for measuring the surface profile of teeth in the oral cavity, with a probe that can be inserted into the body cavity, a light source that feeds the probe, a detector that receives light signals, and one that digitizes and detects the detected signals into a three-dimensional one Representation of processing processor.
Der Erfindung liegt ein Verfahren zur Vermessung von Oberflächen jedweder Art und jedweder Kontur zugrunde, wobei aus der Praxis unterschiedliche Verfahren zur Oberflächenvermessung bekannt sind.The invention is based on a method for measuring surfaces of any kind and any contour, different methods for surface measurement being known from practice.
So läßt sich beispielsweise mittels eines Lichtschnittsensors eine Lichtlinie auf das Objekt projizieren und mit einer CCD-Kamera unter einem Winkel beobachten. Die geometrische Verformung der Lichtlinie wird dabei gemessen. Aus dieser Verformung werden die Höhendifferenzen auf dem Objekt berechnet. Durch Verschiebung des Objekts unter dem Sensor - senkrecht zur Lichtlinie - und durch wiederholte Messung eines Profils läßt sich seriell die Oberflächenform vermessen beziehungsweise bestimmen.For example, a light line sensor can be used to project a light line onto the object and observe it at an angle with a CCD camera. The geometric deformation of the light line is measured. The height differences on the object are calculated from this deformation. By shifting the object under the sensor - perpendicular to the light line - and by repeatedly measuring a profile, the surface shape can be measured or determined in series.
Zwar handelt es sich bei dem Lichtschnittsensor um einen einfach aufgebauten und dabei robusten Sensor, jedoch führt die hier erforderliche Schrägbeleuchtung zu einer einseitigen Abschattung steiler Stellen. Dadurch entstehen Asymmetrien in der Abbildung beziehungsweise Ungenauigkeiten. Des weiteren werden durch Streuung von Licht aus verschiedenen Tiefen beispielsweise eines zumindest teiltransparenten Zahnmaterials die Messungen abermals ungenau beziehungsweise verfälscht. Auch ist bereits eine Vorrichtung zur Vermessung des Oberflächenprofils von Zähnen in der Mundhöhle bekannt, wobei diese Vorrichtung aus den Hauptkomponenten Kamera, Bildschirm und Rechner besteht. Diese Vorrichtung ist unmittelbar einer Schleifeinheit zur Anfertigung eines Inlays vorgeschaltet (vgl. Dr. Klaus J. Wiedhahn in DENTAL MAGAZIN 1/95 "Cerec 2 - eine neue Epoche?").Although the light section sensor is a simply constructed and robust sensor, the oblique lighting required here leads to one-sided shading of steep areas. This creates asymmetries in the image or inaccuracies. Furthermore, by scattering light from different depths, for example of an at least partially transparent tooth material, the measurements are again inaccurate or falsified. A device for measuring the surface profile of teeth in the oral cavity is already known, this device consisting of the main components camera, screen and computer. This device is immediately upstream of a grinding unit for making an inlay (see Dr. Klaus J. Wiedhahn in DENTAL MAGAZINE 1/95 "Cerec 2 - a new era?").
Bei der bekannten Vorrichtung zur Vermessung des Oberflächenprofils von Zähnen ist die Kamera bzw. Sonde derart konzipiert, daß Infrarotlicht über ein oszillierendes Strichgitter geleitet wird, um dann auf der mit weißem Tiθ2-Puder beschichteten Zahnoberfläche reflektiert in einem symmetrischen Strahlengang auf den in der Kamera befindlichen CCD-Sensor geleitet zu werden. Pro Aufnahmesequenz (0,2 s) werden vier Einzelaufnahmen unter differierenden Strichgitterwinkeln gemacht und die vier Einzelbilder werden zu einem dreidimensionalen Abbild des Zahnes umgerechnet. Der mit der Kamera gewonnene dreidimensionale "optische Abdruck" wird auf einem feinzeichnenden Farbmonitor als pseudoplastisches Bild dargestellt und die gewonnenen Bild- und Konstruktionsdaten werden im Bildverarbeitungs- Rechenwerk und den eingebauten Prozessoren verarbeitet und an die Schleifeinheit weitergeleitet.In the known device for measuring the surface profile of teeth, the camera or probe is designed in such a way that infrared light is passed over an oscillating grating, in order then to be reflected on the tooth surface coated with white TiO 2 powder in a symmetrical beam path onto those in the camera CCD sensor to be directed. For each exposure sequence (0.2 s), four individual images are taken at different grating angles and the four individual images are converted into a three-dimensional image of the tooth. The three-dimensional "optical impression" obtained with the camera is displayed on a fine-drawing color monitor as a pseudoplastic image, and the image and construction data obtained are processed in the image processing arithmetic unit and the built-in processors and passed on to the grinding unit.
Das hier in Rede steende bekannte Verfahren und die damit verbundene Hardware ist jedoch insoweit problematisch, als es stets erforderlich ist, die Zahnoberfläche mit einem Pulver bzw. Puder zu beschichten, um nämlich eine eindeutige Reflexion an der Zahnoberfläche zu gewährleisten. Des weiteren ist die Kamera mit dem dort verwendeten CCD-Sensor konstruktiv aufwendig.The known method in question here and the associated hardware is problematic insofar as it is always necessary to coat the tooth surface with a powder or powder in order to ensure a clear reflection on the tooth surface. Furthermore, the camera with the CCD sensor used there is structurally complex.
Schließlich ist es aus der Praxis auch bereits bekannt, mittels konfokalerAfter all, it is already known from practice, using confocal
Mikroskopie Oberflächen zu scannen und daraus dreidimensionale Aufnahmen der Oberfläche zu generieren. Hierzu wird lediglich beispielhaft auf Johann Engelhardt und Werner Knebel in Physik in unserer Zeit, 24. Jahrg. 1993, Nr. 2 "Konfokale Laserscanning-Mikroskopie" und auf D.K. Hamilton und T. Wilson in Appl. Phys. B 27, 211-213, 1982 "Three-Dimensional Surface Measurement Using the Confocal Scanning Microscope" verwiesen. Hinsichtlich eines entsprechenden Systems - Leica TCS NT - wird auf den Leica-Prospekt "The Confokal System, Leica TCS NT", und zwar hinsichtlich der Anwendung im Dentalbereich insbesondere auf Seite 16, verwiesen. Eine solche Vorrichtung ist jedoch einerseits zu groß zur Applikation in der Mundhöhle eines Patienten und andererseits in konstruktiver Hinsicht zu aufwendig und somit zu teuer im Rahmen einer zahnärztlichen Anwendung.Microscopy to scan surfaces and make three-dimensional images to generate the surface. To this end, only examples are given on Johann Engelhardt and Werner Knebel in Physics in our time, 24th year 1993, No. 2 "Confocal Laser Scanning Microscopy" and on DK Hamilton and T. Wilson in Appl. Phys. B 27, 211-213, 1982 "Three-Dimensional Surface Measurement Using the Confocal Scanning Microscope". With regard to a corresponding system - Leica TCS NT - reference is made to the Leica brochure "The Confocal System, Leica TCS NT", specifically for use in the dental field, in particular on page 16. However, such a device is on the one hand too large for application in the oral cavity of a patient and on the other hand is structurally too complex and therefore too expensive in the context of a dental application.
