WO1998002926A8 - Capteur piezo-electrique et procede d'utilisation - Google Patents
Capteur piezo-electrique et procede d'utilisationInfo
- Publication number
- WO1998002926A8 WO1998002926A8 PCT/US1997/012165 US9712165W WO9802926A8 WO 1998002926 A8 WO1998002926 A8 WO 1998002926A8 US 9712165 W US9712165 W US 9712165W WO 9802926 A8 WO9802926 A8 WO 9802926A8
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- fluid
- piezoelectric crystal
- resonant frequency
- trace
- fluid component
- Prior art date
Links
- 239000012530 fluid Substances 0.000 abstract 12
- 239000013078 crystal Substances 0.000 abstract 6
- 239000011248 coating agent Substances 0.000 abstract 3
- 238000000576 coating method Methods 0.000 abstract 3
- 230000005684 electric field Effects 0.000 abstract 3
- 230000003993 interaction Effects 0.000 abstract 3
- 239000007787 solid Substances 0.000 abstract 3
- 239000007789 gas Substances 0.000 abstract 2
- 239000000463 material Substances 0.000 abstract 2
- 230000015572 biosynthetic process Effects 0.000 abstract 1
- 239000000356 contaminant Substances 0.000 abstract 1
- 238000001514 detection method Methods 0.000 abstract 1
- 238000005203 dry scrubbing Methods 0.000 abstract 1
- 230000007613 environmental effect Effects 0.000 abstract 1
- 231100001261 hazardous Toxicity 0.000 abstract 1
- 238000004519 manufacturing process Methods 0.000 abstract 1
- 238000012544 monitoring process Methods 0.000 abstract 1
- 238000005070 sampling Methods 0.000 abstract 1
- 239000004065 semiconductor Substances 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/02—Analysing fluids
- G01N29/036—Analysing fluids by measuring frequency or resonance of acoustic waves
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/02—Indexing codes associated with the analysed material
- G01N2291/022—Liquids
- G01N2291/0222—Binary liquids
Landscapes
- Physics & Mathematics (AREA)
- Biochemistry (AREA)
- General Physics & Mathematics (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Acoustics & Sound (AREA)
- General Health & Medical Sciences (AREA)
- Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
- Sampling And Sample Adjustment (AREA)
Abstract
L'invention concerne un capteur destiné à la détection d'un composant fluide à l'état de traces dans un environnement fluide, comprenant: un cristal piézo-électrique doté d'une fréquence résonante fondamentale en réaction à l'application d'un champ électrique oscillant; un revêtement sur le cristal piézo-électrique d'un capteur sujet à réaction avec le composant fluide à l'état de traces pour donner un produit d'interaction solide; un dispositif d'application d'un champ électrique oscillant au cristal piézo-électrique qui génère à partir de là une fréquence résonante de sortie; un dispositif permettant: (i) d'échantillonner la fréquence résonante de sortie du cristal piézo-électrique pendant que le champ électrique oscillant y est appliqué, (ii) de déterminer la modification de la fréquence résonante à partir de la fréquence résonante fondamentale intervenant lors de la formation du produit d'interaction solide lorsque le capteur interagit avec le composant fluide à l'état de traces dans l'environnement fluide, et (iii) de générer un signal de sortie indiquant la présence du composant fluide à l'état de traces dans l'environnement; et un dispositif permettant de faire couler un fluide de l'environnement fluide sur le revêtement du cristal piézo-électrique, de façon que lorsque le composant fluide à l'état de traces est présent, il réagisse avec le revêtement pour former le produit d'interaction solide; dans le capteur, le cristal piézo-éectrique recouvert d'un revêtement présente une vitesse de réponse en fréquence au composant fluide à l'état de traces d'environ 0,001 à environ 1000 milliHertz/min./(partie par million du composant fluide). Le capteur peut servir à détecter une crevaison lors de l'épuration à sec des gaz dans la fabrication de semi-conducteurs, ainsi que des espèces gazeuses contaminantes et dangereuses dans des environnements fluides ambiants, et peut donc être utilisé dans la surveillance de l'environnement.
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US08/678,572 | 1996-07-12 | ||
| US08/679,258 | 1996-07-12 | ||
| US08/679,258 US5817921A (en) | 1996-07-12 | 1996-07-12 | Piezoelectric enviromental fluid monitoring assembly and method |
| US08/678,572 US5977687A (en) | 1996-07-12 | 1996-07-12 | Piezoelectric end point sensor for detection of breakthrough of fluid, and fluid processing apparatus comprising same |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| WO1998002926A1 WO1998002926A1 (fr) | 1998-01-22 |
| WO1998002926A8 true WO1998002926A8 (fr) | 2001-06-21 |
Family
ID=27102049
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PCT/US1997/012165 WO1998002926A1 (fr) | 1996-07-12 | 1997-07-11 | Capteur piezo-electrique et procede d'utilisation |
Country Status (1)
| Country | Link |
|---|---|
| WO (1) | WO1998002926A1 (fr) |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0038637A1 (fr) * | 1980-04-18 | 1981-10-28 | Secretary of State for Social Services in Her Britannic Majesty's Gov. of the U.K. of Great Britain and Northern Ireland | Méthode et appareil pour détecter la présence d'une impureté dans un courant gazeux |
| US5151395A (en) * | 1987-03-24 | 1992-09-29 | Novapure Corporation | Bulk gas sorption and apparatus, gas containment/treatment system comprising same, and sorbent composition therefor |
| US5138869A (en) * | 1990-12-14 | 1992-08-18 | Novapure Corporation | In-line detector system for real-time determination of impurity concentration in a flowing gas stream |
| US5065140A (en) * | 1991-03-08 | 1991-11-12 | Bell Communications Research, Inc. | Early warning reactive gas detection system |
-
1997
- 1997-07-11 WO PCT/US1997/012165 patent/WO1998002926A1/fr active Application Filing
Also Published As
| Publication number | Publication date |
|---|---|
| WO1998002926A1 (fr) | 1998-01-22 |
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