Ungeachtet der voranstehend genannten Nachteile eignet sich die konfokale Mikroskopie zur Oberflächenvermessung von Zahnoberflächen ganz besonders, da nach diesem Verfahren lediglich diejenigen Strukturen abgebildet werden, die sich unmittelbar in der Brennebene des Mikroskopobjektivs befinden. Meßfehler aufgrund des teiltransparenten Zahnmaterials sind somit wirksam vermieden. Allerdings versagt die Methode der Reflektionsmessung mit dem herkömmlichen Konfokalmikroskop bei steilen Übergängen beziehungsweise Flanken, wenn deren Winkel größer als der Aperturwinkel des Objektivs ist, da nämlich dann der Rückreflex das Objektiv nicht mehr trifft und somit für die Auswertung verloren geht (vergleiche P.C. Cheng und R.G. Summers in Confocal Microscopy Handbook, Chapter 17).Regardless of the disadvantages mentioned above, confocal microscopy is particularly suitable for the surface measurement of tooth surfaces, since only those structures are imaged that are located directly in the focal plane of the microscope objective. Measurement errors due to the partially transparent tooth material are thus effectively avoided. However, the method of reflection measurement with the conventional confocal microscope fails on steep transitions or flanks if their angle is greater than the aperture angle of the lens, because then the back reflex no longer hits the lens and is therefore lost for evaluation (compare PC Cheng and RG Summers in Confocal Microscopy Handbook, Chapter 17).
Der vorliegenden Erfindung liegt nun die Aufgabe zugrunde, eine Vorrichtung zur konfokalen Oberflächenvermessung anzugeben, mit der eine dreidimensionale Abtastung von Oberflächen in Körperhöhlen wie z.B. der Oberfläche eines Zahnes in der Mundhöhle eines Patienten möglich ist. Dabei soll die in die Mundhöhle einzuführende Sonde hinreichend klein und einfach in der Konstruktion sein. Die erfindungsgemaße Vorrichtung zur Oberflachenvermessung lost die voranstehende Aufgabe durch die Merkmale des Patentanspruches 1 Danach ist die hier in Rede stehende Vorrichtung zur konfokalen Oberflachenvermessung in Korperhohlen, insbesondere zur Vermessung des Oberflachenprofils von Zahnen in der Mundhohle, derart ausgestaltet, daß die Sonde im Sinne eines Rotationsscanners mit mindestens einer Umlenkeinrichtung ausgebildet ist, die den Beleuchtungsstrahl in Richtung der zu vermessenden Oberflache lenkt, daß die Umlenkeinrichtung zum Vorschub des rotierenden Beleuchtungsstrahls in einer weiteren zu scannenden Achse verschiebbar ist und daß der Detektor eine Einrichtung zur sequentiellen oder simultanen Abtastung mehrerer Brennebenen sowohl hinsichtlich spekularer Reflexe als auch hinsichtlich schwachen Streulichts oder Fluoressenzhchts der jeweiligen Brennebene umfaßtThe present invention is based on the object of specifying a device for confocal surface measurement, with which a three-dimensional scanning of surfaces in body cavities such as the surface of a tooth in the oral cavity of a patient is possible. The probe to be inserted into the oral cavity should be sufficiently small and simple in construction. The device for surface measurement according to the invention achieves the above object by the features of patent claim 1. The device in question here for confocal surface measurement in body cavities, in particular for measuring the surface profile of teeth in the oral cavity, is designed in such a way that the probe is in the sense of a rotation scanner is formed with at least one deflecting device which directs the illuminating beam in the direction of the surface to be measured, that the deflecting device for advancing the rotating illuminating beam is displaceable in a further axis to be scanned and that the detector is a device for sequential or simultaneous scanning of several focal planes both with regard to specular Reflections as well as weak scattered light or fluorescent light of the respective focal plane includes
Für die erfindungsgemaße Vorrichtung ist von ganz besonderer Bedeutung, daß hier das Prinzip der konfokalen Mikroskopie zugrundehegt und daß eine sequentielle oder simultane Abtastung mehrerer Brennebenen sowohl hinsichtlich spekularer Reflexe als auch hinsichtlich schwachen Streulichts oder Fluoressenzhchts der jeweiligen Brennebene stattfindet Bevor nun die ganz besonderen konstruktiven Ausgestaltungen der erfindungsgemaßen Vorrichtung erläutert werden, sei nachfolgend die grundsätzliche Funktionsweise in Bezug auf die konfokale Oberflachenvermessung und die Abtastung hinsichtlich spekularer Reflexe wie auch hinsichtlich schwachen Streulichts oder Fluoressenzhchts erörtertIt is of particular importance for the device according to the invention that here the principle of confocal microscopy is based and that a sequential or simultaneous scanning of several focal planes takes place both with regard to specular reflections and with regard to weak scattered light or fluorine essence of the respective focal plane before the very special constructive designs of the The device according to the invention will be explained, the basic mode of operation in relation to the confocal surface measurement and the scanning with regard to specular reflections as well as with regard to weak scattered light or fluorescent light will be discussed below
Danach handelt es sich hier um eine Vorrichtung zur Oberflachenvermessung mittels Konfokalmikroskopie im Reflexionsverfahren, insbesondere zur Vermessung des Oberflachenprofils von bearbeiteten beziehungsweise gebohrten Zahnen, welche durch eine konfokale Abbildung mit hoher Dynamik (relative Empfindlichkeit) zur Abbildung einerseits spekularer Reflexe und andererseits schwachen Streulichts oder Fluoreszenzlichts der jeweiligen Brennebene geprägt ist.According to this, this is a device for surface measurement by means of confocal microscopy in the reflection process, in particular for measuring the surface profile of machined or drilled teeth, which is confocal with high dynamics (relative sensitivity) for imaging specular reflections on the one hand and weak stray light or fluorescent light of the respective focal plane on the other.
Hinsichtlich des hier zugrundeliegenden Verfahrens ist demnach erkannt worden, daß sich die Konfokalmikroskopie ganz besonders zurWith regard to the method on which this is based, it has accordingly been recognized that confocal microscopy is particularly suitable for
Oberflächenvermessung teiltransparenter Materialien eignet, da nämlich bei der Konfokalmikroskopie lediglich diejenigen Strukturen abgebildet werden, die sich unmittelbar in der jeweiligen Brennebene des Mikroskopobjektivs befinden. Des weiteren ist erkannt worden, daß sich der Nachteil herkömmlicher Konfokalmikroskopie im Reflexionsverfahren hinsichtlich der zuvor erörterten Aperturproblematik dadurch beheben läßt, daß man zu der üblichen Auswertung des Rückreflexes nunmehr auch eine Auswertung des Streulichts oder Fluoreszenzlichts der jeweiligen Brennebene vornimmt.Surface measurement of partially transparent materials is suitable, because in confocal microscopy only those structures are imaged that are located directly in the respective focal plane of the microscope objective. Furthermore, it has been recognized that the disadvantage of conventional confocal microscopy in the reflection method with regard to the aperture problem previously discussed can be remedied by evaluating the scattered light or fluorescent light of the respective focal plane in addition to the usual evaluation of the back reflection.
Zur Realisierung einer Auswertung des Streulichts beziehungsweise Fluoreszenzlichts kann die konfokale Abbildung mit hoher Dynamik, d.h. mit hoher relativer Empfindlichkeit erfolgen, so daß einerseits eine Abbildung stark reflektierter flacher Flächen und andererseits eine Darstellung des Streulichts oder Fluoreszenzlichts auch an steilen Flanken möglich ist. Folglich ist eine Abbildung auch dann möglich, wenn das an steilen Stellen reflektierte Licht am Objektiv vorbei reflektiert wird, so daß - im üblichen Reflexionsverfahren - keine Profilometrie betrieben werden kann. Letztendlich wird das Streulicht zur Auswertung stets dann hinzugezogen, wenn eine Abbildung mangels spekularer Reflexe nach herkömmlicher Konfokalmikroskopie nicht mehr möglich ist.To realize an evaluation of the scattered light or fluorescent light, the confocal imaging can be performed with high dynamics, i.e. with high relative sensitivity, so that on the one hand an image of strongly reflected flat surfaces and on the other hand a representation of the scattered light or fluorescent light is also possible on steep flanks. Consequently, imaging is also possible if the light reflected at steep points is reflected past the lens, so that - in the usual reflection method - no profilometry can be carried out. Ultimately, the scattered light is always used for evaluation when imaging is no longer possible due to a lack of specular reflections according to conventional confocal microscopy.
Wie bereits zuvor erwähnt, erfolgt die Digitalisierung der Detektionssignale mit hoher Auflösung, und zwar möglichst bei einer Dynamik wesentlich größer als 8 bit. Zur ganz besonders wirksamen Nutzung des schwachen Streulichts beziehungsweise Fluoreszenzlichts im Bereich steiler Stellen der Oberfläche kann die relative Empfindlichkeit beziehungsweise Dynamik der konfokalen Abbildung bei 16 bit liegen. Letztendlich läßt sich hierdurch ein großer Helligkeitsunterschied durch Streulichtauswertung im Bereich steiler Flanken erzeugen.As already mentioned above, the detection signals are digitized with high resolution, if possible with a dynamic range significantly larger than 8 bits. For particularly effective use of the weak scattered light or fluorescent light in the area of steep spots on the surface, the Relative sensitivity or dynamics of the confocal image are 16 bits. Ultimately, a large difference in brightness can be generated by evaluating scattered light in the area of steep flanks.
Zur Höhenauswertung beziehungsweise zur Erzeugung des Oberflachenprofils anhand des schwachen Streulichts ist ein Algorithmus vorgesehen, der die hohe Dynamik des Systems berücksichtigt beziehungsweise toleriert. Dieser Algorithmus berücksichtigt interpolierend nächste beziehungsweise unmittelbare Nachbarebenen, wobei höhere Intensitäten in einem lokalen Bereich relativ übergewichtet werden, um nämlich die Signaluntergrundabhängigkeiten zu reduzieren. Letztendlich ist ein geeigneter Algorithmus vorgesehen, der nach Detektion der Streulichtsignale sowie nach Digitalisierung mit hoher Auflösung eine adäquate Höhenauswertung der digitalisierten Signale vornimmt.An algorithm is provided for height evaluation or for generating the surface profile based on the weak scattered light, which takes into account or tolerates the high dynamics of the system. This algorithm interpolates the nearest or immediate neighboring levels, with higher intensities in a local area being relatively overweighted, in order to reduce the signal background dependencies. Ultimately, a suitable algorithm is provided which, after detection of the scattered light signals and after digitization with high resolution, carries out an adequate height evaluation of the digitized signals.
An dieser Stelle sei hervorgehoben, daß das Scannen der Oberfläche auch in Dunkelfeldanordnung erfolgen kann. Als Lichtquelle könnte entweder eine Punktlichtquelle oder eine Lichtquelle mit entsprechender Ausblendung vorgesehen sein.At this point it should be emphasized that the surface can also be scanned in a dark field arrangement. Either a point light source or a light source with appropriate blanking could be provided as the light source.
Im Rahmen einer Anwendung in der Zahnheilkunde, insbesondere zur Herstellung passgenauer Inlays anstelle herkömmlicher Amalgamfüllungen, ist es von ganz besonderem Vorteil, wenn zunächst die Oberfläche des unbearbeiteten Zahnes abgescannt und die detektierten Werte - vorzugsweise digitalisiert und bereits zum Höhenprofil umgerechnet - gespeichert werden. In einem nächsten Schritt wird der Zahn bearbeitet beziehungsweise gebohrt. Danach erfolgt ein abermaliges Scannen des nunmehr bearbeiteten beziehungsweise gebohrten Zahnes sowie ebenfalls ein Abspeichern der das Oberflächenprofil des bearbeiteten Zahnes ergebenden Werte. Aus der sich ergebenden Differenz beider Oberflächenprofile beziehungsweise der die Oberflächenprofile aufspannenden Werte ergibt sich die Oberfläche beziehungsweise ergeben sich die genauen Maße des benötigten Inlays für eine optimale Okklusion des behandelten Zahnes.In the context of an application in dentistry, in particular for the production of precisely fitting inlays instead of conventional amalgam fillings, it is of particular advantage if the surface of the unprocessed tooth is first scanned and the detected values - preferably digitized and already converted to the height profile - are saved. In the next step, the tooth is machined or drilled. This is followed by a renewed scanning of the tooth that has now been machined or drilled, as well as a storage of the values resulting from the surface profile of the machined tooth. The surface results from the resulting difference between the two surface profiles or the values spanning the surface profiles or the exact dimensions of the inlays required for an optimal occlusion of the treated tooth.
Zum Erhalt einer besonders hohen Präzision bei der Bearbeitung des Inlays ist es von ganz besonderem Vorteil, wenn das zu fertigende Inlay nach einer ersten Bearbeitung gescannt wird und wenn die weitere Bearbeitung unterTo obtain a particularly high level of precision when processing the inlay, it is of particular advantage if the inlay to be manufactured is scanned after a first processing and if the further processing is under
Hinzuziehung der anhand eines Soll/Ist-Vergleichs gewonnenen Korrekturwerte erfolgt. Insoweit ist eine Korrektur zur Verifizierung der Inlayform möglich, so daß bei Wiederholung dieses Vorgangs eine hohe Präzision der Fertigung des Inlays und somit eine optimale Okklusion möglich ist. Durch die voranstehende Maßnahme lassen sich obendrein gerate- beziehungsweise werkzeugbedingte Ungenauigkeiten, beispielsweise aufgrund von Abnutzungserscheinungen am Werkzeug berücksichtigen, so daß auch bei einer Dynamik in der Bearbeitungsstation eine optimale Anpassung des Inlays und somit eine optimale Okklusion möglich ist.The correction values obtained on the basis of a target / actual comparison are used. In this respect, a correction for verifying the inlay shape is possible, so that when this process is repeated, a high precision of the production of the inlay and thus an optimal occlusion is possible. The above measure also allows device or tool-related inaccuracies, for example due to wear and tear on the tool, to be taken into account, so that an optimal adjustment of the inlay and thus an optimal occlusion is possible even with dynamics in the processing station.
Des weiteren ist es möglich, daß - in einem weiteren Schritt - die im Zahn angelegte Bohrung mit einer plastischen Masse gefüllt wird, wobei durch Draufbeissen des Patienten die Berührungspunkte mit den gegenüberliegenden Zähnen in der plastischen Masse markiert werden. Das sich dabei ergebende Oberflächenprofil wird anschließend abgescannt, die erhaltenen Meßwerte betreffend das Oberflächenprofil werden gespeichert und bei der Berechnung der Oberfläche beziehungsweise der Maße des zu bearbeitenden Inlays berücksichtigt.Furthermore, it is possible that - in a further step - the hole created in the tooth is filled with a plastic mass, the points of contact with the opposite teeth being marked in the plastic mass by biting the patient on it. The resulting surface profile is then scanned, the measured values obtained relating to the surface profile are stored and taken into account when calculating the surface or the dimensions of the inlay to be processed.
Für die erfindungsgemäße Vorrichtung ist es nun in konstruktiver Hinsicht von ganz besonderer Bedeutung, daß die Sonde im Sinne eines Rotationsscanners ausgebildet ist, daß nämlich der Beleuchtungsstrahl in rotierender Weise die zu vermessende Oberfläche bzw. den Zahn abscannt, wobei die hier zu scannende "Fokalebene" aufgrund der rotierenden Bewegung des Beleuchtungsstrahls in Form eines Zylindersegments ausgebildet ist. Entsprechend ist bei der weiteren Datenverarbeitung eine Transformation der Koordinaten der abgetasteten Zylindersegmente in eine echte Fokalebene, d.h. eine Geometriekorrektur, erforderlich, worauf später noch Bezug genommen wird.For the device according to the invention, it is of particular importance from a constructional point of view that the probe is designed in the sense of a rotation scanner, namely that the illuminating beam scans the surface or tooth to be measured in a rotating manner, the "focal plane" to be scanned here. due to the rotating movement of the illuminating beam in Form of a cylinder segment is formed. Accordingly, in the further data processing, a transformation of the coordinates of the scanned cylinder segments into a real focal plane, ie a geometry correction, is required, which will be referred to later.
Die im Sinne eines Rotationsscanners ausgebildete Sonde umfaßt eine Umienkeinrichtung mit mindestens einer Reflexionsfläche, die den Beleuchtungsstrahl in Richtung der zu vermessenden Oberfläche lenkt. Die Umlenkeinrichtung bzw. die Reflexionsfläche ist zum Vorschub des durch Umlenkung rotierenden Beleuchtungsstrahls in einer weiteren zu scannenden Achse verschiebbar, so daß der rotierende Beleuchtungsstrahl bei gleichzeitiger linearer Verschiebung der Umlenkrichtung eine spiralförmige bzw. schraubenlinienförmige Bewegung ausführt.The probe, which is designed in the sense of a rotation scanner, comprises a deflecting device with at least one reflection surface, which directs the illuminating beam in the direction of the surface to be measured. The deflection device or the reflecting surface can be displaced in a further axis to be scanned in order to advance the illuminating beam rotating by deflecting, so that the rotating illuminating beam executes a spiral or helical movement with simultaneous linear displacement of the deflecting direction.
Um nun im Verlaufe der Oberflächenabtastung das gesamte Oberflächenprofil mit unterschiedlichen Höhen, d.h. auf unterschiedlichen Brennebenen mit unterschiedlichen Brennpunkten abtasten zu können, ist des weiteren eine Einrichtung zur sequentiellen oder simultanen Abtastung mehrerer Brennebenen erforderlich, wobei diese Vorrichtung vorzugsweise dem Detektor zugeordnet ist. Wesentlich ist hierfür jedenfalls, daß das Objekt durch den Beleuchtungsstrahl über einen vorgebbaren Fokusbereich beleuchtet bzw. gescannt wird. Das nach der Wechselwirkung mit dem Objekt bzw. derNow, in the course of the surface scan, the entire surface profile with different heights, i.e. To be able to scan on different focal planes with different focal points, a device for sequential or simultaneous scanning of several focal planes is also required, this device preferably being assigned to the detector. In any case, it is essential that the object is illuminated or scanned by the illuminating beam over a specifiable focus area. That after the interaction with the object or the
Oberfläche des Objekts zurückkehrende Licht wird durch eine Sammeloptik im Bildbereich fokussiert, wo in mehreren Bildebenen im wesentlichen zentral liegende Anteile des dort fokussierten Lichts in Richtung der Detektionsmittel gelenkt werden. Ungeachtet einer konkreten Ausgestaltung der Einrichtung zur sequentiellen oder simultanen Abtastung mehrerer Brennebenen ist jedenfalls wesentlich, daß eine solche Abtastung - sequentiell oder simultan - sowohl hinsichtlich spekularer Reflexe als auch hinsichtlich schwachen Streulichts oder Fluoressenzlichts stattfindet. Hinsichtlich einer konkreten Ausgestaltung der erfindungsgemaßen Vorrichtung, insbesondere hinsichtlich einer konkreten Ausgestaltung der Sonde und deren Innenleben unter dem Gesichtspunkt einer einfachen Konstruktion ist es von ganz besonderem Vorteil, wenn die Umlenkeinrichtung als Einfachspiegel ausgeführt ist Dieser Einfachspiegel ist zur Umlenkung des Beleuchtungsstrahls unter einem entsprechenden Winkel zum Beleuchtungsstrahl drehbar bzw rotierbar angeordnet Ebenso konnte die Umlenkeinrichtung als Prisma oder als Polygon mit mehreren Facetten zur Bildung mehrerer Strahlfuhrungen ausgebildet sein Im Falle der Ausgestaltung als Polygon mit mehreren Facetten lassen sich durch entsprechende Anordnung kleinste lineare Vorschübe orthogonal zu der durch den rotierenden Beleuchtungsstrahl aufgespannten Ebene realisieren, worauf spater noch Bezug genommen wirdThe light returning the surface of the object is focused by collecting optics in the image area, where in several image planes essentially central portions of the light focused there are directed in the direction of the detection means. Regardless of a specific design of the device for sequential or simultaneous scanning of several focal planes, it is essential in any case that such a scan - sequential or simultaneous - takes place both with regard to specular reflections and with regard to weak stray light or fluorescent light. With regard to a specific configuration of the device according to the invention, in particular with regard to a specific configuration of the probe and its interior from the point of view of a simple construction, it is of particular advantage if the deflection device is designed as a single mirror.This single mirror is for deflecting the illumination beam at a corresponding angle to Illuminating beam rotatably or rotatably arranged Likewise, the deflection device could be designed as a prism or as a polygon with several facets to form several beam guides , which will be referred to later
Im konkreten kann die Sonde ein zur Einfuhrung in die Mundhohle dienendes Gehäuse umfassen, wobei innerhalb des Gehäuses ein die Umlenkeinrichtung aufweisender drehbarer Rotor vorgesehen ist Die Umlenkeinrichtung ist dabei im Bereich eines Beleuchtungs- und Detektionsfensters des Gehäuses angeordnet, so daß der zu dem zu scannenden Objekt hin gerichtete Beleuchtungsstrahl zumindest in einem durch das Beleuchtungs- und Detektionsfenster vorgegebenen Bereich ungehindert zu der abzutastenden Oberflache gelangen kann Der reflektierte Detektionsstrahl gelangt entsprechend wieder durch das Beleuchtungs- und Detektionsfenster über die Umlenkeinrichtung in die Sonde zurück bis hin zu einem spater noch erläuterten DetektorSpecifically, the probe can comprise a housing that is used for insertion into the oral cavity, a rotatable rotor having the deflection device being provided within the housing. The deflection device is arranged in the region of an illumination and detection window of the housing, so that the object to be scanned directed illumination beam can reach the surface to be scanned unhindered at least in a region predetermined by the illumination and detection window. The reflected detection beam accordingly returns through the illumination and detection window via the deflection device back into the probe up to a detector which will be explained later
Innerhalb des Rotors ist des weiteren eine den parallel zur Rotationsachse verlaufenden Beleuchtungsstrahl fokussierende Optik angeordnet Diese Optik dreht gemeinsam mit dem Rotor, so daß eine rotationssymmetrische Ausgestaltung erforderlich ist, wobei die Optik und die Umlenkeinrichtung aufgrund der Anordnung in bzw an dem Rotor gemeinsam drehenFurthermore, an optics focusing the illumination beam running parallel to the axis of rotation is arranged within the rotor. This optics rotates together with the rotor, so that a rotationally symmetrical one Design is required, the optics and the deflection device rotating together due to the arrangement in or on the rotor
Im Rahmen einer besonders vorteilhaften und dabei einfachen Ausgestaltung ist der Rotor innerhalb des Gehäuses frei drehbar und linear verschiebbar gefuhrt bzw gelagert Zur Drehbewegung und zum linearen Vorschub des Rotors ist ein besonderer Rotorantrieb vorgesehen, wobei für die Drehbewegung und für den linearen Vorschub des Rotors auch zwei unabhängige Antriebe verwendbar sind Im Rahmen einer ganz besonders vorteilhaften Ausgestaltung sind die Drehbewegung und der lineare Vorschub des Rotors zwangsgekoppelt, namhch dadurch, daß der Rotor mit einem Außengewinde in einem Innengewinde des Gehäuses drehbar gefuhrt ist Um nun in kleinsten Abstanden die Oberflachen abtasten zu können, sind die Gewinde als Feingewinde mit geringer Steigung augefuhrt, wobei solche Feingewinde zu einem kleinstmoghchen linearen Vorschub jedenfalls dann ausreichen, wenn es sich bei der Umlenkeinrichtung um ein Polygon mit mehreren Facetten handelt, so daß das Zusammenspiel zwischen geringer Steigung und der geometrischen Anordnung der Facetten zu einem linearen Vorschub im Bereich von etwa 500 Micrometer pro Scanzeile fuhren kannAs part of a particularly advantageous and simple configuration, the rotor is freely rotatably and linearly guided or mounted within the housing for the rotary movement and the linear feed of the rotor, a special rotor drive is provided, two for the rotary movement and for the linear feed of the rotor independent drives can be used In the context of a very particularly advantageous embodiment, the rotary movement and the linear feed of the rotor are positively coupled, namely in that the rotor is rotatably guided by an external thread in an internal thread of the housing, so that the surfaces can now be scanned at very small distances. are the threads as fine threads with a small pitch, such fine threads are sufficient for a miniature linear feed in any case if the deflection device is a polygon with several facets, so that the interplay between a small pitch un d the geometrical arrangement of the facets can lead to a linear feed in the range of approximately 500 micrometers per scan line
Des weiteren ist es möglich, die Gewinde als Differentialgewinde mit sehr kleinem Vorschub auszugestalten, wonach sich ein Vorschub im Bereich von vorzugsweise 50 Micrometer pro Scannzeile realisieren laßt Die Zwischenschaltung einer weiteren Einrichtung zur Unter- bzw Übersetzung des linearen Vorschubs sind möglichFurthermore, it is possible to design the thread as a differential thread with a very small feed, after which a feed in the range of preferably 50 micrometers per scan line can be realized. The interposition of a further device for under- or translation of the linear feed is possible
Der zur Drehbewegung und/oder zum linearen Vorschub dienende Rotorantrieb ist in vorteilhafter Weise dem Gehäuse zugeordnet und wirkt unmittelbar zwischen dem Gehäuse und dem Rotor So konnte dieser Antrieb bspw bei fester Verbindung mit dem Gehäuse den Rotor umgreifen und im Falle einer Ausgestaltung des Rotors mit einem Außengewinde unmittelbar auf das Außengewinde im Sinne eines Spindelanatriebs zugreifen. Auch hier lassen sich weitere Antriebs- bzw. Kraftübertragungsvarianten realisieren.The rotor drive used for the rotary movement and / or for the linear feed is advantageously assigned to the housing and acts directly between the housing and the rotor. This drive could, for example, encompass the rotor with a fixed connection to the housing and in the case of a Design of the rotor with an external thread directly access the external thread in the sense of a spindle drive. Other drive and power transmission variants can also be implemented here.
Die zur Bereitstellung des Beleuchtungsstrahls dienende Lichtquelle könnte als Laserlichtquelle, insbesondere als Diodenlaser, ausgeführt sein. Dabei kann der Lichtquelle im Beleuchtungsstrahlengang ein Strahlteiler und eine Einrichtung zur Fokuskontrolle bzw. zur Brennweitenänderung des Beleuchtungsstrahls nachgeordnet sein. Sofern es sich bei der Lichtquelle um eine polyfokale Lichtquelle, d.h. um eine Lichtquelle mit unterschiedlichen Brennweiten, handelt, erübrigt sich die Vorkehrung der Fokuskontrolle, so daß sich dadurch die Vorrichtung abermals vereinfachen läßt. Entsprechend wäre dann der Lichtquelle im Beleuchtungsstrahlengang lediglich der Strahlteiler nachgeordnet und würde es sich bei dem Detektor entsprechend um einen polyfokalen Detektor handeln.The light source used to provide the illuminating beam could be designed as a laser light source, in particular as a diode laser. The light source in the illuminating beam path can be followed by a beam splitter and a device for focus control or for changing the focal length of the illuminating beam. If the light source is a polyfocal light source, i.e. is a light source with different focal lengths, the provision of focus control is unnecessary, so that the device can be simplified again. Accordingly, only the beam splitter would then be arranged downstream of the light source in the illuminating beam path and the detector would accordingly be a polyfocal detector.
Gemäß voranstehender Beschreibung ist die Sonde im wesentlichen durch das Gehäuse - in räumlicher Hinsicht - definiert. Die Einspeisung des Lichts in die Sonde und die Ableitung der durch Wechselwirkung an der Oberfläche des abzutastenden Objekts entstandenen Signale aus der Sonde erfolgt in vorteilhafter Weise über eine Lichtleitfaser.As described above, the probe is essentially defined by the housing - in spatial terms. The light is fed into the probe and the signals derived from the interaction on the surface of the object to be scanned are derived from the probe in an advantageous manner via an optical fiber.
Ebenso wäre es jedoch denkbar, daß weitere gemäß voranstehenderHowever, it would also be conceivable that others according to the above
Beschreibung außerhalb des Gehäuses angeordnete Funktionseinheiten in das Gehäuse integriert bzw. innerhalb des Gehäuses angeordnet sind. So könnte die Lichtquelle und/oder der Strahlteiler und/oder - falls erforderlich - die Fokuskontrolle und/oder der Detektor und/oder der Prozessor im Rahmen einer Miniaturisierung sämtlicher Funktionseinheiten innerhalb des Gehäuses angeordnet sein. Entsprechend handelt es sich dann um eine kompakte Vorrichtung, die lediglich mit einer entsprechenden Energieversorgung zu koppeln ist. Im Rahmen einer einfachen Ausgestaltung der Sonde ist diese jedoch auf die wesentlichen Funktionseinheiten reduziert, so daß die Sonde über eine Lichtleitfaser mit den weiterverarbeitenden Einheiten und auch mit der Lichtquelle verbunden ist.Description functional units arranged outside the housing are integrated into the housing or are arranged inside the housing. For example, the light source and / or the beam splitter and / or - if necessary - the focus control and / or the detector and / or the processor could be arranged within the housing as part of a miniaturization of all functional units. Correspondingly, it is then a compact device that only has an appropriate power supply pair is. In a simple configuration of the probe, however, it is reduced to the essential functional units, so that the probe is connected to the further processing units and also to the light source via an optical fiber.
Schließlich sei darauf hingewiesen, daß der Prozessor gleich mehrere Aufgaben übernimmt, nämlich zur Steuerung, Transformation bzw. Geometriekorrektur und Digitalisierung der Signale, zur Berechnung des dreidimensionalen Oberflachenprofils sowie zur Speicherung der Daten dient.Finally, it should be pointed out that the processor takes on several tasks, namely for controlling, transforming or correcting the geometry and digitizing the signals, for calculating the three-dimensional surface profile and for storing the data.
Es gibt nun verschiedene Möglichkeiten, die Lehre der vorliegenden Erfindung in vorteilhafter Weise auszugestalten und weiterzubilden. Dazu ist einerseits auf die dem Patentanspruch 1 nachgeordneten Ansprüche, andererseits auf die nachfolgende Erläuterung dreier Ausführungsbeispiele der Erfindung anhand der Zeichnung zu verweisen. In Verbindung mit der Erläuterung der bevorzugten Ausführungsbeispiele der Erfindung werden auch im allgemeinen bevorzugte Ausgestaltungen und Weiterbildungen der Lehre erläutert. In der Zeichnung zeigtThere are now various possibilities for advantageously designing and developing the teaching of the present invention. For this purpose, reference is made on the one hand to the claims subordinate to claim 1, and on the other hand to the following explanation of three exemplary embodiments of the invention with reference to the drawing. In connection with the explanation of the preferred exemplary embodiments of the invention, generally preferred configurations and developments of the teaching are also explained. In the drawing shows
Fig. 1 in einer schematischen Darstellung ein erstesFig. 1 in a schematic representation of a first
Ausführungsbeispiel einer erfindungsgemäßen Vorrichtung,Embodiment of a device according to the invention,
Fig. 2 in schematischer Darstellung ein zweites Ausführungsbeispiel einer erfindungsgemäßen Vorrichtung,2 shows a schematic representation of a second exemplary embodiment of a device according to the invention,
Fig. 3 in schematischer Darstellung ein drittes Ausführungsbeispiel einer erfindungsgemäßen Vorrichtung,3 shows a schematic representation of a third exemplary embodiment of a device according to the invention,
Fig. 4 in einer schematischen Darstellung die Abtastung eines Objekts nach Umlenkung des Beleuchtungsstrahls an einem Polygon, wobei das Zusammenspiel von rotierender Bewegung und linearem Vorschub des Beleuchtungsstrahls zu einer Abtastung in Zylindersegmenten führt undFig. 4 is a schematic representation of the scanning of an object after deflection of the illumination beam on a polygon, the interaction of rotating movement and linear feed of the illumination beam leads to a scan in cylinder segments and
Fig. 5 in einer schematischen Darstellung das Ergebnis der Abtastung nach Transformation bzw. Geometriekorrektur.5 shows a schematic representation of the result of the scanning after transformation or geometry correction.
Die Figuren 1 bis 3 zeigen drei unterschiedliche Ausführungsbeispiele einer erfindungsgemäßen Vorrichtung zur konfokalen Oberflächenvermessung des Oberflachenprofils 1 von Zähnen 2 in einer hier nicht dargestellten Mundhöhle.Figures 1 to 3 show three different embodiments of a device according to the invention for confocal surface measurement of the surface profile 1 of teeth 2 in an oral cavity, not shown here.
Die Vorrichtung umfaßt eine in die Körperhöhle einführbare Sonde 3, eine die Sonde 3 speisende Lichtquelle 4, einen Lichtsignale aufnehmenden Detektor 5 und einen die detektierten Signale digitalisierenden und zu einer dreidimensionalen Darstellung weiterverarbeitenden Prozessor 6.The device comprises a probe 3 that can be inserted into the body cavity, a light source 4 that feeds the probe 3, a detector 5 that receives light signals, and a processor 6 that digitizes the detected signals and processes them into a three-dimensional representation.
Erfindungsgemäß ist die Sonde 3 im Sinne eines Rotationsscanners ausgebildet, wobei die Sonde 3 eine Umlenkeinrichtung 7 mit einer Reflexionsfläche 8 umfaßt. Die Umlenkeinrichtung 7 lenkt den Beleuchtungsstrahl 9 in Richtung der zu vermessenden Oberfläche 1 , wobei die Umlenkeinrichtung 7 zum Vorschub des rotierenden Beleuchtungsstrahls 9 in einer weiteren zu scannenden Achse 10 verschiebbar ist.According to the invention, the probe 3 is designed in the sense of a rotation scanner, the probe 3 comprising a deflection device 7 with a reflection surface 8. The deflection device 7 directs the illumination beam 9 in the direction of the surface 1 to be measured, the deflection device 7 being displaceable in a further axis 10 to be scanned in order to advance the rotating illumination beam 9.
Der Detektor 5 weist eine in den Figuren nicht gezeigte Einrichtung zur sequentiellen oder simultanen Abtastung mehrerer Brennebenen sowohl hinsichtlich spekularer Reflexe als auch hinsichtlich schwachen Streulichts oder Fluoreszenzlichts der jeweiligen Brennebene auf, so daß sich die gesamte Probe bzw. der Zahn 2 dreidimensional abtasten läßt.The detector 5 has a device, not shown in the figures, for sequential or simultaneous scanning of a plurality of focal planes both with regard to specular reflections and with regard to weak scattered light or fluorescent light from the respective focal plane, so that the entire sample or tooth 2 can be scanned three-dimensionally.
Gemäß der Darstellung in den Figuren 1 , 2 und 3 ist die Umlenkeinrichtung 7 als Einfachspiegel mit einer einzigen Reflexionsfläche 8 ausgeführt. Hinsichtlich weiterer möglicher Ausgestaltungen wird zur Vermeidung von Wiederholungen auf die allgemeine Beschreibung verwiesenAs shown in FIGS. 1, 2 and 3, the deflection device 7 is designed as a single mirror with a single reflection surface 8. Regarding Further possible configurations are referred to the general description in order to avoid repetitions
Die in den Figuren 1 bis 3 gezeigten Ausfuhrungsbeispiele haben gemeinsam, daß die Sonde 3 ein Gehäuse 11 mit einem die Umlenkeinrichtung 7 aufweisenden, in dem Gehäuse 11 drehbaren Rotor 12 umfaßt Die Umlenkeinrichtung 7 bzw die Reflexionsflache 8 ist im Bereich eines Beleuchtungs- und Detektionsfensters 13 des Gehäuses 11 angeordnetThe exemplary embodiments shown in FIGS. 1 to 3 have in common that the probe 3 comprises a housing 11 with a rotor 12 having the deflection device 7 and rotatable in the housing 11. The deflection device 7 or the reflection surface 8 is in the region of an illumination and detection window 13 of the housing 11 arranged
Innerhalb des Rotors 12 ist eine den parallel zur Rotationsachse 14 verlaufenden Beleuchtungsstrahl 9 fokussierende Optik 15 angeordnetArranged within the rotor 12 is an optical system 15 which focuses the illumination beam 9 which runs parallel to the axis of rotation 14
Bei dem in Fig 1 dargestellten ersten Ausfuhrungsbeispiel ist der Rotor 12 innerhalb des Gehäuses 11 frei drehbar und linear verschiebbar gefuhrt bzw gelagert Sowohl zur Drehbewegung als auch zum linearen Vorschub des Rotors 12 ist ein gemeinsamer Rotorantrieb 16 vorgesehen, wobei dieser Antrieb über ein besonderes Übersetzungsgetriebe auf den Rotor 12 wirken kannIn the first exemplary embodiment shown in FIG. 1, the rotor 12 is guided or mounted freely rotatably and linearly displaceably within the housing 11. A common rotor drive 16 is provided both for the rotary movement and for the linear feed of the rotor 12, this drive being provided via a special transmission gear the rotor 12 can act
Bei den in den Figuren 2 und 3 dargestellten Ausfuhrungsbeispielen ist der Rotor 12 mit einem Außengewinde 17 in einem Innengewinde 18 des Gehäuses 11 drehbar gefuhrt Dabei ist die Rotationsbewegung des Rotors 12 mit dessen linearen Vorschub zwangsgekoppelt Die Gewinde 17, 18 sind als Feingewinde mit geringer Steigung ausgeführt, wobei auch dort lediglich ein Rotorantrieb 16 zur Drehung des Rotors und somit auch - zwangsweise - zum linearen Vorschub des Rotors 12 vorgesehen ist Bei sämtlichen hier gezeigten Ausfuhrungsbeispielen ist der Rotorantrieb 16 unmittelbar dem Gehäuse 11 zugeordnet und wirkt der Rotorantrieb 16 somit unmittelbar zwischen dem Gehäuse 11 und dem Rotor 12 Bei den in den Figuren 1 und 2 dargestellten Ausfuhrungsbeispielen ist die Lichtquelle 4 als Laserlichtquelle ausgeführt Entsprechend ist der Lichtquelle 4 im Beleuchtungsstrahlengang 19 ein Strahlteiler 20 und eine Einrichtung 21 zur Fokuskontrolle bzw Brennweitenanderung nachgeordnetIn the exemplary embodiments shown in FIGS. 2 and 3, the rotor 12 is rotatably guided with an external thread 17 in an internal thread 18 of the housing 11. The rotational movement of the rotor 12 is positively coupled with its linear feed. The threads 17, 18 are fine threads with a small pitch In this case, only one rotor drive 16 is provided for rotating the rotor and thus - forcibly - for linear feed of the rotor 12. In all the exemplary embodiments shown here, the rotor drive 16 is directly assigned to the housing 11 and the rotor drive 16 thus acts directly between the Housing 11 and the rotor 12 In the exemplary embodiments shown in FIGS. 1 and 2, the light source 4 is designed as a laser light source. A beam splitter 20 and a device 21 for focus control or focal length change are arranged downstream of the light source 4 in the illumination beam path 19
Bei dem in Fig 3 dargestellten Ausfuhrungsbeispiel handelt es sich bei der Lichtquelle 4 um eine polyfokale Lichtquelle Hier ist der Lichtquelle 4 im Beleuchtungsstrahlengang 19 lediglich ein Strahlteiler 20 nachgeordnet, wobei es sich bei dem Detektor 5 um einen polyfokalen Detektor handelt Eine Einrichtung zur Fokuskontrolle bzw Brennweitenanderung ist hier nicht erforderlichIn the exemplary embodiment shown in FIG. 3, the light source 4 is a polyfocal light source. Here, the light source 4 in the illuminating beam path 19 is only followed by a beam splitter 20, the detector 5 being a polyfocal detector. A device for focus control or focal length change is not necessary here
Bei dem in den Figuren gezeigten Ausfuhrungsbeispielen erfolgt die Einspeisung des Lichts in die Sonde 3 und die Ableitung des Lichts aus der Sonde 3 über eine in den Figuren nicht gezeigte Lichtleitfaser, die als flexible Verbindung zwischen der Sonde 3 und der Lichtquelle 4 einerseits und den Auswerteeinheiten andererseits und somit zur Einspeisung des Lichts sowie zur Ableitung der durch Wechselwirkung des Lichts an der Oberflache des zu scannenden Zahnes 2 entstehenden Signale dientIn the exemplary embodiments shown in the figures, the light is fed into the probe 3 and the light is derived from the probe 3 via an optical fiber, not shown in the figures, which acts as a flexible connection between the probe 3 and the light source 4 on the one hand and the evaluation units on the other hand and thus for feeding the light and for deriving the signals resulting from the interaction of the light on the surface of the tooth 2 to be scanned
Die Figuren 4 und 5 zeigen eine schematische Darstellung des Scannvorganges bei rotierendem Lichtstrahl und linearem Vorschub, wobei dort als Umlenkeinrichtung 7 ein Polygon 22 vorgesehen ist Der Beleuchtungsstrahl 9 wird an einer Facette 23 des Polygons 22 reflektiert und gelangt von dort auf das Oberflachenprofil 1 des Zahnes 2 Entlang der in Fig 4 angedeuteten Zylindersegmente 24 wird das Oberflachenprofil 1 - Zylindersegment für Zylindersegment - gescannt, wobei sich unterschiedliche Brennebenen durch sequentielle oder simultane Abtastung sowohl hinsichtlich spekularer Reflexe als auch hinsichtlich schwachen Streulichts oder Fluoressenzhchts der jeweiligen Brennbene ergeben.FIGS. 4 and 5 show a schematic representation of the scanning process with a rotating light beam and linear feed, a polygon 22 being provided there as deflection device 7. The illumination beam 9 is reflected on a facet 23 of the polygon 22 and from there reaches the surface profile 1 of the tooth 2 Along the cylinder segments 24 indicated in FIG. 4, the surface profile 1 - cylinder segment for cylinder segment - is scanned, different focal planes being obtained by sequential or simultaneous scanning both with regard to specular reflections and also with regard to weak scattered light or fluorescent light of the respective focal plane.
Gemäß der schematischen Darstellung in Fig. 5 werden die auf Zylindersegmente bezogenen Abtastwerte im Rahmen einer Geometriekorrektur auf eine "echte" Fokalebene transformiert, so daß sich aus den Abtastungen eine unverzerrte dreidimensionale Darstellung des Oberflachenprofils 1 bzw. des Zahnes 2 berechnen läßt.According to the schematic representation in FIG. 5, the sample values relating to cylinder segments are transformed to a "real" focal plane as part of a geometry correction, so that an undistorted three-dimensional representation of the surface profile 1 or tooth 2 can be calculated from the samples.
Schließlich sei darauf hingewiesen, daß die voranstehend erörterten Ausführungsbeispiele lediglich zur Verdeutlichung der hier konkret beanspruchten Lehre dienen, diese jedoch nicht auf die Ausführungsbeispiele einschränken. Finally, it should be pointed out that the exemplary embodiments discussed above serve only to clarify the teaching specifically claimed here, but do not restrict them to the exemplary embodiments.
BezugszeichenlisteReference list
1 Oberflächenprofil, Oberfläche1 surface profile, surface
2 Zahn2 tooth
3 Sonde3 probe
4 Lichtquelle4 light source
5 Detektor5 detector
6 Prozessor6 processor
7 Umlenkeinrichtung7 deflection device
8 Reflexionsfläche8 reflective surface
9 Beleuchtungsstrahl9 illuminating beam
10 Achse (zur linearen Bewegung des Rotors)10 axis (for linear movement of the rotor)
11 Gehäuse11 housing
12 Rotor12 rotor
13 Beleuchtungs- und Detektionsfenster13 lighting and detection windows
14 Rotationsachse (des Rotors)14 axis of rotation (of the rotor)
15 Optik15 optics
16 Rotorantrieb16 rotor drive
17 Außengewinde (des Rotors) 18 Innengewinde (des Gehäuses)17 external thread (of the rotor) 18 internal thread (of the housing)
19 Beleuchtungsstrahlengang19 illumination beam path
20 Strahlteiler20 beam splitters
21 Einrichtung zur Fokuskontrolle21 Focus control device
22 Polygon22 polygon
23 Facette (des Polygons)23 facet (of the polygon)
24 Zylindersegment (der Abtastung) 24 cylinder segment (the scanning)

Claims

Patentansprüche claims
1. Vorrichtung zur konfokalen Oberflächenvermessung in Körperhöhlen, insbesondere zur Vermessung des Oberflachenprofils (1) von Zähnen (2) in der Mundhöhle, mit einer in die Körperhöhle einführbaren Sonde (3), einer die Sonde (3) speisenden Lichtquelle (4), einem Lichtsignale aufnehmenden Detektor (5) und einem die detektierten Signale digitalisierenden und zu einer dreidimensionalen Darstellung weiterverarbeitenden Prozessor (6), d a d u r c h g e k e n n z e i c h n e t, daß die Sonde (3) im Sinne eines Rotationsscanners mit einer Umlenkeinrichtung (7) ausgebildet ist, die den Beleuchtungsstrahl (9) in Richtung der zu vermessenden Oberfläche (1) lenkt, daß die1. Device for confocal surface measurement in body cavities, in particular for measuring the surface profile (1) of teeth (2) in the oral cavity, with a probe (3) that can be inserted into the body cavity, a light source (4) that feeds the probe (3), one Detector (5) receiving light signals and a processor (6) digitizing the detected signals and further processing to a three-dimensional representation, characterized in that the probe (3) is designed in the sense of a rotation scanner with a deflection device (7) which detects the illumination beam (9). directs in the direction of the surface to be measured (1) that the
Umlenkeinrichtung (7) zum Vorschub des rotierenden Beleuchtungsstrahls (9) in einer weiteren zu scannenden Achse (10) verschiebbar ist und daß vorzugsweise der Detektor (5) eine Einrichtung zur sequentiellen oder simultanen Abtastung mehrerer Brennebenen sowohl hinsichtlich spekularer Reflexe als auch hinsichtlich schwachen Streulichts oder Fluoreszenzlichts der jeweiligen Brennebene umfaßt.Deflection device (7) for advancing the rotating illumination beam (9) can be displaced in a further axis (10) to be scanned and that preferably the detector (5) is a device for sequential or simultaneous scanning of several focal planes both with regard to specular reflections and with regard to weak scattered light or Fluorescent light of the respective focal plane includes.
2. Vorrichtung nach Anspruch 1 , dadurch gekennzeichnet, daß die Umlenkeinrichtung (7) als Einfachspiegel ausgeführt ist.2. Device according to claim 1, characterized in that the deflection device (7) is designed as a single mirror.
3. Vorrichtung nach Anspruch 1 , dadurch gekennzeichnet, daß die Umlenkeinrichtung (7) als Prisma ausgeführt ist.3. Device according to claim 1, characterized in that the deflection device (7) is designed as a prism.
4. Vorrichtung nach Anspruch 1 , dadurch gekennzeichnet, daß die Umlenkeinrichtung (7) als Polygon (22) mit mehreren Facetten (23) zur Bildung mehrerer Strahlführungen ausgebildet ist. 4. The device according to claim 1, characterized in that the deflection device (7) is designed as a polygon (22) with a plurality of facets (23) to form a plurality of beam guides.
5. Vorrichtung nach einem der Ansprüche 1 bis 4, dadurch gekennzeichnet, daß die Sonde (3) ein Gehäuse (11) mit einem die Umlenkeinrichtung (7) aufweisenden, in dem Gehäuse (11) drehbaren Rotor (12) umfaßt und daß die Umlenkeinrichtung (7) im Bereich eines Beleuchtungs- und Detektionsfensters (13) des Gehäuses (11) angeordnet ist.5. Device according to one of claims 1 to 4, characterized in that the probe (3) comprises a housing (11) with a deflecting device (7) having in the housing (11) rotatable rotor (12) and that the deflecting device (7) is arranged in the region of an illumination and detection window (13) of the housing (11).
6. Vorrichtung nach einem der Ansprüche 1 bis 4, dadurch gekennzeichnet, daß innerhalb des Rotors (12) eine den parallel zur Rotationsachse (14) verlaufenden Beleuchtungsstrahl (9) fokussierende Optik (15) angeordnet ist.6. Device according to one of claims 1 to 4, characterized in that within the rotor (12) is arranged parallel to the axis of rotation (14) extending the illumination beam (9) focusing optics (15).
7. Vorrichtung nach Anspruch 5 oder 6, dadurch gekennzeichnet, daß der Rotor (12) innerhalb des Gehäuses (11) frei drehbar und linear verschiebbar geführt bzw. gelagert ist und daß ein Rotorantrieb (16) zur Drehbewegung und zum linearen Vorschub des Rotors (12) vorgesehen ist.7. The device according to claim 5 or 6, characterized in that the rotor (12) within the housing (11) is freely rotatably and linearly guided and mounted and that a rotor drive (16) for rotary movement and for linear feed of the rotor ( 12) is provided.
8. Vorrichtung nach Anspruch 7, dadurch gekennzeichnet, daß für die Drehbewegung und für den linearen Vorschub des Rotors (12) zwei unabhängige Antriebe vorgesehen sind.8. The device according to claim 7, characterized in that two independent drives are provided for the rotary movement and for the linear feed of the rotor (12).
9. Vorrichtung nach Anspruch 5 oder 6, dadurch gekennzeichnet, daß der Rotor (12) mit einem Außengewinde (17) in einem Innengewinde (18) des Gehäuses (11) drehbar geführt ist, so daß die Rotationsbewegung des Rotors (12) mit dessen Vorschub zwangsgekoppelt ist.9. Apparatus according to claim 5 or 6, characterized in that the rotor (12) with an external thread (17) in an internal thread (18) of the housing (11) is rotatably guided so that the rotational movement of the rotor (12) with it Feed is positively coupled.
10. Vorrichtung nach Anspruch 9, dadurch gekennzeichnet, daß die Gewinde (17, 18) als Feingewinde mit geringer Steigung ausgeführt sind.10. The device according to claim 9, characterized in that the threads (17, 18) are designed as fine threads with a small pitch.
11. Vorrichtung nach Anspruch 9, dadurch gekennzeichnet, daß die Gewinde (18, 18) als Differentialgewinde mit sehr kleinem Vorschub, insbesondere im Bereich von vorzugsweise 50 Mikrometer pro Scanzeile, ausgeführt sind11. The device according to claim 9, characterized in that the thread (18, 18) as a differential thread with a very small feed, in particular in the range of preferably 50 micrometers per scan line
12 Vorrichtung nach einem der Ansprüche 7 bis 11 , dadurch gekennzeichnet, daß der Rotorantrieb (16) unmittelbar dem Gehäuse (11) zugeordnet ist12 Device according to one of claims 7 to 11, characterized in that the rotor drive (16) is assigned directly to the housing (11)
13 Vorrichtung nach einem der Ansprüche 1 bis 12, dadurch gekennzeichnet, daß es sich bei der Lichtquelle (4) um eine Laserlichtquelle, insbesondere um einen Diodenlaser, handelt13 Device according to one of claims 1 to 12, characterized in that the light source (4) is a laser light source, in particular a diode laser
14 Vorrichtung nach einem der Ansprüche 1 bis 12, dadurch gekennzeichnet, daß der Lichtquelle (4) im Beleuchtungsstrahlengang (19) ein Strahlteiler (20) und eine Einrichtung zur Fokuskontrolle bzw zur Brennweitenanderung nachgeordnet ist14 Device according to one of claims 1 to 12, characterized in that the light source (4) in the illuminating beam path (19) is followed by a beam splitter (20) and a device for focus control or for changing the focal length
15 Vorrichtung nach einem der Ansprüche 1 bis 12, dadurch gekennzeichnet, daß es sich bei der Lichtquelle (4) um eine polyfokale Lichtquelle handelt15 Device according to one of claims 1 to 12, characterized in that the light source (4) is a polyfocal light source
16 Vorrichtung nach Anspruch 15, dadurch gekennzeichnet, daß der Lichtquelle im Beleuchtungsstrahlengang (19) ein Strahlteiler (20) nachgeordnet ist und daß es sich bei dem Detektor (5) um einen polyfokalen Detektor handelt16 Device according to claim 15, characterized in that the light source in the illuminating beam path (19) is followed by a beam splitter (20) and that the detector (5) is a polyfocal detector
17 Vorrichtung nach einem der Ansprüche 1 bis 16, dadurch gekennzeichnet, daß die Einspeisung des Lichts in die Sonde (3) und die Ableitung des Signals aus der Sonde (3) über eine Lichtleitfaser erfolgt 17 Device according to one of claims 1 to 16, characterized in that the light is fed into the probe (3) and the signal is derived from the probe (3) via an optical fiber
18. Vorrichtung nach einem der Ansprüche 1 bis 17, dadurch gekennzeichnet, daß die Lichtquelle (4) und/oder der Strahlteiler (20) und/oder die Fokuskontrolle und/oder der Detektor (5) und/oder der Prozessor (6) innerhalb des Gehäuses (11) angeordnet sind.18. Device according to one of claims 1 to 17, characterized in that the light source (4) and / or the beam splitter (20) and / or the focus control and / or the detector (5) and / or the processor (6) within of the housing (11) are arranged.
19. Vorrichtung nach einem der Ansprüche 1 bis 18, dadurch gekennzeichnet, daß der Prozessor (6) zur Steuerung, Transformation bzw. Geometriekorrektur und Digitalisierung der Signale, zur Berechnung des dreidimensionalen Oberflachenprofils (1) sowie zur Speicherung der Daten dient. 19. Device according to one of claims 1 to 18, characterized in that the processor (6) serves for control, transformation or geometry correction and digitization of the signals, for calculating the three-dimensional surface profile (1) and for storing the data.
PCT/DE1997/002240 1996-10-01 1997-09-30 Confocal surface-measuring device WO1998014132A1 (en)

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DE59709932T DE59709932D1 (en) 1996-10-01 1997-09-30 DEVICE FOR CONFOCAL SURFACE MEASUREMENT
EP97911121A EP1006932B1 (en) 1996-10-01 1997-09-30 Confocal surface-measuring device
JP51614598A JP2001510357A (en) 1996-10-01 1997-09-30 Equipment for confocal surface measurement
US09/147,995 US6263234B1 (en) 1996-10-01 1997-09-30 Confocal surface-measuring device

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